2022/01/21 更新

写真a

ミズノ ジュン
水野 潤
所属
研究院(研究機関) ナノ・ライフ創新研究機構
職名
上級研究員(研究院教授)

兼担

  • 理工学術院   基幹理工学部

学位

  • 東北大学   博士(工学)

所属学協会

  •  
     
     

    電気学会

 

研究分野

  • 電気電子材料工学

  • 機械力学、メカトロニクス

  • ロボティクス、知能機械システム

  • ナノバイオサイエンス

  • 電子デバイス、電子機器

研究キーワード

  • ナノ構造形成・制御、DNAデバイス、マイクロメカトロニクス、精密機械システム、作成・評価技術、電気・電子材料(半導体、誘電体、磁性体、超誘電体、有機物、絶縁体、超伝導体など)

論文

  • Green electrogenerated chemiluminescence using a quinacridone derivative as a guest molecule

    Yugo Koinuma, Ryoichi Ishimatsu, Emiri Kato, Jun Mizuno, Takashi Kasahara

    Electrochemistry Communications   127  2021年06月

     概要を見る

    We have developed a solution-based green electrogenerated chemiluminescence (ECL) cell using a quinacridone derivative, 5,12-dibutyl-1,3,8,10-tetramethylquinacridone (TMDBQA), as a fluorescent guest. 2-tert-Butyl-9,10-di(naphth-2-yl)anthracene (TBADN) and 4,4′-bis[4-(diphenylamino)styryl]biphenyl (BDAVBi) were used as host and assist dopant molecules, respectively, and dissolved in an organic solvent with the guest. When a direct current voltage of 5.5 V was applied, the microfluidic ECL cell, which has a 5-μm-thick microchannel sandwiched between two transparent electrodes, exhibited bright green emission from TMDBQA with a maximum luminance of 40.9 cd/m and a maximum current efficiency of 2.25 cd/A. However, if both TBADN and BDAVBi were absent from the solution, ECL emission was not observed. Thus, a possible mechanism for the efficient ECL emission of TMDBQA is proposed, involving a two-step energy transfer from TBADN through BDAVBi. We believe that the concept of host–guest solutions will be useful in developing novel light-emitting devices. 2

    DOI

  • Effects of Oxygen Partial Pressure on Wood-Based Activated Carbon Treated with Vacuum Ultraviolet Light

    Nana Takahashi, Hiroyuki Kuwae, Seren Maeda, Masahiro Kawamura, Ami Tezuka, Shuichi Shoji, Jun Mizuno

    Coatings   11 ( 4 ) 411 - 411  2021年04月

     概要を見る

    This study uses vacuum ultraviolet (VUV) light with a wavelength of 172 nm as a surface treatment to enhance the adsorption capacity of wood-based activated carbon (AC). The AC surface treatment is performed under three O2 partial pressure conditions—5.0 × 104 Pa, where ozone (O3) effects dominate; 6.3 × 10−6 Pa, where VUV effects dominate; and 1.9 × 103 Pa for a balanced condition. For the O3-dominant condition, only graphene edge defects are etched (no aromatic carbon bonds are etched), resulting in increased surface roughness. When the VUV effects dominate, aromatic carbon bonds are cleaved, which then reacted with O2 or water adsorbed inside the pores. This increased both the number and size of the mesopores. Under the balanced conditions, the water adsorption capacity was enhanced by 45.5%, which is higher than that obtained before VUV exposure or with VUV under other conditions. This is because the surface roughness increased, as well as the pore sizes and numbers under the balanced condition. These results indicate that we can control VUV-based AC surface treatments via O2 partial pressure.

    DOI

  • Fabrication of microfluidic electrogenerated chemiluminescence cells incorporated with titanium dioxide nanoparticles to improve luminescent performances

    Koji Okada, Ryoichi Ishimatsu, Jun Mizuno, Takashi Kasahara

    Applied Physics Express   13 ( 10 )  2020年10月

     概要を見る

    We demonstrated microfluidic electrogenerated chemiluminescence cells incorporated with titanium dioxide nanoparticles (TiO2 NPs). SU-8-based microchannels were fabricated on a fluorine doped tin oxide cathodes-patterned glass substrate. TiO2 NPs were coated on the cathodes as an electron injection layer. The enclosed microchannels were achieved by a direct bonding of the SU-8 surface to an indium tin oxide anode-patterned polyethylene terephthalate film via vacuum ultraviolet treatment. A tris(2,2′-bipyridine)ruthenium(II) solution was used as an emitter. The proposed device exhibited a maximum luminance of 93.5 cd m-2 at 3.3 V, which is 1.45 times higher than that of device without TiO2 NPs.

    DOI

  • White electrogenerated chemiluminescence using an anthracene derivative host and fluorescent dopants for microfluidic self-emissive displays

    Yugo Koinuma, Ryoichi Ishimatsu, Hiroyuki Kuwae, Koji Okada, Jun Mizuno, Takashi Kasahara

    Sensors and Actuators, A: Physical   306  2020年05月

     概要を見る

    We proposed electrogenerated chemiluminescence (ECL) cells using an anthracene derivative host material. 2-tert-Butyl-9,10-di(naphth-2-yl) anthracene (TBADN) was used as an ECL host and dissolved in an organic solvent. By reference to electroluminescent process of organic light-emitting diodes using a host-guest emitting layer, fluorescent guests were doped into a wide-energy-gap TBADN host solution. 4,4′-Bis[4-(diphenylamino)styryl]biphenyl (BDAVBi) and 2,8-di-tert-butyl-5,11-bis(4-tert-butylphenyl)-6,12-diphenyltetracene (TBRb) were used as blue and yellow guest emitters, respectively. A blue ECL emission was obtained from the ECL cell with the BDAVBi-doped TBADN solution. Furthermore, a white ECL emission with a broad wavelength spectrum from 405 to 700 nm was successfully demonstrated by using the TBADN solution doped with both BDAVBi and TBRb. We expect that the suggested host-guest ECL solutions can open up new possibilities for microfluidic self-emissive display applications.

    DOI

  • QFP/quartz Adhesive Bonding with Surface Treatment for Physical Security of Edge Artificial Intelligence Devices

    Hiro Nodaka, Ami Tezuka, Hiroyuki Kuwae, Kosuke Yamada, Morihisa Hoga, Haruo Shimamoto, Shuichi Shoji, Jun Mizuno

    Transactions of The Japan Institute of Electronics Packaging   13 ( 0 ) E20 - 008  2020年

    DOI

  • Low-Residual-Stress Amorphous Film for LiTaO3/Quartz or LiNbO3/Quartz Bonding toward 5G Surface Acoustic Wave Devices

    Ami Tezuka, Hiroyuki Kuwae, Kosuke Yamada, Shuichi Shoji, Shoji Kakio, Jun Mizuno

    Transactions of The Japan Institute of Electronics Packaging   13 ( 0 ) E19 - 009  2020年

    DOI

  • FDTD Optical Simulation for Organic Solar Cells Incorporated with Antireflection Nanostructures

    Shigeru Kubota, Kensaku Kanomata, Bashir Ahmmad, Jun Mizuno, Fumihiko Hirose

    Journal of Advanced Simulation in Science and Engineering   7 ( 1 ) 82 - 88  2020年

    DOI

  • Efficient light trapping structures for organic photovoltaics fabricated by nanoimprint lithography

    Shigeru Kubota, Kenta Hiraga, Kensaku Kanomata, Bashir Ahmmad, Jun Mizuno, Fumihiko Hirose

    Journal of Photopolymer Science and Technology   33 ( 1 ) 103 - 109  2020年

     概要を見る

    © 2020 SPST. To improve the efficiency of organic photovoltaics (OPVs), the trapping of incident light with surface nanostructures, such as moth eye structures, is a highly useful strategy for enhancing absorption in the photoactive layer. Nanoimprint lithography is a widely used technique to produce large-area nanostructures cost effectively. However, the moth eye texture fabricated by the nanoimprint process necessarily contains a spatial clearance between adjacent cones, which could degrade the antireflective property of the textured surface. In this study, we perform optical simulations for the OPVs with moth eye coating to explore the effects of the spatial clearance in the moth eye array as well as its geometric pattern on the photocurrent generation. We show that the photocurrent level decreases significantly and superlinearly with increases in the size of the spatial clearance in moth eye, suggesting the importance of sufficiently narrowing the clearance size. Furthermore, we experimentally measure the performance of the OPV cell incorporated with the moth eye structure having a near-optimal geometric pattern with reduced clearance size to verify the simulation results.

    DOI

  • Cuナノポーラスシートを用いた接合部の劣化挙動の解明

    古賀 俊一, 齋藤 美紀子, 水野 潤, 西川 宏

    第25回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム論文集     73 - 76  2019年01月  [査読有り]

  • Kinetics of Excimer Electrogenerated Chemiluminescence of Pyrene and 1-Pyrenebutyricacid 2-Ethylhexylester in Acetonitrile and an Ionic Liquid, Triethylpentylphosphonium Bis(trifluoromethanesulfonyl)imide

    Ryoichi Ishimatsu, Shuya Tashiro, Takashi Kasahara, Juro Oshima, Jun Mizuno, Koji Nakano, Chihaya Adachi, Toshihiko Imato

    The Journal of Physical Chemistry B   123 ( 50 ) 10825 - 10836  2019年  [査読有り]

    DOI PubMed

  • Low Temperature Flip Chip Bonding Using Squeegee-Embedded Au Nanoporous Bump Activated by VUV/O3 Treatment

    Weixin Fu, Tatsushi Kaneda, Akiko Okada, Kaori Matsunaga, Shuichi Shoji, Mikiko Saito, Hiroshi Nishikawa, Jun Mizuno

    Journal of Electronic Materials   47 ( 10 ) 5952 - 5958  2018年10月  [査読有り]

    DOI

  • 異種金属を用いたナノポーラス構造による界面形成現象の比較

    古賀 俊一, 齋藤 美紀子, 水野 潤, 西川 宏

    第28回マイクロエレクトロニクスシンポジウム論文集     273 - 276  2018年09月

  • Control for Au-Ag Nanoporous Structure by Electrodeposition and Dealloying

    Mikiko Saito, Jun Mizuno, Shunichi Koga, Hiroshi Nishikawa

    Proc. of 7th Electronics System-Integration Technology Conference     MAT1-1:1 - MAT1-1:4  2018年09月

  • A wide-energy-gap naphthalene-based liquid organic semiconductor host for liquid deep-blue organic light-emitting diodes

    Naofumi Kobayashi, Hiroyuki Kuwae, Juro Oshima, Ryoichi Ishimatsu, Shuya Tashiro, Toshihiko Imato, Chihaya Adachi, Shuichi Shoji, Jun Mizuno

    Journal of Luminescence   200   19 - 23  2018年08月  [査読有り]

     概要を見る

    We developed a novel naphthalene derivative to function as a wide-energy-gap liquid organic semiconductor (LOS) host material for the limited range of liquid deep-blue light-emitting materials that have been developed to date. The naphthalene derivative 1-naphthaleneacetic acid 2-ethylhexyl ester (NLQ), which shows a low viscosity of 20 mPa·s at 25 °C, was synthesized as a LOS by introducing an ethylhexyl group into naphthalene. We doped 9,10-diphenylanthracene (DPA) into NLQ as a guest deep-blue dye. The highest occupied molecular orbital (HOMO) energy level of NLQ was estimated to be − 6.40 eV from photoelectron spectroscopy measurements in air. The energy gap of NLQ was estimated to be 4.08 eV from its absorption spectrum, indicating that NLQ has the widest energy gap of any such host material to date. The lowest unoccupied molecular orbital energy level of NLQ was calculated to be − 2.31 eV. Deep-blue electroluminescence emission in a liquid state was obtained by doping DPA into NLQ. Light emission could be achieved by a combination of Förster resonance energy transfer and direct recombination of trapped holes and electrons because the energy gap of DPA is straddled by the wider energy gap of NLQ.

    DOI

  • チタン表面の規格化ナノ構造形成による周辺細胞制御技術とこれを応用した次世代インプラントの開発

    秋葉 陽介, 魚島 勝美, 塩澤 茉由子, 水野 潤

    日本歯科医学会誌   37   59 - 59  2018年03月

  • Low-temperature poly(oxymethylene) direct bonding via self-assembled monolayer

    Weixin Fu, Bo Ma, Hiroyuki Kuwae, Shuichi Shoji, Jun Mizuno

    Japanese Journal of Applied Physics   57   02BB01  2018年  [査読有り]

  • Highly flexible transparent electrodes based on mesh-patterned rigid indium tin oxide

    Kosuke Sakamoto, Hiroyuki Kuwae, Naofumi Kobayashi, Atsuki Nobori, Shuichi Shoji, Jun Mizuno

    Scientific Reports   8   2825  2018年  [査読有り]

  • High coupling and highly stable leaky surface acoustic waves on LiTaO3 thin plate bonded to quartz substrate

    Junki Hayashi, Kosuke Yamaya, Masashi Suzuki, Shoji Kakio, Haruka Suzaki, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

    Japanese Journal of Applied Physics   57   07LD21  2018年  [査読有り]

  • Compensation of surface roughness using an Au intermediate layer in a Cu direct bonding process

    Hirokazu Noma, Takumi Kamibayashi, Hiroyuki Kuwae, Naoya Suzuki, Toshihisa Nonaka, Shuichi Shoji, Jun Mizuno

    Journal of Electronic Materials   47   5403 - 5409  2018年  [査読有り]

  • Color-tunable microfluidic electrogenerated chemiluminescence cells using Y-shaped micromixer

    Takashi Kasahara, Ryoichi Ishimatsu, Hiroyuki Kuwae, Shuichi Shoji, Jun Mizuno

    Japanese Journal of Applied Physics   57 ( 12 ) 128001  2018年  [査読有り]

    DOI

  • Low-temperature direct heterogeneous bonding of polyether ether ketone and platinum

    Weixin Fu, Akitsu Shigetou, Shuichi Shoji, Jun Mizuno

    MATERIALS SCIENCE & ENGINEERING C-MATERIALS FOR BIOLOGICAL APPLICATIONS   79   860 - 865  2017年10月  [査読有り]

     概要を見る

    Direct heterogeneous bonding between polyether ether ketone (PEEK) and Pt was realized at the temperatures lower than 150 C-omicron. In order to create sufficient bondability to diverse materials, the surface was modified by vacuum ultraviolet (VUV) irradiation, which formed hydrate bridges. For comparison, direct bonding between surfaces atomically cleaned via Ar fast atom bombardment (FAB) was conducted in a vacuum. The VUV irradiation was found to be effective for creating an ultrathin hydrate bridge layer from the residual water molecules in the chamber. Tight bonds were formed through dehydration of the hydrate bridges by heating at 150 C-omicron, which also contributed to enhancing interdiffusion across the interface. The VUV-modified surfaces showed bondability as good as that of the FAB-treated surfaces, and the VUV-modified samples had shear strengths at the same level as those of FAB-treated surfaces. This technology will be of practical use in the packaging of lightweight, flexible biomedical devices. (C) 2017 Elsevier B.V. All rights reserved.

