2024/04/17 更新

写真a

イワセ エイジ
岩瀬 英治
所属
理工学術院 基幹理工学部
職名
教授
学位
博士(情報理工学) ( 東京大学 )

経歴

  • 2019年04月
    -
    継続中

    早稲田大学   理工学術院 基幹理工学部 機械科学・航空学科   教授

  • 2018年08月
    -
    継続中

    文部科学省   研究振興局   学術調査官(兼任)

  • 2014年04月
    -
    2019年03月

    早稲田大学   理工学術院 基幹理工学部 機械科学・航空学科   准教授

  • 2012年04月
    -
    2014年03月

    早稲田大学   理工学術院 基幹理工学部 機械科学・航空学科   専任講師

  • 2010年06月
    -
    2012年03月

    Harvard University   School of Engineering and Applied Sciences (SEAS)   Postdoctoral Fellow

  • 2007年04月
    -
    2010年06月

    東京大学   大学院情報理工学系研究科 知能機械情報学専攻   助教

  • 2006年05月
    -
    2007年03月

    東京大学   大学院情報理工学系研究科 知能機械情報学専攻   助手

  • 2006年04月
    -
     

    東京大学   大学院情報理工学系研究科 知能機械情報学専攻   技術補佐員

  • 2004年04月
    -
    2006年03月

    日本学術振興会   特別研究員

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    (2011年10月より Harvard University, Wyss Institute for Biologically Inspired Engineering 兼担)

  •  
     
     

    (東京大学 工学部 機械情報工学科 兼担,2008年4月より 東京大学 IRT研究機構 兼担)

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    (東京大学 工学部 機械情報工学科 兼担)

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学歴

  • 2002年04月
    -
    2005年03月

    東京大学   情報理工学系研究科   知能機械情報学専攻  

  •  
    -
    2005年

    東京大学  

  • 2000年04月
    -
    2002年03月

    東京大学   工学系研究科   機械情報工学専攻  

  •  
    -
    2002年

    東京大学  

  • 1996年04月
    -
    2000年03月

    東京大学   工学部   機械情報工学科  

  •  
    -
    2000年

    東京大学  

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委員歴

  • 2018年08月
    -
    継続中

    文部科学省 研究振興局  学術調査官

  • 2018年08月
    -
    継続中

    (一社)電気学会 センサ・マイクロマシン部門  MSS技術委員会,委員

  • 2018年08月
    -
    継続中

    (一社)日本機械学会 若手の会  委員

  • 2018年04月
    -
    継続中

    (一社)日本機械学会 情報・知能・精密工学部門  編集委員会,幹事

  • 2018年04月
    -
    継続中

    (一社)日本機械学会 情報・知能・精密工学部門  運営委員会,委員

  • 2014年04月
    -
    継続中

    (一社)日本機械学会 マイクロナノ工学部門  運営委員会,委員

  • 2010年06月
    -
    継続中

    (公財)数学オリンピック財団  評議員

  • 2005年04月
    -
    継続中

    (公財)数学オリンピック財団  国際数学オリンピック日本委員会(JCIMO),委員(2005年4月1日-現在),常任委員(2009年4月1日-現在)

  • 2017年10月
    -
    2018年09月

    (一社)日本機械学会 広報・情報部会  委員

  • 2017年10月
    -
    2018年09月

    (一社)日本機械学会 広報・情報部会  機械工学事典電子版WG,委員

  • 2016年04月
    -
    2018年03月

    (一社)日本機械学会 マイクロナノ工学部門  総務委員会,委員

  • 2012年04月
    -
    2018年03月

    (一社)日本機械学会 マイクロナノ工学部門  広報委員会,委員(2012年4月-2018年3月),幹事(2015年4月-2016年3月),委員長(2016年4月-2018年3月)

  • 2008年11月
    -
    2010年10月

    (一社)電気学会 センサ・マイクロマシン部門  電気等価回路を用いたMEMS設計手法調査専門委員会(EMSS1021),委員

  • 2007年06月
    -
    2009年03月

    (独)新エネルギー・産業技術総合開発機構(NEDO)  高集積・複合MEMS製造技術開発事業,ファインMEMSシステム設計プラットフォーム検討委員会,委員

  • 2006年09月
    -
    2009年03月

    (独)新エネルギー・産業技術総合開発機構(NEDO)  高集積・複合MEMS製造技術開発事業,ファインMEMS知識データベース委員会,委員

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所属学協会

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    応用物理学会

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    電気学会

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    Institute of Electrical and Electronics Engineers (IEEE)

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    日本ロボット学会

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    日本機械学会

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    Optical Society of Japan (OSJ)

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    The Institute of Electrical Engineers of Japan (IEEJ)

  •  
     
     

    Institute of Electrical and Electronics Engineers (IEEE)

  •  
     
     

    The Robotics Society of Japan (RSJ)

  •  
     
     

    The Japan Society of Mechanical Engineers (JSME)

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研究分野

  • 機械力学、メカトロニクス / ロボティクス、知能機械システム / ナノマイクロシステム / 知能ロボティクス

研究キーワード

  • マイクロマシン・MEMS

受賞

  • 異能(Inno)vation ジェネレーションアワード部門,センシング・データ部門賞

    2017年11月   総務省  

    受賞者: 岩瀬 英治

  • 新分野開拓表彰

    2017年11月   日本機械学会 マイクロ・ナノ工学部門  

    受賞者: 岩瀬 英治

  • 早稲田大学リサーチアワード(国際発信力)

    2016年11月   早稲田大学  

    受賞者: 岩瀬 英治

  • 大隈記念学術褒賞(奨励賞)

    2016年11月   早稲田大学  

    受賞者: 岩瀬 英治

  • 第19回 丸文研究奨励賞

    2016年04月   丸文財団  

    受賞者: 岩瀬 英治

  • MNC 2014 Outstanding Paper

    2015年11月   27th International Microprocesses and Nanotechnology Conference (MNC2014)  

    受賞者: 岩瀬 英治

  • 平成27年度 科学技術分野の文部科学大臣表彰 若手科学者賞

    2015年04月   文部科学省  

    受賞者: 岩瀬 英治

  • 第20回コニカミノルタ画像科学奨励賞(優秀賞)

    2014年03月   コニカミノルタ科学技術振興財団  

    受賞者: 岩瀬 英治

  • The 20th Konica Minolta Imaging Science Encouragement Award (Outstanding)

    2014年  

  • 第12回船井学術賞

    2013年04月   船井情報科学振興財団  

    受賞者: 岩瀬 英治

  • The 12th Funai Information Technology Award, Fuani Foundation for Information Technology (FFIT)

    2013年  

  • ベストペーパー賞

    2009年04月   エレクトロニクス実装学会  

    受賞者: 岩瀬 英治

  • Best Paper Award, Japan Institute of Electronics Packaging (JIEP)

    2009年  

  • 第8回五十嵐賞

    2005年10月   電気学会 センサ・マイクロマシン部門  

    受賞者: 岩瀬 英治

  • The 8th Igarashi Award, the Institute of Electrical Engineers of Japan (IEEJ)

    2005年  

  • 第17回研究奨励賞

    2002年09月   日本ロボット学会  

    受賞者: 岩瀬 英治

  • The 17th Young Investigator Excellence Award, the Robotics Society of Japan (RSJ)

    2002年  

  • 畠山賞

    2000年03月   日本機械学会  

    受賞者: 岩瀬 英治

  • Hatakeyama Award, the Japan Society of Mechanical Engineering (JSME)

    2000年  

▼全件表示

 

論文

  • ChoreoDrops: Manipulation of Water Droplets Using Conductive Line Patterns Sparsely Printed on Paper

    Yoshimori Yoshikawa, Takafumi Morita, Daiki Shiota, Eiji Iwase, Yasuaki Kakehi

    Proceedings of the Eighteenth International Conference on Tangible, Embedded, and Embodied Interaction    2024年02月

    DOI

    Scopus

  • Spiral Chiral Metamaterial Structure Shape for Optical Activity Improvements

    Kohei Maruyama, Miyako Mizuna, Takuya Kosuge, Yuki Takeda, Eiji Iwase, Tetsuo Kan

    Micromachines   14 ( 6 ) 1156  2023年05月  [査読有り]

    DOI

    Scopus

  • Programming Stepwise Motility into a Sheet of Paper Using Inkjet Printing

    Hiroki Shigemune, Shingo Maeda, Eiji Iwase, Shuji Hashimoto, Shigeki Sugano, Hideyuki Sawada

    Advanced Intelligent Systems     2000153 - 2000153  2020年10月

    DOI

  • Wearable-mounted Devices and Stretchable Electronics

    Tomoya Koshi, Eiji Iwase

    Seikei-Kakou   31 ( 9 ) 338 - 341  2019年08月

    DOI

  • Resistance Change Mechanism of Electronic Component Mounting through Contact Pressure Using Elastic Adhesive

    Takashi Sato, Tomoya Koshi, Eiji Iwase

    Micromachines   10 ( 6 )  2019年06月  [査読有り]  [国際誌]

     概要を見る

    For mounting electronic components through contact pressure using elastic adhesives, a high contact resistance is an inevitable issue in achieving solderless wiring in a low-temperature and low-cost process. To decrease the contact resistance, we investigated the resistance change mechanism by measuring the contact resistance with various contact pressures and copper layer thicknesses. The contact resistivity decreased to 4.2 × 10−8 Ω·m2 as the contact pressure increased to 800 kPa and the copper layer thickness decreased to 5 µm. In addition, we measured the change in the total resistance with various copper layer thicknesses, including the contact and wiring resistance, and obtained the minimum combined resistance of 123 mΩ with a copper-layer thickness of 30 µm using our mounting method. In this measurement, a low contact resistance was obtained with a 5-µm-thick copper layer and a contact pressure of 200 kPa or more; however, there is a trade-off with respect to the copper layer thickness in obtaining the minimum combined resistance because of the increasing wiring resistance. Subsequently, based on these measurements, we developed a sandwich structure to decrease the contact resistance, and a contact resistivity of 8.0 × 10−8 Ω·m2 was obtained with the proposed structure.

    DOI

    Scopus

    2
    被引用数
    (Scopus)
  • Self-Healing Metal Interconnect for Flexible Electronic Device

    Tomoya Koshi, Eiji Iwase

    2019 International Conference on Electronics Packaging (ICEP)    2019年04月

    DOI

  • High Performance Flexible Thermoelectric Device Included Rigid Material

    Makoto Kashiwagi, Tomoya Koshi, Eiji Iwase

    2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)    2019年01月

    DOI

  • Rapid prototyping of fluoropolymer microchannels by xurography for improved solvent resistance

    Takuma Hizawa, Atsushi Takano, Pravien Parthiban, Patrick S. Doyle, Eiji Iwase, Michinao Hashimoto

    Biomicrofluidics   12 ( 6 ) 064105 - 064105  2018年11月  [査読有り]

    DOI

    Scopus

    11
    被引用数
    (Scopus)
  • Design of Substrate Stretchability using Origami-Like Folding Deformation for Flexible Thermoelectric Generator

    Kana Fukuie, Yoshitaka Iwata, Eiji Iwase

    Micromachines   9 ( 3 ) 135  2018年06月  [査読有り]

    DOI

    Scopus

    26
    被引用数
    (Scopus)
  • Measurement of conformability and adhesion energy of polymeric ultrathin film to skin model

    Junki Sugano, Toshinori Fujie, Hiroyasu Iwata, Eiji Iwase

    Japanese Journal of Applied Physics   57 ( 6 ) 06HJ04  2018年06月  [査読有り]

     概要を見る

    We measured the conformability and adhesion energy of a polymeric ultrathin film "nanosheet" with hundreds of nanometer thickness to a skin model with epidermal depressions. To compare the confirmability of the nanosheets with different thicknesses and/or under different attaching conditions, we proposed a measurement method using skin models with the same surface profile and defined the surface strain ϵS as the quantified value of the conformability. Then, we measured the adhesion energy of the nanosheet at each conformability through a vertical tensile test. Experimental results indicate that the adhesion energy does not depend on the liquid used in wetting the nanosheet before attaching to the skin model and increases monotonously as the surface strain ϵS increases.

    DOI

    Scopus

    5
    被引用数
    (Scopus)
  • Self-rolling up micro assembly using temperature - Responsive hydrogel sheet with rigid plate array

    Yoshitaka Iwata, Shuhei Miyashita, Eiji Iwase

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   2018-   93 - 96  2018年04月  [査読有り]

     概要を見る

    We propose a design method of a micro self-rolling up structure using a temperature-responsive hydrogel sheet with rigid plate array. Our self-rolling up is a method for developing a micro three-dimensional (3D) structure performed by rolling up a two-dimensional (2D) flat sheet, like making a croissant, through a continuous self-folding. The local curvature of the self-rolled up structure could be controlled by the length of rigid plates. By controlling the local curvature, we designed and developed self-rolled up structures with or without gaps between the self-rolled up layers, such as cylindrical and croissant-like ellipsoidal structures. In addition, all the structures demonstrated repetitive deformation of forward and backward rolling up by changing a temperature of water.

    DOI

    Scopus

  • Crack-configuration analysis of metal conductive track embedded in stretchable elastomer

    Tomoya Koshi, Eiji Iwase

    Micromachines   9 ( 3 ) 130  2018年03月  [査読有り]

     概要を見る

    This paper reports the analysis of the crack configuration of a stretched metal conductive track that is embedded in a stretchable elastomer. The factor determining the crack configurations is analyzed by modeling as well as experiments. The modeling analysis indicates that the crack configuration is determined by the ratio of the elongation stiffness of the track and elastomer, and is classified into two types: multiple-crack growth and single-crack growth. When the track stiffness is considerably lower than the elastomer stiffness, multiple-crack growth type occurs
    in the opposite case, single-crack growth type occurs. Hence, to verify the modeling analysis, metal conductive tracks with different thicknesses are fabricated, and the cracks are studied with respect to the crack width, number of cracks, and crack propagation speed. In this study, two conventional metal-track shapes are studied: straight-shaped tracks with track thickness of 0.04-1.17 μm, and wave-shaped tracks with track thickness of 2-10 μm. For straight-shaped tracks, multiple-crack growth type occurred, when the track thickness was 0.04 μm, and the crack configuration gradually changed to a single crack, with the increase in the track thickness. For wave-shaped tracks with track thickness of 2-10 μm, only single-crack growth type occurred
    however, the crack propagation speed decreased and the maximum stretchability of the track increased, with the increase in the track thickness.

    DOI

    Scopus

    4
    被引用数
    (Scopus)
  • Electro-mechano-optical detection of nuclear magnetic resonance

    Kazuyuki Takeda, Kentaro Nagasaka, Atsushi Noguchi, Rekishu Yamazaki, Yasunobu Nakamura, Eiji Iwase, Jacob M. Taylor, Koji Usami

    Optica   5 ( 2 ) 152 - 158  2018年02月  [査読有り]

     概要を見る

    Signal reception of nuclear magnetic resonance (NMR) usually relies on electrical amplification of the electromotive force caused by nuclear induction. Here, we report up-conversion of a radio-frequency NMR signal to an optical regime using a high-stress silicon nitride membrane that interfaces the electrical detection circuit and an optical cavity through the electro-mechanical and the opto-mechanical couplings. This enables optical NMR detection without sacrificing the versatility of the traditional nuclear induction approach. While the signal-to-noise ratio is currently limited by the Brownian motion of the membrane as well as additional technical noise, we find it can exceed that of the conventional electrical schemes by increasing the electro-mechanical coupling strength. The electro-mechano-optical NMR detection presented here opens the possibility of mechanical parametric amplification of NMR signals. Moreover, it can potentially be combined with the laser cooling technique applied to nuclear spins.

    DOI

    Scopus

    22
    被引用数
    (Scopus)
  • Structure design of electronic nanosheet for shortening skin-adhesive process

    N.SHINODA, S.MIYABAYASHI, E.IWASE, T.FUJIE, H.IWATA

    Proc. of the 9th Int, Conf. on Flexible and Printed Electronics (ICFPE2018)   accepted  2018年  [査読有り]

  • Self-rolling up micro 3D structures using temperature-responsive hydrogel sheet

    Y. Iwata, S. Miyashita, E. Iwase

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   27 ( 12 ) 124003  2017年12月  [査読有り]

     概要を見る

    This paper proposes a micro self-folding using a self-rolling up deformation. In the fabrication method at micro scale, self-folding is an especially useful method of easily fabricating complex three-dimensional (3D) structures from engineered two-dimensional (2D) sheets. However, most self-folded structures are limited to 3D structures with a hollow region. Therefore, we made 3D structures with a small hollow region by self-rolling up a 2D sheet consisting of SU-8 and a temperature-responsive hybrid hydrogel of poly(N-isopropylacrylamide- co-acrylic acid) (pNIPAM-AAc). The temperature-responsive hydrogel can provide repetitive deformation, which is a good feature for micro soft robots or actuators, using hydrogel shrinking and swelling. Our micro self-rolling up method is a self-folding method for a 3D structure performed by rolling up a 2D flat sheet, like making a croissant, through continuous self-folding. We used our method to fabricate 3D structures with a small hollow region, such as cylindrical, conical, and croissant-like ellipsoidal structures, and 3D structures with a hollow region, such as spiral shapes. All the structures showed repetitive deformation, forward rolling up in 20 degrees C cold water and backward rolling up in 40 degrees C hot water. The results demonstrate that self-rolling up deformation can be useful in the field of micro soft devices.

    DOI

    Scopus

    9
    被引用数
    (Scopus)
  • Effect of Living Body on Performance of RF Identifier Antenna Printed on Ultrathin Polymer Film

    H.HAYATA, M.OKAMOTO, S.TAKEOKA, E.IWASE, T.FUJIE, H.IWATA

    International Conference on Flexible and Printed Electronics (ICFPE 2017)   paper no. P083  2017年09月  [査読有り]

  • Epidermal pH-sensor capable of operating only with NFC energy harvesting

    S.MIYABAYASHI, H.HAYATA, E.IWASE, T.FUJIE, H.IWATA

    International Conference on Flexible and Printed Electronics (ICFPE 2017)   paper no. P082  2017年09月  [査読有り]

  • Voltage and current conditions for nanoparticle chain formation using dielectrophoresis

    Tomoya Koshi, Yuta Nakajima, Eiji Iwase

    MICRO & NANO LETTERS   12 ( 8 ) 532 - 535  2017年08月  [査読有り]

     概要を見る

    Here, the voltage and current conditions required to form a nanoparticle chain bridging a gap between electrodes that is several tens of micrometres wide have been examined. When a voltage is applied to a gap between electrodes covered with a dispersion of nanoparticles, the nanoparticles are trapped in the gap by dielectrophoresis, forming a nanoparticle chain. It has been considered that a nanoparticle chain is formed in a gap only when a voltage higher than a certain value with a current lower than a certain value is applied to the gap. In this work, certain voltages were first applied with changing current to a 10 mu m-wide gap between electrodes covered with a dispersion of 150 nm-diameter gold nanoparticles, and they found that a nanoparticle chain was formed only when 6.1 V-rms or more with 15 mA(rms) or less was applied. Next, the process of nanoparticle chain formation in a 10 mu m-wide gap was directly observed with high-magnification and high-speed microscopy, and they clarified the behaviour of nanoparticle chain formation when a low voltage, high voltage with high current, and high voltage with low current were applied. Finally, they measured the critical value of current for nanoparticle chain formation in a gap several tens of micrometres wide.

