Updated on 2022/05/25

写真a

 
UEDA, Toshitsugu
 
Affiliation
Faculty of Science and Engineering
Job title
Professor Emeritus

Education

  •  
    -
    1969

    Shinshu University   Faculty of Engineering  

  •  
    -
    1969

    Shinshu University   Faculty of Engineering   Electrical Engineering  

Degree

  • Tokyou Tnstitute of Technology   Doctor of Engeneering

Research Experience

  • 2003
    -
     

    - Professor, Graduate School of IPS, Waseda

  • 1971
    -
    2003

    General Manager, R&D Department, Tokogawa

  • 2002
    -
     

    - GHz帯域用イーサネットを目指した600MHz帯水晶VCXOの

  • 1994
    -
    2002

    チューナブルレーザーによる1ppb不純物ガスの高感度計測、

  • 1993
    -
     

    高次脳機能測定のための多チャンネルSQUIDによるMSI

  • 1991
    -
    1993

    次期支援戦闘機FS-X(F-16の国産化)コックピットの

  • 1990
    -
    1991

    高速光技術と水晶マイクロマシニング技術を応用した

  • 1990
    -
     

    半導体レーザーの波長安定化・狭帯域化・可変化の研究

  • 1985
    -
    1990

    機械振動子を利用した力センタの開発

  • 1978
    -
    1985

    渦電流、磁歪超音波を利用した精密位置検出器の研究開発

  • 1971
    -
    1978

    アナログ電子回路の研究を中心に行い、ディジタル電圧計、

  •  
     
     

    基盤技術研究

  •  
     
     

    数十nmまでのパーティクル計測の研究開発

  •  
     
     

    シールド等の研究開発

  •  
     
     

    (Magnetic Resonance Imaging)との協調性、超伝導

  •  
     
     

    (Magnetic Source Imaging)の応用と機能MRI

  •  
     
     

    システム開発、企画

  •  
     
     

    (液晶ディスプレイ)化の開発と対応したナビゲーション

  •  
     
     

    計装、特にヘッドダウンディスプレイのグラスコックピット

  •  
     
     

    高速・高周波LSI測定技術の研究開発

  •  
     
     

    データアンプ等の高精度高速増幅器の研究開発

  •  
     
     

    University

  •  
     
     

    Electric Corporation

▼display all

Professional Memberships

  •  
     
     

    計測自動制御学会

  •  
     
     

    電気学会

  •  
     
     

    The Society of Insrument and Control

  •  
     
     

    The Institute of Electrical Engineers of Japan

 

Research Areas

  • Nano/micro-systems

  • Electron device and electronic equipment

  • Biomaterials

  • Nanomaterials

  • Biomedical engineering

Research Interests

  • 変位

  • 圧力

  • 温度

  • LIBS レーザーブレイクダウン

  • 分光

  • チューナブルレーザー

  • パルスレーザー

  • VCXO

  • ナノ加工

  • 水晶

  • 生体情報・計測

  • 医用光・熱工学

  • マイクロファブリケーション

  • マイクロメカニクス

  • 波動利用工学

  • センシング

  • レーザー技術

  • 水晶

  • マイクロ・ナノマシニング

  • センサ

  • Laser Technology

  • Quartz Crystal

  • Micro/Nano-machining

  • sensor

▼display all

Books and Other Publications

  • Detection of Cesium from Pollucite using Laser-Induced Breakdown Spectroscopy

    Proceedings of 8th International Conference Mechatronic Systems and Materials, pp.198, Bialystok, Poland  2012

  • Development of The Quartz Resonators with Quasi-Convex Structure

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000087  2012

  • A New Solution of Anisotropic 3D Vertex Etching Simulation for Quartz Crystal

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000091  2012

  • Size Optimization for Miniature High Frequency Quartz Resonator using Finite Element Method

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000081  2012

  • Ringing reduction for radially restored images

    Proceedings of Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) Monterey, JTu5A.24.pdf, California  2012

  • Thermomechanical Reliability Analysis and Optimization for MEMS Packages With AuSn Solder

    2012 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering (ICQR2MSE) pp. 794-797, 15-18  2012

  • Technology and applications using laser-induced electro-avalanche fluorescence and laser induced incandescence technique

    Proceedings of China-Japan Joint Symposium on Sensing Technology, pp.14, Southeast University, Nanjing, China, April 22-25  2012

  • A geometry solution for 3D anisotropic etching simulation

    Proceedings of China-Japan Joint Symposium on Sensing Technology, pp.12, Southeast University, Nanjing, China, April 22-25  2012

  • Real scene capturing and deblurring for spherical single lens camera

    Proceedings of China-Japan Joint Symposium on Sensing Technology, pp.3, Southeast University, Nanjing, China, April 22-25  2012

  • Analysis of edge and corner bonded PSvfBGA reliability under thermal cycling conditions by experimental and finite element methods

    Microelectronics Reliability, Vol. 52, No.9-11, pp. 1870-1875  2012

  • Optimization of Electrode Structure for a High-Frequency AT-cut Quartz Resonator Using FEM

    IEEJ Transactions on Sensors and Micromachines, Vol. 132 (2012) No. 9 pp. 275-281  2012

  • Thermo-mechanical reliability optimization of MEMS-based quartz resonator using validated finite element model

    Microelectronics Reliability, July, (2012) (http://dx.doi.org/10.1016/j.microrel.  2012

  • NIR Spectrum Analysis of Natural Gas Based on Hollow-Core Photonic Bandgap Fiber

    IEEE sensors Journal, Vol. 12, No. 7, pp. 2362-2367  2012

  • High-Sensitivity Fiber-Optic Fabry-Perot Interferometer Temperature Sensor

    Jpn. J. Appl. Phys., Vol. 51, No. 6, pp. 06FL10 1-4  2012

  • Vibration Analysis of Original Shape Quartz Resonator for High Quality Factor Realization

    Jpn. J. Appl. Phys., Vol.51, No.6, pp. 06FL02 1-5  2012

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills

    Jpn. J. Appl. Phys., Vol.51, No.5, pp. 05EE04 1-8  2012

  • Board-Level Solder Joint Reliability of Edge- and Corner-Bonded Lead-Free Chip Scale Package Assemblies Subjected to Thermal Cycling

    Jpn. J. Appl. Phys., Vol.51, No.4, pp. 04DB08 1-10  2012

  • Development of Semi-Quantitative Analytical System for Metal Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    International Journal on Smart Sensing and Intelligent Systems Vol. 5, No. 1, pp215-232  2012

  • Fiber-Optic Temperature Sensor Based on Difference of Thermal Expansion Coefficient between Fused Silica and Metallic Materials

    IEEE Photonics Journal, Vol. 4, No. 1. pp. 155-162  2012

  • 遮光マスクを用いた歯科治療用根管内観察システムの内部反射光の低減

    平成24年第65回電気関係学会九州支部連合大会論文集, p.45  2012

  • 擬似コンベックス形状を有した水晶振動子の凸部の高さとQ値の関係

    平成24年第65回電気関係学会九州支部連合大会論文集, p. 44  2012

  • 異なる温度におけるATカット水晶振動子の有限要素法による寸法最適化

    平成24年第65回電気関係学会九州支部連合大会論文集, p. 43  2012

  • コンベックス振動子を模擬した新形状の高安定振動子

    平成24年電気学会全国大会, pp. , (3-124),  2012

  • 傾斜角センサの演算表示プログラム開発

    平成24年電気学会全国大会, pp. , (3-122)  2012

  • 二軸容量型傾斜角センサのプロセスの開発と評価

    平成24年電気学会全国大会, pp. , (3-121)  2012

  • MEMSパッケージの気密性評価法の開発

    平成24年電気学会全国大会, pp. , (3-131),  2012

  • Detection of Cesium from Pollucite using Laser-Induced Breakdown Spectroscopy

    Proceedings of 8th International Conference Mechatronic Systems and Materials, pp.198, Bialystok, Poland  2012

  • Development of The Quartz Resonators with Quasi-Convex Structure

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000087  2012

  • A New Solution of Anisotropic 3D Vertex Etching Simulation for Quartz Crystal

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000091  2012

  • Size Optimization for Miniature High Frequency Quartz Resonator using Finite Element Method

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000081  2012

  • Ringing reduction for radially restored images

    Proceedings of Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) Monterey, JTu5A.24.pdf, California  2012

  • Thermomechanical Reliability Analysis and Optimization for MEMS Packages With AuSn Solder

    2012 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering (ICQR2MSE) pp. 794-797, 15-18  2012

  • Technology and applications using laser-induced electro-avalanche fluorescence and laser induced incandescence technique

    Proceedings of China-Japan Joint Symposium on Sensing Technology, pp.14, Southeast University, Nanjing, China, April 22-25  2012

  • A geometry solution for 3D anisotropic etching simulation

    Proceedings of China-Japan Joint Symposium on Sensing Technology, pp.12, Southeast University, Nanjing, China, April 22-25  2012

  • Real scene capturing and deblurring for spherical single lens camera

    Proceedings of China-Japan Joint Symposium on Sensing Technology, pp.3, Southeast University, Nanjing, China, April 22-25  2012

  • Analysis of edge and corner bonded PSvfBGA reliability under thermal cycling conditions by experimental and finite element methods

    Microelectronics Reliability, Vol. 52, No.9-11, pp. 1870-1875  2012

  • Optimization of Electrode Structure for a High-Frequency AT-cut Quartz Resonator Using FEM

    IEEJ Transactions on Sensors and Micromachines, Vol. 132 (2012) No. 9 pp. 275-281  2012

  • Thermo-mechanical reliability optimization of MEMS-based quartz resonator using validated finite element model

    Microelectronics Reliability, July, (2012) (http://dx.doi.org/10.1016/j.microrel.  2012

  • NIR Spectrum Analysis of Natural Gas Based on Hollow-Core Photonic Bandgap Fiber

    IEEE sensors Journal, Vol. 12, No. 7, pp. 2362-2367  2012

  • High-Sensitivity Fiber-Optic Fabry-Perot Interferometer Temperature Sensor

    Jpn. J. Appl. Phys., Vol. 51, No. 6, pp. 06FL10 1-4  2012

  • Vibration Analysis of Original Shape Quartz Resonator for High Quality Factor Realization

    Jpn. J. Appl. Phys., Vol.51, No.6, pp. 06FL02 1-5  2012

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills

    Jpn. J. Appl. Phys., Vol.51, No.5, pp. 05EE04 1-8  2012

  • Board-Level Solder Joint Reliability of Edge- and Corner-Bonded Lead-Free Chip Scale Package Assemblies Subjected to Thermal Cycling

    Jpn. J. Appl. Phys., Vol.51, No.4, pp. 04DB08 1-10  2012

  • Development of Semi-Quantitative Analytical System for Metal Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    International Journal on Smart Sensing and Intelligent Systems Vol. 5, No. 1, pp215-232  2012

  • Fiber-Optic Temperature Sensor Based on Difference of Thermal Expansion Coefficient between Fused Silica and Metallic Materials

    IEEE Photonics Journal, Vol. 4, No. 1. pp. 155-162  2012

  • Detection of Cesium from Pollucite using Laser-Induced Breakdown Spectroscopy

    Proceedings of 8th International Conference Mechatronic Systems and Materials, pp.198, Bialystok, Poland  2012

  • Development of The Quartz Resonators with Quasi-Convex Structure

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000087  2012

  • A New Solution of Anisotropic 3D Vertex Etching Simulation for Quartz Crystal

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000091  2012

  • Size Optimization for Miniature High Frequency Quartz Resonator using Finite Element Method

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000081  2012

  • Ringing reduction for radially restored images

    Proceedings of Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) Monterey, JTu5A.24.pdf, California  2012

  • Thermomechanical Reliability Analysis and Optimization for MEMS Packages With AuSn Solder

    2012 International Conference on Quality, Reliability, Risk, Maintenance, and Safety Engineering (ICQR2MSE) pp. 794-797, 15-18  2012

  • Technology and applications using laser-induced electro-avalanche fluorescence and laser induced incandescence technique

    Proceedings of China-Japan Joint Symposium on Sensing Technology, pp.14, Southeast University, Nanjing, China, April 22-25  2012

  • A geometry solution for 3D anisotropic etching simulation

    Proceedings of China-Japan Joint Symposium on Sensing Technology, pp.12, Southeast University, Nanjing, China, April 22-25  2012

  • Real scene capturing and deblurring for spherical single lens camera

    Proceedings of China-Japan Joint Symposium on Sensing Technology, pp.3, Southeast University, Nanjing, China, April 22-25  2012

  • Analysis of edge and corner bonded PSvfBGA reliability under thermal cycling conditions by experimental and finite element methods

    Microelectronics Reliability, Vol. 52, No.9-11, pp. 1870-1875  2012

  • Optimization of Electrode Structure for a High-Frequency AT-cut Quartz Resonator Using FEM

    IEEJ Transactions on Sensors and Micromachines, Vol. 132 (2012) No. 9 pp. 275-281  2012

  • Thermo-mechanical reliability optimization of MEMS-based quartz resonator using validated finite element model

    Microelectronics Reliability, July, (2012) (http://dx.doi.org/10.1016/j.microrel.  2012

  • NIR Spectrum Analysis of Natural Gas Based on Hollow-Core Photonic Bandgap Fiber

    IEEE sensors Journal, Vol. 12, No. 7, pp. 2362-2367  2012

  • High-Sensitivity Fiber-Optic Fabry-Perot Interferometer Temperature Sensor

    Jpn. J. Appl. Phys., Vol. 51, No. 6, pp. 06FL10 1-4  2012

  • Vibration Analysis of Original Shape Quartz Resonator for High Quality Factor Realization

    Jpn. J. Appl. Phys., Vol.51, No.6, pp. 06FL02 1-5  2012

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills

    Jpn. J. Appl. Phys., Vol.51, No.5, pp. 05EE04 1-8  2012

  • Board-Level Solder Joint Reliability of Edge- and Corner-Bonded Lead-Free Chip Scale Package Assemblies Subjected to Thermal Cycling

    Jpn. J. Appl. Phys., Vol.51, No.4, pp. 04DB08 1-10  2012

  • Development of Semi-Quantitative Analytical System for Metal Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    International Journal on Smart Sensing and Intelligent Systems Vol. 5, No. 1, pp215-232  2012

  • Fiber-Optic Temperature Sensor Based on Difference of Thermal Expansion Coefficient between Fused Silica and Metallic Materials

    IEEE Photonics Journal, Vol. 4, No. 1. pp. 155-162  2012

  • Effects of Reworkable Edge and Corner Bond Adhesives on the Thermal Fatigue Performance of Lead-Free Chip Scale Package Assemblies

    Proceedings of 13th International Conference on. Electronics Materials and Packaging, pp. EMAP2011-20 (1-10)  2011

  • Investigation on the Optimum Sampling Rate of Strain Measurement during Printed Circuit Board (PCB) System Assembly

    Proceedings of the 13th Electronics Packaging Technology Conference, pp. 579-584  2011

  • Mitigation of Thermal Fatigue Failure in Fully Underfilled Lead-free Array-based Package Assemblies Using Partial Underfills

    Proceedings of the 13th Electronics Packaging Technology Conference, pp. 542-547  2011

  • Quartz Resonator Hydrogen Sensor Using Platinum Black

    Proceedings of the 2011 Fifth International Conference on Sensing Technology, pp. 587-590  2011

  • Quantitative Analysis of Silver Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    Proceedings of the 2011 Fifth International Conference on Sensing Technology, pp. 6-10, November 28  2011

  • High Frequency Plano-convex Resonator Fabricated by DRIE

    Technical Meeting on Electronic Circuits, pp. 43-46, Kyoto, Japan  2011

  • A Novel Method for Evaluating Triaxial Strain Gages Used in Printed Circuit Board Assemblies (PCBA) Strain Monitoring (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Application of a 2-D Anisotropic Etching Simulator on Perforated Etching of Quartz Wafer (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Size Optimization for High Frequency Quartz Resonator Using Finite Element Vibration Analysis (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Sensing System for Quantitative Analysis of Metal Particles Using Laser-Induced Breakdown Spectroscopy (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • A Reliability of Silicon-Crystalline Quartz Bonding Through Reducing of the Residual Stresses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Ultra-Small Imaging System for Cell Phone Camera Using Birefringent Lenses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Alkanes Near-Infrared Spectrum Analysis Based on Hollow-Core Photonic Bandgap Fiber (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Vibration Analysis of Original Shape Quartz Resonator for High Q Realization (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Optimal Size Determination of Electrodes for High Frequency Fundamental AT-cut Quartz Resonator using 3-D FEM (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • High Sensitivity Fiber-optic Fabry-perot Interferometer Temperature Sensor (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending (口頭発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test (ポスター発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Board-level Solder Joint Reliability of Edge and Corner Bonded Lead-free Chip Scale Package Assemblies Subjected to Thermal Cycling (ポスター発表)

    2011 International Conference on Solid State Devices and Materials, Nagoya, Japan  2011

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills (口頭発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Analysis of Edge and Corner Bonded PoP Bottom Package Reliability under Temperature Cycling Conditions by Experimental and Finite Element Methods (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Heat and Ultraviolet Dual-curable Edge Bonding Materials for Ball Grid Array Packages and the Impact on Solder Joint Reliability (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Drop Impact Reliability Improvement of Lead-free Array-based Package Assemblies with Different Board-level Underfills and Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Experimental and Computational Characterization of Board-level Shear Behavior of PSvfBGA Assemblies with Edge and Corner Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Halogen-free and Reworkable Corner Bond Adhesive for Array-based Packages and the Impact on Board-level Solder Joint Reliability (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Investigation of Various Board-level Underfills and Adhesives for CTBGA Bend Performance Enhancements in Lead-free Portable Electronic Products (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Thermal Cycling Reliability of Lead-free Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Reworkable Edge and Corner Bond Adhesives (ポスター発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • USE OF A NEW ANISOTROPIC ETCHING SIMULATOR ON QUARTZ CRYSTAL (ポスター発表)

    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS' 11), Beijing, China  2011

  • On-Wafer-Packaging of Crystal Quartz Based Devises Using Low-Temperature Anodic Bonding( (口頭発表+ポスター発表)

    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2011) Aix-en-Provence, France  2011

  • Effects of Edge and Corner bond Adhesives on Board-level Shear Strength of Lead-free Package-on-Package Devices (口頭発表)

    2011 International Conference on Electronics Packaging, Nara, Japan  2011

  • Studies on the Bend Performance of Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Edge and Corner Bond Adhesives (oral)

    2011 International Conference on Solid-State and Integrated Circuit  2011

  • Effects of Edge and Corner Bond Adhesives on the Drop Reliability of Package-on-Package Bottom Package Assemblies (oral)

    2011 International Conference on Solid-State and Integrated Circuit  2011

  • A Real Double-convex Spherical Single Lens System with Blur Restoration Feature (oral)

    2011 International Conference on Communication and Electronics Information, Haikou, China  2011

  • Saturated Absorption Spectroscopy of Hydrocarbons Based on Photonic Bandgap Fiber (oral)

    2011 International Conference on Communication and Electronics Information, Haikou, China  2011

  • A Novel Method for Evaluating Triaxial Strain Gages Used in Printed Circuit Board Assemblies (PCBA) Strain Monitoring (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Application of a 2-D Anisotropic Etching Simulator on Perforated Etching of Quartz Wafer (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Size Optimization for High Frequency Quartz Resonator Using Finite Element Vibration Analysis (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Sensing System for Quantitative Analysis of Metal Particles Using Laser-Induced Breakdown Spectroscopy (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • A Reliability of Silicon-Crystalline Quartz Bonding Through Reducing of the Residual Stresses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Ultra-Small Imaging System for Cell Phone Camera Using Birefringent Lenses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Alkanes Near-Infrared Spectrum Analysis Based on Hollow-Core Photonic Bandgap Fiber (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Vibration Analysis of Original Shape Quartz Resonator for High Q Realization (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Optimal Size Determination of Electrodes for High Frequency Fundamental AT-cut Quartz Resonator using 3-D FEM (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • High Sensitivity Fiber-optic Fabry-perot Interferometer Temperature Sensor (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending (口頭発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test (ポスター発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Board-level Solder Joint Reliability of Edge and Corner Bonded Lead-free Chip Scale Package Assemblies Subjected to Thermal Cycling (ポスター発表)

    2011 International Conference on Solid State Devices and Materials, Nagoya, Japan  2011

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills (口頭発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Analysis of Edge and Corner Bonded PoP Bottom Package Reliability under Temperature Cycling Conditions by Experimental and Finite Element Methods (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Heat and Ultraviolet Dual-curable Edge Bonding Materials for Ball Grid Array Packages and the Impact on Solder Joint Reliability (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Drop Impact Reliability Improvement of Lead-free Array-based Package Assemblies with Different Board-level Underfills and Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Experimental and Computational Characterization of Board-level Shear Behavior of PSvfBGA Assemblies with Edge and Corner Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Halogen-free and Reworkable Corner Bond Adhesive for Array-based Packages and the Impact on Board-level Solder Joint Reliability (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Investigation of Various Board-level Underfills and Adhesives for CTBGA Bend Performance Enhancements in Lead-free Portable Electronic Products (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Thermal Cycling Reliability of Lead-free Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Reworkable Edge and Corner Bond Adhesives (ポスター発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • USE OF A NEW ANISOTROPIC ETCHING SIMULATOR ON QUARTZ CRYSTAL (ポスター発表)

    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS' 11), Beijing, China  2011

  • On-Wafer-Packaging of Crystal Quartz Based Devises Using Low-Temperature Anodic Bonding( (口頭発表+ポスター発表)

    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2011) Aix-en-Provence, France  2011

  • Effects of Edge and Corner bond Adhesives on Board-level Shear Strength of Lead-free Package-on-Package Devices (口頭発表)

    2011 International Conference on Electronics Packaging, Nara, Japan  2011

  • Analysis of radially restored images for spherical single lens cellphone camera

    IEEE Sensors Journal, Vol.11, No.11 掲載決定  2011

  • U-Band Wavelength References Based on Photonic Bandgap Fiber Technology

    IEEE/OSA Journal of Lightwave Technology, Vol. 29, No. 19. pp. 2934-2939  2011

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test

    Microelectronics Reliability, Vol.51, No.9-11, pp. 1898-1902  2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending

    Microelectronics Reliability, Vol.51, No.9-11, pp. 1850-1855  2011

  • Bonding of silicon and crystal quartz wafers at the minimized residual stresses

    PRZEGL?D ELEKTROTECHNICZNY  2011

  • Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections

    Japanese Journal of Applied Physics 50, 06GM06 1-4  2011

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell Using Micromirror

    Japanese Journal of Applied Physics 50, 06GM01 1-4  2011

  • Diesel Particulate Analysis Using SEM-EDX and Laser-induced Breakdown Spectroscopy

    International Journal on Smart Sensing and Intelligent Systems Vol. 4, No. 2, pp174-188  2011

  • A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal

    IEEJ Transactions on Sensors and Micromachines Vol.131, No.5, pp.185-188  2011

  • Development of Carbonaceous Particle Size Analyzer Using Laser-induced Incandescence Technology

    IEEJ Transactions on Sensors and Micromachines Vol.131, No.5, pp.171-177  2011

  • Development of Hydrogen Gas Sensor Using Uqartz Resonator

    IEEJ Transactions on Sensors and Micromachines, Vol. 131, No.3, pp. 117-121  2011

  • イメージファイバーを用いた根管内観察システムの開発 (口頭発表)

    第64回 電気関係学会九州支部連合大会, 佐賀大学  2011

  • 二軸傾斜センサシステムの開発-ステップ1 (口頭発表)

    第64回 電気関係学会九州支部連合大会, 佐賀大学  2011

  • 2 軸静電容量型傾斜角センサの開発と評価 (口頭発表)

    第64回 電気関係学会九州支部連合大会, 佐賀大学  2011

  • MEMS 精密実装におけるフラックスレスリフローのプロセスの改善 (口頭発表)

    第64回 電気関係学会九州支部連合大会, 佐賀大学  2011

  • MEMS 技術を利用したPlano-convex 形状水晶振動子の開発 (口頭発表)

    第64回 電気関係学会九州支部連合大会, 佐賀大学  2011

  • High-Q を実現するための新たな形状の水晶振動子の研究 (口頭発表)

    第64回 電気関係学会九州支部連合大会, 佐賀大学  2011

  • LTCCコイルを用いた渦電流変位センサの開発 (口頭発表)

    第64回 電気関係学会九州支部連合大会, 佐賀大学  2011

  • アルゴンガス雰囲気におけるレーザー誘起ブレークダウン分光分析 (口頭発表)

    レーザー学会第148回研究会報告,レーザー応用, Kumamoto, Japan  2011

  • 高感度傾斜角センサ作製プロセスの改善とその評価 (口頭)

    平成23年 電気学会全国大会, 大阪大学  2011

  • リファレンス振動子により安定化したQCM匂いセンサ (口頭)

    平成23年 電気学会全国大会, 大阪大学  2011

  • The 2-D Vibration Analysis of Plano-convex AT-cut Quartz Resonator by FEM (口頭)

    平成23年 電気学会全国大会, 大阪大学  2011

  • Development of Slower Wet Etching Rates Measurement of α-Quartz (口頭)

    平成23年 電気学会全国大会, 大阪大学  2011

  • Low noise design of the 2-axis tilt sensor (口頭)

    平成23年 電気学会全国大会, 大阪大学  2011

  • An Oscillating Circuit development for Hydrogen Gas Sensors using Quartz resonators (口頭)

    平成23年 電気学会全国大会, 大阪大学  2011

  • Effects of Reworkable Edge and Corner Bond Adhesives on the Thermal Fatigue Performance of Lead-Free Chip Scale Package Assemblies

    Proceedings of 13th International Conference on. Electronics Materials and Packaging, pp. EMAP2011-20 (1-10)  2011

  • Investigation on the Optimum Sampling Rate of Strain Measurement during Printed Circuit Board (PCB) System Assembly

    Proceedings of the 13th Electronics Packaging Technology Conference, pp. 579-584  2011

  • Mitigation of Thermal Fatigue Failure in Fully Underfilled Lead-free Array-based Package Assemblies Using Partial Underfills

    Proceedings of the 13th Electronics Packaging Technology Conference, pp. 542-547  2011

  • Quartz Resonator Hydrogen Sensor Using Platinum Black

    Proceedings of the 2011 Fifth International Conference on Sensing Technology, pp. 587-590  2011

  • Quantitative Analysis of Silver Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    Proceedings of the 2011 Fifth International Conference on Sensing Technology, pp. 6-10, November 28  2011

  • High Frequency Plano-convex Resonator Fabricated by DRIE

    Technical Meeting on Electronic Circuits, pp. 43-46, Kyoto, Japan  2011

  • A Novel Method for Evaluating Triaxial Strain Gages Used in Printed Circuit Board Assemblies (PCBA) Strain Monitoring (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Application of a 2-D Anisotropic Etching Simulator on Perforated Etching of Quartz Wafer (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Size Optimization for High Frequency Quartz Resonator Using Finite Element Vibration Analysis (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Sensing System for Quantitative Analysis of Metal Particles Using Laser-Induced Breakdown Spectroscopy (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • A Reliability of Silicon-Crystalline Quartz Bonding Through Reducing of the Residual Stresses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Ultra-Small Imaging System for Cell Phone Camera Using Birefringent Lenses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Alkanes Near-Infrared Spectrum Analysis Based on Hollow-Core Photonic Bandgap Fiber (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Vibration Analysis of Original Shape Quartz Resonator for High Q Realization (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Optimal Size Determination of Electrodes for High Frequency Fundamental AT-cut Quartz Resonator using 3-D FEM (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • High Sensitivity Fiber-optic Fabry-perot Interferometer Temperature Sensor (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending (口頭発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test (ポスター発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Board-level Solder Joint Reliability of Edge and Corner Bonded Lead-free Chip Scale Package Assemblies Subjected to Thermal Cycling (ポスター発表)

    2011 International Conference on Solid State Devices and Materials, Nagoya, Japan  2011

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills (口頭発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Analysis of Edge and Corner Bonded PoP Bottom Package Reliability under Temperature Cycling Conditions by Experimental and Finite Element Methods (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Heat and Ultraviolet Dual-curable Edge Bonding Materials for Ball Grid Array Packages and the Impact on Solder Joint Reliability (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Drop Impact Reliability Improvement of Lead-free Array-based Package Assemblies with Different Board-level Underfills and Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Experimental and Computational Characterization of Board-level Shear Behavior of PSvfBGA Assemblies with Edge and Corner Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Halogen-free and Reworkable Corner Bond Adhesive for Array-based Packages and the Impact on Board-level Solder Joint Reliability (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Investigation of Various Board-level Underfills and Adhesives for CTBGA Bend Performance Enhancements in Lead-free Portable Electronic Products (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Thermal Cycling Reliability of Lead-free Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Reworkable Edge and Corner Bond Adhesives (ポスター発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • USE OF A NEW ANISOTROPIC ETCHING SIMULATOR ON QUARTZ CRYSTAL (ポスター発表)

    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS' 11), Beijing, China  2011

  • On-Wafer-Packaging of Crystal Quartz Based Devises Using Low-Temperature Anodic Bonding( (口頭発表+ポスター発表)

    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2011) Aix-en-Provence, France  2011

  • Effects of Edge and Corner bond Adhesives on Board-level Shear Strength of Lead-free Package-on-Package Devices (口頭発表)

    2011 International Conference on Electronics Packaging, Nara, Japan  2011

  • Studies on the Bend Performance of Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Edge and Corner Bond Adhesives (oral)

    2011 International Conference on Solid-State and Integrated Circuit  2011

  • Effects of Edge and Corner Bond Adhesives on the Drop Reliability of Package-on-Package Bottom Package Assemblies (oral)

    2011 International Conference on Solid-State and Integrated Circuit  2011

  • A Real Double-convex Spherical Single Lens System with Blur Restoration Feature (oral)

    2011 International Conference on Communication and Electronics Information, Haikou, China  2011

  • Saturated Absorption Spectroscopy of Hydrocarbons Based on Photonic Bandgap Fiber (oral)

    2011 International Conference on Communication and Electronics Information, Haikou, China  2011

  • Analysis of radially restored images for spherical single lens cellphone camera

    IEEE Sensors Journal, Vol.11, No.11 掲載決定  2011

  • U-Band Wavelength References Based on Photonic Bandgap Fiber Technology

    IEEE/OSA Journal of Lightwave Technology, Vol. 29, No. 19. pp. 2934-2939  2011

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test

    Microelectronics Reliability, Vol.51, No.9-11, pp. 1898-1902  2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending

    Microelectronics Reliability, Vol.51, No.9-11, pp. 1850-1855  2011

  • Bonding of silicon and crystal quartz wafers at the minimized residual stresses

    PRZEGL?D ELEKTROTECHNICZNY  2011

  • Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections

    Japanese Journal of Applied Physics 50, 06GM06 1-4  2011

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell Using Micromirror

    Japanese Journal of Applied Physics 50, 06GM01 1-4  2011

  • Diesel Particulate Analysis Using SEM-EDX and Laser-induced Breakdown Spectroscopy

    International Journal on Smart Sensing and Intelligent Systems Vol. 4, No. 2, pp174-188  2011

  • A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal

    IEEJ Transactions on Sensors and Micromachines Vol.131, No.5, pp.185-188  2011

  • Development of Carbonaceous Particle Size Analyzer Using Laser-induced Incandescence Technology

    IEEJ Transactions on Sensors and Micromachines Vol.131, No.5, pp.171-177  2011

  • Deblur of radially variant blurred image for single lens system

    IEEJ Transactions on Electrical and Electronic Engineering, Special Issue: Special Issue on Electronics, Information and Systems, Volume 6, Issue S1, pages S7?S16, 2011  2011

  • Development of Hydrogen Gas Sensor Using Uqartz Resonator

    IEEJ Transactions on Sensors and Micromachines, Vol. 131, No.3, pp. 117-121  2011

  • Effects of Reworkable Edge and Corner Bond Adhesives on the Thermal Fatigue Performance of Lead-Free Chip Scale Package Assemblies

    Proceedings of 13th International Conference on. Electronics Materials and Packaging, pp. EMAP2011-20 (1-10)  2011

  • Investigation on the Optimum Sampling Rate of Strain Measurement during Printed Circuit Board (PCB) System Assembly

    Proceedings of the 13th Electronics Packaging Technology Conference, pp. 579-584  2011

  • Mitigation of Thermal Fatigue Failure in Fully Underfilled Lead-free Array-based Package Assemblies Using Partial Underfills

    Proceedings of the 13th Electronics Packaging Technology Conference, pp. 542-547  2011

  • Quartz Resonator Hydrogen Sensor Using Platinum Black

    Proceedings of the 2011 Fifth International Conference on Sensing Technology, pp. 587-590  2011

  • Quantitative Analysis of Silver Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    Proceedings of the 2011 Fifth International Conference on Sensing Technology, pp. 6-10, November 28  2011

  • High Frequency Plano-convex Resonator Fabricated by DRIE

    Technical Meeting on Electronic Circuits, pp. 43-46, Kyoto, Japan  2011

  • A Novel Method for Evaluating Triaxial Strain Gages Used in Printed Circuit Board Assemblies (PCBA) Strain Monitoring (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Application of a 2-D Anisotropic Etching Simulator on Perforated Etching of Quartz Wafer (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Size Optimization for High Frequency Quartz Resonator Using Finite Element Vibration Analysis (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Sensing System for Quantitative Analysis of Metal Particles Using Laser-Induced Breakdown Spectroscopy (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • A Reliability of Silicon-Crystalline Quartz Bonding Through Reducing of the Residual Stresses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Ultra-Small Imaging System for Cell Phone Camera Using Birefringent Lenses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Alkanes Near-Infrared Spectrum Analysis Based on Hollow-Core Photonic Bandgap Fiber (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Vibration Analysis of Original Shape Quartz Resonator for High Q Realization (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Optimal Size Determination of Electrodes for High Frequency Fundamental AT-cut Quartz Resonator using 3-D FEM (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • High Sensitivity Fiber-optic Fabry-perot Interferometer Temperature Sensor (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending (口頭発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test (ポスター発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Board-level Solder Joint Reliability of Edge and Corner Bonded Lead-free Chip Scale Package Assemblies Subjected to Thermal Cycling (ポスター発表)

    2011 International Conference on Solid State Devices and Materials, Nagoya, Japan  2011

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills (口頭発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Analysis of Edge and Corner Bonded PoP Bottom Package Reliability under Temperature Cycling Conditions by Experimental and Finite Element Methods (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Heat and Ultraviolet Dual-curable Edge Bonding Materials for Ball Grid Array Packages and the Impact on Solder Joint Reliability (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Drop Impact Reliability Improvement of Lead-free Array-based Package Assemblies with Different Board-level Underfills and Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Experimental and Computational Characterization of Board-level Shear Behavior of PSvfBGA Assemblies with Edge and Corner Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Halogen-free and Reworkable Corner Bond Adhesive for Array-based Packages and the Impact on Board-level Solder Joint Reliability (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Investigation of Various Board-level Underfills and Adhesives for CTBGA Bend Performance Enhancements in Lead-free Portable Electronic Products (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Thermal Cycling Reliability of Lead-free Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Reworkable Edge and Corner Bond Adhesives (ポスター発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • USE OF A NEW ANISOTROPIC ETCHING SIMULATOR ON QUARTZ CRYSTAL (ポスター発表)

    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS' 11), Beijing, China  2011

  • On-Wafer-Packaging of Crystal Quartz Based Devises Using Low-Temperature Anodic Bonding( (口頭発表+ポスター発表)

    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2011) Aix-en-Provence, France  2011

  • Effects of Edge and Corner bond Adhesives on Board-level Shear Strength of Lead-free Package-on-Package Devices (口頭発表)

    2011 International Conference on Electronics Packaging, Nara, Japan  2011

  • Studies on the Bend Performance of Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Edge and Corner Bond Adhesives (oral)

    2011 International Conference on Solid-State and Integrated Circuit  2011

  • Effects of Edge and Corner Bond Adhesives on the Drop Reliability of Package-on-Package Bottom Package Assemblies (oral)

    2011 International Conference on Solid-State and Integrated Circuit  2011

  • A Real Double-convex Spherical Single Lens System with Blur Restoration Feature (oral)

    2011 International Conference on Communication and Electronics Information, Haikou, China  2011

  • Saturated Absorption Spectroscopy of Hydrocarbons Based on Photonic Bandgap Fiber (oral)

    2011 International Conference on Communication and Electronics Information, Haikou, China  2011

  • A Novel Method for Evaluating Triaxial Strain Gages Used in Printed Circuit Board Assemblies (PCBA) Strain Monitoring (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Application of a 2-D Anisotropic Etching Simulator on Perforated Etching of Quartz Wafer (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Size Optimization for High Frequency Quartz Resonator Using Finite Element Vibration Analysis (ポスター発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Sensing System for Quantitative Analysis of Metal Particles Using Laser-Induced Breakdown Spectroscopy (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • A Reliability of Silicon-Crystalline Quartz Bonding Through Reducing of the Residual Stresses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Ultra-Small Imaging System for Cell Phone Camera Using Birefringent Lenses (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Alkanes Near-Infrared Spectrum Analysis Based on Hollow-Core Photonic Bandgap Fiber (口頭発表)

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND  2011

  • Vibration Analysis of Original Shape Quartz Resonator for High Q Realization (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Optimal Size Determination of Electrodes for High Frequency Fundamental AT-cut Quartz Resonator using 3-D FEM (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • High Sensitivity Fiber-optic Fabry-perot Interferometer Temperature Sensor (ポスター発表)

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan  2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending (口頭発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test (ポスター発表)

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France  2011

  • Board-level Solder Joint Reliability of Edge and Corner Bonded Lead-free Chip Scale Package Assemblies Subjected to Thermal Cycling (ポスター発表)

    2011 International Conference on Solid State Devices and Materials, Nagoya, Japan  2011

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills (口頭発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Analysis of Edge and Corner Bonded PoP Bottom Package Reliability under Temperature Cycling Conditions by Experimental and Finite Element Methods (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Heat and Ultraviolet Dual-curable Edge Bonding Materials for Ball Grid Array Packages and the Impact on Solder Joint Reliability (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Drop Impact Reliability Improvement of Lead-free Array-based Package Assemblies with Different Board-level Underfills and Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Experimental and Computational Characterization of Board-level Shear Behavior of PSvfBGA Assemblies with Edge and Corner Adhesives (ポスター発表)

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan  2011

  • Halogen-free and Reworkable Corner Bond Adhesive for Array-based Packages and the Impact on Board-level Solder Joint Reliability (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Investigation of Various Board-level Underfills and Adhesives for CTBGA Bend Performance Enhancements in Lead-free Portable Electronic Products (口頭発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • Thermal Cycling Reliability of Lead-free Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Reworkable Edge and Corner Bond Adhesives (ポスター発表)

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China  2011

  • USE OF A NEW ANISOTROPIC ETCHING SIMULATOR ON QUARTZ CRYSTAL (ポスター発表)

    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS' 11), Beijing, China  2011

  • On-Wafer-Packaging of Crystal Quartz Based Devises Using Low-Temperature Anodic Bonding( (口頭発表+ポスター発表)

    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2011) Aix-en-Provence, France  2011

  • Effects of Edge and Corner bond Adhesives on Board-level Shear Strength of Lead-free Package-on-Package Devices (口頭発表)

    2011 International Conference on Electronics Packaging, Nara, Japan  2011

  • Analysis of radially restored images for spherical single lens cellphone camera

    IEEE Sensors Journal, Vol.11, No.11 掲載決定  2011

  • U-Band Wavelength References Based on Photonic Bandgap Fiber Technology

    IEEE/OSA Journal of Lightwave Technology, Vol. 29, No. 19. pp. 2934-2939  2011

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test

    Microelectronics Reliability, Vol.51, No.9-11, pp. 1898-1902  2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending

    Microelectronics Reliability, Vol.51, No.9-11, pp. 1850-1855  2011

  • Bonding of silicon and crystal quartz wafers at the minimized residual stresses

    PRZEGL?D ELEKTROTECHNICZNY  2011

  • Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections

    Japanese Journal of Applied Physics 50, 06GM06 1-4  2011

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell Using Micromirror

    Japanese Journal of Applied Physics 50, 06GM01 1-4  2011

  • Diesel Particulate Analysis Using SEM-EDX and Laser-induced Breakdown Spectroscopy

    International Journal on Smart Sensing and Intelligent Systems Vol. 4, No. 2, pp174-188  2011

  • A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal

    IEEJ Transactions on Sensors and Micromachines Vol.131, No.5, pp.185-188  2011

  • Development of Carbonaceous Particle Size Analyzer Using Laser-induced Incandescence Technology

    IEEJ Transactions on Sensors and Micromachines Vol.131, No.5, pp.171-177  2011

  • Development of Hydrogen Gas Sensor Using Uqartz Resonator

    IEEJ Transactions on Sensors and Micromachines, Vol. 131, No.3, pp. 117-121  2011

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell using Micromirror (poster)

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan  2010

  • Quartz MEMS based Double-Ended Tuning Fork with Variable sections (poster)

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan  2010

  • Restoration of Radially Blurred Image Created by Spherical Single Lens System of Cell Phone Camer (poster)

    IEEE Sensors 2010 Conference, Hawaii, USA  2010

  • Development of Sensing System for Carbonaceous Particles Using LIBS Combined with LII Temporal Analytical Technique (oral)

    IEEE Sensors 2010 Conference, Hawaii, USA  2010

  • Low-Temperature Anodic Bonding of Silicon and Crystal Quartz Wafers for MEMS Application (poster)

    IEEE Sensors 2010 Conference, Hawaii, USA  2010

  • Anisotropic Etching Simulator for Quartz Crystal and Its Application to Design Micro-mechanical Device (oral)

    2010 China International Symposium on Inertial Technology and Navigation, Nanjing, China  2010

  • Fabrication Process Improvement for High Sensitivity Tilt Sensor (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • Hydrogen Gas Sensors using Quartz Resonator (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • Development of a sensing system for carbonaceous particles using laser-induced incandescence technology (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • Process Development of Silver Conductor wiring on packages using Inkjet Printer (口頭)

    The 63rd Joint Conference of Electrical and Electronics Engineers in Kyushu, Kyushu Sangyo University  2010

  • Basic Research on Diesel Particulate Matter for Establishing Laser-induced Breakdown Spectroscopy Analysis Method (Presentation Award; oral)

    4th International Conference on Sensing Technology (ICST 2010), Lecce, Italy  2010

  • Deblur of radially variant blurred image for single lens system

    IEEJ Transactions on Electrical and Electronic Engineering, Special Issue: Special Issue on Electronics, Information and Systems, Volume 6, Issue S1, pages S7?S16, 2011  2010

  • Design of a Singlet Lens and the Corresponding Aberration Correction Approaches for Cell Phone Camera

    IEEJ Transactions on electrical and electronic engineering, Vol. 5, pp. 474-485  2010

  • Sensing of Carbon Dioxide and Hydrocarbons Using Photonic Bandgap Fiber

    Solid State Phenomena (Vol. 165), Mechatronic Systems and Materials: Materials Production Technologies, pp. 316-320  2010

  • Measurement of Low gas concentrations Using Photonic Bandgap Fiber Cell

    IEEE sensors Journal, Vol. 10, No. 6, pp. 1156-1161, (6/2010)  2010

  • Field-Dependent Distortion Coefficient and Backward Mapping for Distortion Correction of Singlet Lens Cameras

    IEEJ Transactions on electrical and electronic engineering, published by John Wiley and Sons, Inc, Vol.5, No.2, pp203-210  2010

  • Differential Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    IEEJ Transactions on Sensors and Micromachines, Vol.130, No.3, pp65-68  2010

  • 白金黒を応用した水晶振動子型水素センサの研究 (口頭)

    第63回 電気関係学会九州支部連合大会, 九州産業大学  2010

  • 高感度傾斜角センサダンピング特性と音叉振動子を用いたパッケージのリークレート測定 (口頭)

    第63回 電気関係学会九州支部連合大会, 九州産業大学  2010

  • 高感度傾斜角センサ作製における金属薄膜形成プロセスの改善 (口頭)

    第63回 電気関係学会九州支部連合大会, 九州産業大学  2010

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell using Micromirror (poster)

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan  2010

  • Quartz MEMS based Double-Ended Tuning Fork with Variable sections (poster)

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan  2010

  • Restoration of Radially Blurred Image Created by Spherical Single Lens System of Cell Phone Camer (poster)

    IEEE Sensors 2010 Conference, Hawaii, USA  2010

  • Development of Sensing System for Carbonaceous Particles Using LIBS Combined with LII Temporal Analytical Technique (oral)

    IEEE Sensors 2010 Conference, Hawaii, USA  2010

  • Low-Temperature Anodic Bonding of Silicon and Crystal Quartz Wafers for MEMS Application (poster)

    IEEE Sensors 2010 Conference, Hawaii, USA  2010

  • Anisotropic Etching Simulator for Quartz Crystal and Its Application to Design Micro-mechanical Device (oral)

    2010 China International Symposium on Inertial Technology and Navigation, Nanjing, China  2010

  • Fabrication Process Improvement for High Sensitivity Tilt Sensor (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • Hydrogen Gas Sensors using Quartz Resonator (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • Development of a sensing system for carbonaceous particles using laser-induced incandescence technology (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • Process Development of Silver Conductor wiring on packages using Inkjet Printer (口頭)

    The 63rd Joint Conference of Electrical and Electronics Engineers in Kyushu, Kyushu Sangyo University  2010

  • Basic Research on Diesel Particulate Matter for Establishing Laser-induced Breakdown Spectroscopy Analysis Method (Presentation Award; oral)

    4th International Conference on Sensing Technology (ICST 2010), Lecce, Italy  2010

  • Design of a Singlet Lens and the Corresponding Aberration Correction Approaches for Cell Phone Camera

    IEEJ Transactions on electrical and electronic engineering, Vol. 5, pp. 474-485  2010

  • Sensing of Carbon Dioxide and Hydrocarbons Using Photonic Bandgap Fiber

    Solid State Phenomena (Vol. 165), Mechatronic Systems and Materials: Materials Production Technologies, pp. 316-320  2010

  • Measurement of Low gas concentrations Using Photonic Bandgap Fiber Cell

    IEEE sensors Journal, Vol. 10, No. 6, pp. 1156-1161, (6/2010)  2010

  • Field-Dependent Distortion Coefficient and Backward Mapping for Distortion Correction of Singlet Lens Cameras

    IEEJ Transactions on electrical and electronic engineering, published by John Wiley and Sons, Inc, Vol.5, No.2, pp203-210  2010

  • Differential Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    IEEJ Transactions on Sensors and Micromachines, Vol.130, No.3, pp65-68  2010

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell using Micromirror (poster)

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan  2010

  • Quartz MEMS based Double-Ended Tuning Fork with Variable sections (poster)

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan  2010

  • Restoration of Radially Blurred Image Created by Spherical Single Lens System of Cell Phone Camer (poster)

    IEEE Sensors 2010 Conference, Hawaii, USA  2010

  • Development of Sensing System for Carbonaceous Particles Using LIBS Combined with LII Temporal Analytical Technique (oral)

    IEEE Sensors 2010 Conference, Hawaii, USA  2010

  • Low-Temperature Anodic Bonding of Silicon and Crystal Quartz Wafers for MEMS Application (poster)

    IEEE Sensors 2010 Conference, Hawaii, USA  2010

  • Anisotropic Etching Simulator for Quartz Crystal and Its Application to Design Micro-mechanical Device (oral)

    2010 China International Symposium on Inertial Technology and Navigation, Nanjing, China  2010

  • Fabrication Process Improvement for High Sensitivity Tilt Sensor (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • Hydrogen Gas Sensors using Quartz Resonator (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • Development of a sensing system for carbonaceous particles using laser-induced incandescence technology (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal (poster)

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan  2010

  • Process Development of Silver Conductor wiring on packages using Inkjet Printer (口頭)

    The 63rd Joint Conference of Electrical and Electronics Engineers in Kyushu, Kyushu Sangyo University  2010

  • Basic Research on Diesel Particulate Matter for Establishing Laser-induced Breakdown Spectroscopy Analysis Method (Presentation Award; oral)

    4th International Conference on Sensing Technology (ICST 2010), Lecce, Italy  2010

  • Deblur of radially variant blurred image for single lens system

    IEEJ Transactions on Electrical and Electronic Engineering, Special Issue: Special Issue on Electronics, Information and Systems, Volume 6, Issue S1, pages S7?S16, 2011  2010

  • Design of a Singlet Lens and the Corresponding Aberration Correction Approaches for Cell Phone Camera

    IEEJ Transactions on electrical and electronic engineering, Vol. 5, pp. 474-485  2010

  • Sensing of Carbon Dioxide and Hydrocarbons Using Photonic Bandgap Fiber

    Solid State Phenomena (Vol. 165), Mechatronic Systems and Materials: Materials Production Technologies, pp. 316-320  2010

  • Measurement of Low gas concentrations Using Photonic Bandgap Fiber Cell

    IEEE sensors Journal, Vol. 10, No. 6, pp. 1156-1161, (6/2010)  2010

  • Field-Dependent Distortion Coefficient and Backward Mapping for Distortion Correction of Singlet Lens Cameras

    IEEJ Transactions on electrical and electronic engineering, published by John Wiley and Sons, Inc, Vol.5, No.2, pp203-210  2010

  • Differential Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    IEEJ Transactions on Sensors and Micromachines, Vol.130, No.3, pp65-68  2010

  • Hydrogen gas sensor using quartz resonator

    The 8th IEEE Conference on Sensors, Proceedings, (B4P-005)pp., Christchurch, NewZealand, October 25-28, 2009  2009

  • Sensing of carbon dioxide and hydrocarbons using photonic bandgap fiber

    The 5th International Conference Mechatronic Systems and Materials (MSM 2009) 22-25 October 2009, Vilnius, Lithuania  2009

  • Sensing of Ammonia and Hydrocarbons Using Photonic Bandgap Fiber Cell

    (P-5-8) pp., Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan  2009

  • Development of the Miniaturized Eddy Current Displacement Sensor Using MEMS Coil

    pp.,4-14, Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan  2009

  • Sensor for measurement of hydrocarbons concentration based on optic fiber

    Optical Measurement Systems for Industrial Inspection VI, Munich, Germany  2009

  • CHARACTERIZATION OF A QUARTZ MEMS TILT SENSOR WITH 0.001° PRECISION

    he 15th International Conference on Solid-State Sensors, Actuators & Microsystems (Transducers 2009)  2009

  • Control of a Micro-Droplet for Laser-induced Breakdown Spectroscopy Solution Measurement

    Solid State Phenomena Vols. 147-149 , pp 639-644  2009

  • High- Precision Gas Sensor Based on Photonic Bandgap Fiber Cell

    Solid State Phenomena Vols. 147-149, pp 131-136  2009

  • PBG Fiber Low Concentration Gas Sensor

    Solid State Phenomena Vol. 144 ,pp 163-168  2009

  • Fabrication of Photonic Bandgap Fiber Gas Cell Using Focused Ion Beam Cutting

    Japanese Journal of Applied Physics 48 , 06FK05-1 - 06FK05-5  2009

  • Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

    Japanese Journal of Applied Physics 48, pp. 06FK10-1 - 06FK10-4  2009

  • Gas sensor based on microstructured optic fiber

    PRZEGLAD ELEKTROTECHNICZNY, pp.115-117  2009

  • フォトニックバンドギャップファイバーを用いた微量気体のレーザー分光",

    IEEJ Transactions on Sensors and Micromachines, Vol.129, No.6, June 2009, pp189-193  2009

  • Improved MEMS structure for stress-free flip-chip packaging

    J. Micro/Nanolith. MEMS MOEMS, Vol. 8, pp. 021118-1 - 021118-5  2009

  • Sensing System for Multiple Measurements of Trace Elements Using Laser-Induced Breakdown Spectroscopy

    IEEJ Transactions on Sensors and Micromachines, Vol.129, No.4, April 2009, pp115-119  2009

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    Solid State Phenomena  2009

  • PBG Fiber Low Concentration Gas Sensor

    Solid State Phenomena, Vol.144, pp.163-168  2009

  • Hydrogen gas sensor using quartz resonator

    The 8th IEEE Conference on Sensors, Proceedings, (B4P-005)pp., Christchurch, NewZealand, October 25-28, 2009  2009

  • Sensing of carbon dioxide and hydrocarbons using photonic bandgap fiber

    The 5th International Conference Mechatronic Systems and Materials (MSM 2009) 22-25 October 2009, Vilnius, Lithuania  2009

  • Sensing of Ammonia and Hydrocarbons Using Photonic Bandgap Fiber Cell

    (P-5-8) pp., Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan  2009

  • Development of the Miniaturized Eddy Current Displacement Sensor Using MEMS Coil

    pp.,4-14, Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan  2009

  • Sensor for measurement of hydrocarbons concentration based on optic fiber

    Optical Measurement Systems for Industrial Inspection VI, Munich, Germany  2009

  • CHARACTERIZATION OF A QUARTZ MEMS TILT SENSOR WITH 0.001° PRECISION

    he 15th International Conference on Solid-State Sensors, Actuators & Microsystems (Transducers 2009)  2009