    DOI

  • An integrated antireflection design using nanotexture and high-refractive-index glass for organic photovoltaics

    Shigeru Kubota, Yoshiki Harada, Takenari Sudo, Kensaku Kanomata, Bashir Ahmmad, Jun Mizuno, Fumihiko Hirose

    JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH   14 ( 5 ) 1209 - 1224  2017年09月  [査読有り]

     概要を見る

    We propose a new antireflection (AR) design for organic photovoltaics (OPVs) to achieve broadband and omnidirectional enhancement of photocurrent. In the proposed design, a hybrid AR structure, which combines moth eye texturing and two-layer interference coating, is integrated with a glass substrate having a high refractive index (n). Using the optical simulation for OPV cells, we compare the performance of various AR configurations upon changing the refractive index of the glass substrate. We show that the short-circuit current density () is decreased by using the high-n glass substrate without AR coating, whereas is significantly increased by applying the high-n glass substrate with the hybrid AR structure, suggesting an importance of the integrated design. In addition, we demonstrate that the proposed AR configuration is quite effective to attain broad angle performance and is robust against the variations in geometric features of moth eye texture. Finally, the spectral dependence of photocurrent generation is experimentally measured for the verification of the effectiveness of the integrated AR design. These results provide a practical and efficient AR technique that can further expand the potential of OPVs as energy supply devices.

    DOI

  • In-Plane Anisotropic Molecular Orientation of Pentafluorene and Its Application to Linearly Polarized Electroluminescence

    Takeshi Komino, Hiroyuki Kuwae, Akiko Okada, Weixin Fu, Jun Mizuno, Jean-Charles Ribierre, Yuji Oki, Chihaya Adachi

    ACS APPLIED MATERIALS & INTERFACES   9 ( 32 ) 27054 - 27061  2017年08月  [査読有り]

     概要を見る

    By preparing parallelly aligned 1.9-mu m-high SiO2 microfluidic channels on an indium tin oxide substrate surface, the solution flow direction during spin-coating was controlled to be parallel to the grating. Using this technique, a pentafluorene-4,4'-bis(N-carbazoly1)-1,11-biphenyl (CBP) binary solution in chloroform was spin-coated to embed a 40-50 nm-thick 10 wt %-pentafluorene:CBP thin film in the channels. In-plane polarized photoluminescence measurements revealed that the pentafluorene molecules tended to orient along the grating, demonstrating that one-dimensional fluid flow can control the in-plane molecular orientation. Furthermore, the dependences of the photoluminescence anisotropy on the spin speed and substrate material suggest that the velocity of the solution flow and/or its gradient in the vertical direction greatly affects the resulting orientation. This indicates that the mechanism behind the molecular orientation is related to stress such as the shear force. The effect of the solution flow on the molecular orientation was demonstrated even in organic light-emitting diodes (OLEDs). Linearly polarized electroluminescence was obtained by applying the in-plane orientation to OLEDs, and it was found that the dichroic ratio of the electroluminescence orthogonal (x) and parallel (y) to the grating is x/y = 0.75.

    DOI

  • Widefield real-time single-cell secretion imaging with optical waveguide technique

    Yumiko Tanaka, Nobutake Suzuki, Kazuyo Mora, Jun Mizuno, Shuichi Shoji, Sotaro Uemura, Yoshitaka Shirasaki

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems     1580 - 1583  2017年07月  [査読有り]

     概要を見る

    We report the novel methodology which enables us to analyze single-cell secretion dynamics on the widefield total internal reflection fluorescence imaging with high spatial and temporal resolution using the optical waveguide technique. The practical system was achieved after some sensitivity improvements in an optical waveguide imaging, which has succeeded in detecting very weak fluorescence signals reflecting single-cell secretion dynamics in spite of using a low magnification objective lens. Our methodology is more advantageous than other traditional microscopic technologies in real-time imaging of cell-to-cell communication through humoral factor secretion among actively migrating cells, like immune cells do in vivo.

    DOI

  • Joule heat-induced breakdown of organic thin-film devices under pulse operation

    Kou Yoshida, Toshinori Matsushima, Yu Shiihara, Hiroyuki Kuwae, Jun Mizuno, Chihaya Adachi

    JOURNAL OF APPLIED PHYSICS   121 ( 19 ) 195503  2017年05月  [査読有り]

     概要を見る

    We investigated the influence of the substrate's thermal conductivities (k) and the widths of the electrical pulses (tau(pulse)) on the maximum current densities (J(max)) in organic thin-film devices. We also estimated the temperature rise (Delta T) inside devices under the pulse operation using numerical calculations to interpret the observed differences in J(max). For a long tau(pulse) of 5 mu s, J(max) is higher for devices with high-k sapphire substrates (around 1.2 kA/cm(2)) than devices with low-k plastic substrates (around 0.4 kA/cm(2)). This is because high-k sapphire substrates can work as heat sinks to relax Delta T for such a long tau(pulse). Operation of devices with high-k sapphire substrates for a short tau(pulse) of 70 ns resulted in further relaxation of Delta T, leading to an increase of J(max) to around 5 kA/cm(2). Interestingly, for such a short tau(pulse), devices with high-k sapphire and low-k plastic substrates showed similar J(max) and Delta T values, the reason for which may be that it is difficult for the generated Joule heat to travel to the substrate across a low-k organic layer within this short time. Published by AIP Publishing.

    DOI

  • Sub-50-nm structure patterning by combining nanoimprint lithography and anisotropic wet etching without considering original mold resolution

    Hiroyuki Kuwae, Akiko Okada, Shuichi Shoji, Jun Mizuno

    MICROELECTRONIC ENGINEERING   169   39 - 42  2017年02月  [査読有り]

     概要を見る

    A novel strategy for fabricating nanostructures was demonstrated that combined nanoimprint lithography and anisotropic wet etching. The resolution of proposed method does not depend on that of an original imprint mold. Atomically sharp V-grooves were formed by anisotropic wet etching using a SiO2 etching mask fabricated by nanoimprint lithography. Atomic scale precision was performed by anisotropic etchant of tetramethylammonium hydroxide solution with adding a small amount of surfactant at room temperature. Using the V-grooves as a template, Al2O3/AI was deposited and etched by angled Ar ion milling after planarization with thick resin. Sub-50-nm metal structures were achieved with 72% size reduction of the initial mold structure. (C) 2016 Elsevier B.V. All rights reserved.

    DOI

  • 橋架け構造により高い擦り耐性を実現するガラスナノピラーの作製

    桑江博之, 須藤健成, 岡田愛姫子, 高山公介, 庄子習一, 水野潤

    電気学会論文誌E(センサ・マイクロマシン部門誌)   137   72 - 77  2017年  [査読有り]

    DOI

  • Low temperature direct bonding between polyetheretherketone (PEEK) and Pt via vapor-assisted vacuum ultraviolet surface modification

    Weixin Fu, Akitsu Shigetou, Shuichi Shoji, Jun Mizuno

    Journal of Materials Science and Engineering B   7   4 - 62  2017年  [査読有り]

  • Recent Advances in Research and Development of Microfluidic Organic Light-Emitting Devices

    Takashi Kasahara, Hiroyuki Kuwae, Naofumi Kobayashi, Atsuki Nobori, Juro Oshima, Shuichi Shoji, Jun Mizuno

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   30 ( 4 ) 467 - 474  2017年  [査読有り]

     概要を見る

    Liquid organic semiconductors (LOSs) have been an attractive class of functional materials for next generation organic electronic devices. In 2009, a liquid organic light-emitting diode (Liquid OLED), which consists of LOS in the active layer, was proposed by Xu and Adachi. Although several papers have reported on an improvement in device performance, from the viewpoint of the device architecture, there are challenges associated with multi-color electroluminescence (EL) emissions. In order to integrate multiple individual liquid OLEDs on one substrate, we have developed multi-color microfluidic OLEDs which have single-mu m-thick microchannels sandwiched between two electrodes. This paper presents a brief overview of the authors' own recent progress on the microfluidic OLED technologies, including fabrication methodology for electro-microfluidic devices and demonstration of multi-and white-color EL emissions using pyrene-based LOSs. We believe that the proposed microfluidic OLEDs can be promising for novel liquid-based device applications.

    DOI

  • Fabrication of hole-patterned self-standing curved film using large-area spherical soft UV imprint lithography

    Takumi Kamibayashi, Hiroyuki Kuwae, Shuichi Shoji, Jun Mizuno

    Transactions of The Japan Institute of Electronics Packaging   10   E17-002  2017年  [査読有り]

  • Deep-blue light emission with a wide-bandgap naphthalene-derivative liquid organic semiconductor host

    Naofumi Kobayashi, Hiroyuki Kuwae, Juro Oshima, Ryoichi Ishimatsu, Shuya Tashiro, Toshihiko Imato, Chihaya Adachi, Shuichi Shoji, Jun Mizuno

    ORGANIC PHOTONIC MATERIALS AND DEVICES XIX   10101  2017年  [査読有り]

     概要を見る

    We developed a novel naphthalene-derivative to function as a wide-bandgap liquid organic semiconductor (LOS) host material for the limited range of liquid deep-blue light-emitting materials that have been developed to date. The naphthalene-derivative, 1-naphthaleneacetic acid 2-ethylhexyl ester (NLQ) was synthesized as a LOS, by introducing an ethylhexyl group into naphthalene. 9,10-Diphenyl anthracene (DPA) was doped into NLQ as a guest deep-blue dye. From the absorption spectrum, the bandgap energy of NLQ was estimated to be 4.13 eV, indicating that NLQ has the widest bandgap energy of any such host material so far as we know. Deep-blue electroluminescence (EL) emission in a liquid state was obtained by doping DPA into NLQ. Light emission could be achieved by a combination of Forster resonance energy transfer and direct recombination of trapped holes and electrons because the bandgap energy of DPA is straddle by that of the wide-bandgap NLQ. Thus, NLQ is shown to be a promising wide-bandgap LOS host material, which allows deep-blue light emission and may have applications in liquid organic light-emitting diodes.

    DOI

  • Application of I-structure though-glass interconnect filled with submicron gold particles to a hermetic sealing device

    Kazuya Nomura, Akiko Okada, Shuichi Shoji, Toshinori Ogashiwa, Jun Mizuno

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   26 ( 10 ) 105018  2016年10月  [査読有り]

     概要を見る

    We propose hermetic sealing of a glass-to-glass structure with an I-structure through-glass interconnect via (TGV) filled with submicron Au particles. The top and bottom bumps and the TGV were formed by a simple filling process with a bump-patterned dry film resist. The sealing devices consisting of two glass substrates were bonded via Au interlayers. Vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O-3) pretreatment was used for low-temperature Au-Au bonding at 200 degrees C. The bonded samples showed He leakage rates of less than 1.3 x 10(-9) Pa m(3) s(-1). The cross-sectional scanning electron microscope images of the fabricated I-structure TGV showed perfect adhesion between the I-structure TGV and glass substrate. These results indicate that the proposed I-structure TGV is suitable for hermetic sealing devices.

    DOI

  • Fabrication of bottom-emitting organic light-emitting diode panels interconnected with encapsulation substrate by Au-Au flip-chip bonding and capillary-driven filling process

    S. Yamada, C. -H. Shim, T. Edura, A. Okada, C. Adachi, S. Shoji, J. Mizuno

    MICROELECTRONIC ENGINEERING   161   94 - 97  2016年08月  [査読有り]

     概要を見る

    We present fabrication and testing of bottom-emitting organic light-emitting diode (OLED) panels based on flip chip assembly and non-destructive scanning. In this method, the OLED and electric circuits are fabricated on separate substrates and interconnected by low temperature assembly to create a high-performance bottom emitting OLED including other functions such as thin-film transistor (TFT) circuits. The low temperature assembly process consists of two steps. First, an OLED substrate and encapsulation glass with circuits are bonded at 100 degrees C via Au-Au bond. Encapsulation glass is utilized for the functional substrate with circuits. Next, the bonded panel is sealed by capillary underfill within and by applying and curing seal materials to the panel edge. The fabricated OLED was non-destructively evaluated by scanning acoustic microscopy (SAM). The SAM image shows all phi 500 mu m Au bumps were bonded to Au pads, indicating that OLED and encapsulation substrates were assembled. Electroluminescence of the OLED was demonstrated by applying voltage. Stable current-luminance characteristics were obtained for the fabricated OLED with an operating voltage of 3.25 V. The results indicate that the proposed fabrication is available for bottom-emitting OLED controlled by TFT circuits. In future, the assembly process can be widely applied to other flexible organic electronic devices with roll assembly by altering OLED or circuits with other devices because this is a simple pressure method with low temperature, achieving encapsulation at same time. (C) 2016 Elsevier B.V. All rights reserved.

    DOI

  • Effect of Isothermal Aging at 250 °C on Shear Strength of Joints Using Au Nanoporous Nonding for Die Attach

    Hiroshi Nishikawa, Kaori Matsunaga, Min-Su Kim, Mikiko Saito, Jun Mizuno

    Proc. of IMAPS International Conference and Exhibition on High Temperature Electronics (HiTEC2016)     143 - 147  2016年05月

  • Evaluation of hybrid bonding technology of single-micron pitch with planar structure for 3D interconnection

    Masaki Ohyama, Masatsugu Nimura, Jun Mizuno, Shuichi Shoji, Toshihisa Nonaka, Yoichi Shinba, Akitsu Shigetou

    MICROELECTRONICS RELIABILITY   59   134 - 139  2016年04月  [査読有り]

     概要を見る

    In this paper, we describe hybrid bonding technology of single-micron pitch with planar, structure for three-dimensional (3D) interconnection. Conventionally, underfill method utilizing capillary force was used after the bonding of microbump. However, the filling becomes insufficient in a gap less than 10 mu m between chips or bumps. One promising technology is the hybrid bonding technology that microbumps and an adhesive can, be simultaneously bonded. To realize a single-micron pitch hybrid bonding, we fabricated a planar structure that consists of 8 mu m-pitch Cu/Sn microbumps and a non-conductive film (NCF) by a chemical mechanical polishing (CMP) of resin. After planarization, the Cu/Sn bumps and the NCF were simultaneously bonded at 250 degrees C for 60 s. Cross-sectional scanning electron microscope (SEM) images and energy dispersive X-ray spectroscopy (EDX) images Show that the adhesive resin on the bump surface was successfully removed by the CMP. In addition, SEM images of the bonded sample show that the adhesive filled the 2.5-mu m gap between the chip and substrate. The Cu/Sn bumps were properly bonded in a corner on the chip. The proposed bonding method is expected to enable single-micron pitch interconnection for ultra-high density 3D LSI of next generation. (C) 2015 Elsevier Ltd. All rights reserved.

    DOI

  • 定電位電解したAuナノポーラスシートによるCu/Cu接合の検討

    松永 香織, Min-Su KIM, 西川 宏, 斎藤 美紀子, 水野 潤

    第22回シンポジウム「エレクトロニクスにおけるマイクロ接合・実装技術」     89 - 92  2016年02月  [査読有り]

  • Optimized design of moth eye antireflection structure for organic photovoltaics

    Shigeru Kubota, Kensaku Kanomata, Bashir Ahmmad, Jun Mizuno, Fumihiko Hirose

    JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH   13 ( 1 ) 201 - 210  2016年01月  [査読有り]

     概要を見る

    To improve the power conversion efficacy of organic photovoltaics (OPVs), it is required to design antireflection structures that could realize efficient and broadband light trapping. In this article, we perform global optimization of the textured pattern of moth eye antireflection surfaces to maximize the short-circuit current density (J(SC)) of OPVs with a poly(3-hexylthiophene) (P3HT) and [6,6]-phenyl-C-61-butyric acid methyl ester (PCBM)-based bulk heterojunction. We introduce an optimization algorithm consisting of two steps: in the first step, the simple grid search is conducted to roughly estimate a globally optimal solution, while in the second step, the Hooke and Jeeves pattern search is executed to refine the solution. By combining the optimization algorithm with the optical simulation based on the finite-difference time-domain method, we find the optimal period and height of moth eye array with which the level of J(SC) can be increased by 9.05% in the P3HT: PCBM-based organic solar cell. We also demonstrate that the optimized moth eye structure can significantly modify the light path at a long wavelength range to strengthen the electric field intensity and enhance energy absorption within the active layer.