    DOI

    Scopus

    3
    被引用数
    (Scopus)
  • Sample shape design for a micro-volume NMR spectroscopy

    Takuma Hizawa, Masato Takahashi, Eiji Iwase

    MICRO & NANO LETTERS   12 ( 8 ) 550 - 553  2017年08月  [査読有り]

     概要を見る

    The authors examined a shape of sample on micro-volume, which is a several L, nuclear magnetic resonance (NMR) spectroscopy in order to obtain uniformed magnetic flux density in the sample and a sharp NMR spectrum by using a conventional NMR apparatus. Firstly, they simulated the magnetic flux density distribution in spherical and cubic shaped samples and calculated NMR spectra from each shape. The simulated NMR spectra from spherical samples were sharp enough, being <0.1 ppb in a full width at half maximum (FWHM). On the other hand, the simulated NMR spectra from cubic samples were much broader than those from spherical samples. Then, they made polydimethylsiloxane sample chambers with spherical or cubic sample of several mu L in volume and they evaluated NMR spectra from those micro-volume sample chambers. As a result, they obtained a sharp NMR spectrum with FWHM of 2 ppb from the sample chamber with the spherical sample, and a broad spectrum with FWHM of 220 ppb from the sample chamber with the cubic sample. These results indicate that the spherical shape is essential to obtain a shape spectrum in micro-volume NMR spectroscopy by using a conventional NMR apparatus.

    DOI

    Scopus

  • Operation of three-dimensional MEMS mirror by single superposed driving signal

    Toshiya Nagasawa, Yohei Oguchi, Eiji Iwase

    JAPANESE JOURNAL OF APPLIED PHYSICS   56 ( 6 ) 06GN12  2017年06月  [査読有り]

     概要を見る

    We have realized a three-dimensional (3D) operation of a microelectromechanical systems (MEMS) mirror with three resonant modes and a single driving apparatus by a single superposed signal with three frequencies. We fabricated a 3D MEMS mirror with a single pair of beams having three resonant modes (x-and y-axis rotational modes and a z-axis vertical mode). We demonstrated the 3D operation by a single driving apparatus using the Lorentz force. In addition, we have shown that the x-and y-axis rotational angles and z-axis vertical displacement are proportional to the voltage amplitudes of each resonant frequency in the superposed signal, and the proportionality constants for each angle and deformation are approximately determined as 0.10 degrees/V, 0.10 degrees/V, and 70nm/V, respectively. This result indicates that the mechanical amplitude of each mode is easy to control by the signal amplitude of each resonant frequency in the superposed signal. (C) 2017 The Japan Society of Applied Physics

    DOI

    Scopus

    4
    被引用数
    (Scopus)
  • Micropatterning of Multiple Photonic Colloidal Crystal Gels for Flexible Structural Color Films

    Noriyuki Suzuki, Eiji Iwase, Hiroaki Onoe

    LANGMUIR   33 ( 24 ) 6102 - 6107  2017年06月  [査読有り]

     概要を見る

    We herein report the micropatterning of flexible multiple photonic colloidal crystal gels (PCCGs) using single-layered microchannels. These patterned PCCGs exhibit structural colors that can be tuned by adjustment of the diameter and concentration of the colloidal particles in precursor solutions of N-isopropylacrylamide (NIPAM) or polyethylene glycol diacrylate (PEGDA). The precursor solutions containing dispersed colloidal particles were selectively injected into single-layered microchannels where they polymerized rapidly. The shape, density, and height of the patterned PCCG pixels were determined by the microchannels, which in turn determined the optical properties of the PCCG arrays. Furthermore, the preparation of three different types of PCCGs exhibiting three different structural colors at a high pixel density was demonstrated successfully using the single-layered polydimethylsiloxane (PDMS) microchannels. Finally, the optical reflective properties and the mechanical flexibility of the patterned multiple PCCG arrays were evaluated. We expect that our method for the preparation of such patterned PCCG arrays will contribute to the development of flexible optical devices.

    DOI

    Scopus

    8
    被引用数
    (Scopus)
  • Printed high-frequency RF identification antenna on ultrathin polymer film by simple production process for soft-surface adhesive device

    Hiroki Hayata, Marin Okamoto, Shinji Takeoka, Eiji Iwase, Toshinori Fujie, Hiroyasu Iwata

    JAPANESE JOURNAL OF APPLIED PHYSICS   56 ( 5 ) 05EC01  2017年05月  [査読有り]

     概要を見る

    In this paper, we present a simple method for manufacturing electronic devices using ultrathin polymer films, and develop a high-frequency RF identification. To expand the market for flexible devices, it is important to enhance their adhesiveness and conformability to surfaces, to simplify their fabrication, and to reduce their cost. We developed a method to design an antenna for use on an operable RF identification whose wiring was subjected to commercially available inkjet or simple screen printing, and successfully fabricated the RF identification. By using ultrathin films made of polystyrene-block-polybutadiene-block-polystyrene (SBS) as substrates-less than 750nm-the films could be attached to various surfaces, including soft surfaces, by van der Waals force and without using glue. We succeeded in the simple fabrication of an ultrathin RF identification including a commercial or simple printing process. (C) 2017 The Japan Society of Applied Physics

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    7
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  • Printed Paper Robot Driven by Electrostatic Actuator

    Hiroki Shigemune, Shingo Maeda, Vito Cacucciolo, Yoshitaka Iwata, Eiji Iwase, Shuji Hashimoto, Shigeki Sugano

    IEEE Robotics and Automation Letters   2 ( 2 ) 1001 - 1007  2017年04月  [査読有り]

     概要を見る

    © 2017 IEEE. Effective design and fabrication of 3-D electronic circuits are among the most pressing issues for future engineering. Although a variety of flexible devices have been developed, most of them are still designed two-dimensionally. In this letter, we introduce a novel idea to fabricate a 3-D wiring board. We produced the 3-D wiring board from one desktop inkjet printer by printing conductive pattern and a 2-D pattern to induce self-folding. We printed silver ink onto a paper to realize the conductive trace. Meanwhile, a 3-D structure was constructed with self-folding induced by water-based ink printed from the same printer. The paper with the silver ink self-folds along the printed line. The printed silver ink is sufficiently thin to be flexible. Even if the silver ink is already printed, the paper can self-fold or self-bend to consist the 3-D wiring board. A paper scratch driven robot was developed using this method. The robot traveled 56 mm in 15 s according to the vibration induced by the electrostatic force of the printed electrode. The size of the robot is 30 × 15 × 10 mm. This work proposes a new method to design 3-D wiring board, and shows extended possibilities for printed paper mechatronics.

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    36
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  • Microfluidically Patterned Dome-Shaped Photonic Colloidal Crystals Exhibiting Structural Colors with Low Angle Dependency

    Noriyuki Suzuki, Eiji Iwase, Hiroaki Onoe

    ADVANCED OPTICAL MATERIALS   5 ( 4 ) 1600900  2017年02月  [査読有り]

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    14
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  • Sandwich fixation of electronic elements using free-standing elastomeric nanosheets for low-temperature device processes

    Marin Okamoto, Mizuho Kurotobi, Shinji Takeoka, Junki Sugano, Eiji Iwase, Hiroyasu Iwata, Toshinori Fujie

    JOURNAL OF MATERIALS CHEMISTRY C   5 ( 6 ) 1321 - 1327  2017年02月  [査読有り]

     概要を見る

    We fabricated free-standing, flexible and physically adhesive ultrathin elastomeric films (nanosheets) for application as electronic substrates and packaging films. In this work, electronic elements such as a chip resistor and a chip LED were sandwiched between elastomeric nanosheets of less than 1 mu m thickness to obtain electrical conduction in silver lines that were inkjet-printed on the nanosheet. This sandwich-fixation process contributed to the development of an electronic device showing conformable adhesion and operation on the skin surface.

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    13
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  • Flexible Coloring Element by Using Bending Deformation of Electroactive Hydrogel

    Kodai Usuki, Hiroaki Onoe, Eiji Iwase

    ELECTRONICS AND COMMUNICATIONS IN JAPAN   100 ( 1 ) 44 - 48  2017年01月  [査読有り]

     概要を見る

    We demonstrated coloring elements with high ratio change of the coloring area by using bending deformation of electroactive hydrogel. By using the nondimensional deflection of a gel, we showed that the response time for the color change and the thickness of the coloring element can be designed. We fabricated a 3 x 3 dot-matrix display with of 0.56 and evaluated the performance of the coloring element. As a result, the coloring area ratios in black state and colored state were 7.64 +/- 4.6% and 92.1 +/- 4.6%, respectively. The response times were 12 s from blank state to colored state, and 13 s from colored state to blank state.

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  • 再帰透過による空中映像における広視野角実現のための直交ミラーアレイの分割配置

    吉水 勇太, 岩瀬 英治

    ロボティクス・メカトロニクス講演会講演概要集   2017   2A1 - K10  2017年

     概要を見る

    <p>We proposed divided-type dihedral corner reflector array (DCRA) in order to display floating image with wide viewing angle. DCRA is a kind of optical device which can display floating image of real object by retrotransmission. The viewing angle of the floating image is, however, narrow, because the angle of incident ray which can be retrotransmission is limited. Therefore, we expand a range of viewing angle by dividing and combining DCRA to use the region in which the ray can be retrotransmission. In this paper, we evaluated the viewing angle of our divided DCRA by analyzing angular distribution of retrotransmissive ratio. As a result, we showed that the divided DCRA can be expanded the viewing angle of floating image to 180 deg.</p>

    DOI CiNii

  • 伸縮電子デバイスのための金属部と基材部の剛性比を用いた伸縮耐性の向上

    石井 智之, 朴 致済, 古志 知也, 岩瀬 英治

    ロボティクス・メカトロニクス講演会講演概要集   2017   1P2 - K10  2017年

     概要を見る

    <p>We investigated an effect of an elongation stiffness of a substrate and a metal wire to stretchability of a wavy metal wire. We focused on a ratio of the elongation stiffness of the substrate to that of the metal wire. In tensile test using two kinds of wavy specimens, most of the results showed increase of the maximum elongation at increase of the elongation stiffness ratio. When the elongation stiffness ratio is changed from 0 to 0.910, the stretchability is increased from 0.322 to 0.594 and from 0.337 to 0.425. This result suggests that stretchability can be improved by designing the elongation stiffness ratio.</p>

    DOI CiNii

  • 大面積自立薄膜構造を用いたナノ薄膜機械振動子の製作および評価

    長村 透, 岩瀬 英治

    ロボティクス・メカトロニクス講演会講演概要集   2017   1A1 - M11  2017年

     概要を見る

    <p>Our goal is to realize a mechanical resonator with large freestanding nanomembrane. First of all, we measured residual stress caused by deposition of gold layer and designed the thickness of the gold layer on the nanomenbrane as 500 nm. Then, we practically fabricated and measured a structure of a nanomechanical resonator with a 500-nm-thick gold layer on a 50-nm-thick silicon nitride nanomembrane. In the part of freestanding nanomembrane, there was no breaks nor bucking, and roughness of the surface was less than 100 nm. The average height of pillars was 578 nm. Finally, we measured that the resonant frequency of the fabricated structure was 188.83 kHz and the Quality factor was 797 in the atmosphere.</p>

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  • 複数の測温部を設けた熱伝導式皮膚水分量センサの製作および評価

    福家 加奈, 岩瀬 英治

    ロボティクス・メカトロニクス講演会講演概要集   2017   1A1 - J10  2017年

     概要を見る

    <p>We proposed a skin moisture sensor with multiple temperature measuring parts for self-calibration. A resistance temperature detector (RTD) can be used for both heat source and temperature measurement. We fabricated a device with four RTDs to measure the skin moisture content. The temperature coefficients of resistance of the fabricated RTDs are almost the same. On the other hand, a fluctuation of temperature rise was, however, observed. Therefore, we proposed a method of self-calibration of the difference in the calorific value of the heat source by the temperature rise measured by the heat source. By using the proposed method, we showed that the temperature rise fluctuation measured by the resistance can be reduced.</p>

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  • STRETCHABLE ELECTRONIC DEVICE WITH REPEAT SELF-HEALING ABILITY OF METAL WIRE

    Tomoya Koshi, Eiji Iwase

    30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017)     262 - 265  2017年  [査読有り]

     概要を見る

    This paper reports a stretchable electronic device with repeat self-healing ability of a wire crack caused by stretching deformation. The crack of metal wire is healed with assembled metal nanoparticles by dielectrophoresis, when a voltage is applied to the cracked wire covered with the nanoparticle solution. By designing a circuit, we controlled the applied voltage and current for the self-healing to be avoid excessive Joule heating in the assembled nanoparticles. This consideration enables us to heal a crack of tens of micrometers in width and to practically achieve a stretchable electronic device.

  • STRESS-FREE STRETCHABLE ELECTRONIC DEVICE USING FOLDING DEFORMATION

    Yoshitaka Iwata, Eiji Iwase

    30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017)     231 - 234  2017年  [査読有り]

     概要を見る

    We developed a two-dimensionally (2-D) stretchable electronic device with stress-free region by applying origami folding. The key idea is to achieve "a stretching deformation of whole device" by "a local bending deformation". Because our device has stress-free region, we can use a rigid chip (such as LED chips and MEMS sensors) and a metal wire without mechanical fracture or metal fatigue. In this paper, first, we proposed a 2-D stretchable structure by developing "miura-ori" folding. Next, we fabricated a 2-D stretchable electronic device, and confirmed that wire fatigue or cracks are not generated by repeated deformation. Finally, we demonstrated 2-D stretchability and bendability using the device with inorganic LED chips.

  • HYBRID FILM FOR SELF-ADHESION AND SHAPE-CONTROLLING

    Sota Shimbo, Toshinori Fujie, Eiji Iwase

    30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017)     624 - 627  2017年  [査読有り]

     概要を見る

    We report a hybrid film that is composed of "polymer nanosheet" with a hundreds-of-nanometer-thick film and "punched film" with hundreds-of-micrometer-thick film. Because of the thickness, the nanosheet is able to adhere to biological tissues without a glue, but is sometimes difficult to handling. Our hybrid film is established both adhesiveness of the nanosheet and shape-controlling ability of the punched film. In this paper, first, we fabricated the cylindrical-shaped hybrid film. Next, we achieved the hybrid film unfold into flat shape. Finally, we evaluated the adhesion force of the hybrid film and confirmed that the hybrid film can adhere to biological tissues.

  • Dynamic transformation of self-assembled structures using anisotropic magnetized hydrogel microparticles

    Satoru Yoshida, Masahiro Takinoue, Eiji Iwase, Hiroaki Onoe

    JOURNAL OF APPLIED PHYSICS   120 ( 8 ) 084905  2016年08月  [査読有り]

     概要を見る

    This paper describes a system through which the self-assembly of anisotropic hydrogel microparticles is achieved, which also enables dynamic transformation of the assembled structures. Using a centrifuge-based microfluidic device, anisotropic hydrogel microparticles encapsulating superparamagnetic materials on one side are fabricated, which respond to a magnetic field. We successfully achieve dynamic assembly using these hydrogel microparticles and realize three different self-assembled structures (single and double pearl chain structures, and close-packed structures), which can be transformed to other structures dynamically via tuning of the precessional magnetic field. We believe that the developed system has potential application as an effective platform for a dynamic cell manipulation and cultivation system, in biomimetic autonomous microrobot organization, and that it can facilitate further understanding of the self-organization and complex systems observed in nature. Published by AIP Publishing.

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    18
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  • Sheet shape-controlling method for hundreds-of-nanometer-thick polymer film using soluble polymer layer

    Sota Shimbo, Toshinori Fujie, Eiji Iwase

    JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 6 ) 06GP21  2016年06月  [査読有り]

     概要を見る

    We proposed a sheet shape-controlling method for a hundreds-of-nanometers-thick polymeric ultrathin film (referred to as a "nanosheet") for folding the film into a cylindrical shape and unfolding the film into a flat shape. To control the shape of the nanosheet, we used a triple-layered structure, which included a nanosheet and additional two layers of a water-soluble polymer. The additional two layers are thicker than the nanosheet, and one of the two layers was loaded to prestretch that layer. Therefore, the triple-layered structure was folded into a cylindrical shape owing to strain mismatch between the two layers and unfolded into a flat shape after the dissolution of the two layers. In this study, we could successfully estimate the radius of curvature of the triple-layered structure by considering the strain mismatch between the two layers. In addition, we confirmed that the triple-layered structure unfolded into a flat shape by the dissolution of the two layers. (C) 2016 The Japan Society of Applied Physics

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    3
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  • 金属ナノ粒子の電界トラップを用いた自己修復型金属配線の粒径依存性

    古志知也, 岩瀬英治

    日本機械学会論文集   82 ( 834 ) 15-00470  2016年02月  [査読有り]

     概要を見る

    On a metal wire with a self-healing function of a crack using electric field trapping of metal nanoparticles, we examined a healable crack width by using the different particle size. The electric field trapping is a phenomenon where the nanoparticles are trapped in the crack by the electric field in the region of the crack only, when a voltage is applied to the cracked wire covered with the nanoparticle solution. In this paper, first, we theoretically analyzed and calculated the particle size dependence of forces acting on the nanoparticles. Next, we fabricated gold wires with patterned cracks on a glass substrate, and measured the healable crack width by comparing 20 nm, 100 nm and 200 nm in particle radius. In the experiments, gold nanoparticles aqueous solution was used as nanoparticles solution. As a result, in the each case of 20 nm, 100 nm and 200 nm in particle radius, cracks up to 1.5 μm, 2.5 μm and 4.0 μm were successfully healed by applying less than 4.2 V in amplitude and 100 kHz in frequency of AC voltage, respectively. These results indicate that the larger nanoparticle can heal the wider crack with the same cross-sectional shape of the wire and the approximately same applied voltage. After the experiments, we confirmed that assembled nanoparticles were bridging the crack at the inside of the crack through scanning electron microscope (SEM) observations.