  • Control of a Micro-Droplet for Laser-induced Breakdown Spectroscopy Solution Measurement

    Solid State Phenomena Vols. 147-149 , pp 639-644  2009

  • High- Precision Gas Sensor Based on Photonic Bandgap Fiber Cell

    Solid State Phenomena Vols. 147-149, pp 131-136  2009

  • PBG Fiber Low Concentration Gas Sensor

    Solid State Phenomena Vol. 144 ,pp 163-168  2009

  • Fabrication of Photonic Bandgap Fiber Gas Cell Using Focused Ion Beam Cutting

    Japanese Journal of Applied Physics 48 , 06FK05-1 - 06FK05-5  2009

  • Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

    Japanese Journal of Applied Physics 48, pp. 06FK10-1 - 06FK10-4  2009

  • Gas sensor based on microstructured optic fiber

    PRZEGLAD ELEKTROTECHNICZNY, pp.115-117  2009

  • フォトニックバンドギャップファイバーを用いた微量気体のレーザー分光",

    IEEJ Transactions on Sensors and Micromachines, Vol.129, No.6, June 2009, pp189-193  2009

  • Improved MEMS structure for stress-free flip-chip packaging

    J. Micro/Nanolith. MEMS MOEMS, Vol. 8, pp. 021118-1 - 021118-5  2009

  • Sensing System for Multiple Measurements of Trace Elements Using Laser-Induced Breakdown Spectroscopy

    IEEJ Transactions on Sensors and Micromachines, Vol.129, No.4, April 2009, pp115-119  2009

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    Solid State Phenomena  2009

  • PBG Fiber Low Concentration Gas Sensor

    Solid State Phenomena, Vol.144, pp.163-168  2009

  • Hydrogen gas sensor using quartz resonator

    The 8th IEEE Conference on Sensors, Proceedings, (B4P-005)pp., Christchurch, NewZealand, October 25-28, 2009  2009

  • Sensing of carbon dioxide and hydrocarbons using photonic bandgap fiber

    The 5th International Conference Mechatronic Systems and Materials (MSM 2009) 22-25 October 2009, Vilnius, Lithuania  2009

  • Sensing of Ammonia and Hydrocarbons Using Photonic Bandgap Fiber Cell

    (P-5-8) pp., Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan  2009

  • Development of the Miniaturized Eddy Current Displacement Sensor Using MEMS Coil

    pp.,4-14, Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan  2009

  • Sensor for measurement of hydrocarbons concentration based on optic fiber

    Optical Measurement Systems for Industrial Inspection VI, Munich, Germany  2009

  • CHARACTERIZATION OF A QUARTZ MEMS TILT SENSOR WITH 0.001° PRECISION

    he 15th International Conference on Solid-State Sensors, Actuators & Microsystems (Transducers 2009)  2009

  • Control of a Micro-Droplet for Laser-induced Breakdown Spectroscopy Solution Measurement

    Solid State Phenomena Vols. 147-149 , pp 639-644  2009

  • High- Precision Gas Sensor Based on Photonic Bandgap Fiber Cell

    Solid State Phenomena Vols. 147-149, pp 131-136  2009

  • PBG Fiber Low Concentration Gas Sensor

    Solid State Phenomena Vol. 144 ,pp 163-168  2009

  • Fabrication of Photonic Bandgap Fiber Gas Cell Using Focused Ion Beam Cutting

    Japanese Journal of Applied Physics 48 , 06FK05-1 - 06FK05-5  2009

  • Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

    Japanese Journal of Applied Physics 48, pp. 06FK10-1 - 06FK10-4  2009

  • Gas sensor based on microstructured optic fiber

    PRZEGLAD ELEKTROTECHNICZNY, pp.115-117  2009

  • フォトニックバンドギャップファイバーを用いた微量気体のレーザー分光",

    IEEJ Transactions on Sensors and Micromachines, Vol.129, No.6, June 2009, pp189-193  2009

  • Improved MEMS structure for stress-free flip-chip packaging

    J. Micro/Nanolith. MEMS MOEMS, Vol. 8, pp. 021118-1 - 021118-5  2009

  • Sensing System for Multiple Measurements of Trace Elements Using Laser-Induced Breakdown Spectroscopy

    IEEJ Transactions on Sensors and Micromachines, Vol.129, No.4, April 2009, pp115-119  2009

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    Solid State Phenomena  2009

  • PBG Fiber Low Concentration Gas Sensor

    Solid State Phenomena, Vol.144, pp.163-168  2009

  • Fabrication of Photonic Bandgap Fiber Gas Cell using Focused Ion Beam Cutting Technique

    The 21st International Microprocesses and Nanotechnology Conference, JAL Resort Sea Hawk Hotel Fukuoka, Japan, pp.(29D-9-156)  2008

  • Distortion Correction and Local Deblurring for Distorted and Blurred Images Projected from Two-dimensional Object

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan, pp (p-3-4),  2008

  • A Novel Low-loss Splice For Photonic Bandgap Fiber Gas Sensor

    The 7th IEEE Conference on Sensors, Lecce, Italy, pp.1289-1292  2008

  • Ultratrace Measurement Using Micro-droplet With Gas-flow Assistance in Laser-induced Breakdown Spectroscopy

    The 7th IEEE Conference on Sensors, Lecce, Italy, pp.977-980  2008

  • Microstructured Optic Fiber Cell Sensor For Low Concentration Gas Measurement

    The 7th IEEE Conference on Sensors, Lecce, Italy, pp.922-925  2008

  • Application on Monte Carlo Method to X-ray Fluorescence Meter

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan, pp.451-454,  2008

  • Photonic Bandgap Fiber Cell Sensor for Ammonia Gas Measurement

    pp.357-360, Proceedings of the 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa,  2008

  • Sensing System for LIBS Multiple Measurements of Trace Elements

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa Japan, pp.307-311  2008

  • GEOMETRICALLY DISTORTED IMAGE CORRECTION FOR SINGLE LENS USING DECIMAL NUMBER MAPPING

    The 10th IASTED International Conference SIGNAL AND IMAGE PROCESSING (SIP 2008), Kailua-Kona, HI, USA, pp.26-31,  2008

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland, pp.210-211  2008

  • High-Precision Gas Sensor Based on Photonic Bandgap Fiber Cell

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland, pp.54-55,  2008

  • DESIGN OF PHOTONIC BANDGAP FIBER CELL GAS SENSOR

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, (pp. (Poster Session(1)261-264)) 22-25  2008

  • "STRESS FREE FLIP CHIP PACKAGED QUARTZ MEMS CAPACITIVE TILT SENSOR",

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, (pp.(Poster Session(1)166-169)), 22-25  2008

  • DIFFERENTIAL PLATINUM THIN FILM HYDROGEN GAS SENSOR FABRICATED BY MEMS TECHNIQUES

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, pp.(Oral Session(3)132-135), 22-25  2008

  • Case Analysis Oriented Interpolation and a Two-Step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    , IEEJ Transactions on Sensors and Micromachines, Vol.128, No.11,  2008

  • Thermo-Resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques,

    IEEJ Transactions on Sensors and Micromachines, Vol.128, No.9, pp.347-351,  2008

  • Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

    IEEJ Transactions on Sensors and Micromachines, Vol.128, No.7, pp.297-301  2008

  • Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

    IEEJ Transactions on Sensors and Micromachines, Vol.128, No.5, pp.198-202,  2008

  • Improved bi-layer lift-off process for MEMS applications

    Microelectronic Engineering Volume 85, Issue 5-6, Elsevier Science Ltd. Oxford, UK, pp.1000-1003,  2008

  • Sensing Technique Using Laser-induced Breakdown Spectroscopy Integrated with Micro-droplet Ejection System

    Sensors and Transducers Journal, Volume.90, Special Issue on Modern Sensing Technologies,  2008

  • Fabrication of Photonic Bandgap Fiber Gas Cell using Focused Ion Beam Cutting Technique

    The 21st International Microprocesses and Nanotechnology Conference, JAL Resort Sea Hawk Hotel Fukuoka, Japan, pp.(29D-9-156)  2008

  • Distortion Correction and Local Deblurring for Distorted and Blurred Images Projected from Two-dimensional Object

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan, pp (p-3-4),  2008

  • A Novel Low-loss Splice For Photonic Bandgap Fiber Gas Sensor

    The 7th IEEE Conference on Sensors, Lecce, Italy, pp.1289-1292  2008

  • Ultratrace Measurement Using Micro-droplet With Gas-flow Assistance in Laser-induced Breakdown Spectroscopy

    The 7th IEEE Conference on Sensors, Lecce, Italy, pp.977-980  2008

  • Microstructured Optic Fiber Cell Sensor For Low Concentration Gas Measurement

    The 7th IEEE Conference on Sensors, Lecce, Italy, pp.922-925  2008

  • Application on Monte Carlo Method to X-ray Fluorescence Meter

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan, pp.451-454,  2008

  • Photonic Bandgap Fiber Cell Sensor for Ammonia Gas Measurement

    pp.357-360, Proceedings of the 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa,  2008

  • Sensing System for LIBS Multiple Measurements of Trace Elements

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa Japan, pp.307-311  2008

  • GEOMETRICALLY DISTORTED IMAGE CORRECTION FOR SINGLE LENS USING DECIMAL NUMBER MAPPING

    The 10th IASTED International Conference SIGNAL AND IMAGE PROCESSING (SIP 2008), Kailua-Kona, HI, USA, pp.26-31,  2008

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland, pp.210-211  2008

  • High-Precision Gas Sensor Based on Photonic Bandgap Fiber Cell

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland, pp.54-55,  2008

  • DESIGN OF PHOTONIC BANDGAP FIBER CELL GAS SENSOR

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, (pp. (Poster Session(1)261-264)) 22-25  2008

  • "STRESS FREE FLIP CHIP PACKAGED QUARTZ MEMS CAPACITIVE TILT SENSOR",

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, (pp.(Poster Session(1)166-169)), 22-25  2008

  • DIFFERENTIAL PLATINUM THIN FILM HYDROGEN GAS SENSOR FABRICATED BY MEMS TECHNIQUES

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, pp.(Oral Session(3)132-135), 22-25  2008

  • Gas sensor based on PBG fiber: possibilities and limitations

    ,Proceedings of SPIE -- Volume 7004, International Conference on Optical Fiber Sensors (14th-18th April 2008 in Perth, Western Australia), David D. Sampson, Editor, 70044R  2008

  • Case Analysis Oriented Interpolation and a Two-Step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    , IEEJ Transactions on Sensors and Micromachines, Vol.128, No.11,  2008

  • Thermo-Resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques,

    IEEJ Transactions on Sensors and Micromachines, Vol.128, No.9, pp.347-351,  2008

  • Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

    IEEJ Transactions on Sensors and Micromachines, Vol.128, No.7, pp.297-301  2008

  • Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

    IEEJ Transactions on Sensors and Micromachines, Vol.128, No.5, pp.198-202,  2008

  • Improved bi-layer lift-off process for MEMS applications

    Microelectronic Engineering Volume 85, Issue 5-6, Elsevier Science Ltd. Oxford, UK, pp.1000-1003,  2008

  • Sensing Technique Using Laser-induced Breakdown Spectroscopy Integrated with Micro-droplet Ejection System

    Sensors and Transducers Journal, Volume.90, Special Issue on Modern Sensing Technologies,  2008

  • Fabrication of Photonic Bandgap Fiber Gas Cell using Focused Ion Beam Cutting Technique

    The 21st International Microprocesses and Nanotechnology Conference, JAL Resort Sea Hawk Hotel Fukuoka, Japan, pp.(29D-9-156)  2008

  • Distortion Correction and Local Deblurring for Distorted and Blurred Images Projected from Two-dimensional Object

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan, pp (p-3-4),  2008

  • A Novel Low-loss Splice For Photonic Bandgap Fiber Gas Sensor

    The 7th IEEE Conference on Sensors, Lecce, Italy, pp.1289-1292  2008

  • Ultratrace Measurement Using Micro-droplet With Gas-flow Assistance in Laser-induced Breakdown Spectroscopy

    The 7th IEEE Conference on Sensors, Lecce, Italy, pp.977-980  2008

  • Microstructured Optic Fiber Cell Sensor For Low Concentration Gas Measurement

    The 7th IEEE Conference on Sensors, Lecce, Italy, pp.922-925  2008

  • Application on Monte Carlo Method to X-ray Fluorescence Meter

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan, pp.451-454,  2008

  • Photonic Bandgap Fiber Cell Sensor for Ammonia Gas Measurement

    pp.357-360, Proceedings of the 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa,  2008

  • Sensing System for LIBS Multiple Measurements of Trace Elements

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa Japan, pp.307-311  2008

  • GEOMETRICALLY DISTORTED IMAGE CORRECTION FOR SINGLE LENS USING DECIMAL NUMBER MAPPING

    The 10th IASTED International Conference SIGNAL AND IMAGE PROCESSING (SIP 2008), Kailua-Kona, HI, USA, pp.26-31,  2008

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland, pp.210-211  2008

  • High-Precision Gas Sensor Based on Photonic Bandgap Fiber Cell

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland, pp.54-55,  2008

  • DESIGN OF PHOTONIC BANDGAP FIBER CELL GAS SENSOR

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, (pp. (Poster Session(1)261-264)) 22-25  2008

  • "STRESS FREE FLIP CHIP PACKAGED QUARTZ MEMS CAPACITIVE TILT SENSOR",

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, (pp.(Poster Session(1)166-169)), 22-25  2008

  • DIFFERENTIAL PLATINUM THIN FILM HYDROGEN GAS SENSOR FABRICATED BY MEMS TECHNIQUES

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, pp.(Oral Session(3)132-135), 22-25  2008

  • Case Analysis Oriented Interpolation and a Two-Step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    , IEEJ Transactions on Sensors and Micromachines, Vol.128, No.11,  2008

  • Thermo-Resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques,

    IEEJ Transactions on Sensors and Micromachines, Vol.128, No.9, pp.347-351,  2008

  • Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

    IEEJ Transactions on Sensors and Micromachines, Vol.128, No.7, pp.297-301  2008

  • Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

    IEEJ Transactions on Sensors and Micromachines, Vol.128, No.5, pp.198-202,  2008

  • Improved bi-layer lift-off process for MEMS applications

    Microelectronic Engineering Volume 85, Issue 5-6, Elsevier Science Ltd. Oxford, UK, pp.1000-1003,  2008

  • Sensing Technique Using Laser-induced Breakdown Spectroscopy Integrated with Micro-droplet Ejection System

    Sensors and Transducers Journal, Volume.90, Special Issue on Modern Sensing Technologies,  2008

  • Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Paw?at and Toshitsugu Ueda

    IEEE SENSORS 2007 Conference  2007

  • Application on Monte Carlo Method to X-ray Fluorescence Analysis

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Case Analysis Oriented Interpolation and a Two-step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Thermo-resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Fabrication of Two-axis Quartz MEMS-based Capacitive Tilt Sensor

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Tilt Sensor System Using MEMS Device and CMOS Technology

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Particle Element and Size Stimutaneous Measurement Using LIBS

    IEEJ Trana. SM  2007

  • Development of a source-drain electrode coated with an insulation layer for detecting concenttation changes in a nitrate ion solution

    Sensors and Actuators B Chemical  2007

  • Development of Solution Measurement Using Laser-Induced Breakdown Spectroscopy Integrated with Micro-Droplet Ejection System

    IEEJ Trana. SM  2007

  • Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Application

    IEEJ Trana. SM  2007

  • Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Paw?at and Toshitsugu Ueda

    IEEE SENSORS 2007 Conference  2007

  • Application on Monte Carlo Method to X-ray Fluorescence Analysis

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Case Analysis Oriented Interpolation and a Two-step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Thermo-resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Fabrication of Two-axis Quartz MEMS-based Capacitive Tilt Sensor

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Tilt Sensor System Using MEMS Device and CMOS Technology

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • 水晶マイクロ加工による高感度傾斜センサ

    電気学会論文誌E  2007

  • Particle Element and Size Stimutaneous Measurement Using LIBS

    電気学会論文誌E  2007

  • Development of a source-drain electrode coated with an insulation layer for detecting concenttation changes in a nitrate ion solution

    Sensors and Actuators B Chemical  2007

  • Development of Solution Measurement Using Laser-Induced Breakdown Spectroscopy Integrated with Micro-Droplet Ejection System

    電気学会論文誌E  2007

  • Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Application

    電気学会論文誌E  2007

  • Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Paw?at and Toshitsugu Ueda

    IEEE SENSORS 2007 Conference  2007

  • Application on Monte Carlo Method to X-ray Fluorescence Analysis

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Case Analysis Oriented Interpolation and a Two-step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Thermo-resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Fabrication of Two-axis Quartz MEMS-based Capacitive Tilt Sensor

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Tilt Sensor System Using MEMS Device and CMOS Technology

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM  2007

  • Particle Element and Size Stimutaneous Measurement Using LIBS

    IEEJ Trana. SM  2007

  • Development of a source-drain electrode coated with an insulation layer for detecting concenttation changes in a nitrate ion solution

    Sensors and Actuators B Chemical  2007

  • Development of Solution Measurement Using Laser-Induced Breakdown Spectroscopy Integrated with Micro-Droplet Ejection System

    IEEJ Trana. SM  2007

  • Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Application

    IEEJ Trana. SM  2007

  • Deep wet etching of Z cut quartz wafer for MEMS applications

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • High Frequency Drive of a Diode-bridge Type Differential Capacitance Detection Circuit

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • PHOTONIC BANDGAP FIBER IN LOW CONCETRATION MEASUREMENT

    10th International Symposium on High Pressure Low Temperature Plasma Chemistry , eptember 4-8  2006

  • Photonic bandgap fiber for a sensing device

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • Absolute Calibration Technique using Micro-Droplet Ejection System for Enhancement of LIBS Quantitative Analysis

    ”, PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • Particle Element and Size Measurement Using LIBS(2006)

    , PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM,  2006

  • PHTONIC BANDGAP FIBER IN LOW CONCENTRATION GAS MEASUREMENT

    The First European Symposium on Plasma Chemist, May 28-30, (Poland)  2006

  • A novel lift off process and its application for capacitive tilt sensor

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • A Study on a Diode-bridge Type Capacitance Detection Circuit for Differential Capacitive Sensor

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • Study of Laser Induced breakdown spectroscopy from micro-droplet of NaCL Solution

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • Sensing of Gas Concentration Using Photonic Bandgap Fiber”

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • Application of Photonic Bandgap Fiber in Gas Concentration Measurement.”

    , The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris),  2006

  • Simulation of particle size measurement with LIBS

    ”, The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris)  2006

  • EXAMINATION OF 3D CAD SYSTEM ON ANISOTROPIC ETCHING OF ALPHA- QUARTZ

    Asia-Pacific Conference of Transducers and Micro-Nano Technology?APCOT 2006  2006

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    J. Adv. Qxid. Technol.  2006

  • Correction of barrel distortion for simple digital camera systems

    成18 年度 電気関係学会九州支部連合大会  2006

  • MEMS技術を用いた白金薄膜熱抵抗変化型水素ガスセンサの研究

    成18 年度 電気関係学会九州支部連合大会  2006

  • 有限要素法を用いたAT 振動子のスプリアス解析

    平成18 年度 電気関係学会九州支部連合大会  2006

  • LIBSを用いたNaCl水溶液濃度の検出

    センサ・マイクロマシン準部門総合研究会  2006

  • 水晶MEMS技術による水素センサの開発

    福岡水素エネルギー社会近未来展(2006)  2006

  • Deep wet etching of Z cut quartz wafer for MEMS applications

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • High Frequency Drive of a Diode-bridge Type Differential Capacitance Detection Circuit

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • PHOTONIC BANDGAP FIBER IN LOW CONCETRATION MEASUREMENT

    10th International Symposium on High Pressure Low Temperature Plasma Chemistry , eptember 4-8  2006

  • Photonic bandgap fiber for a sensing device

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • Absolute Calibration Technique using Micro-Droplet Ejection System for Enhancement of LIBS Quantitative Analysis

    ”, PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • Particle Element and Size Measurement Using LIBS(2006)

    , PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM,  2006

  • PHTONIC BANDGAP FIBER IN LOW CONCENTRATION GAS MEASUREMENT

    The First European Symposium on Plasma Chemist, May 28-30, (Poland)  2006

  • A novel lift off process and its application for capacitive tilt sensor

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • A Study on a Diode-bridge Type Capacitance Detection Circuit for Differential Capacitive Sensor

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • Study of Laser Induced breakdown spectroscopy from micro-droplet of NaCL Solution

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • Sensing of Gas Concentration Using Photonic Bandgap Fiber”

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • Application of Photonic Bandgap Fiber in Gas Concentration Measurement.”

    , The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris),  2006

  • Simulation of particle size measurement with LIBS

    ”, The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris)  2006

  • EXAMINATION OF 3D CAD SYSTEM ON ANISOTROPIC ETCHING OF ALPHA- QUARTZ

    Asia-Pacific Conference of Transducers and Micro-Nano Technology?APCOT 2006  2006

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    J. Adv. Qxid. Technol.  2006

  • Deep wet etching of Z cut quartz wafer for MEMS applications

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • High Frequency Drive of a Diode-bridge Type Differential Capacitance Detection Circuit

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • PHOTONIC BANDGAP FIBER IN LOW CONCETRATION MEASUREMENT

    10th International Symposium on High Pressure Low Temperature Plasma Chemistry , eptember 4-8  2006

  • Photonic bandgap fiber for a sensing device

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • Absolute Calibration Technique using Micro-Droplet Ejection System for Enhancement of LIBS Quantitative Analysis

    ”, PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM  2006

  • Particle Element and Size Measurement Using LIBS(2006)

    , PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM,  2006

  • PHTONIC BANDGAP FIBER IN LOW CONCENTRATION GAS MEASUREMENT

    The First European Symposium on Plasma Chemist, May 28-30, (Poland)  2006

  • A novel lift off process and its application for capacitive tilt sensor

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • A Study on a Diode-bridge Type Capacitance Detection Circuit for Differential Capacitive Sensor

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • Study of Laser Induced breakdown spectroscopy from micro-droplet of NaCL Solution

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • Sensing of Gas Concentration Using Photonic Bandgap Fiber”

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25  2006

  • Application of Photonic Bandgap Fiber in Gas Concentration Measurement.”

    , The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris),  2006

  • Simulation of particle size measurement with LIBS

    ”, The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris)  2006

  • EXAMINATION OF 3D CAD SYSTEM ON ANISOTROPIC ETCHING OF ALPHA- QUARTZ

    Asia-Pacific Conference of Transducers and Micro-Nano Technology?APCOT 2006  2006

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    J. Adv. Qxid. Technol.  2006

  • TILT SENSOR USING QUARTZ MEMS TECHNOLOGY

    2005 International Symposium on Nano Science and Technology November 10-11, Taiwan, Tainan  2005

  • High Sensitive Tilt Sensor for Quartz Micromachining

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)  2005

  • Performance Analysis of a Diode-bridge Type Differential Capacitance Detection Circuit and It’s Evaluation

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)  2005

  • In-situ Measurement of ppb Concentration of Gas

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)  2005

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    ELMECO-5, Naleczow (Poland)  2005

  • The measurement of ppb gas concentration using photonic crystal fiber

    ELMECO-5, Naleczow (Poland)  2005

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    Sensors and Materials,  2005

  • 蛍光X線膜厚計で使用するCr標準膜の開発(3)

    平成17年度電気関係学会支部連合体会  2005

  • MEMS技術を用いた白金薄膜水素ガスセンサの研究

    平成17年度電気関係学会支部連合体会  2005

  • α水晶の三次元加工のためのエッチング異方性の検討

    平成17年度電気関係学会支部連合体会  2005

  • スプレー法によるレジストコーティングの検討

    平成17年度電気関係学会支部連合体会  2005

  • LIBSによる食塩濃度の測定

    平成17年度電気関係学会支部連合体会  2005

  • 蛍光X線膜厚計で使用するCr標準膜の開発

    センサ・マイクロマシン準部門総合研究会  2005

  • 蛍光X線膜厚計で使用するCr標準膜の開発

    第48回自動制御連合講演会  2005

  • 水晶を用いた高感度傾斜角センサの検討

    平成17年度電気学会全国大会講演論文集 3  2005

  • 水晶MEMS技術による超高感度・超小型次世代センサの開発

    福岡水素エネルギー戦略会議総会記念講演会、福岡ナノテク推進会議  2005

  • 研究室便り、早稲田大学大学院情報生産システム研究科 植田研究室

    電気学会論文誌E  2005

  • TILT SENSOR USING QUARTZ MEMS TECHNOLOGY

    2005 International Symposium on Nano Science and Technology November 10-11, Taiwan, Tainan  2005

  • High Sensitive Tilt Sensor for Quartz Micromachining

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)  2005

  • Performance Analysis of a Diode-bridge Type Differential Capacitance Detection Circuit and It’s Evaluation

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)  2005

  • In-situ Measurement of ppb Concentration of Gas

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)  2005

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    ELMECO-5, Naleczow (Poland)  2005

  • The measurement of ppb gas concentration using photonic crystal fiber

    ELMECO-5, Naleczow (Poland)  2005

  • In-situ Measurement for Gas Concentrations using Tunable Lasers,

    電気学会論文誌E(IEEJ, Trans. SM)  2005

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    Sensors and Materials,  2005

  • TILT SENSOR USING QUARTZ MEMS TECHNOLOGY

    2005 International Symposium on Nano Science and Technology November 10-11, Taiwan, Tainan  2005

  • High Sensitive Tilt Sensor for Quartz Micromachining

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)  2005

  • Performance Analysis of a Diode-bridge Type Differential Capacitance Detection Circuit and It’s Evaluation

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)  2005

  • In-situ Measurement of ppb Concentration of Gas

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)  2005

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    ELMECO-5, Naleczow (Poland)  2005

  • The measurement of ppb gas concentration using photonic crystal fiber

    ELMECO-5, Naleczow (Poland)  2005

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    Sensors and Materials,  2005

  • Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Micro-mechanical Devices(invited speech)

    2004 International Symposium on Nano Science and Technology Novenver 20-21, Taiwan, Tainan  2004

  • Mechanical Strength of Quartz Micromechanical Devices

    Proceedings of The 21st Sensor Symposium  2004

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    4th Workshop Physical Chemistry of Wet Etching of Silicon, PCWES 2004 May 26-28, Montreal, Canada  2004

  • Particle Element and Size Measurement Using LIBS

    ICEE 2004 (Joint Conference with Asia-Pasific of Transducers and Micro-Nano Technology 2004) July 4-8 2004 in Sapporo  2004

  • Particle size measurement and material characterization with plasma atomic emission analysi

    Trans.of Airosll Research  2004

  • 蛍光X線膜厚計で使用するCr標準薄膜の開発

    平成16年度電気関係学会連合大会  2004

  • 高周波水晶発振器(VCXO)の加工技術に関する基礎的研究

    平成16年度電気関係学会連合大会  2004

  • α水晶のエッチング異方性に関する基礎研究

    平成16年度電気関係学会連合大会  2004

  • 水晶マイクロ・ナノ加工とデバイス応用(招待講演)、、pp1-2(2004)

    ナノテク研究・ビジネス最前線 H16/12/24・MEMSの最新技術と九州における展望  2004

  • Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Micro-mechanical Devices(invited speech)

    2004 International Symposium on Nano Science and Technology Novenver 20-21, Taiwan, Tainan  2004

  • Mechanical Strength of Quartz Micromechanical Devices

    Proceedings of The 21st Sensor Symposium  2004

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    4th Workshop Physical Chemistry of Wet Etching of Silicon, PCWES 2004 May 26-28, Montreal, Canada  2004

  • Particle Element and Size Measurement Using LIBS

    ICEE 2004 (Joint Conference with Asia-Pasific of Transducers and Micro-Nano Technology 2004) July 4-8 2004 in Sapporo  2004

  • プラズマ原子発光分析による微粒子の粒径・組成同時計測

    エアロゾル研究  2004

  • Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Micro-mechanical Devices(invited speech)

    2004 International Symposium on Nano Science and Technology Novenver 20-21, Taiwan, Tainan  2004

  • Mechanical Strength of Quartz Micromechanical Devices

    Proceedings of The 21st Sensor Symposium  2004

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    4th Workshop Physical Chemistry of Wet Etching of Silicon, PCWES 2004 May 26-28, Montreal, Canada  2004

  • Particle Element and Size Measurement Using LIBS

    ICEE 2004 (Joint Conference with Asia-Pasific of Transducers and Micro-Nano Technology 2004) July 4-8 2004 in Sapporo  2004

  • Particle size measurement and material characterization with plasma atomic emission analysi

    Trans.of Airosll Research  2004

  • Particle Element and Size Measurement Using LIBS

    SICE Annual Conference in Fukui, August 4-6  2003

  • In-situ Measurement for Gas Concentrations using Tunable Lasers"

    Proceedings of the 20th Sensor Symposium, B1-5, July  2003

  • レーザーブレイクダウン(LIBS)による微粒子計測

    、SICE第4回制御部門大会 予稿集  2003

  • 水晶振動子ナノ加工技術の研究開発” 高感度ガスセンサへの応用”

    ASTE Annual Report of RISE, Waseda Univ  2003

  • LD ビームデリバリ技術の研究開発

    ASTE Annual Report of RISE, Waseda Univ.  2003

  • 波長可変レーザーを用いた近赤外域での気体の分光計測

    第一回赤外放射の応用関連学会等年会  2003

  • 波長可変レーザーを用いた気体の高感度分光

    電気学会ケミカルセンサ研究会, CHS-03-56  2003

  • 紫外光光ファイバの試作と特性評価

    第22回レーザセンシングシンポジウム  2003

  • Particle Element and Size Measurement Using LIBS

    SICE Annual Conference in Fukui, August 4-6  2003

  • In-situ Measurement for Gas Concentrations using Tunable Lasers"

    Proceedings of the 20th Sensor Symposium, B1-5, July  2003

  • 精密加工と計測技術

    エヌ・ティー・エス  2003

  • Particle Element and Size Measurement Using LIBS

    SICE Annual Conference in Fukui, August 4-6  2003

  • In-situ Measurement for Gas Concentrations using Tunable Lasers"

    Proceedings of the 20th Sensor Symposium, B1-5, July  2003

  • Development of Technology for Measuring Part-per-billion Gas concentrations and Nano-particles

    Final report of The "Advanced Photon Proccesing Measurement Technology"  2002

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    Proc. SPIE , Photon Processing in Microelectronics and Photonics  2002

  • Growth of strain-blanced InAsp/InP/InGaAs multiple quantum well for infrared photodetectors

    20th Sensor Symposium  2002

  • Laser with SBS Pulse Compression for LIBS

    Trns. IEE of Japan  2002

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    Trns. IEE of Japan  2002

  • 水晶振動子ナノ加工技術の研究開発

    ASTE Annual Report of RISE, Waseda Univ.  2002

  • ppbガス濃度とナノ粒子計測技術の研究開発

    フォトン計測・加工技術」プロジェクト成果報告会講演集  2002

  • Development of Technology for Measuring Part-per-billion Gas concentrations and Nano-particles

    Final report of The "Advanced Photon Proccesing Measurement Technology"  2002

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    Proc. SPIE , Photon Processing in Microelectronics and Photonics  2002

  • Growth of strain-blanced InAsp/InP/InGaAs multiple quantum well for infrared photodetectors

    20th Sensor Symposium  2002

  • Laser with SBS Pulse Compression for LIBS

    電気学会論文誌E  2002

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    電気学会論文誌E, Vol.122, No.1  2002

  • Development of Technology for Measuring Part-per-billion Gas concentrations and Nano-particles

    Final report of The "Advanced Photon Proccesing Measurement Technology"  2002

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    Proc. SPIE , Photon Processing in Microelectronics and Photonics  2002

  • Growth of strain-blanced InAsp/InP/InGaAs multiple quantum well for infrared photodetectors

    20th Sensor Symposium  2002

  • Laser with SBS Pulse Compression for LIBS

    Trns. IEE of Japan  2002

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    Trns. IEE of Japan  2002

  • High-Sensitive Mesurement Technology for IR Spectroscopy

    Proceedings of The 5th Symposium Advanced Photon Processing and Mesurement Technology  2001

  • Development of In-situ Nono-Particle Measurement

    Proceedings of the 5th Symposium Advanced Photon Processing and Measurement Technology  2001

  • Detection of Carbon and Cluster Parameter by Laser-Induced Plasms Line Radiation

    IWFAC'2001'Fulluence and Atomic Clusters'in Saint-Petersburg  2001

  • Growth of strain-balanced InAsP-InP-InGaAs multiple quantum well structures for mid-infrared photo detectors CLEO/Pacific Rim

    CLEO/Pacific Rim/Ⅰ  2001

  • Particle Elements and Size Measurement Using LIB

    18th Sensor Symposium, May, 30  2001

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    18th Sensor Symposium, May, 29  2001

  • In-situ Spectroscopic Measurement of Gas Using Tunable Lasers and InGaAs Photodiodes

    18th Sensor Symposium, May, 29  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    18th Sensor Symposium, May, 30  2001

  • Laser with SBS Pulse Compression for LIBS

    18th Sensor Symposium, May, 29  2001

  • Optical lithium targets for laser plasma lithography, SPIE 2001/.3/1

    Proc. SPIE , Emerging Lithographic Technologies V  2001

  • Laser Detection of the Parameters of Small Solid Particle Located in Air, Laser Optics Conference LO2000

    Proc. SPIE ,Laser Optics  2001

  • Spectroscopic detection of ammonia using diode-pumped difference-frequency generation

    SPIE-photonic 2001, Proceedings of SPIE, Jan.24  2001

  • High Sensitive Quartz Crystal Microphone Using Micro-Machining Technology

    Trns. IEE of Japan  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    Trns. IEE of Japan  2001

  • MOVPE成長法による大面積2.5μm InGaAsフォトダイオードの製作

    2001年秋季応用物理学会学術講演会  2001

  • レーザーブレークダウン分光による微粒子成分・粒径計測

    SICE学術講演会  2001

  • 可変波長レーザーを用いた気体のIn-situ計測

    SICE学術講演会  2001

  • LIBSによる微粒子計測の可能性

    レーザーアブレーション調査専門委員会  2001

  • 中赤外QWIP用InAsP/Inp/InGaAs歪バランス多重量子井戸構造のMOVPE成長

    第48回応用物理学関係連合講演会  2001

  • 波長可変レーザーと高感度InGaAs光検出器によるin-situガス濃度計測

    レーザー学会第290回研究会  2001

  • LIBSによるナノ粒子計測

    第4回「フォトン計測・加工技術」ワークショップ  2001

  • 気体の超高感度in-situ計測

    第4回「フォトン計測・加工技術」ワークショップ  2001

  • High-Sensitive Mesurement Technology for IR Spectroscopy

    Proceedings of The 5th Symposium Advanced Photon Processing and Mesurement Technology  2001

  • Development of In-situ Nono-Particle Measurement

    Proceedings of the 5th Symposium Advanced Photon Processing and Measurement Technology  2001

  • Detection of Carbon and Cluster Parameter by Laser-Induced Plasms Line Radiation

    IWFAC'2001'Fulluence and Atomic Clusters'in Saint-Petersburg  2001

  • Growth of strain-balanced InAsP-InP-InGaAs multiple quantum well structures for mid-infrared photo detectors CLEO/Pacific Rim

    CLEO/Pacific Rim/Ⅰ  2001

  • Particle Elements and Size Measurement Using LIB

    18th Sensor Symposium, May, 30  2001

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    18th Sensor Symposium, May, 29  2001

  • In-situ Spectroscopic Measurement of Gas Using Tunable Lasers and InGaAs Photodiodes

    18th Sensor Symposium, May, 29  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    18th Sensor Symposium, May, 30  2001

  • Laser with SBS Pulse Compression for LIBS

    18th Sensor Symposium, May, 29  2001

  • Optical lithium targets for laser plasma lithography, SPIE 2001/.3/1

    Proc. SPIE , Emerging Lithographic Technologies V  2001

  • Laser Detection of the Parameters of Small Solid Particle Located in Air, Laser Optics Conference LO2000

    Proc. SPIE ,Laser Optics  2001

  • Spectroscopic detection of ammonia using diode-pumped difference-frequency generation

    SPIE-photonic 2001, Proceedings of SPIE, Jan.24  2001

  • 水晶マイクロマシニングを利用した高感度マイクロフォン

    電気学会論文誌 E  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    電気学会論文誌E  2001

  • High-Sensitive Mesurement Technology for IR Spectroscopy

    Proceedings of The 5th Symposium Advanced Photon Processing and Mesurement Technology  2001

  • Development of In-situ Nono-Particle Measurement

    Proceedings of the 5th Symposium Advanced Photon Processing and Measurement Technology  2001

  • Detection of Carbon and Cluster Parameter by Laser-Induced Plasms Line Radiation

    IWFAC'2001'Fulluence and Atomic Clusters'in Saint-Petersburg  2001

  • Growth of strain-balanced InAsP-InP-InGaAs multiple quantum well structures for mid-infrared photo detectors CLEO/Pacific Rim

    CLEO/Pacific Rim/Ⅰ  2001

  • Particle Elements and Size Measurement Using LIB

    18th Sensor Symposium, May, 30  2001

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    18th Sensor Symposium, May, 29  2001

  • In-situ Spectroscopic Measurement of Gas Using Tunable Lasers and InGaAs Photodiodes

    18th Sensor Symposium, May, 29  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    18th Sensor Symposium, May, 30  2001

  • Laser with SBS Pulse Compression for LIBS

    18th Sensor Symposium, May, 29  2001

  • Optical lithium targets for laser plasma lithography, SPIE 2001/.3/1

    Proc. SPIE , Emerging Lithographic Technologies V  2001

  • Laser Detection of the Parameters of Small Solid Particle Located in Air, Laser Optics Conference LO2000

    Proc. SPIE ,Laser Optics  2001

  • Spectroscopic detection of ammonia using diode-pumped difference-frequency generation

    SPIE-photonic 2001, Proceedings of SPIE, Jan.24  2001

  • High Sensitive Quartz Crystal Microphone Using Micro-Machining Technology

    Trns. IEE of Japan  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    Trns. IEE of Japan  2001

  • Development of Pulse Laser for Laser Induced Breakdown

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22  2000

  • High-Sensitive Measurement Technology for IR Spectoroscopy

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22  2000

  • Laser Detection of the Parameters of Small Solid Particle in Gas Atmosphere

    Proc. SPIE , Laser Plasma Generation and Diagnostics  2000

  • Interaction of Laser Radiation with Small Solid Particle in Air

    ECLM.  2000

  • Laser Plasma Radiation from Small Solid Particle in Gas Atmosphere

    Proc. SPIE , Laser Plasma  2000

  • Higt Peak Power Pulse Laser for Laser Induced Breakdown,

    Proc. SPIE , Advanced High-Power Lasers  2000

  • Diffusion in Zinc in InP, InAsP and InGaAs by the Metal-organic Vapor-phase Diffusion Technique

    Defects and Diffusion in Semiconductors  2000

  • Temperature Dependence of the Energy Gap in InAsyP1-y

    Applie Physics Leters  2000

  • High Frequency and High Speed IC Inspection Probe Using Quartz Crystal Micri-Blance

    Trns. IEE of Japan  2000

  • レーザーブレークダウンによる微粒子計測

    SICE学術講演会  2000

  • PPLNを用いた気体の吸収分光用可変レーザー

    SICE学術講演会  2000

  • レーザーブレイクダウン用高ピークパワーパルスレーザー

    レーザー学会277回研究会  2000

  • 微粒子成分・粒径計測の研究開発

    第3回「フォトン計測・加工技術」ワークショップ  2000

  • ガスの濃度成分計測技術の研究開発

    第3回「フォトン計測・加工技術」ワークショップ  2000

  • Development of Pulse Laser for Laser Induced Breakdown

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22  2000

  • High-Sensitive Measurement Technology for IR Spectoroscopy

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22  2000

  • Laser Detection of the Parameters of Small Solid Particle in Gas Atmosphere

    Proc. SPIE , Laser Plasma Generation and Diagnostics  2000

  • Interaction of Laser Radiation with Small Solid Particle in Air

    ECLM.  2000

  • Laser Plasma Radiation from Small Solid Particle in Gas Atmosphere

    Proc. SPIE , Laser Plasma  2000

  • Higt Peak Power Pulse Laser for Laser Induced Breakdown,

    Proc. SPIE , Advanced High-Power Lasers  2000

  • Diffusion in Zinc in InP, InAsP and InGaAs by the Metal-organic Vapor-phase Diffusion Technique

    Defects and Diffusion in Semiconductors  2000

  • Temperature Dependence of the Energy Gap in InAsyP1-y

    Applie Physics Leters  2000

  • 水晶マイクロ天秤を使用した高速・高周波IC検査プローブ

    電気学会論文誌 E  2000

  • Development of Pulse Laser for Laser Induced Breakdown

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22  2000

  • High-Sensitive Measurement Technology for IR Spectoroscopy

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22  2000

  • Laser Detection of the Parameters of Small Solid Particle in Gas Atmosphere

    Proc. SPIE , Laser Plasma Generation and Diagnostics  2000

  • Interaction of Laser Radiation with Small Solid Particle in Air

    ECLM.  2000

  • Laser Plasma Radiation from Small Solid Particle in Gas Atmosphere

    Proc. SPIE , Laser Plasma  2000

  • Higt Peak Power Pulse Laser for Laser Induced Breakdown,

    Proc. SPIE , Advanced High-Power Lasers  2000

  • Diffusion in Zinc in InP, InAsP and InGaAs by the Metal-organic Vapor-phase Diffusion Technique

    Defects and Diffusion in Semiconductors  2000

  • Temperature Dependence of the Energy Gap in InAsyP1-y

    Applie Physics Leters  2000

  • High Frequency and High Speed IC Inspection Probe Using Quartz Crystal Micri-Blance

    Trns. IEE of Japan  2000

  • Particle elements and Diameter Measurement Technologies

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8  1999

  • Higt-Sensitive Measurement Technology for IR Spectroscopy

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8  1999

  • In-situ Status measurment

    The 2st Symposium on Advanced Photon Processing and Measurement Technologies  1999

  • Optical MEMES

    Spie-The International Society for Optical Engineeing  1999

  • MOVPE成長法による低暗電流・高感度2.5μm InGaAsフォトダイオードの製作

    1999年秋季第60回応用物理学会学術講演会、講演予稿集  1999

  • n-InpへのZnアクセプタ拡散のキャリァ濃度依存症

    第46回応用物理学会学術講演会、講演予稿集  1999

  • レーザーブレークダウン(L BD)による微粒子計測

    Sice'99, July28-30  1999

  • 1-2.6μm 高感度InGaAs近赤外検出素子

    第46回応用物理学会春期講演会  1999

  • レーザーブレークダウン用パルスレーザー

    第46回応用物理学会春期講演会  1999

  • In-situ状態計測-レーザーブレークダウン用マイクロチップレーザー

    レーザー熱加工研究会誌  1999

  • 半導体製造工程におけるIn-situ状態計測、

    レーザー学会誌  1999

  • レーザーブレークダウン校正装置の試作

    第2回「フォトン計測・加工技術」ワークショップ  1999

  • ガス濃度計測用赤外光検出器

    第2回「フォトン計測・加工」ワークショップ  1999

  • Particle elements and Diameter Measurement Technologies

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8  1999

  • Higt-Sensitive Measurement Technology for IR Spectroscopy

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8  1999

  • In-situ Status measurment

    The 2st Symposium on Advanced Photon Processing and Measurement Technologies  1999

  • Optical MEMES

    Spie-The International Society for Optical Engineeing  1999

  • 超音波便覧

    丸善  1999

  • Particle elements and Diameter Measurement Technologies

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8  1999

  • Higt-Sensitive Measurement Technology for IR Spectroscopy

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8  1999

  • In-situ Status measurment

    The 2st Symposium on Advanced Photon Processing and Measurement Technologies  1999

  • Optical MEMES

    Spie-The International Society for Optical Engineeing  1999

  • In-situ Status measurment Technology

    The 1st Symposium on Advanced Photon Processing and Measurement Technologies  1998

  • 水晶のマイクロ加工とその応用

    第27回EMシンポジウム  1998

  • ガス濃度計測用赤外光検出器

    第1回「フォトン計測・加工」ワークショップ  1998

  • レーザーブレークダウンによる微粒子計測

    第1回「フォトン計測・加工技術」ワークショップ  1998

  • In-situ Status measurment Technology

    The 1st Symposium on Advanced Photon Processing and Measurement Technologies  1998

  • In-situ Status measurment Technology

    The 1st Symposium on Advanced Photon Processing and Measurement Technologies  1998

  • マイクロ天秤を用いたEOプローバの基本特性

    第25回EMシンポジウム  1996

  • マイクロ天秤を用いたEOプローバ

    横河技報  1996

  • A Piezoelectric & Electrostatic Actuator to Generate Pseudo-Static Displacement from Resonant Oscillation

    4th Japan Int., SAMPE Symposium & Exhaibition, JISSE-4, Sep.25-28  1995

  • A Piezoelectric Pseudo-Static Actuator for Large Displacement under AC Voltage Operation

    The 8th International Conference on Solid-State Sensors and Actuators Transducer'95, Stockholm, Sweden, Jun.25-29  1995

  • An Electro statically Operated Torsion Mirror for Optical Switching Device"

    The 8th International Conference on Solid-State Sensors and Actuators(TRANSDUCERS'95), Stockholm, Sweden, Jun.  1995

  • A Piezoelectrically Openrated Optical Chopper by Quartz Micromachining

    IEEE/ASME Journal of Micromechanical Systems  1995

  • A Quartz Crystal Microbalance-Type Odor Sensor Using PVC-Blended Lipid Membrane

    IEEE Transactions on Instrumentation and Measurement, Vol.44, No.3  1995

  • マイクロ天秤を用いたEOプローバ

    第24回EMシンポジウム  1995

  • A Piezoelectric & Electrostatic Actuator to Generate Pseudo-Static Displacement from Resonant Oscillation

    4th Japan Int., SAMPE Symposium & Exhaibition, JISSE-4, Sep.25-28  1995

  • A Piezoelectric Pseudo-Static Actuator for Large Displacement under AC Voltage Operation

    The 8th International Conference on Solid-State Sensors and Actuators Transducer'95, Stockholm, Sweden, Jun.25-29  1995

  • An Electro statically Operated Torsion Mirror for Optical Switching Device"

    The 8th International Conference on Solid-State Sensors and Actuators(TRANSDUCERS'95), Stockholm, Sweden, Jun.  1995

  • A Piezoelectrically Openrated Optical Chopper by Quartz Micromachining

    IEEE/ASME Journal of Micromechanical Systems  1995

  • A Quartz Crystal Microbalance-Type Odor Sensor Using PVC-Blended Lipid Membrane

    IEEE Transactions on Instrumentation and Measurement, Vol.44, No.3  1995

  • 計測自動制御学会編:計測制御技術事典

    丸善  1995

  • A Piezoelectric & Electrostatic Actuator to Generate Pseudo-Static Displacement from Resonant Oscillation

    4th Japan Int., SAMPE Symposium & Exhaibition, JISSE-4, Sep.25-28  1995

  • A Piezoelectric Pseudo-Static Actuator for Large Displacement under AC Voltage Operation

    The 8th International Conference on Solid-State Sensors and Actuators Transducer'95, Stockholm, Sweden, Jun.25-29  1995

  • An Electro statically Operated Torsion Mirror for Optical Switching Device"

    The 8th International Conference on Solid-State Sensors and Actuators(TRANSDUCERS'95), Stockholm, Sweden, Jun.  1995

  • A Piezoelectrically Openrated Optical Chopper by Quartz Micromachining

    IEEE/ASME Journal of Micromechanical Systems  1995

  • A Quartz Crystal Microbalance-Type Odor Sensor Using PVC-Blended Lipid Membrane

    IEEE Transactions on Instrumentation and Measurement, Vol.44, No.3  1995

  • A Self-excited Chopper made by Quartz Micromachining and its Application to an Optical Sensor

    Proc.7th IEEE Workshop on Micro Electro Mechanical Systems, MEMS'94, Jan.25-28  1994

  • A Quartz Crystal Microbalance-type Oder Sensor Using PVC-blended Lipid Membrane

    IMTC'94 Hamamatsu  1994

  • A Piezoelectric Quartz Micro actuator for a Large Static Displacement

    Jpn.J.Appl.Phys Vol.33  1994

  • 非線型振動を利用した擬スタティック変位アクチュエータ

    マイクロ理工学研究会、早稲田大学  1994

  • 水晶基板による圧電駆動型アクチュエータ

    電気学会第23回EMシンポジウム  1994

  • 水晶のマイクロマシニングによるセンサ

    超音波TECHNO4月号  1994

  • 非線形振動を利用した擬スタティック変位アクチュエータ

    マイクロ理工学研究会・マイクロマシーニング研究会 合同研究会  1994

  • A Self-excited Chopper made by Quartz Micromachining and its Application to an Optical Sensor

    Proc.7th IEEE Workshop on Micro Electro Mechanical Systems, MEMS'94, Jan.25-28  1994

  • A Quartz Crystal Microbalance-type Oder Sensor Using PVC-blended Lipid Membrane

    IMTC'94 Hamamatsu  1994

  • A Piezoelectric Quartz Micro actuator for a Large Static Displacement

    Jpn.J.Appl.Phys Vol.33  1994

  • A Self-excited Chopper made by Quartz Micromachining and its Application to an Optical Sensor

    Proc.7th IEEE Workshop on Micro Electro Mechanical Systems, MEMS'94, Jan.25-28  1994

  • A Quartz Crystal Microbalance-type Oder Sensor Using PVC-blended Lipid Membrane

    IMTC'94 Hamamatsu  1994

  • A Piezoelectric Quartz Micro actuator for a Large Static Displacement

    Jpn.J.Appl.Phys Vol.33  1994

  • A Pezoelectrically Opearated Chopper by Quartz Micromachining

    The 7th International Conference on Solid-State Sensors and Actuators, Transducer'93, Yokohama Japan, Jun.7-10  1993

  • Pezoelectrically Opearated Actuators by Quartz Micromachining for Optical Application

    Proceedings IEEE Micro Electro-Mechanical Systems, Fort Lauderdale, Florida  1993

  • A Galvanometer Using Qurtz Micromachining

    Transaction of Instrument and Control Engineers  1993

  • 圧電駆動型水晶マイクロアクチュエータ

    1993年秋季第54回応用物理学会学術講演会  1993

  • A Pezoelectrically Opearated Chopper by Quartz Micromachining

    The 7th International Conference on Solid-State Sensors and Actuators, Transducer'93, Yokohama Japan, Jun.7-10  1993

  • Pezoelectrically Opearated Actuators by Quartz Micromachining for Optical Application

    Proceedings IEEE Micro Electro-Mechanical Systems, Fort Lauderdale, Florida  1993

  • 水晶のマイクロマシニングによるガルバノメータ

    計測自動制御学会論文集  1993

  • 計測用語

    日本規格協会  1993

  • A Pezoelectrically Opearated Chopper by Quartz Micromachining

    The 7th International Conference on Solid-State Sensors and Actuators, Transducer'93, Yokohama Japan, Jun.7-10  1993

  • Pezoelectrically Opearated Actuators by Quartz Micromachining for Optical Application

    Proceedings IEEE Micro Electro-Mechanical Systems, Fort Lauderdale, Florida  1993

  • A Galvanometer Using Qurtz Micromachining

    Transaction of Instrument and Control Engineers  1993

  • A New two-color pyrometer using optical fibers, Temperature

    American Institute of Physics  1992

  • Temperature Sensor Using Quartz Tuning-Fork Resonator, Temperature

    American Institute of Physics, Vol.6  1992

  • Measurement of Absolute Distance Employing Tunable CW Dye Laser

    IEEE Transactions on Instrumentation and Measurement  1992

  • 収束イオンビームの資料吸収電流画像

    1992年秋期応用物理学会学術講演会  1992

  • 水晶のマイクロマシニングによる光シャッタ

    電気学会 産業計測制御研究会、資料ⅡC-92-16  1992

  • Volt Image Measurement for LSI Analysis

    SICE92  1992

  • 水晶振動子式PVCブレンド脂質膜においセンサ

    第22回EMシンポジウム  1992

  • アブソリュート則長器

    横河技報  1992

  • 水晶振動子式PVCブレンド脂質膜においセンサ

    電子回路研究会資料ETC-92-39  1992

  • 水晶のマイクロマシニングによる光シャッタ

    電気学会 産業計測制御研究会 資料 IIC-92-16  1992

  • マイクロマシニングによる水晶光スキャナ

    OPTONICS  1992

  • 水晶のマイクロ加工技術を利用した高安定水晶発振器

    機能EM回路デバイス調査専門委員会資料  1992

  • A New two-color pyrometer using optical fibers, Temperature

    American Institute of Physics  1992

  • Temperature Sensor Using Quartz Tuning-Fork Resonator, Temperature

    American Institute of Physics, Vol.6  1992

  • Measurement of Absolute Distance Employing Tunable CW Dye Laser

    IEEE Transactions on Instrumentation and Measurement  1992

  • Siマイクロマシニング先端技術

    サイエンスフォーラム  1992

  • A New two-color pyrometer using optical fibers, Temperature

    American Institute of Physics  1992

  • Temperature Sensor Using Quartz Tuning-Fork Resonator, Temperature

    American Institute of Physics, Vol.6  1992

  • Measurement of Absolute Distance Employing Tunable CW Dye Laser

    IEEE Transactions on Instrumentation and Measurement  1992

  • A Quartz Galvanometer For Optical Scanning in a Laser Printer Application

    TRANSDUCER'91 Proceedings of the 8th International Conference on Solid-State Sensors and Actuators  1991

