池橋 民雄 (イケハシ タミオ)

写真a

所属

理工学術院 大学院情報生産システム研究科

職名

准教授

プロフィール

2019年4月 早稲田大学大学院情報生産システム研究科 准教授
1995年 4月 株式会社 東芝
1995年 3月 東京大学大学院 理学系研究科 物理学専攻 博士課程修了(博士(理学))

兼担 【 表示 / 非表示

  • 理工学術院   基幹理工学部

学内研究所等 【 表示 / 非表示

  • 2020年
    -
    2022年

    理工学術院総合研究所   兼任研究員

 

論文 【 表示 / 非表示

  • A review of capacitive MEMS hydrogen sensor using Pd-based metallic glass with fast response and low power consumption

    Yamazaki Hiroaki, Hayashi Yumi, Masunishi Kei, Ono Daiki, Ikehashi Tamio

    ELECTRONICS AND COMMUNICATIONS IN JAPAN   102 ( 3 ) 70 - 77  2019年03月  [査読有り]

    DOI

  • CMOS-embedded high-power handling RF-MEMS tunable capacitor using quadruple series capacitor and slit with dielectric bridges structure

    Yamazaki Hiroaki, Kurui Yoshihiko, Saito Tomohiro, Ogawa Etsuji, Obara Kei, Gando Ryunosuke, Ono Daiki, Ikehashi Tamio

    JAPANESE JOURNAL OF APPLIED PHYSICS   57 ( 10 )  2018年10月  [査読有り]

    DOI

  • High sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium alloy for fast response and low power consumption

    Yamazaki Hiroaki, Hayashi Yumi, Masunishi Kei, Ono Daiki, Ikehashi Tamio

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   28 ( 9 )  2018年09月  [査読有り]

    DOI

  • Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors

    Yumi Hayashi, Hiroaki Yamazaki, Daiki Ono, Kei Masunishi, Tamio Ikehashi

    International Journal of Hydrogen Energy   43 ( 19 ) 9438 - 9445  2018年05月  [査読有り]

     概要を見る

    In this study, we investigated PdCuSi metallic glass (MG) as a sensing material for capacitive MEMS hydrogen sensors. We first confirmed by film analysis that the fabricated PdCuSi film was MG and that it had a trigonal prism cluster. The measured pressure-composition-temperature curve of PdCuSi MG exhibited no hysteresis during hydrogen absorption and desorption. The response time was found to become faster by two orders of magnitudes compared with that of Pd polycrystal. These properties were attributed to the trigonal prism clusters. Strain was evaluated in the low hydrogen concentration regime of 0.05 vol% to 4.0 vol%, and the strain of PdCuSi MG was found to follow Sieverts' law well, indicating that hydrogen is present in the MG in a diffuse state. The hydrogen-concentration dependence of a capacitive MEMS hydrogen sensor was measured and hysteresis-free characteristics were obtained, implying advantages in hydrogen leak detection applications.

    DOI

  • A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement

    Ryunosuke Gando, Shunta Maeda, Kei Masunishi, Yasushi Tomizawa, Etsuji Ogawa, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   2018-   944 - 947  2018年04月  [査読有り]

     概要を見る

    We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.

    DOI

全件表示 >>

特定課題研究 【 表示 / 非表示

  • モード局在化センサにおけるばね定数の無限小化による感度向上の研究

    2020年   Zhiqiang Chen

     概要を見る

     Sensors using mode localization can attain high sensitivity with the use of weakly coupled resonators. In mode-localized tilt sensors, the sensitivity is known to be proportional to Δ𝑘/𝑘𝑐, where Δ𝑘 is a spring constant shift caused by a tilting and 𝑘𝑐 is a stiffness of the coupling spring. This suggests that high sensitivity can be attained at 𝑘𝑐→0. In view of this, we considered a structure that can attain 𝑘𝑐→0. In the proposed structure, the small coupling spring 𝑘𝑐 is attained by combining a mechanical spring and an "electrical spring" which is composed by parallel plate electrodes. Due to the electrostatic attractive force, the electrical spring behave as a spring with negative spring constant. The effective spring constant of the electrical spring can be tuned a voltage applied to the electrode. Thus by optimizing the voltage, the total spring constant can be made zero. The voltage tunability also enables compensation of temperature dependence and process variation of the spring constant. Using a FEM simulator, we have designed a mode-localized tilt sensor that possesses this coupling spring and verified that the spring constant can be made zero by optimizing the voltage. We also confirmed the increase of sensitivity at 𝑘𝑐→0. 

  • モード局在化センサにおけるばね定数の無限小化による感度向上の研究

    2020年   Zhiqiang Chen

     概要を見る

     Recently, mode localization is extensively surveyed to make high sensitivity sensors such as mass sensors and accelerometers. In these sensors, physical quantities are derived from amplitude change of weakly coupled resonators. An issue of this approach is the bending of frequency-amplitude curve caused by nonlinearity of the spring. The nonlinearity will become prominent if we employ electrostatic force to realize the small coupling spring, which is an effective method to enhance the sensitivity. To analyze the nonlinearity, we first solved the coupled resonator system including nonlinear spring effects. By using the method of averaging, we derived equations that represents nonlinear amplitude frequency curves. The derived equations are found to be very useful in analyzing the nonlinearity of the coupled resonator system. The validity of the results are verified by FEM simulations. According to the result, the nonlinear behavior is highly dependent on the resonant modes and also on spring constant shift caused by measurements. This analysis paves the way to cancel or reduce the nonlinearity by measuring specific modes. 

 

現在担当している科目 【 表示 / 非表示

全件表示 >>