    DOI CiNii

  • MICROFLUIDIC PATTERNING OF HEMISPHERICAL DOME-SHAPE PHOTONIC COLLOIDAL CRYSTALS FOR WIDE-VIEWING-ANGLE REFLECTIVE DISPLAY

    Noriyuki Suzuki, Eiji Iwase, Hiroaki Onoe

    2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)     613 - 616  2016年  [査読有り]

     概要を見る

    This paper describes a micropatterning method of hemispherical dome shape photonic colloidal crystals (PCCs) in microchannels for a wide-viewing-angle optical color filter of a reflective display. We fabricated hemispherical dome-top PDMS microchannels and crystalized colloidal particles inside the microchannel. These dome-shape micorchannels enable us to observe reflected light (structural color) from the PCCs in wide viewing-angle (Fig. I). We succeeded in patterning of two types of hemispherical PCCs in the dome-top micorchannels, and confirmed that those patterned PCCs reflected their structural color in wide-viewing-angle. Our patterning method could be effective to realize an optical filter for full-color, wide-viewing-angle and low-energy consumption reflective displays

  • Development of Inexpensive Skin Adhesive Electronic Device - RFID Tag Implementation on Ultrathin Polymer Film -

    H.HAYATA, M.OKAMOTO, S.TAKEOKA, E.IWASE, T.FUJIE, H.IWATA

    Int. Conf. on Flexible and Printed Electronics   O5-4  2016年  [査読有り]

  • 1対の支持梁による3次元駆動MEMSスキャナの形状設計

    小口陽平, 飯野知紗, 岩瀬英治

    電気学会論文誌E   136 ( 10 ) 448 - 453  2016年  [査読有り]

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    1
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  • 電場応答性ハイドロゲルの屈曲変形を利用した柔軟発色素子

    薄功大, 尾上弘晃, 岩瀬英治

    電気学会論文誌E   135 ( 12 ) 480 - 483  2015年12月  [査読有り]

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  • Moisture sensor based on heat transfer possessing insusceptibility to coating materials on skin

    Minako Hosono, Akihiro Isozaki, Koki Katoh, Yasumasa Ichikawa, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    SENSORS AND ACTUATORS A-PHYSICAL   235   265 - 272  2015年11月  [査読有り]

     概要を見る

    This paper presents a thermal-based skin moisture sensor that is insusceptible to thin coating materials on skin. To realize this sensor, numerical simulations are performed to evaluate the influence of surface-coating materials, such as Vaseline moisturizer, on the heat transfer from a heat source in the sensor to the skin. The simulation results show that the influence of the thin Vaseline layer on the temperature change of the heat source is negligible, but the existence of air gaps between the sensor and the skin drastically interrupts the heat transfer. Considering the simulation results, the thermal-based skin moisture sensor is designed and fabricated with a microelectromechanical systems (MEMS) pressure sensor to avoid heat transfer interruption due to air gaps. The measurement results of water content in a water-absorbing polymer, covered with a 10-mu m-thick polyethylene film, show that the moisture sensor can assess the water content of materials that are covered with a thin layer. Finally, we demonstrate the hydration measurement of skin with Vaseline coating. The measurement results confirm the potential of the moisture sensor to measure the water content of skin covered with moisturizing substances. (C) 2015 Elsevier B.V. All rights reserved.

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    1
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  • Deformable coloring element using an electroactive hydrogel with bottom-arranged electrodes

    Kodai Usuki, Hiroaki Onoe, Eiji Iwase

    JAPANESE JOURNAL OF APPLIED PHYSICS   54 ( 6 )  2015年06月  [査読有り]

     概要を見る

    By using an electroactive hydrogel, we proposed and fabricated a deformable coloring element. The proposed element is composed of a dyed electroactive hydrogel piece and bottom-arranged electrodes. By using the bottom arrangement of electrodes, we can use a simple fabrication and achieve a high fill factor (FF). To design the element, we analyzed the electric field in various dimensions of the electrodes by using a charge simulation method. The bending factor (BF) was defined as an index of bending direction and speed of the gel. From the difference between the BFs for each dimension, we found the optimal parameters required to maximize BF on the chosen boundary condition of FF &gt;= 0.9. We then determined the dimensions of a coloring element on the basis of the results of the analysis. Finally, a 3 x 3 dot-matrix display was fabricated to demonstrate a color change in all nine cells. (C) 2015 The Japan Society of Applied Physics

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    5
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  • Self-healing metal wire using electric field trapping of metal nanoparticles

    Tomoya Koshi, Eiji Iwase

    JAPANESE JOURNAL OF APPLIED PHYSICS   54 ( 6 ) 06FP03  2015年06月  [査読有り]

     概要を見る

    We propose a self-healing metal wire using electric field trapping of gold nanoparticles by a dielectrophoresis force. A cracked gold wire can retrieve its conductivity through the self-healing function. In this paper, we examine the healing voltage causing the electric field trapping and determine the healing time, which is relevant to future device applications. First, the forces acting on a nanoparticle are analyzed and a theoretical healing voltage curve is calculated. Then, gold wires with 200- to 1,600-nm-wide cracks are fabricated on glass substrate and the self-healing function is verified through healing experiments. As a result, gold wires with cracks of up to 1,200 nm in width are successfully healed by applying less than similar to 2.5 V (on average), and the experimental results correspond almost exactly with the calculated healing voltage curve. The average healing times are 10 to 285 s for 200- to 1,200-nm-wide cracks. Through scanning electron microscope analysis after the healing experiments, we confirm that the cracks are healed by assembled nanoparticles. (C) 2015 The Japan Society of Applied Physics

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    15
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  • SELF-HEALING METAL WIRE USING AN ELECTRIC FIELD TRAPPING OF GOLD NANOPARTICLES FOR FLEXIBLE DEVICES

    Tomoya Koshi, Eiji Iwase

    2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015)     81 - 84  2015年  [査読有り]

     概要を見る

    We developed a self-healing metal wire using an electric field trapping of gold nanoparticles. A cracked metal wire on a stretchable substrate can get its conductivity again by the self-healing function. In this paper, first, we theoretically analyzed force acting on a nanoparticle and calculated a critical voltage which cause the electric field trapping. Next, we fabricated gold wires with artificially patterned cracks on a glass substrate and verified the self-healing function by experiments of a crack healing. Finally, we demonstrated the self-healing of a cracked metal wire on a stretchable substrate to show a usefulness of the self-healing for flexible devices.

  • Strong Mechanical Nonlinearity of Optomechanically Driven Suspended Photonic Crystal Membrane

    Pui-Chuen Hui, Alejandro Rodriguez, David Woolf, Eiji Iwase, Mughees Khan, Federico Capasso, Marko Loncar

    2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)    2015年  [査読有り]

     概要を見る

    We demonstrated the nonlinear mechanics of an optomechnaically driven silicon membrane suspended 100nm over a nearby substrate. The estimated optical force-induced Duffing nonlinearity is 10(28)Hz(2)/m(2), significantly larger than that afforded by the nonlinear Casimir potential.

  • MICROPATTERNING OF MULTIPLE PHOTONIC COLLOIDAL CRYSTALS IN SINGLE-LAYERED MICROCHANNELS FOR STRUCTURAL-COLOR OPTICAL FILTER

    Noriyuki Suzuki, Eiji Iwase, Hiroaki Onoe

    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)     407 - 410  2015年  [査読有り]

     概要を見る

    We describe a simple and rapid micropatterning method of multiple types of photonic colloidal crystals (PCCs) on a single substrate for an optical color filter of a reflective display. We developed a "Channel-Cut Method" to introduce multiple colloidal suspensions selectively and sequentially into a microchannel network. By combining this method with centrifugal crystallization, we succeeded in patterning of two different PCCs made of silica or polystylene in a single-layered microchannel. We believe that our method could contribute to develop a colorized reflective display that achieves low energy consumption and high color expression.

  • Stretchable cell culture platforms using micropneumatic actuators

    Yun Jung Heo, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    MICRO & NANO LETTERS   8 ( 12 ) 865 - 868  2013年12月  [査読有り]

     概要を見る

    A stretchable cell culture platform in which elastic micropneumatic actuators are embedded has been developed. By using the softlithography of polydimethylsiloxane (PDMS), the platform can be fabricated to any size and shape. It also permits cell culture by using the same standard methods that one would use with a Petri dish and it is transparent, permitting optical inspection of the cells. Thus, the platform is promising for studying cell responses because of mechanical stimulus. In this reported work, cells were cultured on a PDMS diaphragm of the micropneumatic actuators. Owing to input pressure, the micropneumatic actuators swell like a balloon, thereby stretching the cell membranes on the PDMS. The design flexibility of the presented approach is demonstrated by developing two kinds of stretchable platforms with diaphragm diameters of 558 and 24.8 m to stretch whole and local cell membranes, respectively. Then, the cell membranes attached on the PDMS diaphragms are stretched by applying pressure on the pneumatic actuators. The applied stress causes an increase in the intracellular calcium ion concentration that is a fast cellular mechanotransduction. Therefore, it is concluded that the method for stretching cell membranes can stimulate either whole or local cell membranes, thus showing the potential to be used in in vitro studies of cellular mechanotransduction.

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  • Optical bistability with a repulsive optical force in coupled silicon photonic crystal membranes

    Pui-Chuen Hui, David Woolf, Eiji Iwase, Young-Ik Sohn, Daniel Ramos, Mughees Khan, Alejandro W. Rodriguez, Steven G. Johnson, Federico Capasso, Marko Loncar

    APPLIED PHYSICS LETTERS   103 ( 2 ) 21102  2013年07月  [査読有り]

     概要を見る

    We demonstrate actuation of a silicon photonic crystal membrane with a repulsive optical gradient force. The extent of the static actuation is extracted by examining the optical bistability as a combination of the optomechanical, thermo-optic, and photo-thermo-mechanical effects using coupled-mode theory. Device behavior is dominated by a repulsive optical force which results in displacements of approximate to 1 nm/mW. By employing an extended guided resonance which effectively eliminates multi-photon thermal and electronic nonlinearities, our silicon-based device provides a simple, non-intrusive solution to extending the actuation range of micro-electromechanical devices. (C) 2013 AIP Publishing LLC.

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    16
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  • A photoresponse-compensated parallel piezoresistive cantilever for cellular force measurements

    Uijin G. Jung, Kenta Kuwana, Yoshiharu Ajiki, Hidetoshi Takahashi, Tetsuo Kan, Yusuke Takei, Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Journal of Micromechanics and Microengineering   23 ( 4 ) 45015  2013年04月  [査読有り]

     概要を見る

    This paper describes a parallel piezoresistive cantilever that is composed of a force-sensing cantilever in addition to a reference cantilever for photoresponse compensation. Piezoresistive cantilevers have been applied in many cellular mechanical measurement studies because of their high sensitivity, high time resolution and ease of handling. However, the electrical resistance changes in response to the excitation light of the fluorescence microscope, which affects the cell measurements. We measured the I-V characteristics of a piezoresistive layer. These photoresponses occurred due to the internal photoelectric effect. We canceled the photoresponses using the reference cantilever. This paper demonstrates compensation of the cantilever photoresponse under irradiation at different angles, wavelengths and light intensities. As a result, the photoresponse could be decreased by 87%. © 2013 IOP Publishing Ltd.

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    7
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  • Optomechanical and photothermal interactions in suspended photonic crystal membranes

    David Woolf, Pui-Chuen Hui, Eiji Iwase, Mughees Khan, Alejandro W. Rodriguez, Parag Deotare, Irfan Bulu, Steven G. Johnson, Federico Capasso, Marko Loncar

    OPTICS EXPRESS   21 ( 6 ) 7258 - 7275  2013年03月  [査読有り]

     概要を見る

    We present here an optomechanical system fabricated with novel stress management techniques that allow us to suspend an ultrathin defect-free silicon photonic-crystal membrane above a Silicon-on-Insulator (SOI) substrate with a gap that is tunable to below 200 nm. Our devices are able to generate strong attractive and repulsive optical forces over a large surface area with simple in-and out-coupling and feature the strongest repulsive optomechanical coupling in any geometry to date (g(OM)/2 pi approximate to -65 GHz/nm). The interplay between the optomechanical and photo-thermal-mechanical dynamics is explored, and the latter is used to achieve cooling and amplification of the mechanical mode, demonstrating that our platform is well-suited for potential applications in low-power mass, force, and refractive-index sensing as well as optomechanical accelerometry. (C) 2013 Optical Society of America

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    34
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  • Flexible tactile sensor for shear stress measurement using transferred sub-mu m-thick Si piezoresistive cantilevers

    Kentaro Noda, Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   22 ( 11 ) 115025  2012年11月  [査読有り]

     概要を見る

    We propose a flexible tactile sensor using sub-mu m-thick Si piezoresistive cantilevers for shear stress detection. The thin Si piezoresistive cantilevers were fabricated on the device layer of a silicon on insulator (SOI) wafer. By using an adhesion-based transfer method, only these thin and fragile cantilevers were transferred from the rigid handling layer of the SOI wafer to the polydimethylsiloxane layer without damage. Because the thin Si cantilevers have high durability of bending, the proposed sensor can be attached to a thin rod-type structure serving as the finger of a robotic hand. The cantilevers were arrayed in orthogonal directions to measure the X and Y directional components of applied shear stresses independently. We evaluated the bending durability of our flexible tactile sensor and confirmed that the sensor can be attached to a rod with a radius of 10 mm. The sensitivity of the flexible tactile sensor attached to a curved surface was 1.7 x 10(-6) Pa-1 on average for a range of shear stresses from -1.8 x 10(3) to 1.8 x 10(3) Pa applied along its surface. It independently detected the X and Y directional components of the applied shear stresses.

    DOI

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    26
    被引用数
    (Scopus)
  • MEMS microphone with a micro Helmholtz resonator

    Hidetoshi Takahashi, Akira Suzuki, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   22 ( 8 ) 085019  2012年08月  [査読有り]

     概要を見る

    This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2 mm x 1.2 mm x 0.6 mm and 130 mu m x 40 mu m x 0.3 mu m, respectively. At a resonance frequency of 22.6 kHz, the cantilever with the HR detected ultrasonic waves with 14 times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0 m.

    DOI

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    14
    被引用数
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  • Control of buckling in large micromembranes using engineered support structures

    Eiji Iwase, Pui-Chuen Hui, David Woolf, Alejandro W. Rodriguez, Steven G. Johnson, Federico Capasso, Marko Loncar

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   22 ( 6 ) 065028  2012年06月  [査読有り]

     概要を見る

    In this paper we describe a general method to avoid stress-induced buckling of thin and large freestanding membranes. We show that using properly designed supports, in the form of microbeams, we can reduce the out-of-plane deflection of the membrane while maintaining its stiffness. As a proof of principle, we used a silicon-on-insulator (SOI) platform to fabricate 30 mu m wide, 220 nm thick, free-standing Si membranes, supported by four 15 mu m long and 3 mu m wide microbeams. Using our approach, we are able to achieve an out-of-plane deformation of the membrane smaller than 50 nm in spite of 39 MPa of compressive internal stress. Our method is general, and can be applied to different material systems with compressive or tensile internal stress.

    DOI

  • Towards optical manipulation of Casimir force using free-standing membranes with engineered optical and mechanical properties

    Eiji Iwase, Pui-Chuen Hui, David Woolf, Alejandro W. Rodriguez, Mughees Khan, Steven G. Johnson, Federico Capasso, Marko Loncar

    2012 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)    2012年  [査読有り]

     概要を見る

    By engineering supporting beams of a thin opto-mechanical membrane, we are able to reduce the stress-induced deflection, and realize devices that feature strong optical force for probing the Casimir force.

  • Dynamics of a tethered silicon photonic crystal membrane due to optical gradient, photothermal and Casimir forces

    Pui-Chuen Hui, David Woolf, Eiji Iwase, Irfan Bulu, Alejandro Rodriguez, Mughees Khan, Parag Deotare, Steven G. Johnson, Federico Capasso, Marko Loncar

    2012 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)    2012年  [査読有り]

     概要を見る

    We experimentally studied the effects of optical gradient and photothermal forces on the optomechanics of tethered silicon membranes. Novel engineering of support arms facilitates tunable optomechanical coupling and probing of Casimir interactions.

  • Designing evanescent optical interactions to control the expression of Casimir forces in optomechanical structures

    Alejandro W. Rodriguez, David Woolf, Pui-Chuen Hui, Eiji Iwase, Alexander P. McCauley, Federico Capasso, Marko Loncar, Steven G. Johnson

    APPLIED PHYSICS LETTERS   98 ( 19 ) 194105  2011年05月  [査読有り]

     概要を見る

    We propose an optomechanical structure consisting of a photonic-crystal (holey) membrane suspended above a layered silicon-on-insulator substrate in which resonant bonding/antibonding optical forces created by externally incident light from above enable all-optical control and actuation of stiction effects induced by the Casimir force. In this way, one can control how the Casimir force is expressed in the mechanical dynamics of the membrane, not by changing the Casimir force directly but by optically modifying the geometry and counteracting the mechanical spring constant to bring the system in or out of regimes where Casimir physics dominate. The same optical response (reflection spectrum) of the membrane to the incident light can be exploited to accurately measure the effects of the Casimir force on the equilibrium separation of the membrane. (C) 2011 American Institute of Physics. [doi:10.1063/1.3589119]

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    25
    被引用数
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  • Optical bonding and antibonding forces in asymmetric geometries for Casimir force detection

    David Woolf, Pui-Chuen Hui, Eiji Iwase, Alexajandro Rodriguez, Alexander McCauley, Igor Lovchinsky, Mughees Kahn, Steven Johnson, Marko Loncar, Federico Capasso

    2011 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)    2011年  [査読有り]

     概要を見る

    The optical bonding (attractive) and antibonding (repulsive) forces between a suspended, holey Silicon membrane and a Silicon-on-Insulator (SOI) substrate are shown to offer a sensitive new method for plane-plane geometry Casimir force detection. (C) 2010 Optical Society of America

  • Bonding, antibonding and tunable optical forces in asymmetric membranes

    Alejandro W. Rodriguez, Alexander P. McCauley, Pui-Chuen Hui, David Woolf, Eiji Iwase, Federico Capasso, Marko Loncar, Steven G. Johnson

    OPTICS EXPRESS   19 ( 3 ) 2225 - 2241  2011年01月  [査読有り]

     概要を見る

    We demonstrate that tunable attractive (bonding) and repulsive (anti-bonding) forces can arise in highly asymmetric structures coupled to external radiation, a consequence of the bonding/anti-bonding level repulsion of guided-wave resonances that was first predicted in symmetric systems. Our focus is a geometry consisting of a photonic-crystal (holey) membrane suspended above an unpatterned layered substrate, supporting planar waveguide modes that can couple via the periodic modulation of the holey membrane. Asymmetric geometries have a clear advantage in ease of fabrication and experimental characterization compared to symmetric double-membrane structures. We show that the asymmetry can also lead to unusual behavior in the force magnitudes of a bonding/antibonding pair as the membrane separation changes, including nonmonotonic dependences on the separation. We propose a computational method that obtains the entire force spectrum via a single time-domain simulation, by Fourier-transforming the response to a short pulse and thereby obtaining the frequency-dependent stress tensor. We point out that by operating with two, instead of a single frequency, these evanescent forces can be exploited to tune the spring constant of the membrane without changing its equilibrium separation. (C) 2011 Optical Society of America

    DOI

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    26
    被引用数
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  • Long-range surface plasmon resonance sensor with liquid micro-channels to maintain the symmetry condition of the refractive index

    Tetsuo Kan, Hiroyuki Kojo, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   20 ( 12 ) 125005  2010年12月  [査読有り]

     概要を見る

    We propose a method to maintain the symmetry of the refractive index with respect to an Au film, in which the refractive indices are the same near both surfaces of the Au film, for LRSPR (long-range surface plasmon resonance) sensors. Maintenance of the symmetry is necessary for exciting the LRSPR mode. However, because the buffer layer under the Au film is usually made of a solid dielectric material with a constant refractive index, the quality of the measurement is reduced when the refractive index of the analyte used is dramatically different from that of the buffer layer. To solve this problem, the proposed sensor is equipped with liquid channels under the Au film. The Au film used in this study was supported by a thin (100 nm) polymer film forming parallel, one-dimensional liquid channels with a 29 mu m pitch. Because the analyte solution flows in the channels, both surfaces of the Au film face the same analyte. Thus, this configuration automatically satisfies the symmetry condition for analytes with a wide range of refractive indices. We examined the validity of the sensor and compared it to that of a conventional sensor by measuring the LRSPR for five analyte solutions with different refractive indices. LRSPR dips were clearly observed for all of the analytes tested. The dip of the conventional LRSPR sensor became shallow when the refractive index increased, with the final dip depth being 65% of the initial dip depth for a refractive index of 1.358. In contrast, the dip depth of the proposed LRSPR sensor remained constant over the entire measured refractive index range of 1.331 to 1.358. These results indicate that the proposed sensor maintains the symmetry condition and confirm that the proposed method is effective for highly sensitive LRSPR measurements for a wide variety of analyte species.