  • Development of a Wavelength-Stabilized Light Source with a Laser Diode

    Trns. IEE of Japan  1991

  • 波長レーザーを用いたアブソリュート測長

    SICE 91  1991

  • 共焦点光学系における深さ方向分解能の検討

    SICE 91  1991

  • 音叉振動子を用いた水晶温度センサ

    計測自動制御学会創立30周年講演会  1991

  • A Quartz Galvanometer For Optical Scanning in a Laser Printer Application

    TRANSDUCER'91 Proceedings of the 8th International Conference on Solid-State Sensors and Actuators  1991

  • 波長安定化半導体レーザ光源の開発

    電気学会論文誌C  1991

  • 1991年薄膜電子デバイス年鑑

    プレスジャーナル  1991

  • A Quartz Galvanometer For Optical Scanning in a Laser Printer Application

    TRANSDUCER'91 Proceedings of the 8th International Conference on Solid-State Sensors and Actuators  1991

  • Development of a Wavelength-Stabilized Light Source with a Laser Diode

    Trns. IEE of Japan  1991

  • Development of a wavelength-Stabilized Light Source with a Laser Diode

    YOKOGAWA Technical Report English Edition  1990

  • Revolution Counter Using Magnetic Bubble Device for Multi-turn Absolute Encoder

    Sensors and Actuators,A21-A23  1990

  • Multi-turn Absolute Encoder Using Special Filter

    JSME International Journal, SeriesⅢ  1990

  • レーザプリンタ用水晶光スキャナ(2)体外部振動特性の改善

    SICE 90  1990

  • 水晶のマイクロ加工とその応用

    精密工学会自動組立専門委員会、研究例会講演前刷集  1990

  • マイクロマシニング技術による水晶デバイス

    月刊 Semiconductor World  1990

  • レーザプリンタ用水晶光スキャナ

    第19回EMシンポジウム  1990

  • Development of a wavelength-Stabilized Light Source with a Laser Diode

    YOKOGAWA Technical Report English Edition  1990

  • Revolution Counter Using Magnetic Bubble Device for Multi-turn Absolute Encoder

    Sensors and Actuators,A21-A23  1990

  • Multi-turn Absolute Encoder Using Special Filter

    JSME International Journal, SeriesⅢ  1990

  • Development of a wavelength-Stabilized Light Source with a Laser Diode

    YOKOGAWA Technical Report English Edition  1990

  • Revolution Counter Using Magnetic Bubble Device for Multi-turn Absolute Encoder

    Sensors and Actuators,A21-A23  1990

  • Multi-turn Absolute Encoder Using Special Filter

    JSME International Journal, SeriesⅢ  1990

  • Development of a Stabillized Optical Source with a Laser Diode,

    SPIE, Laser Interferometory  1989

  • Revolution Counter Using Magnetic Babble Device for Multi-Turn Absolute Encoder

    TRANSDUCER'89, Proceedings of the 5th International Conference on Solid-State Sensors and Actuators  1989

  • レーザプリンタ用水晶光スキャナ(2)体外部振動特性の改善

    SICE 89  1989

  • 波長安定化半導体レーザ光源の開発

    第18回EMシンポジウム  1989

  • 波長安定化半導体レーザ光源の開発

    横河技報  1989

  • Development of a Stabillized Optical Source with a Laser Diode,

    SPIE, Laser Interferometory  1989

  • Revolution Counter Using Magnetic Babble Device for Multi-Turn Absolute Encoder

    TRANSDUCER'89, Proceedings of the 5th International Conference on Solid-State Sensors and Actuators  1989

  • Development of a Stabillized Optical Source with a Laser Diode,

    SPIE, Laser Interferometory  1989

  • Revolution Counter Using Magnetic Babble Device for Multi-Turn Absolute Encoder

    TRANSDUCER'89, Proceedings of the 5th International Conference on Solid-State Sensors and Actuators  1989

  • A Stabilized Optical Source With Laser Diode For Distance Measurement

    CPEM '88 DIGEST  1988

  • Multi-Turn Absolute Encoder Using Spatial Filter

    The International Conference on ADVANCED MECHATRONICS  1988

  • Prcision Pressure Transducer Using Double-Ended Tuning Fork Resonstor

    Trns. IEE of Japan  1988

  • 電子ビーム直接描画によるエンコーダのコード板の製作

    SICE 87  1988

  • 水晶振動子を用いたセンサ

    センサ技術  1988

  • 測長器用波長安定化半導体レーザー光源

    第5回 センシングフォーラム  1988

  • A Stabilized Optical Source With Laser Diode For Distance Measurement

    CPEM '88 DIGEST  1988

  • Multi-Turn Absolute Encoder Using Spatial Filter

    The International Conference on ADVANCED MECHATRONICS  1988

  • 複合音叉振動子を用いた高精度圧力計

    電気学会論文誌C  1988

  • A Stabilized Optical Source With Laser Diode For Distance Measurement

    CPEM '88 DIGEST  1988

  • Multi-Turn Absolute Encoder Using Spatial Filter

    The International Conference on ADVANCED MECHATRONICS  1988

  • Prcision Pressure Transducer Using Double-Ended Tuning Fork Resonstor

    Trns. IEE of Japan  1988

  • Optical Absolute Encoder Using Spatial Filter

    Proceeding of SPIE-The International Society for Optical Engineering, Photomechanics and Speckle Metrology  1987

  • Theory to Predict Etching Shapes of Quartz Crystal and It's Application to Design Devices

    Transaction of Instrument and Control Engineers  1987

  • Temperature Sensor Using Tuning Fork Resonator

    Transaction of Instrument and Control Engineers  1987

  • レーザ振動変位計算

    SICE 87  1987

  • 半導体レーザを用いた測長器用2波長安定化光源

    SICE 87  1987

  • 水晶温度計(4)-温度校正式の検討

    SICE 87  1987

  • ロータリィアブソリュートエンコーダ

    SICE 87  1987

  • 空間フィルタ検出器を用いた光ファイバ干渉計の温度計

    第34回応用物理学関係連合講演会  1987

  • 多モードファイバ干渉計の温度計測への応用

    第34回応用物理学関係連合講演会  1987

  • 水晶のエッチング異方性とそれを応用したデバイス

    電気学会全国大会  1987

  • 複合音叉振動子を用いた圧力計

    第16回EMシンポジウム  1987

  • Optical Absolute Encoder Using Spatial Filter

    Proceeding of SPIE-The International Society for Optical Engineering, Photomechanics and Speckle Metrology  1987

  • 水晶のエッチング形状の予測法とそのデバイス設計への応用

    計測自動制御学会論文集  1987

  • 音叉振動子を用いた水晶温度センサ

    計測自動制御学会論文集  1987

  • Optical Absolute Encoder Using Spatial Filter

    Proceeding of SPIE-The International Society for Optical Engineering, Photomechanics and Speckle Metrology  1987

  • Theory to Predict Etching Shapes of Quartz Crystal and It's Application to Design Devices

    Transaction of Instrument and Control Engineers  1987

  • Temperature Sensor Using Tuning Fork Resonator

    Transaction of Instrument and Control Engineers  1987

  • Temperature Sensor Using Quartz Tuning Fork Resonator

    Proceedings of The 40th Annual Frequency Control Symposium  1986

  • ファイバ放射温度計

    SICE 86  1986

  • 水晶温度計(3)-広範囲温度計プローブ

    SICE 86  1986

  • 走査型空間フィルタを用いたアブソリュートエンコーダ

    SICE 86  1986

  • レーザ・スペックル歪計の進展

    第18回ひずみ測定シンポジウム  1986

  • Temperature Sensor Using Quartz Tuning Fork Resonator

    Proceedings of The 40th Annual Frequency Control Symposium  1986

  • レーザースペックルひずみ計の高速化

    非破壊検査  1986

  • リニアモータ応用ハンドブック

    工業調査会  1986

  • センサ用語辞典編集委員会編:センサ用語辞典

    情報調査会  1986

  • Temperature Sensor Using Quartz Tuning Fork Resonator

    Proceedings of The 40th Annual Frequency Control Symposium  1986

  • Accelerated Laser Speckle Strain Gauge, Proceedings of SPIE-

    The International Society for Optical Engineering, Vol.556  1985

  • Three-Dimensional Displacement Meter

    Proceedings of SPIE-The International Society for Optical Engineering,  1985

  • Quartz Crystal Micromechanical Devices

    Proceeding of the International Conference on Solid-State Sensors-Transducer'85  1985

  • Precision Transducers Using Mechanical Resonators

    The Jounal of the Society of Instrument and Control Engineers  1985

  • Accelerated Laser Speckle Strain Gauge

    Optical Engineering  1985

  • Precision Force Transducer Using Mechanical Resonators

    Mesurement  1985

  • Precision Transducers Using Mechanical Resonators

    Transaction of Instrument and Control Engineers  1985

  • スペックル振動センサ

    第46回応用物理学会学術講演会  1985

  • 電子走査型空間フィルタ検出器によるスペックル歪計の高速化

    第23回応用物理学関係連合講演会  1985

  • 横振動梁を使用した小型高精度圧力計のマルチレンジ化

    第24回 SICE 学術講演会  1985

  • 水晶温度計(2)-水晶温度センサの低温での特性

    第24回 SICE 学術講演会  1985

  • 水晶温度計(1)-水晶振動子の基本特性

    第24回 SICE 学術講演会  1985

  • 水晶を利用したマイクロメカニカルデバイス

    横河技報  1985

  • 水晶を利用したマイクロメカニカルセンサ

    電子通信学会委員会報告  1985

  • 高温下における計測技術

    塑性と加工  1985

  • Accelerated Laser Speckle Strain Gauge, Proceedings of SPIE-

    The International Society for Optical Engineering, Vol.556  1985

  • Three-Dimensional Displacement Meter

    Proceedings of SPIE-The International Society for Optical Engineering,  1985

  • Quartz Crystal Micromechanical Devices

    Proceeding of the International Conference on Solid-State Sensors-Transducer'85  1985

  • 機械振動子を利用した高精度センサ

    計測と制御  1985

  • Accelerated Laser Speckle Strain Gauge

    Optical Engineering  1985

  • Precision Force Transducer Using Mechanical Resonators

    Mesurement  1985

  • 機械振動子を利用した高精度センサ

    計測と制御  1985

  • Accelerated Laser Speckle Strain Gauge, Proceedings of SPIE-

    The International Society for Optical Engineering, Vol.556  1985

  • Three-Dimensional Displacement Meter

    Proceedings of SPIE-The International Society for Optical Engineering,  1985

  • Quartz Crystal Micromechanical Devices

    Proceeding of the International Conference on Solid-State Sensors-Transducer'85  1985

  • Precision Transducers Using Mechanical Resonators

    The Jounal of the Society of Instrument and Control Engineers  1985

  • Accelerated Laser Speckle Strain Gauge

    Optical Engineering  1985

  • Precision Force Transducer Using Mechanical Resonators

    Mesurement  1985

  • Precision Transducers Using Mechanical Resonators

    Transaction of Instrument and Control Engineers  1985

  • Precision Transducer Using Mechanical Resonator

    Yokogawa Technical Report English Edition  1984

  • Precision Force Tra sducer Using Mechanical Resonators

    Proceedings of IMEKO TC-3 on Measurement of Force and Mass  1984

  • Precion Transducer Using Mecanical Resonators

    Deshi Tokyo  1984

  • 赤外線ガス分析用水晶マイクロホン

    第23回 SICE 学術講演会  1984

  • 回転型超音波ポテンショメータ

    第23回 SICE 学術講演会  1984

  • 横振動梁を使用した小型高精度圧力計

    第23回 SICE 学術講演会  1984

  • Precision Transducer Using Mechanical Resonator

    Yokogawa Technical Report English Edition  1984

  • Precision Force Tra sducer Using Mechanical Resonators

    Proceedings of IMEKO TC-3 on Measurement of Force and Mass  1984

  • Precion Transducer Using Mecanical Resonators

    Deshi Tokyo  1984

  • Precision Transducer Using Mechanical Resonator

    Yokogawa Technical Report English Edition  1984

  • Precision Force Tra sducer Using Mechanical Resonators

    Proceedings of IMEKO TC-3 on Measurement of Force and Mass  1984

  • Precion Transducer Using Mecanical Resonators

    Deshi Tokyo  1984

  • レーザースペックルを用いた三次元変位測定器

    第22回 SICE 学術講演会  1983

  • Displacement Transducer Using Magnetostrictive Delay Line

    Transaction of Instrument and Control Engineers  1981

  • 水晶歪ゲージ

    第20回 SICE 学術講演会  1981

  • 水晶偏光器

    第20回 SICE 学術講演会  1981

  • 横振動梁を使用した圧力計

    第20回 SICE 学術講演会  1981

  • 横振動梁を使用した電子はかり

    第20回 SICE 学術講演会  1981

  • 磁歪遅延線を使用した変位変換器

    計測自動制御学会論文集  1981

  • Displacement Transducer Using Magnetostrictive Delay Line

    Transaction of Instrument and Control Engineers  1981

  • 横振動梁を使用した検出器

    第19回 SICE 学術講演会  1980

  • 磁歪遅延式超音波ポテンショメータ

    第18回 SICE 学術講演会  1979

  • ディジタルマノメータ

    横河技報  1976

  • Micro actuators Based on Newly Developed Pseudo static Displacement Mechanism

    1995 Int.Mechanical Eng.Congress & Exposition, ASME'95, Nov.12-17, (1995), San Francisco Hilton, San Fran Cisco, California 

  • Micro actuators Based on Newly Developed Pseudo static Displacement Mechanism

    1995 Int.Mechanical Eng.Congress & Exposition, ASME'95, Nov.12-17, (1995), San Francisco Hilton, San Fran Cisco, California 

  • MEMSデバイス総論

    サイエンス&テクノロジー 

  • Micro actuators Based on Newly Developed Pseudo static Displacement Mechanism

    1995 Int.Mechanical Eng.Congress & Exposition, ASME'95, Nov.12-17, (1995), San Francisco Hilton, San Fran Cisco, California 

▼display all

Misc

  • Analysis of edge and corner bonded PSvfBGA reliability under thermal cycling conditions by experimental and finite element methods

    Hongbin Shi, F. X. Che, Cuihua Tian, Rui Zhang, Jong Tae Park, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   52 ( 9-10 ) 1870 - 1875  2012.09

     View Summary

    In this paper, we present the thermal cycling test results for edge and corner bonded lead-free PSvfBGAs on a high-T-g test board. The test results show that the characteristic lives of PSvfBGAs with edge bond acrylic, edge bond epoxy and corner bond epoxy are respectively about 0.6, 0.9 and 1.3 times of the PSvfBGAs without bonding. The epoxy with lowest CTE, highest storage modulus and smallest adhesive volume yielded best performance. The 3D quarter finite element model was also built to further study the failure mechanism. (C) 2012 Elsevier Ltd. All rights reserved.

    DOI

  • Thermo-mechanical reliability optimization of MEMS-based quartz resonator using validated finite element model

    Rui Zhang, Hongbin Shi, Yuehong Dai, Jong Tae Park, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   52 ( 9-10 ) 2331 - 2335  2012.09

     View Summary

    This paper presents the investigation of the thermal mechanical reliability of a hydrogen gas sensor using MEMS-based quartz resonator by finite element analysis (FEA). The hydrogen gas senor has an internal heat source when in operating, the quartz resonator may subjected to thermal stress due to the thermal expansion coefficients (CTE) mismatch between the resonator and the LTCC package. This could cause cracks on the resonator and finally lead to failure of the sensor. Both thermal and thermo-mechanical simulations of a 3D model of the sensor were built using ANSYS software. Higher thermal mechanical stress level was found in the resonator based on the FEA, which is consistent with the results of verified experiments. Some optimal design was also carried out to improve the thermal reliability of the resonator based on validated finite element model. Crown Copyright (C) 2012 Published by Elsevier Ltd. All rights reserved.

    DOI

  • Analysis of edge and corner bonded PSvfBGA reliability under thermal cycling conditions by experimental and finite element methods

    Hongbin Shi, F. X. Che, Cuihua Tian, Rui Zhang, Jong Tae Park, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   52 ( 9-10 ) 1870 - 1875  2012.09

     View Summary

    In this paper, we present the thermal cycling test results for edge and corner bonded lead-free PSvfBGAs on a high-T-g test board. The test results show that the characteristic lives of PSvfBGAs with edge bond acrylic, edge bond epoxy and corner bond epoxy are respectively about 0.6, 0.9 and 1.3 times of the PSvfBGAs without bonding. The epoxy with lowest CTE, highest storage modulus and smallest adhesive volume yielded best performance. The 3D quarter finite element model was also built to further study the failure mechanism. (C) 2012 Elsevier Ltd. All rights reserved.

    DOI

  • Thermo-mechanical reliability optimization of MEMS-based quartz resonator using validated finite element model

    Rui Zhang, Hongbin Shi, Yuehong Dai, Jong Tae Park, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   52 ( 9-10 ) 2331 - 2335  2012.09

     View Summary

    This paper presents the investigation of the thermal mechanical reliability of a hydrogen gas sensor using MEMS-based quartz resonator by finite element analysis (FEA). The hydrogen gas senor has an internal heat source when in operating, the quartz resonator may subjected to thermal stress due to the thermal expansion coefficients (CTE) mismatch between the resonator and the LTCC package. This could cause cracks on the resonator and finally lead to failure of the sensor. Both thermal and thermo-mechanical simulations of a 3D model of the sensor were built using ANSYS software. Higher thermal mechanical stress level was found in the resonator based on the FEA, which is consistent with the results of verified experiments. Some optimal design was also carried out to improve the thermal reliability of the resonator based on validated finite element model. Crown Copyright (C) 2012 Published by Elsevier Ltd. All rights reserved.

    DOI

  • Analysis of edge and corner bonded PSvfBGA reliability under thermal cycling conditions by experimental and finite element methods

    Hongbin Shi, F. X. Che, Cuihua Tian, Rui Zhang, Jong Tae Park, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   52 ( 9-10 ) 1870 - 1875  2012.09

     View Summary

    In this paper, we present the thermal cycling test results for edge and corner bonded lead-free PSvfBGAs on a high-T-g test board. The test results show that the characteristic lives of PSvfBGAs with edge bond acrylic, edge bond epoxy and corner bond epoxy are respectively about 0.6, 0.9 and 1.3 times of the PSvfBGAs without bonding. The epoxy with lowest CTE, highest storage modulus and smallest adhesive volume yielded best performance. The 3D quarter finite element model was also built to further study the failure mechanism. (C) 2012 Elsevier Ltd. All rights reserved.

    DOI

  • Thermo-mechanical reliability optimization of MEMS-based quartz resonator using validated finite element model

    Rui Zhang, Hongbin Shi, Yuehong Dai, Jong Tae Park, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   52 ( 9-10 ) 2331 - 2335  2012.09

     View Summary

    This paper presents the investigation of the thermal mechanical reliability of a hydrogen gas sensor using MEMS-based quartz resonator by finite element analysis (FEA). The hydrogen gas senor has an internal heat source when in operating, the quartz resonator may subjected to thermal stress due to the thermal expansion coefficients (CTE) mismatch between the resonator and the LTCC package. This could cause cracks on the resonator and finally lead to failure of the sensor. Both thermal and thermo-mechanical simulations of a 3D model of the sensor were built using ANSYS software. Higher thermal mechanical stress level was found in the resonator based on the FEA, which is consistent with the results of verified experiments. Some optimal design was also carried out to improve the thermal reliability of the resonator based on validated finite element model. Crown Copyright (C) 2012 Published by Elsevier Ltd. All rights reserved.

    DOI

  • NIR Spectrum Analysis of Natural Gas Based on Hollow-Core Photonic Bandgap Fiber

    Xuefeng Li, Jinxing Liang, Shuo Lin, Yury Zimin, Yupeng Zhang, Toshitsugu Ueda

    IEEE SENSORS JOURNAL   12 ( 7 ) 2362 - 2367  2012.07

     View Summary

    In this paper, we present a quantitative near-infrared spectroscopy measurement of the chemical compositions of gas mixtures, such as natural gas, based on a photonic bandgap fiber gas cell. The absorption spectra of the methane and ethane gases were investigated in the near-infrared region. The absorption lines of the ethane gas were observed in the 1600-1616-nm region, and were totally different from those of the methane gas. To our knowledge, this is the first study to measure the individual absorption lines of ethane in this range of wavelengths, and our finding has a great potential for sensing highly sensitive gases.

    DOI

  • NIR Spectrum Analysis of Natural Gas Based on Hollow-Core Photonic Bandgap Fiber

    Xuefeng Li, Jinxing Liang, Shuo Lin, Yury Zimin, Yupeng Zhang, Toshitsugu Ueda

    IEEE SENSORS JOURNAL   12 ( 7 ) 2362 - 2367  2012.07

     View Summary

    In this paper, we present a quantitative near-infrared spectroscopy measurement of the chemical compositions of gas mixtures, such as natural gas, based on a photonic bandgap fiber gas cell. The absorption spectra of the methane and ethane gases were investigated in the near-infrared region. The absorption lines of the ethane gas were observed in the 1600-1616-nm region, and were totally different from those of the methane gas. To our knowledge, this is the first study to measure the individual absorption lines of ethane in this range of wavelengths, and our finding has a great potential for sensing highly sensitive gases.

    DOI

  • NIR Spectrum Analysis of Natural Gas Based on Hollow-Core Photonic Bandgap Fiber

    Xuefeng Li, Jinxing Liang, Shuo Lin, Yury Zimin, Yupeng Zhang, Toshitsugu Ueda

    IEEE SENSORS JOURNAL   12 ( 7 ) 2362 - 2367  2012.07

     View Summary

    In this paper, we present a quantitative near-infrared spectroscopy measurement of the chemical compositions of gas mixtures, such as natural gas, based on a photonic bandgap fiber gas cell. The absorption spectra of the methane and ethane gases were investigated in the near-infrared region. The absorption lines of the ethane gas were observed in the 1600-1616-nm region, and were totally different from those of the methane gas. To our knowledge, this is the first study to measure the individual absorption lines of ethane in this range of wavelengths, and our finding has a great potential for sensing highly sensitive gases.

    DOI

  • High-Sensitivity Fiber-Optic Fabry-Perot Interferometer Temperature Sensor

    Xuefeng Li, Shuo Lin, Jinxing Liang, Hiroshi Oigawa, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 6 ) 06FL10 1-4  2012.06

     View Summary

    A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional single-mode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/degrees C in the 0 to +60 degrees C range. The standard deviation of temperature is less than 0.15 degrees C in 1 h. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Vibration Analysis of Original Shape Quartz Resonator for High Quality Factor Realization

    Hiroshi Oigawa, Yuuya Sakano, Jing Ji, Daisuke Yamazaki, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 6 ) 06FL02 1-5  2012.06

     View Summary

    AT-cut quartz resonators are widely used as timing devices in computers, mobile information, and communication tools, etc. Recently, quartz resonators have been applied to highly sensitive devices. To improve frequency stability, AT-cut quartz resonators must have an excellent temperature characteristic and high quality (Q) factor. Energy trapping and spurious mode coupling strongly affect the performance of resonators, and both parameters are determined by the shape of the resonator. As for achieving a higher Q, the most effective technique is to process the quartz cross-sectional shape into a plano-convex or bi-convex shape. However, it is difficult to manufacture a convex shape on the surface of a quartz wafer. For this reason, we propose an equivalent plano-convex shape, which was realized by arranging fine protrusions on the surface of quartz. In addition, the optimization of the original resonator shape has been discussed. (C) 2012 The Japan Society of Applied Physics

    DOI

  • High-Sensitivity Fiber-Optic Fabry-Perot Interferometer Temperature Sensor

    Xuefeng Li, Shuo Lin, Jinxing Liang, Hiroshi Oigawa, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 6 ) 06FL10 1-4  2012.06

     View Summary

    A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional single-mode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/degrees C in the 0 to +60 degrees C range. The standard deviation of temperature is less than 0.15 degrees C in 1 h. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Vibration Analysis of Original Shape Quartz Resonator for High Quality Factor Realization

    Hiroshi Oigawa, Yuuya Sakano, Jing Ji, Daisuke Yamazaki, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 6 ) 06FL02 1-5  2012.06

     View Summary

    AT-cut quartz resonators are widely used as timing devices in computers, mobile information, and communication tools, etc. Recently, quartz resonators have been applied to highly sensitive devices. To improve frequency stability, AT-cut quartz resonators must have an excellent temperature characteristic and high quality (Q) factor. Energy trapping and spurious mode coupling strongly affect the performance of resonators, and both parameters are determined by the shape of the resonator. As for achieving a higher Q, the most effective technique is to process the quartz cross-sectional shape into a plano-convex or bi-convex shape. However, it is difficult to manufacture a convex shape on the surface of a quartz wafer. For this reason, we propose an equivalent plano-convex shape, which was realized by arranging fine protrusions on the surface of quartz. In addition, the optimization of the original resonator shape has been discussed. (C) 2012 The Japan Society of Applied Physics

    DOI

  • High-Sensitivity Fiber-Optic Fabry-Perot Interferometer Temperature Sensor

    Xuefeng Li, Shuo Lin, Jinxing Liang, Hiroshi Oigawa, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 6 ) 06FL10 1-4  2012.06

     View Summary

    A novel structure of a fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor is presented in this paper. The design of the sensor is analyzed and evaluated by the finite-difference time-domain (FDTD) method. Then, the proposed sensor is fabricated using a conventional single-mode fiber (SMF). A gold (Au) layer and a nickel (Ni) layer are sputtered and electroplated on the surface of the SMF, respectively. As a Fabry-Perot (FP) cavity, a micro-punch-hole is machined by focused ion beam (FIB) milling. Here, the structure of the FP cavity can be considered a pair of bimetallic strips. On the basis of the sharp difference in thermal expansion coefficient between the fused silica and the metallic materials, the temperature sensitivity of the proposed sensor was determined to be over 70 pm/degrees C in the 0 to +60 degrees C range. The standard deviation of temperature is less than 0.15 degrees C in 1 h. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Vibration Analysis of Original Shape Quartz Resonator for High Quality Factor Realization

    Hiroshi Oigawa, Yuuya Sakano, Jing Ji, Daisuke Yamazaki, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 6 ) 06FL02 1-5  2012.06

     View Summary

    AT-cut quartz resonators are widely used as timing devices in computers, mobile information, and communication tools, etc. Recently, quartz resonators have been applied to highly sensitive devices. To improve frequency stability, AT-cut quartz resonators must have an excellent temperature characteristic and high quality (Q) factor. Energy trapping and spurious mode coupling strongly affect the performance of resonators, and both parameters are determined by the shape of the resonator. As for achieving a higher Q, the most effective technique is to process the quartz cross-sectional shape into a plano-convex or bi-convex shape. However, it is difficult to manufacture a convex shape on the surface of a quartz wafer. For this reason, we propose an equivalent plano-convex shape, which was realized by arranging fine protrusions on the surface of quartz. In addition, the optimization of the original resonator shape has been discussed. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Thermomechanical Fatigue Performance of Lead-Free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills

    Hongbin Shi, Cuihua Tian, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 5 ) 05EE04 1-8  2012.05

     View Summary

    In this paper, we present the results of temperature cycling test for full and partial capillary flow underfilled lead-free chip scale packages (CSPs), the tests were carried out on the basis of JEDEC standard. Two kinds of representative fast cure and reworkable underfill materials are used in this study, and CSPs without underfills were also tested for comparison. The test results show that the two underfill materials reduce the thermomechanical fatigue performance of CSP assemblies. The underfill with high T-g and storage modulus yielded better performance; indeed, the coefficient of thermal expansion (CTE) is also very critical to the thermomechanical fatigue performance, but its effects is not so obvious in this study owing to the similar CTEs of the underfills used. In addition, the negative effect of a partial underfill pattern is smaller than that of a full underfill pattern. Failure analysis shows that the dominant failure mode observed is solder cracking near the package and/or printed circuit board pads. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Thermomechanical Fatigue Performance of Lead-Free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills

    Hongbin Shi, Cuihua Tian, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 5 ) 05EE04 1-8  2012.05

     View Summary

    In this paper, we present the results of temperature cycling test for full and partial capillary flow underfilled lead-free chip scale packages (CSPs), the tests were carried out on the basis of JEDEC standard. Two kinds of representative fast cure and reworkable underfill materials are used in this study, and CSPs without underfills were also tested for comparison. The test results show that the two underfill materials reduce the thermomechanical fatigue performance of CSP assemblies. The underfill with high T-g and storage modulus yielded better performance; indeed, the coefficient of thermal expansion (CTE) is also very critical to the thermomechanical fatigue performance, but its effects is not so obvious in this study owing to the similar CTEs of the underfills used. In addition, the negative effect of a partial underfill pattern is smaller than that of a full underfill pattern. Failure analysis shows that the dominant failure mode observed is solder cracking near the package and/or printed circuit board pads. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Thermomechanical Fatigue Performance of Lead-Free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills

    Hongbin Shi, Cuihua Tian, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 5 ) 05EE04 1-8  2012.05

     View Summary

    In this paper, we present the results of temperature cycling test for full and partial capillary flow underfilled lead-free chip scale packages (CSPs), the tests were carried out on the basis of JEDEC standard. Two kinds of representative fast cure and reworkable underfill materials are used in this study, and CSPs without underfills were also tested for comparison. The test results show that the two underfill materials reduce the thermomechanical fatigue performance of CSP assemblies. The underfill with high T-g and storage modulus yielded better performance; indeed, the coefficient of thermal expansion (CTE) is also very critical to the thermomechanical fatigue performance, but its effects is not so obvious in this study owing to the similar CTEs of the underfills used. In addition, the negative effect of a partial underfill pattern is smaller than that of a full underfill pattern. Failure analysis shows that the dominant failure mode observed is solder cracking near the package and/or printed circuit board pads. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Board-Level Solder Joint Reliability of Edge- and Corner-Bonded Lead-Free Chip Scale Package Assemblies Subjected to Thermal Cycling

    Hongbin Shi, Cuihua Tian, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 4 ) 04DB08 1-10  2012.04

     View Summary

    In this paper, we present the results of thermal cycling test for edge- and corner-bonded lead-free chip scale packages (CSPs), which was carried out on the basis of the IPC-9701 test standard. Six materials were used in this study: four edge- bond adhesives and two corner-bond adhesives. These adhesives were compared with CSPs with full capillary flow underfill (FCFU) and without adhesives. The thermal cycling test results show that corner-bond adhesive has comparable solder joint reliability performance with CSP without adhesive, and is better than edge- bond adhesive, followed by CSPs with FCFU. In addition, the adhesives with a low coefficient of thermal expansion, a high glass transition temperature and a intermediate storage modulus yielded good performance. Results of detailed failure analysis indicate that the dominant failure mode is solder bulk fatigue cracking near package and/or printed circuit board (PCB) pads, and that the location of critical solder joints change from die edges to package corners with the introduction of adhesives. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Board-Level Solder Joint Reliability of Edge- and Corner-Bonded Lead-Free Chip Scale Package Assemblies Subjected to Thermal Cycling

    Hongbin Shi, Cuihua Tian, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 4 ) 04DB08 1-10  2012.04

     View Summary

    In this paper, we present the results of thermal cycling test for edge- and corner-bonded lead-free chip scale packages (CSPs), which was carried out on the basis of the IPC-9701 test standard. Six materials were used in this study: four edge- bond adhesives and two corner-bond adhesives. These adhesives were compared with CSPs with full capillary flow underfill (FCFU) and without adhesives. The thermal cycling test results show that corner-bond adhesive has comparable solder joint reliability performance with CSP without adhesive, and is better than edge- bond adhesive, followed by CSPs with FCFU. In addition, the adhesives with a low coefficient of thermal expansion, a high glass transition temperature and a intermediate storage modulus yielded good performance. Results of detailed failure analysis indicate that the dominant failure mode is solder bulk fatigue cracking near package and/or printed circuit board (PCB) pads, and that the location of critical solder joints change from die edges to package corners with the introduction of adhesives. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Board-Level Solder Joint Reliability of Edge- and Corner-Bonded Lead-Free Chip Scale Package Assemblies Subjected to Thermal Cycling

    Hongbin Shi, Cuihua Tian, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 4 ) 04DB08 1-10  2012.04

     View Summary

    In this paper, we present the results of thermal cycling test for edge- and corner-bonded lead-free chip scale packages (CSPs), which was carried out on the basis of the IPC-9701 test standard. Six materials were used in this study: four edge- bond adhesives and two corner-bond adhesives. These adhesives were compared with CSPs with full capillary flow underfill (FCFU) and without adhesives. The thermal cycling test results show that corner-bond adhesive has comparable solder joint reliability performance with CSP without adhesive, and is better than edge- bond adhesive, followed by CSPs with FCFU. In addition, the adhesives with a low coefficient of thermal expansion, a high glass transition temperature and a intermediate storage modulus yielded good performance. Results of detailed failure analysis indicate that the dominant failure mode is solder bulk fatigue cracking near package and/or printed circuit board (PCB) pads, and that the location of critical solder joints change from die edges to package corners with the introduction of adhesives. (C) 2012 The Japan Society of Applied Physics

    DOI

  • Fiber-Optic Temperature Sensor Based on Difference of Thermal Expansion Coefficient Between Fused Silica and Metallic Materials

    Xuefeng Li, Shuo Lin, Jinxing Liang, Yupeng Zhang, Hiroshi Oigawa, Toshitsugu Ueda

    IEEE PHOTONICS JOURNAL   4 ( 1 ) 155 - 162  2012.02

     View Summary

    In this paper, we report a novel fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor based on the difference of thermal expansion coefficient between fused silica and metallic materials. The sensor head is made by a single-mode fiber (SMF). A gold film and a nickel film are sputtered and electroplated on the surface of the SMF. Then, a microcavity is micromachined by focused ion beam (FIB) milling. Because the thermal expansion coefficient of nickel is about 20 times of fused silica, the different thermal expansions force the sensor head to bend when the temperature is high or low. Its temperature sensitivity is over 14 pm/degrees C in a wide range from -79 degrees C to + 70 degrees C. And the coefficient of determination R-2 is excellent (over 0.995). Moreover, the metallic cylinder can reinforce the cavity spot of the fiber sensor, so that this kind of sensor can work in harsh environments. For the first time to the best of our knowledge, we report this type of FFPI temperature sensor based on difference of thermal expansion coefficient between fused silica and metallic materials.

    DOI

  • Fiber-Optic Temperature Sensor Based on Difference of Thermal Expansion Coefficient Between Fused Silica and Metallic Materials

    Xuefeng Li, Shuo Lin, Jinxing Liang, Yupeng Zhang, Hiroshi Oigawa, Toshitsugu Ueda

    IEEE PHOTONICS JOURNAL   4 ( 1 ) 155 - 162  2012.02

     View Summary

    In this paper, we report a novel fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor based on the difference of thermal expansion coefficient between fused silica and metallic materials. The sensor head is made by a single-mode fiber (SMF). A gold film and a nickel film are sputtered and electroplated on the surface of the SMF. Then, a microcavity is micromachined by focused ion beam (FIB) milling. Because the thermal expansion coefficient of nickel is about 20 times of fused silica, the different thermal expansions force the sensor head to bend when the temperature is high or low. Its temperature sensitivity is over 14 pm/degrees C in a wide range from -79 degrees C to + 70 degrees C. And the coefficient of determination R-2 is excellent (over 0.995). Moreover, the metallic cylinder can reinforce the cavity spot of the fiber sensor, so that this kind of sensor can work in harsh environments. For the first time to the best of our knowledge, we report this type of FFPI temperature sensor based on difference of thermal expansion coefficient between fused silica and metallic materials.

    DOI

  • Fiber-Optic Temperature Sensor Based on Difference of Thermal Expansion Coefficient Between Fused Silica and Metallic Materials

    Xuefeng Li, Shuo Lin, Jinxing Liang, Yupeng Zhang, Hiroshi Oigawa, Toshitsugu Ueda

    IEEE PHOTONICS JOURNAL   4 ( 1 ) 155 - 162  2012.02

     View Summary

    In this paper, we report a novel fiber-optic Fabry-Perot interferometric (FFPI) temperature sensor based on the difference of thermal expansion coefficient between fused silica and metallic materials. The sensor head is made by a single-mode fiber (SMF). A gold film and a nickel film are sputtered and electroplated on the surface of the SMF. Then, a microcavity is micromachined by focused ion beam (FIB) milling. Because the thermal expansion coefficient of nickel is about 20 times of fused silica, the different thermal expansions force the sensor head to bend when the temperature is high or low. Its temperature sensitivity is over 14 pm/degrees C in a wide range from -79 degrees C to + 70 degrees C. And the coefficient of determination R-2 is excellent (over 0.995). Moreover, the metallic cylinder can reinforce the cavity spot of the fiber sensor, so that this kind of sensor can work in harsh environments. For the first time to the best of our knowledge, we report this type of FFPI temperature sensor based on difference of thermal expansion coefficient between fused silica and metallic materials.

    DOI

  • Detection of Cesium from Pollucite using Laser-Induced Breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Proceedings of 8th International Conference Mechatronic Systems and Materials, pp.198, Bialystok, Poland    2012

  • Development of The Quartz Resonators with Quasi-Convex Structure

    H. Oigawa, Y. Sakano, J. Ji, T. Ueda

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000087    2012

  • A New Solution of Anisotropic 3D Vertex Etching Simulation for Quartz Crystal

    M. Zhao, H. Oigawa, J. Ji, T. Ueda

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000091    2012

  • Size Optimization for Miniature High Frequency Quartz Resonator using Finite Element Method

    J. Ji, H.Oigawa, M. Zhao, H. Yu, T. Ueda

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000081    2012

  • Ringing reduction for radially restored images

    Yupeng Zhang, Toshitsugu Ueda

    Proceedings of Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) Monterey, JTu5A.24.pdf, California    2012

  • Thermomechanical Reliability Analysis and Optimization for MEMS Packages With AuSn Solder

    Rui Zhang, Hongbin Shi, Toshitsugu Ueda, Jiong Zhang, Yuehong Dai

    2012 INTERNATIONAL CONFERENCE ON QUALITY, RELIABILITY, RISK, MAINTENANCE, AND SAFETY ENGINEERING (ICQR2MSE)     794 - 797  2012

     View Summary

    Thermal stress formed in the solder of the microelectromechanical systems (MEMS) sensor during the reflow soldering process due to the coefficients of thermal expansion (CTE) mismatch between the different materials. As the package needs to be hermetically sealed to protect the device from outside environmental effects, the local stress concentration would eventually cause cracks in the solder and influence the hermeticity. In this study, we present the thermo-mechanical analysis of the AuSn90 solder with low temperature co-fired ceramic (LTCC) package using Comsol Multiphysics. Thermal residual stress distribution in the solder after the reflow soldering process was simulated. According to the result, the maximum von Mises stress was found and several possible ways for minimizing the stress in the solder and improving the thermo-mechanical reliability were discussed.

    DOI

  • Technology and applications using laser-induced electro-avalanche fluorescence and laser induced incandescence technique

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Proceedings of China-Japan Joint Symposium on Sensing Technology, , Southeast University, Nanjing, China, April 22-25     14  2012

  • A geometry solution for 3D anisotropic etching simulation

    Meng Zhao, Jing Ji, Toshitsugu Ueda

    Proceedings of China-Japan Joint Symposium on Sensing Technology, Southeast University, Nanjing, China, April 22-25     12  2012

  • Real scene capturing and deblurring for spherical single lens camera

    Yupeng Zhang, Lev G. Zimin, Toshitsugu Ueda

    Proceedings of China-Japan Joint Symposium on Sensing Technology, Southeast University, Nanjing, China, April 22-25     3  2012

  • Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

    Jing Ji, Hiroshi Oigawa, Hsin Hui Chen, Meng Zhao, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   132 ( 9 ) 275 - 281  2012

     View Summary

    For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved. © 2012 The Institute of Electrical Engineers of Japan.

    DOI

  • Development of Semi-Quantitative Analytical System for Metal Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    Ikezawa, M. Wakamatsu, T. Ueda

    International Journal on Smart Sensing and Intelligent Systems   Vol. 5 ( No. 1 ) 213 - 232  2012

  • 遮光マスクを用いた歯科治療用根管内観察システムの内部反射光の低減

    陳 号, 吉居 慎二, Lev, G. Zimin, 張 宇鵬, 池沢 聡, 植田 敏嗣

    平成24年第65回電気関係学会九州支部連合大会論文集, p.45    2012

  • 擬似コンベックス形状を有した水晶振動子の凸部の高さとQ値の関係

    阪野 祐也, 大井川 寛, 植田 敏嗣

    平成24年第65回電気関係学会九州支部連合大会論文集, p. 44    2012

  • 異なる温度におけるATカット水晶振動子の有限要素法による寸法最適化

    宇 航, 紀 静, 大井川 寛, 池沢 聡, 植田敏嗣

    平成24年第65回電気関係学会九州支部連合大会論文集, p. 43    2012

  • コンベックス振動子を模擬した新形状の高安定振動子

    阪野祐也, 桐野雄宇, 大井川 寛, 植田敏嗣

    平成24年電気学会全国大会, pp. , (3-124),    2012

  • 傾斜角センサの演算表示プログラム開発

    羅 捷軍, 播磨幸一, 高森政聡, 幸坂扶佐夫, 植田敏嗣

    平成24年電気学会全国大会, pp. , (3-122)    2012

  • 二軸容量型傾斜角センサのプロセスの開発と評価

    劉健男, 播磨幸一, 高森政聡, 植田敏嗣

    平成24年電気学会全国大会, pp. , (3-121)    2012

  • MEMSパッケージの気密性評価法の開発

    程サンサン, 高森政聡, 植田敏嗣

    平成24年電気学会全国大会, pp. , (3-131),    2012

  • Detection of Cesium from Pollucite using Laser-Induced Breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Proceedings of 8th International Conference Mechatronic Systems and Materials, pp.198, Bialystok, Poland    2012

  • Development of The Quartz Resonators with Quasi-Convex Structure

    H. Oigawa, Y. Sakano, J. Ji, T. Ueda

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000087    2012

  • A New Solution of Anisotropic 3D Vertex Etching Simulation for Quartz Crystal

    M. Zhao, H. Oigawa, J. Ji, T. Ueda

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000091    2012

  • Size Optimization for Miniature High Frequency Quartz Resonator using Finite Element Method

    J. Ji, H.Oigawa, M. Zhao, H. Yu, T. Ueda

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000081    2012

  • Ringing reduction for radially restored images

    Yupeng Zhang, Toshitsugu Ueda

    Proceedings of Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) Monterey, JTu5A.24.pdf, California    2012

  • Thermomechanical Reliability Analysis and Optimization for MEMS Packages With AuSn Solder

    Rui Zhang, Hongbin Shi, Toshitsugu Ueda, Jiong Zhang, Yuehong Dai

    2012 INTERNATIONAL CONFERENCE ON QUALITY, RELIABILITY, RISK, MAINTENANCE, AND SAFETY ENGINEERING (ICQR2MSE)     794 - 797  2012

     View Summary

    Thermal stress formed in the solder of the microelectromechanical systems (MEMS) sensor during the reflow soldering process due to the coefficients of thermal expansion (CTE) mismatch between the different materials. As the package needs to be hermetically sealed to protect the device from outside environmental effects, the local stress concentration would eventually cause cracks in the solder and influence the hermeticity. In this study, we present the thermo-mechanical analysis of the AuSn90 solder with low temperature co-fired ceramic (LTCC) package using Comsol Multiphysics. Thermal residual stress distribution in the solder after the reflow soldering process was simulated. According to the result, the maximum von Mises stress was found and several possible ways for minimizing the stress in the solder and improving the thermo-mechanical reliability were discussed.

    DOI

  • Technology and applications using laser-induced electro-avalanche fluorescence and laser induced incandescence technique

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Proceedings of China-Japan Joint Symposium on Sensing Technology, , Southeast University, Nanjing, China, April 22-25     14  2012

  • A geometry solution for 3D anisotropic etching simulation

    Meng Zhao, Jing Ji, Toshitsugu Ueda

    Proceedings of China-Japan Joint Symposium on Sensing Technology, Southeast University, Nanjing, China, April 22-25     12  2012

  • Real scene capturing and deblurring for spherical single lens camera

    Yupeng Zhang, Lev G. Zimin, Toshitsugu Ueda

    Proceedings of China-Japan Joint Symposium on Sensing Technology, Southeast University, Nanjing, China, April 22-25     3  2012

  • Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

    Jing Ji, Hiroshi Oigawa, Hsin Hui Chen, Meng Zhao, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   132 ( 9 ) 275 - 281  2012

     View Summary

    For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved. © 2012 The Institute of Electrical Engineers of Japan.

    DOI

  • Development of Semi-Quantitative Analytical System for Metal Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    Ikezawa, M. Wakamatsu, T. Ueda

    International Journal on Smart Sensing and Intelligent Systems   Vol. 5 ( No. 1 ) 213 - 232  2012

  • Detection of Cesium from Pollucite using Laser-Induced Breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Proceedings of 8th International Conference Mechatronic Systems and Materials, pp.198, Bialystok, Poland    2012

  • Development of The Quartz Resonators with Quasi-Convex Structure

    H. Oigawa, Y. Sakano, J. Ji, T. Ueda

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000087    2012

  • A New Solution of Anisotropic 3D Vertex Etching Simulation for Quartz Crystal

    M. Zhao, H. Oigawa, J. Ji, T. Ueda

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000091    2012

  • Size Optimization for Miniature High Frequency Quartz Resonator using Finite Element Method

    J. Ji, H.Oigawa, M. Zhao, H. Yu, T. Ueda

    The Sixth Asia-Pacific Conference on Transducers and Micro/Nano Technologies (IEEE APCOT 2012), ac12000081    2012

  • Ringing reduction for radially restored images

    Yupeng Zhang, Toshitsugu Ueda

    Proceedings of Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) Monterey, JTu5A.24.pdf, California    2012

  • Thermomechanical Reliability Analysis and Optimization for MEMS Packages With AuSn Solder

    Rui Zhang, Hongbin Shi, Toshitsugu Ueda, Jiong Zhang, Yuehong Dai

    2012 INTERNATIONAL CONFERENCE ON QUALITY, RELIABILITY, RISK, MAINTENANCE, AND SAFETY ENGINEERING (ICQR2MSE)     794 - 797  2012

     View Summary

    Thermal stress formed in the solder of the microelectromechanical systems (MEMS) sensor during the reflow soldering process due to the coefficients of thermal expansion (CTE) mismatch between the different materials. As the package needs to be hermetically sealed to protect the device from outside environmental effects, the local stress concentration would eventually cause cracks in the solder and influence the hermeticity. In this study, we present the thermo-mechanical analysis of the AuSn90 solder with low temperature co-fired ceramic (LTCC) package using Comsol Multiphysics. Thermal residual stress distribution in the solder after the reflow soldering process was simulated. According to the result, the maximum von Mises stress was found and several possible ways for minimizing the stress in the solder and improving the thermo-mechanical reliability were discussed.

    DOI

  • Technology and applications using laser-induced electro-avalanche fluorescence and laser induced incandescence technique

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Proceedings of China-Japan Joint Symposium on Sensing Technology, , Southeast University, Nanjing, China, April 22-25     14  2012

  • A geometry solution for 3D anisotropic etching simulation

    Meng Zhao, Jing Ji, Toshitsugu Ueda

    Proceedings of China-Japan Joint Symposium on Sensing Technology, Southeast University, Nanjing, China, April 22-25     12  2012

  • Real scene capturing and deblurring for spherical single lens camera

    Yupeng Zhang, Lev G. Zimin, Toshitsugu Ueda

    Proceedings of China-Japan Joint Symposium on Sensing Technology, Southeast University, Nanjing, China, April 22-25     3  2012

  • Optimization of electrode structure for a high-frequency AT-cut quartz resonator using FEM

    Jing Ji, Hiroshi Oigawa, Hsin Hui Chen, Meng Zhao, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   132 ( 9 ) 275 - 281  2012

     View Summary

    For the first time a peripheral electrode is employed to a high-frequency quartz plate resonator that has a rectangular excitation electrode. The two-dimensional finite element method is used to optimize the electrode and verify resonator performance. The results show that optimized electrodes provide effective energy trapping and less vibration coupling. The optimized peripheral electrode efficiently suppresses inharmonic overtone mode. High Q-factor is also achieved. © 2012 The Institute of Electrical Engineers of Japan.

    DOI

  • Development of Semi-Quantitative Analytical System for Metal Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    Ikezawa, M. Wakamatsu, T. Ueda

    International Journal on Smart Sensing and Intelligent Systems   Vol. 5 ( No. 1 ) 213 - 232  2012

  • Analysis of Radially Restored Images for Spherical Single Lens Cellphone Camera

    Yupeng Zhang, Ikumi Minema, Lev G. Zimin, Toshitsugu Ueda

    IEEE SENSORS JOURNAL   11 ( 11 ) 2834 - 2844  2011.11

     View Summary

    A spherical single lens imaging system for cellphone camera is proposed in this research. The overall thickness from the front surface of the lens to the image sensor is approximately 4.5 mm, which is competitive compared to 6 similar to 7 mm of current cellphone camera modules that use compound lens system. One defect of this spherical single lens that deteriorates image quality is radially variant blur, which is produced by one of the optical aberrations called field curvature. We describe a novel method of blur restoration that employs polar image and polar Point Spread Function (PSF) converted from Cartesian image and Cartesian PSF. The blurred image was radially segmented into several regions, to which polar PSFs at different field angles were applied. Results of visual and quantitative evaluation indicate that number of segmented regions and weighted average of beta/n ratios, i.e., ratio of bandwidth to the number Circulant Blocks (CBs) of the polar PSF Block-Toeplitz-with-Circulant-Blocks (BTCB) matrices affect the restored image quality and Mean Square Error (MSE). Evaluation results on restored images using different polar image resolutions revealed that high resolution obtains good pixel continuity, whereas low resolution results in radially expanding pixel vacancies.

    DOI

  • Analysis of Radially Restored Images for Spherical Single Lens Cellphone Camera

    Yupeng Zhang, Ikumi Minema, Lev G. Zimin, Toshitsugu Ueda

    IEEE SENSORS JOURNAL   11 ( 11 ) 2834 - 2844  2011.11

     View Summary

    A spherical single lens imaging system for cellphone camera is proposed in this research. The overall thickness from the front surface of the lens to the image sensor is approximately 4.5 mm, which is competitive compared to 6 similar to 7 mm of current cellphone camera modules that use compound lens system. One defect of this spherical single lens that deteriorates image quality is radially variant blur, which is produced by one of the optical aberrations called field curvature. We describe a novel method of blur restoration that employs polar image and polar Point Spread Function (PSF) converted from Cartesian image and Cartesian PSF. The blurred image was radially segmented into several regions, to which polar PSFs at different field angles were applied. Results of visual and quantitative evaluation indicate that number of segmented regions and weighted average of beta/n ratios, i.e., ratio of bandwidth to the number Circulant Blocks (CBs) of the polar PSF Block-Toeplitz-with-Circulant-Blocks (BTCB) matrices affect the restored image quality and Mean Square Error (MSE). Evaluation results on restored images using different polar image resolutions revealed that high resolution obtains good pixel continuity, whereas low resolution results in radially expanding pixel vacancies.

    DOI

  • Analysis of Radially Restored Images for Spherical Single Lens Cellphone Camera

    Yupeng Zhang, Ikumi Minema, Lev G. Zimin, Toshitsugu Ueda

    IEEE SENSORS JOURNAL   11 ( 11 ) 2834 - 2844  2011.11

     View Summary

    A spherical single lens imaging system for cellphone camera is proposed in this research. The overall thickness from the front surface of the lens to the image sensor is approximately 4.5 mm, which is competitive compared to 6 similar to 7 mm of current cellphone camera modules that use compound lens system. One defect of this spherical single lens that deteriorates image quality is radially variant blur, which is produced by one of the optical aberrations called field curvature. We describe a novel method of blur restoration that employs polar image and polar Point Spread Function (PSF) converted from Cartesian image and Cartesian PSF. The blurred image was radially segmented into several regions, to which polar PSFs at different field angles were applied. Results of visual and quantitative evaluation indicate that number of segmented regions and weighted average of beta/n ratios, i.e., ratio of bandwidth to the number Circulant Blocks (CBs) of the polar PSF Block-Toeplitz-with-Circulant-Blocks (BTCB) matrices affect the restored image quality and Mean Square Error (MSE). Evaluation results on restored images using different polar image resolutions revealed that high resolution obtains good pixel continuity, whereas low resolution results in radially expanding pixel vacancies.