    DOI

  • Promotion of self-assembly patterning of FePt nanoparticles by tuning the concentration of oleylamine/oleic acid surfactants in a coating solution

    Yoshiki Fujihira, Takuma Hachisu, Suguru Shitanda, Kenichiro Aikawa, Atsushi Sugiyama, Jun Mizuno, Shuichi Shoji, Toru Asahi, Tetsuya Osaka

    Journal of The Electrochemical Society   163   D171 - 174  2016年  [査読有り]

  • FDTD Analysis for Light Passing Through Glass Substrate and Its Application to Organic Photovoltaics with Moth Eye Antireflection Coating

    Shigeru Kubota, Kensaku Kanomata, Bashir Ahmmad, Jun Mizuno, Fumihiko Hirose

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   29 ( 2 ) 209 - 214  2016年  [査読有り]

     概要を見る

    To improve the performance of organic photovoltaics (OPVs), it is useful to trap light by using the antireflection nanotexture such as moth eye structure. The finite-difference time-domain (FDTD) method is frequently used to analyze the optical properties of nanotexture. However, in the case that FDTD is applied to OPVs, the existence of a glass substrate generates a strong oscillation in optical response, which does not exist in the actual device. To remove such oscillatory components and accurately simulate optical response, we study an FDTD-based computational algorithm, which we call the envelope method. We compare this method with other possible methods, and demonstrate that the envelope algorithm is more accurate for estimating optical response and more robust against parameter variations than the other ones. We also apply this method to analyze the changes in the OPV performance associated with the changes in the properties of moth eye coating.

    DOI

  • A Metal Bump Bonding Method Using Ag Nanoparticles as Intermediate Layer

    Weixin Fu, Masatsugu Nimura, Takashi Kasahara, Hayata Mimatsu, Akiko Okada, Shuichi Shoji, Shugo Ishizuka, Jun Mizuno

    JOURNAL OF ELECTRONIC MATERIALS   44 ( 11 ) 4646 - 4652  2015年11月  [査読有り]

     概要を見る

    The future development of low-temperature and low-pressure bonding technology is necessary for fine-pitch bump application. We propose a bump structure using Ag nanoparticles as an intermediate layer coated on a fine-pitch Cu pillar bump. The intermediate layer is prepared using an efficient and cost-saving squeegee-coating method followed by a 100A degrees C baking process. This bump structure can be easily flattened before the bonding process, and the low-temperature sinterability of the nanoparticles is retained. The bonding experiment was successfully performed at 250A degrees C and 39.8 MPa and the bonding strength was comparable to that achieved via other bonding technology utilizing metal particles or porous material as bump materials.

    DOI

  • Microfluidic White Organic Light-Emitting Diode Based on Integrated Patterns of Greenish-Blue and Yellow Solvent-Free Liquid Emitters

    Naofumi Kobayashi, Takashi Kasahara, Tomohiko Edura, Juro Oshima, Ryoichi Ishimatsu, Miho Tsuwaki, Toshihiko Imato, Shuichi Shoji, Jun Mizuno

    SCIENTIFIC REPORTS   5   14822  2015年10月  [査読有り]

     概要を見る

    We demonstrated a novel microfluidic white organic light-emitting diode (microfluidic WOLED) based on integrated sub-100-mu m-wide microchannels. Single-mu m-thick SU-8-based microchannels, which were sandwiched between indium tin oxide (ITO) anode and cathode pairs, were fabricated by photolithography and heterogeneous bonding technologies. 1-Pyrenebutyric acid 2-ethylhexyl ester (PLQ) was used as a solvent-free greenish-blue liquid emitter, while 2,8-di-tert-butyl-5,11-bis(4-tert-butylphenyl)- 6,12-diphenyltetracene (TBRb)-doped PLQ was applied as a yellow liquid emitter. In order to form the liquid white light-emitting layer, the greenish-blue and yellow liquid emitters were alternately injected into the integrated microchannels. The fabricated electro-microfluidic device successfully exhibited white electroluminescence (EL) emission via simultaneous greenish-blue and yellow emissions under an applied voltage of 100 V. A white emission with Commission Internationale de l'Eclairage (CIE) color coordinates of (0.40, 0.42) was also obtained; the emission corresponds to warm-white light. The proposed device has potential applications in subpixels of liquid-based microdisplays and for lighting.

    DOI

  • Suppression of external quantum efficiency roll-off of nanopatterned organic-light emitting diodes at high current densities

    Hiroyuki Kuwae, Atsushi Nitta, Kou Yoshida, Takashi Kasahara, Toshinori Matsushima, Munetomo Inoue, Shuichi Shoji, Jun Mizuno, Chihaya Adachi

    JOURNAL OF APPLIED PHYSICS   118 ( 15 ) 15501  2015年10月  [査読有り]

     概要を見る

    We developed organic light-emitting diodes (OLEDs) with nanopatterned current flow regions using electron-beam lithography with the aim of suppressing singlet-polaron annihilation (SPA). Nanopatterns composed of lines and circles were used in the current flow regions of nano-line and nano-dot OLEDs, respectively. Excitons partially escape from the current flow regions where SPA takes place. As such, current densities where external quantum efficiencies were half of their initial values (J(0)) increased as line width and circle diameter were decreased to close to the exciton diffusion length. Circles were more efficient at enhancing exciton escape and increasing J(0) than lines. The J(0) increase in the nano-dot OLEDs containing nanopatterned circles with a diameter of 50 nm was approximately 41-fold that of a conventional OLED with a current flow region of 4 mm(2). The dependence of J(0) on the size and shape of the nanopatterns was well explained by an SPA model that considered exciton diffusion. Nanopatterning of OLEDs is a feasible method of obtaining large J(0). (C) 2015 AIP Publishing LLC.

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  • Au ナノポーラスシートを用いた接合合体の高温信頼性

    松永 香織, Min-Su Kim, 西川 宏, 齋藤 美紀子, 水野 潤

    第25回 マイクロエレクトロニクスシンポジウム論文集     147 - 150  2015年09月

  • Multi-color microfluidic organic light-emitting diodes based on on-demand emitting layers of pyrene-based liquid organic semiconductors with fluorescent guest dopants

    Takashi Kasahara, Shigeyuki Matsunami, Tomohiko Edura, Ryoichi Ishimatsu, Juro Oshima, Miho Tsuwaki, Toshihiko Imato, Shuichi Shoji, Chihaya Adachi, Jun Mizuno

    SENSORS AND ACTUATORS B-CHEMICAL   207   481 - 489  2015年02月  [査読有り]

     概要を見る

    In this study, we propose on-demand multi-color microfluidic organic light-emitting diodes (microfluidic OLEDs) using fluorescent guest emitter-doped liquid organic semiconductors. We use 1-pyrenebutyric acid 2-ethylhexyl ester (PLQ) not only for a greenish-blue liquid emitter, but also for a liquid host. 5,12-Diphenyltetracene (DPT), 5,6,11,12-tetraphenyltetracene (rubrene), and tetraphenyldibenzoperiflanthene (DBP) are doped into PLQ to obtain green, yellow, and red liquid emitters, respectively. Single-micrometer-thick SU-8-based microchannels sandwiched between an indium tin oxide (ITO) anode and a 3-aminopropyltriethoxysilane (APTES)-modified ITO cathode are fabricated on a glass substrate using photolithography and heterogeneous bonding techniques, and emitting layers are formed on-demand by simply injecting liquid emitters into the target microchannels. The microfluidic OLEDs with liquid emitters successfully exhibited multi-color electroluminescence (EL) emissions. Furthermore, the maximum luminance reached 26.0 cd/m(2) at 61 V for 2.5-mu m-thick microfluidic OLED with PLQ, and the decreased EL luminance was recovered by replacing the degraded emitting layer with a fresh liquid emitter. We expect that on-demand multi-color EL emissions and refreshable luminance features of the proposed microfluidic OLEDs will be highly promising technologies for future long-life light-emitting device applications. (C) 2014 Elsevier B.V. All rights reserved.

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  • ダイボンディング用のAuナノポーラスシートの作製

    松永 香織, Min-Su Kim, 西川 宏, 齋藤 美紀子, 水野 潤

    第21回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム論文集     427 - 428  2015年02月

  • マイクロ流体電気化学発光素子を励起光源として用いたポータブル蛍光検出デバイスの作製

    津脇美帆, 笠原崇史, 江面知彦, 大島寿郎, 國澤栄里, 石松亮一, 松波成行, 今任稔彦, 安達千波矢, 庄子習一, 水野潤

    電気化学論文誌E(センサ・マイクロマシン部門誌)   44   230 - 235  2015年  [査読有り]

    DOI

  • Fabrication methodology for a hermetic sealing device using low temperature intrinsic-silicon/glass bonding

    Kazuya Nomura, Akiko Okada, Shuichi Shoji, Toshinori Ogashiwa, Jun Mizuno

    Transactions of The Japan Institute of Electronics Packaging   8   74 - 80  2015年  [査読有り]

    DOI

  • Improved Low Temperature Gold-Gold Bonding Using Nanoporous Powder Bump Using Vacuum Ultraviolet Irradiation Pre-treatment

    Tatsushi Kaneda, Jun Mizuno, Akiko Okada, Kaori Matsunaga, Shuichi Shoji, Mikiko Saito, Hiroshi Nishikawa

    2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IAAC)     473 - 477  2015年

     概要を見る

    This paper describes a novel low temperature Au-Au bonding method using nanoporous Au-Ag powder and vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O-3) pre-treatment. The nanoporous powder, which was fabricated by dealloying Ag-Au alloy sheet, was used to form the bump structure on the Au substrate by simple filing process, while an Au-coated Si substrate was used as the chip. The VUV/O-3 treated bumps and chip was bonded under a bonding pressure of 20 MPa at 200 degrees C for 20 min in a vacuum atmosphere of 1 kPa. A ligament size of the nanoporous structure on powder surface was found to be grown dramatically during bonding process. The tensile strength reached 10.1 MPa which is 2.3 times higher than that without VUV/O-3 treatment. This suggests that organic contaminants on the each ligament surface were effectively removed by VUV/O-3 treatment, and consequently, the diffusion of gold atoms in the nanoporous powder was significantly promoted to change into bulk structure. The proposed method will be highly a promising method for 3D-LSI and MEMS packaging.

    DOI

  • Effect of Au nanoporous structure on bonding strength

    Kaori Matsunaga, Min-Su Kim, Hiroshi Nishikawa, Mikiko Saito, Jun Mizuno

    2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IAAC)     830 - 833  2015年

     概要を見る

    Recently, several materials and joining processes have been proposed as alternatives to high-Pb-containing solders. There has been an increasing focus on developing solid-state bonding interconnection processes based on sintering, such as bonding techniques using Ag or Cu nanoparticles. However, sintered nanoparticle layers tend to have voids that result from solvent residue and dispersing agents. The voids in the sintered layer degrade the reliability of the joints. Therefore, we have proposed a solid-state bonding technique without solvents and flux using a nanoporous sheet. A nanoporous sheet can be made from binary alloy systems by dissolving the less noble component from the alloy selectively. A bonding technique using nanomaterials could reduce the bonding temperature because of the high reactive nanoporous surface. In this study, Au nanoporous sheets were fabricated by dealloying a Au-Ag alloy into an HNO3 solution, and the effects of the Au nanoporous structure on joint bonding strength were investigated. After dealloying, Au nanoporous sheets were set between bare Cu substrates. The samples were bonded at various process temperatures under a nitrogen atmosphere. As a result, the joint bonded at 300 degrees C, using the Au nanoporous sheet with a dealloying time of 1 h, showed a high shear strength of about 20 MPa. It was found that joining using Au nanoporous bonding was successfully achieved.

    DOI

  • Depth profiles of absorbed hydrogen in Ni-Nb-Zr amorphous alloy ribbons by Glow Discharge Optical Emission Spectroscopy

    R.Y. Umetsu, M. Saito, T. Sasaki, T. Sekiguchi, J. Mizuno, H. Kawarada

    Open Journal of Metal   4 ( 4 ) 112 - 119  2014年12月  [査読有り]

    DOI

  • Nano-porous structure control under electrodeposition and dealloying conditions for low-temperature bonding

    Mikiko Saito, Kaori Matsunaga, Jun Mizuno, Hroshi Nishikawa

    Proceedings of the 5th Electronics System-Integration Technology Conference, ESTC 2014     S8P4-1 - S8P4-4  2014年11月

     概要を見る

    We investigated a low-temperature bond formation process, wherein nanoporous structures were formed on electrode surfaces by electrodeposition and dealloying. The morphology control of a nanoporous Au-Ag structure was investigated using electrochemical deposition and electrochemical methods. The ligament size of the electrodeposited Au-Ag films after dealloying increased upon annealing. The ligament size of 10-20 nm for as-deposited increased to 50-100 nm for films annealed at 150 °C. The samples that were annealed at 50 °C before dealloying indicated a finer nanoporous structure, which corresponded to the highest bond strength of the evaluated samples. The volume of selective dissolution was small on as-deposited samples despite the anodic current being the largest of the examined films. Inductively coupled plasma mass spectrometry (ICP-MS) analysis showed that the change of the Ag content of the films after dealloying of as-deposited samples was the smallest of the examined films. Small ligament size with a finer nanoporous structure resulted in high bond strength.

    DOI

  • Relationship between bonding conditions and strength for joints using a Au nanoporous sheet

    Kaori Matsunaga, Min-Su Kim, Hiroshi Nishikawa, Mikiko Saito, Jun Mizuno

    Proceedings of the 5th Electronics System-Integration Technology Conference, ESTC 2014     S95P5  2014年11月

     概要を見る

    As the establishment of high-temperature lead-free solders and other interconnection technologies is an urgent priority in the electronics industry, a strong drive exists to find Pb-free alternatives for high-temperature bonding processes. We propose a no-solvent, no-flux solid-state bonding technique that uses a nanoporous sheet, a process we call nanoporous bonding (NPB). Nanoporous sheets can be made from binary alloys by selective dissolution of one element. In this study, Au nanoporous sheets were fabricated by dealloying a Au-Ag binary alloy with nitric acid. The effects of joining conditions on the shear strength of joints using this sheet were investigated. The joints bonded at 350 °C showed high shear strengths of above 20 MPa. It was found that joining using Au NPB was successfully achieved, and that NPB shows potential as a Pb-free interconnection material for high-temperature electronic applications.

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  • 木質系炭素材料を用いた電気二重層キャパシタ用機能性電極

    船橋 翼, 庄子 習一, 佐藤 正倫, 北島 昌夫, 梅津 理恵, 水野 潤

    電子情報通信学会論文誌 C   97 ( 11 ) 386 - 390  2014年10月  [査読有り]  [招待有り]

  • Fabrication and characterization of large-area flexible microfluidic organic light-emitting diode with liquid organic semiconductor

    Miho Tsuwaki, Takashi Kasahara, Tomohiko Edura, Shigeyuki Matsunami, Juro Oshima, Shuichi Shoji, Chihaya Adachi, Jun Mizuno

    SENSORS AND ACTUATORS A-PHYSICAL   216   231 - 236  2014年09月  [査読有り]

     概要を見る

    We propose simple and high-throughput fabrication of large-area flexible microfluidic organic light-emitting diodes (microfluidic OLEDs). Flexible electro-SU-8-microchannels with a liquid emission layer were fabricated by the following four steps: (a) screen printing for transparent electrodes, (b) novel belttransfer exposure for SU-8, (c) heterogeneous low-temperature bonding using self-assembled monolayers (SAMs), and (d) injecting a liquid emitter into the microchannels.1-Pyrenebutyric acid 2-ethylhexyl ester (PLQ), which is on of liquid organic semiconductors, was used as a liquid emitter. The liquid emitter successfully filled the flexible microchannels, and electroluminescence was obtained both in flat and curved states. The proposed microfluidic OLED is applicable for future flexible posters or displays, and can be adopted around curved surfaces. (C) 2014 Elsevier B.V. All rights reserved.