    DOI

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    12
    被引用数
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  • Differential pressure measurement using a free-flying insect-like ornithopter with an MEMS sensor

    Hidetoshi Takahashi, Yuichiro Aoyama, Kazuharu Ohsawa, Hiroto Tanaka, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    BIOINSPIRATION & BIOMIMETICS   5 ( 3 ) 036005  2010年09月  [査読有り]

     概要を見る

    This paper presents direct measurements of the aerodynamic forces on the wing of a free-flying, insect-like ornithopter that was modeled on a hawk moth (Manduca sexta). A micro differential pressure sensor was fabricated with micro electro mechanical systems (MEMS) technology and attached to the wing of the ornithopter. The sensor chip was less than 0.1% of the wing area. The mass of the sensor chip was 2.0 mg, which was less than 1% of the wing mass. Thus, the sensor was both small and light in comparison with the wing, resulting in a measurement system that had a minimal impact on the aerodynamics of the wing. With this sensor, the 'pressure coefficient' of the ornithopter wing was measured during both steady airflow and actual free flight. The maximum pressure coefficient observed for steady airflow conditions was 1.4 at an angle of attack of 30 degrees. In flapping flight, the coefficient was around 2.0 for angles of attack that ranged from 25 degrees to 40 degrees. Therefore, a larger aerodynamic force was generated during the downstroke in free flight compared to steady airflow conditions.

    DOI

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    26
    被引用数
    (Scopus)
  • Transparent conductive-polymer strain sensors for touch input sheets of flexible displays

    Seiichi Takamatsu, Tomoyuki Takahata, Masato Muraki, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   20 ( 7 ) 075017  2010年07月  [査読有り]

     概要を見る

    A transparent conductive polymer-based strain-sensor array, designed especially for touch input sheets of flexible displays, was developed. A transparent conductive polymer, namely poly(3, 4-ethylenedioxythiophene):polystyrenesulfonate (PEDOT:PSS), was utilized owing to its strength under repeated mechanical bending. PEDOT: PSS strain sensors with a thickness of 130 nm exhibited light transmittance of 92%, which is the same as the transmittance of ITO electrodes widely used in flat panel displays. We demonstrated that the sensor array on a flexible sheet was able to sustain mechanical bending 300 times at a bending radius of 5 mm. The strain sensor shows a gauge factor of 5.2. The touch point on a flexible sheet could be detected from histograms of the outputs of the strain sensors when the sheet was pushed with an input force of 5 N. The touch input could be detected on the flexible sheet with a curved surface (radius of curvature of 20 mm). These results show that the developed transparent conductive polymer-based strain-sensor array is applicable to touch input sheets of mechanically bendable displays.

    DOI

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    60
    被引用数
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  • Three-dimensional silicon fabrication using microloading effects with a rectangular aperture mask

    Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   20 ( 7 ) 075022  2010年07月  [査読有り]

     概要を見る

    Three-dimensional silicon fabrication is demanded in optical lenses for collecting far infrared radiation. We propose a method for the fabrication of shapes, which have depths varying in the x and y directions, vertical walls and smooth surfaces. A mask design with rectangular apertures was used in a two-stage etching process consisting of anisotropic etching to rough out the three-dimensional shape followed by isotropic etching to smooth the surface. The relationship between the etching depth and area and the aspect ratio (length-to-height ratio) of the rectangular apertures was determined experimentally. Based on this relationship, we describe a procedure for designing rectangular apertures. We fabricated a convex microlens with a diameter of 150 mu m and a height of 4.3 mu m surrounded by a vertical wall. The arithmetic mean surface roughness of the microlens was 100 nm.

    DOI

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    5
    被引用数
    (Scopus)
  • Fabrication and demonstration of an electrochromic voxel array for a volume display prototype

    Seiichi Takamatsu, Sachio Murao, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    IEICE ELECTRONICS EXPRESS   7 ( 13 ) 920 - 924  2010年07月  [査読有り]

     概要を見る

    We fabricated and demonstrated electrochromic voxel arrays for a three-dimensional (3D) display prototype. A voxel is a cubic display element of a 3D image. The voxels were constructed with ultraviolet-curable polymer on a substrate with a MEMS process and coated with poly-(3,4-ethylenedioxythiophene): poly-styrenesulfonate (PEDOT:PSS). The resultant substrates were stacked in three-dimensional space. The PEDOT: PSS color changes from transparent to blue when -1V is applied. The coloration of one voxel was observed from the top and side views, and the coloration of a 3 x 3 x 3 voxel array was also observed.

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  • Liquid-Phase Packaging of a Glucose Oxidase Solution with Parylene Direct Encapsulation and an Ultraviolet Curing Adhesive Cover for Glucose Sensors

    Seiichi Takamatsu, Hisanori Takano, Nguyen Binh-Khiem, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    SENSORS   10 ( 6 ) 5888 - 5898  2010年06月  [査読有り]

     概要を見る

    We have developed a package for disposable glucose sensor chips using Parylene encapsulation of a glucose oxidase solution in the liquid phase and a cover structure made of an ultraviolet (UV) curable adhesive. Parylene was directly deposited onto a small volume (1 mu L) of glucose oxidase solution through chemical vapor deposition. The cover and reaction chamber were constructed on Parylene film using a UV-curable adhesive and photolithography. The package was processed at room temperature to avoid denaturation of the glucose oxidase. The glucose oxidase solution was encapsulated and unsealed. Glucose sensing was demonstrated using standard amperometric detection at glucose concentrations between 0.1 and 100 mM, which covers the glucose concentration range of diabetic patients. Our proposed Parylene encapsulation and UV-adhesive cover form a liquid phase glucose-oxidase package that has the advantages of room temperature processing and direct liquid encapsulation of a small volume solution without use of conventional solidifying chemicals.

    DOI

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    10
    被引用数
    (Scopus)
  • FORCE SENSOR BASED ON METAL NANOPARTICLE

    Asuto Koyama, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     428 - 431  2010年  [査読有り]

     概要を見る

    We propose a force sensor based on gold nanoparticles, which enable optical detection of force by measurement of the scattering light spectrum. Gold nanoparticles were dispersed on an elastomer sheet. The scattering spectrum changes due to strain were observed to investigate applicability of the sensor to force measurement. The force deforms the elastomer sensor body, and increases the interparticle distance of gold nanoparticles on the sheet. The increase of the interparticle distance gives rise to the scattering characteristic changes. We fabricated a prototype sensor using PDMS sheet and 40 nm of diameter gold nanoparticles. It was demonstrated that 21% strain induced 60% increase of scattering intensity of gold nanoparticles.

  • TRIAXIAL FORCE MEASUREMENT CANTILEVER BY SIDEWALL-DOPING WITH RAPID THERMAL DIFFUSION

    Yuichiro Aoyama, Nguyen Binh-Khiem, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     619 - 622  2010年  [査読有り]

     概要を見る

    We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing tip and the sidewalls of the two sensing beams. We confirmed that our device was able to measure triaxial forces. The displacement sensitivities of the device were 1.59x10(-3) mu m(-1), 1.18x10(-3) mu m(-1) and 3.26x10(-4) mu m(-1) for x, y, and z-direction, respectively.

    DOI

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    2
    被引用数
    (Scopus)
  • SOUND DIRECTION SENSOR WITH AN ACOUSTIC CHANNEL

    Minh Dung Nguyen, Akira Inaba, Akira Suzuki, Hidetoshi Takahashi, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     655 - 658  2010年  [査読有り]

     概要を見る

    This paper reports on a method for estimating direction of a sound with one directional acoustic sensor. Inspired by the two input structure of bushcricket ear, our sensor was designed to have an acoustic channel and a micro piezo-resistive cantilever. The radiated sound acts simultaneously on the external and on the inner surface of the cantilever. As the result, the directionality of our sensor varies with the frequency of incident sound. The sound direction was estimated by using directional responses of the sensor at multiple frequencies so that it does not require either angle scanning or microphone arrays. We demonstrated that this method enables the sound direction to be estimated with the average error of 4 degrees in laboratory experiments.

  • PHOTO-RESPONSE COMPENSATED PIEZORESISTIVE CANTILEVER FOR USE IN FLUORESCENCE MICROSCOPY

    Uijin Jung, Kenta Kuwana, Hidetoshi Takahashi, Tetsuo Kan, Yusuke Takei, Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     588 - 591  2010年  [査読有り]

     概要を見る

    This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.

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  • MEASUREMENT OF THE IMPACT STRESS IN A GOLF CLUB HEAD

    Akira Hasegawa, Akihito Nakai, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     592 - 595  2010年  [査読有り]

     概要を見る

    We directly measured the stresses induced on impact between a golf ball and a golf club head. The strain sensors were embedded into grooves on the face of the club head. 3-axis strain sensors were able to measure one normal stress and two shear stresses at each location. The shear stress directions indicated by the outputs of the sensors were in good agreement with the direction of the ball spin obtained from high speed camera images. The peak of the normal stress and shear stress on the contact face were measured to be 4x10(8) Pa and 1x10(8) Pa, respectively.

  • THERMAL-BASED SKIN MOISTURE DEVICE WITH CONTACT PRESSURE SENSOR

    K. Katoh, Y. Ichikawa, E. Iwase, K. Matsumoto, I. Shimoyama

    MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     276 - 279  2010年  [査読有り]

     概要を見る

    This paper reports on a thermal-based device for measuring water content in human skin. The device consists of resistive temperature detectors (RTD) and a pressure sensor. The RTD was also used as a heat source, and the pressure sensor was used to obtain constant thermal contact. Water content was measured by heat extraction rate across device interface under constant contact pressure. The device detected difference in water content of a contact object from 0.02 to 0.56g/cm(3) by measuring step response of the RTD in 3 seconds. Difference in water content of the human skin was actually detectable with the device in 3 seconds.

  • Stretchable liquid tactile sensor for robot-joints

    K. Noda, E. Iwase, K. Matsumoto, I. Shimoyama

    2010 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA)     4212 - 4217  2010年  [査読有り]

     概要を見る

    In this paper, we propose a stretchable tactile sensor composed of a pair of silicone rubber channels filled with electro conductive liquid. When a force was applied to this channel, its length and cross-sectional area deforms. By measuring the resistance change of the electro conductive liquid in the channel, its deformation can be measured. The proposed tactile sensor is composed of two parallel channel filled with electro conductive liquid, therefore, by comparing the resistance changes of each channel to the deformation, only the contacting force can be measured independently. Since a liquid is used for the sensing material, the proposed liquid tactile sensor can be easily attached to movable portions as the joints of robots.
    In the paper, we measured the sensing characteristics of the liquid tactile sensor to the stretch, bend, and contact force. Finally, the efficiency of the sensor was demonstrated by measuring the contact force from 0 to 3.0N by attaching the 20% stretched liquid tactile sensor to curved surfaces with 0.05mm(-1) in curvature.

    DOI

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    46
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  • Planar near-infrared surface plasmon resonance sensor with Si prism and grating coupler

    Tetsuo Kan, Naoko Tsujiuchi, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    SENSORS AND ACTUATORS B-CHEMICAL   144 ( 1 ) 295 - 300  2010年01月  [査読有り]

     概要を見る

    We have developed a silicon-microfabrication-based surface plasmon resonance (SPR) sensor with Si prisms and an optical grating. Since this sensor is compatible with microelectromechanical systems technology. it can be further miniaturized and integrated with optical parts or fluidic components for the realization of a one-chip SPR sensor. The Si prism structure, transparent in the near-infrared range, was used to lead the 1550-nm measuring light to the sensing Surface where the evanescent light was generated. Smooth prism slopes were obtained by using anisotropic etching to Utilize the (1 1 1) planes on the (1 0 0) Surface plane of single-crystalline Si wafer. The result Was a 200-mu m-pitch array of prisms with 54.74 slope angles. In this configuration the range of incident angles at which near-infrared light produces an SPR dip is from 38.26 degrees to 71.24 degrees. Because the SPR angles for major specimens (16.60 degrees for air. 22.06 degrees for water, and 22.79 degrees for ethanol) are Out of range, we used an optical grating with a roughly 400-nm-pitch to make an SPR clip position move to fit within the available angle range by the diffraction effect. SPR measurements with several specimens confirmed that the combination of Si prisms and the optical grating excited Surface plasmons. The measured SPR dip positions and their sensitivity to refractive index were compared with the theoretical values, and their consistency confirmed the utility of this device as an SPR sensor. (C) 2009 Elsevier B.V. All rights reserved.

    DOI CiNii

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    10
    被引用数
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  • 開口マスクによるシリコン3次元斜面形状の作製

    竹井裕介, 大堀敬広, 高畑智之, 菅哲朗, 岩瀬英治, 松本潔, 下山勲

    電気学会論文誌E   130 ( 5 ) 6 - 187  2010年  [査読有り]

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  • 温度制御転写における自動位置補正技術

    岩瀬英治, 尾上弘晃, 中井亮仁, 松本潔, 下山勲

    電気学会論文誌E   130 ( 5 ) 7 - 193  2010年  [査読有り]

    DOI CiNii

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  • MEMS差圧センサ搭載昆虫型羽ばたき機を用いた自由飛翔時の翼面圧力差計測

    大澤一治, 青山雄一郎, 高橋英俊, 田中博人, 岩瀬英治, 松本潔, 下山勲

    日本ロボット学会誌   28 ( 9 ) 1131 - 1136  2010年  [査読有り]

     概要を見る

    To achieve flight, an insect generates aerodynamic force by flapping its wings. However, this aerodynamic force acting on the wings has not been directly measured during free-flight. In this study, we fabricated an ornithopter modeled on a hawk moth, and attached a MEMS differential pressure sensor on its wing. Then, we measured differential pressure between upper and lower surfaces of the wing during free-flight. Reynolds number of the wing and wing load of the ornithopter were designed to be 4.2 × 103[–], and 7.5[N/m2], which were close to those of a hawk moth. The mass, wing length and flapping frequency were 6.8[g], 110[mm] and 13[Hz], respectively. The maximum differential pressures at the center of the wing were 39[Pa] and 18[Pa] during downstroke and upstroke, which were 5 and 2 times larger than the wing load. The differential pressure contributed vertical pressure of 38[Pa] during downstroke and horizontal pressure of 15[Pa] during upstroke. The time average of vertical differential pressure was 7.0[Pa], which was as large as the wing load of the ornithopter.

    DOI CiNii

  • イオン液体とパリレン直接蒸着法を用いたグルコースオキシダーゼの封止法

    高松誠一, 高納尚徳, ビンキェムグェン, 岩瀬英治, 松本潔, 下山勲

    電気学会論文誌E   130 ( 12 ) 1 - 569  2010年  [査読有り]

    DOI CiNii

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    3
    被引用数
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  • Temperature-controlled transfer and self-wiring for multi-color light-emitting diode arrays

    Onoe, Hiroaki, Nakai, Akihito, Iwase, Eiji, Matsumoto, Kiyoshi, Shimoyama, Isao

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   19 ( 7 )  2009年07月  [査読有り]

    DOI

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    15
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  • Temperature-Controlled Transfer and Self-Wiring for Multi-Color LED Arrays

    Hiroaki Onoe, Akihito Nakai, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama, equal contribution

    Journal of Micromechanics and Microengineering   19 ( 7 ) 075015 - 1542  2009年07月  [査読有り]

    DOI CiNii

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    15
    被引用数
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  • Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

    Ryoh Miyamoto, N. Binh-Khiem, E. Iwase, K. Matsumoto, I. Shimoyama

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems     1365 - 1368  2009年  [査読有り]

     概要を見る

    We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed. ©2009 IEEE.

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  • Material discrimination by heat flow sensing

    K. Katoh, Y. Ichikawa, E. Iwase, K. Matsumoto, I. Shimoyama

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems     1549 - 1552  2009年  [査読有り]

     概要を見る

    We propose a heat flow sensing device with a heat source to discriminate a contact object. The device was a three-layered structure separated by 600μm-thick PDMS (Polydimethylsiloxane) spacer, and consisted of a micro heater and three resistance-temperature detectors (RTD). We detected transient heat flow with pulse-heating method when 10mm-cubic blocks of cork, acrylic and aluminum were on contact with the device. Temperature gradient induced by heat flow differed by materials of contact objects. We also evaluated the surface temperature from two RTDs. Our device identified relative difference in thermal effusivity of materials. ©2009 IEEE.

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  • Self-aligned opposite mirrors for tilting field of view driven by electrowetting

    K. Suzuki, A. Takei, E. Iwase, K. Matsumoto, I. Shimoyama

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems     2322 - 2325  2009年  [査読有り]

     概要を見る

    We propose an optical device which appends pan/tilt functions to cameras by moving mirrors with electrowetting force. The device is composed of two plates and a liquid pillar holding two mirrors. On the lower plate, electrodes are patterned and a hydrophobic layer is coated. When a voltage is applied to the electrode on the lower plate, the liquid is moved toward the electrode by electrowetting force. Consequently, the mirror is tilted and the light path that comes into the device is controlled. When a camera was put below our device, the field of view of the camera was shifted by 25 degrees with 50 V applied. ©2009 IEEE.

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  • Peristaltic micropump fabricated by depositing parylene directly on liquid

    Satoshi Komatsu, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems     2007 - 2010  2009年  [査読有り]

     概要を見る

    We fabricated a peristaltic micropump by depositing Parylene on liquid directly (PoLD method), and tested its pumping characteristics. The Parylene thin film deposited on liquid not only forms the membrane of the micropump, but also composes the whole structure of the microfluidic system. The pumping membrane can be deformed by electrostatic force. This deformation can create liquid flow. Our micropump can transfer liquid at the flow rate of 2.7μl/min and generate a differential pressure of 41Pa. On the other hand, this pump made a wrinkle when the voltage applied and it leaked liquid. We devised the shape of the channel and electrodes and enabled it to close tightly. ©2009 IEEE.