    DOI

  • U-Band Wavelength References Based on Photonic Bandgap Fiber Technology

    Xuefeng Li, Jinxing Liang, Yury Zimin, Yupeng Zhang, Shuo Lin, Toshitsugu Ueda

    JOURNAL OF LIGHTWAVE TECHNOLOGY   29 ( 19 ) 2934 - 2939  2011.10

     View Summary

    In this paper, we surveyed potential wavelength references in U-band wavelength region. The hollow-core photonic bandgap fiber (PBGF) filled with methane (CH(4)) gas is used as a gas cell. The experimental results clearly indicate that the weak absorption lines of methane can be used as U-band wavelength division multiplexing (WDM) channel references due to the long interaction path length provided by PBGF. The absorption lines of CH(4) are useful as wavelength references in the 1625-1700 nm region. In addition, we have measured the pressure broadening and the wavelength stability of absorption lines, and find that absorption lines are particularly insensitive to external perturbation. This technique is useful for wavelength calibration of components of communication system, or as monitor the wavelength of the channels. It may be implemented in next-generation WDM communication systems.

    DOI

  • U-Band Wavelength References Based on Photonic Bandgap Fiber Technology

    Xuefeng Li, Jinxing Liang, Yury Zimin, Yupeng Zhang, Shuo Lin, Toshitsugu Ueda

    JOURNAL OF LIGHTWAVE TECHNOLOGY   29 ( 19 ) 2934 - 2939  2011.10

     View Summary

    In this paper, we surveyed potential wavelength references in U-band wavelength region. The hollow-core photonic bandgap fiber (PBGF) filled with methane (CH(4)) gas is used as a gas cell. The experimental results clearly indicate that the weak absorption lines of methane can be used as U-band wavelength division multiplexing (WDM) channel references due to the long interaction path length provided by PBGF. The absorption lines of CH(4) are useful as wavelength references in the 1625-1700 nm region. In addition, we have measured the pressure broadening and the wavelength stability of absorption lines, and find that absorption lines are particularly insensitive to external perturbation. This technique is useful for wavelength calibration of components of communication system, or as monitor the wavelength of the channels. It may be implemented in next-generation WDM communication systems.

    DOI

  • U-Band Wavelength References Based on Photonic Bandgap Fiber Technology

    Xuefeng Li, Jinxing Liang, Yury Zimin, Yupeng Zhang, Shuo Lin, Toshitsugu Ueda

    JOURNAL OF LIGHTWAVE TECHNOLOGY   29 ( 19 ) 2934 - 2939  2011.10

     View Summary

    In this paper, we surveyed potential wavelength references in U-band wavelength region. The hollow-core photonic bandgap fiber (PBGF) filled with methane (CH(4)) gas is used as a gas cell. The experimental results clearly indicate that the weak absorption lines of methane can be used as U-band wavelength division multiplexing (WDM) channel references due to the long interaction path length provided by PBGF. The absorption lines of CH(4) are useful as wavelength references in the 1625-1700 nm region. In addition, we have measured the pressure broadening and the wavelength stability of absorption lines, and find that absorption lines are particularly insensitive to external perturbation. This technique is useful for wavelength calibration of components of communication system, or as monitor the wavelength of the channels. It may be implemented in next-generation WDM communication systems.

    DOI

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test

    Hongbin Shi, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   51 ( 9-11 ) 1898 - 1902  2011.09

     View Summary

    This paper discusses the influences of various adhesives on board-level shear strength of ChipArray (R) Thin Core Ball Grid Array (CTBGA) assemblies through an innovative reliability evaluation approach, i.e. array-based package (ABP) shear test. It is found that the adhesives do enhance the shear strength for all the test categories as compared with the assemblies without adhesives (w/o A), but the degree of improvements between different strategies vary quiet a lot. The specific shear strength is affected by a number of factors, in which dispending patterns and material properties of the adhesives used influences it obviously. In general, the adhesives with high storage modulus and large dispensing volume are preferred, for example, stiff full or partial capillary flow underfills. In order to further understand the failure mechanism of the CTBGA during the ABP shear test, failure analysis on tested devices are also conducted using side view optical microscopy, scanning electron microscope (SEM) and energy dispersive X-ray (EDX), the results indicate that the predominant failure mode changes from PCB pad lift/cratering to fracture at package side intermetallic compound (IMC)/solder interface with increasing dispensing volume and storage modulus, which basically improves the solder joint reliability of CTBGA assemblies. (C) 2011 Elsevier Ltd. All rights reserved.

    DOI

  • Experiment and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending

    Hongbin Shi, Faxing Che, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   51 ( 9-11 ) 1850 - 1855  2011.09

     View Summary

    This paper presents the four-point bend test results for edge and corner bonded 0.5 mm pitch lead-free package stackable very thin fine pitch ball grid arrays (PSvfBGAs) as package-on-package (PoP) bottom packages on a standard IPC/JEDEC bend test board. The tests were carried out based on the above standard with a 30 mm loading span, 90 mm support span and 7.5 mm/s crosshead speed. The daisy chain resistance, strain, crosshead displacement and load of each PSvfBGA were measured and a 20% increase in the resistance was used as the failure criterion. Materials used in this study were a UV-cured acrylic edge bond adhesive, a thermal-cured epoxy edge bond adhesive and a thermal-cured epoxy corner bond adhesive. The test results show that all of them can improve the bend performance significantly: especially the edge bond high module epoxy increased the crosshead displacement, strain and bending force when mechanical damage occurred by 33.46%, 26.74% and 3.05% respectively. Failure analysis indicated that the predominant failure site was PCB pad lift/cratering regardless of with or without adhesives. The 3D quarter finite element model was also built to further study the improvement mechanism of bend performance by these adhesives. (C) 2011 Elsevier Ltd. All rights reserved.

    DOI

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test

    Hongbin Shi, Toshitsugu Ueda

    Microelectronics Reliability   51 ( 9-11 ) 1898 - 1902  2011.09

     View Summary

    This paper discusses the influences of various adhesives on board-level shear strength of ChipArray®
    Thin Core Ball Grid Array (CTBGA) assemblies through an innovative reliability evaluation approach, i.e. array-based package (ABP) shear test. It is found that the adhesives do enhance the shear strength for all the test categories as compared with the assemblies without adhesives (w/o A), but the degree of improvements between different strategies vary quiet a lot. The specific shear strength is affected by a number of factors, in which dispending patterns and material properties of the adhesives used influences it obviously. In general, the adhesives with high storage modulus and large dispensing volume are preferred, for example, stiff full or partial capillary flow underfills. In order to further understand the failure mechanism of the CTBGA during the ABP shear test, failure analysis on tested devices are also conducted using side view optical microscopy, scanning electron microscope (SEM) and energy dispersive X-ray (EDX), the results indicate that the predominant failure mode changes from PCB pad lift/cratering to fracture at package side intermetallic compound (IMC)/solder interface with increasing dispensing volume and storage modulus, which basically improves the solder joint reliability of CTBGA assemblies. © 2011 Elsevier Ltd. All rights reserved.

    DOI

  • Experiment and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending

    Hongbin Shi, Faxing Che, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   51 ( 9-11 ) 1850 - 1855  2011.09

     View Summary

    This paper presents the four-point bend test results for edge and corner bonded 0.5 mm pitch lead-free package stackable very thin fine pitch ball grid arrays (PSvfBGAs) as package-on-package (PoP) bottom packages on a standard IPC/JEDEC bend test board. The tests were carried out based on the above standard with a 30 mm loading span, 90 mm support span and 7.5 mm/s crosshead speed. The daisy chain resistance, strain, crosshead displacement and load of each PSvfBGA were measured and a 20% increase in the resistance was used as the failure criterion. Materials used in this study were a UV-cured acrylic edge bond adhesive, a thermal-cured epoxy edge bond adhesive and a thermal-cured epoxy corner bond adhesive. The test results show that all of them can improve the bend performance significantly: especially the edge bond high module epoxy increased the crosshead displacement, strain and bending force when mechanical damage occurred by 33.46%, 26.74% and 3.05% respectively. Failure analysis indicated that the predominant failure site was PCB pad lift/cratering regardless of with or without adhesives. The 3D quarter finite element model was also built to further study the improvement mechanism of bend performance by these adhesives. (C) 2011 Elsevier Ltd. All rights reserved.

    DOI

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test

    Hongbin Shi, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   51 ( 9-11 ) 1898 - 1902  2011.09

     View Summary

    This paper discusses the influences of various adhesives on board-level shear strength of ChipArray (R) Thin Core Ball Grid Array (CTBGA) assemblies through an innovative reliability evaluation approach, i.e. array-based package (ABP) shear test. It is found that the adhesives do enhance the shear strength for all the test categories as compared with the assemblies without adhesives (w/o A), but the degree of improvements between different strategies vary quiet a lot. The specific shear strength is affected by a number of factors, in which dispending patterns and material properties of the adhesives used influences it obviously. In general, the adhesives with high storage modulus and large dispensing volume are preferred, for example, stiff full or partial capillary flow underfills. In order to further understand the failure mechanism of the CTBGA during the ABP shear test, failure analysis on tested devices are also conducted using side view optical microscopy, scanning electron microscope (SEM) and energy dispersive X-ray (EDX), the results indicate that the predominant failure mode changes from PCB pad lift/cratering to fracture at package side intermetallic compound (IMC)/solder interface with increasing dispensing volume and storage modulus, which basically improves the solder joint reliability of CTBGA assemblies. (C) 2011 Elsevier Ltd. All rights reserved.

    DOI

  • Experiment and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending

    Hongbin Shi, Faxing Che, Toshitsugu Ueda

    MICROELECTRONICS RELIABILITY   51 ( 9-11 ) 1850 - 1855  2011.09

     View Summary

    This paper presents the four-point bend test results for edge and corner bonded 0.5 mm pitch lead-free package stackable very thin fine pitch ball grid arrays (PSvfBGAs) as package-on-package (PoP) bottom packages on a standard IPC/JEDEC bend test board. The tests were carried out based on the above standard with a 30 mm loading span, 90 mm support span and 7.5 mm/s crosshead speed. The daisy chain resistance, strain, crosshead displacement and load of each PSvfBGA were measured and a 20% increase in the resistance was used as the failure criterion. Materials used in this study were a UV-cured acrylic edge bond adhesive, a thermal-cured epoxy edge bond adhesive and a thermal-cured epoxy corner bond adhesive. The test results show that all of them can improve the bend performance significantly: especially the edge bond high module epoxy increased the crosshead displacement, strain and bending force when mechanical damage occurred by 33.46%, 26.74% and 3.05% respectively. Failure analysis indicated that the predominant failure site was PCB pad lift/cratering regardless of with or without adhesives. The 3D quarter finite element model was also built to further study the improvement mechanism of bend performance by these adhesives. (C) 2011 Elsevier Ltd. All rights reserved.

    DOI

  • Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections

    Jinxing Liang, Xuefeng Li, Hongsheng Li, Yunfang Ni, Kunyu Li, Libin Huang, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 ) 1 - 4  2011.06

     View Summary

    In this paper, we report a novel double-ended tuning fork (DETF) with variable sections. The DETF is fabricated using a quartz micro-electromechanical system (MEMS) technique and packaged using the flip chip technique. The central part of the vibration beam is thinned to enhance the force-frequency sensitivity but not decrease the vibration frequency. The mechanical quality factor (Q value) can also be maintained, which determines the mechanical noise performance. Three types of DETF are designed and fabricated with a fixed beam length of 4 mm. The vibration characteristics (vibration frequency, Q value, and equivalent circuit parameters) are evaluated using an impedance analyzer 4294A. The finite element method (FEM) is used to simulate the natural frequency and force-frequency sensitivity. For the natural frequencies, the experimental results agreed well with the simulation results. High Q values are achieved for all the DETFs, which are 9924, 7083, and 6335. By multiplying the force-frequency sensitivity (Delta F) by the measured Q values, the performance of the new DETF structure can be improved by 1.9 times. (c) 2011 The Japan Society of Applied Physics

    DOI

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell Using Micromirror

    Xuefeng Li, Jinxing Liang, Hiroshi Oigawa, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 ) 1 - 4  2011.06

     View Summary

    In this paper, we presented the double optical path length of a photonic bandgap fiber (PBGF) gas cell. The gas sensor sensitivity can be improved by a two fold lengthening of the optical length without changing the gas fluid. Furthermore, a high-reflection micromirror was included in the proposed double optical path length gas cell. A Cr/Au sputtering process was applied to fabricate the vertical micromirror using a single-mode fiber (SMF). A measurement system for low gas concentrations based on the micromirror has been implemented, and sensitivity was improved without increasing the response time. (c) 2011 The Japan Society of Applied Physics

    DOI

  • Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections

    Jinxing Liang, Xuefeng Li, Hongsheng Li, Yunfang Ni, Kunyu Li, Libin Huang, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 ) 1 - 4  2011.06

     View Summary

    In this paper, we report a novel double-ended tuning fork (DETF) with variable sections. The DETF is fabricated using a quartz micro-electromechanical system (MEMS) technique and packaged using the flip chip technique. The central part of the vibration beam is thinned to enhance the force-frequency sensitivity but not decrease the vibration frequency. The mechanical quality factor (Q value) can also be maintained, which determines the mechanical noise performance. Three types of DETF are designed and fabricated with a fixed beam length of 4 mm. The vibration characteristics (vibration frequency, Q value, and equivalent circuit parameters) are evaluated using an impedance analyzer 4294A. The finite element method (FEM) is used to simulate the natural frequency and force-frequency sensitivity. For the natural frequencies, the experimental results agreed well with the simulation results. High Q values are achieved for all the DETFs, which are 9924, 7083, and 6335. By multiplying the force-frequency sensitivity (Delta F) by the measured Q values, the performance of the new DETF structure can be improved by 1.9 times. (c) 2011 The Japan Society of Applied Physics

    DOI

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell Using Micromirror

    Xuefeng Li, Jinxing Liang, Hiroshi Oigawa, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 ) 1 - 4  2011.06

     View Summary

    In this paper, we presented the double optical path length of a photonic bandgap fiber (PBGF) gas cell. The gas sensor sensitivity can be improved by a two fold lengthening of the optical length without changing the gas fluid. Furthermore, a high-reflection micromirror was included in the proposed double optical path length gas cell. A Cr/Au sputtering process was applied to fabricate the vertical micromirror using a single-mode fiber (SMF). A measurement system for low gas concentrations based on the micromirror has been implemented, and sensitivity was improved without increasing the response time. (c) 2011 The Japan Society of Applied Physics

    DOI

  • Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections

    Jinxing Liang, Xuefeng Li, Hongsheng Li, Yunfang Ni, Kunyu Li, Libin Huang, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 ) 1 - 4  2011.06

     View Summary

    In this paper, we report a novel double-ended tuning fork (DETF) with variable sections. The DETF is fabricated using a quartz micro-electromechanical system (MEMS) technique and packaged using the flip chip technique. The central part of the vibration beam is thinned to enhance the force-frequency sensitivity but not decrease the vibration frequency. The mechanical quality factor (Q value) can also be maintained, which determines the mechanical noise performance. Three types of DETF are designed and fabricated with a fixed beam length of 4 mm. The vibration characteristics (vibration frequency, Q value, and equivalent circuit parameters) are evaluated using an impedance analyzer 4294A. The finite element method (FEM) is used to simulate the natural frequency and force-frequency sensitivity. For the natural frequencies, the experimental results agreed well with the simulation results. High Q values are achieved for all the DETFs, which are 9924, 7083, and 6335. By multiplying the force-frequency sensitivity (Delta F) by the measured Q values, the performance of the new DETF structure can be improved by 1.9 times. (c) 2011 The Japan Society of Applied Physics

    DOI

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell Using Micromirror

    Xuefeng Li, Jinxing Liang, Hiroshi Oigawa, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 ) 1 - 4  2011.06

     View Summary

    In this paper, we presented the double optical path length of a photonic bandgap fiber (PBGF) gas cell. The gas sensor sensitivity can be improved by a two fold lengthening of the optical length without changing the gas fluid. Furthermore, a high-reflection micromirror was included in the proposed double optical path length gas cell. A Cr/Au sputtering process was applied to fabricate the vertical micromirror using a single-mode fiber (SMF). A measurement system for low gas concentrations based on the micromirror has been implemented, and sensitivity was improved without increasing the response time. (c) 2011 The Japan Society of Applied Physics

    DOI

  • Effects of Reworkable Edge and Corner Bond Adhesives on the Thermal Fatigue Performance of Lead-Free Chip Scale Package Assemblies

    Hongbin Shi, Toshitsugu Ueda

    Proceedings of 13th International Conference on. Electronics Materials and Packaging, pp. EMAP2011-20 (1-10)    2011

  • Investigation on the optimum sampling rate of strain measurement during printed circuit board (PCB) system assembly

    Hong-Bin Shi, Toshitsugu Ueda

    2011 IEEE 13th Electronics Packaging Technology Conference, EPTC 2011     579 - 584  2011

     View Summary

    This paper discusses the Min. sampling rate of strain measurement during the system assembly process. The test boards including the server, desktop computer and laptop boards with different board thickness. A 1% variation in the diagonal strain and principle strain are used as the threshold for determining the Min. sampling rate. The test results show that the absolute values of diagonal strain and principle strain reduce with the decreasing sampling rate, this trend is really apparent when the sampling rates is lower than 100Hz. In addition, the principle strain metric is more conservative than diagonal strain metric. Min. sampling rates for strain gages at different locations of boards vary widely, this is due to they have different strain rate, i.e. change in strain divided by the time interval during which this change is measured. The higher strain rate of the strain gage, the larger Min. sampling rate should be chosen. The Min. sampling rate of the server, desktop computer and laptop boards is 250 Hz, 667 Hz and 200 Hz respective. If the strain measurement equipment doesn't have the selfsame option, a higher sampling rate should be chosen. © 2011 IEEE.

    DOI

  • Mitigation of Thermal Fatigue Failure in Fully Underfilled Lead-free Array-based Package Assemblies Using Partial Underfills

    Hongbin Shi, Toshitsugu Ueda

    Proceedings of the 13th Electronics Packaging Technology Conference     542 - 547  2011

    DOI

  • Quartz Resonator Hydrogen Sensor Using Platinum Black

    Hiroshi Oigawa, Yu Kirino, Daisuke Yamazaki, Toshitsugu Ueda

    Proceedings of the 2011 Fifth International Conference on Sensing Technology     587 - 590  2011

    DOI

  • Quantitative Analysis of Silver Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Proceedings of the 2011 Fifth International Conference on Sensing Technology, , November 28     6 - 10  2011

    DOI

  • High Frequency Plano-convex Resonator Fabricated by DRIE

    Hiroshi Oigawa, Rui Qian, Hsin-Hui Chen, Daisuke Yamazaki, Toshitsugu Ueda

    Technical Meeting on Electronic Circuits, Kyoto, Japan     43 - 46  2011

  • A Novel Method for Evaluating Triaxial Strain Gages Used in Printed Circuit Board Assemblies (PCBA) Strain Monitoring (ポスター発表)

    Hongbin Shi, Satoshi Ikezawa, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Application of a 2-D Anisotropic Etching Simulator on Perforated Etching of Quartz Wafer (ポスター発表)

    Meng Zhao, Hiroshi Oigawa, Jing Ji, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Size Optimization for High Frequency Quartz Resonator Using Finite Element Vibration Analysis (ポスター発表)

    Jing Ji, Hiroshi Oigawa, Hsin Hui Chen, Meng Zhao, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Sensing System for Quantitative Analysis of Metal Particles Using Laser-Induced Breakdown Spectroscopy (口頭発表)

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • A Reliability of Silicon-Crystalline Quartz Bonding Through Reducing of the Residual Stresses (口頭発表)

    Yury Zimin, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Ultra-Small Imaging System for Cell Phone Camera Using Birefringent Lenses (口頭発表)

    Yupeng Zhang, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Alkanes Near-Infrared Spectrum Analysis Based on Hollow-Core Photonic Bandgap Fiber (口頭発表)

    Xuefeng Li, S. Lin, Yury Zimin, Yupeng Zhang, Toshitsugu Ueda, Jinxing Liang

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

  • Vibration Analysis of Original Shape Quartz Resonator for High Q Realization (ポスター発表)

    H. Oigawa, Y. Kirino, H. Chen, J. Ji, T. Ueda

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan    2011

  • Optimal Size Determination of Electrodes for High Frequency Fundamental AT-cut Quartz Resonator using 3-D FEM (ポスター発表)

    J. Ji, H. Ohigawa, H. Chen, M. Zhao, T. Ueda

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan    2011

  • High Sensitivity Fiber-optic Fabry-perot Interferometer Temperature Sensor (ポスター発表)

    X. Li, S. Lin, J. Liang, H. Oigawa, T. Ueda

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan    2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending (口頭発表)

    Hongbin Shi, Faxing Che, Toshitsugu Ueda

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France    2011

    DOI

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France    2011

    DOI

  • Board-level Solder Joint Reliability of Edge and Corner Bonded Lead-free Chip Scale Package Assemblies Subjected to Thermal Cycling (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Solid State Devices and Materials, Nagoya, Japan    2011

    DOI

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Analysis of Edge and Corner Bonded PoP Bottom Package Reliability under Temperature Cycling Conditions by Experimental and Finite Element Methods (ポスター発表)

    Hongbin Shi, Faxing Che, Shan Gao, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Heat and Ultraviolet Dual-curable Edge Bonding Materials for Ball Grid Array Packages and the Impact on Solder Joint Reliability (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Drop Impact Reliability Improvement of Lead-free Array-based Package Assemblies with Different Board-level Underfills and Adhesives (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Experimental and Computational Characterization of Board-level Shear Behavior of PSvfBGA Assemblies with Edge and Corner Adhesives (ポスター発表)

    Hongbin Shi, Faxing Che, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Halogen-free and Reworkable Corner Bond Adhesive for Array-based Packages and the Impact on Board-level Solder Joint Reliability (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China    2011

    DOI

  • Investigation of Various Board-level Underfills and Adhesives for CTBGA Bend Performance Enhancements in Lead-free Portable Electronic Products (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China    2011

    DOI

  • Thermal Cycling Reliability of Lead-free Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Reworkable Edge and Corner Bond Adhesives (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China    2011

    DOI

  • Use of a new anisotropic etching simulator on quartz crystal

    M. Zhao, H. Oigawa, J. Wang, J. Ji, T. Ueda

    2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11     450 - 453  2011

     View Summary

    This paper describes features of a new anisotropic etching simulator and its applications on predicting etching shape of quartz crystal. The simulator is suitable to predict etching profiles of two-dimensional initial shape which has a profile formed by straight lines. In this simulator, a program flow with uneven time step was used to furthest reduced the probability of improper shape prediction. We present here two examples of its application on both Z-plate and AT-plate quartz crystal to show its good performance. © 2011 IEEE.

    DOI

  • On-Wafer-Packaging of Crystal Quartz Based Devises Using Low-Temperature Anodic Bonding( (口頭発表+ポスター発表)

    Yury ZIMIN Toshitsugu UEDA

    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2011) Aix-en-Provence, France    2011

  • Effects of Edge and Corner bond Adhesives on Board-level Shear Strength of Lead-free Package-on-Package Devices (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronics Packaging, Nara, Japan    2011

  • Studies on the Bend Performance of Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Edge and Corner Bond Adhesives (oral)

    SHI Hongbin, UEDA Toshitsugu

    2011 International Conference on Solid-State and Integrated Circuit    2011

    DOI

  • Effects of Edge and Corner Bond Adhesives on the Drop Reliability of Package-on-Package Bottom Package Assemblies (oral)

    SHI Hongbin, UEDA Toshitsugu

    2011 International Conference on Solid-State and Integrated Circuit    2011

    DOI

  • A Real Double-convex Spherical Single Lens System with Blur Restoration Feature (oral)

    Yupeng Zhang, Ikumi Ninema, Toshitsugu Ueda

    2011 International Conference on Communication and Electronics Information, Haikou, China    2011

  • Saturated Absorption Spectroscopy of Hydrocarbons Based on Photonic Bandgap Fiber (oral)

    Xuefeng Li, Jinxing Liang, Yupeng Zhang, Toshitsugu Ueda

    2011 International Conference on Communication and Electronics Information, Haikou, China    2011

  • Bonding of silicon and crystal quartz wafers at the minimized residual stresses

    Yury ZIMIN, Toshitsugu UEDA, Joanna PAW?AT

    PRZEGL?D ELEKTROTECHNICZNY    2011

  • Diesel Particulate Analysis Using SEM-EDX and Laser-induced Breakdown Spectroscopy

    S. Ikezawa, M. Wakamatsu, T. Ueda

    International Journal on Smart Sensing and Intelligent Systems   Vol. 4 ( No. 2 ) 174 - 188  2011

  • A two-dimensional anisotropic wet etching simulator for quartz crystal

    Meng Zhao, Jiani Wang, Hiroshi Oigawa, Jing Ji, Hisanori Hayashi, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   131 ( 5 ) 185 - 188  2011

     View Summary

    We developed an anisotropic wet etching simulator that can predict the etching profile of initial shape, which is two-dimensional and formed by straight lines. New etching rate database of quartz at a special condition was obtained. Improved hull method was used to deal with round corner etching. New programming flow was adopted to avoid improper profile prediction. A friendly graphical user interface was built for user's convenience. The simulation result of this simulator meets well with the experimental results and shows nice accuracy in new emerging faces predicting. © 2011 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Development of carbonaceous particle size analyzer using laser-induced incandescence technology

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury L'vovich Zimin, Joanna Pawlat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   131 ( 5 ) 171 - 177  2011

     View Summary

    This paper presents a new sensing system for carbonaceous nanoparticle measurement using a laser-induced incandescence (LII) technique. Our research group has improved the laser-induced breakdown spectroscopy (LIBS) system used for quantitative analysis. Although the basic principles of LIBS quantitative measurements are well understood, several uncertainties remain concerning complete descriptions-especially for particle size measurement. The elemental composition and density of the particles are determined using LIBS, and particle size measurements are accomplished with the help of LII. In the case of the present system, with temporally resolved LII, measurement of soot primary particle sizes is feasible in a combustion process derived from the ratio of emission signals after a laser pulse because the cooling behaviour is characteristic of the particle size. The LII temporal analysis was performed by a streak camera, which was also used for LIBS analysis. The LII technique allows in situ measurement of the average primary particle size of nanoscale soot particles. © 2011 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Deblur of radially variant blurred image for single lens system

    Yupeng Zhang Member, Toshitsugu Ueda

    IEEJ Transactions on Electrical and Electronic Engineering, Special Issue: Special Issue on Electronics, Information and Systems   Vol. 6 ( Issue S1 ) S7 2016-2011  2011

    DOI

  • Development of hydrogen gas sensors using quartz resonator

    Hiroshi Oigawa, Daisuke Yamazaki, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   131 ( 3 ) 3 - 121  2011

     View Summary

    The hydrogen gas sensor using quartz resonators is developed to measure less than 4% hydrogen concentration in air. This sensor consists of two quartz resonators. Both sides of electrodes of the sensor resonator are made by platinum thin film. And the reference resonator has Au electrodes. By using this reference resonator, the influence of the temperature and pressure will be canceled. This sensor can measure hydrogen concentration from reaction heat on the platinum catalyst. From experimental results, the frequency of sensor changed linearly in 0% to 5% hydrogen concentrations mixed with the air. The sensor showed 20ppm frequency translation per 1%, and the time constant is about 20 seconds. © 2011 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • イメージファイバーを用いた根管内観察システムの開発 (口頭発表)

    李 慧頴, 張 宇鵬, 吉居 慎二, 李 雪峰, 植田 敏嗣

    第64回 電気関係学会九州支部連合大会, 佐賀大学    2011

  • 二軸傾斜センサシステムの開発-ステップ1 (口頭発表)

    章磊, 津野徹, 植田敏嗣

    第64回 電気関係学会九州支部連合大会, 佐賀大学    2011

  • 2 軸静電容量型傾斜角センサの開発と評価 (口頭発表)

    劉 健男, 播磨 幸一, 高森 政聡, 植田 敏嗣

    第64回 電気関係学会九州支部連合大会, 佐賀大学    2011

  • MEMS 精密実装におけるフラックスレスリフローのプロセスの改善 (口頭発表)

    程 サンサン, 高森 政聡, 植田 敏嗣

    第64回 電気関係学会九州支部連合大会, 佐賀大学    2011

  • MEMS 技術を利用したPlano-convex 形状水晶振動子の開発 (口頭発表)

    銭 鋭, 大井川 寛, 山崎 大輔, 植田 敏嗣

    第64回 電気関係学会九州支部連合大会, 佐賀大学    2011

  • High-Q を実現するための新たな形状の水晶振動子の研究 (口頭発表)

    桐野 雄宇, 大井川 寛, 陳 欣匯, 植田 敏嗣

    第64回 電気関係学会九州支部連合大会, 佐賀大学    2011

  • LTCCコイルを用いた渦電流変位センサの開発 (口頭発表)

    斎藤達也, 津野 徹, 植田敏嗣

    第64回 電気関係学会九州支部連合大会, 佐賀大学    2011

  • アルゴンガス雰囲気におけるレーザー誘起ブレークダウン分光分析 (口頭発表)

    池沢 聡, 若松 宗明, 植田 敏嗣

    レーザー学会第148回研究会報告,レーザー応用, Kumamoto, Japan    2011

  • 高感度傾斜角センサ作製プロセスの改善とその評価 (口頭)

    劉健男, 李 南浩, 播磨幸一, 高森政聡, 梁金星, 植田敏嗣

    平成23年 電気学会全国大会, 大阪大学    2011

  • リファレンス振動子により安定化したQCM匂いセンサ (口頭)

    陳睿思, 大井川寛, 水谷直貴, 李 丞祐, 植田敏嗣

    平成23年 電気学会全国大会, 大阪大学    2011

  • The 2-D Vibration Analysis of Plano-convex AT-cut Quartz Resonator by FEM (口頭)

    陳欣匯, 紀 靜, 大井川寛, 植田敏嗣

    平成23年 電気学会全国大会, 大阪大学    2011

  • Development of Slower Wet Etching Rates Measurement of α-Quartz (口頭)

    林碩, 大井川寛, 趙萌, 植田敏嗣

    平成23年 電気学会全国大会, 大阪大学    2011

  • Low noise design of the 2-axis tilt sensor (口頭)

    Chunlei Yu, Tooru Tsuno, Toshitsugu Ueda

    平成23年 電気学会全国大会, 大阪大学    2011

  • An Oscillating Circuit development for Hydrogen Gas Sensors using Quartz resonators (口頭)

    Hai Jiang, Hiroshi Oigawa, Tooru Tsuno, Toshitsugu Ueda

    平成23年 電気学会全国大会, 大阪大学    2011

  • Effects of Reworkable Edge and Corner Bond Adhesives on the Thermal Fatigue Performance of Lead-Free Chip Scale Package Assemblies

    Hongbin Shi, Toshitsugu Ueda

    Proceedings of 13th International Conference on. Electronics Materials and Packaging, pp. EMAP2011-20 (1-10)    2011

  • Investigation on the optimum sampling rate of strain measurement during printed circuit board (PCB) system assembly

    Hong-Bin Shi, Toshitsugu Ueda

    2011 IEEE 13th Electronics Packaging Technology Conference, EPTC 2011     579 - 584  2011

     View Summary

    This paper discusses the Min. sampling rate of strain measurement during the system assembly process. The test boards including the server, desktop computer and laptop boards with different board thickness. A 1% variation in the diagonal strain and principle strain are used as the threshold for determining the Min. sampling rate. The test results show that the absolute values of diagonal strain and principle strain reduce with the decreasing sampling rate, this trend is really apparent when the sampling rates is lower than 100Hz. In addition, the principle strain metric is more conservative than diagonal strain metric. Min. sampling rates for strain gages at different locations of boards vary widely, this is due to they have different strain rate, i.e. change in strain divided by the time interval during which this change is measured. The higher strain rate of the strain gage, the larger Min. sampling rate should be chosen. The Min. sampling rate of the server, desktop computer and laptop boards is 250 Hz, 667 Hz and 200 Hz respective. If the strain measurement equipment doesn't have the selfsame option, a higher sampling rate should be chosen. © 2011 IEEE.

    DOI

  • Mitigation of thermal fatigue failure in fully underfilled lead-free array-based package assemblies using partial underfills

    Hong-Bin Shi, Toshitsugu Ueda

    2011 IEEE 13th Electronics Packaging Technology Conference, EPTC 2011     542 - 547  2011

     View Summary

    A design of experiments was conducted to determine the thermal cycling reliability of full and partial capillary flow underfilled lead-free chip scale packages (CSPs), the tests were carried out based on the JEDEC JESD22-A104C standard. Two kinds of representative fast cure and reworkable underfill materials are used in this study, and CSPs without underfill were also tested for comparison. The test results show that both two underfill materials reduce the thermal cycling reliability of CSP assemblies. The underfill with high glass transition temperature (Tg) and storage modulus yielded better performance, of course, the CTE is also very critical to the thermomechanical fatigue performance, but its effects is not so obvious in this study due to the similar CTE of used underfills. In addition, the negative effect of partial underfill is smaller than that of full underfill. Failure analysis shows that the dominant failure mode observed is solder cracking near package and/or PCB pads. © 2011 IEEE.

    DOI

  • Quartz Resonator Hydrogen Sensor Using Platinum Black

    Hiroshi Oigawa, Yu Kirino, Daisuke Yamazaki, Toshitsugu Ueda

    Proceedings of the 2011 Fifth International Conference on Sensing Technology     587 - 590  2011

    DOI

  • Quantitative Analysis of Silver Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Proceedings of the 2011 Fifth International Conference on Sensing Technology, , November 28     6 - 10  2011

    DOI

  • High Frequency Plano-convex Resonator Fabricated by DRIE

    Hiroshi Oigawa, Rui Qian, Hsin-Hui Chen, Daisuke Yamazaki, Toshitsugu Ueda

    Technical Meeting on Electronic Circuits, Kyoto, Japan     43 - 46  2011

  • A Novel Method for Evaluating Triaxial Strain Gages Used in Printed Circuit Board Assemblies (PCBA) Strain Monitoring (ポスター発表)

    Hongbin Shi, Satoshi Ikezawa, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Application of a 2-D Anisotropic Etching Simulator on Perforated Etching of Quartz Wafer (ポスター発表)

    Meng Zhao, Hiroshi Oigawa, Jing Ji, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Size Optimization for High Frequency Quartz Resonator Using Finite Element Vibration Analysis (ポスター発表)

    Jing Ji, Hiroshi Oigawa, Hsin Hui Chen, Meng Zhao, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Sensing System for Quantitative Analysis of Metal Particles Using Laser-Induced Breakdown Spectroscopy (口頭発表)

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • A Reliability of Silicon-Crystalline Quartz Bonding Through Reducing of the Residual Stresses (口頭発表)

    Yury Zimin, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Ultra-Small Imaging System for Cell Phone Camera Using Birefringent Lenses (口頭発表)

    Yupeng Zhang, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Alkanes Near-Infrared Spectrum Analysis Based on Hollow-Core Photonic Bandgap Fiber (口頭発表)

    Xuefeng Li, S. Lin, Yury Zimin, Yupeng Zhang, Toshitsugu Ueda, Jinxing Liang

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

  • Vibration Analysis of Original Shape Quartz Resonator for High Q Realization (ポスター発表)

    H. Oigawa, Y. Kirino, H. Chen, J. Ji, T. Ueda

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan    2011

  • Optimal Size Determination of Electrodes for High Frequency Fundamental AT-cut Quartz Resonator using 3-D FEM (ポスター発表)

    J. Ji, H. Ohigawa, H. Chen, M. Zhao, T. Ueda

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan    2011

  • High Sensitivity Fiber-optic Fabry-perot Interferometer Temperature Sensor (ポスター発表)

    X. Li, S. Lin, J. Liang, H. Oigawa, T. Ueda

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan    2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending (口頭発表)

    Hongbin Shi, Faxing Che, Toshitsugu Ueda

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France    2011

    DOI

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France    2011

    DOI

  • Board-level Solder Joint Reliability of Edge and Corner Bonded Lead-free Chip Scale Package Assemblies Subjected to Thermal Cycling (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Solid State Devices and Materials, Nagoya, Japan    2011

    DOI

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Analysis of Edge and Corner Bonded PoP Bottom Package Reliability under Temperature Cycling Conditions by Experimental and Finite Element Methods (ポスター発表)

    Hongbin Shi, Faxing Che, Shan Gao, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Heat and Ultraviolet Dual-curable Edge Bonding Materials for Ball Grid Array Packages and the Impact on Solder Joint Reliability (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Drop Impact Reliability Improvement of Lead-free Array-based Package Assemblies with Different Board-level Underfills and Adhesives (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Experimental and Computational Characterization of Board-level Shear Behavior of PSvfBGA Assemblies with Edge and Corner Adhesives (ポスター発表)

    Hongbin Shi, Faxing Che, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Halogen-free and Reworkable Corner Bond Adhesive for Array-based Packages and the Impact on Board-level Solder Joint Reliability (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China    2011

    DOI

  • Investigation of Various Board-level Underfills and Adhesives for CTBGA Bend Performance Enhancements in Lead-free Portable Electronic Products (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China    2011

    DOI

  • Thermal Cycling Reliability of Lead-free Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Reworkable Edge and Corner Bond Adhesives (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China    2011

    DOI

  • Use of a new anisotropic etching simulator on quartz crystal

    M. Zhao, H. Oigawa, J. Wang, J. Ji, T. Ueda

    2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11     450 - 453  2011

     View Summary

    This paper describes features of a new anisotropic etching simulator and its applications on predicting etching shape of quartz crystal. The simulator is suitable to predict etching profiles of two-dimensional initial shape which has a profile formed by straight lines. In this simulator, a program flow with uneven time step was used to furthest reduced the probability of improper shape prediction. We present here two examples of its application on both Z-plate and AT-plate quartz crystal to show its good performance. © 2011 IEEE.

    DOI

  • On-Wafer-Packaging of Crystal Quartz Based Devises Using Low-Temperature Anodic Bonding( (口頭発表+ポスター発表)

    Yury ZIMIN Toshitsugu UEDA

    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2011) Aix-en-Provence, France    2011

  • Effects of Edge and Corner bond Adhesives on Board-level Shear Strength of Lead-free Package-on-Package Devices (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronics Packaging, Nara, Japan    2011

  • Studies on the Bend Performance of Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Edge and Corner Bond Adhesives (oral)

    SHI Hongbin, UEDA Toshitsugu

    2011 International Conference on Solid-State and Integrated Circuit    2011

    DOI

  • Effects of Edge and Corner Bond Adhesives on the Drop Reliability of Package-on-Package Bottom Package Assemblies (oral)

    SHI Hongbin, UEDA Toshitsugu

    2011 International Conference on Solid-State and Integrated Circuit    2011

    DOI

  • A Real Double-convex Spherical Single Lens System with Blur Restoration Feature (oral)

    Yupeng Zhang, Ikumi Ninema, Toshitsugu Ueda

    2011 International Conference on Communication and Electronics Information, Haikou, China    2011

  • Saturated Absorption Spectroscopy of Hydrocarbons Based on Photonic Bandgap Fiber (oral)

    Xuefeng Li, Jinxing Liang, Yupeng Zhang, Toshitsugu Ueda

    2011 International Conference on Communication and Electronics Information, Haikou, China    2011

  • Bonding of silicon and crystal quartz wafers at the minimized residual stresses

    Yury ZIMIN, Toshitsugu UEDA, Joanna PAW?AT

    PRZEGL?D ELEKTROTECHNICZNY    2011

  • Diesel Particulate Analysis Using SEM-EDX and Laser-induced Breakdown Spectroscopy

    S. Ikezawa, M. Wakamatsu, T. Ueda

    International Journal on Smart Sensing and Intelligent Systems   Vol. 4 ( No. 2 ) 174 - 188  2011

  • A two-dimensional anisotropic wet etching simulator for quartz crystal

    Meng Zhao, Jiani Wang, Hiroshi Oigawa, Jing Ji, Hisanori Hayashi, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   131 ( 5 ) 185 - 188  2011

     View Summary

    We developed an anisotropic wet etching simulator that can predict the etching profile of initial shape, which is two-dimensional and formed by straight lines. New etching rate database of quartz at a special condition was obtained. Improved hull method was used to deal with round corner etching. New programming flow was adopted to avoid improper profile prediction. A friendly graphical user interface was built for user's convenience. The simulation result of this simulator meets well with the experimental results and shows nice accuracy in new emerging faces predicting. © 2011 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Development of carbonaceous particle size analyzer using laser-induced incandescence technology

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury L'vovich Zimin, Joanna Pawlat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   131 ( 5 ) 171 - 177  2011

     View Summary

    This paper presents a new sensing system for carbonaceous nanoparticle measurement using a laser-induced incandescence (LII) technique. Our research group has improved the laser-induced breakdown spectroscopy (LIBS) system used for quantitative analysis. Although the basic principles of LIBS quantitative measurements are well understood, several uncertainties remain concerning complete descriptions-especially for particle size measurement. The elemental composition and density of the particles are determined using LIBS, and particle size measurements are accomplished with the help of LII. In the case of the present system, with temporally resolved LII, measurement of soot primary particle sizes is feasible in a combustion process derived from the ratio of emission signals after a laser pulse because the cooling behaviour is characteristic of the particle size. The LII temporal analysis was performed by a streak camera, which was also used for LIBS analysis. The LII technique allows in situ measurement of the average primary particle size of nanoscale soot particles. © 2011 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Deblur of Radially Variant Blurred Image for Single Lens System

    Yupeng Zhang, Toshitsugu Ueda

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   6 ( Issue S1 ) S7 - S16  2011

     View Summary

    This paper introduces a method to deblur a radially blurred image which is created by a single lens imaging system. Single lens imaging system does not create stronger lens aberrations around the center of an image, but stronger around the outside. One obvious phenomenon caused by this is the radially increased blurring effect along the radial line. Researchers have already studied one kind of radial blur caused by vertical motion between camera and object, but few have studied on the radial blur caused by inherent defect of a single lens system. Because of the radially variant property, a method is proposed in this paper that carries out the deconvolution using Polar coordinate system for both image and point spread functions (PSFs) converted from Cartesian coordinate system. By doing this the deblurring becomes a regular spatially invariant (SI) linear mathematical model for each circled region in the image that has same radial distance from the image center. Simulation results suggest the proposed method visually obtained the best deblurred image quality using four PSFs applied to four SI regions compared to deblurred images by other simulation conditions. However, segmenting the blurred image into more than four regions is undesirable because of the high beta/n ratio. (C) 2010 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI

  • Development of hydrogen gas sensors using quartz resonator

    Hiroshi Oigawa, Daisuke Yamazaki, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   131 ( 3 ) 3 - 121  2011

     View Summary

    The hydrogen gas sensor using quartz resonators is developed to measure less than 4% hydrogen concentration in air. This sensor consists of two quartz resonators. Both sides of electrodes of the sensor resonator are made by platinum thin film. And the reference resonator has Au electrodes. By using this reference resonator, the influence of the temperature and pressure will be canceled. This sensor can measure hydrogen concentration from reaction heat on the platinum catalyst. From experimental results, the frequency of sensor changed linearly in 0% to 5% hydrogen concentrations mixed with the air. The sensor showed 20ppm frequency translation per 1%, and the time constant is about 20 seconds. © 2011 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Effects of Reworkable Edge and Corner Bond Adhesives on the Thermal Fatigue Performance of Lead-Free Chip Scale Package Assemblies

    Hongbin Shi, Toshitsugu Ueda

    Proceedings of 13th International Conference on. Electronics Materials and Packaging, pp. EMAP2011-20 (1-10)    2011

  • Investigation on the Optimum Sampling Rate of Strain Measurement during Printed Circuit Board (PCB) System Assembly

    Hongbin Shi, Toshitsugu Ueda

    Proceedings of the 13th Electronics Packaging Technology Conference     579 - 584  2011

    DOI

  • Mitigation of thermal fatigue failure in fully underfilled lead-free array-based package assemblies using partial underfills

    Hong-Bin Shi, Toshitsugu Ueda

    2011 IEEE 13th Electronics Packaging Technology Conference, EPTC 2011     542 - 547  2011

     View Summary

    A design of experiments was conducted to determine the thermal cycling reliability of full and partial capillary flow underfilled lead-free chip scale packages (CSPs), the tests were carried out based on the JEDEC JESD22-A104C standard. Two kinds of representative fast cure and reworkable underfill materials are used in this study, and CSPs without underfill were also tested for comparison. The test results show that both two underfill materials reduce the thermal cycling reliability of CSP assemblies. The underfill with high glass transition temperature (Tg) and storage modulus yielded better performance, of course, the CTE is also very critical to the thermomechanical fatigue performance, but its effects is not so obvious in this study due to the similar CTE of used underfills. In addition, the negative effect of partial underfill is smaller than that of full underfill. Failure analysis shows that the dominant failure mode observed is solder cracking near package and/or PCB pads. © 2011 IEEE.

    DOI

  • Quartz Resonator Hydrogen Sensor Using Platinum Black

    Hiroshi Oigawa, Yu Kirino, Daisuke Yamazaki, Toshitsugu Ueda

    Proceedings of the 2011 Fifth International Conference on Sensing Technology     587 - 590  2011

    DOI

  • Quantitative Analysis of Silver Nanoparticle Ink using Laser-induced Breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Proceedings of the 2011 Fifth International Conference on Sensing Technology, , November 28     6 - 10  2011

    DOI

  • High Frequency Plano-convex Resonator Fabricated by DRIE

    Hiroshi Oigawa, Rui Qian, Hsin-Hui Chen, Daisuke Yamazaki, Toshitsugu Ueda

    Technical Meeting on Electronic Circuits, Kyoto, Japan     43 - 46  2011

  • A Novel Method for Evaluating Triaxial Strain Gages Used in Printed Circuit Board Assemblies (PCBA) Strain Monitoring (ポスター発表)

    Hongbin Shi, Satoshi Ikezawa, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Application of a 2-D Anisotropic Etching Simulator on Perforated Etching of Quartz Wafer (ポスター発表)

    Meng Zhao, Hiroshi Oigawa, Jing Ji, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Size Optimization for High Frequency Quartz Resonator Using Finite Element Vibration Analysis (ポスター発表)

    Jing Ji, Hiroshi Oigawa, Hsin Hui Chen, Meng Zhao, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Sensing System for Quantitative Analysis of Metal Particles Using Laser-Induced Breakdown Spectroscopy (口頭発表)

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • A Reliability of Silicon-Crystalline Quartz Bonding Through Reducing of the Residual Stresses (口頭発表)

    Yury Zimin, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Ultra-Small Imaging System for Cell Phone Camera Using Birefringent Lenses (口頭発表)

    Yupeng Zhang, Toshitsugu Ueda

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

    DOI

  • Alkanes Near-Infrared Spectrum Analysis Based on Hollow-Core Photonic Bandgap Fiber (口頭発表)

    Xuefeng Li, S. Lin, Yury Zimin, Yupeng Zhang, Toshitsugu Ueda, Jinxing Liang

    IEEE SENSORS 2011 Conference, LIMERICK, IRELAND    2011

  • Vibration Analysis of Original Shape Quartz Resonator for High Q Realization (ポスター発表)

    H. Oigawa, Y. Kirino, H. Chen, J. Ji, T. Ueda

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan    2011

  • Optimal Size Determination of Electrodes for High Frequency Fundamental AT-cut Quartz Resonator using 3-D FEM (ポスター発表)

    J. Ji, H. Ohigawa, H. Chen, M. Zhao, T. Ueda

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan    2011

  • High Sensitivity Fiber-optic Fabry-perot Interferometer Temperature Sensor (ポスター発表)

    X. Li, S. Lin, J. Liang, H. Oigawa, T. Ueda

    24th International Microprocesses and Nanotechnology Conference, Kyoto, Japan    2011

  • Experimental and numerical analysis for edge and corner bonded PoP bottom package assemblies under four-point bending (口頭発表)

    Hongbin Shi, Faxing Che, Toshitsugu Ueda

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France    2011

    DOI

  • Comparative studies on solder joint reliability of CTBGA assemblies with various adhesives using the array-based package shear test (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    22nd European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Bordeaux, France    2011

    DOI

  • Board-level Solder Joint Reliability of Edge and Corner Bonded Lead-free Chip Scale Package Assemblies Subjected to Thermal Cycling (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Solid State Devices and Materials, Nagoya, Japan    2011

    DOI

  • Thermomechanical Fatigue Performance of Lead-free Chip Scale Package Assemblies with Fast Cure and Reworkable Capillary Flow Underfills (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Analysis of Edge and Corner Bonded PoP Bottom Package Reliability under Temperature Cycling Conditions by Experimental and Finite Element Methods (ポスター発表)

    Hongbin Shi, Faxing Che, Shan Gao, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Heat and Ultraviolet Dual-curable Edge Bonding Materials for Ball Grid Array Packages and the Impact on Solder Joint Reliability (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Drop Impact Reliability Improvement of Lead-free Array-based Package Assemblies with Different Board-level Underfills and Adhesives (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Experimental and Computational Characterization of Board-level Shear Behavior of PSvfBGA Assemblies with Edge and Corner Adhesives (ポスター発表)

    Hongbin Shi, Faxing Che, Toshitsugu Ueda

    Advanced Metallization Conference 2011: 21st Asian Session, Tokyo, Japan    2011

  • Halogen-free and Reworkable Corner Bond Adhesive for Array-based Packages and the Impact on Board-level Solder Joint Reliability (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China    2011

    DOI

  • Investigation of Various Board-level Underfills and Adhesives for CTBGA Bend Performance Enhancements in Lead-free Portable Electronic Products (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China    2011

    DOI

  • Thermal Cycling Reliability of Lead-free Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Reworkable Edge and Corner Bond Adhesives (ポスター発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronic Packaging Technology & High Density Packaging, Shanghai, China    2011

    DOI

  • Use of a new anisotropic etching simulator on quartz crystal

    M. Zhao, H. Oigawa, J. Wang, J. Ji, T. Ueda

    2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11     450 - 453  2011

     View Summary

    This paper describes features of a new anisotropic etching simulator and its applications on predicting etching shape of quartz crystal. The simulator is suitable to predict etching profiles of two-dimensional initial shape which has a profile formed by straight lines. In this simulator, a program flow with uneven time step was used to furthest reduced the probability of improper shape prediction. We present here two examples of its application on both Z-plate and AT-plate quartz crystal to show its good performance. © 2011 IEEE.