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  • Au ナノポーラス接合の接合材表面構造と接合強度の関係

    松永 香織, Min-Su Kim, 西川 宏, 齋藤 美紀子, 水野 潤

    MES 2014 エレクトロニクス実装学会 秋季大会 論文集     179 - 182  2014年09月

  • Simultaneous fabrication of a through-glass interconnect via and a bump using dry film resist and submicron gold particles

    Hayata Mimatsu, Jun Mizuno, Shuichi Shoji, Takashi Kasahara, Kailing Shih, Kazuya Nomura, Yukio Kanehira, Toshinori Ogashiwa

    MICRO & NANO LETTERS   9 ( 8 ) 532 - 535  2014年08月  [査読有り]

     概要を見る

    A process for the simultaneous fabrication of through-glass interconnect vias (TGVs) and gold (Au) bumps using dry film resist and submicron Au particles is proposed. A Ti/Pt/Au layer was sputtered on the top and bottom surfaces of glass vias to improve the adhesion between the glass substrate and submicron Au particles. The submicron Au particles filled the resist holes and glass vias fabricated by photolithography and by the two-electrode method, respectively, and were then sintered. The height and diameter of the fabricated Au bumps were about 20-25 and 200 mu m, respectively. The Ti/Pt/Au layer on the surface of the glass substrate was removed by Ar ion milling to isolate each bump electrically. The resistance of a single Au bump and TGV was evaluated using the four-wire ohm method to be about 0.05 Omega. Furthermore, Au bump bonding was demonstrated. Fractured Au bumps and TGVs were observed by scanning electron microscopy after the bonded sample was peeled. It is expected that this fabrication process using a dry film resist and submicron Au particles will be useful in simple packaging processes to form glass interposer substrates or glass integrated circuit chips.

    DOI

  • Multi-color microfluidic electrochemiluminescence cells

    Takashi Kasahara, Shigeyuki Matsunami, Tomohiko Edura, Ryoichi Ishimatsu, Juro Oshima, Miho Tsuwaki, Toshihiko Imato, Shuichi Shoji, Chihaya Adachi, Jun Mizuno

    SENSORS AND ACTUATORS A-PHYSICAL   214   225 - 229  2014年08月  [査読有り]

     概要を見る

    We demonstrated multi-color microfluidic electrochemiluminescence (ECL) cells. 5,6,11,12-Tetraphenylnaphthacene (rubrene), 9,10-diphenylanthracene (DPA), tetraphenyldibenzoperiflanthene (DBP)-doped rubrene, and 1,2,3,5-tetrakis(carbazol-9-yl)-4,6-dicyanobenzene (4CzIPN) dissolved in a mixed organic solvent of 1,2-dichlorobenzene and acetonitrile in the ratio of 2:1 (v/v) were used as yellow, blue, red, and green ECL solutions, respectively. Light emissions were confirmed using simple-structured ECL cells consisting of two indium tin oxide (ITO) coated glass substrates with an SU-8 spacer of thickness varying from 0.9 to 6 mu m. The SU-8-based microfluidic ECL cells were fabricated using photolithography and heterogeneous bonding techniques through the use of epoxy-and amine-terminated self-assembled monolayers. The emitting layers were formed on-demand by injecting the chosen ECL solutions into the microchannels sandwiched between ITO anode and cathode pairs. Multi-color ECL was successfully obtained at the light-emitting pixels. The microfluidic ECL cells with DBP-doped rubrene solution showed a maximum luminance of 11.6 cd/m(2) and the current efficiency of ca. 0.32 cd/A at 8V. We expect that the proposed microfluidic device will be a highly promising technology for liquid-based light-emitting applications. (C) 2014 Elsevier B.V. All rights reserved.

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  • Hybrid Au-Adhesive Bonding Using Planar Adhesive Structure for 3-D LSI

    Masatsugu Nimura, Jun Mizuno, Shuichi Shoji, Katsuyuki Sakuma, Hiroshi Ogino, Tomoyuki Enomoto, Akitsu Shigetou

    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY   4 ( 5 ) 762 - 768  2014年05月  [査読有り]

     概要を見る

    In this paper, we describe a hybrid bonding technology of Au microbump and adhesive using a planar adhesive structure for 3-D large-scale integration (LSI). Hybrid bonding means that both the microbump electrode and adhesive are simultaneously bonded. In 3-D LSI, the gaps between bonded chips are <10 mu m because the pitch of the microbumps is decreased. Conventionally, adhesive resin is injected into the gaps by means of capillary force. However, the filling of the gaps is insufficient due to surface conditions. To address this challenge, we evaluated hybrid bonding with a planar adhesive structure fabricated by chemical-mechanical polishing. The bonding results showed that connection between the Au bumps and adhesive filling in the 6-mu m gap between bonded Si chips was achieved without readily visible void in the range of 6 mm x 6 mm. All 900 bumps were also electrically connected. The shear strength of the bonded sample was 13 MPa. Therefore, we determined that the proposed hybrid bonding technology is highly effective for 3-D LSI with fine-pitch microbumps.

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  • Real-time single-cell imaging of protein secretion

    Yoshitaka Shirasaki, Mai Yamagishi, Nobutake Suzuki, Kazushi Izawa, Asahi Nakahara, Jun Mizuno, Shuichi Shoji, Toshio Heike, Yoshie Harada, Ryuta Nishikomori, Osamu Ohara

    SCIENTIFIC REPORTS   4   4736  2014年04月  [査読有り]

     概要を見る

    Protein secretion, a key intercellular event for transducing cellular signals, is thought to be strictly regulated. However, secretion dynamics at the single-cell level have not yet been clarified because intercellular heterogeneity results in an averaging response from the bulk cell population. To address this issue, we developed a novel assay platform for real-time imaging of protein secretion at single-cell resolution by a sandwich immunoassay monitored by total internal reflection microscopy in sub-nanolitre-sized microwell arrays. Real-time secretion imaging on the platform at 1-min time intervals allowed successful detection of the heterogeneous onset time of nonclassical IL-1b secretion from monocytes after external stimulation. The platform also helped in elucidating the chronological relationship between loss of membrane integrity and IL-1b secretion. The study results indicate that this unique monitoring platform will serve as a new and powerful tool for analysing protein secretion dynamics with simultaneous monitoring of intracellular events by live-cell imaging.

    DOI

  • Electrogenerated chemiluminescence of donor-acceptor molecules with thermally activated delayed fluorescence

    Ryoichi Ishimatsu, Shigeyuki Matsunami, Takashi Kasahara, Jun Mizuno, Tomohiko Edura, Chihaya Adachi, Koji Nakano, Toshihiko Imato

    Angewandte Chemie International Edition   126   7113 - 7116  2014年  [査読有り]

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  • Analyzing Hydrogen Charging pf Sputtered Ni-Nb-Zr Films Using Electrochemical Method

    M. Saito, R.Y. Umetsu, T. Sasaki, T. Sekiguch, J. Mizuno, H. Kawarada

    ovel Structural Metallic and Inorganic Materials (ISETS’13 and AMDI-4)     1229  2013年12月

  • Depth Profile Analysis of Hydrogen in Ni-Nb-Zr Amorphous Ribbon by Glow Discharge Optical Emission Spectrometry

    R.Y. Umetsu, M. Saito, T. Sasaki, T. Sekiguch, J. Mizuno, H. Kawarada

    The International Symposium on Ecotopia Science 2013 and The 5th International Symposium on Advanced Materials Development and Integration of Novel Structural Metallic and Inorganic Materials (ISETS’13 and AMDI-4)     1235  2013年12月

  • Fast and quantitative analysis of branched-chain amino acids in biological samples using a pillar array column

    Yanting Song, Katsuya Takatsuki, Muneki Isokawa, Tetsushi Sekiguchi, Jun Mizuno, Takashi Funatsu, Shuichi Shoji, Makoto Tsunoda

    ANALYTICAL AND BIOANALYTICAL CHEMISTRY   405 ( 25 ) 7993 - 7999  2013年10月  [査読有り]

     概要を見る

    In this study, a fast and quantitative determination method for branched-chain amino acids (BCAAs), namely leucine, isoleucine, and valine, was developed using a pillar array column. A pillar array column with low-dispersion turns was fabricated on a 20 x 20-mm(2) microchip using multistep ultraviolet photolithography and deep reactive ion etching. The BCAAs were fluorescently labeled with 4-fluoro-7-nitro-2,1,3-benzoxadiazole (NBD-F), followed by reversed-phase separation on the pillar array column. The NBD derivatives of the three BCAAs and an internal standard (6-aminocaproic acid) were separated in 100 s. The calibration curves for the NBD-BCAAs had good linearity in the range of 0.4-20 mu M, using an internal standard. The intra- and interday precisions were found to be in the ranges of 1.42-3.80 and 2.74-6.97 %, respectively. The accuracies for the NBD-BCAA were from 90.2 to 99.1 %. The method was used for the analysis of sports drink and human plasma samples. The concentrations of BCAAs determined by the developed method showed good agreements with those determined using a conventional high-performance liquid chromatography system. As BCAAs are important biomarkers of some diseases, these results showed that the developed method could be a potential diagnostic tool in clinical research.

    DOI

  • Film of lignocellulosic carbon material for self-supporting electrodes in electric double-layer capacitors

    Tsubasa Funabashi, Jun Mizuno, Masamichi Sato, Masao Kitajima, Makoto Matsuura, Shuichi Shoji

    APL MATERIALS   1 ( 3 ) 32104  2013年09月  [査読有り]

     概要を見る

    A novel thin, wood-based carbon material with heterogeneous pores, film of lignocellulosic carbon material (FLCM), was successfully fabricated by carbonizing softwood samples of Picea jezoensis (Jezo spruce). Simultaneous increase in the specific surface area of FLCM and its affinity for electrolyte solvents in an electric double-layer capacitor (EDLC) were achieved by the vacuum ultraviolet/ozone (VUV/O-3) treatment. This treatment increased the specific surface area of FLCM by 50% over that of original FLCM. The results obtained in this study confirmed that FLCM is an appropriate self-supporting EDLC electrode material without any warps and cracks. (C) 2013 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.

    DOI

  • GaN Lateral Overgrowth by Hydride Vapor Phase Epitaxy through Nanometer-Size Channels Fabricated with Nanoimprint Lithography

    Akira Usui, Toshiharu Matsueda, Hiroki Goto, Haruo Sunakawa, Yasuharu Fujiyama, Yujiro Ishihara, Akiko Okada, Shuichi Shoji, Atsushi A. Yamaguchi, Hiromi Nishihara, Hidetoshi Shinohara, Hiroshi Goto, Jun Mizuno

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 8 ) 08JB02  2013年08月  [査読有り]

     概要を見る

    Epitaxial lateral overgrowth (ELO) has been used for reducing the dislocation density to grow high-quality GaN crystals. In conventional ELO, micrometer-size channels formed on a mask material such as SiO2, where GaN growth starts, are generally used. In the present study, ELO through nanometer-size (50-80 nm) channels is investigated to improve the dislocation reduction ability. Channels are fabricated using nanoimprint lithography and dry etching. We demonstrate for the first time successful hydride vapor phase epitaxy (HVPE)-based GaN ELO growth through nanochannels. In the growth interface, distinct facet structures appear and coalescence between neighboring facets proceeds. The surface of a 20-mu m-thick GaN layer becomes flat by the valleys between facet structures being buried. The dislocation density is shown to decrease to approximately 5 x 10(7) cm(-2) for a 20-mu m-thick GaN layer on sapphire. Photoluminescence measurements show a decay time of over 3 times longer than that of a conventional metalorganic chemical vapor deposition (MOCVD) template. (C) 2013 The Japan Society of Applied Physics

    DOI

  • Ultraviolet nanoimprint lithography

    Jun Taniguchi, Noriyuki Unno, Hidetoshi Shinohara, Jun Mizuno, Hiroshi Goto, Nobuji Sakai, Kentaro Tsunozaki, Hiroto Miyake, Norio Yoshino, Kenichi Kotaki

    Nanoimprint Technology: Nanotransfer for Thermoplastic and Photocurable Polymers     91 - 168  2013年06月  [査読有り]

     概要を見る

    © 2013 John Wiley & Sons, Ltd. All rights reserved. This chapter describes the phenomena of ultraviolet nanoimprint lithography (UV-NIL) transfer process, UV-NIL machine, UV-NIL materials, and evaluation of mold and transfer resin surface. In UV-NIL, a liquid resin having a low viscosity is used, thus, the required transfer pressure is lower than that of thermal NIL. The chapter describes the self-assembled monolayer (SAM) release agent and its coating method. Resin is classified according to the polymerization system into several types: radical polymerization type, ion polymerization type, and ene-thiol type. The properties of resins with different types of curing mechanism and developmental examples are described. The chapter describes what silane coupling agents are, and explains the mechanism by which the agents modify the surface of the substrate.

    DOI

  • Fabrication and performance evaluation of microfluidic organic light emitting diode

    Takashi Kasahara, Shigeyuki Matsunami, Tomohiko Edura, Juro Oshima, Chihaya Adachi, Shuichi Shoji, Jun Mizuno

    SENSORS AND ACTUATORS A-PHYSICAL   195   219 - 223  2013年06月  [査読有り]

     概要を見る

    In this study, we fabricated a microfluidic organic light emitting diode (OLED) and evaluated its performance. The microchip consisted of a 3 x 3 matrix array of OLED pixels in SU-8 microchannels sandwiched by indium tin oxide (ITO) anode and cathode pairs. Liquid organic semiconductors introduced into the microchannels were employed as the light emitters. Electroluminescence was successfully observed at the emitting area of the microchannels. A current density of 0.298 mA/cm(2) was measured at 70V. In our prototype microfluidic OLED, the patterning of the liquid emitters was confirmed in the microchannels on a single chip. This result shows that the proposed structure can be applicable for liquid-based display. (C) 2013 Elsevier B.V. All rights reserved.

    DOI

  • Fabrication of a Polymer High-Aspect-Ratio Pillar Array Using UV Imprinting

    Hidetoshi Shinohara, Hiroshi Goto, Takashi Kasahara, Jun Mizuno

    MICROMACHINES   4 ( 2 ) 157 - 167  2013年06月  [査読有り]

     概要を見る

    This paper presents UV imprinting methods for fabricating a high-aspect-ratio pillar array. A polydimethylsiloxane (PDMS) mold was selected as the UV imprinting mold. The pillar pattern was formed on a 50 x 50 mm(2) area on a polyethylene terephthalate (PET) film without remarkable deformation. The aspect ratios of the pillar and space were about four and ten, respectively. The mold was placed into contact with a UV-curable resin under a reduced pressure, and the resin was cured by UV light irradiation after exposure to atmospheric pressure. The PDMS mold showed good mold releasability and high flexibility. By moderately pressing the mold before UV-curing, the thickness of the residual layer of the imprinted resin was reduced and the pattern was precisely imprinted. Both batch pressing and roll pressing are available.