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  • Adhesion force mesurement between silicon and carbon nanotubes synthesized by chemical vapor deposition

    A. Hashimoto, Y. Takei, E. Iwase, K. Matsumoto, I. Shimoyama

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems     2066 - 2069  2009年  [査読有り]

     概要を見る

    This paper reports on an evaluation of the adhesion force between silicon and carbon nanotubes (CNTs), which were directly synthesized on a silicon substrate by chemical vapor deposition (CVD). CNTs bridging between silicon tips were pushed with a force-sensing cantilever to break the adhesion between silicon and CNTs. We measured the force acting on the cantilever at the moment of breaking the adhesion between silicon and CNTs. This force was measured to be 28 nN. ©2009 IEEE.

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  • Sensitivity enhancement by micro helmholtz resonator for ultrasonic distance sensor

    A. Suzuki, H. Takahashi, E. Iwase, K. Matsumoto, I. Shimoyama

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems     1557 - 1560  2009年  [査読有り]

     概要を見る

    This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 μm height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%. ©2009 IEEE.

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  • Micro liquid prism

    Y. Yoshihata, A. Takei, N. Binh Khiem, T. Kan, E. Iwase

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)     967 - 970  2009年  [査読有り]

     概要を見る

    This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene, the prism can retain its shape. The prism which faces were 400ptm in diameter and whole size was smaller than 1mm3 was fabricated. The adequate function of the fabricated prism for Surface Plasmon Resonance (SPR) measurement was verified. ©2009 IEEE.

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    11
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  • Solution electrochemiluminescent microfluidic cell for flexible and stretchable display

    R. Okumura, S. Takamatsu, E. Iwase, K. Matsumoto, I. Shimoyama

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)     947 - 950  2009年  [査読有り]

     概要を見る

    We developed liquid luminescent flexible displays using electrochemiluminescent solution as deformable luminescent material. The solution consisted of ruthenium complexes as light emitting material and ionic liquid as nonvolatile solvent. We injected the solution, to pattern and seal it, into microfluidic cells between two flexible films of polyethylene terephthalate substrates with indium tin oxide electrodes. The light emitting area of one cell was 2×2 mm2 The gap between the electrodes was 100 μm. We measured the luminance of the cell during application of 5OHz/4.OVpp (peak-to-peak value) rectangular waves of voltage in bent condition. The device was bent along the convex curvature with radii of 60, 30 and 20 mm. The luminance was reduced by only 30 00 when the radius of curvature reached 20 mm. We conclude the electrochemiluminescent cells are suitable for flexible displays because they can tolerate large deformation of bending. ©2009 IEEE.

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  • Stretchable substrates for the measurement of intracellular calcium ion concentration responding to mechanical stress

    Y. J. Heo, E. Iwase, K. Matsumoto, I. Shimoyama

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)     68 - 71  2009年  [査読有り]

     概要を見る

    This paper presents the design, fabrication, and the characterization of a stretchable substrate, achieving the change of intracellular calcium ion concentration by mechanical stress. We propose the stretchable substrate integrated with the air chambers of the pneumatic actuator. We have measured the areal strain depending on input pressure and the intracellular calcium ion concentration increase in response to the mechanical stress. The present stretchable substrate is able to provide the areal strain of 5.21%~12.3% for the input pressure of 34.5kPa~103kPa. We also verified that the present stretchable substrate is able to stimulate cells by the mechanical stress applied through integrins, showing potential feasible application for monitoring the calcium ion influx caused by the mechanical stress. ©2000 IEEE.

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  • INTEGRATION OF BRIDGING-STRUCTURAL SWNTS ON FLEXIBLE PDMS SHEET BY STAMPING TRANSFER

    Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009)     551 - 554  2009年  [査読有り]

     概要を見る

    This paper describes an integration method of bridging-structural single-walled carbon nanotubes (SWNTs) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield (97.8 %) and accuracy (position error &lt; 100 nm). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs' bridging.
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  • TEMPERATURE-CONTROLLED TRANSFER AND SELF-WIRING FOR MULTI-COLOR LED DISPLAY ON A FLEXIBLE SUBSTRATE

    Eiji Iwase, Hiroaki Onoe, Akihito Nakai, Kiyoshi Matsumoto, Isao Shimoyama

    IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009)     176 - 179  2009年  [査読有り]

     概要を見る

    We propose an integration method for arranging LED bare chips on a flexible substrate to fabricate a multi-color LED display. LED chips (240 mu m x 240 mu m x 75 mu m) which were arrayed on an adhesive sheet were transferred to a flexible circuit substrate using our temperature-controlled transfer (TCT) and self-wiring (SW) method. Using these methods, we demonstrated a 5-by-5 LED flexible device and a two-color (blue and green) LED device, and observed light emission from the LED chips.

  • Air flow senser for an insect-like flapping wing

    Hidetoshi Takahashi, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)     916 - 919  2008年  [査読有り]

     概要を見る

    This paper reports on a thin piezoresistive cantilever for measuring air flow velocity around flapping wings. To measure the air flow velocity at a point of the wing directly, our sensor was attached to the leading edge of the wing. The sensor was designed to be 1 ?m thick. Because of the scale effect, the influence of the inertial force was small during flow measurement. The sensor had the sensitivity of 0.56 - 0.96 × 10-3 (m/s)-2 as well as the directivity. By using the micro flow sensor, we measured the perpendicular air flow velocity at the point of the leading edge of the wing. ©2008 IEEE.

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    4
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  • Liquid motor driven by electrowetting

    A. Takei, N. Binh-Khiem, E. Iwase, K. Matsumoto, I. Shimoyama

    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     42 - 45  2008年  [査読有り]

     概要を見る

    We propose a liquid motor using surface tension. Our liquid motor is composed of a liquid droplet floating plate and a lower plate. The plate floating on thee droplet is rotated continuously by electrowetting actuation. The floating plate is asymmetrically and has four cogs. By electrowetting actuation, the shape of the droplet is deformed. Then, the floating plate rotates to the position where the surface energy of the sandwiched liquid takes a minimum value. On the lower plate, electrodes are patterned in an annular shape. By choosing the voltage-applied electrodes, the position of the floating plate is controlled. In this research, a 2 mm floating plate with a 500 mu m silicon cube was rotated at 180 rpm. This motor is useful for optical devices because the components of the liquid motor can be made of transparent materials.

  • Scanning micromirror using deformation of a parylene-encapsulated liquid structure

    Yuta Yoshihata, Nguyen Binh-Khiem, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     770 - 773  2008年  [査読有り]

     概要を見る

    This paper presents a scanning micromirror using deformation of a Parylene-Encapsulated Liquid Structure (PELS). Silicone fluid is put between a silicon plate and an electrode-patterned plate. Both of the plates and liquid are encapsulated by a Parylene membrane. Gold is deposited on the surface of the Parylene membrane to fabricate an upper electrode. By applying voltage between the upper and lower electrodes, the encapsulated liquid is deformed and the silicon plate is tilted. The silicon plate is supported by the PELS, instead of usual torsion beams. When a set of four appropriately synchronized voltages is applied between the four lower electrodes and the upper electrode, two dimensional scanning motion is achieved.

  • Hidden vertical comb-drive actuator on PDMS fabricated by parts-transfer

    Eiji Iwase, Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama

    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     116 - 119  2008年  [査読有り]

     概要を見る

    This paper reports complex three-dimensional (3-D) MEMS devices (polydimethylsiloxane) fabricated on PDMS by a parts-transfer method. Our target size of parts is 100-mu m-order in our parts-transfer method. First, we evaluate the transfer yield and the positioning accuracy. Secondly, we assemble a hidden vertical comb-drive actuator, including comb-electrodes and a support beam underneath its upper plate. Finally, we measure the drive characteristics of the actuator. Our actuators are the first demonstration of fabricating movable MEMS devices by parts-transfer technique. The demonstration indicates that complex 3-D MEMS devices with movable mechanical functions can be fabricated simply using our method.

  • Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging

    Kazuhiko Takagahara, Yusuke Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     713 - 716  2008年  [査読有り]

     概要を見る

    We synthesized carbon nanotubes (CNTs) at the tips of commercial atomic force microscope (AFM) probes by chemical vapor deposition (CVD) process with applying an electric field. Applying the electric field during the CVD process increased the yield of AFM probes with CNTs at the tips (CNT-AFM probes). We formed a catalyst layer on the surface of AFM probes, and carried out the CVD process to synthesize CNTs. After the CVD process, we observed the tips of the AFM probes with a scanning electron microscope (SEM). The yield of CNT-AFM probes was about 52 %. The CNTs were determined by resonance Raman spectroscopy using a 488 nm argon ion laser. Observed Raman peaks were peculiar to single-walled carbon nanotubes (SWNTs). Then we obtained AFM images of a sample grating with the CNT-AFM probes. The CNT-AFM probes had higher horizontal resolution than standard commercial AFM probes.

  • Tapered waveguide by liquid for a coupler of optical fibers to MEMS devices

    Hisashi Terae, Binh-Khiem Nguyen, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     794 - 797  2008年  [査読有り]

     概要を見る

    We report a tapered liquid waveguide for an optical fiber-to-chip coupler. The tapered liquid waveguide has a smooth surface and has both a large structure and a micro structure on one chip. The waveguide is able to couple optical fibers of large-diameter to small MEMS devices. A Parylene film on the liquid prevented the liquid from deformation and evaporation. We fabricated the silicone oil waveguide by hydrophobicity of CYTOP. We measured a propagation loss of the tapered waveguide by entering the laser beam from the incident face. From a measurement result, this tapered waveguide can be a coupler which connects optical fibers to MEMS devices.

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  • Angle-tunable liquid wedge prism driven by electrowetting

    Atsushi Takei, Eiji Iwase, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   16 ( 6 ) 1537 - 1542  2007年12月  [査読有り]

     概要を見る

    We developed a tunable wedge prism by electrowetting actuation. Our prism can shift the field of view to the left or to the right and is useful for small cameras and endoscopes because its field of view can be changed without the need for large instruments. It consists of two plates that face each other, and a liquid is sandwiched between them. The liquid and plates form a wedge when the angle between the plates is changed. We used electrowetting to change the angle between the plates. The wedge prism is small because the liquid driven by electrowetting works as a prism. In addition, the prism produces a clear field of view because its optical flatness is determined by the flatness of the plates.

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  • Three-dimensional integration of heterogeneous silicon micro-structures by liftoff and stamping transfer

    Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   17 ( 9 ) 1818 - 1827  2007年09月  [査読有り]

     概要を見る

    We propose a method of integrating heterogeneous silicon microstructures ( typical scale of 10-100 mu m) into a single silicon substrate to fabricate MEMS structures. It includes adhesion-based liftoff and stamping transfer ( LIST) processes using poly-(dimethylsiloxane) ( PDMS) sheets. Silicon microstructures fabricated on different wafers are lifted onto the PDMS sheets by breaking the narrow columns supporting the microstructures by applying a vertical load to the PDMS sheet, and then transferred onto the silicon substrate with high yield ( more than 90%) and superior positioning accuracy ( within 0.3 mu m on average in a 2 x 3 mm area). Multiple heterogeneous silicon structures are integrated into a single silicon substrate by repeating this LIST process. We fabricated two-dimensional arrays, three-dimensional pyramidal structures and overhanging bridge microstructures with our method, which proved that the LIST process could be used to integrate heterogeneous MEMS structures into a single wafer.

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  • 3D integration of heterogeneous MEMS structures by stamping transfer

    Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2     366 - 369  2007年  [査読有り]

     概要を見る

    We propose an integration method of heterogeneous micro-electro-mechanical-system (MEMS) structures by liftoff and stamping transfer using a poly-(dimethylsiloxane) (PDMS) sheet. Silicon structures fabricated on multiple wafers were lifted off by PDMS sheets, and integrated onto a single wafer by the stamping transfer with high yield (&gt; 90%) and high accuracy (position error &lt; 500 nm). A two-dimensional (2D) integration and three-dimensional (3D) assembly of pyramid-like/inverted pyramid-like structures were demonstrated by our method. These demonstrations prove that our method enables us to integrate process-incompatible heterogeneous MEMS structures onto a single wafer.

  • Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid

    Binh-Khiem Nguyen, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2     398 - 401  2007年  [査読有り]

     概要を見る

    The design and fabrication process of an electrically-driven varifocal liquid microlens are reported with experimental measurement results and a theoretical calculation model. Droplets of oil are sandwitched between a glass wafer and a thin-film of parylene chemical vapor deposited (CVD) directly onto the droplets' liquid surface. A method for creating fluid-filled micro chambers was realized with two core steps: 1) placing-shaping of oil droplets with hydrophobic/hydrophilic patterns and 2) coating them with a thin CVD parylene film in high vacuum condition. Liquid lenses and lens arrays of diameter from 20 mu m to 10mm were fabricated. In the tuning experiment, focal length was shortened to 20% of its initial value, from 3.8mm to 0.8mm. The values calculated from model match the data collected from experiments within the range of applied voltage from 0V to 150V.

  • Thin electrowetting controlled optical system with pan/tilt and variable focus functions

    A. Takei, E. Iwase, K. Matsumoto, I. Shimoyama

    TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2    2007年  [査読有り]

     概要を見る

    In this paper, we proposed a thin optical system which has pan/tilt and variable focus functions for a small camera. Our optical system is composed of a tunable water prism and a tunable oil lens driven by electrowetting. The optical system can keep its thickness thin, because the oil lens is inside the prism and both of them are controlled on the same plate. In this research, we achieved the optical system capable of shifting the view direction 1.5 degrees and changing the focal plane from 25 mm to 12.5 mm. The thickness of the optical system is 2.5 mm.

  • A design method for out-of-plane structures by multi-step magnetic self-assembly

    E Iwase, Shimoyama, I

    SENSORS AND ACTUATORS A-PHYSICAL   127 ( 2 ) 310 - 315  2006年03月  [査読有り]

     概要を見る

    We provide the design method of multi-step magnetic self-assembly using ferromagnetic-hinged structures. The process uses the magnetostatic torque generated by an external magnetic field perpendicular to the substrate to lift hinged structures. Hinged structure is composed of a rigid plate connected by elastic hinges to one side of a substrate. If hinged structures are raised in sequential order, it is possible to assemble like Japanese "origami" complex three-dimensional structures. In our previous study, we found that a dimensionless factor that depends on its shape determines the sensitivity of the hinged microstructures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self-assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multi-step sequential assembly by using the dimensionless factor. Four-step sequential batch assembly was demonstrated using this method. This method will be useful for optical systems, which consist of many complex three-dimensional structures. (c) 2006 Elsevier B.V. All rights reserved.

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  • Angle tunable liquid wedge prism driven by electro-wetting

    A Takei, E Iwase, K Hoshino, K Matsumoto, Shimoyama, I

    MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     36 - 39  2006年  [査読有り]

     概要を見る

    We proposed a wedge prism which is tunable by electrowetting actuation. The wedge prism is useful for a small camera or an endoscope, because the wedge prism is capable of changing the view without a large instrument. Our prism consists of two plates facing each other and liquid sandwiched between the plates. By changing the angle between the two plates, the liquid and the two plates form into the wedge shape. We used electrowetting to change the angle of the prism. The wedge prism keeps the size small, since the liquid driven by electrowetting works as a prism. In addition, the prism keeps the view clear because the optical flatness of the wedge prism is determined by the flatness of the two plates. In this research, we achieved the wedge prism with which we can shift the field of view to the right and the left.

  • &lt;bold&gt;A SURFACE PLASMON RESONANCE SENSOR WITH A V-SHAPED SILICON PRISM ARRAY&lt;/bold&gt;

    N Tsujiuchi, E Iwase, K Hoshino, K Matsumoto, Shimoyama, I

    MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     522 - 525  2006年  [査読有り]

     概要を見る

    A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 gm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.

  • Multistep sequential batch assembly of three-dimensional ferromagnetic microstructures with elastic hinges

    E Iwase, Shimoyama, I

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   14 ( 6 ) 1265 - 1271  2005年12月  [査読有り]

     概要を見る

    In this paper, we have developed a process for multistep sequential batch assembly of complex three-dimensional (3-D) ferromagnetic microstructures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged structures. We found that a dimensionless factor that depends on the volume of the magnetic material and the stiffness of the hinges determines the sensitivity of the hinged microstructures to a magnetic field. This factor was used as a criterion in designing a process for sequential batch assembly, i.e., for setting appropriate differences in sensitivity. Using a dimensionless factor in the design of the sequential assembly simplified the assembly process, which requires only placing the structures on a permanent magnet, and which can be used to carry out multistep sequential batch assembly. We fabricated hinged microstructures, which consist of 4.5-mu m-thick electroplated Permalloy plates and 200-nm-thick nickel elastic hinges of various sizes. In an experiment, four plates (600 mu m x 800 mu m) were lifted sequentially and out-of-plane microstructures were assembled in a four-step process. Assembly of more complex out-of-plane microstructures (e.g., regular tetrahedrons; 800 mu m long on one side) was also shown to be feasible using this method of sequential batch assembly.

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  • "Pop-up" display with 3-dimensional microlens structures

    M Tohara, E Iwase, K Hoshino, K Matsumoto, Shimoyama, I

    MEMS 2005 Miami: Technical Digest     231 - 234  2005年  [査読有り]

     概要を見る

    In this paper, we demonstrate a "Pop-up" display. This display provides a pop-up image in the air with double-layered plane-convex microlenses and a hole array. This microlens array is fabricated by melting photoresists and form transfer [1] [2]. The height and diameter of the microlens was 34.6 mu m and 198 mu m, therefore the focal length was calculated as 318 mu m. To inspect the pop-up length, we estimated the position of the focal plane by measuring the light intensity of the image. The "Pop-up" image was formed at 2750 mu m higher from the original image on the display. In addition, we proved that the lens part needs no alignment with the original image.

  • Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field

    E Iwase, Shimoyama, I

    MEMS 2005 MIAMI: TECHNICAL DIGEST     588 - 591  2005年  [査読有り]

     概要を見る

    We have developed a process for multi-step sequential batch self-assembly of complex three-dimensional ferromagnetic micro-structures. The process uses the magnetic torque generated by an external magnetic field perpendicular to the substrate to lift hinged-structures. In our previous study, we found that a non-dimensional factor that depends on its shape determines the sensitivity of the micro hinged-structures to a magnetic field. This factor can be used as a criterion in designing a process for sequential batch self-assembly, because the factor indicates the differences in the sensitivity. In this study, we designed multi-step sequential assembly by using the non-dimensional factor. Four-step sequential batch assembly was demonstrated using this method.