    DOI

  • On-Wafer-Packaging of Crystal Quartz Based Devises Using Low-Temperature Anodic Bonding( (口頭発表+ポスター発表)

    Yury ZIMIN Toshitsugu UEDA

    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2011) Aix-en-Provence, France    2011

  • Effects of Edge and Corner bond Adhesives on Board-level Shear Strength of Lead-free Package-on-Package Devices (口頭発表)

    Hongbin Shi, Toshitsugu Ueda

    2011 International Conference on Electronics Packaging, Nara, Japan    2011

  • Studies on the Bend Performance of Package Stackable Very Thin Fine Pitch Ball Grid Array Assemblies with Edge and Corner Bond Adhesives (oral)

    SHI Hongbin, UEDA Toshitsugu

    2011 International Conference on Solid-State and Integrated Circuit    2011

    DOI

  • Effects of Edge and Corner Bond Adhesives on the Drop Reliability of Package-on-Package Bottom Package Assemblies (oral)

    SHI Hongbin, UEDA Toshitsugu

    2011 International Conference on Solid-State and Integrated Circuit    2011

    DOI

  • A Real Double-convex Spherical Single Lens System with Blur Restoration Feature (oral)

    Yupeng Zhang, Ikumi Ninema, Toshitsugu Ueda

    2011 International Conference on Communication and Electronics Information, Haikou, China    2011

  • Saturated Absorption Spectroscopy of Hydrocarbons Based on Photonic Bandgap Fiber (oral)

    Xuefeng Li, Jinxing Liang, Yupeng Zhang, Toshitsugu Ueda

    2011 International Conference on Communication and Electronics Information, Haikou, China    2011

  • Bonding of silicon and crystal quartz wafers at the minimized residual stresses

    Yury ZIMIN, Toshitsugu UEDA, Joanna PAW?AT

    PRZEGL?D ELEKTROTECHNICZNY    2011

  • Diesel Particulate Analysis Using SEM-EDX and Laser-induced Breakdown Spectroscopy

    S. Ikezawa, M. Wakamatsu, T. Ueda

    International Journal on Smart Sensing and Intelligent Systems   Vol. 4 ( No. 2 ) 174 - 188  2011

  • A two-dimensional anisotropic wet etching simulator for quartz crystal

    Meng Zhao, Jiani Wang, Hiroshi Oigawa, Jing Ji, Hisanori Hayashi, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   131 ( 5 ) 185 - 188  2011

     View Summary

    We developed an anisotropic wet etching simulator that can predict the etching profile of initial shape, which is two-dimensional and formed by straight lines. New etching rate database of quartz at a special condition was obtained. Improved hull method was used to deal with round corner etching. New programming flow was adopted to avoid improper profile prediction. A friendly graphical user interface was built for user's convenience. The simulation result of this simulator meets well with the experimental results and shows nice accuracy in new emerging faces predicting. © 2011 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Development of carbonaceous particle size analyzer using laser-induced incandescence technology

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury L'vovich Zimin, Joanna Pawlat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   131 ( 5 ) 171 - 177  2011

     View Summary

    This paper presents a new sensing system for carbonaceous nanoparticle measurement using a laser-induced incandescence (LII) technique. Our research group has improved the laser-induced breakdown spectroscopy (LIBS) system used for quantitative analysis. Although the basic principles of LIBS quantitative measurements are well understood, several uncertainties remain concerning complete descriptions-especially for particle size measurement. The elemental composition and density of the particles are determined using LIBS, and particle size measurements are accomplished with the help of LII. In the case of the present system, with temporally resolved LII, measurement of soot primary particle sizes is feasible in a combustion process derived from the ratio of emission signals after a laser pulse because the cooling behaviour is characteristic of the particle size. The LII temporal analysis was performed by a streak camera, which was also used for LIBS analysis. The LII technique allows in situ measurement of the average primary particle size of nanoscale soot particles. © 2011 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Deblur of radially variant blurred image for single lens system

    Yupeng Zhang, Toshitsugu Ueda

    IEEJ Transactions on Electrical and Electronic Engineering   6 ( 1 ) S7 - S16  2011

     View Summary

    This paper introduces a method to deblur a radially blurred image which is created by a single lens imaging system. Single lens imaging system does not create stronger lens aberrations around the center of an image, but stronger around the outside. One obvious phenomenon caused by this is the radially increased blurring effect along the radial line. Researchers have already studied one kind of radial blur caused by vertical motion between camera and object, but few have studied on the radial blur caused by inherent defect of a single lens system. Because of the radially variant property, a method is proposed in this paper that carries out the deconvolution using Polar coordinate system for both image and point spread functions (PSFs) converted from Cartesian coordinate system. By doing this the deblurring becomes a regular spatially invariant (SI) linear mathematical model for each circled region in the image that has same radial distance from the image center. Simulation results suggest the proposed method visually obtained the best deblurred image quality using four PSFs applied to four SI regions compared to deblurred images by other simulation conditions. However, segmenting the blurred image into more than four regions is undesirable because of the high β/n ratio. © 2010 Institute of Electrical Engineers of Japan. Published by John Wiley &amp
    Sons, Inc.

    DOI

  • Development of hydrogen gas sensors using quartz resonator

    Hiroshi Oigawa, Daisuke Yamazaki, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   131 ( 3 ) 3 - 121  2011

     View Summary

    The hydrogen gas sensor using quartz resonators is developed to measure less than 4% hydrogen concentration in air. This sensor consists of two quartz resonators. Both sides of electrodes of the sensor resonator are made by platinum thin film. And the reference resonator has Au electrodes. By using this reference resonator, the influence of the temperature and pressure will be canceled. This sensor can measure hydrogen concentration from reaction heat on the platinum catalyst. From experimental results, the frequency of sensor changed linearly in 0% to 5% hydrogen concentrations mixed with the air. The sensor showed 20ppm frequency translation per 1%, and the time constant is about 20 seconds. © 2011 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Design of a Singlet Lens and the Corresponding Aberration Correction Approaches for Cell Phone Camera

    Yupeng Zhang, Toshitsugu Ueda

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   5 ( 4 ) 474 - 485  2010.07

     View Summary

    A singlet lens model that is designed for future cell phone camera is discussed. The proposed lens model unavoidably introduces significant optical aberration because of its high field angle (maximum field angle 48). To correct the aberrations, traditional paraxial aberration and third-order Seidel aberration are no longer applicable because the accuracy will decline dramatically when the field angle reaches a high value. In this paper, the main objective is to find an improved first-order aberration equation and an improved third-order Seidel aberration equation using field-dependent coefficients to correct lateral chromatic aberration (LAT) and distortion, respectively, for a high-field-angle singlet lens. The simulation results suggest that improved higher order aberration equations are more accurate to represent real aberrations than the lower order case. However, the chromatic aberration is still visible in the resultant images even though LAT is corrected, because of the differences of blur between different colors caused by axial chromatic aberration (AX) and other monochromatic aberrations such as field curvature. This poses a new research topic as our future work. (C) 2010 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI CiNii

  • Measurement of Low Gas Concentrations Using Photonic Bandgap Fiber Cell

    Xuefeng Li, Joanna Pawlat, Jinxing Liang, Toshitsugu Ueda

    IEEE SENSORS JOURNAL   10 ( 6 ) 1156 - 1161  2010.06

     View Summary

    In this paper, we present a novel low-loss splice for use between the photonic bandgap fiber (PBGF) and the conventional solid-core fiber to make PBGFs more functional. Furthermore, the hollow-core and the holes in the cladding of PBGF act as gas pipes. Using the proposed splice, a measurement system for low gas concentrations based on the PBGF cell has been developed and implemented. Experiments for measuring ammonia (NH(3)) gas at the ppm level were performed. The basic peak agreed well with the database of the Pacific Northwest National Laboratory (PNNL), meaning that this method can be used to accurately and effectively measure gas concentration. The constructed gas cells are compact and cost-effective for sensitive, rapid, and continuous measurement of gases.

    DOI CiNii

  • Measurement of Low Gas Concentrations Using Photonic Bandgap Fiber Cell

    Xuefeng Li, Joanna Pawlat, Jinxing Liang, Toshitsugu Ueda

    IEEE SENSORS JOURNAL   10 ( 6 ) 1156 - 1161  2010.06

     View Summary

    In this paper, we present a novel low-loss splice for use between the photonic bandgap fiber (PBGF) and the conventional solid-core fiber to make PBGFs more functional. Furthermore, the hollow-core and the holes in the cladding of PBGF act as gas pipes. Using the proposed splice, a measurement system for low gas concentrations based on the PBGF cell has been developed and implemented. Experiments for measuring ammonia (NH(3)) gas at the ppm level were performed. The basic peak agreed well with the database of the Pacific Northwest National Laboratory (PNNL), meaning that this method can be used to accurately and effectively measure gas concentration. The constructed gas cells are compact and cost-effective for sensitive, rapid, and continuous measurement of gases.

    DOI CiNii

  • Measurement of Low Gas Concentrations Using Photonic Bandgap Fiber Cell

    Xuefeng Li, Joanna Pawlat, Jinxing Liang, Toshitsugu Ueda

    IEEE SENSORS JOURNAL   10 ( 6 ) 1156 - 1161  2010.06

     View Summary

    In this paper, we present a novel low-loss splice for use between the photonic bandgap fiber (PBGF) and the conventional solid-core fiber to make PBGFs more functional. Furthermore, the hollow-core and the holes in the cladding of PBGF act as gas pipes. Using the proposed splice, a measurement system for low gas concentrations based on the PBGF cell has been developed and implemented. Experiments for measuring ammonia (NH(3)) gas at the ppm level were performed. The basic peak agreed well with the database of the Pacific Northwest National Laboratory (PNNL), meaning that this method can be used to accurately and effectively measure gas concentration. The constructed gas cells are compact and cost-effective for sensitive, rapid, and continuous measurement of gases.

    DOI CiNii

  • Field-Dependent Distortion Coefficient and Backward Mapping for Distortion Correction of Singlet Lens Cameras

    Yupeng Zhang, Toshitsugu Ueda

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   5 ( 2 ) 203 - 210  2010.03

     View Summary

    This paper introduces approaches to deal with distortion created by a singlet lens camera. Due to the inherent optical defect of singlet lenses, considerable lens aberrations will appear in the resulting image, especially at high field angles. Among the well-known five monochromatic aberrations and two chromatic aberrations, distortion and blurring are the most obvious aberrations for the designed singlet lens. In this paper, we deal with two techniques for distortion correction: field-dependent distortion coefficient and backward mapping method. The former will produce more accurate correction than obtained using third-order coefficient and constant coefficients. The latter does not need additional interpolation process to fill Lip pixel vacancies and higher precision of pixel values can be obtained compared with our previous forward mapping method. Simulation results indicate the superiority of the proposed two techniques. (C) 2010 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI CiNii

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell using Micromirror (poster)

    Xuefeng Li, Jinxing Liang, Toshitsugu Ueda

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan    2010

    DOI

  • Quartz MEMS based Double-Ended Tuning Fork with Variable sections (poster)

    Jinxing Liang, Xuefeng Li, Hongsheng Li, Yunfang Ni, Kunyu Li, Libin Huang, Toshitsugu Ueda

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan    2010

  • Restoration of Radially Blurred Image Created by Spherical Single Lens System of Cell Phone Camer (poster)

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    IEEE Sensors 2010 Conference, Hawaii, USA    2010

    DOI

  • Development of Sensing System for Carbonaceous Particles Using LIBS Combined with LII Temporal Analytical Technique (oral)

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Toshitsugu Ueda

    IEEE Sensors 2010 Conference, Hawaii, USA    2010

    DOI

  • Low-Temperature Anodic Bonding of Silicon and Crystal Quartz Wafers for MEMS Application (poster)

    Zimin Yury, Toshitsugu Ueda

    IEEE Sensors 2010 Conference, Hawaii, USA    2010

    DOI

  • Anisotropic Etching Simulator for Quartz Crystal and Its Application to Design Micro-mechanical Device (oral)

    Toshitsugu Ueda

    2010 China International Symposium on Inertial Technology and Navigation, Nanjing, China    2010

  • Fabrication Process Improvement for High Sensitivity Tilt Sensor (poster)

    Lee Namho, Koichi Harima, Jiannan Liu, Masaaki Takamori, Jinxing Liang, Toshitsugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • Hydrogen Gas Sensors using Quartz Resonator (poster)

    Hiroshi Oigawa, Daisuke Yamazaki, Toshitugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • Development of a sensing system for carbonaceous particles using laser-induced incandescence technology (poster)

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Joanna Pawlat, Toshitsugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal (poster)

    Meng Zhao, Jiani Wang, Hiroshi Ohigawa, Jing Ji, Hisanori Hayashi, Toshitsugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • Process Development of Silver Conductor wiring on packages using Inkjet Printer (口頭)

    Sirikamon Sirisopanaporn, Satoshi Ikezawa, Toshitsugu Ueda

    The 63rd Joint Conference of Electrical and Electronics Engineers in Kyushu, Kyushu Sangyo University    2010

    DOI

  • Basic Research on Diesel Particulate Matter for Establishing Laser-induced Breakdown Spectroscopy Analysis Method (Presentation Award; oral)

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Joanna Pawlat, Toshitsugu Ueda

    4th International Conference on Sensing Technology (ICST 2010), Lecce, Italy    2010

  • Design of a Singlet Lens and the Corresponding Aberration Correction Approaches for Cell Phone Camera

    Yupeng Zhang, Toshitsugu Ueda

    IEEJ Transactions on electrical and electronic engineering,   5 ( 4 ) 474 - 485  2010

    DOI CiNii

  • Sensing of Carbon Dioxide and Hydrocarbons Using Photonic Bandgap Fiber

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    MECHATRONIC SYSTEMS AND MATERIALS: MATERIALS PRODUCTION TECHNOLOGIES   165   316 - +  2010

     View Summary

    The sensing setup for detection and measurement of carbon dioxide and methane was designed. Absorption spectra of many compounds indicate several weak peaks around 1400-1600 nm wavelength. Thus, tunable lasers with 20 micron core photonic bandgap fiber matching above wavelengths were chosen for the optical measurement system. Measurements were performed at low pressure to eliminate pressure broadening effect and to sharpen the absorption peaks. The angled cut was performed to improve signal to noise ratio.

    DOI

  • Field-dependent distortion coefficient and backward mapping for distortion correction of singlet lens cameras

    Yupeng Zhang, Toshitsugu Ueda

    IEEJ Transactions on Electrical and Electronic Engineering   5 ( 2 ) 203 - 210  2010

     View Summary

    This paper introduces approaches to deal with distortion created by a singlet lens camera. Due to the inherent optical defect of singlet lenses, considerable lens aberrations will appear in the resulting image, especially at high field angles. Among the wellknown five monochromatic aberrations and two chromatic aberrations, distortion and blurring are the most obvious aberrations for the designed singlet lens. In this paper, we deal with two techniques for distortion correction: field-dependent distortion coefficient and backward mapping method. The former will produce more accurate correction than obtained using third-order coefficient and constant coefficients. The latter does not need additional interpolation process to fill up pixel vacancies and higher precision of pixel values can be obtained compared with our previous forward mapping method. Simulation results indicate the superiority of the proposed two techniques. © 2010 Institute of Electrical Engineers of Japan. Published by John Wiley &amp
    Sons, Inc.

    DOI CiNii

  • Differential platinum thin film hydrogen gas sensor fabricated by MEMS techniques

    Daisuke Yamazaki, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   130 ( 3 ) 1 - 68  2010

     View Summary

    In this paper, thermo-resistive platinum (Pt) thin film sensor, which was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques, is proposed. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. Especially, this paper reports the characteristics of a new differential Pt thin film hydrogen gas sensor. The fabricated hydrogen sensor detected the concentration of hydrogen gas in the air from 2% to 10%. It was possible to achieve the correct the heat transfer with this new differential Pt thin film hydrogen gas sensor. The characteristics of sensor's output are higher than conventional ones that we developed. © 2010 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • 白金黒を応用した水晶振動子型水素センサの研究 (口頭)

    近藤正浩, 大井川寛, 植田敏嗣

    第63回 電気関係学会九州支部連合大会, 九州産業大学    2010

    DOI

  • 高感度傾斜角センサダンピング特性と音叉振動子を用いたパッケージのリークレート測定 (口頭)

    陳涛, 高森政聡, 植田敏嗣

    第63回 電気関係学会九州支部連合大会, 九州産業大学    2010

    DOI

  • 高感度傾斜角センサ作製における金属薄膜形成プロセスの改善 (口頭)

    李南浩, 播磨幸一, 梁金星, 植田敏嗣

    第63回 電気関係学会九州支部連合大会, 九州産業大学    2010

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell using Micromirror (poster)

    Xuefeng Li, Jinxing Liang, Toshitsugu Ueda

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan    2010

    DOI

  • Quartz MEMS based Double-Ended Tuning Fork with Variable sections (poster)

    Jinxing Liang, Xuefeng Li, Hongsheng Li, Yunfang Ni, Kunyu Li, Libin Huang, Toshitsugu Ueda

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan    2010

  • Restoration of Radially Blurred Image Created by Spherical Single Lens System of Cell Phone Camer (poster)

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    IEEE Sensors 2010 Conference, Hawaii, USA    2010

    DOI

  • Development of Sensing System for Carbonaceous Particles Using LIBS Combined with LII Temporal Analytical Technique (oral)

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Toshitsugu Ueda

    IEEE Sensors 2010 Conference, Hawaii, USA    2010

    DOI

  • Low-Temperature Anodic Bonding of Silicon and Crystal Quartz Wafers for MEMS Application (poster)

    Zimin Yury, Toshitsugu Ueda

    IEEE Sensors 2010 Conference, Hawaii, USA    2010

    DOI

  • Anisotropic Etching Simulator for Quartz Crystal and Its Application to Design Micro-mechanical Device (oral)

    Toshitsugu Ueda

    2010 China International Symposium on Inertial Technology and Navigation, Nanjing, China    2010

  • Fabrication Process Improvement for High Sensitivity Tilt Sensor (poster)

    Lee Namho, Koichi Harima, Jiannan Liu, Masaaki Takamori, Jinxing Liang, Toshitsugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • Hydrogen Gas Sensors using Quartz Resonator (poster)

    Hiroshi Oigawa, Daisuke Yamazaki, Toshitugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • Development of a sensing system for carbonaceous particles using laser-induced incandescence technology (poster)

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Joanna Pawlat, Toshitsugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal (poster)

    Meng Zhao, Jiani Wang, Hiroshi Ohigawa, Jing Ji, Hisanori Hayashi, Toshitsugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • Process Development of Silver Conductor wiring on packages using Inkjet Printer (口頭)

    Sirikamon Sirisopanaporn, Satoshi Ikezawa, Toshitsugu Ueda

    The 63rd Joint Conference of Electrical and Electronics Engineers in Kyushu, Kyushu Sangyo University    2010

    DOI

  • Basic Research on Diesel Particulate Matter for Establishing Laser-induced Breakdown Spectroscopy Analysis Method (Presentation Award; oral)

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Joanna Pawlat, Toshitsugu Ueda

    4th International Conference on Sensing Technology (ICST 2010), Lecce, Italy    2010

  • Design of a singlet lens and the corresponding aberration correction approaches for cell phone camera

    Yupeng Zhang, Toshitsugu Ueda

    IEEJ Transactions on Electrical and Electronic Engineering   5 ( 4 ) 474 - 485  2010

     View Summary

    A singlet lens model that is designed for future cell phone camera is discussed. The proposed lens model unavoidably introduces significant optical aberration because of its high field angle (maximum field angle 48°). To correct the aberrations, traditional paraxial aberration and third-order Seidel aberration are no longer applicable because the accuracy will decline dramatically when the field angle reaches a high value. In this paper, the main objective is to find an improved first-order aberration equation and an improved third-order Seidel aberration equation using field-dependent coefficients to correct lateral chromatic aberration (LAT) and distortion, respectively, for a high-field-angle singlet lens. The simulation results suggest that improved higher order aberration equations are more accurate to represent real aberrations than the lower order case. However, the chromatic aberration is still visible in the resultant images even though LAT is corrected, because of the differences of blur between different colors caused by axial chromatic aberration (AX) and other monochromatic aberrations such as field curvature. This poses a new research topic as our future work. © 2010 Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Sensing of Carbon Dioxide and Hydrocarbons Using Photonic Bandgap Fiber

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    MECHATRONIC SYSTEMS AND MATERIALS: MATERIALS PRODUCTION TECHNOLOGIES   165   316 - +  2010

     View Summary

    The sensing setup for detection and measurement of carbon dioxide and methane was designed. Absorption spectra of many compounds indicate several weak peaks around 1400-1600 nm wavelength. Thus, tunable lasers with 20 micron core photonic bandgap fiber matching above wavelengths were chosen for the optical measurement system. Measurements were performed at low pressure to eliminate pressure broadening effect and to sharpen the absorption peaks. The angled cut was performed to improve signal to noise ratio.

    DOI

  • Differential platinum thin film hydrogen gas sensor fabricated by MEMS techniques

    Daisuke Yamazaki, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   130 ( 3 ) 1 - 68  2010

     View Summary

    In this paper, thermo-resistive platinum (Pt) thin film sensor, which was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques, is proposed. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. Especially, this paper reports the characteristics of a new differential Pt thin film hydrogen gas sensor. The fabricated hydrogen sensor detected the concentration of hydrogen gas in the air from 2% to 10%. It was possible to achieve the correct the heat transfer with this new differential Pt thin film hydrogen gas sensor. The characteristics of sensor's output are higher than conventional ones that we developed. © 2010 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Doubled Optical Path Length for Photonic Bandgap Fiber Gas Cell using Micromirror (poster)

    Xuefeng Li, Jinxing Liang, Toshitsugu Ueda

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan    2010

    DOI

  • Quartz MEMS based Double-Ended Tuning Fork with Variable sections (poster)

    Jinxing Liang, Xuefeng Li, Hongsheng Li, Yunfang Ni, Kunyu Li, Libin Huang, Toshitsugu Ueda

    23st International Microprocesses and Nanotechnology Conference, Kitakyushu, Japan    2010

  • Restoration of Radially Blurred Image Created by Spherical Single Lens System of Cell Phone Camer (poster)

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    IEEE Sensors 2010 Conference, Hawaii, USA    2010

    DOI

  • Development of Sensing System for Carbonaceous Particles Using LIBS Combined with LII Temporal Analytical Technique (oral)

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Toshitsugu Ueda

    IEEE Sensors 2010 Conference, Hawaii, USA    2010

    DOI

  • Low-Temperature Anodic Bonding of Silicon and Crystal Quartz Wafers for MEMS Application (poster)

    Zimin Yury, Toshitsugu Ueda

    IEEE Sensors 2010 Conference, Hawaii, USA    2010

    DOI

  • Anisotropic Etching Simulator for Quartz Crystal and Its Application to Design Micro-mechanical Device (oral)

    Toshitsugu Ueda

    2010 China International Symposium on Inertial Technology and Navigation, Nanjing, China    2010

  • Fabrication Process Improvement for High Sensitivity Tilt Sensor (poster)

    Lee Namho, Koichi Harima, Jiannan Liu, Masaaki Takamori, Jinxing Liang, Toshitsugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • Hydrogen Gas Sensors using Quartz Resonator (poster)

    Hiroshi Oigawa, Daisuke Yamazaki, Toshitugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • Development of a sensing system for carbonaceous particles using laser-induced incandescence technology (poster)

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Joanna Pawlat, Toshitsugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal (poster)

    Meng Zhao, Jiani Wang, Hiroshi Ohigawa, Jing Ji, Hisanori Hayashi, Toshitsugu Ueda

    27th Sensor Symposium on Sensors, Micromachines and Applied System, Matsue, Shimane, Japan    2010

  • Process Development of Silver Conductor wiring on packages using Inkjet Printer (口頭)

    Sirikamon Sirisopanaporn, Satoshi Ikezawa, Toshitsugu Ueda

    The 63rd Joint Conference of Electrical and Electronics Engineers in Kyushu, Kyushu Sangyo University    2010

    DOI

  • Basic Research on Diesel Particulate Matter for Establishing Laser-induced Breakdown Spectroscopy Analysis Method (Presentation Award; oral)

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Joanna Pawlat, Toshitsugu Ueda

    4th International Conference on Sensing Technology (ICST 2010), Lecce, Italy    2010

  • Sensing of Carbon Dioxide and Hydrocarbons Using Photonic Bandgap Fiber

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    MECHATRONIC SYSTEMS AND MATERIALS: MATERIALS PRODUCTION TECHNOLOGIES   165   316 - +  2010

     View Summary

    The sensing setup for detection and measurement of carbon dioxide and methane was designed. Absorption spectra of many compounds indicate several weak peaks around 1400-1600 nm wavelength. Thus, tunable lasers with 20 micron core photonic bandgap fiber matching above wavelengths were chosen for the optical measurement system. Measurements were performed at low pressure to eliminate pressure broadening effect and to sharpen the absorption peaks. The angled cut was performed to improve signal to noise ratio.

    DOI

  • Field-Dependent Distortion Coefficient and Backward Mapping for Distortion Correction of Singlet Lens Cameras

    Yupeng Zhang, Toshitsugu Ued

    IEEJ Transactions on electrical and electronic engineering, published by John Wiley and Sons, Inc,,, pp203-210   5 ( 2 ) 203 - 210  2010

    DOI CiNii

  • Differential Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    Daisuke Yamazaki, Toshitsugu Ued

    IEEJ Transactions on Sensors and Micromachines   130 ( 3 ) 65 - 68  2010

    DOI CiNii

  • Fabrication of Photonic Bandgap Fiber Gas Cell Using Focused Ion Beam Cutting

    Xuefeng Li, Joanna Pawlat, Jinxing Liang, Guan Xu, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 6 ) 06FK05  2009.06

     View Summary

    In this paper, we present a novel low-loss splice for use between the photonic bandgap fiber (PBGF) and the conventional step index fiber to make PBGFs more functional. The gap between the butt-coupled fibers is the most important parameter for maintaining good output coupling efficiency and allowing gas diffusion. To achieve the small gap, a focused ion beam (FIB) milling technique was developed to clean the fiber surface. The gap is adjustable from 0 to 400 mu m, and the typical connection loss at a gap of 20 mu m is 1.6 dB. A measurement system for low gas concentrations based on the PBGF cell has been developed and implemented. Experiments for measuring ammonia gas at the ppm level were performed. The basic peak agreed well with the database of the Pacific Northwest National Laboratory (PNNL), meaning that this method can be used to accurately and effectively measure gas concentration. (c) 2009 The Japan Society of Applied Physics

    DOI

  • Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Ken Kunitomo, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 6 ) 06FK10  2009.06

     View Summary

    In this paper, we report the research progress of a recently developed quartz micro-electro-mechanical system (MEMS)-based capacitive tilt sensor using bulk micromachining technology. The sensor, which is composed of a sensitive cantilever, proof mass and high-aspect-ratio vertical comb electrodes in wafer thickness, was fabricated using an anistropic wet etching process on a 100-mu m-thic z-cut quartz wafer. A ceramic package was designed for mounting the sensor and integrating the capacitance to a digital AD7746 circuit (Analog Devices). The sensor was mounted on the package using a flip chip method via a AuSn alloy solder. The dimensions of the integrated sensing system are 12 x 12 x 3.2 mm(3) and the weight of the system is below 1 g. The measured typical sensor sensitivity is 632 fF/degrees when the applied voltage is 0.625 V. The peak-to-peak output signal drift is limited to 1 fF in 2 h. Good linearity was achieved in the range of +/- 1 degrees High-precision detection at 0.001 degrees, which corresponds to micro-g acceleration, was also demonstrated. (c) 2009 The Japan Society of Applied Physics

    DOI

  • Fabrication of Photonic Bandgap Fiber Gas Cell Using Focused Ion Beam Cutting

    Xuefeng Li, Joanna Pawlat, Jinxing Liang, Guan Xu, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 6 ) 06FK05  2009.06

     View Summary

    In this paper, we present a novel low-loss splice for use between the photonic bandgap fiber (PBGF) and the conventional step index fiber to make PBGFs more functional. The gap between the butt-coupled fibers is the most important parameter for maintaining good output coupling efficiency and allowing gas diffusion. To achieve the small gap, a focused ion beam (FIB) milling technique was developed to clean the fiber surface. The gap is adjustable from 0 to 400 mu m, and the typical connection loss at a gap of 20 mu m is 1.6 dB. A measurement system for low gas concentrations based on the PBGF cell has been developed and implemented. Experiments for measuring ammonia gas at the ppm level were performed. The basic peak agreed well with the database of the Pacific Northwest National Laboratory (PNNL), meaning that this method can be used to accurately and effectively measure gas concentration. (c) 2009 The Japan Society of Applied Physics

    DOI

  • Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Ken Kunitomo, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 6 ) 06FK10  2009.06

     View Summary

    In this paper, we report the research progress of a recently developed quartz micro-electro-mechanical system (MEMS)-based capacitive tilt sensor using bulk micromachining technology. The sensor, which is composed of a sensitive cantilever, proof mass and high-aspect-ratio vertical comb electrodes in wafer thickness, was fabricated using an anistropic wet etching process on a 100-mu m-thic z-cut quartz wafer. A ceramic package was designed for mounting the sensor and integrating the capacitance to a digital AD7746 circuit (Analog Devices). The sensor was mounted on the package using a flip chip method via a AuSn alloy solder. The dimensions of the integrated sensing system are 12 x 12 x 3.2 mm(3) and the weight of the system is below 1 g. The measured typical sensor sensitivity is 632 fF/degrees when the applied voltage is 0.625 V. The peak-to-peak output signal drift is limited to 1 fF in 2 h. Good linearity was achieved in the range of +/- 1 degrees High-precision detection at 0.001 degrees, which corresponds to micro-g acceleration, was also demonstrated. (c) 2009 The Japan Society of Applied Physics

    DOI

  • Fabrication of Photonic Bandgap Fiber Gas Cell Using Focused Ion Beam Cutting

    Xuefeng Li, Joanna Pawlat, Jinxing Liang, Guan Xu, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 6 ) 06FK05  2009.06

     View Summary

    In this paper, we present a novel low-loss splice for use between the photonic bandgap fiber (PBGF) and the conventional step index fiber to make PBGFs more functional. The gap between the butt-coupled fibers is the most important parameter for maintaining good output coupling efficiency and allowing gas diffusion. To achieve the small gap, a focused ion beam (FIB) milling technique was developed to clean the fiber surface. The gap is adjustable from 0 to 400 mu m, and the typical connection loss at a gap of 20 mu m is 1.6 dB. A measurement system for low gas concentrations based on the PBGF cell has been developed and implemented. Experiments for measuring ammonia gas at the ppm level were performed. The basic peak agreed well with the database of the Pacific Northwest National Laboratory (PNNL), meaning that this method can be used to accurately and effectively measure gas concentration. (c) 2009 The Japan Society of Applied Physics

    DOI

  • Development of Highly Integrated Quartz Micro-Electro-Mechanical System Tilt Sensor

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Ken Kunitomo, Toshitsugu Ueda

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 6 ) 06FK10  2009.06

     View Summary

    In this paper, we report the research progress of a recently developed quartz micro-electro-mechanical system (MEMS)-based capacitive tilt sensor using bulk micromachining technology. The sensor, which is composed of a sensitive cantilever, proof mass and high-aspect-ratio vertical comb electrodes in wafer thickness, was fabricated using an anistropic wet etching process on a 100-mu m-thic z-cut quartz wafer. A ceramic package was designed for mounting the sensor and integrating the capacitance to a digital AD7746 circuit (Analog Devices). The sensor was mounted on the package using a flip chip method via a AuSn alloy solder. The dimensions of the integrated sensing system are 12 x 12 x 3.2 mm(3) and the weight of the system is below 1 g. The measured typical sensor sensitivity is 632 fF/degrees when the applied voltage is 0.625 V. The peak-to-peak output signal drift is limited to 1 fF in 2 h. Good linearity was achieved in the range of +/- 1 degrees High-precision detection at 0.001 degrees, which corresponds to micro-g acceleration, was also demonstrated. (c) 2009 The Japan Society of Applied Physics

    DOI

  • Improved MEMS structure for stress-free flip-chip packaging

    Jinxing Liang, Toshitsugu Ueda

    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS   8 ( 2 ) 021118  2009.04

     View Summary

    We present a new method for stress-free microelectromechanical systems (MEMS) flip-chip packaging. Residual stress, which is mainly generated during the reflow process, is a notorious problem in flip-chip packaging. The residual stress reduces the bump fatigue life and device performance owing to the deformation. Underfill encapsulation is a common way to reduce the residual stress in a flip-chip integrated circuit (IC) packaging process. However, it cannot be applied to MEMS packaging because MEMS devices usually include moving microstructures. We intend to resolve this problem by improving the MEMS structure, designing spring beams to introduce electrical pads. The residual stress, which is caused by the mismatch of the coefficient of thermal expansion (CTE) between the MEMS device and the package substrate, can be absorbed through the deflection of spring beams. By using this idea, a quartz MEMS-based capacitive tilt sensor, which was bulk etched and composed of vertical comb electrodes in wafer thickness for achieving large initial capacitance, was successfully packaged. A high melting point alloy Au80Sn20 was used as the solder joint material. The thermal cycling test and sensitivity evaluation experimental results demonstrated the effectiveness of the proposed method. (C) 2009 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3134087]

    DOI

  • Improved MEMS structure for stress-free flip-chip packaging

    Jinxing Liang, Toshitsugu Ueda

    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS   8 ( 2 ) 021118  2009.04

     View Summary

    We present a new method for stress-free microelectromechanical systems (MEMS) flip-chip packaging. Residual stress, which is mainly generated during the reflow process, is a notorious problem in flip-chip packaging. The residual stress reduces the bump fatigue life and device performance owing to the deformation. Underfill encapsulation is a common way to reduce the residual stress in a flip-chip integrated circuit (IC) packaging process. However, it cannot be applied to MEMS packaging because MEMS devices usually include moving microstructures. We intend to resolve this problem by improving the MEMS structure, designing spring beams to introduce electrical pads. The residual stress, which is caused by the mismatch of the coefficient of thermal expansion (CTE) between the MEMS device and the package substrate, can be absorbed through the deflection of spring beams. By using this idea, a quartz MEMS-based capacitive tilt sensor, which was bulk etched and composed of vertical comb electrodes in wafer thickness for achieving large initial capacitance, was successfully packaged. A high melting point alloy Au80Sn20 was used as the solder joint material. The thermal cycling test and sensitivity evaluation experimental results demonstrated the effectiveness of the proposed method. (C) 2009 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3134087]

    DOI

  • Hydrogen gas sensor using quartz resonator

    Daisuke Yamazaki, Yoshinori Kakimoto, Toshitsugu Ueda

    The 8th IEEE Conference on Sensors, Proceedings, (B4P-005)pp., Christchurch, NewZealand, October 25-28, 2009     25 - 28  2009

  • Sensing of carbon dioxide and hydrocarbons using photonic bandgap fiber

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    The 5th International Conference Mechatronic Systems and Materials (MSM 2009) 22-25 October 2009, Vilnius, Lithuania     22 - 25  2009

  • Sensing of Ammonia and Hydrocarbons Using Photonic Bandgap Fiber Cell

    Joanna Pawlat, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan     5 - 8  2009

  • Development of the Miniaturized Eddy Current Displacement Sensor Using MEMS Coil

    Yungfeng Tsou, Toshitsugu Ueda, Tooru Tsuno

    Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan     4 - 14  2009

  • Sensor for measurement of hydrocarbons concentration based on optic fiber

    Joanna Pawlat, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    Proceedings of SPIE - The International Society for Optical Engineering   7389  2009

     View Summary

    Measuring system based on Photonic Bandgap Fiber (PBGF), which will be able to detect, distinguish and measure the concentration of various aliphatic hydrocarbons is proposed. Such a system can be applied on each stage of fuel evaluation, production, distribution and storage of petroleum products. Aliphatic hydrocarbons absorption spectra show several peaks around 1400-1600 nm wavelength. Thus, tunable lasers with 20 micron core photonic bandgap fiber matching above wavelengths were chosen for the optical measurement system. Measurements were performed at a low pressure to eliminate pressure broadening effect and to sharpen the absorption peaks. The sensitivity of measurement increases with increasing of the fiber's length. Length of fiber was adjusted using several methods. The best results were obtained using argon ion beam cutting. The angled cut was performed to improve signal to noise ratio. © 2009 SPIE.

    DOI

  • Characterization of a quartz MEMS tilt sensor with 0.001° precision

    Jinxing Liang, Fusao Kohsaka, Xuefeng Li, Ken Kunitomo, Toshitsugu Ueda

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems     308 - 310  2009

     View Summary

    This paper presents the performance of recently developed MEMS capacitive tilt sensor. The capacitive sensor, which can be considered as a static accelerometer, is fabricated using bulk micromachining technique on a 100-μm-thick z-cut quartz wafer. High-sensitivity and low-noise are achieved with stable output performance in the range of ±1°. The performance evaluation was performed at the 0.625 V excitation voltage and 9.1 Hz data update rate. The typical sensitivity with good linearity is 403.5 fF/°, which corresponds to 23.1 pF/g and the typical RMS noise is 74 aF, which corresponds to 25 aF/√Hz (0.9 μg/√Hz) noise floor. High-precision measurement of 0.001° has been demonstrated. ©2009 IEEE.

    DOI

  • Control of a Micro-Droplet for Laser-induced Breakdown Spectroscopy Solution Measurement

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    Solid State Phenomena   Vols. 147-149   639 - 644  2009

    DOI

  • High-precision gas sensor based on photonic bandgap fiber cell

    Joanna Pawłat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    Solid State Phenomena   147-149   131 - 136  2009

     View Summary

    As one of applications for Microstructured Optical Fiber, a new device for measurement of low gas concentration was designed. In the developed system the Photonic Bandgap Fiber (PBGF) was used as a gas cell. Proposed technique allowed reducing gas sample volume to 0.01 cc. The gas flow inside core of fiber was simulated and result was confirmed experimentally. During the experimental work several types of fibers of various parameters were specially designed, produced and used. Core diameters ranged from 10.9 μm to 700 μm. Various cutting techniques for fibers such as using the fiber cleaver, Focused Ion Beam and Cross Section Polisher were investigated. © (2009) Trans Tech Publications.

    DOI

  • PBG fiber low concentration gas sensor

    Joanna Pawłat, Xuefeng Li, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    Solid State Phenomena   144   163 - 168  2009

     View Summary

    The photonic bandgap fiber for a high-sensitivity, compact set-up, which enables the precise measurement of low concentration of gas was designed. Fiber was used instead the traditional glass gas cell during the spectroscopic measurements. Ar ion beam was proposed among the other methods to process the inlet and outlet surface of fiber and adjust it to the required parameters. The gas flow inside PBF fiber and its optical properties were investigated. © (2009) Trans Tech Publications.

    DOI

  • Gas sensor based on microstructured optic fiber

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    PRZEGLAD ELEKTROTECHNICZNY   85 ( 5 ) 115 - 117  2009

     View Summary

    Microstructured optical fiber was used as a gas cell in spectroscopic measurements of a low concentration of gas.. Proposed technique allowed reducing gas sample volume to 0.01 cc. The gas flow inside core of fiber was simulated and result was confirmed experimentally. During the experimental work several types of fibers of various parameters were specially designed, produced and used. Core diameters ranged from 10.9 mu m to 700 mu m. Various cutting techniques for fibers such as using the fiber cleaver, Focused Ion Beam and Cross Section Polisher were investigated.

  • フォトニックバンドギャップファイバーを用いた微量気体のレーザー分光",

    杉山 直, 植田 敏嗣, Joanna Pawlat

    IEEJ Transactions on Sensors and Micromachines,   129 ( 6 ) 189 - 193  2009

    DOI CiNii

  • Sensing system for multiple measurements of trace elements using laser-induced breakdown spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawłat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   129 ( 4 ) 115 - 119  2009

     View Summary

    The setup, micro-droplet sampling system combined with a gas-flow system for measurement using laser-induced breakdown spectroscopy (LIBS) is introduced. This setup was designed for high sensitive quantitative analysis using ink-jet technology and gas-flow assistance. The setup presented here allowed precise detection of a uniform volume of 30-μm micro-droplet location for guiding it into a 53.2-μm beam spot area, under the effects of any ambient gas. In this paper, experimental results with the use of two kind of ambient gasses
    air and argon gas, were compared in order to find proper time-delay values for time-resolving spectroscopy. From time-gated spectroscopy analysis of these experiments, different relaxation time spectral data were obtained. This result indicates that in the case of using argon ambient for assistance, broader range of time-gate setting is required as compared with the case of using air ambient. Sensitive LIBS measurement for trace elements was shown by using the proper gate-setting value. © 2009 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Solid State Phenomena    2009

    DOI

  • PBG fiber low concentration gas sensor

    Joanna Pawłat, Xuefeng Li, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    Solid State Phenomena   144   163 - 168  2009

     View Summary

    The photonic bandgap fiber for a high-sensitivity, compact set-up, which enables the precise measurement of low concentration of gas was designed. Fiber was used instead the traditional glass gas cell during the spectroscopic measurements. Ar ion beam was proposed among the other methods to process the inlet and outlet surface of fiber and adjust it to the required parameters. The gas flow inside PBF fiber and its optical properties were investigated. © (2009) Trans Tech Publications.

    DOI

  • Hydrogen gas sensor using quartz resonator

    Daisuke Yamazaki, Yoshinori Kakimoto, Toshitsugu Ueda

    The 8th IEEE Conference on Sensors, Proceedings, (B4P-005)pp., Christchurch, NewZealand, October 25-28, 2009     25 - 28  2009

  • Sensing of carbon dioxide and hydrocarbons using photonic bandgap fiber

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    The 5th International Conference Mechatronic Systems and Materials (MSM 2009) 22-25 October 2009, Vilnius, Lithuania     22 - 25  2009

  • Sensing of Ammonia and Hydrocarbons Using Photonic Bandgap Fiber Cell

    Joanna Pawlat, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan     5 - 8  2009

  • Development of the Miniaturized Eddy Current Displacement Sensor Using MEMS Coil

    Yungfeng Tsou, Toshitsugu Ueda, Tooru Tsuno

    Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan     4 - 14  2009

  • Sensor for measurement of hydrocarbons concentration based on optic fiber

    Joanna Pawlat, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    Proceedings of SPIE - The International Society for Optical Engineering   7389  2009

     View Summary

    Measuring system based on Photonic Bandgap Fiber (PBGF), which will be able to detect, distinguish and measure the concentration of various aliphatic hydrocarbons is proposed. Such a system can be applied on each stage of fuel evaluation, production, distribution and storage of petroleum products. Aliphatic hydrocarbons absorption spectra show several peaks around 1400-1600 nm wavelength. Thus, tunable lasers with 20 micron core photonic bandgap fiber matching above wavelengths were chosen for the optical measurement system. Measurements were performed at a low pressure to eliminate pressure broadening effect and to sharpen the absorption peaks. The sensitivity of measurement increases with increasing of the fiber's length. Length of fiber was adjusted using several methods. The best results were obtained using argon ion beam cutting. The angled cut was performed to improve signal to noise ratio. © 2009 SPIE.

    DOI

  • Characterization of a quartz MEMS tilt sensor with 0.001° precision

    Jinxing Liang, Fusao Kohsaka, Xuefeng Li, Ken Kunitomo, Toshitsugu Ueda

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems     308 - 310  2009

     View Summary

    This paper presents the performance of recently developed MEMS capacitive tilt sensor. The capacitive sensor, which can be considered as a static accelerometer, is fabricated using bulk micromachining technique on a 100-μm-thick z-cut quartz wafer. High-sensitivity and low-noise are achieved with stable output performance in the range of ±1°. The performance evaluation was performed at the 0.625 V excitation voltage and 9.1 Hz data update rate. The typical sensitivity with good linearity is 403.5 fF/°, which corresponds to 23.1 pF/g and the typical RMS noise is 74 aF, which corresponds to 25 aF/√Hz (0.9 μg/√Hz) noise floor. High-precision measurement of 0.001° has been demonstrated. ©2009 IEEE.

    DOI

  • Control of a micro-droplet for laser-induced breakdown spectroscopy solution measurement

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawłat, Toshitsugu Ueda

    Solid State Phenomena   147-149   639 - 644  2009

     View Summary

    In this paper, laser-induced breakdown spectroscopy (LIBS) using micro-droplet NaCl solution and set-up for control of micro-droplets are described. Micro-droplets controlling technique is important for solution quantitative analysis. In this study, micro-droplet ejection system for sampling is designed and presented. This micro-droplet ejection system enable a constant volume of the sample liquid to be obtained and it takes advantage of the liquid physical state
    the density of the solution can be controlled accurately. The method presented here generates small droplets (diameter 30 μm) by confining the entire volume of the sample material in the laser beam spot area (minimum beam spot diameter: 53.2 μm) and separating it from its surroundings. Using this liquid micronizing method, improved sensitivities are obtained. The Advantage of LIBS is a useful method for determining the elemental composition of various materials regardless of their physical state (solid, liquid, or gas) and without any preprocessing
    it is a type of atomic emission spectroscopy (AES). Despite the advantage of qualitative analysis, quantitative analysis is difficult because of sample and plasma fluctuations. Generating constant volume of micro-size sample and proper sample control technique contribute to LIBS quantitative analysis. © (2009) Trans Tech Publications.

    DOI

  • High-precision gas sensor based on photonic bandgap fiber cell

    Joanna Pawłat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    Solid State Phenomena   147-149   131 - 136  2009

     View Summary

    As one of applications for Microstructured Optical Fiber, a new device for measurement of low gas concentration was designed. In the developed system the Photonic Bandgap Fiber (PBGF) was used as a gas cell. Proposed technique allowed reducing gas sample volume to 0.01 cc. The gas flow inside core of fiber was simulated and result was confirmed experimentally. During the experimental work several types of fibers of various parameters were specially designed, produced and used. Core diameters ranged from 10.9 μm to 700 μm. Various cutting techniques for fibers such as using the fiber cleaver, Focused Ion Beam and Cross Section Polisher were investigated. © (2009) Trans Tech Publications.

    DOI

  • PBG fiber low concentration gas sensor

    Joanna Pawłat, Xuefeng Li, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    Solid State Phenomena   144   163 - 168  2009

     View Summary

    The photonic bandgap fiber for a high-sensitivity, compact set-up, which enables the precise measurement of low concentration of gas was designed. Fiber was used instead the traditional glass gas cell during the spectroscopic measurements. Ar ion beam was proposed among the other methods to process the inlet and outlet surface of fiber and adjust it to the required parameters. The gas flow inside PBF fiber and its optical properties were investigated. © (2009) Trans Tech Publications.

    DOI

  • Gas sensor based on microstructured optic fiber

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    PRZEGLAD ELEKTROTECHNICZNY   85 ( 5 ) 115 - 117  2009

     View Summary

    Microstructured optical fiber was used as a gas cell in spectroscopic measurements of a low concentration of gas.. Proposed technique allowed reducing gas sample volume to 0.01 cc. The gas flow inside core of fiber was simulated and result was confirmed experimentally. During the experimental work several types of fibers of various parameters were specially designed, produced and used. Core diameters ranged from 10.9 mu m to 700 mu m. Various cutting techniques for fibers such as using the fiber cleaver, Focused Ion Beam and Cross Section Polisher were investigated.

  • フォトニックバンドギャップファイバーを用いた微量気体のレーザー分光",

    杉山 直, 植田 敏嗣, Joanna Pawlat

    IEEJ Transactions on Sensors and Micromachines,   129 ( 6 ) 189 - 193  2009

    DOI CiNii

  • Improved MEMS structure for stress-free flip-chip packaging

    Jinxing Liang, Toshitsugu Ueda

    J. Micro/Nanolith. MEMS MOEMS   Vol. 8   021118  2009

    DOI

  • Sensing system for multiple measurements of trace elements using laser-induced breakdown spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawłat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   129 ( 4 ) 115 - 119  2009

     View Summary

    The setup, micro-droplet sampling system combined with a gas-flow system for measurement using laser-induced breakdown spectroscopy (LIBS) is introduced. This setup was designed for high sensitive quantitative analysis using ink-jet technology and gas-flow assistance. The setup presented here allowed precise detection of a uniform volume of 30-μm micro-droplet location for guiding it into a 53.2-μm beam spot area, under the effects of any ambient gas. In this paper, experimental results with the use of two kind of ambient gasses
    air and argon gas, were compared in order to find proper time-delay values for time-resolving spectroscopy. From time-gated spectroscopy analysis of these experiments, different relaxation time spectral data were obtained. This result indicates that in the case of using argon ambient for assistance, broader range of time-gate setting is required as compared with the case of using air ambient. Sensitive LIBS measurement for trace elements was shown by using the proper gate-setting value. © 2009 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    Solid State Phenomena    2009

    DOI

  • PBG fiber low concentration gas sensor

    Joanna Pawłat, Xuefeng Li, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    Solid State Phenomena   144   163 - 168  2009

     View Summary

    The photonic bandgap fiber for a high-sensitivity, compact set-up, which enables the precise measurement of low concentration of gas was designed. Fiber was used instead the traditional glass gas cell during the spectroscopic measurements. Ar ion beam was proposed among the other methods to process the inlet and outlet surface of fiber and adjust it to the required parameters. The gas flow inside PBF fiber and its optical properties were investigated. © (2009) Trans Tech Publications.

    DOI

  • Hydrogen gas sensor using quartz resonator

    Daisuke Yamazaki, Yoshinori Kakimoto, Toshitsugu Ueda

    The 8th IEEE Conference on Sensors, Proceedings, (B4P-005)pp., Christchurch, NewZealand, October 25-28, 2009     25 - 28  2009

  • Sensing of carbon dioxide and hydrocarbons using photonic bandgap fiber

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    The 5th International Conference Mechatronic Systems and Materials (MSM 2009) 22-25 October 2009, Vilnius, Lithuania     22 - 25  2009

  • Sensing of Ammonia and Hydrocarbons Using Photonic Bandgap Fiber Cell

    Joanna Pawlat, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan     5 - 8  2009

  • Development of the Miniaturized Eddy Current Displacement Sensor Using MEMS Coil

    Yungfeng Tsou, Toshitsugu Ueda, Tooru Tsuno

    Proceedings of the 26th Sensor Symposium on Sensors, Micromachines and Applied System, October 15-16, 2009, Tokyo, Japan     4 - 14  2009

  • Sensor for measurement of hydrocarbons concentration based on optic fiber

    Joanna Pawlat, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    Proceedings of SPIE - The International Society for Optical Engineering   7389  2009

     View Summary

    Measuring system based on Photonic Bandgap Fiber (PBGF), which will be able to detect, distinguish and measure the concentration of various aliphatic hydrocarbons is proposed. Such a system can be applied on each stage of fuel evaluation, production, distribution and storage of petroleum products. Aliphatic hydrocarbons absorption spectra show several peaks around 1400-1600 nm wavelength. Thus, tunable lasers with 20 micron core photonic bandgap fiber matching above wavelengths were chosen for the optical measurement system. Measurements were performed at a low pressure to eliminate pressure broadening effect and to sharpen the absorption peaks. The sensitivity of measurement increases with increasing of the fiber's length. Length of fiber was adjusted using several methods. The best results were obtained using argon ion beam cutting. The angled cut was performed to improve signal to noise ratio. © 2009 SPIE.

    DOI

  • Characterization of a quartz MEMS tilt sensor with 0.001° precision

    Jinxing Liang, Fusao Kohsaka, Xuefeng Li, Ken Kunitomo, Toshitsugu Ueda

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems     308 - 310  2009

     View Summary

    This paper presents the performance of recently developed MEMS capacitive tilt sensor. The capacitive sensor, which can be considered as a static accelerometer, is fabricated using bulk micromachining technique on a 100-μm-thick z-cut quartz wafer. High-sensitivity and low-noise are achieved with stable output performance in the range of ±1°. The performance evaluation was performed at the 0.625 V excitation voltage and 9.1 Hz data update rate. The typical sensitivity with good linearity is 403.5 fF/°, which corresponds to 23.1 pF/g and the typical RMS noise is 74 aF, which corresponds to 25 aF/√Hz (0.9 μg/√Hz) noise floor. High-precision measurement of 0.001° has been demonstrated. ©2009 IEEE.

    DOI

  • Control of a micro-droplet for laser-induced breakdown spectroscopy solution measurement

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawłat, Toshitsugu Ueda

    Solid State Phenomena   147-149   639 - 644  2009

     View Summary

    In this paper, laser-induced breakdown spectroscopy (LIBS) using micro-droplet NaCl solution and set-up for control of micro-droplets are described. Micro-droplets controlling technique is important for solution quantitative analysis. In this study, micro-droplet ejection system for sampling is designed and presented. This micro-droplet ejection system enable a constant volume of the sample liquid to be obtained and it takes advantage of the liquid physical state
    the density of the solution can be controlled accurately. The method presented here generates small droplets (diameter 30 μm) by confining the entire volume of the sample material in the laser beam spot area (minimum beam spot diameter: 53.2 μm) and separating it from its surroundings. Using this liquid micronizing method, improved sensitivities are obtained. The Advantage of LIBS is a useful method for determining the elemental composition of various materials regardless of their physical state (solid, liquid, or gas) and without any preprocessing
    it is a type of atomic emission spectroscopy (AES). Despite the advantage of qualitative analysis, quantitative analysis is difficult because of sample and plasma fluctuations. Generating constant volume of micro-size sample and proper sample control technique contribute to LIBS quantitative analysis. © (2009) Trans Tech Publications.

    DOI

  • High-precision gas sensor based on photonic bandgap fiber cell

    Joanna Pawłat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    Solid State Phenomena   147-149   131 - 136  2009

     View Summary

    As one of applications for Microstructured Optical Fiber, a new device for measurement of low gas concentration was designed. In the developed system the Photonic Bandgap Fiber (PBGF) was used as a gas cell. Proposed technique allowed reducing gas sample volume to 0.01 cc. The gas flow inside core of fiber was simulated and result was confirmed experimentally. During the experimental work several types of fibers of various parameters were specially designed, produced and used. Core diameters ranged from 10.9 μm to 700 μm. Various cutting techniques for fibers such as using the fiber cleaver, Focused Ion Beam and Cross Section Polisher were investigated. © (2009) Trans Tech Publications.

    DOI

  • PBG fiber low concentration gas sensor

    Joanna Pawłat, Xuefeng Li, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    Solid State Phenomena   144   163 - 168  2009

     View Summary

    The photonic bandgap fiber for a high-sensitivity, compact set-up, which enables the precise measurement of low concentration of gas was designed. Fiber was used instead the traditional glass gas cell during the spectroscopic measurements. Ar ion beam was proposed among the other methods to process the inlet and outlet surface of fiber and adjust it to the required parameters. The gas flow inside PBF fiber and its optical properties were investigated. © (2009) Trans Tech Publications.

    DOI

  • Gas sensor based on microstructured optic fiber

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    PRZEGLAD ELEKTROTECHNICZNY   85 ( 5 ) 115 - 117  2009

     View Summary

    Microstructured optical fiber was used as a gas cell in spectroscopic measurements of a low concentration of gas.. Proposed technique allowed reducing gas sample volume to 0.01 cc. The gas flow inside core of fiber was simulated and result was confirmed experimentally. During the experimental work several types of fibers of various parameters were specially designed, produced and used. Core diameters ranged from 10.9 mu m to 700 mu m. Various cutting techniques for fibers such as using the fiber cleaver, Focused Ion Beam and Cross Section Polisher were investigated.