    DOI

  • Low-Temperature Au-Au Bonding Using Nanoporous Au-Ag Sheets

    Hayata Mimatsu, Jun Mizuno, Takashi Kasahara, Mikiko Saito, Hiroshi Nishikawa, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 5 ) 50204  2013年05月  [査読有り]

     概要を見る

    In this study, we proposed low-temperature Au-Au bonding using nanoporous Au-Ag sheets, fabricated by dealloying a Au-Ag sheet in HNO3 solution, as a joint layer. The influence of the annealing temperature on the pore structure and chemical properties of the sheets was investigated. The chemical composition of the sheet was analyzed by X-ray photoelectron spectroscopy (XPS). It was found that the strength of Au-Au bonding with the nanoporous sheet increased. A sheet treated with liquid N-2 was also tested; the strength of the Au-Au bond increased as a result of this low-temperature treatment. (c) 2013 The Japan Society of Applied Physics

    DOI

  • Study on Hybrid Au-Underfill Resin Bonding Method With Lock-and-Key Structure for 3-D Integration

    Masatsugu Nimura, Jun Mizuno, Akitsu Shigetou, Katsuyuki Sakuma, Hiroshi Ogino, Tomoyuki Enomoto, Shuichi Shoji

    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY   3 ( 4 ) 558 - 565  2013年04月  [査読有り]

     概要を見る

    This paper describes a hybrid Au-underfill resin bonding method with lock-and-key structure for 3-D integration. In 3-D large scale integration (LSI), the gap between stacked chips becomes narrower because the bump dimension and pitch are smaller than those encountered in 2-D LSI. Therefore, the filling of gaps less than 10 mu m using capillary forces often becomes insufficient because of the surface condition. To address this challenge, we study a hybrid bonding method in which the metal-metal and resin-resin bonding are carried out simultaneously with a chip resin applied previously only around the bump. To realize hybrid bonding on the entire chip, we fabricate indent and protrusion structures, which are called lock-and-key structures. The key structure is fabricated by a process that can remove the resin on the bumps by O-2 plasma irradiation. The lock structure is fabricated by conventional photolithography and dry etching. By means of hybrid bonding with the lock-and-key structure, we have achieved the Au bump bonding and the filling of 4-mu m gaps between the stacked chips, concurrently. The cross-sectional transmission electron microscopy image of the bonded sample demonstrated that no significant gap exists at both the Au-Au and resin-resin interfaces. In addition, the shear strength of the sample bonded with resin is 10 times higher than that without the resin. The electrical continuity of the Au bump connections after hybrid bonding has also been determined.

    DOI

  • マイクロ流体有機発光デバイス(キーノートスピーチ)

    水野 潤, 笠原 崇史, 津脇 美帆, 庄子 習一, 江面 知彦, 松波 成行, 大島 寿郎, 安達 千波矢

    精密工学会学術講演会講演論文集   2013   497 - 498  2013年

    DOI CiNii

  • Transport properties of Ni-Nb-Zr glassy alloys and hydrogen absorbed alloys

    Rie Y. Umetsu, Hajime Yoshida, Mikio Fukuhara, Shin-ichi Yamaura, Toshio Sasaki, Tetsushi Sekiguchi, Mikiko Saito, Jun Mizuno, Hiroshi Kawarada

    Open Journal of Metal   3   37033 - 37033  2013年  [査読有り]

  • Effect of hydrogen absorption on electrical transport properties for Ni36Nb24Zr40 amorphous alloy ribbons

    Rie Y. Umetsu, Hajime Yoshida, Mikio Fukuhara, Shin-Ichi Yamaura, Makoto Matsuura, Toshio Sasaki, Tetsushi Sekiguchi, Mikiko Saito, Jun Mizuno, Hiroshi Kawarada

    Materials Transactions   54 ( 8 ) 1339 - 1342  2013年  [査読有り]

     概要を見る

    Electrical resistivity measurements in the temperature range from 6 to 300K were carried out in order to investigate the effects of the hydrogen absorption on the transport properties of Ni36Nb24Zr40 amorphous alloy ribbon. The electrical resistivity basically behaved negative temperature dependence in all prepared specimens of (Ni0.36Nb 0.24Zr0.40)100-xHx with 0 ≤ x &lt
    15. The absolute value of temperature coefficient of the resistivity, TCR, increased with increasing the amount of the absorbed hydrogen. In addition, it was also clear that the electrical resistivity gradually increased with the time just after electrochemically charging, and tended to saturate after about 800 ks at 300 K. The behavior of the gradual increase in the electrical resistivity with the time was explained by the model including two kinds of the relaxation times, being associated with the migration of the hydrogen from the sample surface. © 2013 The Japan Institute of Metals and Materials.

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  • Structural features of the extraordinary low glass transition temperature for Au65Cu18Si17 bulk metallic glass

    Makoto Matsuura, Wei Zhang, Shinichi Yamaura, Takashi Fujita, Koji Ohara, Shinji Kohara, Jun Mizuno

    Materials Transactions   54 ( 8 ) 1351 - 1355  2013年  [査読有り]

     概要を見る

    Au65Cu18Si17 bulk metallic glass (BMG) exhibits an extraordinary low glass transition temperature (&lt
    100°C) and a wide supercooled liquid region. In order to elucidate the structural features of the extraordinary low glass transition temperature and high glass forming ability of the Au65Cu18Si17 BMG, high-energy X-ray diffraction (HEXRD) and Extended X-ray Absorption Fine Structure (EXAFS) measurements were carried out using synchrotron radiation. A sharp first peak and oscillation of the structure factor S(Q) up to the high wave number Q can be attributed to the dominant weighting factor of the Au-Au correlation over others. A reverse Monte Carlo (RMC) simulation was applied simultaneously to the HEXRD and EXAFS data. The obtained RMC model shows a quite highly dense packed structure with large amount of icosahedral type clusters around Au atoms while small ones around Si atoms. The partial Cu-Cu pair distribution function g Cu,Cu(r) shows a sharp peak at a short interatomic distance, i.e., 2.38 Å. The Cu-Cu pairs with short interatomic distances and the large thermal fluctuation around Cu atoms are considered to be one of the structural characteristics of the low glass transition temperature of the Au 65Cu18Si17 BMG. © 2013 The Japan Institute of Metals and Materials.

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  • Fabrication and Surface Modification of Flat Lignocellulosic Carbon Materials

    Tsubasa Funabashi, Masamichi Sato, Masao Kitajima, Shuichi Shoji, Jun Mizuno

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 1 ) 10203  2013年01月  [査読有り]

     概要を見る

    Flat lignocellulosic carbon materials (FLCMs) with a honeycomb structure were successfully fabricated by carbonizing the softwood Picea jezoensis (Ezomatsu, Japanese conifer) and the hardwood Cercidiphyllum japonicum (Katsura). Scanning electron microscopy images of the FLCMs showed distinct differences in the tracheid diameter distributions between the FLCMs made from the softwood and hardwood. High-temperature heating decreased the electrical resistivity of the FLCMs. Vacuum ultraviolet irradiation in an oxygen atmosphere (VUV/O-3) helped in increasing the surface hydrophilicity and specific surface area of the materials while maintaining their low electrical resistivity. The surface-treated FLCMs were successfully used to fabricate self-supporting electrodes for electric double-layer capacitors (EDLCs). (C) 2013 The Japan Society of Applied Physics

    DOI

  • Integrated Channel Selector for Directing Fluid Flow Using Thermoreversible Gelation Controlled by a Digital Mirror Device

    Yoshitaka Shirasaki, Masayasu Tatsuoka, Mai Yamagishi, Jun Mizuno, Shuichi Shoji, Takashi Funatsu

    JOURNAL OF SENSORS   2013   436492  2013年  [査読有り]

     概要を見る

    An integrated channel selector system employing thermoreversible gelation of a polymer was developed. Here, we show a system with 3 x 3 arrayed microchannels having nine crossing points. Infrared laser irradiation was used to form gel areas at several crossing points in arranging a flow path from the inlet to one of the nine outlets passing through certain junctions and channels. The multipoint irradiation by the infrared laser was realized using a personal-computer-controlled digital mirror device. The system was demonstrated to be able to direct flow to all nine outlets. Finally, we achieved to produce flexible paths for flowing particles including side trips.

    DOI

  • Auを用いた熱圧着マイクロ接合技術?サブミクロンAu粒子を用いたAu接合技術およびAuバンプと接着剤のハイブリッド接合技術?

    水野潤, 佐久間克幸, 仁村将次, 若井史博, 庄子習一

    精密工学会誌   79   714 - 718  2013年  [査読有り]

    DOI

  • Fabrication of Low Dislocation Density GaN Template by Nano-channel FIELO Using Nanoimprint Lithography

    Akiko Okada, Shuichi Shoji, Hidetoshi Shinohara, Hiromi Nishihara, Hiroshi Goto, Haruo Sunakawa, Toshiharu Matsueda, Akira Usui, Atsushi A. Yamaguchi, Jun Mizuno

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   26 ( 1 ) 69 - 72  2013年  [査読有り]

    DOI

  • Vacuum ultraviolet irradiation treatment for reducing goldgold bonding temperature

    Akiko Okada, Shuichi Shoji, Masatsugu Nimura, Akitsu Shigetou, Katsuyuki Sakuma, Jun Mizuno

    Materials Transactions   54 ( 11 ) 2139 - 2143  2013年  [査読有り]

     概要を見る

    Lowerature AuAu bonding was achieved under vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O3). The Au surfaces obtained after the VUV/O3 treatment were analyzed by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) measurements. The results indicate that the amount of carbon-based contaminants was dramatically decreased and that there was no serious damage to Au surfaces caused by the VUV/O3 treatment. The AuAu bonding temperature was successfully reduced to 150°C after the VUV/ O3 treatment. The average shear strength was approximately 56 MPa, and cross-sectional scanning electron microscopy (SEM) images of the bonded samples confirmed the absence of voids and cracks. Therefore, VUV/O3 treatment is highly effective for achieving lowerature AuAu bonding. © 2013 The Japan Institute of Metals and Materials.

    DOI

  • Growth of High-Quality GaN Template From Nanometer-Size Lattice Channels By Hydride Vapor Phase Epitaxy

    A. Usui, H. Goto, T. Nakagawa, H. Sunakawa, T. Matsueda, A. Okada, J. Mizuno, A. A. Yamaguchi, H. Shinohara, H. Goto

    GALLIUM NITRIDE AND SILICON CARBIDE POWER TECHNOLOGIES 3   58 ( 4 ) 25 - 31  2013年  [査読有り]

     概要を見る

    GaN is an attractive material in power devices for energy-saving measures in consumer products, automobiles, and industrial machines. To realize such GaN devices, however, high-quality GaN substrates are indispensable. In this paper, we describe the growth of high-crystalline-quality GaN template by HVPE with the nano-FIELO technique, where GaN growth starts by forming facet structures on nanometer-size channels which are opened on SiO2 layer deposited on GaN/sapphire substrate. The lattice pattern consisting of 500 nm x 500 nm square SiO2 masks surrounded by 80-nm-wide channels is used in this study. A nanoimprinting technique is applied followed by dry etching to fabricate lattice channels. From cross-sectional TEM observation, it is shown that the dislocation density is significantly reduced by the lattice pattern. Uniform GaN growth over 2-inch-diameter wafer is realized.

    DOI

  • Real-time secretion analysis revealed correlation of IL-1β release and loss of cell membrane integrity

    Y. Shirasaki, M. Yamagishi, K. Izawa, K. Nakagawa, A. Nakahara, N. Suzuki, J. Mizuno, T. Sekiguchi, T. Heike, R. Nishikomori, S. Shoji, O. Ohara

    17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013   3   1686 - 1688  2013年

     概要を見る

    Live-cell imaging of inflammatory cytokine secretion from human monocytes was successfully performed on a microfabricated well array chip by time-resolved fluoroimmunoassay using total internal reflection fluorescence microscopy. The system enabled to monitor secretion activity from tens of cells at a time resolution of 1 min. We first observed the close correlation between the loss of cell membrane integrity and "non-classical secretion" of IL-1β cytokine of inflammasome activated human peripheral monocytes.

  • MULTI-COLOR MICROFLUIDIC ORGANIC LIGHT EMITTING DEVICE USING ELECTROLUMINESCENCE AND ELECTROCHEMILUMINESCENCE

    T. Kasahara, J. Mizuno, S. Matsunami, T. Edura, M. Tsuwaki, J. Oshima, C. Adachi, S. Shoji

    26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013)     1133 - 1136  2013年  [査読有り]

     概要を見る

    We developed a multi-color microfluidic organic light emitting device, which consists of liquid organic light emitting diodes (OLEDs) and electrochemiluminescence (ECL) devices. A 3 x 3 matrix of emitting pixels was fabricated in SU-8 microchannels sandwiched between polyethylene naphthalate (PEN) and glass substrates with indium tin oxide (ITO) anode and cathode pairs. Liquid organic semiconductor and ECL solutions as liquid emitters were injected into the microchannels. The electroluminescence (EL) and ECL were successfully obtained at the emitting pixels in the microchannels. The proposed structure can be applicable for multi-color liquid-based display.

    DOI

  • PDMS-CYTOP hybrid structure microwell array chip for total internal reflection fluorescence microscopy

    A. Nakahara, Y. Shirasaki, J. Mizuno, T. Sekiguchi, O. Ohara, S. Shoji

    8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013     743 - 746  2013年  [査読有り]

     概要を見る

    A microwell arrry device with a hybrid structure of amorphour perfluoroplymer, CYTOP™, and polydimethylsiloxane (PDMS) which is specialized in total internal refllection fluorescence (TIRF) microscopy was developed. Since the CYTOP layer, whose refractive index is as same as that of water, is sandwiched between PDMS and glass substrate, leakage of incident light is avoided. PDMS layer upon the CYTOP enables high aspect ratio structures and easy integration of microfluidic components. Since direct bonding of CYTOP and PDMS is difficult to achieve, a chemical bonding method using aminosilane coupling reagent and 3-Glycoidoxypropyltriethoxysilane was applied. The bond strength was about 0.74 MPa. 24 × 50 microwell array was fabricated and their optical properties was evaluated. Measured TIRF microscopy results shows no interfere with incident light under the conventionally used conditions. © 2013 IEEE.

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  • Using Nano-Porous Au-Ag Sheets as a Joint Layer for Low-Temperature Au-Au Bonding

    Hayata Mimatsu, Jun Mizuno, Takashi Kasahara, Mikiko Saito, Hiroshi Nishikawa, Shuichi Shoji

    Proc. of IEEE CPMT Symposium Japan 2012 (ICSJ-2012)     277 - 280  2012年12月

    DOI

  • Integration of Pillar Array Columns into a Gradient Elution System for Pressure-Driven Liquid Chromatography

    Yanting Song, Masao Noguchi, Katsuya Takatsuki, Tetsushi Sekiguchi, Jun Mizuno, Takashi Funatsu, Shuichi Shoji, Makoto Tsunoda

    ANALYTICAL CHEMISTRY   84 ( 11 ) 4739 - 4745  2012年06月  [査読有り]

     概要を見る

    A gradient elution system for pressure-driven liquid chromatography (LC) on a chip was developed for carrying out faster and more efficient chemical analyses. Through computational fluid dynamics simulations and an experimental study, we found that the use of a cross-Tesla structure with a 3 mm mixing length was effective for mixing two liquids. A gradient elution system using a cross-Tesla mixer was fabricated on a 20 mm x 20 mm silicon chip with a separation channel of pillar array columns and a sample injection channel. A mixed solution of water and fluorescein in methanol was delivered to the separation channel 7 s after the gradient program had been started. Then, the fluorescence intensity increased gradually with the increasing ratio of fluorescein, which showed that the gradient elution worked well. Under the gradient elution condition, the retention times of two coumarin dyes decreased with the gradient time. When the gradient time was 30 s, the analysis could be completed in 30 s, which was only half the time required compared to that required for an isocratic elution. Fluorescent derivatives of aliphatic amines were successfully separated within 110 s. The results show that the proposed system is promising for the analyses of complex biological samples.