  • 6脚ロボットの方向転換歩容生成ネットワーク

    岩瀬英治, 加藤慎一朗, 安田隆, 下山勲

    日本ロボット学会誌   22 ( 4 ) 492 - 498  2004年  [査読有り]

     概要を見る

    This paper describes a gait generating network for a hexapod robot under various curvature turnings. Formica japonica Motschulsky, that is one of major ant with about 6 [mm] body length in Japan, was used for a gait analysis. Movements of the leg joints during free walking was recoded at 60 to 250 [frame/s] by a high-speed video camera. From the data, we found that the turning gaits were classified into two distinct patterns: a sharp turning gait in which case the radius of curvature is under 5 [mm], a gradual turning gait in which case that is 5 to 40 [mm] . A turning gait generating network, which was possible to generate each gait and to vary a radius of curvature, was devised. That is a neural network which is described by neurons and connections between them using excitation and inhibition. We made a hexapod robot with 3 DOF each leg and verified the accountability of the gait generating network using the robot. As a result, smooth and stable turning in different curvatures was achieved.

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  • 磁気異方性を用いた3次元微小構造群の一括順序組立て

    岩瀬英治, 下山勲

    電気学会論文誌E   123 ( 7 ) 224 - 230  2003年  [査読有り]

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    被引用数
    (Scopus)
  • Sequential batch assembly of 3-D microstructures with elastic hinges by a magnetic field

    E Iwase, S Takeuchi, Shimoyama, I

    FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST     188 - 191  2002年  [査読有り]

     概要を見る

    This paper describes three-dimensional (3-D) microstructure assembly using an external magnetic field. An external magnetic field perpendicular to a substrate lifts up a hinged structure due to the shape magnetic anisotropy. Micro, flap structures (4.5 mum-thick electroplated Permalloy) having 0.2 mum-thick nickel elastic hinges with various lengths and widths are bent in out-of-plane direction in a magnetic field up to 50 kA/m. The volume of magnetic material and the stiffness of the hinges determine the sensitivity to a magnetic field. As a result, we realized sequential batch assembly using the difference of the sensitivity. By way of the example, we have erected plates 600 mum x 600 mum in size. Also, structures bent at 90 and 45 degrees out of the plane have been obtained at the same time.

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書籍等出版物

  • Origami6: II. Technology, Art, Education

    Eiji Iwase, Isao Shimoyama( 担当: 分担執筆,  担当範囲: Magnetic Self-Assembly of Three-Dimensional Microstructures)

    American Mathematical Society  2016年01月 ISBN: 9781470418762

  • ウェアラブルデバイスの小型、薄型化と伸縮、柔軟性の向上技術

    岩瀬英治, 古志知也( 担当: 分担執筆,  担当範囲: 自己修復型金属配線の開発とウェアラブル機器への応用可能性, (第2章 第6節))

    技術情報協会  2015年12月 ISBN: 9784861046063

Works(作品等)

  • 紙とテクノロジー,「折り紙の呼吸 Breathing of ORIGAMI」展,紙に命を与える折りと技術 ((株)竹尾,見本帖本店展示企画)

    2014年
     
     

講演・口頭発表等

  • Programmable Medicine: Autonomous, Ingestible, Deployable Hydrogel Patch and Plug for Stomach Ulcer Therapy

    Alexis du, Plessis d’Argentre, Samuel Perry, Yoshitaka Iwata, Haruna Iwasaki, Eiji Iwase, Assunta Fabozzo, Iain Will, Daniela Rus, Dana Damian, Shuhei Miyashita

    Proceedings of the 2018 IEEE International Conference on Robotics and Automation (ICRA2018)  

    発表年月: 2018年05月

  • Self-Rolling up Micro Assembly using Temperature-Responsive Hydrogel Sheet with Rigid Plate Array

    Yoshitaka Iwata, Shuhei Miyashita, Eiji Iwase

    Proceedings of the 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2018)  

    発表年月: 2018年01月

  • Micro Sample Chamber by Laminated Fluorinated Films for NMR Spectroscopy of a Micro-volume Spherical Sample

    Takuma Hizawa, Masato Takahashi, Eiji Iwase

    Proceedings of the 30th International Microprocesses and Nanotechnology Conference (MNC2017)  

    発表年月: 2017年11月

  • Measurement of Conformability and Adhesion Energy of Ultrathin Film to Skin Model

    Junki Sugano, Toshinori Fujie, Hiroyasu Iwata, Eiji Iwase

    Proceedings of the 30th International Microprocesses and Nanotechnology Conference (MNC2017)  

    発表年月: 2017年11月

  • Epidermal pH-Sensor Capable of Operating only with NFC Energy Harvesting

    Shun Miyabayashi, Hiroki Hayata, Eiji Iwase, Toshinori Fujie, Hiroyasu Iwata

    Proceedings of the 8th International Conference on Flexible and Printed Electronics (ICFPE2017)  

    発表年月: 2017年07月

  • Effect of Living Body on Performance of RF Identifier Antenna Printed on Ultrathin Polymer Film

    Hiroki Hayata, Marin Okamoto, Shinji Takeoka, Eiji Iwase, Toshinori Fujie, Hiroyasu Iwata

    Proceedings of the 8th International Conference on Flexible and Printed Electronics (ICFPE2017)  

    発表年月: 2017年07月

  • Printed Paper Robot Driven by Electrostatic Actuator

    Hiroki Shigemune, Shingo Maeda, Vito Cacucciolo, Yoshitaka Iwata, Eiji Iwase, Shuji Hashimoto, Shigeki Sugano

    Proceedings of the 2017 IEEE International Conference on Robotics and Automation (ICRA2017)  

    発表年月: 2017年05月

  • Stretchable Electronic Device with Repeat Self-Healing Ability of Metal Wire

    Tomoya Koshi, Eiji Iwase

    Proceedings of the 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017)  

    発表年月: 2017年01月

  • Hybrid Film for Self-Adhesion and Shape-Controlling

    Sota Shimbo, Toshinori Fujie, Eiji Iwase

    Proceedings of the 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017)  

    発表年月: 2017年01月

  • Stress-Free Stretchable Electronic Device using Folding Deformation

    Yoshitaka Iwata, Eiji Iwase

    Proceedings of the 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017)  

    発表年月: 2017年01月

  • Voltage and Current Condition on Self-Healing Metal Wire

    Tomoya Koshi, Eiji Iwase

    Proceedings of the International Symposium on Micro-Nano Science and Technology 2016 (MNST2016)  

    発表年月: 2016年12月

  • Dielectric Microactuator using Dielectrophoretic Force

    Kensuke Ohtsuka, Eiji Iwase

    Proceedings of the International Symposium on Micro-Nano Science and Technology 2016 (MNST2016)  

    発表年月: 2016年12月

  • Characterization of Transfer Positioning Accuracy on Roll-Type Stamping Transfer

    Makoto Tokonami, Eiji Iwase

    Proceedings of the International Symposium on Micro-Nano Science and Technology 2016 (MNST2016)  

    発表年月: 2016年12月

  • Healing Process Behavior on Electric Field Trapping of Gold Nanoparticles

    Yuta Nakajima, Tomoya Koshi, Eiji Iwase

    発表年月: 2016年12月

  • Observation of Mechanical Stimulus Effect on Cell Culture using Magnetically-Driven Structures

    Noriyuki Fukui, Kaori Kuribayashi-Shigetomi, Hiroaki Onoe, Eiji Iwase

    Proceedings of the International Symposium on Micro-Nano Science and Technology 2016 (MNST2016)  

    発表年月: 2016年12月

  • Shape Evaluation of a Micro-Volume Sample Chamber for NMR Measurement

    Takuma Hizawa, Masato Takahashi, Eiji Iwase

    Proceedings of the International Symposium on Micro-Nano Science and Technology 2016 (MNST2016)  

    発表年月: 2016年12月

  • Optical Characteristics of Flat-Top and Dome-Shape Patterned Photonic Colloidal Crystals

    Noriyuki Suzuki, Eiji Iwase, Hiroaki Onoe

    Proceedings of the International Symposium on Micro-Nano Science and Technology 2016 (MNST2016)  

    発表年月: 2016年12月

  • Operation of Three-Dimensional MEMS Mirror by Single Superposed Driving Signal

    Toshiya Nagasawa, Yohei Oguchi, Eiji Iwase

    Proceedings of the 29th International Microprocesses and Nanotechnology Conference (MNC2016)  

    発表年月: 2016年11月

  • Multiple-Colored Flexible Optical Filter with Patterned Photonic Colloidal Polymer Gels

    Noriyuki Suzuki, Eiji Iwase, Hiroaki Onoe

    Proceedings of the 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS2016)  

    発表年月: 2016年10月

  • Development of Inexpensive Skin Adhesive Electronic Device - RFID Tag Implementation on Ultrathin Polymer Film -

    Hiroki Hayata, Marin Okamoto, Shinji Takeoka, Eiji Iwase, Toshinori Fujie, Hiroyasu Iwata

    Proceedings of the 7th International Conference on Flexible and Printed Electronics (ICFPE2016)  

    発表年月: 2016年09月

  • Assembly on a MEMS Scale using Magnetic Field

    Isao Shimoyama, Eiji Iwase  [招待有り]

    Proceedings of the 2016 MRS Spring Meeting & Exhibit  

    発表年月: 2016年03月

  • Microfluidic Patterning of Hemispherical Dome-Shape Photonic Colloidal Crystals for Wide-Viewing-Angle Reflective Display

    Noriyuki Suzuki, Eiji Iwase, Hiroaki Onoe

    Proceedings of the 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2016)  

    発表年月: 2016年01月

  • Ultra-Conformable Polymer Nanosheets with Inkjet-Printed Electric Circuits

    Marin Okamoto, Toshinori Fujie, Mizuho Kurotobi, Kento Yamagishi, Atsushi Murata, Eiji Iwase, Hiroyasu Iwata, Shinji Takeoka

    Proceeding of the 2015 International Chemical Congress of Pacific Basin Societies (PACIFICHEM2015)  

    発表年月: 2015年12月

  • The Three-dimensional Actuation of the MEMS Scanner with Single Pair of Beams and Single Driving System

    Yohei Oguchi, Chisa Iino, Eiji Iwase

    Proceedings of the 28th International Microprocesses and Nanotechnology Conference (MNC2015)  

    発表年月: 2015年11月

  • Design Method for Cylindrical Self-Folding of Films using a Triple-Layered Structure with Internal Stress

    Sota Shimbo, Toshinori Fujie, Eiji Iwase

    Proceedings of the 28th International Microprocesses and Nanotechnology Conference (MNC2015)  

    発表年月: 2015年11月

  • Micropatterning of Multiple Photonic Colloidal Crystals in Single-Layered Microchannels for Structural-Color Optical Filter

    Noriyuki Suzuki, Eiji Iwase, Hiroaki Onoe

    Proceedings of the 18th International Conference on Solid-State Sensors  

    発表年月: 2015年06月

  • Flexible Devices using Rigid Materials - Device Integration Method and Self-Healing Metal Wire

    Eiji Iwase  [招待有り]

    Proceedings of the 6th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-6)  

    発表年月: 2015年06月

  • Strong Mechanical Nonlinearity of Optomechanically Driven Suspended Photonic Crystal Membrane

    Pui-Chuen Hui, Alejandro W. Rodriguez, David Woolf, Eiji Iwase, Mughees Khan, Federico Capasso, Marko Loncar

    Proceedings of the Conference on Lasers and Electro-Optics (CLEO/QELS:2015)  

    発表年月: 2015年05月

  • Self-healing Metal Wire using an Electric Field Trapping of Gold Nanoparticles for Flexible Devices

    Tomoya Koshi, Eiji Iwase

    Proceedings of the 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2015)  

    発表年月: 2015年01月

  • Bottom Arranged Electrodes in an Electroactive Hydrogel Flexible Coloring Element for a High Fill-factor

    Kodai Usuki, Hiroaki Onoe, Eiji Iwase

    発表年月: 2014年11月

  • Design and Fabrication of a Self-Healing Metal Wire using an Electric Field Trapping of Gold Nanoparticles

    Tomoya Koshi, Eiji Iwase

    Proceedings of the 27th International Microprocesses and Nanotechnology Conference (MNC2014)  

    発表年月: 2014年11月

  • Magnetic Self-Assembly for Three-Dimensional Microstructures

    Eiji Iwase, Isao Shimoyama

    Proceedings of the 6th International Meeting on Origami in Science  

    発表年月: 2014年08月

  • Dynamics of a Tethered Silicon Photonic Crystal Membrane due to Optical Gradient, Photo-thermal and Casimir Forces

    Pui-Chuen Hui, David Woolf, Eiji Iwase, Irfan Bulu, Alejandro W. Rodriguez, Mughees Khan, Parag B. Deotare, Steven G. Johnson, Federico Capasso, Marko Loncar

    Proceedings of the Conference on Lasers and Electro-Optics (CLEO/QELS:2012)  

    発表年月: 2012年

  • Towards Optical Manipulation of Casimir Force using Free-standing Membranes with Engineered Optical and Mechanical Properties

    Eiji Iwase, Pui-Chuen Hui, David Woolf, Alejandro W. Rodriguez, Mughees Khan, Steven G. Johnson, Federico Capasso, Marko Loncar

    Proceedings of the Conference on Lasers and Electro-Optics (CLEO/QELS:2012)  

    発表年月: 2012年

  • Optomechanical Cooling, Amplification, and Bistability in Coupled-mode Suspended Waveguide Geometries

    David N. Woolf, Pui-Chuen Hui, Eiji Iwase, Alejandro W. Rodriguez, Mughees Kahn, Steven G. Johnson, Marko Loncar, Federico Capasso

    Proceedings of SPIE Photonics West (Photonics West 2012)  

    発表年月: 2012年

  • 磁性体薄膜を用いた3次元微小構造群の一括組み立て

    岩瀬英治, 下山勲

    第19回日本ロボット学会学術講演会  

    発表年月: 2011年11月

  • Optical Bonding and Antibonding Forces in Assymetric Geometries for Casimir Force Detection

    David N. Woolf, Pui-Chuen Hui, Eiji Iwase, Alejandro W. Rodriguez, Alexander P. McCauley, Mughees Kahn, Steven G. Johnson, Marko Loncar, Federico Capasso

    Proceedings of the Conference on Lasers and Electro-Optics (CLEO/QELS:2011)  

    発表年月: 2011年

  • Long-Range SPR Sensor with Micro Liquid Channels for Maintaining Symmetrical Condition

    Tetsuo Kan, Hiroyuki Kojo, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS2010)  

    発表年月: 2010年

  • Integration Method of Bridging-Structural CNTs into Si Wafer by Stamping Transfer

    Yusuke Takei, Atsushi Hashimoto, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the International Conference on Electronics Packaging (ICEP2010)  

    発表年月: 2010年

  • Stretchable Liquid Tactile Sensor for Robot-Joints

    Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the The 2010 IEEE International Conference on Robotics and Automation (ICRA2010)  

    発表年月: 2010年

  • Sound Direction Sensor with an Acoustic Channel

    Minh Dung Nguyen, Akira Inaba, Akira Suzuki, Hideotoshi Takahashi, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)  

    発表年月: 2010年

  • Photoresponse Compensated Piezoresistive Cantilever under Fluorescence Measurement Environment

    Uijin Jung, Kenta Kuwana, Hidetoshi Takahashi, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)  

    発表年月: 2010年

  • Micro-Bead Force Sensor based on Aligned Metal Nanoparticle

    Asuto Koyama, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)  

    発表年月: 2010年

  • Triaxial Force Measurement Cantilever by Sidewall-Doping with Rapid Thermal Diffusion

    Yuichiro Aoyama, Binh-Khiem Nguyen, Kentaro Noda, Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)  

    発表年月: 2010年

  • Measurement of the Impact Stress in a Golf Club Head

    Akira Hasegawa, Akihito Nakai, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)  

    発表年月: 2010年

  • Thermal-Based Skin Moisture Device with Contact Pressure Sensor

    Koki Katoh, Yasumasa Ichikawa, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)  

    発表年月: 2010年

  • Adhesion Force Measurement between Silicon and Carbon Nanotubes Synthesized by Chemical Vapor Deposition

    Atsushi Hashimoto, Yusuke Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009)  

    発表年月: 2009年

  • Sensitivity Enhancement by Micro Helmholtz Resonator for Ultrasonic Distance Sensor

    Akira Suzuki, Hidetoshi Takahashi, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009)  

    発表年月: 2009年

  • Self-Aligned Opposite Mirrors for Tilting Field of View Driven by Electrowetting

    Koutaro Suzuki, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009)  

    発表年月: 2009年

  • Ellipsoidal Micro Lens fabricated by Depositing Parylene Directly on Liquid

    Ryo Miyamoto, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009)  

    発表年月: 2009年

  • Peristaltic Micropump fabricated by Depositing Parylene Directly on Liquid

    Satoshi Komatsu, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009)  

    発表年月: 2009年

  • Nano-Mechanical Structure Fabrication Technology for Highly Integrated, Complex MEMS

    Tetsuo Kan, Yusuke Takei, Hiroaki Onoe, Eiji Iwase, Tetsuji Dohi, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the International Conference on Electronics Packaging (ICEP2009)  

    発表年月: 2009年

  • Material Discrimination by Heat Flow Sensing

    Koki Katoh, Yasumasa Ichikawa, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2009)  

    発表年月: 2009年

  • Micro Liquid Prism

    Yuta Yoshihata, Atsushi Takei, Nguen Binh-Khiem, Testuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2009)  

    発表年月: 2009年

  • Solution Electrochemiluminescent Microfluidic Cell for Flexible and Stretchable Display

    Ryo Okumura, Seiichi Takamatsu, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2009)  

    発表年月: 2009年

  • Stretchable Substrates for the Measurement of Intracellular Calcium Ion Concentration Responding to Mechanical Stress

    Yun Jung Heo, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2009)  

    発表年月: 2009年

  • Integration of Bridging-Structural SWNTs on Flexible PDMS Sheet by Stamping Transfer

    Yusuke Takei, Eiji Iwase, Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2009)  

    発表年月: 2009年

  • Temperature-Controlled Transfer and Self-Wiring for Multi-Color LED Display on a Flexible Substrate

    Eiji Iwase, Hiroaki Onoe, Akihito Nakai, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS2009)  

    発表年月: 2009年

  • Hidden Vertical Comb-Drive Actuator on PDMS Fabricated by Parts-Transfer

    Eiji Iwase, Hiroaki Onoe, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2008)  

    発表年月: 2008年

  • Liquid Motor Driven by Electrowetting

    Atsushi Takei, Nguyen Binh-Khiem, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2008)  

    発表年月: 2008年

  • Batch Fabrication of Carbon Nanotube on AFM Probe Tips and AFM Imaging

    Kazuhiko Takagahara, Yusuke Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2008)  

    発表年月: 2008年

  • Air Flow Senser for an Insect-like Flapping Wing

    Hidetoshi Takahashi, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2008)  