  • フォトニックバンドギャップファイバーを用いた微量気体のレーザー分光",

    杉山 直, 植田 敏嗣, Joanna Pawlat

    IEEJ Transactions on Sensors and Micromachines,   129 ( 6 ) 189 - 193  2009

    DOI CiNii

  • Sensing system for multiple measurements of trace elements using laser-induced breakdown spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawłat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   129 ( 4 ) 115 - 119  2009

     View Summary

    The setup, micro-droplet sampling system combined with a gas-flow system for measurement using laser-induced breakdown spectroscopy (LIBS) is introduced. This setup was designed for high sensitive quantitative analysis using ink-jet technology and gas-flow assistance. The setup presented here allowed precise detection of a uniform volume of 30-μm micro-droplet location for guiding it into a 53.2-μm beam spot area, under the effects of any ambient gas. In this paper, experimental results with the use of two kind of ambient gasses
    air and argon gas, were compared in order to find proper time-delay values for time-resolving spectroscopy. From time-gated spectroscopy analysis of these experiments, different relaxation time spectral data were obtained. This result indicates that in the case of using argon ambient for assistance, broader range of time-gate setting is required as compared with the case of using air ambient. Sensitive LIBS measurement for trace elements was shown by using the proper gate-setting value. © 2009 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Control of a micro-droplet for laser-induced breakdown spectroscopy solution measurement

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawłat, Toshitsugu Ueda

    Solid State Phenomena   147-149   639 - 644  2009

     View Summary

    In this paper, laser-induced breakdown spectroscopy (LIBS) using micro-droplet NaCl solution and set-up for control of micro-droplets are described. Micro-droplets controlling technique is important for solution quantitative analysis. In this study, micro-droplet ejection system for sampling is designed and presented. This micro-droplet ejection system enable a constant volume of the sample liquid to be obtained and it takes advantage of the liquid physical state
    the density of the solution can be controlled accurately. The method presented here generates small droplets (diameter 30 μm) by confining the entire volume of the sample material in the laser beam spot area (minimum beam spot diameter: 53.2 μm) and separating it from its surroundings. Using this liquid micronizing method, improved sensitivities are obtained. The Advantage of LIBS is a useful method for determining the elemental composition of various materials regardless of their physical state (solid, liquid, or gas) and without any preprocessing
    it is a type of atomic emission spectroscopy (AES). Despite the advantage of qualitative analysis, quantitative analysis is difficult because of sample and plasma fluctuations. Generating constant volume of micro-size sample and proper sample control technique contribute to LIBS quantitative analysis. © (2009) Trans Tech Publications.

    DOI

  • PBG fiber low concentration gas sensor

    Joanna Pawłat, Xuefeng Li, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    Solid State Phenomena   144   163 - 168  2009

     View Summary

    The photonic bandgap fiber for a high-sensitivity, compact set-up, which enables the precise measurement of low concentration of gas was designed. Fiber was used instead the traditional glass gas cell during the spectroscopic measurements. Ar ion beam was proposed among the other methods to process the inlet and outlet surface of fiber and adjust it to the required parameters. The gas flow inside PBF fiber and its optical properties were investigated.

    DOI

  • Improved bi-layer lift-off process for MEMS applications

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Toshitsugu Ueda

    MICROELECTRONIC ENGINEERING   85 ( 5-6 ) 1000 - 1003  2008.05

     View Summary

    Conventional lift-off process is designed for defining very fine pattern or removing metals hard to etch and the process is limited to surface microfabrication due to the requirement on directional deposition. We improved the process for the step coverage requirement in 3-D MEMS. A novel bi-layer (top image resist Shipley S1808 and bottom lift-off resist Microchem LOR) lift-off process was built up for patterning 3-D devices. Resists were coated and patterned with an overhang profile on a substrate before the substrate was etched. The key feature of the new lift-off process is to create a resist undercut profile, which is deep enough to reduce step coverage and durable to aggressive substrate etchant. The two-step development method was effective for patterning 3-D microdevices with high aspect ratio trench or through-holes. The development time of the resist profile was optimized. Fine pattern of 2 mu m/5 mu m (line/space) was achieved on quartz microstructure with high aspect ratio (2.7) trench. (C) 2008 Elsevier B.V. All rights reserved.

    DOI

  • Improved bi-layer lift-off process for MEMS applications

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Toshitsugu Ueda

    MICROELECTRONIC ENGINEERING   85 ( 5-6 ) 1000 - 1003  2008.05

     View Summary

    Conventional lift-off process is designed for defining very fine pattern or removing metals hard to etch and the process is limited to surface microfabrication due to the requirement on directional deposition. We improved the process for the step coverage requirement in 3-D MEMS. A novel bi-layer (top image resist Shipley S1808 and bottom lift-off resist Microchem LOR) lift-off process was built up for patterning 3-D devices. Resists were coated and patterned with an overhang profile on a substrate before the substrate was etched. The key feature of the new lift-off process is to create a resist undercut profile, which is deep enough to reduce step coverage and durable to aggressive substrate etchant. The two-step development method was effective for patterning 3-D microdevices with high aspect ratio trench or through-holes. The development time of the resist profile was optimized. Fine pattern of 2 mu m/5 mu m (line/space) was achieved on quartz microstructure with high aspect ratio (2.7) trench. (C) 2008 Elsevier B.V. All rights reserved.

    DOI

  • Improved bi-layer lift-off process for MEMS applications

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Toshitsugu Ueda

    MICROELECTRONIC ENGINEERING   85 ( 5-6 ) 1000 - 1003  2008.05

     View Summary

    Conventional lift-off process is designed for defining very fine pattern or removing metals hard to etch and the process is limited to surface microfabrication due to the requirement on directional deposition. We improved the process for the step coverage requirement in 3-D MEMS. A novel bi-layer (top image resist Shipley S1808 and bottom lift-off resist Microchem LOR) lift-off process was built up for patterning 3-D devices. Resists were coated and patterned with an overhang profile on a substrate before the substrate was etched. The key feature of the new lift-off process is to create a resist undercut profile, which is deep enough to reduce step coverage and durable to aggressive substrate etchant. The two-step development method was effective for patterning 3-D microdevices with high aspect ratio trench or through-holes. The development time of the resist profile was optimized. Fine pattern of 2 mu m/5 mu m (line/space) was achieved on quartz microstructure with high aspect ratio (2.7) trench. (C) 2008 Elsevier B.V. All rights reserved.

    DOI

  • Fabrication of Photonic Bandgap Fiber Gas Cell using Focused Ion Beam Cutting Technique

    Xuefeng Li, Joanna Pawlat, Jinxing Liang, G. Xu, Toshitsugu Ueda

    The 21st International Microprocesses and Nanotechnology Conference, JAL Resort Sea Hawk Hotel Fukuoka, Japan     29D  2008

  • Distortion Correction and Local Deblurring for Distorted and Blurred Images Projected from Two-dimensional Object

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan,     3 - 4  2008

  • A novel low-loss splice for photonic bandgap fiber gas sensor

    Xuefeng Li, Joanna Pawłat, Jinxing Liang, Toshitsugu Ueda

    Proceedings of IEEE Sensors     1289 - 1292  2008

     View Summary

    This paper presents a novel low-loss splice between the Photonic bandgap fiber (PBGF) and conventional step index fiber, for making PBGFs more functional. The solidcore fiber is butt-coupled to a PBGF using a mechanical splice surrounded by the block. The gap between the butt-coupled fibers is the most important parameter for keeping good output coupling efficiency and allowing for gas diffusion. For achieving the small gap, a focused ion beam (FIB) milling technique was developed for getting clean fiber surface. The achieved gap is adjustable from 0 to 400ìm. And a typical value at the gap of 20μm was 1.6 dB. © 2008 IEEE.

    DOI

  • Ultratrace measurement using micro-droplet with gas-flow assistance in laser-induced breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Joanna Pawłat, Toshitsugu Ueda

    Proceedings of IEEE Sensors     977 - 980  2008

     View Summary

    A new setup for laser-induced breakdown spectroscopy (LIBS) is introduced. This setup was designed for high sensitive quantitative analysis using the ink-jet technology and gas-flow assistance. The setup presented here allowed precise detection of a micro-droplet for guiding it into a laser beam spot area. The micro-droplet ejection system created constant volume of sample liquid and taking advantage of liquid physical state
    density of the solution can be controlled accurately. That means the constant amount of media was maintained in a micro-droplet. This sampling system allowed generating small droplet (diameter 30 μm) confining the whole fixed volume of the sample material in the laser beam spot area (minimum beam spot diameter 53.2 μm), under the effects of any ambient gas. In this paper, the stability with practical use and improvement of detection limit for LIBS measurement is reported. © 2008 IEEE.

    DOI

  • Microstructured optic fiber cell sensor for low concentration gas measurement

    Joanna Pawłat, Xuefeng Li, Yura Zimin, Takahiro Matsuo, Toshitsugu Ueda, Tadashi Sugiyama

    Proceedings of IEEE Sensors     922 - 925  2008

     View Summary

    A high-sensitivity, compact set-up, which enables the precise measurement of low concentration of gas, based on Microstructured Optic Fiber (MOF) was developed. Some of MOFs were designed especially for this research purpose and functioned as the gas cells of the apparatus during the spectroscopic measurements. Proposed technique allowed reducing the total size of the set-up (portability) and the gas sample volume to 0.01 cc. In the case of fibers' mass production, presented research project may lead to low cost, high-sensitivity and real-time measurement system. © 2008 IEEE.

    DOI

  • Application on Monte Carlo Method to X-ray Fluorescence Meter

    Koichi Harima, Toshitsugu Ueda

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan     451 - 454  2008

  • Photonic Bandgap Fiber Cell Sensor for Ammonia Gas Measurement

    Joanna Pawlat, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    Proceedings of the 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa,     357 - 360  2008

  • Sensing System for LIBS Multiple Measurements of Trace Elements

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa Japan     307 - 311  2008

  • GEOMETRICALLY DISTORTED IMAGE CORRECTION FOR SINGLE LENS USING DECIMAL NUMBER MAPPING

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    The 10th IASTED International Conference SIGNAL AND IMAGE PROCESSING (SIP 2008), Kailua-Kona, HI, USA,     26 - 31  2008

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland     210 - 211  2008

  • High-Precision Gas Sensor Based on Photonic Bandgap Fiber Cell

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland,     54 - 55  2008

  • DESIGN OF PHOTONIC BANDGAP FIBER CELL GAS SENSOR

    Joanna Pawlat, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University   ( (Poster Session(1) ) 261 - 264  2008

  • "STRESS FREE FLIP CHIP PACKAGED QUARTZ MEMS CAPACITIVE TILT SENSOR",

    Jinxing Liang, Toshitsugu Ueda

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University,   ( Poster Session(1) ) 166 - 169  2008

  • DIFFERENTIAL PLATINUM THIN FILM HYDROGEN GAS SENSOR FABRICATED BY MEMS TECHNIQUES

    Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, pp.(132-135), 22-25   ( Oral Session(3) ) 132 - 135  2008

  • Gas sensor based on PBG fiber-possibilities and limitations

    Joanna Pawlat, Takahiro Matsuo, Xuefeng Li, Tadashi Suglyama, Toshitsugu Ueda

    19TH INTERNATIONAL CONFERENCE ON OPTICAL FIBRE SENSORS, PTS 1 AND 2   7004  2008

     View Summary

    The Photonic Pandgap fiber was proposed as a new alternative for traditional glass-made gas cell used in spectroscopic measurements. Several PBG fibers were specially designed and produced for performed experiments. Gas flow within fiber was simulated and measured and ppm concentrations of ammonia gas were detected with short lengths of fiber. Final goal of the project is to produce portable and compact device for fast, ppb range rneasurement. Additionally, several fiber cutting methods were tested.

    DOI

  • Case Analysis Oriented Interpolation and a Two-Step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    , IEEJ Transactions on Sensors and Micromachines   Vol.128 ( No.11 )  2008

    DOI

  • Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques

    Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   128 ( 9 ) 1 - 351  2008

     View Summary

    Thermo-resistive platinum(Pt) thin film sensor was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. The sensor was fabricated with lift-off process that allowed the dual sensing surface area. Furthermore, the dual sensing surfaces ensured faster response to hydrogen gas. To increase the catalytic reaction comparing with at the room temperature, the sensor was heated to a specified temperature by applying the current to a Pt thin film. The catalytic reaction took place when the heated sensor came into the contact with hydrogen. Additionally, the differential Pt thin film hydrogen gas sensor was also developed. This gas sensor was able to compensate the changes in the external environment such as temperature, moisture, etc. The fabricated hydrogen sensor detected the concentration of hydrogen gas in air from 2% to 9%. © 2008 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Improvement of a micro-droplet guiding technique for laser-induced breakdown spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawłat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   128 ( 7 ) 1 - 301  2008

     View Summary

    A new and reliable set-up for laser-induced breakdown spectroscopy (LIBS) which enabled the precise micro-droplet observation and guiding the solution samples into a laser beam spot area was designed. The method presented here allowed micronizing of the liquid sample confining the whole volume of the sample in the laser beam spot area (minimum beam spot diameter 53.2um, micro-droplet diameter 30-40μm), separating it from its surroundings. As a result, LIBS with the micro-drop ejection system produced greater intensities than the old technique of bulk-liquid measurement based on data from 100 laser pulse shots. Advantages of this method were: strong emissions, no sample splashing, solution density controllability and ho chemical denaturation. This experimental set-up helped to overcome the disadvantage of LIBS with a micro-drop ejection system. © 2008 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Low concentration gas measurement using Photonic Bandgap Fiber cell sensor

    Joanna Pawłat, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Satoshi Ikezawa, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   128 ( 5 ) 198 - 202  2008

     View Summary

    Among few existing applications of Microstructured Optical Fibers, a new device for measurement of low gas concentration was designed. Developed set-up based on a Photonic Bandgap Fiber (PBGF), which was used as a gas cell. Proposed technique allowed reducing gas sample volume to 0.01 cc. The gas flow inside core of fiber was simulated and result was confirmed experimentally. During the experimental work several types of fibers of various parameters were specially designed, produced and used. Core diameters ranged from 10.9 μm to 700 μm. Various cutting techniques for fibers were investigated. © 2008 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Sensing Technique Using Laser-induced Breakdown Spectroscopy Integrated with Micro-droplet Ejection System

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    Sensors and Transducers Journal, Special Issue on Modern Sensing Technologies,   Vol..90  2008

  • Fabrication of Photonic Bandgap Fiber Gas Cell using Focused Ion Beam Cutting Technique

    Xuefeng Li, Joanna Pawlat, Jinxing Liang, G. Xu, Toshitsugu Ueda

    The 21st International Microprocesses and Nanotechnology Conference, JAL Resort Sea Hawk Hotel Fukuoka, Japan     29D  2008

  • Distortion Correction and Local Deblurring for Distorted and Blurred Images Projected from Two-dimensional Object

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan,     3 - 4  2008

  • A novel low-loss splice for photonic bandgap fiber gas sensor

    Xuefeng Li, Joanna Pawłat, Jinxing Liang, Toshitsugu Ueda

    Proceedings of IEEE Sensors     1289 - 1292  2008

     View Summary

    This paper presents a novel low-loss splice between the Photonic bandgap fiber (PBGF) and conventional step index fiber, for making PBGFs more functional. The solidcore fiber is butt-coupled to a PBGF using a mechanical splice surrounded by the block. The gap between the butt-coupled fibers is the most important parameter for keeping good output coupling efficiency and allowing for gas diffusion. For achieving the small gap, a focused ion beam (FIB) milling technique was developed for getting clean fiber surface. The achieved gap is adjustable from 0 to 400ìm. And a typical value at the gap of 20μm was 1.6 dB. © 2008 IEEE.

    DOI

  • Ultratrace measurement using micro-droplet with gas-flow assistance in laser-induced breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Joanna Pawłat, Toshitsugu Ueda

    Proceedings of IEEE Sensors     977 - 980  2008

     View Summary

    A new setup for laser-induced breakdown spectroscopy (LIBS) is introduced. This setup was designed for high sensitive quantitative analysis using the ink-jet technology and gas-flow assistance. The setup presented here allowed precise detection of a micro-droplet for guiding it into a laser beam spot area. The micro-droplet ejection system created constant volume of sample liquid and taking advantage of liquid physical state
    density of the solution can be controlled accurately. That means the constant amount of media was maintained in a micro-droplet. This sampling system allowed generating small droplet (diameter 30 μm) confining the whole fixed volume of the sample material in the laser beam spot area (minimum beam spot diameter 53.2 μm), under the effects of any ambient gas. In this paper, the stability with practical use and improvement of detection limit for LIBS measurement is reported. © 2008 IEEE.

    DOI

  • Microstructured optic fiber cell sensor for low concentration gas measurement

    Joanna Pawłat, Xuefeng Li, Yura Zimin, Takahiro Matsuo, Toshitsugu Ueda, Tadashi Sugiyama

    Proceedings of IEEE Sensors     922 - 925  2008

     View Summary

    A high-sensitivity, compact set-up, which enables the precise measurement of low concentration of gas, based on Microstructured Optic Fiber (MOF) was developed. Some of MOFs were designed especially for this research purpose and functioned as the gas cells of the apparatus during the spectroscopic measurements. Proposed technique allowed reducing the total size of the set-up (portability) and the gas sample volume to 0.01 cc. In the case of fibers' mass production, presented research project may lead to low cost, high-sensitivity and real-time measurement system. © 2008 IEEE.

    DOI

  • Application on Monte Carlo Method to X-ray Fluorescence Meter

    Koichi Harima, Toshitsugu Ueda

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan     451 - 454  2008

  • Photonic Bandgap Fiber Cell Sensor for Ammonia Gas Measurement

    Joanna Pawlat, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    Proceedings of the 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa,     357 - 360  2008

  • Sensing System for LIBS Multiple Measurements of Trace Elements

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa Japan     307 - 311  2008

  • GEOMETRICALLY DISTORTED IMAGE CORRECTION FOR SINGLE LENS USING DECIMAL NUMBER MAPPING

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    The 10th IASTED International Conference SIGNAL AND IMAGE PROCESSING (SIP 2008), Kailua-Kona, HI, USA,     26 - 31  2008

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland     210 - 211  2008

  • High-Precision Gas Sensor Based on Photonic Bandgap Fiber Cell

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland,     54 - 55  2008

  • DESIGN OF PHOTONIC BANDGAP FIBER CELL GAS SENSOR

    Joanna Pawlat, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University   ( (Poster Session(1) ) 261 - 264  2008

  • "STRESS FREE FLIP CHIP PACKAGED QUARTZ MEMS CAPACITIVE TILT SENSOR",

    Jinxing Liang, Toshitsugu Ueda

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University,   ( Poster Session(1) ) 166 - 169  2008

  • DIFFERENTIAL PLATINUM THIN FILM HYDROGEN GAS SENSOR FABRICATED BY MEMS TECHNIQUES

    Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, pp.(132-135), 22-25   ( Oral Session(3) ) 132 - 135  2008

  • Gas sensor based on PBG fiber-possibilities and limitations

    Joanna Pawlat, Takahiro Matsuo, Xuefeng Li, Tadashi Suglyama, Toshitsugu Ueda

    19TH INTERNATIONAL CONFERENCE ON OPTICAL FIBRE SENSORS, PTS 1 AND 2   7004  2008

     View Summary

    The Photonic Pandgap fiber was proposed as a new alternative for traditional glass-made gas cell used in spectroscopic measurements. Several PBG fibers were specially designed and produced for performed experiments. Gas flow within fiber was simulated and measured and ppm concentrations of ammonia gas were detected with short lengths of fiber. Final goal of the project is to produce portable and compact device for fast, ppb range rneasurement. Additionally, several fiber cutting methods were tested.

    DOI

  • Case Analysis Oriented Interpolation and a Two-Step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    , IEEJ Transactions on Sensors and Micromachines   Vol.128 ( No.11 )  2008

    DOI

  • Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques

    Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   128 ( 9 ) 1 - 351  2008

     View Summary

    Thermo-resistive platinum(Pt) thin film sensor was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. The sensor was fabricated with lift-off process that allowed the dual sensing surface area. Furthermore, the dual sensing surfaces ensured faster response to hydrogen gas. To increase the catalytic reaction comparing with at the room temperature, the sensor was heated to a specified temperature by applying the current to a Pt thin film. The catalytic reaction took place when the heated sensor came into the contact with hydrogen. Additionally, the differential Pt thin film hydrogen gas sensor was also developed. This gas sensor was able to compensate the changes in the external environment such as temperature, moisture, etc. The fabricated hydrogen sensor detected the concentration of hydrogen gas in air from 2% to 9%. © 2008 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Improvement of a micro-droplet guiding technique for laser-induced breakdown spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawłat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   128 ( 7 ) 1 - 301  2008

     View Summary

    A new and reliable set-up for laser-induced breakdown spectroscopy (LIBS) which enabled the precise micro-droplet observation and guiding the solution samples into a laser beam spot area was designed. The method presented here allowed micronizing of the liquid sample confining the whole volume of the sample in the laser beam spot area (minimum beam spot diameter 53.2um, micro-droplet diameter 30-40μm), separating it from its surroundings. As a result, LIBS with the micro-drop ejection system produced greater intensities than the old technique of bulk-liquid measurement based on data from 100 laser pulse shots. Advantages of this method were: strong emissions, no sample splashing, solution density controllability and ho chemical denaturation. This experimental set-up helped to overcome the disadvantage of LIBS with a micro-drop ejection system. © 2008 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Low concentration gas measurement using Photonic Bandgap Fiber cell sensor

    Joanna Pawłat, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Satoshi Ikezawa, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   128 ( 5 ) 198 - 202  2008

     View Summary

    Among few existing applications of Microstructured Optical Fibers, a new device for measurement of low gas concentration was designed. Developed set-up based on a Photonic Bandgap Fiber (PBGF), which was used as a gas cell. Proposed technique allowed reducing gas sample volume to 0.01 cc. The gas flow inside core of fiber was simulated and result was confirmed experimentally. During the experimental work several types of fibers of various parameters were specially designed, produced and used. Core diameters ranged from 10.9 μm to 700 μm. Various cutting techniques for fibers were investigated. © 2008 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Sensing Technique Using Laser-induced Breakdown Spectroscopy Integrated with Micro-droplet Ejection System

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    Sensors and Transducers Journal, Special Issue on Modern Sensing Technologies,   Vol..90  2008

  • Fabrication of Photonic Bandgap Fiber Gas Cell using Focused Ion Beam Cutting Technique

    Xuefeng Li, Joanna Pawlat, Jinxing Liang, G. Xu, Toshitsugu Ueda

    The 21st International Microprocesses and Nanotechnology Conference, JAL Resort Sea Hawk Hotel Fukuoka, Japan     29D  2008

  • Distortion Correction and Local Deblurring for Distorted and Blurred Images Projected from Two-dimensional Object

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan,     3 - 4  2008

  • A novel low-loss splice for photonic bandgap fiber gas sensor

    Xuefeng Li, Joanna Pawłat, Jinxing Liang, Toshitsugu Ueda

    Proceedings of IEEE Sensors     1289 - 1292  2008

     View Summary

    This paper presents a novel low-loss splice between the Photonic bandgap fiber (PBGF) and conventional step index fiber, for making PBGFs more functional. The solidcore fiber is butt-coupled to a PBGF using a mechanical splice surrounded by the block. The gap between the butt-coupled fibers is the most important parameter for keeping good output coupling efficiency and allowing for gas diffusion. For achieving the small gap, a focused ion beam (FIB) milling technique was developed for getting clean fiber surface. The achieved gap is adjustable from 0 to 400ìm. And a typical value at the gap of 20μm was 1.6 dB. © 2008 IEEE.

    DOI

  • Ultratrace measurement using micro-droplet with gas-flow assistance in laser-induced breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Yury Zimin, Joanna Pawłat, Toshitsugu Ueda

    Proceedings of IEEE Sensors     977 - 980  2008

     View Summary

    A new setup for laser-induced breakdown spectroscopy (LIBS) is introduced. This setup was designed for high sensitive quantitative analysis using the ink-jet technology and gas-flow assistance. The setup presented here allowed precise detection of a micro-droplet for guiding it into a laser beam spot area. The micro-droplet ejection system created constant volume of sample liquid and taking advantage of liquid physical state
    density of the solution can be controlled accurately. That means the constant amount of media was maintained in a micro-droplet. This sampling system allowed generating small droplet (diameter 30 μm) confining the whole fixed volume of the sample material in the laser beam spot area (minimum beam spot diameter 53.2 μm), under the effects of any ambient gas. In this paper, the stability with practical use and improvement of detection limit for LIBS measurement is reported. © 2008 IEEE.

    DOI

  • Microstructured optic fiber cell sensor for low concentration gas measurement

    Joanna Pawłat, Xuefeng Li, Yura Zimin, Takahiro Matsuo, Toshitsugu Ueda, Tadashi Sugiyama

    Proceedings of IEEE Sensors     922 - 925  2008

     View Summary

    A high-sensitivity, compact set-up, which enables the precise measurement of low concentration of gas, based on Microstructured Optic Fiber (MOF) was developed. Some of MOFs were designed especially for this research purpose and functioned as the gas cells of the apparatus during the spectroscopic measurements. Proposed technique allowed reducing the total size of the set-up (portability) and the gas sample volume to 0.01 cc. In the case of fibers' mass production, presented research project may lead to low cost, high-sensitivity and real-time measurement system. © 2008 IEEE.

    DOI

  • Application on Monte Carlo Method to X-ray Fluorescence Meter

    Koichi Harima, Toshitsugu Ueda

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa, Japan     451 - 454  2008

  • Photonic Bandgap Fiber Cell Sensor for Ammonia Gas Measurement

    Joanna Pawlat, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    Proceedings of the 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa,     357 - 360  2008

  • Sensing System for LIBS Multiple Measurements of Trace Elements

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    The 25th Sensor Symposium on Sensors, Micromachines and Applied System, Okinawa Japan     307 - 311  2008

  • GEOMETRICALLY DISTORTED IMAGE CORRECTION FOR SINGLE LENS USING DECIMAL NUMBER MAPPING

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    The 10th IASTED International Conference SIGNAL AND IMAGE PROCESSING (SIP 2008), Kailua-Kona, HI, USA,     26 - 31  2008

  • Control of a Micro-Droplet for Laser-Induced Breakdown Spectroscopy Solution Measurement

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland     210 - 211  2008

  • High-Precision Gas Sensor Based on Photonic Bandgap Fiber Cell

    Joanna Pawlat, Xuefeng Li, Tadashi Sugiyama, Takahiro Matsuo, Yurij Zimin, Toshitsugu Ueda

    The 4th International Conference Mechatronic Systems and Materials, Bialystok, Poland,     54 - 55  2008

  • DESIGN OF PHOTONIC BANDGAP FIBER CELL GAS SENSOR

    Joanna Pawlat, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Yura Zimin, Toshitsugu Ueda

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University   ( (Poster Session(1) ) 261 - 264  2008

  • "STRESS FREE FLIP CHIP PACKAGED QUARTZ MEMS CAPACITIVE TILT SENSOR",

    Jinxing Liang, Toshitsugu Ueda

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University,   ( Poster Session(1) ) 166 - 169  2008

  • DIFFERENTIAL PLATINUM THIN FILM HYDROGEN GAS SENSOR FABRICATED BY MEMS TECHNIQUES

    Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies, Tainan, Taiwan, National Cheng Kung University, pp.(132-135), 22-25   ( Oral Session(3) ) 132 - 135  2008

  • Gas sensor based on PBG fiber-possibilities and limitations

    Joanna Pawlat, Takahiro Matsuo, Xuefeng Li, Tadashi Suglyama, Toshitsugu Ueda

    19TH INTERNATIONAL CONFERENCE ON OPTICAL FIBRE SENSORS, PTS 1 AND 2   7004  2008

     View Summary

    The Photonic Pandgap fiber was proposed as a new alternative for traditional glass-made gas cell used in spectroscopic measurements. Several PBG fibers were specially designed and produced for performed experiments. Gas flow within fiber was simulated and measured and ppm concentrations of ammonia gas were detected with short lengths of fiber. Final goal of the project is to produce portable and compact device for fast, ppb range rneasurement. Additionally, several fiber cutting methods were tested.

    DOI

  • Case Analysis Oriented Interpolation and a Two-Step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    , IEEJ Transactions on Sensors and Micromachines   Vol.128 ( No.11 )  2008

    DOI

  • Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques

    Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   128 ( 9 ) 1 - 351  2008

     View Summary

    Thermo-resistive platinum(Pt) thin film sensor was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. The sensor was fabricated with lift-off process that allowed the dual sensing surface area. Furthermore, the dual sensing surfaces ensured faster response to hydrogen gas. To increase the catalytic reaction comparing with at the room temperature, the sensor was heated to a specified temperature by applying the current to a Pt thin film. The catalytic reaction took place when the heated sensor came into the contact with hydrogen. Additionally, the differential Pt thin film hydrogen gas sensor was also developed. This gas sensor was able to compensate the changes in the external environment such as temperature, moisture, etc. The fabricated hydrogen sensor detected the concentration of hydrogen gas in air from 2% to 9%. © 2008 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Improvement of a micro-droplet guiding technique for laser-induced breakdown spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawłat, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   128 ( 7 ) 1 - 301  2008

     View Summary

    A new and reliable set-up for laser-induced breakdown spectroscopy (LIBS) which enabled the precise micro-droplet observation and guiding the solution samples into a laser beam spot area was designed. The method presented here allowed micronizing of the liquid sample confining the whole volume of the sample in the laser beam spot area (minimum beam spot diameter 53.2um, micro-droplet diameter 30-40μm), separating it from its surroundings. As a result, LIBS with the micro-drop ejection system produced greater intensities than the old technique of bulk-liquid measurement based on data from 100 laser pulse shots. Advantages of this method were: strong emissions, no sample splashing, solution density controllability and ho chemical denaturation. This experimental set-up helped to overcome the disadvantage of LIBS with a micro-drop ejection system. © 2008 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Low concentration gas measurement using Photonic Bandgap Fiber cell sensor

    Joanna Pawłat, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Satoshi Ikezawa, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   128 ( 5 ) 198 - 202  2008

     View Summary

    Among few existing applications of Microstructured Optical Fibers, a new device for measurement of low gas concentration was designed. Developed set-up based on a Photonic Bandgap Fiber (PBGF), which was used as a gas cell. Proposed technique allowed reducing gas sample volume to 0.01 cc. The gas flow inside core of fiber was simulated and result was confirmed experimentally. During the experimental work several types of fibers of various parameters were specially designed, produced and used. Core diameters ranged from 10.9 μm to 700 μm. Various cutting techniques for fibers were investigated. © 2008 The Institute of Electrical Engineers of Japan.

    DOI CiNii

  • Sensing Technique Using Laser-induced Breakdown Spectroscopy Integrated with Micro-droplet Ejection System

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Pawlat, Toshitsugu Ueda

    Sensors and Transducers Journal, Special Issue on Modern Sensing Technologies,   Vol..90  2008

  • Development of a source-drain electrode coated with an insulation layer for detecting concentration changes in a nitrate ion solution

    T. Isoda, H. Makimoto, H. Imanaga, R. Imamura, J. Pawlat, T. Ueda

    SENSORS AND ACTUATORS B-CHEMICAL   123 ( 2 ) 805 - 815  2007.05

     View Summary

    A chip-mounted source-drain electrode coated with an insulator layer was investigated with respect to its ability for monitoring in a concentrated nitrate ion solution. Exposing the electrode surface to highly concentrated nitrate ion solutions resulted in an increase in the detection voltage, while weakly concentrated solutions caused the detection voltage to decrease. Semi-circular shaped microelectrodes consisted of an Au/Cr film of 1/0. 1 1.mu m thickness on a class chip, constructed using photolithography. A novolac resin or fluoro-olefin vinyl ether copolymer was used as the precursor of an insulator layer on the source-drain electrode. NaNO3 solutions of 1.0 x 10(-6) to 1.0 mol 1(-1) (1 mu l) were applied to the insulated electrode. and the chemical sensitivity was evaluated by measuring the detection voltage. The effects of thickness, insulator type, solution, and sensor material, on the chemical sensitivity were investigated. For a novolac resin insulator layer of thickness < 2.5 mu m, the sensor voltage was noticeably unstable, whereas a thicker insulator layer (> 5 Rm) resulted in a sensor voltage that showed a linear response depending on the NaNO3 concentration in the range of 1.0 x 10-6 to 1.0 x 10(-3) mol 1(-1). The responsiveness of the sensor was improved with increasing insulator layer thickness. Optimization of the insulator thickness is therefore necessary if an effective sensor is to be realized. Sensor detection was also effected by the kind of solution and electrode material. The placing of a liquid droplet on the insulator surface resulted in the formation of an electric double layer at the boundary surface. Here, the molecules within the insulator become polarized, and a charge is formed at the boundary surface between the liquid and solid, and on the reverse side of the insulator. In this case, the relationship between the source-drain electrode current and the sensor voltage follows Ohm's law. Based on this principle, a source-drain electrode produces a signal in response to changes in current originating from polarization of the insulator layer. (C) 2006 Elsevier B.V. All rights reserved.

    DOI CiNii

  • Development of a source-drain electrode coated with an insulation layer for detecting concentration changes in a nitrate ion solution

    T. Isoda, H. Makimoto, H. Imanaga, R. Imamura, J. Pawlat, T. Ueda

    SENSORS AND ACTUATORS B-CHEMICAL   123 ( 2 ) 805 - 815  2007.05

     View Summary

    A chip-mounted source-drain electrode coated with an insulator layer was investigated with respect to its ability for monitoring in a concentrated nitrate ion solution. Exposing the electrode surface to highly concentrated nitrate ion solutions resulted in an increase in the detection voltage, while weakly concentrated solutions caused the detection voltage to decrease. Semi-circular shaped microelectrodes consisted of an Au/Cr film of 1/0. 1 1.mu m thickness on a class chip, constructed using photolithography. A novolac resin or fluoro-olefin vinyl ether copolymer was used as the precursor of an insulator layer on the source-drain electrode. NaNO3 solutions of 1.0 x 10(-6) to 1.0 mol 1(-1) (1 mu l) were applied to the insulated electrode. and the chemical sensitivity was evaluated by measuring the detection voltage. The effects of thickness, insulator type, solution, and sensor material, on the chemical sensitivity were investigated. For a novolac resin insulator layer of thickness < 2.5 mu m, the sensor voltage was noticeably unstable, whereas a thicker insulator layer (> 5 Rm) resulted in a sensor voltage that showed a linear response depending on the NaNO3 concentration in the range of 1.0 x 10-6 to 1.0 x 10(-3) mol 1(-1). The responsiveness of the sensor was improved with increasing insulator layer thickness. Optimization of the insulator thickness is therefore necessary if an effective sensor is to be realized. Sensor detection was also effected by the kind of solution and electrode material. The placing of a liquid droplet on the insulator surface resulted in the formation of an electric double layer at the boundary surface. Here, the molecules within the insulator become polarized, and a charge is formed at the boundary surface between the liquid and solid, and on the reverse side of the insulator. In this case, the relationship between the source-drain electrode current and the sensor voltage follows Ohm's law. Based on this principle, a source-drain electrode produces a signal in response to changes in current originating from polarization of the insulator layer. (C) 2006 Elsevier B.V. All rights reserved.

    DOI CiNii

  • Development of a source-drain electrode coated with an insulation layer for detecting concentration changes in a nitrate ion solution

    T. Isoda, H. Makimoto, H. Imanaga, R. Imamura, J. Pawlat, T. Ueda

    SENSORS AND ACTUATORS B-CHEMICAL   123 ( 2 ) 805 - 815  2007.05

     View Summary

    A chip-mounted source-drain electrode coated with an insulator layer was investigated with respect to its ability for monitoring in a concentrated nitrate ion solution. Exposing the electrode surface to highly concentrated nitrate ion solutions resulted in an increase in the detection voltage, while weakly concentrated solutions caused the detection voltage to decrease. Semi-circular shaped microelectrodes consisted of an Au/Cr film of 1/0. 1 1.mu m thickness on a class chip, constructed using photolithography. A novolac resin or fluoro-olefin vinyl ether copolymer was used as the precursor of an insulator layer on the source-drain electrode. NaNO3 solutions of 1.0 x 10(-6) to 1.0 mol 1(-1) (1 mu l) were applied to the insulated electrode. and the chemical sensitivity was evaluated by measuring the detection voltage. The effects of thickness, insulator type, solution, and sensor material, on the chemical sensitivity were investigated. For a novolac resin insulator layer of thickness < 2.5 mu m, the sensor voltage was noticeably unstable, whereas a thicker insulator layer (> 5 Rm) resulted in a sensor voltage that showed a linear response depending on the NaNO3 concentration in the range of 1.0 x 10-6 to 1.0 x 10(-3) mol 1(-1). The responsiveness of the sensor was improved with increasing insulator layer thickness. Optimization of the insulator thickness is therefore necessary if an effective sensor is to be realized. Sensor detection was also effected by the kind of solution and electrode material. The placing of a liquid droplet on the insulator surface resulted in the formation of an electric double layer at the boundary surface. Here, the molecules within the insulator become polarized, and a charge is formed at the boundary surface between the liquid and solid, and on the reverse side of the insulator. In this case, the relationship between the source-drain electrode current and the sensor voltage follows Ohm's law. Based on this principle, a source-drain electrode produces a signal in response to changes in current originating from polarization of the insulator layer. (C) 2006 Elsevier B.V. All rights reserved.

    DOI CiNii

  • Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Paw?at and Toshitsugu Ueda

    Evaluation of, Laser-Induced Breakdown Spectroscopy Quantitative Sensing Performance Using a Micro-droplet Ejection System

    IEEE SENSORS 2007 Conference    2007

  • Application on Monte Carlo Method to X-ray Fluorescence Analysis

    Koichi Harima, Noboru Iwasaki, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Case Analysis Oriented Interpolation and a Two-step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Thermo-resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Fabrication of Two-axis Quartz MEMS-based Capacitive Tilt Sensor

    JJinxing Liang, Takahiro Matsuo, Fusao Kohsaka, Xuefeng Li, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Tilt Sensor System Using MEMS Device and CMOS Technology

    Takahiro MATSUO, Jinxing LIANG, Fusao KOHSAKA, Toyoki TAGUCHI, Toshitsugu UEDA

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

    Joanna Paw?at, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Satoshi Ikezawa, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Paw?at, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Paw?at and Toshitsugu Ueda

    Evaluation of, Laser-Induced Breakdown Spectroscopy Quantitative Sensing Performance Using a Micro-droplet Ejection System

    IEEE SENSORS 2007 Conference    2007

  • Application on Monte Carlo Method to X-ray Fluorescence Analysis

    Koichi Harima, Noboru Iwasaki, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Case Analysis Oriented Interpolation and a Two-step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Thermo-resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Fabrication of Two-axis Quartz MEMS-based Capacitive Tilt Sensor

    JJinxing Liang, Takahiro Matsuo, Fusao Kohsaka, Xuefeng Li, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Tilt Sensor System Using MEMS Device and CMOS Technology

    Takahiro MATSUO, Jinxing LIANG, Fusao KOHSAKA, Toyoki TAGUCHI, Toshitsugu UEDA

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

    Joanna Paw?at, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Satoshi Ikezawa, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Paw?at, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • 水晶マイクロ加工による高感度傾斜センサ

    幸坂夫佐夫, 梁金星, 松尾高博, 植田敏嗣

    電気学会論文誌E    2007

    DOI

  • Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Paw?at and Toshitsugu Ueda

    Evaluation of, Laser-Induced Breakdown Spectroscopy Quantitative Sensing Performance Using a Micro-droplet Ejection System

    IEEE SENSORS 2007 Conference    2007

  • Application on Monte Carlo Method to X-ray Fluorescence Analysis

    Koichi Harima, Noboru Iwasaki, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Case Analysis Oriented Interpolation and a Two-step Interpolation after Correction of Barrel Distortion and Lateral Chromatic Aberration

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Thermo-resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques

    Daisuke Yamazaki, Lin Zhang, Joanna Pawlat, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Fabrication of Two-axis Quartz MEMS-based Capacitive Tilt Sensor

    JJinxing Liang, Takahiro Matsuo, Fusao Kohsaka, Xuefeng Li, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Tilt Sensor System Using MEMS Device and CMOS Technology

    Takahiro MATSUO, Jinxing LIANG, Fusao KOHSAKA, Toyoki TAGUCHI, Toshitsugu UEDA

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Low Concentration Gas Measurement Using Photonic Bandgap Fiber Cell Sensor

    Joanna Paw?at, Tadashi Sugiyama, Xuefeng Li, Takahiro Matsuo, Satoshi Ikezawa, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Improvement of a Micro-Droplet Guiding Technique for Laser-Induced Breakdown Spectroscopy

    Satoshi Ikezawa, Muneaki Wakamatsu, Joanna Paw?at, Toshitsugu Ueda

    PROCEEDINGS OF THE 24th SENSOR SYMPOSIUM    2007

  • Particle Element and Size Stimutaneous Measurement Using LIBS

    Muneaki WAKAMATSU, Satoshi Ikezawa, Toshitsugu UEDA

    IEEJ Trana. SM   127 ( 9 ) 397 - 402  2007

    DOI CiNii

  • Development of Solution Measurement Using Laser-Induced Breakdown Spectroscopy Integrated with Micro-Droplet Ejection System

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    IEEJ Trana. SM   127 ( 7 ) 343 - 346  2007

    DOI CiNii

  • Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Application

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Toshitsugu Ueda

    IEEJ Trana. SM   127 ( 7 ) 337 - 342  2007

    DOI CiNii

  • Particle Element and Size Stimutaneous Measurement Using LIBS

    Muneaki WAKAMATSU, Satoshi Ikezawa, Toshitsugu UEDA

    電気学会論文誌E   127 ( 9 ) 397 - 402  2007

    DOI CiNii

  • Development of Solution Measurement Using Laser-Induced Breakdown Spectroscopy Integrated with Micro-Droplet Ejection System

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    電気学会論文誌E   127 ( 7 ) 343 - 346  2007

    DOI CiNii

  • Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Application

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Toshitsugu Ueda

    電気学会論文誌E   127 ( 7 ) 337 - 342  2007

    DOI CiNii

  • Particle Element and Size Stimutaneous Measurement Using LIBS

    Muneaki WAKAMATSU, Satoshi Ikezawa, Toshitsugu UEDA

    IEEJ Trana. SM   127 ( 9 ) 397 - 402  2007

    DOI CiNii

  • Development of Solution Measurement Using Laser-Induced Breakdown Spectroscopy Integrated with Micro-Droplet Ejection System

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    IEEJ Trana. SM   127 ( 7 ) 343 - 346  2007

    DOI CiNii

  • Wet Etched High Aspect Ratio Microstructures on Quartz for MEMS Application

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Toshitsugu Ueda

    IEEJ Trana. SM   127 ( 7 ) 337 - 342  2007

    DOI CiNii

  • Deep wet etching of Z cut quartz wafer for MEMS applications

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Toshitsugu Ueda

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     31 - 35  2006

  • High Frequency Drive of a Diode-bridge Type Differential Capacitance Detection Circuit

    Takahiro MATSUO, Jinxing LIANG, Joanna PAWLAT, Toshitsugu UEDA

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     287 - 290  2006

  • PHOTONIC BANDGAP FIBER IN LOW CONCETRATION MEASUREMENT

    Joanna Paw?at, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    10th International Symposium on High Pressure Low Temperature Plasma Chemistry , eptember 4-8     359 - 362  2006

  • Photonic bandgap fiber for a sensing device

    Joanna Paw?at, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     329 - 333  2006

  • Absolute Calibration Technique using Micro-Droplet Ejection System for Enhancement of LIBS Quantitative Analysis

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    ”, PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     362 - 365  2006

  • Particle Element and Size Measurement Using LIBS(2006)

    Muneaki WAKAMATSU, Satoshi Ikezawa, Toshitsugu UEDA

    , PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM,     356 - 361  2006

  • PHTONIC BANDGAP FIBER IN LOW CONCENTRATION GAS MEASUREMENT

    Joanna Pawlat, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    The First European Symposium on Plasma Chemist, May 28-30, (Poland)    2006

  • A novel lift off process and its application for capacitive tilt sensor

    Jinxing LIANG, Fuso Kohsaka, Takahiro MATSUO, Toshitsugu UEDA

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     394 - 394  2006

  • A Study on a Diode-bridge Type Capacitance Detection Circuit for Differential Capacitive Sensor

    Takahiro MATSUO, Jinxing LIANG, Joanna PAWLAT, Toshitsugu UEDA

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     312 - 312  2006

  • Study of Laser Induced breakdown spectroscopy from micro-droplet of NaCL Solution

    Satoshi Ikezawa, Muneaki Wakamtsu, Toshitsugu Ueda

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     87 - 87  2006

  • Sensing of Gas Concentration Using Photonic Bandgap Fiber”

    Pawlat J, Sugiyama T, Ueda T

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     67 - 67  2006

  • Application of Photonic Bandgap Fiber in Gas Concentration Measurement.”

    Joanna Paw?ata, Takahiro Matsuoa, Tadashi Sugiyamab, Toshitsugu Uedaa

    , The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris),     2911 - 2914  2006

    DOI

  • Simulation of particle size measurement with LIBS

    Muneaki Wakamatsu, Toshitsugu Ueda, Alexander Andreev

    ”, The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris)     3170 - 3175  2006

    DOI

  • EXAMINATION OF 3D CAD SYSTEM ON ANISOTROPIC ETCHING OF ALPHA- QUARTZ

    HISANORI HAYASHI, KENTO HASEGAWA, TOSHITSUGU UEDA

    Asia-Pacific Conference of Transducers and Micro-Nano Technology?APCOT 2006     1 - 4  2006

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    Takahiro Matsuo, Joanna Pawlat, Jinxing Liang, Ken Kunitomo, Toshitsugu UEDA

    J. Adv. Qxid. Technol.   Vol. 9 ( No. 2 ) 159 - 159  2006

  • Correction of barrel distortion for simple digital camera systems

    Yupeng Zhang, Ikumi Minema, Toshitsugu Ueda

    成18 年度 電気関係学会九州支部連合大会     470 - 470  2006

  • MEMS技術を用いた白金薄膜熱抵抗変化型水素ガスセンサの研究

    王 蕾, 山崎 大輔, 植田 敏嗣

    成18 年度 電気関係学会九州支部連合大会     60 - 60  2006

  • 有限要素法を用いたAT 振動子のスプリアス解析

    水町 靖, 王 強, 植田 敏嗣

    平成18 年度 電気関係学会九州支部連合大会     56 - 56  2006

  • LIBSを用いたNaCl水溶液濃度の検出

    池沢 聡, 若松 宗明, 植田 敏嗣

    センサ・マイクロマシン準部門総合研究会     9 - 13  2006

  • 水晶MEMS技術による水素センサの開発

    植田 敏嗣

    福岡水素エネルギー社会近未来展(2006)    2006

  • Deep wet etching of Z cut quartz wafer for MEMS applications

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Toshitsugu Ueda

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     31 - 35  2006

  • High Frequency Drive of a Diode-bridge Type Differential Capacitance Detection Circuit

    Takahiro MATSUO, Jinxing LIANG, Joanna PAWLAT, Toshitsugu UEDA

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     287 - 290  2006

  • PHOTONIC BANDGAP FIBER IN LOW CONCETRATION MEASUREMENT

    Joanna Paw?at, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    10th International Symposium on High Pressure Low Temperature Plasma Chemistry , eptember 4-8     359 - 362  2006

  • Photonic bandgap fiber for a sensing device

    Joanna Paw?at, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     329 - 333  2006

  • Absolute Calibration Technique using Micro-Droplet Ejection System for Enhancement of LIBS Quantitative Analysis

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    ”, PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     362 - 365  2006

  • Particle Element and Size Measurement Using LIBS(2006)

    Muneaki WAKAMATSU, Satoshi Ikezawa, Toshitsugu UEDA

    , PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM,     356 - 361  2006

  • PHTONIC BANDGAP FIBER IN LOW CONCENTRATION GAS MEASUREMENT

    Joanna Pawlat, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    The First European Symposium on Plasma Chemist, May 28-30, (Poland)    2006

  • A novel lift off process and its application for capacitive tilt sensor

    Jinxing LIANG, Fuso Kohsaka, Takahiro MATSUO, Toshitsugu UEDA

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     394 - 394  2006

  • A Study on a Diode-bridge Type Capacitance Detection Circuit for Differential Capacitive Sensor

    Takahiro MATSUO, Jinxing LIANG, Joanna PAWLAT, Toshitsugu UEDA

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     312 - 312  2006

  • Study of Laser Induced breakdown spectroscopy from micro-droplet of NaCL Solution

    Satoshi Ikezawa, Muneaki Wakamtsu, Toshitsugu Ueda

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     87 - 87  2006

  • Sensing of Gas Concentration Using Photonic Bandgap Fiber”

    Pawlat J, Sugiyama T, Ueda T

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     67 - 67  2006

  • Application of Photonic Bandgap Fiber in Gas Concentration Measurement.”

    Joanna Paw?ata, Takahiro Matsuoa, Tadashi Sugiyamab, Toshitsugu Uedaa

    , The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris),     2911 - 2914  2006

    DOI

  • Simulation of particle size measurement with LIBS

    Muneaki Wakamatsu, Toshitsugu Ueda, Alexander Andreev

    ”, The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris)     3170 - 3175  2006

    DOI

  • EXAMINATION OF 3D CAD SYSTEM ON ANISOTROPIC ETCHING OF ALPHA- QUARTZ

    HISANORI HAYASHI, KENTO HASEGAWA, TOSHITSUGU UEDA

    Asia-Pacific Conference of Transducers and Micro-Nano Technology?APCOT 2006     1 - 4  2006

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    Takahiro Matsuo, Joanna Pawlat, Jinxing Liang, Ken Kunitomo, Toshitsugu UEDA

    J. Adv. Qxid. Technol.   Vol. 9 ( No. 2 ) 159 - 159  2006

  • In-situ Measurement for Gas Concentrations using Tunable Lasers

    Tadashi Sugiyama, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   126 ( 8 ) 464 - 468  2006

    DOI

  • Deep wet etching of Z cut quartz wafer for MEMS applications

    Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Toshitsugu Ueda

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     31 - 35  2006

  • High Frequency Drive of a Diode-bridge Type Differential Capacitance Detection Circuit

    Takahiro MATSUO, Jinxing LIANG, Joanna PAWLAT, Toshitsugu UEDA

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     287 - 290  2006

  • PHOTONIC BANDGAP FIBER IN LOW CONCETRATION MEASUREMENT

    Joanna Paw?at, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    10th International Symposium on High Pressure Low Temperature Plasma Chemistry , eptember 4-8     359 - 362  2006

  • Photonic bandgap fiber for a sensing device

    Joanna Paw?at, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     329 - 333  2006

  • Absolute Calibration Technique using Micro-Droplet Ejection System for Enhancement of LIBS Quantitative Analysis

    Satoshi Ikezawa, Muneaki Wakamatsu, Toshitsugu Ueda

    ”, PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM     362 - 365  2006

  • Particle Element and Size Measurement Using LIBS(2006)

    Muneaki WAKAMATSU, Satoshi Ikezawa, Toshitsugu UEDA

    , PROCEEDINGS OF THE 23RD SENSOR SYMPOSIUM,     356 - 361  2006

  • PHTONIC BANDGAP FIBER IN LOW CONCENTRATION GAS MEASUREMENT

    Joanna Pawlat, Takahiro Matsuo, Tadashi Sugiyama, Toshitsugu Ueda

    The First European Symposium on Plasma Chemist, May 28-30, (Poland)    2006

  • A novel lift off process and its application for capacitive tilt sensor

    Jinxing LIANG, Fuso Kohsaka, Takahiro MATSUO, Toshitsugu UEDA

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     394 - 394  2006

  • A Study on a Diode-bridge Type Capacitance Detection Circuit for Differential Capacitive Sensor

    Takahiro MATSUO, Jinxing LIANG, Joanna PAWLAT, Toshitsugu UEDA

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     312 - 312  2006

  • Study of Laser Induced breakdown spectroscopy from micro-droplet of NaCL Solution

    Satoshi Ikezawa, Muneaki Wakamtsu, Toshitsugu Ueda

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     87 - 87  2006

  • Sensing of Gas Concentration Using Photonic Bandgap Fiber”

    Pawlat J, Sugiyama T, Ueda T

    IEEE SENSORS 2006, EXCO Daegu, Korea/October 22-25     67 - 67  2006

  • Application of Photonic Bandgap Fiber in Gas Concentration Measurement.”