    DOI

  • Injection of synthesized FePt nanoparticles in hole-patterns for bit patterned media

    Takuma Hachisu, Wataru Sato, Shugo Ishizuka, Atsushi Sugiyama, Jun Mizuno, Tetsuya Osaka

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   324 ( 3 ) 303 - 308  2012年02月  [査読有り]

     概要を見る

    FePt nanoparticles of uniform sizes, compositions, and crystal structures can be obtained by chemical synthesis. Additionally, the nanoparticles can be well dispersed by the adsorption of a surfactant on the nanoparticle surface. Previously, the immobilization of FePt nanoparticles on a thermal oxide Si substrate was carried out by chemical synthesis, utilizing the Pt-S bonding between the -SH functional group in (3-mercaptopropyl)trimethoxysilane, MPTMS and Pt in FePt nanoparticles. However, controlling FePt nanoparticle arrays by this synthesis method was very difficult. In the present study, we attempted to control the distortion of the arrangement of FePt nanoparticles using an MPTMS layer modified with a silane coupling reaction and a geometrical structure prepared by ultraviolet nanoimprint lithography (UV-NIL). In this study, the hole-patterns used for the geometrical structure on Si(1 0 0) were 200 nm wide, 40 nm deep, and had a 500 nm pitch. The 5.6 nm FePt nanoparticles were used to coat the hole-patterns by using a picoliter pipette. An XHR-SEM image clearly revealed that the FePt nanoparticles were successfully arranged as a single layer with an average pitch of 10.0 nm by PL-S bonding in the hole-patterns on Si(1 0 0). (C) 2010 Elsevier B.V. All rights reserved.

    DOI

  • Large-scale atmospheric step-and-repeat UV nanoimprinting

    Kentaro Ishibashi, Hiroshi Goto, Jun Mizuno, Shuichi Shoji

    Journal of Nanotechnology   2012   103439  2012年  [査読有り]

     概要を見る

    Step-and-repeat UV nanoimprinting for large-scale nanostructure fabrication under atmospheric pressure was realized using high-viscosity photocurable resin and a simple nanoimprinting system. In step-and-repeat UV nanoimprinting under atmospheric pressure using low-viscosity resin, large-scale nanostructure fabrication is very difficult, due to bubble defects and nonuniformity of the residual layer. To minimize bubble defects and nonuniformity of the residual layer, we focused on the damping effects of photocurable resin viscosity. Fabrication of 165 dies was successfully demonstrated in a 130 × 130 mm 2 area on an 8 in silicon substrate by step-and-repeat UV nanoimprinting under atmospheric pressure using high-viscosity photocurable resin. Nanostructures with widths and spacing patterns from 80 nm to 3 μm and 200 nm depth were formed using a quartz mold. Bubble defects were not observed, and residual layer uniformity was within 30 nm ±10. This study reports on simple step-and-repeat UV nanoimprinting under atmospheric pressure using high-viscosity photocurable resin, as a very widely available method for large-scale mass production of nanostructures. © 2012 Kentaro Ishibashi et al.

    DOI

  • Development of a Roll Press UV Imprint Process for Replication of Microstructures on a Large and Thin Quartz Substrate

    Motonori Okubo, Yutaka Tsutsui, Kentaro Ishibashi, Lingyi Li, Shuichi Shoji, Jun Mizuno, Masumi Yanagisawa

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   25 ( 2 ) 229 - 234  2012年  [査読有り]

     概要を見る

    In this study, fabrication of microstructures was carried out using newly developed UV imprinting system named "Roller Press Scan (R)" for large-area replication. Micro lens arrays were replicated using two types of UV resins and molds, onto quartz substrates.
    Microstructures have been replicated in uniform and have been confirmed high-throughput productivity.

    DOI

  • Biochip applications of DLC films on a resin material

    Satoshi Murata, Shin Ito, Jun Mizuno, Kenji Hirakuri, Hitoshi Sakamoto, Sadaaki Masuko, Keisuke Sato, Naoki Fukata, Fukuo Shizuku, Shuichi Shoji

    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 6   9 ( 6 ) 1439 - 1442  2012年  [査読有り]

     概要を見る

    Recent studies of diamond-like carbon (DLC) coated medical devices have indicated possibility for developing biochip applications. We have deposited DLC film on cyclo-olefin polymer (COP) sheet by using radio frequency plasma chemical vapor deposition technique. To enhance the adhesion strength between the COP sheet and the DLC films, the COP surface was modified by oxygen (O-2) or nitrogen (N-2) plasma treatment before the film coating. The critical load of samples was measured by using a scratch test. The result showed the adhesion strength of films was improved by the plasma treatment. After the DLC film coating, we performed the plasma post-treatment of O-2, N-2 or hexafluoroethane (C2F6) gases to control the wettability of the material surface. The wettability, structure, roughness, and chemical composition of the samples have been investigated by a contact angle measurement, Raman spectroscopy (Raman), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). These measurements indicated that wettability on the surface condition of DLC films was easily controlled by plasma post-treatment of O-2, N-2 and C2F6. Furthermore, results of XPS showed that wettability of the surface condition is strongly dependent on chemical components with existemce of oxygen, nitrogen and flourine. We have estimated the wettability of hydorphilicity and hydrophobicity on DLC coating under plasma post-treatment for biochip applications.

    DOI

  • Surface modification of polyethylene terephthalate (PET) by 172-nm exicimer lamp

    Takashi Kasahara, Shuichi Shoji, Jun Mizuno

    Transactions of the Japan Institute of Electronics Packaging   5   47 - 54  2012年  [査読有り]

    DOI

  • Large Area Nano Pattern Fabrication Using Improved Step and Repeat UV Nanoimprint

    Kentaro Ishibashi, Hiroshi Goto, Takashi Kasahara, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   25 ( 2 ) 235 - 238  2012年  [査読有り]

     概要を見る

    Continuous nano structures whose sizes 100 nm line and space were successfully fabricated using two step nanoimprint including oxygen (O-2) plasma irradiation on a silicon substrate in 8 X 56 mm(2) area. Silicon substrate surface condition is important property because fine and continuous pattern forming depend on photo curable resin uniform coating. O-2 plasma irradiation is realized to change into hydrophilic without damage for silicon substrate. The water contact angle was decreased to smaller than 40 after O-2 plasma irradiation. Therefore O-2 plasma irradiation has an advantage of treatment process for continuous nanostructure forming. Our activities on UV nanoimprint lithography are expected to be progress for large area continuous nano structures fabrication.

    DOI

  • Measurement of inflammatory cytokine secretion from human monocytes after inflammasome activation

    Yoshitaka Shirasaki, Asahi Nakahara, Nanako Shimura, Kazushi Izawa, Nobutake Suzuki, Mai Yamagishi, Jun Mizuno, Tetsushi Sekiguchi, Ryuta Nishikomori, Shuichi Shoji, Osamu Ohara

    Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012     1012 - 1014  2012年

     概要を見る

    Live-cell imaging of inflammatory cytokine secretion from human monocytes was successfully performed on a microfabricated well array chip by time-resolved fluoroimmunoassay using total internal reflection fluorescence microscopy. Some of the lipopolysaccharide primed monocytes secreted small amounts of interleukin-1 beta (IL-1 ), whereas the monocytes stimulated with an ATP signal secreted large amounts of IL-1 from 10% of observed cells. These two types of secretion patterns corresponded to the proposed models of IL-1 secretion, "rescue and redirect" and "terminal release", respectively. Morphological changes in ATP-stimulated cells also indicated that the cells underwent necrotic cell death, also known as "pyroptosis".

  • UV/vapor-assisted hybrid bonding technology as a tool for future nanopackaging

    Akitsu Shigetou, Ajayan Mano, Jun Mizuno, Tadatomo Suga

    Proceedings of the IEEE Conference on Nanotechnology    2012年  [査読有り]

     概要を見る

    Hybrid bonding of electrode metal, glass insulator, and organic substrate, by using a single UV/vapor-assisted method at low temperature and atmospheric pressure, is highly feasible and will be of practical use in three-dimensional hetero-integration of nanosystems onto flex substrates where the surfaces of electrode and insulation layer appear on the same plane. Given Cu, SiO 2, polyimide, and polydimethylsiloxane as the typical materials for a hybrid integration, the vapor and UV-assisted surface modification method was used to create a compatible bridging layer to diverse materials in a single process. Bridging layers, which are based on Cu hydroxide hydrate, silanol and hydroxyl groups from SiO2, polyimide and polydimethylsiloxane, respectively, could be prepared by introducing water molecules onto the clean surfaces created with Ar atom beam irradiation. The growth speed of the bridging layers on Cu, SiO2, and polyimide was tunable via the absolute humidity only. Based on the diffusion distance of Cu, an exposure of 8 g/m 3 was chosen as an optimum condition. Heating at 150°C after exposure to humidity caused tight adhesion between the mating surfaces for all combinations of Cu, SiO2, and polyimide. At the metal interface, a resistivity of around 4 × 108·m was obtained. Furthermore, the UV treatment in nitrogen gas, which was carried out to the initial surfaces of polydimethylsiloxane and Cu (with native oxide) films at atmospheric pressure, was found feasible in enhancing the generation of water adsorption sites without using vacuum processes. © 2012 IEEE.

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  • Microfluidic organic light emitting diode (OLED) using liquid organic semiconductors

    T. Kasahara, J. Mizuno, S. Hirata, T. Edura, S. Matsunami, C. Adachi, S. Shoji

    Proceedings of IEEE International Conference on Micro Electro Mechanical Systems (MEMS)     1069 - 1072  2012年  [査読有り]

  • XPS and NEXAFS studies of VUV/O-3-treated aromatic polyurea and its application to microchip electrophoresis

    H. Shinohara, A. Nakahara, F. Kitagawa, Y. Takahashi, K. Otsuka, S. Shoji, O. Ohara, J. Mizuno

    IET NANOBIOTECHNOLOGY   5 ( 4 ) 136 - 142  2011年12月  [査読有り]

     概要を見る

    In this study, the authors performed X-ray photoelectron spectroscopy (XPS) and near-edge X-ray absorption fine structure (NEXAFS) studies of vacuum ultraviolet (VUV)/O-3-treated aromatic polyurea films to investigate their treatment effects. XPS and NEXAFS spectra indicate that the benzene ring was cleaved after treatment and that carboxyl, hydroxyl, ketone and aldehyde groups were formed at the cleaved sites. The VUV/O-3-treated polyurea film was applied to a polymethylmethacrylate (PMMA) microchip for microchip electrophoresis (MCE) of bovine serum albumin (BSA). Fast electro-osmotic mobility of 4.6 x 10(-4) cm(2)/V/s as well as reduction of the BSA adhesion was achieved. This functional surface is useful for high-speed MCE analysis.

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  • Integrated hydrophilic surface treatment system of vapor deposition polymerization and vacuum ultraviolet irradiation for chemical/biochemical microchips

    H. Shinohara, T. Hori, S. Umeda, Y. Takahashi, S. Shoji, O. Ohara, J. Mizuno

    MICROELECTRONIC ENGINEERING   88 ( 8 ) 2751 - 2754  2011年08月  [査読有り]

     概要を見る

    A novel system for hydrophilic surface treatment was developed. This system consists of a vapor deposition polymerization (VDP) unit for aromatic polyurea coating and a vacuum ultraviolet (VUV) irradiation unit for the hydrophilic treatment of the coated polyurea. Because the two vacuum chambers are connected by a load-lock system, a highly hydrophilic surface can be obtained without airborne molecular contamination (in situ process). The typical thickness of the polyurea film ranges from tens of nanometers to several micrometers. This system can be used for the high-throughput fabrication of chemical/biochemical microchips, which require a stable highly hydrophilic surface. The polyurea is made highly hydrophilic and a water contact angle of <20 degrees is obtained. The surface free energy measurement and Fourier transform infrared (FT-IR) measurement results show that the degree of hydrophilic treatment is related to the VUV light intensity and the density of O-3 and exited oxygen atoms on the polyurea. (C) 2011 Elsevier B.V. All rights reserved.

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  • Fabrication of high-aspect-ratio amorphous perfluorinated polymer structure for total internal reflection fluorescence microscopy

    Asahi Nakahara, Yoshitaka Shirasaki, Kentaro Kawai, Osamu Ohara, Jun Mizuno, Shuichi Shoji

    MICROELECTRONIC ENGINEERING   88 ( 8 ) 1817 - 1820  2011年08月  [査読有り]

     概要を見る

    A method to fabricate microstructures that are ideal for optical applications was developed. This method enabled structures with a high aspect ratio to be fabricated from an amorphous perfluorinated polymer, CYTOP, which has an identical refractive index to that of water. Using the method, a microwell array device was developed for the purpose of high-throughput protein quantification. Evaluation of the optical properties of the array using total internal reflection fluorescence (TIRF) microscopy demonstrated that the device did not interfere with TIRF imaging at the bottom of each microwell. This method can expand the possible applications of biophotonic devices as well as TIRF imaging. (C) 2011 Elsevier B.V. All rights reserved.

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  • Low-temperature wafer bonding for MEMS packaging utilizing screen-printed sub-micron size Au particle patterns

    S. Ishizuka, N. Akiyama, T. Ogashiwa, T. Nishimori, H. Ishida, S. Shoji, J. Mizuno

    MICROELECTRONIC ENGINEERING   88 ( 8 ) 2275 - 2277  2011年08月  [査読有り]

     概要を見る

    In this study, a new wafer bonding method for MEMS (micro electro mechanical systems) packaging is presented. The seal lines of sub-micron size Au particles with a width of 50 mu m were formed on wafers by means of screen-printing. The bonding process was carried out at 300 degrees C under reduced pressure, 1 x 10(-3) mbar. The bonded wafers were diced into 5 mm x 5 mm individual chips. The bond strength of each chips was about 20 MPa measured by a tensile test and about 40 MPa by a shear test in the average. It was confirmed that two wafers were successfully bonded with screen-printed Au particle seal lines. The proposed method can be applied to practical MEMS packaging. (C) 2011 Elsevier B.V. All rights reserved.

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  • Studies on low-temperature direct bonding of VUV/O-3-, VUV- and O-2 plasma-pre-treated poly-methylmethacrylate

    Hidetoshi Shinohara, Takashi Kasahara, Shuichi Shoji, Jun Mizuno

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   21 ( 8 ) 085028  2011年08月  [査読有り]

     概要を見る

    Low-temperature direct bonding of poly-methylmethacrylate (PMMA) plates was achieved by pre-treatment with vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O-3), with vacuum ultraviolet irradiation in a nitrogen atmosphere (VUV), or with oxygen plasma. Based on surface analysis by attenuated total reflection Fourier-transform infrared spectrometry (ATR-FT-IR), x-ray photoelectron spectroscopy and near edge x-ray absorption fine structure spectroscopy, chemical changes of the PMMA surface after the pre-treatment were investigated. Changes in morphology and softening point were also investigated by nano-thermal analysis and atomic force microscopy. From the results, the bonding mechanisms proposed are described as follows: during the bonding process, the increased or generated polar groups cause an increase in the dipolar interactions (such as hydrogen bonding) between two pre-treated PMMA surfaces; in the case of VUV/O-3 or VUV pre-treatment, a low-T-g layer is generated on the surface and this layer acts as an adhesive for the direct bonding of layers by diffusion.