    発表年月: 2008年

  • Tapered Waveguide by Liquid for a Coupler of Optical Fibers to MEMS Devices

    Hisashi Terae, Nguyen Binh-Khiem, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2008)  

    発表年月: 2008年

  • Scanning Micromirror using Deformation of a Parylene-Encapsulated Liquid Structure

    Yuta Yoshihata, Nguyen Binh-Khiem, Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2008)  

    発表年月: 2008年

  • Stretchable Micropatterned Substrates using Pneumatic Actuators for Studying Mechanical-Stress-Dependent Cell Response

    Yun Jung. Heo, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)  

    発表年月: 2008年

  • Flexible Tactile Sensor Sheet with Thin Si Piezoresistive Cantilevers Peeled off from SOI with PDMS Sheet

    Kentaro Noda, Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)  

    発表年月: 2008年

  • Varifocal Infrared Imaging Lens by Parylene-on-Liquid-Deposition

    Hiroyuki Kojo, Nguyen Binh-Khiem, Tomoyuki Takahata, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)  

    発表年月: 2008年

  • Floating Silicon Structure Supported by Carbon Nanotubes

    Kouichi Ishitaki, Yusuke Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)  

    発表年月: 2008年

  • Triaxial Tactile Sensor Chips with Piezoresistive Cantilevers Mountable on Curved Surface

    Yusuke Tanaka, Akihito Nakai, Eiji Iwase, Takanori Goto, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)  

    発表年月: 2008年

  • Flexible Tactile Sensor Sheet with Thin Cantilevers for Shear Stress Detection on Curved Surface

    Kentaro Noda, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 17th CISM-IFToMM Symposium on Robot Design, Dynamics, and Control (RoManSy2008)  

    発表年月: 2008年

  • Stretchable Substrates using Pneumatic Actuators for Monitoring Mechanical-Stress-Dependent Cell Response

    Yun Jung Heo, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS2008)  

    発表年月: 2008年

  • 3D Integration of Heterogeneous MEMS Structures by Stamping Transfer

    Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2007)  

    発表年月: 2007年

  • Electrically Driven Varifocal Micro Lens Fabricated by Deposition Parylene Directly on Liquid

    Binh-Khiem Nguyen, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2007)  

    発表年月: 2007年

  • Electrochromic Voxel Array for 3D Display

    Sachio Murao, Seiichi Takamatsu, Binh-Khiem Nguyen, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2007)  

    発表年月: 2007年

  • Thin Electrowetting Controlled Optical Systems with Pan/Tilt and Variable Focus Functions

    Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2007)  

    発表年月: 2007年

  • Experimental Analysis of Liposome Water Two Phase Flow in Micro Channel for Localizing Reaction System using Liposome

    Yasumasa Ichikawa, Tetsuo Kan, Hiroaki Onoe, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS2007)  

    発表年月: 2007年

  • Angle Tunable Liquid Wedge Prism driven by Electro-Wetting

    Atsushi Takei, Eiji Iwase, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2006)  

    発表年月: 2006年12月

  • A Surface Plasmon Resonance Sensor With a V-shaped Silicon Prism Array

    Naoko Tsujiuchi, Eiji Iwase, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2006)  

    発表年月: 2006年01月

  • Angle Tunable Prism for Optical Scanner

    Atsushi Takei, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 13th International Display Workshops (IDW2006)  

    発表年月: 2006年01月

  • Multi-Step Sequential Batch Self-Assembly of Three-Dimensional Micro-Structures using Magnetic Field

    Eiji Iwase, Isao Shimoyama

    Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2005)  

    発表年月: 2005年01月

  • "Pop-Up" Display with 3-Dimensional Microlens Structures

    Masakazu Tohara, Eiji Iwase, Kazunori Hoshino, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2005)  

    発表年月: 2005年01月

  • The Structural-Color Based on the Mechanism of Butterfly Wing Coloring for Wide Viewing Angle Reflective Display

    Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

    Proceedings of the 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2004)  

    発表年月: 2004年01月

  • Sequential Batch Assembly of 3-D Microstructures with Elastic Hinges by a Magnetic Field

    Eiji Iwase, Shoji Takeuchi, Isao Shimoyama

    Proceedings of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2002)  

    発表年月: 2002年01月

  • 6脚ロボットの方向転換時の歩容に関する研究

    岩瀬英治, 加藤慎一朗, 安田隆, 下山勲

    日本機械学会 ロボティクス・メカトロニクス講演会  

    発表年月: 2000年05月

▼全件表示

共同研究・競争的資金等の研究課題

  • 切り紙構造が誘起する折り紙構造の学理創出とデバイス実証

    日本学術振興会  科学研究費助成事業

    研究期間:

    2022年04月
    -
    2027年03月
     

    岩瀬 英治, 舘 知宏, 尾上 弘晃, 斉藤 一哉

  • 切り紙構造が誘起する折り紙構造の学理創出とデバイス実証

    日本学術振興会  科学研究費助成事業

    研究期間:

    2022年04月
    -
    2025年03月
     

    岩瀬 英治, 舘 知宏, 尾上 弘晃, 斉藤 一哉

  • 機械的メタマテリアルとDNAゲルの融合による生化学構造色センサの高感度化

    日本学術振興会  科学研究費助成事業

    研究期間:

    2021年07月
    -
    2024年03月
     

    尾上 弘晃, 岩瀬 英治, 瀧ノ上 正浩

     概要を見る

    本年度は下記の2項目について主に研究を実施した.
    (1) 機械的な機構による刺激応答性ゲルの変位拡大検証: 設計指針を確立するために,ミリメートルスケールの機械的ステップ機構(~5 mmスケール)により,刺激応答性ゲルの膨潤・収縮の変位拡大の検証を行う.機械的メタマテリアル(変位拡大率は5-20倍)をフォトリソグラフィーにより造形し,刺激応答性ゲル(検知部)と構造色ゲル(読取り部)をそれぞれパターニングし,刺激応答性ゲルの膨潤・収縮を拡大し構造色ゲルの変形とするデバイスを構築した.原理検証実験のため,DNAアプタマーゲルより扱いが容易な温度応答性のpNIPAMゲル,およびpNMUMを検知部として利用し,シリカコロイドを分散させたアクリルアミドの構造色ゲルを読取り部として用い,刺激に対する反射波長スペクトル変化を評価したところ,通常の約2倍の感度での検知に成功した.
    (2) 機械的メタマテリアルの理論設計と評価: 研究項目(1)と並行して,機械的メタマテリアルの理論的な解析および設計・評価を行った.上記のステップ機構による刺激応答性ゲルの収縮を拡大して構造色ゲルに伝達する機構をデザインを定式化し,材料力学の熱膨張に落とし込むことで理論式を構築した.これによりデバイスのデザインによりどの程度の感度拡大が可能であるかの予測が実現した.ただし,材料の変形が微小変形を仮定しているモデルのため,実際のヤング率が文献値と異なる範囲を考慮する必要があることも同時に判明した.そのため,デバイスで使用するゲルの機械特性の評価を実施し,力学的なパラメータを取得した.

  • 切り紙構造を利用した特性可変光学メタマテリアル

    日本学術振興会  科学研究費助成事業

    研究期間:

    2021年04月
    -
    2024年03月
     

    菅 哲朗, 神田 夏輝, 岩瀬 英治, 高橋 英俊

     概要を見る

    本研究では、切り紙構造を利用することで、光学的な特性を大幅に変調可能なMEMS光学メタマテリアルを実現することを目的としている。光学メタマテリアルにおいて、従来から光共鳴構造の3次元形状変化や、フレキシブル基板の引っ張りによる共鳴体の配置間隔変化を利用した動的特性変調方法が研究されているが、限界があり実用的なデバイスに必要な変調機能は得られていない。そこで、2次元平面から立体構造を自由度高く作ることができる切り紙構造と融合し、構造的な制約をなくし、可変自由度が飛躍的に高い光学メタマテリアルを実現すための基礎技術を確立することを目的として実施する。
    <BR>
    本年度は本年度はポリイミドフィルムなどを用いた、レーザー加工によるラージスケールでのユニット構造自由度拡張の検証を行うこと、そして、基板への切り紙加工によりAuxetic構造など、引っ張りに対して自由度高く新調する構造を試作することを計画していた。まず、前者について、同心円状の周期的な切り込みを持つ切り紙構造による面外変形の特性評価を行った。梁幅および切り込み長さを決める中心角が異なる試験片を作製し、面外変形を計測した結果、ドーム型、円錐型、先鋭型といった異なる面外変形の分布とできることを明らかにした。後者については、Auxetic構造の予備的な構造として、立体変形後の形状の勾配を調整可能な切り紙メタマテリアル構造について取り組んだ。構造的特性の評価として、切り込みの大きさを変えた複数のデバイスを製作し、それぞれの面外方向における外力に対する変形量を測定したところ、切り込みを大きくすることで変形量を増大させることが可能であるとわかった。さらに、切り込みの大きさを同一構造内で場所により変化させることで、本研究の目標に設定した変形形状の調整である、構造内で変形しやすい領域と変形しにくい領域を製作することが可能であるとわかった。

  • 三次元ナノ空間構造体による接合界面の応力場制御と異種接合技術への展開

    日本学術振興会  科学研究費助成事業

    研究期間:

    2021年04月
    -
    2024年03月
     

    細井 厚志, 須賀 健雄, 岩瀬 英治

  • ウイルス可視化のためのプラズモニック半導体センサ

    日本学術振興会  科学研究費助成事業

    研究期間:

    2020年07月
    -
    2023年03月
     

    菅 哲朗, 瀧 真清, 岩瀬 英治

     概要を見る

    本研究は環境中の不可視なウイルスをリアルタイム検出する技術の実現を目的とする。このために、ラベルフリーで化学量計測が可能なプラズモニック半導体センサの研究を進め、ウイルスを高感度かつ選択的に検出する方法を実現する。センサを小型可搬にしてウイルスをその場認識可能とし、安全な生活環境の実現に貢献する技術を提供する。
    <BR>
    2020年度の取り組みでは、、プラズモニック半導体センサの研究を進める上で重要となる、回折格子による効率的な背面照射による表面プラズモン励起構造の実現に取り組んだ。結果として、はSU-8を材料としたポリマー基板内部に、シリコン製のナノ回折格子を埋め込む構造を試作し、この構造上で背面照射により理論と整合する共鳴が得られた。一方で、この構造は試作プロセスの難度が非常に高いものであるため、より簡易的に試作可能な方法を2021年度に探索した。
    <BR>
    具体的には、シリコン基板表面にトレンチを作り、そのトレンチ上に金属を成膜した構造であり、数値計算方法(RCWA法)により探索した。数値計算上では、背面からの照射に対する良好な共鳴、そして、センサ面の屈折率変化に対して適切な共鳴シフトを示すことから、有望構造として試作を進めた。ナノリソグラフィにより試作構造が完成した。現在、背面照射による応答測定は検証途上にあるが、表面側(試料面)側からの光照射によるSPR励起は確認しており、同時に応答の電流測定にも成功している。この結果を受けて、2022年度は背面照射からのSPR励起の確認、水試料に対するSPR応答の電流測定などを実施する。

  • 視覚的質感の要因学理の解明と可変質感提示デバイスによる表現力拡張

    日本学術振興会  科学研究費助成事業

    研究期間:

    2020年04月
    -
    2022年03月
     

    岩瀬 英治, 筧 康明

     概要を見る

    「視覚的質感」とは「つやつや」や「ざらざら」といった視覚によって得られる質感のことを指している。
    研究成果としては、「つやつやな表面」と「ざらざらな表面」を視覚的質感の基本要素とし、これらを微細に空間並置することで光学的に質感が混合し、その面積割合に応じた中間的な視覚的質感を提示できることを示した。また、視覚的質感を動的に可変提示するデバイスの検討を行うとともに照明や布地の表現力を拡張する実応用分野の探索と適用を行った。

  • MEMSキラルメタマテリアルによるテラヘルツ分光方法の研究

    日本学術振興会  科学研究費助成事業

    研究期間:

    2018年04月
    -
    2021年03月
     

    菅 哲朗, 小西 邦昭, 神田 夏輝, 岩瀬 英治, 高橋 英俊

     概要を見る

    THz周波数帯における振動円偏光二色スペクトル計測の実現のために、円偏光と強力に共鳴する3次元形状のキラル光共鳴体構造をMEMS可変メタマテリアルを形成した。目的達成には、MEMS可変メタマテリアルを大変形する必要があるため、従来課題であった安定的な大変形方法の生成に中心的に取り組んだ。安定的な大変形方法の実現のために、変形方法由来の不安定性の除去とシリコンの優れた変形特性に着目し、シリコン基板に製作したらせん構造を機械的に引っ張り上げる駆動方法を着想した。大変形を可能とする構造の設計製作、そして、機械的駆動法による変形量と変形形状について検証し、製作した構造での応答を計算により明らかにした。

  • 細胞折紙技術による形状変化・力学刺激に対する形態形成メカニズム解析システムの構築

    日本学術振興会  科学研究費助成事業

    研究期間:

    2017年04月
    -
    2021年03月
     

    繁富 香織, 尾上 弘晃, 岩瀬 英治, 福井 彰雅

     概要を見る

    本研究では、微細加工技術と折紙工学の折り畳み技術を利用して、細胞の足場となるマイクロプレートを作製し、細胞を培養した後に折り畳むことにより、形態形成の過程でおこる細胞の折り畳みによる形状変化や生体内における力学的刺激と形態形成のメカニズムの関係の解明を目指した。研究期間中に磁性体入りマイクロプレートを作製し、プレート上に細胞を培養した後に、顕微鏡下で磁場を用いてマイクロプレートを折畳み・展開し、細胞の形状を立体的に制御することに成功した。磁性体を用いることで、非接触で駆動できることから、配線などは必要なく、細胞の形状の変えることが可能になった。

  • 折り紙エレクトロニクス

    日本学術振興会  科学研究費・基盤研究(A)

    研究期間:

    2018年
    -
    2020年
     

    岩瀬 英治

  • 断線を自ら診断し自己修復する金属配線

    日本学術振興会  科学研究費・基盤研究(B)特設分野研究

    研究期間:

    2016年08月
    -
    2018年
     

    岩瀬 英治

  • フォトニック結晶マイクロゲルによる微小空間領域の物理化学量可視化

    日本学術振興会  科学研究費助成事業

    研究期間:

    2015年04月
    -
    2017年03月
     

    尾上 弘晃, 岩瀬 英治

     概要を見る

    温度応答特性をもつNIPAMハイドロゲルにシリカコロイドを分散させてフォトニック結晶ゲルを調整し,それをマイクロ流体デバイスを利用してゲルマイクロアレイを作製することで,微小領域からの物理量および化学量を計測可能なセンサの開発を行った.これらのマイクロスケールにパターニングされたゲルは,シリカ粒子によるコロイド結晶を内部に有しているため可視光領域の構造色を呈している.これにより,化学物質の濃度を可視光領域の色の変化としてマイクロスケールのアレイとして表示できることを確認した.このセンサデバイスを用いることで,エタノールの濃度と温度を同時に呈示することに成功した.

  • ナノ粒子プラズモンによる超回折限界精度での熱励起を用いた微細構造の選択的駆動

    日本学術振興会  科学研究費助成事業

    研究期間:

    2014年04月
    -
    2017年03月
     

    菅 哲朗, 磯崎 瑛宏, 岩瀬 英治

     概要を見る

    光の回折限界を超える極微小領域(10nm~1um)の選択的な機械駆動を実現する技術の構築を目標として、金属ナノ粒子をヒータとして用いた熱駆動型アクチュエータを提案した。楕円体など、等方的でない形状のナノ粒子は、照射光の偏光方向に対して光吸収が100倍以上異なる。これを生かし、複数のナノ粒子を異なる向きで配置し、特定の偏光を持つ光を照射することで、特定のナノ粒子だけを選択加熱することができ、局所加熱によるマイクロ構造の選択駆動が可能である。本提案では、ナノ粒子の構造と入射光の波長、偏光による発熱量の変化について理論解析し、局所加熱により3軸駆動を実現するMEMS構造の設計と試作に取り組んだ。

  • マイクロ・ナノ技術を駆使する組織レベルでの細胞機能制御

    日本学術振興会  科学研究費助成事業

    研究期間:

    2014年04月
    -
    2017年03月
     

    梶 弘和, 藤枝 俊宣, 阿部 俊明, 岩瀬 英治

     概要を見る

    マイクロ流体デバイスや自己支持性高分子ナノ薄膜などのマイクロ・ナノ技術を眼科領域に適用し、眼底組織を模倣したオーガンチップデバイスの開発と、その解析で得られる組織レベルでの細胞機能に関する知見を基盤に細胞デリバリー療法の実現を目指した。網膜色素上皮(RPE)細胞等の神経支持細胞を3次元マイクロ流路デバイス内に配置・培養して、眼底組織機能を再構成し、細胞周囲環境の変化に対する組織レベルでの細胞応答を解析した。また、オーガンチップデバイスでの検討結果を、自己支持性高分子ナノ薄膜上で培養するRPE細胞の組織機能制御技術に還元し、狭小な網膜下に細胞をデリバリーできる手法を検討した。

  • 細胞折紙-折紙の折畳み技術を利用した細胞の3次元組織の構築

    日本学術振興会  科学研究費助成事業

    研究期間:

    2014年04月
    -
    2017年03月
     

    繁富 香織, 岩瀬 英治, 尾上 弘晃

     概要を見る

    1) 微細加工技術を用いて細胞の足場となるマイクロプレートを作製し細胞を折り紙のように折ることで、3次元立体を作製する手法を確立した。2) マイクロプレートに磁性体を埋め込み磁場をかけることで、細胞の形状変化を可能とするアクティブデバイスを作製した。3)幹細胞を立体的に培養しすると骨に分化しやすいことがわかった。4) NIH/3T3とHepG2を立体的に共培養することで、平面状に共培養するより、HepG2のアルブミンの生成が増えることがわかった。5) NIH/3T3を培養した後に、折り畳み展開を繰り返すことで、細胞内のアクチンの配向に影響を及ぼすことがわかった。

  • 単一駆動部による多自由度MEMSスキャナの制御とそのデバイス応用

    日本学術振興会  科学研究費・若手研究(A)

    研究期間:

    2015年
    -
    2017年
     

    岩瀬 英治

  • さまざまな模様・質感が提示可能な柔軟シート

    日本学術振興会  科学研究費・挑戦的萌芽研究

    研究期間:

    2015年
    -
    2016年
     

    岩瀬 英治

  • 刺激応答性マイクロハイドロゲルによるバイオミメティック光学スマートスキン

    日本学術振興会  科学研究費助成事業

    研究期間:

    2013年04月
    -
    2015年03月
     

    尾上 弘晃, 岩瀬 英治

     概要を見る

    本研究の目的は,自然界の生物の持つ皮膚の色や模様の変化機構を模した,柔軟で伸縮可能な表示装置を構築する手法を提案することである.その目標のために,まず電場応答性のPAMPSゲルを利用した色素型ディスプレイを開発した.3 x 3のドットマトリックスアレイをPAMPSゲルと電極配線を用いて構築し,ゲルの屈曲を利用することで表示の切り替えに成功した.また,構造色による表示装置の開発のために,複数種類のフォトニックコロイド結晶をPDMSシート内にマイクロパターニングする「Channel-Cut Method」を開発を行った.2種類の発色を示すシートの構築に成功し理論式通りの反射波長ピークを確認した.