    Joanna Paw?ata, Takahiro Matsuoa, Tadashi Sugiyamab, Toshitsugu Uedaa

    , The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris),     2911 - 2914  2006

    DOI

  • Simulation of particle size measurement with LIBS

    Muneaki Wakamatsu, Toshitsugu Ueda, Alexander Andreev

    ”, The 32nd Annual Conference of the IEEE Industrial Electronics Society(Paris)     3170 - 3175  2006

    DOI

  • EXAMINATION OF 3D CAD SYSTEM ON ANISOTROPIC ETCHING OF ALPHA- QUARTZ

    HISANORI HAYASHI, KENTO HASEGAWA, TOSHITSUGU UEDA

    Asia-Pacific Conference of Transducers and Micro-Nano Technology?APCOT 2006     1 - 4  2006

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    Takahiro Matsuo, Joanna Pawlat, Jinxing Liang, Ken Kunitomo, Toshitsugu UEDA

    J. Adv. Qxid. Technol.   Vol. 9 ( No. 2 ) 159 - 159  2006

  • TILT SENSOR USING QUARTZ MEMS TECHNOLOGY

    Toshitsugu Ueda, Husao Khosaka

    2005 International Symposium on Nano Science and Technology November 10-11, Taiwan, Tainan     8 - 9  2005

  • High Sensitive Tilt Sensor for Quartz Micromachining

    Fusao Kohsaka, Jinxing Liang, Toshitsugu Ueda

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)     171 - 174  2005

  • Performance Analysis of a Diode-bridge Type Differential Capacitance Detection Circuit and It’s Evaluation

    Takahiro MATSUO, Ken KUNITOMO, Toshitugu UEDA

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)     233 - 236  2005

  • In-situ Measurement of ppb Concentration of Gas

    Joanna Pawlat, Tadashi Sugiyama, Toshitsugu Uedapp

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)     279 - 284  2005

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    Takahiro MATSUO, Ken KUNITOMO, Toshitsugu UEDA

    ELMECO-5, Naleczow (Poland)    2005

  • The measurement of ppb gas concentration using photonic crystal fiber

    Joanna Pawlat, Tadashi, Sugiyama, Toshitsugu Ueda

    ELMECO-5, Naleczow (Poland)    2005

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    Hisanori Hayashi, Toshitsugu Ueda

    Sensors and Materials,   17 ( 4 ) 167 - 177  2005

  • 蛍光X線膜厚計で使用するCr標準膜の開発(3)

    播磨 幸一, 植田 敏嗣, 岩崎 登

    平成17年度電気関係学会支部連合体会     164 - 164  2005

  • MEMS技術を用いた白金薄膜水素ガスセンサの研究

    チンウドンポン エッカリン, 植田敏嗣

    平成17年度電気関係学会支部連合体会     167 - 167  2005

  • α水晶の三次元加工のためのエッチング異方性の検討

    長谷川研人, 林尚典, 植田敏嗣

    平成17年度電気関係学会支部連合体会     165 - 165  2005

  • スプレー法によるレジストコーティングの検討

    井上幸広, 幸坂扶佐夫, 梁金星, 植田敏嗣

    平成17年度電気関係学会支部連合体会     163 - 163  2005

  • LIBSによる食塩濃度の測定

    池沢聡, 若松宗男, 植田敏嗣

    平成17年度電気関係学会支部連合体会     239 - 239  2005

  • 蛍光X線膜厚計で使用するCr標準膜の開発

    播磨 幸一, 植田 敏嗣, 岩崎 登

    センサ・マイクロマシン準部門総合研究会     1 - 5  2005

  • 蛍光X線膜厚計で使用するCr標準膜の開発

    播磨幸一, 植田 敏嗣, 播磨幸一, 植田 敏嗣

    第48回自動制御連合講演会     71 - 74  2005

  • 水晶を用いた高感度傾斜角センサの検討

    幸坂 扶佐夫, 梁 金星, 植田 敏嗣

    平成17年度電気学会全国大会講演論文集 3     222 - 222  2005

  • 水晶MEMS技術による超高感度・超小型次世代センサの開発

    植田 敏嗣

    福岡水素エネルギー戦略会議総会記念講演会、福岡ナノテク推進会議    2005

  • 研究室便り、早稲田大学大学院情報生産システム研究科 植田研究室

    植田 敏嗣

    電気学会論文誌E   125 ( 4 ) 207 - 207  2005

  • TILT SENSOR USING QUARTZ MEMS TECHNOLOGY

    Toshitsugu Ueda, Husao Khosaka

    2005 International Symposium on Nano Science and Technology November 10-11, Taiwan, Tainan     8 - 9  2005

  • High Sensitive Tilt Sensor for Quartz Micromachining

    Fusao Kohsaka, Jinxing Liang, Toshitsugu Ueda

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)     171 - 174  2005

  • Performance Analysis of a Diode-bridge Type Differential Capacitance Detection Circuit and It’s Evaluation

    Takahiro MATSUO, Ken KUNITOMO, Toshitugu UEDA

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)     233 - 236  2005

  • In-situ Measurement of ppb Concentration of Gas

    Joanna Pawlat, Tadashi Sugiyama, Toshitsugu Uedapp

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)     279 - 284  2005

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    Takahiro MATSUO, Ken KUNITOMO, Toshitsugu UEDA

    ELMECO-5, Naleczow (Poland)    2005

  • The measurement of ppb gas concentration using photonic crystal fiber

    Joanna Pawlat, Tadashi, Sugiyama, Toshitsugu Ueda

    ELMECO-5, Naleczow (Poland)    2005

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    Hisanori Hayashi, Toshitsugu Ueda

    Sensors and Materials,   17 ( 4 ) 167 - 177  2005

  • TILT SENSOR USING QUARTZ MEMS TECHNOLOGY

    Toshitsugu Ueda, Husao Khosaka

    2005 International Symposium on Nano Science and Technology November 10-11, Taiwan, Tainan     8 - 9  2005

  • High Sensitive Tilt Sensor for Quartz Micromachining

    Fusao Kohsaka, Jinxing Liang, Toshitsugu Ueda

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)     171 - 174  2005

  • Performance Analysis of a Diode-bridge Type Differential Capacitance Detection Circuit and It’s Evaluation

    Takahiro MATSUO, Ken KUNITOMO, Toshitugu UEDA

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)     233 - 236  2005

  • In-situ Measurement of ppb Concentration of Gas

    Joanna Pawlat, Tadashi Sugiyama, Toshitsugu Uedapp

    Proceedings of the 22nd Sensor Symposium、Tokyo (Japan)     279 - 284  2005

  • A Study on a Diode-bridge Type Differential Capacitance Detection Circuit

    Takahiro MATSUO, Ken KUNITOMO, Toshitsugu UEDA

    ELMECO-5, Naleczow (Poland)    2005

  • The measurement of ppb gas concentration using photonic crystal fiber

    Joanna Pawlat, Tadashi, Sugiyama, Toshitsugu Ueda

    ELMECO-5, Naleczow (Poland)    2005

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    Hisanori Hayashi, Toshitsugu Ueda

    Sensors and Materials,   17 ( 4 ) 167 - 177  2005

  • Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Micro-mechanical Devices(invited speech)

    Toshitsugu Ueda, Hisanori Hayashi

    2004 International Symposium on Nano Science and Technology Novenver 20-21, Taiwan, Tainan     35 - 41  2004

  • Mechanical Strength of Quartz Micromechanical Devices

    Fusao Kohsaka, Jinxing Liang, Toshitsugu Ueda

    Proceedings of The 21st Sensor Symposium     225 - 228  2004

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    Hisanori Hayashi, Toshitsugu Ueda

    4th Workshop Physical Chemistry of Wet Etching of Silicon, PCWES 2004 May 26-28, Montreal, Canada    2004

  • Particle Element and Size Measurement Using LIBS

    Muneaki WAKAMATSU, Toshitsugu UEDA, Hysanori HAYASHI

    ICEE 2004 (Joint Conference with Asia-Pasific of Transducers and Micro-Nano Technology 2004) July 4-8 2004 in Sapporo     823 - 826  2004

  • Particle size measurement and material characterization with plasma atomic emission analysi

    Muneaki Wakamatsu, Toshitsugu Ueda

    Trans.of Airosll Research   19 ( 1 ) 28 - 33  2004

  • 蛍光X線膜厚計で使用するCr標準薄膜の開発

    播磨 幸一, 岩崎 登, 植田 敏嗣

    平成16年度電気関係学会連合大会     318 - 318  2004

  • 高周波水晶発振器(VCXO)の加工技術に関する基礎的研究

    郭 玉芳, 植田 敏嗣

    平成16年度電気関係学会連合大会     320 - 320  2004

  • α水晶のエッチング異方性に関する基礎研究

    花俣 秀幸, 林 尚典, 植田 敏嗣

    平成16年度電気関係学会連合大会     319 - 319  2004

  • 水晶マイクロ・ナノ加工とデバイス応用(招待講演)、、pp1-2(2004)

    植田 敏嗣

    ナノテク研究・ビジネス最前線 H16/12/24・MEMSの最新技術と九州における展望     1 - 2  2004

  • Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Micro-mechanical Devices(invited speech)

    Toshitsugu Ueda, Hisanori Hayashi

    2004 International Symposium on Nano Science and Technology Novenver 20-21, Taiwan, Tainan     35 - 41  2004

  • Mechanical Strength of Quartz Micromechanical Devices

    Fusao Kohsaka, Jinxing Liang, Toshitsugu Ueda

    Proceedings of The 21st Sensor Symposium     225 - 228  2004

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    Hisanori Hayashi, Toshitsugu Ueda

    4th Workshop Physical Chemistry of Wet Etching of Silicon, PCWES 2004 May 26-28, Montreal, Canada    2004

  • Particle Element and Size Measurement Using LIBS

    Muneaki WAKAMATSU, Toshitsugu UEDA, Hysanori HAYASHI

    ICEE 2004 (Joint Conference with Asia-Pasific of Transducers and Micro-Nano Technology 2004) July 4-8 2004 in Sapporo     823 - 826  2004

  • プラズマ原子発光分析による微粒子の粒径・組成同時計測

    若松宗明, 植田敏嗣

    エアロゾル研究   19 ( 1 ) 28 - 33  2004

    DOI

  • Theory to Predict Etching Shapes in Quartz Crystal and Its Application to Design Micro-mechanical Devices(invited speech)

    Toshitsugu Ueda, Hisanori Hayashi

    2004 International Symposium on Nano Science and Technology Novenver 20-21, Taiwan, Tainan     35 - 41  2004

  • Mechanical Strength of Quartz Micromechanical Devices

    Fusao Kohsaka, Jinxing Liang, Toshitsugu Ueda

    Proceedings of The 21st Sensor Symposium     225 - 228  2004

  • Simulation of Anisotropic Etching of Alpha-Quartz for 3D CAD System

    Hisanori Hayashi, Toshitsugu Ueda

    4th Workshop Physical Chemistry of Wet Etching of Silicon, PCWES 2004 May 26-28, Montreal, Canada    2004

  • Particle Element and Size Measurement Using LIBS

    Muneaki WAKAMATSU, Toshitsugu UEDA, Hysanori HAYASHI

    ICEE 2004 (Joint Conference with Asia-Pasific of Transducers and Micro-Nano Technology 2004) July 4-8 2004 in Sapporo     823 - 826  2004

  • Particle size measurement and material characterization with plasma atomic emission analysi

    Muneaki Wakamatsu, Toshitsugu Ueda

    Trans.of Airosll Research   19 ( 1 ) 28 - 33  2004

  • Particle Element and Size Measurement Using LIBS

    M. Wakmatsu, T. Ueda

    SICE Annual Conference in Fukui, August 4-6     467 - 471  2003

  • In-situ Measurement for Gas Concentrations using Tunable Lasers"

    Tadashi Sugiyama, Toshitsugu Ueda

    Proceedings of the 20th Sensor Symposium, B1-5, July     91 - 96  2003

  • レーザーブレイクダウン(LIBS)による微粒子計測

    若松 宗明, 植田敏嗣

    、SICE第4回制御部門大会 予稿集    2003

  • 水晶振動子ナノ加工技術の研究開発” 高感度ガスセンサへの応用”

    植田敏嗣

    ASTE Annual Report of RISE, Waseda Univ   A11  2003

  • LD ビームデリバリ技術の研究開発

    植田敏嗣

    ASTE Annual Report of RISE, Waseda Univ.   A11  2003

  • 波長可変レーザーを用いた近赤外域での気体の分光計測

    杉山直, 植田敏嗣

    第一回赤外放射の応用関連学会等年会    2003

  • 波長可変レーザーを用いた気体の高感度分光

    杉山直, 植田敏嗣

    電気学会ケミカルセンサ研究会, CHS-03-56     1 - 4  2003

  • 紫外光光ファイバの試作と特性評価

    児玉, 石沢, 鳥羽, 植田

    第22回レーザセンシングシンポジウム     125 - 128  2003

  • Particle Element and Size Measurement Using LIBS

    M. Wakmatsu, T. Ueda

    SICE Annual Conference in Fukui, August 4-6     467 - 471  2003

  • In-situ Measurement for Gas Concentrations using Tunable Lasers"

    Tadashi Sugiyama, Toshitsugu Ueda

    Proceedings of the 20th Sensor Symposium, B1-5, July     91 - 96  2003

  • Particle Element and Size Measurement Using LIBS

    M. Wakmatsu, T. Ueda

    SICE Annual Conference in Fukui, August 4-6     467 - 471  2003

  • In-situ Measurement for Gas Concentrations using Tunable Lasers"

    Tadashi Sugiyama, Toshitsugu Ueda

    Proceedings of the 20th Sensor Symposium, B1-5, July     91 - 96  2003

  • Development of Technology for Measuring Part-per-billion Gas concentrations and Nano-particles

    T. Ueda, T. Sugiyama, M. Wada

    Final report of The "Advanced Photon Proccesing Measurement Technology"     ⅩⅠ  2002

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    A. Andreev, T. Ueda

    Proc. SPIE , Photon Processing in Microelectronics and Photonics   4637   413 - 418  2002

  • Growth of strain-blanced InAsp/InP/InGaAs multiple quantum well for infrared photodetectors

    M.Wada, S.Araki, T.Kudou, T. Umezawa, S.Nakajima, T.Ueda

    20th Sensor Symposium     177 - 181  2002

  • Laser with SBS Pulse Compression for LIBS

    T. Ueda, V. Yashin, M. Wakamatsu, A. Andreev

    Trns. IEE of Japan   122-E ( 5 ) 244 - 248  2002

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    M.Wada, S.Araki, T.Kudou, T.Umezawa, S.Nakajima, T.Ueda

    Trns. IEE of Japan   22 ( 1 ) 29 - 34  2002

  • 水晶振動子ナノ加工技術の研究開発

    植田敏嗣, Vol

    ASTE Annual Report of RISE, Waseda Univ.   A10  2002

  • ppbガス濃度とナノ粒子計測技術の研究開発

    植田敏嗣, 杉山 直, 若松宗明, 和田守夫

    フォトン計測・加工技術」プロジェクト成果報告会講演集    2002

  • Development of Technology for Measuring Part-per-billion Gas concentrations and Nano-particles

    T. Ueda, T. Sugiyama, M. Wada

    Final report of The "Advanced Photon Proccesing Measurement Technology"     ⅩⅠ  2002

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    A. Andreev, T. Ueda

    Proc. SPIE , Photon Processing in Microelectronics and Photonics   4637   413 - 418  2002

  • Growth of strain-blanced InAsp/InP/InGaAs multiple quantum well for infrared photodetectors

    M.Wada, S.Araki, T.Kudou, T. Umezawa, S.Nakajima, T.Ueda

    20th Sensor Symposium     177 - 181  2002

  • Laser with SBS Pulse Compression for LIBS

    T. Ueda, V. Yashin, M. Wakamatsu, A. Andreev

    電気学会論文誌E   122-E ( 5 ) 244 - 248  2002

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    M.Wada, S.Araki, T.Kudou, T.Umezawa, S.Nakajima, T.Ueda

    電気学会論文誌E, Vol.122, No.1   22 ( 1 ) 29 - 34  2002

  • Development of Technology for Measuring Part-per-billion Gas concentrations and Nano-particles

    T. Ueda, T. Sugiyama, M. Wada

    Final report of The "Advanced Photon Proccesing Measurement Technology"     ⅩⅠ  2002

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    A. Andreev, T. Ueda

    Proc. SPIE , Photon Processing in Microelectronics and Photonics   4637   413 - 418  2002

  • Growth of strain-blanced InAsp/InP/InGaAs multiple quantum well for infrared photodetectors

    M.Wada, S.Araki, T.Kudou, T. Umezawa, S.Nakajima, T.Ueda

    20th Sensor Symposium     177 - 181  2002

  • Laser with SBS Pulse Compression for LIBS

    T. Ueda, V. Yashin, M. Wakamatsu, A. Andreev

    Trns. IEE of Japan   122-E ( 5 ) 244 - 248  2002

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    M.Wada, S.Araki, T.Kudou, T.Umezawa, S.Nakajima, T.Ueda

    Trns. IEE of Japan   22 ( 1 ) 29 - 34  2002

  • High-Sensitive Mesurement Technology for IR Spectroscopy

    Tadashi Sugiyama, Toshitsugu Ueda, Morio Wada, Shinichirou Nakajima, Toshimasa Umezawa

    Proceedings of The 5th Symposium Advanced Photon Processing and Mesurement Technology     57 - 58  2001

  • Development of In-situ Nono-Particle Measurement

    Toshitsugu Ueda, M. Wakamatsu, L.G.Zimne, H. Hayashi, T. Sugiyama, A.A. Andreev

    Proceedings of the 5th Symposium Advanced Photon Processing and Measurement Technology     55 - 56  2001

  • Detection of Carbon and Cluster Parameter by Laser-Induced Plasms Line Radiation

    A.Andreev, T.Ueda

    IWFAC'2001'Fulluence and Atomic Clusters'in Saint-Petersburg     288 - 288  2001

  • Growth of strain-balanced InAsP-InP-InGaAs multiple quantum well structures for mid-infrared photo detectors CLEO/Pacific Rim

    Morio Wda, Shojiro Araki, takahiro Kudou, Toshitsugu Ueda

    CLEO/Pacific Rim/Ⅰ     526 - 527  2001

  • Particle Elements and Size Measurement Using LIB

    T.Ueda, M.Wakamatsu, H.Hayashi, T.Sugiyama, A.Andreev

    18th Sensor Symposium, May, 30     319 - 324  2001

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    M.Wada, S.Araki, T.Kudou, T.Umezawa, S.Nakajima, T.Ueda

    18th Sensor Symposium, May, 29     99 - 103  2001

  • In-situ Spectroscopic Measurement of Gas Using Tunable Lasers and InGaAs Photodiodes

    Tadashi Sugiyama, Toshitsugu Ueda, Morio Wada, Shinichi Nakajima

    18th Sensor Symposium, May, 29     105 - 108  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    A.Andreev, T.Ueda

    18th Sensor Symposium, May, 30     325 - 330  2001

  • Laser with SBS Pulse Compression for LIBS

    T.Ueda, V.E.Yashin, S.A.Chizhov, R.L.Sabirov, K.Lavrentev, A. Andreev, M.Wakamatsu, H.Hayashi, T.Sugiyama

    18th Sensor Symposium, May, 29     313 - 318  2001

  • Optical lithium targets for laser plasma lithography, SPIE 2001/.3/1

    Alexander Andreev, Toshitsugu Ueda, J.Limpouch

    Proc. SPIE , Emerging Lithographic Technologies V   4343   789 - 796  2001

    DOI

  • Laser Detection of the Parameters of Small Solid Particle Located in Air, Laser Optics Conference LO2000

    Alexander Andreev Toshitsugu Ueda, Muneaki Wakamatsu

    Proc. SPIE ,Laser Optics   4350   161 - 170  2001

    DOI

  • Spectroscopic detection of ammonia using diode-pumped difference-frequency generation

    Toshitsugu Ueda, Tadashi Sugiyama, Morio Wada, Shinichi Nakajima

    SPIE-photonic 2001, Proceedings of SPIE, Jan.24   4268   21 - 25  2001

    DOI

  • High Sensitive Quartz Crystal Microphone Using Micro-Machining Technology

    Toshitsugu Ueda, Fusao Kousaka, Daisuke Yamazaki, Nonori Hayashi

    Trns. IEE of Japan   121-E ( 12 ) 629 - 635  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    A. Andreev, T. Ueda

    Trns. IEE of Japan   121-E ( 11 ) 593 - 598  2001

    DOI

  • MOVPE成長法による大面積2.5μm InGaAsフォトダイオードの製作

    和田 守夫, 荒木 昌二郎, 工藤貴裕, 梅沢 俊匡, 中島眞一, 植田敏嗣

    2001年秋季応用物理学会学術講演会    2001

  • レーザーブレークダウン分光による微粒子成分・粒径計測

    植田敏嗣, 若松宗明, 林尚典 杉山直

    SICE学術講演会    2001

  • 可変波長レーザーを用いた気体のIn-situ計測

    杉山 直, 植田敏嗣, 和田 守夫, 中島眞

    SICE学術講演会    2001

  • LIBSによる微粒子計測の可能性

    植田敏嗣

    レーザーアブレーション調査専門委員会    2001

  • 中赤外QWIP用InAsP/Inp/InGaAs歪バランス多重量子井戸構造のMOVPE成長

    和田 守夫, 植田敏嗣, 荒木昌二郎, 工藤貴裕, 中島眞一, 梅沢 俊匡

    第48回応用物理学関係連合講演会     31 - 31  2001

  • 波長可変レーザーと高感度InGaAs光検出器によるin-situガス濃度計測

    杉山直, 植田敏嗣, 和田守男, 中島眞一

    レーザー学会第290回研究会     6 - 9  2001

  • LIBSによるナノ粒子計測

    植田敏嗣, 若松宗明, 杉山直

    第4回「フォトン計測・加工技術」ワークショップ     63 - 66  2001

  • 気体の超高感度in-situ計測

    杉山 直, 植田敏嗣, 和田守男, 中島眞一

    第4回「フォトン計測・加工技術」ワークショップ     59 - 62  2001

  • High-Sensitive Mesurement Technology for IR Spectroscopy

    Tadashi Sugiyama, Toshitsugu Ueda, Morio Wada, Shinichirou Nakajima, Toshimasa Umezawa

    Proceedings of The 5th Symposium Advanced Photon Processing and Mesurement Technology     57 - 58  2001

  • Development of In-situ Nono-Particle Measurement

    Toshitsugu Ueda, M. Wakamatsu, L.G.Zimne, H. Hayashi, T. Sugiyama, A.A. Andreev

    Proceedings of the 5th Symposium Advanced Photon Processing and Measurement Technology     55 - 56  2001

  • Detection of Carbon and Cluster Parameter by Laser-Induced Plasms Line Radiation

    A.Andreev, T.Ueda

    IWFAC'2001'Fulluence and Atomic Clusters'in Saint-Petersburg     288 - 288  2001

  • Growth of strain-balanced InAsP-InP-InGaAs multiple quantum well structures for mid-infrared photo detectors CLEO/Pacific Rim

    Morio Wda, Shojiro Araki, takahiro Kudou, Toshitsugu Ueda

    CLEO/Pacific Rim/Ⅰ     526 - 527  2001

  • Particle Elements and Size Measurement Using LIB

    T.Ueda, M.Wakamatsu, H.Hayashi, T.Sugiyama, A.Andreev

    18th Sensor Symposium, May, 30     319 - 324  2001

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    M.Wada, S.Araki, T.Kudou, T.Umezawa, S.Nakajima, T.Ueda

    18th Sensor Symposium, May, 29     99 - 103  2001

  • In-situ Spectroscopic Measurement of Gas Using Tunable Lasers and InGaAs Photodiodes

    Tadashi Sugiyama, Toshitsugu Ueda, Morio Wada, Shinichi Nakajima

    18th Sensor Symposium, May, 29     105 - 108  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    A.Andreev, T.Ueda

    18th Sensor Symposium, May, 30     325 - 330  2001

  • Laser with SBS Pulse Compression for LIBS

    T.Ueda, V.E.Yashin, S.A.Chizhov, R.L.Sabirov, K.Lavrentev, A. Andreev, M.Wakamatsu, H.Hayashi, T.Sugiyama

    18th Sensor Symposium, May, 29     313 - 318  2001

  • Optical lithium targets for laser plasma lithography, SPIE 2001/.3/1

    Alexander Andreev, Toshitsugu Ueda, J.Limpouch

    Proc. SPIE , Emerging Lithographic Technologies V   4343   789 - 796  2001

    DOI

  • Laser Detection of the Parameters of Small Solid Particle Located in Air, Laser Optics Conference LO2000

    Alexander Andreev Toshitsugu Ueda, Muneaki Wakamatsu

    Proc. SPIE ,Laser Optics   4350   161 - 170  2001

    DOI

  • Spectroscopic detection of ammonia using diode-pumped difference-frequency generation

    Toshitsugu Ueda, Tadashi Sugiyama, Morio Wada, Shinichi Nakajima

    SPIE-photonic 2001, Proceedings of SPIE, Jan.24   4268   21 - 25  2001

    DOI

  • 水晶マイクロマシニングを利用した高感度マイクロフォン

    植田敏嗣, 幸坂扶佐夫, 山崎大輔, 林尚典

    電気学会論文誌 E   121-E ( 12 ) 629 - 635  2001

    DOI

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    Er Andreev, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   121 ( 11 ) 593 - 598  2001

     View Summary

    The problem of small solid particle size and material detection is important for industrial and environmental applications. Previous investigations have shown the possibility of using the laser breakdown method to address the first issue
    the sensitivity of this method is a thousand times higher than that of conventional methods. However, for small particle sizes, the damage threshold of the solid target in this case is very close to the breakdown point of pure gas. After breakdown, there is a small volume of dense hot plasma that emits radiation. We analyzed this radiation especially at the late stage using an analytical model and simulation code, and found that the emission intensity varied depending on the laser type and plasma parameters including initial particle size. © 2001, The Institute of Electrical Engineers of Japan. All rights reserved.

    DOI

  • High-Sensitive Mesurement Technology for IR Spectroscopy

    Tadashi Sugiyama, Toshitsugu Ueda, Morio Wada, Shinichirou Nakajima, Toshimasa Umezawa

    Proceedings of The 5th Symposium Advanced Photon Processing and Mesurement Technology     57 - 58  2001

  • Development of In-situ Nono-Particle Measurement

    Toshitsugu Ueda, M. Wakamatsu, L.G.Zimne, H. Hayashi, T. Sugiyama, A.A. Andreev

    Proceedings of the 5th Symposium Advanced Photon Processing and Measurement Technology     55 - 56  2001

  • Detection of Carbon and Cluster Parameter by Laser-Induced Plasms Line Radiation

    A.Andreev, T.Ueda

    IWFAC'2001'Fulluence and Atomic Clusters'in Saint-Petersburg     288 - 288  2001

  • Growth of strain-balanced InAsP-InP-InGaAs multiple quantum well structures for mid-infrared photo detectors CLEO/Pacific Rim

    Morio Wda, Shojiro Araki, takahiro Kudou, Toshitsugu Ueda

    CLEO/Pacific Rim/Ⅰ     526 - 527  2001

  • Particle Elements and Size Measurement Using LIB

    T.Ueda, M.Wakamatsu, H.Hayashi, T.Sugiyama, A.Andreev

    18th Sensor Symposium, May, 30     319 - 324  2001

  • Development of InGaAs photodiodes for near-infrared spectroscopy

    M.Wada, S.Araki, T.Kudou, T.Umezawa, S.Nakajima, T.Ueda

    18th Sensor Symposium, May, 29     99 - 103  2001

  • In-situ Spectroscopic Measurement of Gas Using Tunable Lasers and InGaAs Photodiodes

    Tadashi Sugiyama, Toshitsugu Ueda, Morio Wada, Shinichi Nakajima

    18th Sensor Symposium, May, 29     105 - 108  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    A.Andreev, T.Ueda

    18th Sensor Symposium, May, 30     325 - 330  2001

  • Laser with SBS Pulse Compression for LIBS

    T.Ueda, V.E.Yashin, S.A.Chizhov, R.L.Sabirov, K.Lavrentev, A. Andreev, M.Wakamatsu, H.Hayashi, T.Sugiyama

    18th Sensor Symposium, May, 29     313 - 318  2001

  • Optical lithium targets for laser plasma lithography, SPIE 2001/.3/1

    Alexander Andreev, Toshitsugu Ueda, J.Limpouch

    Proc. SPIE , Emerging Lithographic Technologies V   4343   789 - 796  2001

    DOI

  • Laser Detection of the Parameters of Small Solid Particle Located in Air, Laser Optics Conference LO2000

    Alexander Andreev Toshitsugu Ueda, Muneaki Wakamatsu

    Proc. SPIE ,Laser Optics   4350   161 - 170  2001

    DOI

  • Spectroscopic detection of ammonia using diode-pumped difference-frequency generation

    Toshitsugu Ueda, Tadashi Sugiyama, Morio Wada, Shinichi Nakajima

    SPIE-photonic 2001, Proceedings of SPIE, Jan.24   4268   21 - 25  2001

    DOI

  • High Sensitive Quartz Crystal Microphone Using Micro-Machining Technology

    Toshitsugu Ueda, Fusao Kousaka, Daisuke Yamazaki, Nonori Hayashi

    Trns. IEE of Japan   121-E ( 12 ) 629 - 635  2001

  • Simulation of laser plasma emission characteristics of small solid particles in different gas atmospheres at various pressures

    Er Andreev, Toshitsugu Ueda

    IEEJ Transactions on Sensors and Micromachines   121 ( 11 ) 593 - 598  2001

     View Summary

    The problem of small solid particle size and material detection is important for industrial and environmental applications. Previous investigations have shown the possibility of using the laser breakdown method to address the first issue
    the sensitivity of this method is a thousand times higher than that of conventional methods. However, for small particle sizes, the damage threshold of the solid target in this case is very close to the breakdown point of pure gas. After breakdown, there is a small volume of dense hot plasma that emits radiation. We analyzed this radiation especially at the late stage using an analytical model and simulation code, and found that the emission intensity varied depending on the laser type and plasma parameters including initial particle size. © 2001, The Institute of Electrical Engineers of Japan. All rights reserved.

    DOI

  • Development of Pulse Laser for Laser Induced Breakdown

    Toshitsugu Ueda, Hironori Hayashi, Alexander A.Andreev, Muneaki Wakamatsua, Hiroyuki Hayashi, Tadashi Sugiyama

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22     24 - 25  2000

  • High-Sensitive Measurement Technology for IR Spectoroscopy

    Umezawa, Shinichi Nakajima, Shoujirou Araki, Takahiro Kudou

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22     22 - 23  2000

  • Laser Detection of the Parameters of Small Solid Particle in Gas Atmosphere

    Alexander Andreev, Toshitsugiu Ueda, Muneaki Wakamatsu

    Proc. SPIE , Laser Plasma Generation and Diagnostics   3935   139 - 148  2000

  • Interaction of Laser Radiation with Small Solid Particle in Air

    Alexander Andreev, Toshitsugu Ueda, Muneaki Wakamatsu, Hisanori Hayashi

    ECLM.     12 - 16  2000

  • Laser Plasma Radiation from Small Solid Particle in Gas Atmosphere

    A.Andreev, T.Ueda, H.Hayashi

    Proc. SPIE , Laser Plasma   3935   139 - 148  2000

  • High peak power pulse laser for laser induced breakdown

    T Ueda, M Wakamatsu, N Tomosada, H Hayashi, T Sugiyama, T Yagi, G Ohmae

    ADVANCED HIGH-POWER LASERS   3889   344 - 350  2000

     View Summary

    Using light (photons) as a means to measure various kinds of physical quantities in their normal environment has the advantage of real-time and precise measurement without interference from other objects. In the semiconductor process, for example, the measurement limit of particle size is down to 0.1 mu m and the measurement of elements that the particles are composed of is impossible. Presently, there is only one measuring instrument(1)) that can measure the elements and diameter of particles at the same time by putting particles in microwave induced He plasma. However, the minimum size with which particles of hydrocarbon material can be measured is limited to several mu m by this method. This method can not be applied to the measurement of sub-micron particles, which is important to the semiconductor process and for functional particles(2)).
    The Final goal of the research is to develop devices and systematization technology needed for the newly proposed particle measurement technology using(3)) laser induced breakdown (LIB). In particle Measurement using LIE, indispensable high peak power pulse laser (HPPL) for breakdown generation, ultraviolet fiber for passing fluorescence light and a high speed photo detection device having sub-micro second time resolution are needed(4)). Furthermore, it is necessary to develop systematization technology and obtain final system evaluation when using these device technologies.
    In this paper, we mainly report on the experimental results of High Peak Power Laser (HPPL) for LIE and it's basic consideration in the fiscal year 1999.

  • Diffusion in Zinc in InP, InAsP and InGaAs by the Metal-organic Vapor-phase Diffusion Technique

    Morio Wada, Youki Kudou, Toshitsugu Ueda, Katsutoshi Sakakibara, Shouji Araki

    Defects and Diffusion in Semiconductors   183-185   153 - 162  2000

  • Temperature Dependence of the Energy Gap in InAsyP1-y

    Morio Wada, Shoujiro Araki, Takahiro Kudo, Toshitsugu Ueda

    Applie Physics Leters   76 ( 19 ) 2722 - 2724  2000

    DOI

  • High Frequency and High Speed IC Inspection Probe Using Quartz Crystal Micri-Blance

    Toshitsugu Ueda, Nonori Hayashi, Tadashi Sugiyama

    Trns. IEE of Japan   120-E ( 4 ) 169 - 174  2000

  • レーザーブレークダウンによる微粒子計測

    植田敏嗣, 杉山 直, 林 尚典, 若松宗明, Alexander Andreev

    SICE学術講演会     26 - 28  2000

  • PPLNを用いた気体の吸収分光用可変レーザー

    植田敏嗣, 杉山 直, 林 尚典

    SICE学術講演会     26 - 27  2000

  • レーザーブレイクダウン用高ピークパワーパルスレーザー

    植田敏嗣, 若松宗明, 杉山 直

    レーザー学会277回研究会     22 - 26  2000

  • 微粒子成分・粒径計測の研究開発

    植田, 若松、A.Andreev, 林

    第3回「フォトン計測・加工技術」ワークショップ     31 - 34  2000

  • ガスの濃度成分計測技術の研究開発

    杉山, 和田, 中島, 梅沢, 荒木, 工藤, 植田

    第3回「フォトン計測・加工技術」ワークショップ     27 - 30  2000

  • Development of Pulse Laser for Laser Induced Breakdown

    Toshitsugu Ueda, Hironori Hayashi, Alexander A.Andreev, Muneaki Wakamatsua, Hiroyuki Hayashi, Tadashi Sugiyama

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22     24 - 25  2000

  • High-Sensitive Measurement Technology for IR Spectoroscopy

    Umezawa, Shinichi Nakajima, Shoujirou Araki, Takahiro Kudou

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22     22 - 23  2000

  • Laser Detection of the Parameters of Small Solid Particle in Gas Atmosphere

    Alexander Andreev, Toshitsugiu Ueda, Muneaki Wakamatsu

    Proc. SPIE , Laser Plasma Generation and Diagnostics   3935   139 - 148  2000

  • Interaction of Laser Radiation with Small Solid Particle in Air

    Alexander Andreev, Toshitsugu Ueda, Muneaki Wakamatsu, Hisanori Hayashi

    ECLM.     12 - 16  2000

  • Laser Plasma Radiation from Small Solid Particle in Gas Atmosphere

    A.Andreev, T.Ueda, H.Hayashi

    Proc. SPIE , Laser Plasma   3935   139 - 148  2000

  • High peak power pulse laser for laser induced breakdown

    T Ueda, M Wakamatsu, N Tomosada, H Hayashi, T Sugiyama, T Yagi, G Ohmae

    ADVANCED HIGH-POWER LASERS   3889   344 - 350  2000

     View Summary

    Using light (photons) as a means to measure various kinds of physical quantities in their normal environment has the advantage of real-time and precise measurement without interference from other objects. In the semiconductor process, for example, the measurement limit of particle size is down to 0.1 mu m and the measurement of elements that the particles are composed of is impossible. Presently, there is only one measuring instrument(1)) that can measure the elements and diameter of particles at the same time by putting particles in microwave induced He plasma. However, the minimum size with which particles of hydrocarbon material can be measured is limited to several mu m by this method. This method can not be applied to the measurement of sub-micron particles, which is important to the semiconductor process and for functional particles(2)).
    The Final goal of the research is to develop devices and systematization technology needed for the newly proposed particle measurement technology using(3)) laser induced breakdown (LIB). In particle Measurement using LIE, indispensable high peak power pulse laser (HPPL) for breakdown generation, ultraviolet fiber for passing fluorescence light and a high speed photo detection device having sub-micro second time resolution are needed(4)). Furthermore, it is necessary to develop systematization technology and obtain final system evaluation when using these device technologies.
    In this paper, we mainly report on the experimental results of High Peak Power Laser (HPPL) for LIE and it's basic consideration in the fiscal year 1999.

  • Diffusion in Zinc in InP, InAsP and InGaAs by the Metal-organic Vapor-phase Diffusion Technique

    Morio Wada, Youki Kudou, Toshitsugu Ueda, Katsutoshi Sakakibara, Shouji Araki

    Defects and Diffusion in Semiconductors   183-185   153 - 162  2000

  • Temperature Dependence of the Energy Gap in InAsyP1-y

    Morio Wada, Shoujiro Araki, Takahiro Kudo, Toshitsugu Ueda

    Applie Physics Leters   76 ( 19 ) 2722 - 2724  2000

    DOI

  • 水晶マイクロ天秤を使用した高速・高周波IC検査プローブ

    植田敏嗣, 林尚典, 杉山直

    電気学会論文誌 E   120-E ( 4 ) 169 - 174  2000

    DOI

  • Development of Pulse Laser for Laser Induced Breakdown

    Toshitsugu Ueda, Hironori Hayashi, Alexander A.Andreev, Muneaki Wakamatsua, Hiroyuki Hayashi, Tadashi Sugiyama

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22     24 - 25  2000

  • High-Sensitive Measurement Technology for IR Spectoroscopy

    Umezawa, Shinichi Nakajima, Shoujirou Araki, Takahiro Kudou

    The 4th Symposium on Advanced Photon Processing and Measurement Technologies, Nov., 22     22 - 23  2000

  • Laser Detection of the Parameters of Small Solid Particle in Gas Atmosphere

    Alexander Andreev, Toshitsugiu Ueda, Muneaki Wakamatsu

    Proc. SPIE , Laser Plasma Generation and Diagnostics   3935   139 - 148  2000

  • Interaction of Laser Radiation with Small Solid Particle in Air

    Alexander Andreev, Toshitsugu Ueda, Muneaki Wakamatsu, Hisanori Hayashi

    ECLM.     12 - 16  2000

  • Laser Plasma Radiation from Small Solid Particle in Gas Atmosphere

    A.Andreev, T.Ueda, H.Hayashi

    Proc. SPIE , Laser Plasma   3935   139 - 148  2000

  • High peak power pulse laser for laser induced breakdown

    T Ueda, M Wakamatsu, N Tomosada, H Hayashi, T Sugiyama, T Yagi, G Ohmae

    ADVANCED HIGH-POWER LASERS   3889   344 - 350  2000

     View Summary

    Using light (photons) as a means to measure various kinds of physical quantities in their normal environment has the advantage of real-time and precise measurement without interference from other objects. In the semiconductor process, for example, the measurement limit of particle size is down to 0.1 mu m and the measurement of elements that the particles are composed of is impossible. Presently, there is only one measuring instrument(1)) that can measure the elements and diameter of particles at the same time by putting particles in microwave induced He plasma. However, the minimum size with which particles of hydrocarbon material can be measured is limited to several mu m by this method. This method can not be applied to the measurement of sub-micron particles, which is important to the semiconductor process and for functional particles(2)).
    The Final goal of the research is to develop devices and systematization technology needed for the newly proposed particle measurement technology using(3)) laser induced breakdown (LIB). In particle Measurement using LIE, indispensable high peak power pulse laser (HPPL) for breakdown generation, ultraviolet fiber for passing fluorescence light and a high speed photo detection device having sub-micro second time resolution are needed(4)). Furthermore, it is necessary to develop systematization technology and obtain final system evaluation when using these device technologies.
    In this paper, we mainly report on the experimental results of High Peak Power Laser (HPPL) for LIE and it's basic consideration in the fiscal year 1999.

  • Diffusion in Zinc in InP, InAsP and InGaAs by the Metal-organic Vapor-phase Diffusion Technique

    Morio Wada, Youki Kudou, Toshitsugu Ueda, Katsutoshi Sakakibara, Shouji Araki

    Defects and Diffusion in Semiconductors   183-185   153 - 162  2000

  • Temperature Dependence of the Energy Gap in InAsyP1-y

    Morio Wada, Shoujiro Araki, Takahiro Kudo, Toshitsugu Ueda

    Applie Physics Leters   76 ( 19 ) 2722 - 2724  2000

    DOI

  • High Frequency and High Speed IC Inspection Probe Using Quartz Crystal Micri-Blance

    Toshitsugu Ueda, Nonori Hayashi, Tadashi Sugiyama

    Trns. IEE of Japan   120-E ( 4 ) 169 - 174  2000

  • Particle elements and Diameter Measurement Technologies

    Toshitsugu UEDA, Hironori HAYASHI, Alexander A.Andreev, Muneaki WAKAMATSU, Hiroyuki KUDOU, Tadashi SUGIYA

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8     142 - 145  1999

  • Higt-Sensitive Measurement Technology for IR Spectroscopy

    Morio Wada, Tadashi Sugiyama, Toshitsugu Ueda, Toshimasa Umezawa, Shinichi Nakajima, Shoujirou Araki, Takahiro Kudou

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8     150 - 150  1999

  • In-situ Status measurment

    T.Ueda, Y.Okamoto

    The 2st Symposium on Advanced Photon Processing and Measurement Technologies     38 - 44  1999

  • MOVPE成長法による低暗電流・高感度2.5μm InGaAsフォトダイオードの製作

    和田 守夫, 梅沢 俊匡, 荒木昌二郎, 工藤貴裕, 中島眞一, 植田敏嗣

    1999年秋季第60回応用物理学会学術講演会、講演予稿集     983 - 983  1999

  • n-InpへのZnアクセプタ拡散のキャリァ濃度依存症

    和田 守夫, 荒木昌二郎, 工藤 貴裕, 植田敏嗣

    第46回応用物理学会学術講演会、講演予稿集     1377 - 1377  1999

  • レーザーブレークダウン(L BD)による微粒子計測

    植田 敏嗣, 林, 尚典 Mixing, Xiang, Cai 杉山

    Sice'99, July28-30     645 - 645  1999

  • 1-2.6μm 高感度InGaAs近赤外検出素子

    和田守夫, 荒木昌二郎, 工藤貴裕, 植田敏嗣

    第46回応用物理学会春期講演会     1377 - 1377  1999

  • レーザーブレークダウン用パルスレーザー

    植田敏嗣, 友定伸浩, 林尚典, 杉山直, 八木隆志

    第46回応用物理学会春期講演会     1150 - 1150  1999

  • In-situ状態計測-レーザーブレークダウン用マイクロチップレーザー

    植田敏嗣

    レーザー熱加工研究会誌   16 ( 3 ) 322 - 323  1999

  • 半導体製造工程におけるIn-situ状態計測、

    植田敏嗣, 岡本恭典, 永井聡

    レーザー学会誌   27 ( 10 ) 676 - 681  1999

    DOI CiNii

  • レーザーブレークダウン校正装置の試作

    植田敏嗣, 林尚典, 杉山直

    第2回「フォトン計測・加工技術」ワークショップ     71 - 74  1999

  • ガス濃度計測用赤外光検出器

    和田, 植田敏嗣, 杉山直, 中島真一, 梅沢俊匡, 浦井恭子, 荒木昌二郎, 工藤貴裕

    第2回「フォトン計測・加工」ワークショップ     67 - 70  1999

  • Particle elements and Diameter Measurement Technologies

    Toshitsugu UEDA, Hironori HAYASHI, Alexander A.Andreev, Muneaki WAKAMATSU, Hiroyuki KUDOU, Tadashi SUGIYA

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8     142 - 145  1999

  • Higt-Sensitive Measurement Technology for IR Spectroscopy

    Morio Wada, Tadashi Sugiyama, Toshitsugu Ueda, Toshimasa Umezawa, Shinichi Nakajima, Shoujirou Araki, Takahiro Kudou

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8     150 - 150  1999

  • In-situ Status measurment

    T.Ueda, Y.Okamoto

    The 2st Symposium on Advanced Photon Processing and Measurement Technologies     38 - 44  1999

  • Particle elements and Diameter Measurement Technologies

    Toshitsugu UEDA, Hironori HAYASHI, Alexander A.Andreev, Muneaki WAKAMATSU, Hiroyuki KUDOU, Tadashi SUGIYA

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8     142 - 145  1999

  • Higt-Sensitive Measurement Technology for IR Spectroscopy

    Morio Wada, Tadashi Sugiyama, Toshitsugu Ueda, Toshimasa Umezawa, Shinichi Nakajima, Shoujirou Araki, Takahiro Kudou

    The 3rd Symposium on Advanced Photon Processing and Measurement Technologies, Dec., 8     150 - 150  1999

  • In-situ Status measurment

    T.Ueda, Y.Okamoto

    The 2st Symposium on Advanced Photon Processing and Measurement Technologies     38 - 44  1999

  • In-situ Status measurment Technology

    T.Ueda, Y.Okamoto

    The 1st Symposium on Advanced Photon Processing and Measurement Technologies     25 - 28  1998

  • 水晶のマイクロ加工とその応用

    植田敏嗣

    第27回EMシンポジウム     21 - 30  1998

  • ガス濃度計測用赤外光検出器

    和田, 植田敏嗣, 杉山直, 中島真一, 梅沢俊匡, 浦井恭子, 荒木昌二郎, 工藤貴裕

    第1回「フォトン計測・加工」ワークショップ     37 - 40  1998

  • レーザーブレークダウンによる微粒子計測

    植田敏嗣, 林尚典, 杉山直

    第1回「フォトン計測・加工技術」ワークショップ     29 - 36  1998

  • In-situ Status measurment Technology

    T.Ueda, Y.Okamoto

    The 1st Symposium on Advanced Photon Processing and Measurement Technologies     25 - 28  1998

  • In-situ Status measurment Technology

    T.Ueda, Y.Okamoto

    The 1st Symposium on Advanced Photon Processing and Measurement Technologies     25 - 28  1998

  • マイクロ天秤を用いたEOプローバの基本特性

    植田敏嗣, 及川真志, 杉山直, 小山清明, 山崎勉, 箕作次郎, 林尚典

    第25回EMシンポジウム     65 - 68  1996

  • マイクロ天秤を用いたEOプローバ

    植田敏嗣, 杉山直, 小山清明, 林尚典

    横河技報   40 ( 3 ) 87 - 90  1996

  • A QUARTZ-CRYSTAL MICROBALANCE-TYPE ODOR SENSOR USING PVC-BLENDED LIPID-MEMBRANE

    G MATSUNO, D YAMAZAKI, E OGITA, K MIKURIYA, T UEDA

    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT   44 ( 3 ) 739 - 742  1995.06

     View Summary

    A new odor sensor was developed, based on the quartz crystal microbalance method, Newly developed PVC-blended lipid membrane was used as odorant-adsorptive membrane. It was deposited on the surface of a quartz crystal resonator, with which the mass increase induced by the adsorption of odorants onto the membrane was measured as the resonant frequency decreased.
    Sensor evaluation was performed, and it was shown that the sensor had a sensitivity of 1 ppm and a response speed of less than 5 s. for amylacetate gas, which are very close to those of human beings and much better than conventional oxide semiconductor-type sensors or quartz crystal microbalance-type ones with other membranes, The odor selectivity of the sensor was also proved to be similar to that of human beings. Finally, identification of six odorants was performed by comparing the output patterns of five sensors with different membrane lipid compositions.

    DOI CiNii

  • A QUARTZ-CRYSTAL MICROBALANCE-TYPE ODOR SENSOR USING PVC-BLENDED LIPID-MEMBRANE

    G MATSUNO, D YAMAZAKI, E OGITA, K MIKURIYA, T UEDA

    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT   44 ( 3 ) 739 - 742  1995.06

     View Summary

    A new odor sensor was developed, based on the quartz crystal microbalance method, Newly developed PVC-blended lipid membrane was used as odorant-adsorptive membrane. It was deposited on the surface of a quartz crystal resonator, with which the mass increase induced by the adsorption of odorants onto the membrane was measured as the resonant frequency decreased.
    Sensor evaluation was performed, and it was shown that the sensor had a sensitivity of 1 ppm and a response speed of less than 5 s. for amylacetate gas, which are very close to those of human beings and much better than conventional oxide semiconductor-type sensors or quartz crystal microbalance-type ones with other membranes, The odor selectivity of the sensor was also proved to be similar to that of human beings. Finally, identification of six odorants was performed by comparing the output patterns of five sensors with different membrane lipid compositions.

    DOI CiNii

  • A QUARTZ-CRYSTAL MICROBALANCE-TYPE ODOR SENSOR USING PVC-BLENDED LIPID-MEMBRANE

    G MATSUNO, D YAMAZAKI, E OGITA, K MIKURIYA, T UEDA

    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT   44 ( 3 ) 739 - 742  1995.06

     View Summary

    A new odor sensor was developed, based on the quartz crystal microbalance method, Newly developed PVC-blended lipid membrane was used as odorant-adsorptive membrane. It was deposited on the surface of a quartz crystal resonator, with which the mass increase induced by the adsorption of odorants onto the membrane was measured as the resonant frequency decreased.
    Sensor evaluation was performed, and it was shown that the sensor had a sensitivity of 1 ppm and a response speed of less than 5 s. for amylacetate gas, which are very close to those of human beings and much better than conventional oxide semiconductor-type sensors or quartz crystal microbalance-type ones with other membranes, The odor selectivity of the sensor was also proved to be similar to that of human beings. Finally, identification of six odorants was performed by comparing the output patterns of five sensors with different membrane lipid compositions.

    DOI CiNii

  • A PIEZOELECTRICALLY OPERATED OPTICAL CHOPPER BY QUARTZ MICROMACHINING

    H TOSHIYOSHI, H FUJITA, T UEDA

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   4 ( 1 ) 3 - 9  1995.03

     View Summary

    The fabrication and operation of a piezoelectrically operated monolithic optical chopper (6 mm x 7 mm) are reported. The chopper is made by anisotropic etching of a Z-cut quartz wafer (100 mu m thick) in an aqueous solution of NH4HF2. Newly developed piezoelectric operating scheme using meandering electrodes on a flexible quartz suspension (10 similar to 50 mu m wide, 2 mm long) was found to produce large displacement (deforming ratio 3% by size) at a resonant frequency. Typical operational parameters are the amplitude of oscillation of 55 mu m (peak to peak) at a driving voltage of 100 V and the chopping frequency in the 2-5 kHz range depending on the suspension width and length. The resonant frequency is accurately calculated when the cross-sectional profile of the suspension is taken into account, We also successfully demonstrated a chopping operation on a collimated laser beam with the chopper.

    DOI

  • A PIEZOELECTRICALLY OPERATED OPTICAL CHOPPER BY QUARTZ MICROMACHINING

    H TOSHIYOSHI, H FUJITA, T UEDA

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   4 ( 1 ) 3 - 9  1995.03

     View Summary

    The fabrication and operation of a piezoelectrically operated monolithic optical chopper (6 mm x 7 mm) are reported. The chopper is made by anisotropic etching of a Z-cut quartz wafer (100 mu m thick) in an aqueous solution of NH4HF2. Newly developed piezoelectric operating scheme using meandering electrodes on a flexible quartz suspension (10 similar to 50 mu m wide, 2 mm long) was found to produce large displacement (deforming ratio 3% by size) at a resonant frequency. Typical operational parameters are the amplitude of oscillation of 55 mu m (peak to peak) at a driving voltage of 100 V and the chopping frequency in the 2-5 kHz range depending on the suspension width and length. The resonant frequency is accurately calculated when the cross-sectional profile of the suspension is taken into account, We also successfully demonstrated a chopping operation on a collimated laser beam with the chopper.

    DOI

  • A PIEZOELECTRICALLY OPERATED OPTICAL CHOPPER BY QUARTZ MICROMACHINING

    H TOSHIYOSHI, H FUJITA, T UEDA

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   4 ( 1 ) 3 - 9  1995.03

     View Summary

    The fabrication and operation of a piezoelectrically operated monolithic optical chopper (6 mm x 7 mm) are reported. The chopper is made by anisotropic etching of a Z-cut quartz wafer (100 mu m thick) in an aqueous solution of NH4HF2. Newly developed piezoelectric operating scheme using meandering electrodes on a flexible quartz suspension (10 similar to 50 mu m wide, 2 mm long) was found to produce large displacement (deforming ratio 3% by size) at a resonant frequency. Typical operational parameters are the amplitude of oscillation of 55 mu m (peak to peak) at a driving voltage of 100 V and the chopping frequency in the 2-5 kHz range depending on the suspension width and length. The resonant frequency is accurately calculated when the cross-sectional profile of the suspension is taken into account, We also successfully demonstrated a chopping operation on a collimated laser beam with the chopper.