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  • Fabrication of Zero-Mode Waveguide by Ultraviolet Nanoimprint Lithography Lift-Off Process

    Junichi Wada, Shou Ryu, Yuji Asano, Taro Ueno, Takashi Funatsu, Takao Yukawa, Jun Mizuno, Takashi Tanii

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 ) 06GK07  2011年06月  [査読有り]

     概要を見る

    Zero-mode waveguides for single-molecule fluorescence imaging were fabricated using a simple desktop UV nanoimprint lithography system. An array of 30- to 150-nm-diameter nanoholes was successfully fabricated in an aluminum layer on a thin quartz plate by the single-step lift-off process using the UV-curable resist NIAC 707. Using the nanoholes, we performed real-time single-molecule fluorescence imaging to visualize the cochaperonin GroES binding with and dissociating from the chaperonin GroEL immobilized within the nanoholes. The demonstration revealed that the fluorescence from the GroES binding with the GroEL was three times stronger than the fluorescence from the GroES undergoing Brownian motion, and the real-time single-molecule fluorescence imaging was feasible using the zero-mode waveguide fabricated by the UV nanoimprint lithography lift-off process. (C) 2011 The Japan Society of Applied Physics

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  • Studies on low-temperature direct bonding of VUV, VUV/O-3 and O-2 plasma pretreated cyclo-olefin polymer

    Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   165 ( 1 ) 124 - 131  2011年01月  [査読有り]

     概要を見る

    Low-temperature direct bonding of two cyclo-olefin polymer (COP) plates is realized by pretreatments of vacuum ultraviolet (VUV) light irradiation, VUV irradiation in the presence of oxygen gas (VUV/O-3), or oxygen plasma treatment. The bond strength was strong enough to observe bulk destruction on the fractured surfaces after the tensile test of the sample. To investigate the mechanism underlying the low-temperature direct bonding, attenuated total reflection Fourier-transform infrared spectrometer (ATR-FT-IR), X-ray photoelectron spectroscopy (XPS), contact angle measurements, and atomic force microscopy (AFM) surface analysis methods were carried out for the treated COP samples. These experimental results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate dipolar interactions including hydrogen bonds on the surfaces of the pretreated COPs at room temperature. In case of VUV and VUV/O-3 treatments, degradation of COP was also occurred and the degradation layer acted as an adhesive for the direct bonding. Thermal annealing enhances creation of strong covalent bonds (-C-O-C-) changed from hydrogen bonds. (c) 2010 Elsevier B.V. All rights reserved.

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  • Anti-Sticking Curing of Fluorinated Polymers for Improvement of Mold Releasability

    Jun Mizuno, Lingyi Li, Yasuhide Kawaguchi, Kentaro Tsunozaki, Hidetoshi Shinohara, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   24 ( 1 ) 89 - 93  2011年  [査読有り]

     概要を見る

    This paper describes a post-UV curing process, called anti-sticking curing process (ACP), for fluorinated polymer (NIF) molds. After fabrication by UV imprinting, an NIF mold was irradiated by a strong UV light. The results of surface free-energy calculations, X-ray photoelectron spectroscopy (XPS), and Vickers hardness measurements showed that the surface state of NIF can be described as follows: active functional groups in the photosensitive radical initiator remained on the surface of the NIF mold after UV imprinting. After ACP, these active groups were consumed by further UV polymerization, and the fluorinated components moved to the surface. Thus, an improvement in the releasability of NIF molds is expected.

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  • Simple and Low-Cost Fabrication of Flexible Capacitive Tactile Sensors

    Takashi Kasahara, Masanori Mizushima, Hidetoshi Shinohara, Tsutomu Obata, Tomoaki Futakuchi, Shuichi Shoji, Jun Mizuno

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 1 ) 016502  2011年01月  [査読有り]

     概要を見る

    We fabricated novel flexible capacitive tactile sensors that can detect both the direction and distribution of an applied force. The sensor consists of a conductive silicone rubber as a movable electrode and fixed electrodes formed on a poly(ethylene terephthalate) (PET) film with silver paste. The dimensions of sensor head are 10.4 x 10.4 x 0.8mm(3). We developed the tactile sensor using screen-printing techniques and atmospheric-pressure plasma pretreatments. We experimentally evaluated the tactile responses to the applied force. The sensor detected the input force-distribution with a force ranging up to 10N. The flexible thin PET film substrate enables fitting to the tight space and curved surface, and this capacitive tactile sensor is applicable for low-cost controllers of cellular phones and personal computers. (C) 2011 The Japan Society of Applied Physics

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  • Effects of Vacuum Ultraviolet Surface Treatment on the Bonding Interconnections for Flip Chip and 3-D Integration

    Katsuyuki Sakuma, Jun Mizuno, Noriyasu Nagai, Naoko Unami, Shuichi Shoji

    IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING   33 ( 3 ) 212 - 220  2010年07月  [査読有り]

     概要を見る

    This paper focuses on the effects of a vacuum ultraviolet (VUV) surface treatment process on the interconnections for flip chip and 3-D integration. Organic contaminants that hinder reliable bonding are broken down and eliminated from the bumps and pad surfaces by irradiation with UV light at a wavelength of 172 nm at room temperature. There is no charge buildup, no temperature increase, and no ion bombardment damage during the process. Two different VUV cleaning conditions, with N(2) or O(2) gas in the vacuum chamber, were compared and evaluated. Samples of flip chip with Cu/Sn bumps and Au surface substrate were examined by measurement of contact angle, X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and atomic force microscopy (AFM) before and after VUV surface treatment. Cleaning times and ambient conditions have dramatic effects on the surface contact angles. The photoelectron spectra of C 1s were obtained by XPS analysis for information on the chemical species and the XPS results showed a reduction in surface carbon for both Au and Cu/Sn after the cleaning. The evidence indicates cleavage of the carbon-carbon bonds in the organic molecules occurs during the cleaning process. From the shear test results, it appears that VUV treatment improves the Cu/Sn-bump bonding strength, making it two times larger than for untreated samples. No delamination or obvious voids were detected on the bonding interface by Scanning acoustic microscopy (SAM) and cross-sectional SEM analysis. The experiments show that the VUV cleaning can effectively remove the organic contaminants on the surface of the bonding pads and improve the bonding strength.

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  • Electrochemical Fabrication and Characterization of CoPt Bit Patterned Media: Towards a Wetchemical, Large-Scale Fabrication

    Takanari Ouchi, Yuki Arikawa, Taisuke Kuno, Jun Mizuno, Shuichi Shoji, Takayuki Homma

    IEEE TRANSACTIONS ON MAGNETICS   46 ( 6 ) 2224 - 2227  2010年06月  [査読有り]

     概要を見る

    This paper describes the fabrication process of CoPt nandot arrays on a glass disk substrate with a CoZrNb underlayer as a soft magnetic underlayer (SUL) by using an electrochemical process, and also the analysis on the magnetic properties of these fabricated CoPt nanodot arrays. We formed nano-patterned substrates by UV-nanoimprint lithography (UV-NIL) on the glass disk substrate. CoPt was electrodeposited into the nano-patterned substrates optimizing the electrodeposition condition and bath composition as well as a Cu intermediate layer. The construction of the nanodot arrays were CoPt nanodot arrays (20 nm)/Cu (5 nm)/CoZrNb (100 nm)/Cr (5 nm)/Glass disk. Magnetic signals were clearly observed on the dc magnetized state and multi domain were observed in each nanodot on the ac magnetized state by magnetic force microscopy (MFM). The perpendicular coercivity of the CoPt nanodot arrays was 430 kA/m. These results showed electrochemical process can be used for the manufacture of magnetic recording media.

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  • Use of Folded Micromachined Pillar Array Column with Low-Dispersion Turns for Pressure-Driven Liquid Chromatography

    Chiaki Aoyama, Akira Saeki, Masao Noguchi, Yoshitaka Shirasaki, Shuichi Shoji, Takashi Funatsu, Jun Mizuno, Makoto Tsunoda

    ANALYTICAL CHEMISTRY   82 ( 4 ) 1420 - 1426  2010年02月  [査読有り]

     概要を見る

    In this study, we show for the first time that the separation efficiency of a pillar array column under pressure-driven liquid chromatography (LC) conditions can be improved using a separation channel with low-dispersion turns. The pillar array column was fabricated by reactive ion etching of a silicon substrate. With the low-dispersion-turn geometry, a column with a length and width of 110 mm and 400 mu m, respectively, could be fabricated on a 20 x 20 mm microchip. Under nonretained conditions, the solute bands obtained for fluorescent compounds remained almost unchanged even after passing through the low-dispersion turns; however, significant skewing of the solute bands was observed in the case of constant-radius turns. Two coumarin dyes were well resolved under reversed-phase conditions, and a maximum theoretical plate number of 8000 was obtained. Successful separation of the fluorescent derivatives of six amino acids was achieved in 140 s. These results indicated that the separation efficiency of microchip chromatography could be significantly improved using a long separation channel with low-dispersion turns.

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  • Effects of Excimer Irradiation Treatment on Thermocompression Au-Au Bonding

    Naoko Unami, Katsuyuki Sakuma, Jun Mizuno, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 6 ) 06GN12  2010年  [査読有り]

     概要を見る

    We studied the feasibility of using vacuum ultraviolet (VUV) treatment as a surface improvement technique with Au-Au flip-chip bonding. For fine-pitch electrical interconnections in three-dimensional (3D) stack applications, robust and reliable bonding is desirable; in this case, surface modification treatment is needed before the bonding process. A VUV surface treatment was used to remove organic contaminants. Samples of electroplated Au pads were examined by X-ray photoelectron spectroscopy (XPS) to evaluate the chemical composition of the Au surfaces. The XPS results revealed that the carbon-based contaminants on the surface were removed by the VUV treatment. The shear strength of the bonded sample was also improved. The average shear strength of a bump with VUV treatment is 1.6 times larger than that of a bump without VUV treatment. Cross-sectional scanning electron microscopy (SEM) images of the bonded samples confirmed the absence of voids and cracks. The results show that VUV treatment has clear effects on Au-Au flip-chip bonding. (C) 2010 The Japan Society of Applied Physics

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  • Fabrication process for large size mold and alignment method for nanoimprint system

    Kentaro Ishibashi, Mitsunori Kokubo, Hiroshi Goto, Jun Mizuno, Shuichi Shoji

    IEEJ Transactions on Sensors and Micromachines   130 ( 8 ) 363 - 368  2010年  [査読有り]

     概要を見る

    Nanoimprint technology is considered one of the mass production methods of the display for cellular phone or notebook computer, with Anti-Reflection Structures (ARS) pattern and so on. In this case, the large size mold with nanometer order pattern is very important. Then, we describe the fabrication process for large size mold, and the alignment method for UV nanoimprint system. We developed the original mold fabrication process using nanoimprint method and etching techniques. In 66 × 45 mm2 area, 200nm period seamless patterns were formed using this process. And, we constructed original alignment system that consists of the CCD-camera system, X-Y-θ table, method of moird fringe, and image processing system, because the accuracy of pattern connection depends on the alignment method. This alignment system accuracy was within 20nm. © 2010 The Institute of Electrical Engineers of Japan.

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  • Electrophoretic separation-mass spectrometric detection on polymer microchip directly integrated with a nanospray tip

    Fumihiko Kitagawa, Hidetoshi Shinohara, Jun MizunoKoji, Koji Otsuka, Shuichi Shoji

    IEEJ Transactions on Sensors and Micromachines   130 ( 8 ) 351 - 355  2010年  [査読有り]

     概要を見る

    We fabricated a polymer chip for microchip electrophoresis-mass spectrometry (MCE-MS). As a substrate material, cycloolefin polymer (COP) was selected due to its high chemical durability and easy metallization for the electrode. A COP microchip with a conventional cross-type channel configuration for the MCE separation was fabricated by hot embossing. After bonding with a rid substrate, a nano electrospray ionization (nano-ESI) tip structure for MS detection was machined directly at the opening of the separation channel end. A gold electrode to keep the electric contact for ESI was deposited around the nanospray tip by electron beam evaporation. When the voltage of 3.0 and 2.0 kV was applied to the inlet and the ESI electrode, respectively, the formation of Taylor cone and stable electrospray were observed at the channel opening. In infusion analysis of caffeine, the MS spectrum with parent mass number of 195, which accords with that of the protonated caffeine, was successfully obtained in the positive mode. Furthermore, the MCE separation and ESI-MS detection of caffeine and arginine was also successfully achieved with resolution of 1.0. Therefore, these results demonstrated that the fabricated microchip integrated with the nano-ESI tip can be employed as the MCE-ESI-MS device. © 2010 The Institute of Electrical Engineers of Japan.

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  • Au-electrode-embedded cyclo-olefin polymer microchip using low-temperature direct bonding

    Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji

    IEEJ Transactions on Sensors and Micromachines   130 ( 8 ) 347 - 350  2010年  [査読有り]

     概要を見る

    A simple fabrication method of Au-electrode-embedded cyclo-olefin polymer (COP) microchip was developed using hot embossing, Au wet etching and low-temperature direct bonding methods. A prototype microchip (dimension: 20 × 40 mm2) was fabricated. The Au electrode coated by electron-beam evaporation was successfully patterned on COP surface without any intermediate metal layers. The adhesion strength between the COP and the Au film was stronger than the strength between quartz and Au, and as same as between Si and Cr. The bond strength between the COP and Au coated on COP plate was strong enough not to leak flow of de-ionized water at the bonded interfaces. Flow behavior of negative-charged fluorescent microbeads indicates that the electrical continuity of Au electrode was kept after the bonding process. This technology is remarkable advantage of integrating electrode in plastic microchips. © 2010 The Institute of Electrical Engineers of Japan.

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  • Compound nanoimprint processes and their applications for devices

    Jun Mizuno, Hidetoshi Shinohara

    IEEJ Transactions on Sensors and Micromachines   130 ( 8 ) 343 - 346  2010年  [査読有り]

     概要を見る

    In this paper, fabrication methods of metal patterns using ultraviolet nanoimprint lithography (UV-NIL) and electrodeposition are demonstrated. Since the photocurable resin patterned by UV-NIL was directly used for electrodeposition mask, the simple and high-throughput fabrication process was realized. Several examples of functional device using these methods are described. © 2010 The Institute of Electrical Engineers of Japan.