  • スタンピング転写を用いた大面積・機能集積・フレキシブルMEMSデバイス

    日本学術振興会  科学研究費・若手研究(A)

    研究期間:

    2007年
    -
    2008年
     

    岩瀬 英治

     概要を見る

    スタンピング転写を用いることにより、別々の基板上で製作したMEMS構造をフレキシブルシート上に集積した。これにより、今までフレキシブルシート上には製作が困難であった3次元構造や可動機構をもつMEMSデバイスが実現可能となる。本研究を実現する過程で、スタンピング転写の転写率・転写位置精度、平面ギャップの製作精度の評価を行った。また、実際に3次元構造および可動機構を有する応用的な光MEMSデバイスをPDMSシート上に作成できることを示した。

  • ナノ・マイクロ可動機構による光アクティブ制御

    日本学術振興会  科学研究費・特別研究員奨励費

    研究期間:

    2004年
    -
    2005年
     

    岩瀬 英治

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Misc

  • 自己修復型金属配線と伸縮デバイス応用

    古志知也, 岩瀬英治

    応用物理   86 ( 12 ) 1061 - 1064  2017年12月  [査読有り]  [招待有り]

    記事・総説・解説・論説等(学術雑誌)  

  • 伸縮性電気配線および自己修復機能を有する金属配線

    古志知也, 岩瀬英治

    接着の技術   37 ( 2 ) 21 - 25  2017年  [査読有り]  [招待有り]

    記事・総説・解説・論説等(学術雑誌)  

  • 2G26 体内展開型細胞移植シートのための多層構造薄膜の層構成の検討

    新保 創太, 藤枝 俊宣, 岩瀬 英治

    バイオエンジニアリング講演会講演論文集   2016 ( 28 ) "2G26 - 1"-"2G26-5"  2016年01月

     概要を見る

    We propose a sheet shape controlling method of tens/hundreds-nm-thick polymer film (called "nanosheet") by using a triple-layered structure and consider composition of the triple-layered structure. The triple-layered structure includes a nanosheet, a stretching layer with internal stress and a supporting layer. The supporting layer and the stretching layer were dissolved in water. The triple-layered structure was folded into a cylindrical shape due to the internal stress and unfolded into a flat shape after dissolution of a stretching layer. In this paper, we considered the solubility and swelling property of the supporting layer and the stretching layer, and considered compositions of the triple-layered structure which is a parameter of unfolding. After soaking in water, Type-A composition (stretching layer - supporting layer - nanosheet) was unfolded into a flat shape, and immediately after folded into a cylindrical shape because of swelling strain mismatch of supporting layer and stretching layer. However, Type-B composition (stretching layer - nanosheet - supporting layer) was able to keep a flat shape after unfolding because swelling strain of the stretching layer and the supporting layer were the same. Therefore, the type-B composition can reduce influence of swelling.

    CiNii

  • 28am2-E-5 金属ナノ粒子の電界トラップ中の粒子挙動解析

    中島 雄太, 古志 知也, 岩瀬 英治

    マイクロ・ナノ工学シンポジウム   2015 ( 7 ) "28am2 - E-5-1"-"28am2-E-5-2"  2015年10月

     概要を見る

    We analyzed a particle behavior of metal nanoparticles under electric field trapping by directly observing. Electric field trapping is the nanoparticles in the solution is collected toward narrow gap by dielectrophoresis force. We found that the nanoparticles are collected to bridging part, even after the particles are bridged over a narrow gap. Therefore, we fabricated gold wires with a narrow gap and measured diameter of particle cloud corresponding to applied voltage. The diameter of the particle cloud obviously increases as the applied voltage increases. We expect this phenomenon would enable to contribute to additional nanoparticle assembling which is useful for self-healing wire with high healing ability.

    CiNii

  • 29pm2-B-4 流路切断法によるフォトニックコロイド結晶のマイクロパターニング

    鈴木 規之, 岩瀬 英治, 尾上 弘晃

    マイクロ・ナノ工学シンポジウム   2015 ( 7 ) "29pm2 - B-4-1"-"29pm2-B-4-2"  2015年10月

     概要を見る

    This paper describes a simple micropatterning method of multiple types of photonic colloidal crystals (PCCs) on a single substrate for an optical color filter attached to a monochromic reflective display. We developed a "channel-cut method" to introduce multiple colloidal suspensions selectively and sequentially into a microchannel network. Colloidal suspensions are crystallized by centrifugal force. We succeeded in patterning of three different PCCs made of polystyrene in a single-layered microchannel. These PCCs exhibit red, blue and green structural color, respectively. We believe that our patterning method will realize a colorized reflective display that achieves low energy consumption and high color expression.

    CiNii

  • 29pm1-F-3 伸縮変形で生じた配線き裂の自己修復

    古志 知也, 岩瀬 英治

    マイクロ・ナノ工学シンポジウム   2015 ( 7 ) "29pm1 - F-3-1"-"29pm1-F-3-2"  2015年10月

     概要を見る

    This paper reports self-healing of a crack on a stretching metal wire using electric field trapping of metal nanoparticles. The electric field trapping is a phenomenon where the nanoparticles are trapped in a crack on the wire selectively by the electric field, when a voltage is applied to the wire covered with the nanoparticle dispersion. For realizing the self-healing on the stretching wire, we designed elongation stiffnesses of layers of a metal wire and a stretchable substrate in order to control the number of cracks which determine an applied voltage required for the self-healing (healing voltage). This approach enable us to estimate the crack width and the healing voltage. First, we analyzed the deformation of the metal wire on the stretchable substrate to design the elongation stiffnesses. Next, we fabricated the designed metal wire on the stretchable substrate and verified the self-healing on the stretching wire.

    CiNii

  • 30pm1-E-1 底面配置電極駆動による電場応答性エラストマーの屈曲変形を用いた発色素子

    薄 功大, 尾上 弘晃, 岩瀬 英治

    マイクロ・ナノ工学シンポジウム   2015 ( 7 ) "30pm1 - E-1-1"-"30pm1-E-1-2"  2015年10月

     概要を見る

    By using a bending deformation of an electroactive elastomer, we proposed and fabricated a deformable coloring element. The proposed element is composed of a flexible plate of TiO_2-loaded PDMS (TL-PDMS) and bottom-arranged electrodes. TL-PDMS is used because of durability, response speed, and producibility. The bottom arrangement of electrodes achieves a simple fabrication for a display device. In this paper, we measured the time response of the repetitive bending deformation of a TL-PDMS with bottom-arranged electrodes to find the bending-characteristic of TL-PDMS. Finally, we fabricated a 1 × 3 dot array of proposed coloring elements and demonstrated a color change by using bending deformation of TL-PDMS.

    CiNii

  • 20pm3-PM029 反射型ディスプレイのための構造色素子の光学特性

    鈴木 規之, 岩瀬 英治, 尾上 弘晃

    マイクロ・ナノ工学シンポジウム   2014 ( 6 ) "20pm3 - PM029-1"-"20pm3-PM029-2"  2014年10月

     概要を見る

    Colloidal crystals only reflect light having a specific wavelength in incident light by Bragg diffraction. In this paper, we propose a method to colorize a reflective display using a structural color filter made by photonic colloidal crystals colorize a black and white reflective display. We fabricated a structural color filter, which made of crystallized polystyrene colloids, by evaporation on a glass slide. We analyzed the crystal structure of color filter by SEM images and evaluated the optical properties by measuring reflection spectra of the crystal, which is placed on a white or black substrate. We demonstrated the feasibility of the colorization of reflective displays.

    CiNii

  • 21pm1-A3 金ナノ粒子の電界トラップを用いた自己修復配線の粒径依存性

    古志 知也, 岩瀬 英治

    マイクロ・ナノ工学シンポジウム   2014 ( 6 ) "21pm1 - A3-1"-"21pm1-A3-2"  2014年10月

     概要を見る

    On a self-healing wire using an electric field trapping of gold nanoparticles, we examined a particle size dependence of a healing voltage by comparing 20 nm and 200 nm in particle radii. We fabricated the gold wires with a patterned crack on a glass substrate, and measured the healing voltages. As a result, in the each case of 20 nm and 200 nm in particle radii, cracks up to 1000 nm were healed by applying under 3.2 V in amplitude of AC voltage, and cracks up to 3500 nm were healed by applying under 4.0 V in amplitude of AC voltage, respectively. This result shows that the case of 200 nm in particle radius can heal a larger crack by applying the same voltage than the case of 20 nm in particle radius.

    CiNii

  • 単一センサによる音源定位のためのキリギリス規範音響センサ

    稲葉亮, NGUYEN Minh Dung, 高橋英俊, 岩瀬英治, 松本潔, 下山勲

    日本ロボット学会学術講演会予稿集(CD-ROM)   27th   ROMBUNNO.2I1-03  2009年09月

    J-GLOBAL

  • パララックスバリアとマイクロレンズアレイを用いた立体視ディスプレイ

    奥野和秀, 岩瀬英治, 松本潔, 下山勲

    日本ロボット学会学術講演会予稿集(CD-ROM)   27th   ROMBUNNO.3A3-06  2009年09月

    J-GLOBAL

  • 昆虫型羽ばたき機を用いた翼面圧力の計測

    青山雄一郎, 大澤一治, 高橋英俊, 岩瀬英治, 松本潔, 下山勲

    日本ロボット学会学術講演会予稿集(CD-ROM)   27th   ROMBUNNO.1M3-07  2009年09月

    J-GLOBAL

  • 540 Siプリズムと回折格子を備えたMEMS近赤外用SPRセンサ(T04 MEMS技術を用いたヒューマンインターフェース,大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

    菅 哲朗, 辻内 直子, 岩瀬 英治, 松本 潔, 下山 勲

    年次大会講演論文集 : JSME annual meeting   2008 ( 8 ) 279 - 280  2008年08月

     概要を見る

    We have developed a Si microfabrication based SPR (Surface Plasmon Resonance) sensor chip equipped with Si prisms and an optical grating for sensor miniaturization. The Si prism structure was used to introduce the Near-Infrared light (λ = 1550 nm) to the sensing surface and generating the evanescent light there. Smooth prism slope was fabricated by utilizing (111) planes on the (100) plane of single crystalline Si wafer by anisotropic etching, giving small 200-μm prism array with 54.74° slope angle. We also used the optical grating with about 400-μm-pitch to manipulate an SPR dip position so as to increase the design freedom of the optical path within the sensor. SPR measurements with several specimens confirmed that the combination of Si prisms and the optical grating successfully worked to excite Surface Plasmon so that the sensor&#039;s validity as a refractive index sensor was also confirmed. Since this sensor is compatible with a Si microfabrication technology, further integration of optical parts, fluidic components and miniaturization of SPR sensor becomes possible, which is necessary for the application of an SPR sensor toward an environmental sensor.

    DOI CiNii

  • 2P1-A22 圧電発電によって駆動するセンサ情報送信システム(エコ・ロボティクス・メカトロニクス)

    鈴木 孝太郎, 岩瀬 英治, 松本 潔, 下山 勲

    ロボティクス・メカトロニクス講演会講演概要集   2008   "2P1 - A22(1)"-"2P1-A22(4)"  2008年06月

     概要を見る

    We propose a wireless signal transmitting system by gaining energy from the surroundings. As all of energy needed by this system is gained from the surroundings, there are no necessities for refilling fuel or changing battery. For example, Tire Pressure Monitoring System (TPMS) needs such a maintenance-free sensor system. The system consists of a piezoelectric generator, a capacitor, and a circuit. The circuit watches the capacitor's storage and supplies energy to the transmitter. We made an experiment to gain energy from the deformation of a car wheel with the generator. The energy from the environment is estimated to be about 20mW. This estimation shows that we can drive a transmitter for 1 second after 7 second's charge. We were also able to drive the transmitter in another environment from which the generator gains a little energy, so this system is available not only on wheel's surface but also in general environments.

    CiNii

  • ゴルフクラブに働く撃力の計測

    長谷川輝, 田中悠輔, 岩瀬英治, 松本潔, 下山勲

    日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM)   2008   ROMBUNNO.1A1-H14  2008年06月

    J-GLOBAL

  • ヘルムホルツ共鳴を利用したマイクロ超音波センサ

    鈴木明, 高橋英俊, 岩瀬英治, 松本潔, 下山勲

    日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM)   2008   ROMBUNNO.1P1-H08  2008年06月

    J-GLOBAL

  • ひずみセンサを用いた表面形状の推定

    宮本良, 小松哲, 岩瀬英治, 松本潔, 下山勲

    日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM)   2008   ROMBUNNO.1P1-I05  2008年06月

    J-GLOBAL

  • 電動羽ばたき機を用いた昆虫の飛翔の研究

    加藤浩気, 橋本温之, 岩瀬英治, 松本潔, 下山勲

    日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM)   2008   ROMBUNNO.1P1-F04  2008年06月

    J-GLOBAL

  • せん断応力センサを用いた表面形状の検出

    石滝公一, 岩瀬英治, 松本潔, 下山勲

    日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM)   2007   1A2-A11  2007年05月

    J-GLOBAL

  • せん断応力センサを用いた安定した物体把持のための重心検出

    田中悠輔, 森本雄矢, 岩瀬英治, 松本潔, 下山勲

    日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM)   2007   1A2-A10  2007年05月

    J-GLOBAL

  • 反射型構造発色ディスプレイに関する研究

    岩瀬英治, 松本潔, 下山勲

    日本ロボット学会学術講演会予稿集(CD-ROM)   24th   2A25  2006年09月

    J-GLOBAL

  • ナノ表面構造による機能発現

    岩瀬英治, 尾上弘晃, 下山勲

    機械の研究   57 ( 1 ) 182 - 188  2005年  [査読有り]  [招待有り]

    記事・総説・解説・論説等(学術雑誌)  

  • 有機半導体を用いた複眼型フレキシブルフォトセンサ

    斎藤宏, 岩瀬英治, 星野一憲, 松本潔, 下山勲

    応用物理学関係連合講演会講演予稿集   51st ( 3 ) 1489  2004年03月

    J-GLOBAL

  • 2P2-61-088 6 脚ロボットの方向転換時の歩容に関する研究

    岩瀬 英治, 加藤 慎一朗, 安田 隆, 下山 勲

    ロボティクス・メカトロニクス講演会講演概要集   2000   104 - 104  2000年

     概要を見る

    アリの歩行を高速度カメラを用いて撮影を行い, 各脚の各節の座標データを抽出し, 脚運びについて数値化した。これの解析から, アリの方向転換時の歩容を分類し, それぞれについて歩容を実現する自律分散的なアルゴリズムを考案した。また, 6脚ロボットを製作し, このアルゴリズムの有効性を検証した。その結果, 6脚ロボットにおいて, ロバスト性が高くかつ滑らかな方向転換行動を実現することができた。

    CiNii

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  • 2023年
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    各務記念材料技術研究所   流動研究員

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    理工学術院総合研究所   兼任研究員

特定課題制度(学内資金)

  • 折り畳みを利用した伸縮変形可能なシート型デバイス 

    2017年  

     概要を見る

    本申請課題の目的は、蛇腹折りやミウラ折りのような折り畳みを利用することで、伸縮変形や曲面への貼付けが可能なシートデバイスを実現することである。例えば、基板の中立面に電気配線を配置し、曲げ変形を受けない平板部に発光素子やセンサ素子を配置すれば、電気配線や発光素子・センサ素子に曲げ耐性・伸縮耐性がなかったとしても、デバイス全体としては伸縮耐性を有することができる。これにより、金属や半導体など、曲げ耐性・伸縮耐性を有しないが高性能・高機能な材料を用いて、伸縮変形可能なデバイスを実現することが可能となる。研究成果として、2次元の折り畳み方法の1つであるミウラ折りに切り込みを設けることで変形の自由度を増した構造による伸縮変形可能なLEDデバイスを実現した。

  • 少数電極駆動による多自由度MEMSスキャナ

    2014年  

     概要を見る

    本申請課題の目的は、支持梁の幾何形状を工夫することで各自由度に対する共振周波数を設計し、その構造を用いることで少数駆動電極による多自由度のMEMSスキャナの設計と実現可能性の検証を行うことである。3自由度(x軸回転、y軸回転、z軸回転)を有するMEMSスキャナを対象として、理論的に梁の設計を行うとともに有限要素法シミュレーションにより解析を行った。その結果、1対の梁によって、3自由度の共振周波数の離れた梁形状を設計することができた。さらに、マイクロファブリケーションを用いてMEMSスキャナの試作を行った。試作したMEMSスキャナの共振周波数特性を計測した結果、シミュレーションによる値と同等の特性を得ることができた。

  • 液体を用いた伸縮可能なMEMS配線

    2012年  

     概要を見る

     近年フレキシブルデバイスの研究が盛んになっているが、曲げのみならず伸縮に耐えられる配線材料はほとんどない。ゴム材料に導電性材料を混ぜた導電性ゴムの電気伝導率は10^1 S/m程度であり、これは固体の配線材料として用いられているAuが4.6×10^7 S/mであることと比べると非常に低い。そのため、高い伝導率と高い伸縮耐性とを兼ね備えた電気配線が求められている。 そこで、本研究では液体を利用することによる曲げられかつ伸縮可能な電気配線を目的とした。柔軟基板上に金属の配線部とそれを覆うように液体を配置した構造を基本とし、MEMS(Micro-Electro-Mechanical Systems)の加工技術により製作する。金属としてはAuを、柔軟基板としてはシリコーンゴムの一種であるPDMS(polydimethylsiloxane)を用いた。液体としては、イオン液体を用いることとした。その理由としては、高いイオン伝導率を持つことに加え、水に比べ広い電位窓をもつため電気的に利用しやすいこと、化学的安定性が高いことが挙げられる。しかしながら、未硬化のPDMSをイオン液体と接した状態で硬化させようとすると硬化阻害が起こり、PDMSが硬化しないという問題が発生した。10 hPa程度の低真空でCVD(Chemical Vapor Deposition: 化学的気相堆積)が可能なパリレンは、シリコーンオイルやグリセリンのような低蒸気圧の液体上に直接成膜することができることが知られている。イオン液体もまた低蒸気圧の液体であるため、イオン液体をパリレン膜で封止した後に未硬化のPDMSを流し込み柔軟基板への埋め込みを行った。 伸縮配線を抑える治具と計測用の電極端子が直動ステージに取り付けられた計測セットアップを用いて歪みに対する伝導率の変化の計測を行った。その結果、歪みが0 %での電気伝導率が8.1×10^6 S/mであったのに対して、歪みが24 %のときにでも2.5×10^6 S/mと10^6オーダの電気伝導率が得られた。