    DOI

  • A Piezoelectric & Electrostatic Actuator to Generate Pseudo-Static Displacement from Resonant Oscillation

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda

    4th Japan Int., SAMPE Symposium & Exhaibition, JISSE-4, Sep.25-28     1070 - 1075  1995

  • A Piezoelectric Pseudo-Static Actuator for Large Displacement under AC Voltage Operation

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    The 8th International Conference on Solid-State Sensors and Actuators Transducer'95, Stockholm, Sweden, Jun.25-29     92 - 95  1995

  • An Electro statically Operated Torsion Mirror for Optical Switching Device"

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    The 8th International Conference on Solid-State Sensors and Actuators(TRANSDUCERS'95), Stockholm, Sweden, Jun.     25 - 29  1995

  • マイクロ天秤を用いたEOプローバ

    植田敏嗣, 杉山直, 小山清明, 山崎勉, 林尚典

    第24回EMシンポジウム     33 - 38  1995

  • A Piezoelectric & Electrostatic Actuator to Generate Pseudo-Static Displacement from Resonant Oscillation

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda

    4th Japan Int., SAMPE Symposium & Exhaibition, JISSE-4, Sep.25-28     1070 - 1075  1995

  • A Piezoelectric Pseudo-Static Actuator for Large Displacement under AC Voltage Operation

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    The 8th International Conference on Solid-State Sensors and Actuators Transducer'95, Stockholm, Sweden, Jun.25-29     92 - 95  1995

  • An Electro statically Operated Torsion Mirror for Optical Switching Device"

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    The 8th International Conference on Solid-State Sensors and Actuators(TRANSDUCERS'95), Stockholm, Sweden, Jun.     25 - 29  1995

  • A Piezoelectric & Electrostatic Actuator to Generate Pseudo-Static Displacement from Resonant Oscillation

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda

    4th Japan Int., SAMPE Symposium & Exhaibition, JISSE-4, Sep.25-28     1070 - 1075  1995

  • A Piezoelectric Pseudo-Static Actuator for Large Displacement under AC Voltage Operation

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    The 8th International Conference on Solid-State Sensors and Actuators Transducer'95, Stockholm, Sweden, Jun.25-29     92 - 95  1995

  • An Electro statically Operated Torsion Mirror for Optical Switching Device"

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    The 8th International Conference on Solid-State Sensors and Actuators(TRANSDUCERS'95), Stockholm, Sweden, Jun.     25 - 29  1995

  • A Self-excited Chopper made by Quartz Micromachining and its Application to an Optical Sensor

    Hiroshi Toshiyoshi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    Proc.7th IEEE Workshop on Micro Electro Mechanical Systems, MEMS'94, Jan.25-28     325 - 330  1994

  • A Quartz Crystal Microbalance-type Oder Sensor Using PVC-blended Lipid Membrane

    Gen Matsuno, Daisuke Yamazaki, Eiji Ogita, Toshitsugu Ueda

    IMTC'94 Hamamatsu     304 - 307  1994

  • A Piezoelectric Quartz Micro actuator for a Large Static Displacement

    H.Toshiyoshi, D.Kobayashi, H.Fujita, T.Ueda

    Jpn.J.Appl.Phys Vol.33   33 ( 12B ) L1806 - L1808  1994

    DOI CiNii

  • 非線型振動を利用した擬スタティック変位アクチュエータ

    年吉洋, 小林大, 藤田博之, 植田敏嗣

    マイクロ理工学研究会、早稲田大学     49 - 54  1994

  • 水晶基板による圧電駆動型アクチュエータ

    年吉洋, 藤田博之, 植田敏嗣

    電気学会第23回EMシンポジウム     37 - 42  1994

  • 水晶のマイクロマシニングによるセンサ

    植田敏嗣

    超音波TECHNO4月号     45 - 49  1994

  • 非線形振動を利用した擬スタティック変位アクチュエータ

    年吉洋, 小林大, 藤田博之, 植田敏嗣

    マイクロ理工学研究会・マイクロマシーニング研究会 合同研究会     49 - 54  1994

  • A Self-excited Chopper made by Quartz Micromachining and its Application to an Optical Sensor

    Hiroshi Toshiyoshi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    Proc.7th IEEE Workshop on Micro Electro Mechanical Systems, MEMS'94, Jan.25-28     325 - 330  1994

  • A Quartz Crystal Microbalance-type Oder Sensor Using PVC-blended Lipid Membrane

    Gen Matsuno, Daisuke Yamazaki, Eiji Ogita, Toshitsugu Ueda

    IMTC'94 Hamamatsu     304 - 307  1994

  • A Piezoelectric Quartz Micro actuator for a Large Static Displacement

    H.Toshiyoshi, D.Kobayashi, H.Fujita, T.Ueda

    Jpn.J.Appl.Phys Vol.33   33 ( 12B ) L1806 - L1808  1994

    DOI CiNii

  • A Self-excited Chopper made by Quartz Micromachining and its Application to an Optical Sensor

    Hiroshi Toshiyoshi, Hiroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    Proc.7th IEEE Workshop on Micro Electro Mechanical Systems, MEMS'94, Jan.25-28     325 - 330  1994

  • A Quartz Crystal Microbalance-type Oder Sensor Using PVC-blended Lipid Membrane

    Gen Matsuno, Daisuke Yamazaki, Eiji Ogita, Toshitsugu Ueda

    IMTC'94 Hamamatsu     304 - 307  1994

  • A Piezoelectric Quartz Micro actuator for a Large Static Displacement

    H.Toshiyoshi, D.Kobayashi, H.Fujita, T.Ueda

    Jpn.J.Appl.Phys Vol.33   33 ( 12B ) L1806 - L1808  1994

    DOI CiNii

  • A Pezoelectrically Opearated Chopper by Quartz Micromachining

    Hiroshi Toshiyoshi, Hroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    The 7th International Conference on Solid-State Sensors and Actuators, Transducer'93, Yokohama Japan, Jun.7-10     7 - 10  1993

  • PIEZOELECTRICALLY OPERATED ACTUATORS BY QUARTZ MICROMACHINING FOR OPTICAL APPLICATION

    H TOSHIYOSHI, H FUJITA, T KAWAI, T UEDA

    MICRO ELECTRO MECHANICAL SYSTEMS, PROCEEDINGS     133 - 138  1993

  • A Galvanometer Using Qurtz Micromachining

    Naoki Sugiyama, Daisuke Yamazaki, Toshitsugu Ueda

    Transaction of Instrument and Control Engineers   29 ( 9 ) 647 - 652  1993

    DOI

  • 圧電駆動型水晶マイクロアクチュエータ

    年吉洋, 藤田博之, 植田敏嗣

    1993年秋季第54回応用物理学会学術講演会     131 - 131  1993

  • A Pezoelectrically Opearated Chopper by Quartz Micromachining

    Hiroshi Toshiyoshi, Hroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    The 7th International Conference on Solid-State Sensors and Actuators, Transducer'93, Yokohama Japan, Jun.7-10     7 - 10  1993

  • PIEZOELECTRICALLY OPERATED ACTUATORS BY QUARTZ MICROMACHINING FOR OPTICAL APPLICATION

    H TOSHIYOSHI, H FUJITA, T KAWAI, T UEDA

    MICRO ELECTRO MECHANICAL SYSTEMS, PROCEEDINGS     133 - 138  1993

  • 水晶のマイクロマシニングによるガルバノメータ

    杉山尚樹, 山崎大輔, 植田敏嗣

    計測自動制御学会論文集   29 ( 9 ) 647 - 652  1993

    DOI

  • A Pezoelectrically Opearated Chopper by Quartz Micromachining

    Hiroshi Toshiyoshi, Hroyuki Fujita, Takashi Kawai, Toshitsugu Ueda

    The 7th International Conference on Solid-State Sensors and Actuators, Transducer'93, Yokohama Japan, Jun.7-10     7 - 10  1993

  • PIEZOELECTRICALLY OPERATED ACTUATORS BY QUARTZ MICROMACHINING FOR OPTICAL APPLICATION

    H TOSHIYOSHI, H FUJITA, T KAWAI, T UEDA

    MICRO ELECTRO MECHANICAL SYSTEMS, PROCEEDINGS     133 - 138  1993

  • A Galvanometer Using Qurtz Micromachining

    Naoki Sugiyama, Daisuke Yamazaki, Toshitsugu Ueda

    Transaction of Instrument and Control Engineers   29 ( 9 ) 647 - 652  1993

    DOI

  • MEASUREMENT OF ABSOLUTE DISTANCE EMPLOYING A TUNABLE CW DYE-LASER

    K IKEZAWA, K ISOZAKI, E OGITA, T UEDA

    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT   41 ( 1 ) 36 - 39  1992.02

     View Summary

    With a tunable CW dye laser oscillating in a single longitudinal mode, measurement of an absolute distance is demonstrated with the method of excess fractions. Five beams which have different wavelengths are emitted sequentially from the dye laser, and the interferometric phase is measured for each wavelength. An interferometric order number for a wavelength can be calculated from values of wavelengths and phases. Then a precise value of length is obtained. This method is similar to measuring distances by using group delay as used in VLBI and microwave ranging. The measured accuracy was within +/- 8.8 nm between 0 and 10 mm (at an absolute distance of 0.1-10.1 mm). This demonstration that presents accuracy to the order of nanometers over a range of several millimeters is regarded as the first in the world.

    DOI CiNii

  • MEASUREMENT OF ABSOLUTE DISTANCE EMPLOYING A TUNABLE CW DYE-LASER

    K IKEZAWA, K ISOZAKI, E OGITA, T UEDA

    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT   41 ( 1 ) 36 - 39  1992.02

     View Summary

    With a tunable CW dye laser oscillating in a single longitudinal mode, measurement of an absolute distance is demonstrated with the method of excess fractions. Five beams which have different wavelengths are emitted sequentially from the dye laser, and the interferometric phase is measured for each wavelength. An interferometric order number for a wavelength can be calculated from values of wavelengths and phases. Then a precise value of length is obtained. This method is similar to measuring distances by using group delay as used in VLBI and microwave ranging. The measured accuracy was within +/- 8.8 nm between 0 and 10 mm (at an absolute distance of 0.1-10.1 mm). This demonstration that presents accuracy to the order of nanometers over a range of several millimeters is regarded as the first in the world.

    DOI CiNii

  • MEASUREMENT OF ABSOLUTE DISTANCE EMPLOYING A TUNABLE CW DYE-LASER

    K IKEZAWA, K ISOZAKI, E OGITA, T UEDA

    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT   41 ( 1 ) 36 - 39  1992.02

     View Summary

    With a tunable CW dye laser oscillating in a single longitudinal mode, measurement of an absolute distance is demonstrated with the method of excess fractions. Five beams which have different wavelengths are emitted sequentially from the dye laser, and the interferometric phase is measured for each wavelength. An interferometric order number for a wavelength can be calculated from values of wavelengths and phases. Then a precise value of length is obtained. This method is similar to measuring distances by using group delay as used in VLBI and microwave ranging. The measured accuracy was within +/- 8.8 nm between 0 and 10 mm (at an absolute distance of 0.1-10.1 mm). This demonstration that presents accuracy to the order of nanometers over a range of several millimeters is regarded as the first in the world.

    DOI CiNii

  • A New two-color pyrometer using optical fibers, Temperature

    M.Watari, T.Ueda, M.Yamamoto

    American Institute of Physics   6   751 - 755  1992

  • Temperature Sensor Using Quartz Tuning-Fork Resonator, Temperature

    Toshitsugu Ueda, Daisuke Yamazaki, Fusao Kohsaka, Toshio Iino

    American Institute of Physics, Vol.6   6   1255 - 1260  1992

  • 収束イオンビームの資料吸収電流画像

    岸正, 植田敏嗣

    1992年秋期応用物理学会学術講演会    1992

  • 水晶のマイクロマシニングによる光シャッタ

    年吉洋, 藤田博之, 植田敏嗣

    電気学会 産業計測制御研究会、資料ⅡC-92-16     31 - 36  1992

  • Volt Image Measurement for LSI Analysis

    T. Kishi, T.Ueda

    SICE92     149 - 150  1992

  • 水晶振動子式PVCブレンド脂質膜においセンサ

    松野玄, 山崎大輔, 荻田英二, 植田敏嗣

    第22回EMシンポジウム     13 - 18  1992

  • アブソリュート則長器

    池澤克也, 磯崎克巳, 荻田英治, 植田敏嗣

    横河技報   36 ( 3 ) 105 - 108  1992

  • 水晶振動子式PVCブレンド脂質膜においセンサ

    松野玄, 山崎大輔, 荻田英二, 植田敏嗣

    電子回路研究会資料ETC-92-39     49 - 52  1992

  • 水晶のマイクロマシニングによる光シャッタ

    年吉洋, 藤田博之, 河合高志, 植田敏嗣

    電気学会 産業計測制御研究会 資料 IIC-92-16     31 - 36  1992

  • マイクロマシニングによる水晶光スキャナ

    植田敏嗣, 山崎大輔, 杉山尚樹

    OPTONICS   ( 9 ) 73 - 79  1992

  • 水晶のマイクロ加工技術を利用した高安定水晶発振器

    山崎, 小宮, 稲垣, 上原, 植田

    機能EM回路デバイス調査専門委員会資料     4 - 11  1992

  • A New two-color pyrometer using optical fibers, Temperature

    M.Watari, T.Ueda, M.Yamamoto

    American Institute of Physics   6   751 - 755  1992

  • Temperature Sensor Using Quartz Tuning-Fork Resonator, Temperature

    Toshitsugu Ueda, Daisuke Yamazaki, Fusao Kohsaka, Toshio Iino

    American Institute of Physics, Vol.6   6   1255 - 1260  1992

  • A New two-color pyrometer using optical fibers, Temperature

    M.Watari, T.Ueda, M.Yamamoto

    American Institute of Physics   6   751 - 755  1992

  • Temperature Sensor Using Quartz Tuning-Fork Resonator, Temperature

    Toshitsugu Ueda, Daisuke Yamazaki, Fusao Kohsaka, Toshio Iino

    American Institute of Physics, Vol.6   6   1255 - 1260  1992

  • A Quartz Galvanometer For Optical Scanning in a Laser Printer Application

    Naoki Sugiyama, Daisuke Yamzaki, Toshitsugu Ueda

    TRANSDUCER'91 Proceedings of the 8th International Conference on Solid-State Sensors and Actuators     734 - 737  1991

  • Development of a Wavelength-Stabilized Light Source with a Laser Diode

    Katsumi Ikezawa, Katsumi Isozaki, Toshitsugu Ueda, Yoshihiko Tachikawa, Maharu Watari

    Trns. IEE of Japan   111-C ( 9 ) 470 - 476  1991

    DOI

  • 波長レーザーを用いたアブソリュート測長

    小杉泰仁, 池澤克哉, 磯崎克巳, 荻田英治, 植田敏嗣

    SICE 91     741 - 742  1991

  • 共焦点光学系における深さ方向分解能の検討

    又野由美子, 田名網健雄, 御厨健太, 植田敏嗣

    SICE 91     689 - 690  1991

  • 音叉振動子を用いた水晶温度センサ

    植田敏嗣, 幸坂扶佐夫, 山崎大輔

    計測自動制御学会創立30周年講演会     33 - 38  1991

  • A Quartz Galvanometer For Optical Scanning in a Laser Printer Application

    Naoki Sugiyama, Daisuke Yamzaki, Toshitsugu Ueda

    TRANSDUCER'91 Proceedings of the 8th International Conference on Solid-State Sensors and Actuators     734 - 737  1991

  • 波長安定化半導体レーザ光源の開発

    池沢克哉, 磯崎克己, 荻田英二, 植田敏嗣, 立川義彦, 渡正博

    電気学会論文誌C   111-C ( 9 ) 470 - 476  1991

    DOI

  • A Quartz Galvanometer For Optical Scanning in a Laser Printer Application

    Naoki Sugiyama, Daisuke Yamzaki, Toshitsugu Ueda

    TRANSDUCER'91 Proceedings of the 8th International Conference on Solid-State Sensors and Actuators     734 - 737  1991

  • Development of a Wavelength-Stabilized Light Source with a Laser Diode

    Katsumi Ikezawa, Katsumi Isozaki, Toshitsugu Ueda, Yoshihiko Tachikawa, Maharu Watari

    Trns. IEE of Japan   111-C ( 9 ) 470 - 476  1991

    DOI

  • REVOLUTION COUNTER USING MAGNETIC-BUBBLE DEVICE FOR MULTITURN ABSOLUTE ENCODER

    F KOHSAKA, T IINO, Y KUDOU, Y SAKAMAKAI, T UEDA

    SENSORS AND ACTUATORS A-PHYSICAL   22 ( 1-3 ) 803 - 806  1990.03

    DOI CiNii

  • REVOLUTION COUNTER USING MAGNETIC-BUBBLE DEVICE FOR MULTITURN ABSOLUTE ENCODER

    F KOHSAKA, T IINO, Y KUDOU, Y SAKAMAKAI, T UEDA

    SENSORS AND ACTUATORS A-PHYSICAL   22 ( 1-3 ) 803 - 806  1990.03

    DOI CiNii

  • REVOLUTION COUNTER USING MAGNETIC-BUBBLE DEVICE FOR MULTITURN ABSOLUTE ENCODER

    F KOHSAKA, T IINO, Y KUDOU, Y SAKAMAKAI, T UEDA

    SENSORS AND ACTUATORS A-PHYSICAL   22 ( 1-3 ) 803 - 806  1990.03

    DOI CiNii

  • Development of a wavelength-Stabilized Light Source with a Laser Diode

    Eiji Ogita, Katumi Isozaki, Katsuya Ikezawa, Toshitsugu Ueda

    YOKOGAWA Technical Report English Edition   ( 10 ) 27 - 31  1990

  • Multi-turn Absolute Encoder Using Special Filter

    Fusao Kohsaka, Toshio Iino, Kunio Kazami

    JSME International Journal, SeriesⅢ   33 ( 1 ) 94 - 99  1990

    DOI

  • レーザプリンタ用水晶光スキャナ(2)体外部振動特性の改善

    杉山尚樹, 山崎大輔, 幸坂扶佐夫, 植田敏嗣

    SICE 90     451 - 452  1990

  • 水晶のマイクロ加工とその応用

    植田敏嗣

    精密工学会自動組立専門委員会、研究例会講演前刷集     17 - 22  1990

  • マイクロマシニング技術による水晶デバイス

    植田敏嗣, 山崎大輔, 杉山尚樹

    月刊 Semiconductor World     206 - 211  1990

  • レーザプリンタ用水晶光スキャナ

    杉山尚樹, 山崎大輔, 幸坂扶佐夫, 植田敏嗣

    第19回EMシンポジウム     13 - 18  1990

  • Development of a wavelength-Stabilized Light Source with a Laser Diode

    Eiji Ogita, Katumi Isozaki, Katsuya Ikezawa, Toshitsugu Ueda

    YOKOGAWA Technical Report English Edition   ( 10 ) 27 - 31  1990

  • Multi-turn Absolute Encoder Using Special Filter

    Fusao Kohsaka, Toshio Iino, Kunio Kazami

    JSME International Journal, SeriesⅢ   33 ( 1 ) 94 - 99  1990

    DOI

  • Development of a wavelength-Stabilized Light Source with a Laser Diode

    Eiji Ogita, Katumi Isozaki, Katsuya Ikezawa, Toshitsugu Ueda

    YOKOGAWA Technical Report English Edition   ( 10 ) 27 - 31  1990

  • Multi-turn Absolute Encoder Using Special Filter

    Fusao Kohsaka, Toshio Iino, Kunio Kazami

    JSME International Journal, SeriesⅢ   33 ( 1 ) 94 - 99  1990

    DOI

  • Development of a Stabillized Optical Source with a Laser Diode,

    Katsumi Isozaki, Masahiro Watari, Eigi Ogita, Katsuya Ikezawa, Toshitsugu Ueda

    SPIE, Laser Interferometory   1162   99 - 106  1989

  • Revolution Counter Using Magnetic Babble Device for Multi-Turn Absolute Encoder

    Fusao Kohsaka, Toshio Iino, Yoshiaki Kudo, Yasuhiro Sakamaki, Toshitsugu Ueda

    TRANSDUCER'89, Proceedings of the 5th International Conference on Solid-State Sensors and Actuators     808 - 806  1989

    DOI

  • レーザプリンタ用水晶光スキャナ(2)体外部振動特性の改善

    杉山尚樹, 山崎大輔, 幸坂扶佐夫, 植田敏嗣

    SICE 89     581 - 582  1989

  • 波長安定化半導体レーザ光源の開発

    磯崎克己, 渡正博, 荻田英二, 池沢克哉, 植田敏嗣

    第18回EMシンポジウム     11 - 19  1989

  • 波長安定化半導体レーザ光源の開発

    荻田英二, 磯崎克己, 池沢克哉, 植田敏嗣

    横河技報   33 ( 4 ) 229 - 232  1989

  • Development of a Stabillized Optical Source with a Laser Diode,

    Katsumi Isozaki, Masahiro Watari, Eigi Ogita, Katsuya Ikezawa, Toshitsugu Ueda

    SPIE, Laser Interferometory   1162   99 - 106  1989

  • Revolution Counter Using Magnetic Babble Device for Multi-Turn Absolute Encoder

    Fusao Kohsaka, Toshio Iino, Yoshiaki Kudo, Yasuhiro Sakamaki, Toshitsugu Ueda

    TRANSDUCER'89, Proceedings of the 5th International Conference on Solid-State Sensors and Actuators     808 - 806  1989

    DOI

  • Development of a Stabillized Optical Source with a Laser Diode,

    Katsumi Isozaki, Masahiro Watari, Eigi Ogita, Katsuya Ikezawa, Toshitsugu Ueda

    SPIE, Laser Interferometory   1162   99 - 106  1989

  • Revolution Counter Using Magnetic Babble Device for Multi-Turn Absolute Encoder

    Fusao Kohsaka, Toshio Iino, Yoshiaki Kudo, Yasuhiro Sakamaki, Toshitsugu Ueda

    TRANSDUCER'89, Proceedings of the 5th International Conference on Solid-State Sensors and Actuators     808 - 806  1989

    DOI

  • A Stabilized Optical Source With Laser Diode For Distance Measurement

    K.Ikezawa, T.Ueda, E.Ogita, Y.Tachikawa

    CPEM '88 DIGEST     28 - 29  1988

  • Multi-Turn Absolute Encoder Using Spatial Filter

    Fusao Kohsaka, Toshio Iino, Kunio Kazami, Hiroshi Nakayama, Toshitsugu Ueda

    The International Conference on ADVANCED MECHATRONICS     79 - 82  1988

  • Prcision Pressure Transducer Using Double-Ended Tuning Fork Resonstor

    Toshitsugu Ueda, Fusao Kousaka, Daisuke Yamazaki

    Trns. IEE of Japan   108-C ( 9 ) 699 - 705  1988

    DOI

  • 電子ビーム直接描画によるエンコーダのコード板の製作

    安武昭, 白幡春雄, 徳永具祥, 植田敏嗣, 幸坂扶佐夫

    SICE 87     149 - 150  1988

  • 水晶振動子を用いたセンサ

    植田敏嗣

    センサ技術   8 ( 7 ) 49 - 51  1988

  • 測長器用波長安定化半導体レーザー光源

    池澤克哉, 植田敏嗣, 荻田英治, 立川義彦

    第5回 センシングフォーラム     69 - 73  1988

  • A Stabilized Optical Source With Laser Diode For Distance Measurement

    K.Ikezawa, T.Ueda, E.Ogita, Y.Tachikawa

    CPEM '88 DIGEST     28 - 29  1988

  • Multi-Turn Absolute Encoder Using Spatial Filter

    Fusao Kohsaka, Toshio Iino, Kunio Kazami, Hiroshi Nakayama, Toshitsugu Ueda

    The International Conference on ADVANCED MECHATRONICS     79 - 82  1988

  • 複合音叉振動子を用いた高精度圧力計

    植田敏嗣, 幸坂扶佐夫, 山崎大輔

    電気学会論文誌C   108-C ( 9 ) 699 - 705  1988

    DOI

  • A Stabilized Optical Source With Laser Diode For Distance Measurement

    K.Ikezawa, T.Ueda, E.Ogita, Y.Tachikawa

    CPEM '88 DIGEST     28 - 29  1988

  • Multi-Turn Absolute Encoder Using Spatial Filter

    Fusao Kohsaka, Toshio Iino, Kunio Kazami, Hiroshi Nakayama, Toshitsugu Ueda

    The International Conference on ADVANCED MECHATRONICS     79 - 82  1988

  • Prcision Pressure Transducer Using Double-Ended Tuning Fork Resonstor

    Toshitsugu Ueda, Fusao Kousaka, Daisuke Yamazaki

    Trns. IEE of Japan   108-C ( 9 ) 699 - 705  1988

    DOI

  • Optical Absolute Encoder Using Spatial Filter

    Toshitsugu Ueda, Fusao Kohsaka, Toshio Iino, Hiroshi Nakayama

    Proceeding of SPIE-The International Society for Optical Engineering, Photomechanics and Speckle Metrology   814   217 - 221  1987

  • Theory to Predict Etching Shapes of Quartz Crystal and It's Application to Design Devices

    Toshitsugu Ueda, Fusao Kousaka, Daisuke Yamazaki

    Transaction of Instrument and Control Engineers   23 ( 12 ) 1233 - 1238  1987

    DOI

  • Temperature Sensor Using Tuning Fork Resonator

    Toshitsugu Ueda, Fusao Kousaka, Daisuke Yamazaki

    Transaction of Instrument and Control Engineers   32 ( 11 ) 1117 - 1122  1987

    DOI

  • レーザ振動変位計算

    工藤義昭, 植田敏嗣, 荻田英治, 立川義彦

    SICE 87     115 - 116  1987

  • 半導体レーザを用いた測長器用2波長安定化光源

    池沢克也, 植田敏嗣, 荻田英治, 立川義彦

    SICE 87     129 - 130  1987

  • 水晶温度計(4)-温度校正式の検討

    植田敏嗣, 幸坂扶佐夫, 飯野俊雄, 山崎大輔

    SICE 87     409 - 410  1987

  • ロータリィアブソリュートエンコーダ

    植田敏嗣, 幸坂扶佐夫, 飯野俊雄, 風見邦雄, 中山博史

    SICE 87     857 - 858  1987

  • 空間フィルタ検出器を用いた光ファイバ干渉計の温度計

    山口一郎, 中島俊典, 植田敏嗣, 荻田英治

    第34回応用物理学関係連合講演会    1987

  • 多モードファイバ干渉計の温度計測への応用

    山口一郎, 中島俊典, 植田敏嗣, 荻田英治

    第34回応用物理学関係連合講演会    1987

  • 水晶のエッチング異方性とそれを応用したデバイス

    植田敏嗣, 幸坂扶佐夫, 飯野俊雄, 山崎大輔

    電気学会全国大会     15 - 18  1987

  • 複合音叉振動子を用いた圧力計

    幸坂扶佐夫, 植田敏嗣, 山崎大輔

    第16回EMシンポジウム     1 - 5  1987

  • Optical Absolute Encoder Using Spatial Filter

    Toshitsugu Ueda, Fusao Kohsaka, Toshio Iino, Hiroshi Nakayama

    Proceeding of SPIE-The International Society for Optical Engineering, Photomechanics and Speckle Metrology   814   217 - 221  1987

  • 水晶のエッチング形状の予測法とそのデバイス設計への応用

    植田敏嗣, 幸坂扶佐夫, 飯野俊雄, 山崎大輔

    計測自動制御学会論文集   23 ( 12 ) 1233 - 1238  1987

    DOI

  • 音叉振動子を用いた水晶温度センサ

    植田敏嗣, 幸坂扶佐夫, 飯野俊雄, 山崎大輔

    計測自動制御学会論文集   32 ( 11 ) 1117 - 1122  1987

    DOI

  • Optical Absolute Encoder Using Spatial Filter

    Toshitsugu Ueda, Fusao Kohsaka, Toshio Iino, Hiroshi Nakayama

    Proceeding of SPIE-The International Society for Optical Engineering, Photomechanics and Speckle Metrology   814   217 - 221  1987

  • Theory to Predict Etching Shapes of Quartz Crystal and It's Application to Design Devices

    Toshitsugu Ueda, Fusao Kousaka, Daisuke Yamazaki

    Transaction of Instrument and Control Engineers   23 ( 12 ) 1233 - 1238  1987

    DOI

  • Temperature Sensor Using Tuning Fork Resonator

    Toshitsugu Ueda, Fusao Kousaka, Daisuke Yamazaki

    Transaction of Instrument and Control Engineers   32 ( 11 ) 1117 - 1122  1987

    DOI

  • Temperature Sensor Using Quartz Tuning Fork Resonator

    Toshitsugu Ueda, Fusao Kohsaka, Toshio Iino, Daisuke Yamazaki

    Proceedings of The 40th Annual Frequency Control Symposium     224 - 229  1986

  • ファイバ放射温度計

    渡正博, 藤本敢, 植田敏嗣, 池田浩二, 渡部泰之

    SICE 86     111 - 112  1986

  • 水晶温度計(3)-広範囲温度計プローブ

    植田敏嗣, 幸坂扶佐夫, 飯野俊雄, 山崎大輔

    SICE 86     109 - 110  1986

  • 走査型空間フィルタを用いたアブソリュートエンコーダ

    植田敏嗣, 幸坂扶佐夫, 飯野俊雄, 中山博史

    SICE 86     73 - 74  1986

  • レーザ・スペックル歪計の進展

    山口一郎, 村田正義, 西田聖一, 植田敏嗣

    第18回ひずみ測定シンポジウム     61 - 64  1986

  • Temperature Sensor Using Quartz Tuning Fork Resonator

    Toshitsugu Ueda, Fusao Kohsaka, Toshio Iino, Daisuke Yamazaki

    Proceedings of The 40th Annual Frequency Control Symposium     224 - 229  1986

  • レーザースペックルひずみ計の高速化

    山口一郎, 古川猛夫, 植田敏嗣, 荻田英二

    非破壊検査   35 ( 4 ) 288 - 293  1986

  • Temperature Sensor Using Quartz Tuning Fork Resonator

    Toshitsugu Ueda, Fusao Kohsaka, Toshio Iino, Daisuke Yamazaki

    Proceedings of The 40th Annual Frequency Control Symposium     224 - 229  1986

  • Optical three -dimensional displacement meter

    Eiji Ogita, Toshitsugu Ueda, Daisuke Yamazaki

    Proceedings of SPIE - The International Society for Optical Engineering   556   139 - 145  1985.11

     View Summary

    We have developed a displacement meter which simultaneously measures the (distance and direction of movement of an object in three dimensions. A piece of retroreflective “Scotchlite” adhesive tape, with a grid printed on it, is attached to the object (target) and illuminated by a single laser beam. The displacements in the X -Y plane perpendicular to the beam are determined by measuring the movement of the grid images appearing at the X and Y detectors. (The reflected beam is split, and transmitted to X, Y and Z detectors). The displacement along the Z axis parallel to the beam is determined -- using a Michelson interferometer -- from the movement of interference fringes which occur when the light reflected from the target is superimposed on a direct “reference” beam from the laser. A new high speed image sensor is used for X, Y and Z detectors to measure the movement of the grid image and the interference pattern -- as a result, the meter has a frequency response from DC to 20 kHz. The sensor is a high resolution spatial filter (array of photocells connected or scanned in such a manner as to be sensitive to a particular light pattern on the array). Using a spatial filter eliminates the need for correlation or other complex signal processing. The accuracy is of the order of 20 ìm for X and Y axes and 1.5 pm for the Z axis. The optical system (lenses, mirrors and sensors) is compact, so the meter is portable. © 1985 SPIE.

    DOI

  • Optical three -dimensional displacement meter

    Eiji Ogita, Toshitsugu Ueda, Daisuke Yamazaki

    Proceedings of SPIE - The International Society for Optical Engineering   556   139 - 145  1985.11

     View Summary

    We have developed a displacement meter which simultaneously measures the (distance and direction of movement of an object in three dimensions. A piece of retroreflective “Scotchlite” adhesive tape, with a grid printed on it, is attached to the object (target) and illuminated by a single laser beam. The displacements in the X -Y plane perpendicular to the beam are determined by measuring the movement of the grid images appearing at the X and Y detectors. (The reflected beam is split, and transmitted to X, Y and Z detectors). The displacement along the Z axis parallel to the beam is determined -- using a Michelson interferometer -- from the movement of interference fringes which occur when the light reflected from the target is superimposed on a direct “reference” beam from the laser. A new high speed image sensor is used for X, Y and Z detectors to measure the movement of the grid image and the interference pattern -- as a result, the meter has a frequency response from DC to 20 kHz. The sensor is a high resolution spatial filter (array of photocells connected or scanned in such a manner as to be sensitive to a particular light pattern on the array). Using a spatial filter eliminates the need for correlation or other complex signal processing. The accuracy is of the order of 20 ìm for X and Y axes and 1.5 pm for the Z axis. The optical system (lenses, mirrors and sensors) is compact, so the meter is portable. © 1985 SPIE.

    DOI

  • Optical three -dimensional displacement meter

    Eiji Ogita, Toshitsugu Ueda, Daisuke Yamazaki

    Proceedings of SPIE - The International Society for Optical Engineering   556   139 - 145  1985.11

     View Summary

    We have developed a displacement meter which simultaneously measures the (distance and direction of movement of an object in three dimensions. A piece of retroreflective “Scotchlite” adhesive tape, with a grid printed on it, is attached to the object (target) and illuminated by a single laser beam. The displacements in the X -Y plane perpendicular to the beam are determined by measuring the movement of the grid images appearing at the X and Y detectors. (The reflected beam is split, and transmitted to X, Y and Z detectors). The displacement along the Z axis parallel to the beam is determined -- using a Michelson interferometer -- from the movement of interference fringes which occur when the light reflected from the target is superimposed on a direct “reference” beam from the laser. A new high speed image sensor is used for X, Y and Z detectors to measure the movement of the grid image and the interference pattern -- as a result, the meter has a frequency response from DC to 20 kHz. The sensor is a high resolution spatial filter (array of photocells connected or scanned in such a manner as to be sensitive to a particular light pattern on the array). Using a spatial filter eliminates the need for correlation or other complex signal processing. The accuracy is of the order of 20 ìm for X and Y axes and 1.5 pm for the Z axis. The optical system (lenses, mirrors and sensors) is compact, so the meter is portable. © 1985 SPIE.

    DOI

  • Accelerated Laser Speckle Strain Gauge, Proceedings of SPIE-

    Ichiro Yamaguchi, Takeo Furukawa, Toshitsugu Ueda, Eiji Ogita

    The International Society for Optical Engineering, Vol.556   556   132 - 138  1985

  • Quartz Crystal Micromechanical Devices

    Toshitsugu Ueda, Fusao Kohsaka, Daisuke Yamazaki

    Proceeding of the International Conference on Solid-State Sensors-Transducer'85     113 - 116  1985

  • Precision Transducers Using Mechanical Resonators

    Kinji Harada, Toshitasugu Ueda

    The Jounal of the Society of Instrument and Control Engineers   24 ( 8 ) 288 - 293  1985

  • Accelerated Laser Speckle Strain Gauge

    Ichiro Yamaguchi, Takeo Furukawa, Toshitsugu Ueda

    Optical Engineering   125 ( 5 ) 671 - 675  1985

  • Precision Force Transducer Using Mechanical Resonators

    Toshitsugu Ueda

    Mesurement   13 ( 2 ) 89 - 94  1985

  • Precision Transducers Using Mechanical Resonators

    Kinji Harada, Toshitasugu Ueda

    Transaction of Instrument and Control Engineers   24 ( 8 ) 757 - 768  1985

  • スペックル振動センサ

    山口一郎, 中島俊典, 植田敏嗣, 荻田英治

    第46回応用物理学会学術講演会     1 - 1  1985

  • 電子走査型空間フィルタ検出器によるスペックル歪計の高速化

    山口一郎, 中島俊典, 植田敏嗣, 荻田英治

    第23回応用物理学関係連合講演会     6 - 6  1985

  • 横振動梁を使用した小型高精度圧力計のマルチレンジ化

    植田敏嗣, 幸坂扶佐夫, 山崎大輔

    第24回 SICE 学術講演会     69 - 70  1985

  • 水晶温度計(2)-水晶温度センサの低温での特性

    植田敏嗣, 幸坂扶佐夫, 飯野俊雄

    第24回 SICE 学術講演会     661 - 662  1985

  • 水晶温度計(1)-水晶振動子の基本特性

    植田敏嗣, 幸坂扶佐夫, 飯野俊雄

    第24回 SICE 学術講演会     659 - 660  1985

  • 水晶を利用したマイクロメカニカルデバイス

    植田敏嗣, 荻田英二, 幸坂扶佐夫, 山崎大輔

    横河技報   3 ( 3 ) 3 - 8  1985

  • 水晶を利用したマイクロメカニカルセンサ

    植田敏嗣, 荻田英二, 幸坂扶佐夫, 山崎大輔

    電子通信学会委員会報告   ( us85-7 ) 9 - 16  1985

  • 高温下における計測技術

    植田敏嗣, 幸坂扶佐夫

    塑性と加工   28 ( 295 ) 804 - 808  1985

  • Accelerated Laser Speckle Strain Gauge, Proceedings of SPIE-

    Ichiro Yamaguchi, Takeo Furukawa, Toshitsugu Ueda, Eiji Ogita

    The International Society for Optical Engineering, Vol.556   556   132 - 138  1985

  • Quartz Crystal Micromechanical Devices

    Toshitsugu Ueda, Fusao Kohsaka, Daisuke Yamazaki

    Proceeding of the International Conference on Solid-State Sensors-Transducer'85     113 - 116  1985

  • 機械振動子を利用した高精度センサ

    原田謹爾, 池田恭一, 植田敏嗣

    計測と制御   24 ( 8 ) 288 - 293  1985

    DOI

  • Accelerated Laser Speckle Strain Gauge

    Ichiro Yamaguchi, Takeo Furukawa, Toshitsugu Ueda

    Optical Engineering   125 ( 5 ) 671 - 675  1985

  • Precision Force Transducer Using Mechanical Resonators

    Toshitsugu Ueda

    Mesurement   13 ( 2 ) 89 - 94  1985

  • 機械振動子を利用した高精度センサ

    原田謹爾, 池田恭一, 植田敏嗣

    計測と制御   24 ( 8 ) 757 - 768  1985

    DOI

  • Accelerated Laser Speckle Strain Gauge, Proceedings of SPIE-

    Ichiro Yamaguchi, Takeo Furukawa, Toshitsugu Ueda, Eiji Ogita

    The International Society for Optical Engineering, Vol.556   556   132 - 138  1985

  • Quartz Crystal Micromechanical Devices

    Toshitsugu Ueda, Fusao Kohsaka, Daisuke Yamazaki

    Proceeding of the International Conference on Solid-State Sensors-Transducer'85     113 - 116  1985

  • Precision Transducers Using Mechanical Resonators

    Kinji Harada, Toshitasugu Ueda

    The Jounal of the Society of Instrument and Control Engineers   24 ( 8 ) 288 - 293  1985

  • Accelerated Laser Speckle Strain Gauge

    Ichiro Yamaguchi, Takeo Furukawa, Toshitsugu Ueda

    Optical Engineering   125 ( 5 ) 671 - 675  1985

  • Precision Force Transducer Using Mechanical Resonators

    Toshitsugu Ueda

    Mesurement   13 ( 2 ) 89 - 94  1985

  • Precision Transducers Using Mechanical Resonators

    Kinji Harada, Toshitasugu Ueda

    Transaction of Instrument and Control Engineers   24 ( 8 ) 757 - 768  1985

  • Precision Transducer Using Mechanical Resonator

    Kinji Harada, Hyoichi Ikeda, Toshitsugu Ueda

    Yokogawa Technical Report English Edition   ( 1 ) 1 - 9  1984

  • Precision Force Tra sducer Using Mechanical Resonators

    Toshitsugu Ueda, Fusao Kohsaka, Eiji Ogita

    Proceedings of IMEKO TC-3 on Measurement of Force and Mass     17 - 22  1984

  • Precion Transducer Using Mecanical Resonators

    Kiji Harada, Kyoichiro Ikeda, Toshitsugu Ueda

    Deshi Tokyo   ( 23 ) 157 - 159  1984

  • 赤外線ガス分析用水晶マイクロホン

    植田敏嗣, 幸坂扶佐夫, 杉原吉信, 山崎大輔

    第23回 SICE 学術講演会     611 - 612  1984

  • 回転型超音波ポテンショメータ

    植田敏嗣, 山本裕之

    第23回 SICE 学術講演会     497 - 498  1984

  • 横振動梁を使用した小型高精度圧力計

    植田敏嗣, 幸坂扶佐夫

    第23回 SICE 学術講演会     113 - 114  1984

  • Precision Transducer Using Mechanical Resonator

    Kinji Harada, Hyoichi Ikeda, Toshitsugu Ueda

    Yokogawa Technical Report English Edition   ( 1 ) 1 - 9  1984

  • Precision Force Tra sducer Using Mechanical Resonators

    Toshitsugu Ueda, Fusao Kohsaka, Eiji Ogita

    Proceedings of IMEKO TC-3 on Measurement of Force and Mass     17 - 22  1984

  • Precion Transducer Using Mecanical Resonators

    Kiji Harada, Kyoichiro Ikeda, Toshitsugu Ueda

    Deshi Tokyo   ( 23 ) 157 - 159  1984

  • Precision Transducer Using Mechanical Resonator

    Kinji Harada, Hyoichi Ikeda, Toshitsugu Ueda

    Yokogawa Technical Report English Edition   ( 1 ) 1 - 9  1984

  • Precision Force Tra sducer Using Mechanical Resonators

    Toshitsugu Ueda, Fusao Kohsaka, Eiji Ogita

    Proceedings of IMEKO TC-3 on Measurement of Force and Mass     17 - 22  1984

  • Precion Transducer Using Mecanical Resonators

    Kiji Harada, Kyoichiro Ikeda, Toshitsugu Ueda

    Deshi Tokyo   ( 23 ) 157 - 159  1984

  • レーザースペックルを用いた三次元変位測定器

    植田敏嗣, 荻田英治

    第22回 SICE 学術講演会     721 - 722  1983

  • Displacement Transducer Using Magnetostrictive Delay Line

    Toshitsugu Ueda, Seiki Ra

    Transaction of Instrument and Control Engineers   17 ( 8 ) 70 - 76  1981

  • 水晶歪ゲージ

    植田敏嗣, 荻田英治

    第20回 SICE 学術講演会     655 - 656  1981

  • 水晶偏光器

    植田敏嗣, 幸坂扶佐夫

    第20回 SICE 学術講演会     660 - 661  1981

  • 横振動梁を使用した圧力計

    植田敏嗣, 幸坂扶佐夫

    第20回 SICE 学術講演会     659 - 660  1981

  • 横振動梁を使用した電子はかり

    植田敏嗣, 羅聖基, 中村英晴

    第20回 SICE 学術講演会     665 - 666  1981

  • 磁歪遅延線を使用した変位変換器

    植田敏嗣, 羅聖基

    計測自動制御学会論文集   17 ( 8 ) 70 - 76  1981

    DOI

  • Displacement Transducer Using Magnetostrictive Delay Line

    Toshitsugu Ueda, Seiki Ra

    Transaction of Instrument and Control Engineers   17 ( 8 ) 70 - 76  1981

  • 横振動梁を使用した検出器

    植田敏嗣, 幸坂扶佐夫

    第19回 SICE 学術講演会     541 - 542  1980

  • 磁歪遅延式超音波ポテンショメータ

    植田敏嗣, 羅聖基

    第18回 SICE 学術講演会     153 - 154  1979

  • ディジタルマノメータ

    猪又仁, 植田敏嗣

    横河技報   21 ( 1 ) 31 - 35  1976

  • Micro actuators Based on Newly Developed Pseudo static Displacement Mechanism

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda

    1995 Int.Mechanical Eng.Congress & Exposition, ASME'95, Nov.12-17, (1995), San Francisco Hilton, San Fran Cisco, California     989 - 994

  • Micro actuators Based on Newly Developed Pseudo static Displacement Mechanism

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda

    1995 Int.Mechanical Eng.Congress & Exposition, ASME'95, Nov.12-17, (1995), San Francisco Hilton, San Fran Cisco, California     989 - 994

  • Micro actuators Based on Newly Developed Pseudo static Displacement Mechanism

    Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda

    1995 Int.Mechanical Eng.Congress & Exposition, ASME'95, Nov.12-17, (1995), San Francisco Hilton, San Fran Cisco, California     989 - 994

▼display all

Awards

  • 計測自動制御学会論文賞

    1994  

  • Award from Society of Instrument and Control Engineer of Japan

    1994  

  • 計測自動制御学会論文賞

    1987  

  • 発明協会

    1987  

  • Award from Society of Instrument and Control Engineer of Japan

    1987  

  • Japan Institute of Invention and Inovation

    1987  

  • 発明協会

    1985  

  • Japan Institute of Invention and Inovation

    1985  

▼display all

Research Projects

  • MEMSデバイスシステム化のための研究開発

    受託研究

    Project Year :

    2007
    -
    2009
     

  • 水晶傾斜センサの製造技術に関する研究

    共同研究

    Project Year :

    2006
    -
    2009
     

  • 水晶傾斜センサの開発

    受託研究

    Project Year :

    2004
    -
    2009
     

  • Development Quartz Tilte Sensor

    Funded Research

    Project Year :

    2004
    -
    2009
     

  • 水晶傾斜センサの加工技術に関する研究

    Project Year :

    2006
    -
    2008
     

  • R&D of Quartz Tilt Sensor Manufcturing Technology

    Project Year :

    2006
    -
    2008
     

  • MEMS技術を使用した高感度センサの研究開発

    共同研究

    Project Year :

    2005
    -
    2008
     

  • High Sensitive Sensor Development Using MEMS Technilogy

    Cooperative Research

    Project Year :

    2005
    -
    2008
     

  • フオトニックファイバによる高感度ガス濃度計測

    共同研究

    Project Year :

    2004
    -
    2008
     

  • PPB Gas Concentration Measurement Using BGPF

    Cooperative Research

    Project Year :

    2004
    -
    2008
     

  • MEMSセンサ・デバイスの高感度化とシステム化技術の研究開発

    受託研究

    Project Year :

    2007
    -
     
     

  • 水晶MEMS技術を利用した高感センサの開発

    Project Year :

    2005
    -
    2006
     

  • High Sensitive Sensors Development Using Quarz MEMS Technology

    Project Year :

    2005
    -
    2006
     

  • LDビームデリバリ技術の研究開発

    Project Year :

    2003
    -
    2006
     

  • R&D of LD Beam Derivery Technology

    Project Year :

    2003
    -
    2006
     

  • 水晶振動子+1加工技術

    Project Year :

    2002
    -
    2006
     

  • Quartz Resonators

    Project Year :

    2002
    -
    2006
     

  • 水晶のマイクロマシニングを利用した傾斜センサの開発

    Project Year :

    2004
    -
    2005
     

  • フオトニックファイバを利用した高感度ガス分析技術の研究開発

    Project Year :

    2004
    -
    2005
     

  • Quartz Tilt Sensor Development Using MEMS Technology

    Project Year :

    2004
    -
    2005
     

  • PPB Gas Concetration Measurement Using PHotonoc-Fiber

    Project Year :

    2004
    -
    2005
     

  • フォトン計測・加工

    共同研究

    Project Year :

    1997
    -
    2002
     

  • Advanded Photon Processing and Measurement Technology

    Cooperative Research

    Project Year :

    1997
    -
    2002
     

▼display all

Specific Research

  • 自己診断機能を有した水晶振動子式水素センサ

    2014   大井川 寛

     View Summary

    本研究は、2025年の水素ステーションの本格普及期に不可欠な技術要素である次世代水素ガスセンサの開発を目的とする。現状の水素センサではガスの選択性・検出感度・応答性・環境補償性・低消費電力等の要求を満たし、更にセンサ素子自身の劣化状況監視機能を組み込むことはセンサの動作原理上不可能である。これに対し、本水素センサでは、白金触媒と水晶振動子を組み合わせ、水素ステーションで使用されている水素センサの性能目標を達成し、その上でMEM技術を応用することで白金の使用量を低減することにより価格低下を実現する。更に、水晶振動子のQ値などの特性変化を検出することでセンサの故障や性能劣化の監視できる自己故障診断機能を開発する。

  • フォトニック・バンドギャップ・ファイバを用いた分光セルの性能向上のための基礎研究

    2012  

     View Summary

    研究背景近年、フォトニック・バンドギャプ・ファイバ(PBGF)を用いて微量サンプルを高感度に測定できる実用的な技術開発研究が各所で実施されるようになってきた。ファイバの中空部分に被測定ガスを導入し、同時にレーザー光もこの中空コア部分を伝搬させることで分光測定を行うことができる。しかし、現在製造されている中空コア PBGFのほとんどはマルチモード・ファイバ(MMF)であり、実用中の機械振動や温度変化、圧力変化などの外部環境の影響が異なる伝搬モードの干渉として現れてしまい、高感度測定を制限する一つの要因になっている。本研究では、これらの難題を克服しながら、独自のPBGFガスセルを設計・開発し、微量なガスサンプルを、高感度かつ実時間で分析することを検証していた。研究目的本研究の目標は、理論展開と実証実験の両方面から計測システムの基本的な動作を確認し、極めて低い濃度のガス成分でも正確な計測できる測定システムの開発を目的としている。レーザー光源を変調、被測定ガスの減圧分光法を用いた分析技術により、既存技術のおよそ100倍にS/N比を改善し、サブppbレベルのガス成分を実時間で測定できる実用的な技術を目指す。研究結果本研究では、開発内容を二つに分割して遂行した。まず、光源の変調と減圧分光法を用いた分析技術により、振動や熱などの外部環境の影響による伝搬モード干渉の変化が起因するノイズを改善した。この問題を解決する為、光振の幅変調器を適当な矩形波で変調した。連続のレーザー光を振幅変調してPBGFガスセルに入射することでモード干渉を抑える方式とした。これは,伝搬するパルスの各モードの群速度差により、受光側で全伝搬モードからLP00モードを分離し、不要なモード干渉を抑制しながらLP00モードの出力光強度だけを計測できる新たな測定技術である。連続光を入射ることと比べて、出力の安定性が30倍改善されていることができ、出力変動を0.05%以下に抑えることを目標を達成した[1]。次は、1本のPBGFに複数のガス流路のチャンネルを設けること、或いは複数のPBGFガスセルを直列に接続することで全光路長100 m程度までのガスセルを設計・開発するため、基礎研究としてPBGFのマイクロ加工技術を確立した。周期的なガス流路と実現するための技術としてFocused ion beam (FIB) ミリングを検討していた。PBGFの途中に設けたガス流路の出入り口として様々な試作を行い、FIBミリング技術は長尺なPBGFガスセルの製作に適当な技術であることを検証した[2]。次期の研究計画として、変調減圧分光法と長尺のPBGFガスセルを統合し、サブ ppbレベルの極めて低い濃度のガス成分でも正確に測定できる計測技術を確立する予定。

  • 次世代イーサネットを想定した薄膜水晶振動子の基盤技術開発

    2004  

     View Summary

    高速のコンピュータネットワークの通信手段としての10Gbpsの高速イーサネットは通信・放送の垣根を越えて今後幅広く需要が高まってくる事が予想されている。同時に、電子部品の小型化への要求に答えるには、振動子のより精密な加工が必要である。本研究では、高精度水晶加工技術を基に、10Gbpsで要求される基準クロックの622MHz以上を狙った電圧制御型水晶発振器(VCXO)に使われる水晶振動子・発振回路・実装・測定などの基礎技術を開発することにより、今後の高速ネットワークで要求されるハード面の主要部品の技術を研究開発することを目的としている。本研究では、以下の研究開発を実施した。①電極構造の検討 従来のVCXOでは密着電極構造をもち、電極質量の影響は比較的に小さい。例えば、16.7MHzの振動子において、電極(50nmCr+50nmAu)の共振周波数への影響は0.5%であるが、高周波の622MHzの振動子では、同一の電極の影響は18.65%にもなる。このような場合、電極質量効果の影響を小さくするために、新しい電極構造、例えば、フローティング電極などが必要になっている。②スプリアスの影響の除去 これまでのATカット振動子は、機械加工によるため、寸法形状は数mm程度の大きさが必要であった。この場合に、スプリアス振動の影響は大きく、振動子の形状寸法精度を精密(μm程度)に管理する必要があった。しかし、今回提案しているエッチング加工による振動子の場合、小形の振動子を加工することが容易であるため、スプリアスを避けるための形状寸法精度を厳格に管理する必要のない振動子設計が可能である。③エッチング加工を行うための振動子形状の設計 振動子の形状は水晶のエッチング異方性を考え、設計した。結晶軸との回転角度によって、振動子のエッチングされた断面形状が異なる。これまでの研究成果よりウェットエッチングされた振動子の断面形状を予測し、最適な角度(ウエハ内での最適な振動配置と形状)を見付けた。すなわち、光軸に対して60°、120°の角度を持つ面で囲まれた振動子は加工精度が最適であった。

 

Committee Memberships

  • 2000
    -
    2004

    The Institute of Electrical Engineers of Japan  Society Officer