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  • Low-temperature wafer bonding for MEMS hermetic packaging using sub-micron Au particles

    Hiroyuki Ishida, Toshinori Ogashiwa, Takuya Yazaki, Tatsuya Ikoma, Takashi Nishimori, Hiroyuki Kusamori, Jun Mizuno

    Transactions of the Japan Institute of Electronics Packaging   3   62 - 67  2010年  [査読有り]

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  • A microfluidic mammalian cell sorter with thermal gelation polymer solution

    Shirasaki Y, Goto M, Sugino H, Arakawa T, Yoon D, Mizuno J, Shoji S, Funatsu T, Ohara O

    14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010   3   1571 - 1573  2010年  [査読有り]

  • Copper Multilayer Interconnection Using Ultravaiolet Nanoimprint Lithography with a Double-Deck Mold and Electroplating

    Noriyasu Nagai, Hiroshi Ono, Katsuyuki Sakuma, Mikiko Saito, Jun Mizuno, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 11 ) 115001  2009年11月  [査読有り]

     概要を見る

    An approach to realizing a two-step interconnection using a double-deck quartz mold based on ultraviolet nanoimprint lithography (UV-NIL) technology and Cu electroplating is discussed The double-deck mold realizes a two-step simultaneous transcription and a two-step nanoscale interconnection Nanoscale via and trench array patterns of Cu were formed on a silicon substrate using UV-NIL in combination with electroplating Imprinted via and trench patterns were simultaneously formed on a photocurable resin by the double-deck mold with a two-step structure. Using this mold, 73 nm metal via and 190 nm metal trench patterns were successfully fabricated by electroplating (C) 2009 The Japan Society of Applied Physics

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  • Fabrication of post-hydrophilic treatment-free plastic biochip using polyurea film

    Hidetoshi Shinohara, Yoshikazu Takahashi, Jun Mizuno, Shuichi Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   154 ( 2 ) 187 - 191  2009年09月  [査読有り]

     概要を見る

    A novel low-temperature bonding method was developed by using polyurea film as intermediate layers. A microchip with a microchannel having a highly hydrophilic surface was realized by pretreatment with vacuum ultraviolet light irradiation under an oxygen atmosphere (VUV/O(3)). The bonding temperature is low enough to use thermo-plastic channel plates such as PMMA (poly(methyl methacrylate)) with negligible deformation of the channel structure. The results of contact angle measurements indicate the highly hydrophilic surface of the microchannel was retained after the bonding process. There was no leakage or obstacles to smooth fluidic flow at the bonded interface. For actual micro-biochip fabrication with this method, the post-hydrophilic treatment after bonding process is unnecessary. (C) 2008 Elsevier B.V. All rights reserved.

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  • Seamless Pattern Fabrication of Large-Area Nanostructures Using Ultraviolet Nanoimprint Lithography

    Shingo Kataza, Kentaro Ishibashi, Mitsunori Kokubo, Hiroshi Goto, Jun Mizuno, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 6 ) 06FH21  2009年06月  [査読有り]

     概要を見る

    The seamless pattern fabrication of large-area nanostructures using ultraviolet nanoimprint lithography (UV-NIL) was studied. Large-area nanopatterning is required in the actual mass production of optical devices and biological microchips. We applied the double lithography method of litho-etch-litho-etch for UV-NIL process. The proposed multiple UV-NIL process realized 66 x 45 mm(2) pattern area, which has 50 nm width and 150 nm space line patterns on a quartz wafer. (C) 2009 The Japan Society of Applied Physics

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  • Simplified 20-μm pitch vertical interconnection process for 3D chip stacking

    Katsuyuki Sakuma, Noriyasu Nagai, Mikiko Saito, Jun Mizuno, Shuichi Shoji

    IEEJ Transactions on Electrical and Electronic Engineering   4 ( 3 ) 339 - 344  2009年05月  [査読有り]

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  • Fabrication of Uniform Gratings on Composite Semiconductors Using UV Nanoimprint Lithography

    Shugo Ishizuka, Masashi Nakao, Shinro Mashiko, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   22 ( 2 ) 213 - 217  2009年  [査読有り]

     概要を見る

    A fabrication method of uniform gratings on composite semiconductors using ultraviolet nanoimprint lithography (UV-NIL) is described. Since the grating pattern was batch transferred to the resin on substrates in this process, a high throughput fabrication process is expected. Both the dry etching process and the wet etching process can be performed for composite semiconductors patterning. The uniformity of the pattern height on a 3 inch GaAs substrate is better than the standard deviation of 2.6.

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  • Preparation of electrodeposited Pt nano patterned electrode using UV-nano imprinting lithography

    M. Saito, J. Mizuno, H. Nishikubo, H. Fujiwara, T. Homma

    ECS Transactions   16 ( 25 ) 131 - 136  2009年  [査読有り]

     概要を見る

    We attempt to prepare the patterned electrode for the formation of nano particles using electrochemical deposition with the cathode whose surface has nano dot patterns. In particular, we applied electrodeposition of Pt and UV nano imprinting lithography (UV-NIL) to prepare the nano patterned electrode. In order to achieve higher activity, the deposition condition of Pt was optimized using additives such as polyethylene glycol (PEG). The surface activity of the Pt films was affected by molecular weight of PEG. It was revealed that the surface activity of the films deposited with the order of thousands of molecular weight of PEG indicated the highest effective current density among the examined films. The Pt films, which exhibited the highest current density, were adapted to fabricate nano-patterned electrode with 400 nm pith periodic structure using UV-NIL. ©The Electrochemical Society.

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  • Electrochemical fabrication of CoPt nanodot arrays on glass disks by UV nanoimprint lithography

    T. Ouchi, Y. Arikawa, J. Mizuno, S. Shoji, T. Homma

    ECS Transactions   16 ( 45 ) 57 - 64  2009年  [査読有り]

     概要を見る

    A fabrication process for CoPt nanodot arrays using an electrochemical approach was proposed. The nano-patterncd substrates were formed using electron beam lithography (EBL) and UV nanoimprint lithography (UV-NIL). CoPt was electrodeposited into nano-patterned Si substrates. CoPt nanodot arrays with 35 rail diameter and 50 nm pitch using EBL and 50 nm diameter and 100 nm pitch using UV-NIL were successfully fabricated. In addition, we attempted to apply 1 inch glass disk substrates with CoZrNb underlayer as soft magnetic underlayer (SUL). We focused on the surface condition of the underlayers to deposit CoPt with uniformity and high magnetic properties. As a result, CoPt nanodot arrays were successfully fabricated on a 1 inch glass disk substrate with SUL using thin Cu intermediate layers. From these results, it has been found that the combination of the UV-NIL and electrochemical processes is a candidate for the fabrication of ultra high-density magnetic recording media. ©The Electrochemical Society.

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  • Bendable fuel cells: on-chip fuel cell on a flexible polymer substrate

    Satoshi Tominaka, Hiroshi Nishizeko, Jun Mizuno, Tetsuya Osaka

    ENERGY & ENVIRONMENTAL SCIENCE   2 ( 10 ) 1074 - 1077  2009年  [査読有り]

     概要を見る

    A novel concept of fuel cells, i.e., bendable fuel cells, is proposed and demonstrated by the fabrication of on-chip fuel cells on cycloolefin polymer films. This approach overcomes the brittleness and cost problems, i.e., a troubling aspect of miniaturized devices, of on-chip fuel cells.

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  • Desktop Type Equipment of Thermal-assisted UV Roller Imprinting

    Tomotaka Shibazaki, Hidetoshi Shinohara, Tamano Hirasawa, Nobuji Sakai, Jun Taniguchi, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   22 ( 6 ) 727 - 730  2009年  [査読有り]

     概要を見る

    Desktop type equipment of thermal-assisted UV roller imprinting was developed. A remarkable advantage of the desktop type equipment is expected to be easy evaluation of replication results using different molds with small amounts of resin. Replication tests were carried out under various scanning speed of the stage, UV intensity, and roll temperature. Pattern replication was improved by heating roll under the same scanning speed of stage. Heating of the roll was effective to realize better pattern replication under the same scanning speed of the stage.

    DOI

  • Polymer microchip integrated with nano-electrospray tip for electrophoresis-mass spectrometry

    Hidetoshi Shinohara, Takafumi Suzuki, Fumihiko Kitagawa, Jun Mizuno, Koji Otsuka, Shuichi Shoji

    SENSORS AND ACTUATORS B-CHEMICAL   132 ( 2 ) 368 - 373  2008年06月  [査読有り]

     概要を見る

    A novel cyclo-olefin polymer (COP) microchip was developed integrated with an electrospray ionization (ESI) emitter tip for microchip electrophoretic separation and mass spectrometric detection. The microchip was fabricated by hot embossing and low-temperature direct bonding. The ESI emitter tip structure was formed directly at the microchip electrophoresis (MCE) outlet. Since these microchips enable negligible dead volume at the electrospray port, efficient spray of the sample necessary for acceptable resolution mass spectrometry (MS) was realized. Stable spray was also achieved at the low flow rate (similar to 0.1 mu L/min) without additional pump. By applying the fabricated COP chip to the MCE-ESI-MS analysis, successful separation and detection of caffeine and arginine was achieved. (c) 2007 Elsevier B.V. All rights reserved.

    DOI

  • Surface hydrophilic treatment of polyurea film realized by vaccum ultraviolet light irradiation and its application for poly(methylmethacrylate) blood analysis chip

    H. Shinohara, Y. Takahashi, J. Mizuno, S. Shoji

    SENSORS AND ACTUATORS B-CHEMICAL   132 ( 2 ) 374 - 379  2008年06月  [査読有り]

     概要を見る

    A room temperature hydrophilic method of the polyurea film surface was developed using vacuum ultraviolet (VUV) light at 172 nm in wavelength. The treated film has highly hydrophilic surface for long time (similar to 2 months). The stable hydrophilic surface, water contact angle of smaller than 20 degrees, was realized. It is kept even after very hard condition of ultrasonic cleaning in de-ionized water. The polyurea film was applied for poly(methylmethacrylate) (PMMA) blood analysis chip. The performance of the surface treatment was evaluated by actual human whole blood flow. The new chip can reduce the adhesion of platelets and white blood cells, even after ultrasonic cleaning in surfactant-induced water. (c) 2007 Published by Elsevier B.V.

    DOI

  • Fabrication of high-intensity light-emitting diodes using nanostructures by ultraviolet nanoimprint lithography and electrodeposition

    Hiroshi Ono, Yoshinobu Ono, Kenji Kasahara, Jun Mizuno, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   47 ( 2 ) 933 - 935  2008年02月  [査読有り]

     概要を見る

    Antireflection nanostructures for GaN light-emitting diodes (LEDs) were fabricated by reactive ion etching (RIE) using Ni as an etching mask. The Ni mask was formed by electrodeposition in combination with ultraviolet nanoimprint lithography (UV-NIL). The antireflection nanostructures of 600 nm in depth, 300 nm in diameter, and 500 nm in pitch were fabricated on a GaN substrate. The radiant intensity of the LEDs was increased 1.5 times compared to that of a conventional LED. Since this method enables the fabrication of wafer-level GaN nanostructures with a low cost process, it is applicable to the fabrication of photonic crystals.

    DOI

  • Fabrication of magnetic nanodots array using UV nanoimprint lithography and electrodeposition for high density patterned media

    Hidetoshi Shinohara, Makoto Fukuhara, Tamano Hirasawa, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   21 ( 4 ) 591 - 596  2008年  [査読有り]

     概要を見る

    A Magnetic nanodots array fabrication method using ultraviolet nanoimprint lithography (UV-NIL) and electrodeposition was developed. Since the photocurable resin patterned by UV-NIL was directly used for electrodeposition mask, simple and high throughput fabrication process was realized. The CoPt nanodots (diameter: 120 nm) array was formed after the electrodeposition. After chemical mechanical polishing (CMP), the arithmetic mean roughness (R(a)) of the track area was smaller than 1 nm..

    DOI

  • Fabrication of a microchannel device by hot embossing and direct bonding of poly(methyl methacrylate)

    Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   46 ( 6A ) 3661 - 3664  2007年06月  [査読有り]

     概要を見る

    We have fabricated a 50-mu m-wide and a 30-mu m-deep microchannel device by hot embossing and the direct bonding of 14 poly(methyl methacrylate) (PMMA) plates with dimensions of 20 x 20 x 1 mm(3) and evaluated the device's mechanical, optical, and fluidic characteristics. The device's bond strength was confirmed to be sufficiently high for practical use as well as for withstanding severe cleaning conditions, such as ultrasonic cleaning in deionized water. The optical loss around the bonded interface was also evaluated, and no increase in light absorption was observed. There was no leakage or obstacles to smooth fluidic flow when methylene blue test liquid flowed in the channel. The above results confirmed that the hot embossing and direct bonding technologies for microchannel manufacturing using PMMA plates can realize high-performance microchannel devices.

    DOI

  • Fabrication of metallic nanopatterns using the vacuum type UV-NIL equipment

    Makoto Fukuhara, Jun Mizuno, Mikiko Saito, Takayuki Homma, Shuichi Shoji

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   2 ( 3 ) 307 - 312  2007年05月  [査読有り]

     概要を見る

    Nanoscale dot patterns of cobalt alloy were formed on a silicon substrate using the ultra-violet nanoimprint lithography (UV-NIL) technology in combination with an electrodeposition process. We developed an improved UV-NIL equipment that can evacuate the chamber during imprinting. Using this equipment, we successfully imprinted 240-nm dot patterns with 500 nm pitch on a photocurable resin with high dimensional accuracy. Thickness control of the resin and imprinting under vacuum are important issues to obtain fine nanopatterns. Using these resin patterns as a mask layer, 300-nm cobalt alloy patterns are successfully formed by the electrodeposition process. (c) 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI

  • On-chip cell sorting system using thermoreversible gelation polymer

    Yoshitaka Shirasaki, Hirokazu Sugino, Masayasu Tatsuoka, Jun Mizuno, Shuichi Shoji, Takashi Funatsu

    IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS   13 ( 2 ) 223 - 227  2007年03月  [査読有り]

     概要を見る

    We have developed a microfabricated fluorescence-activated cell sorter system using laminar flow of thermoreversible gelation polymer (TGP). The glass sorter chip consists of microchannels with two inlets for sample and buffer solutions, and two outlets for collection and waste of the specimen. A biological specimen containing fluorescently labeled cells, is mixed with a solution containing a TGP. The laminar flow of the mixed solution and buffer solution are then introduced into the sorter chip. The fluorescently labeled target cells were detected with sensitive fluorescence microscopy. In the absence of a fluorescence signal, the laminar flow of the specimen is directed into the waste channel. Upon detection of a fluorescence signal from the target cells, the sol-gel transformation was locally induced by site-directed infrared laser irradiation for the flow switching and for allowing the fluorescent cells to be channeled into the collection reservoir. The flow switching time of 100 ms was achieved. Using this system, we have demonstrated the sorting of Escherichia coli cells expressing fluorescent proteins. These cells were found to be viable after extraction from the sorting system, indicating no damage to the cells.

    DOI

  • Low-temperature direct bonding of poly(methyl methacrrylate) for polymer microchips

    Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji

    IEEJ Transactions on Electrical and Electronic Engineering   2   301 - 306  2007年  [査読有り]

  • UV nanoimprint lithography and its application for nanodevices

    Makoto Fukuhara, Hiroshi Ono, Tamano Hirasawa, Makoto Otaguchi, Nobuji Sakai, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   20 ( 4 ) 549 - 554  2007年  [査読有り]

     概要を見る

    Nanostructure fabrication process using ultraviolet nanoimprint lithography (UV-NIL) and electrodeposition were proposed. This method shows remarkable advantages in high throughput production and fabrication cost. For this process, the newly resin which endures wet process was developed. Co dot arrays of 220nm were fabricated by electrodeposition after UV-NIL. GaN structure of 300nm was also realized using Ni as an etching mask fabricated by proposed process.

    DOI

  • Electrophoretic separation and mass spectrometric detection on polymer chip directly integrated with an electronanospray tip

    Fumihiko Kitagawa, Takafumi Suzuki, Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    PROCEEDINGS OF THE FIRST SHENYANG INTERNATIONAL COLLOQUIUM ON MICROFLUIDICS     105 - 106  2007年  [査読有り]

     概要を見る

    Fabrication of a cycloolefin polymer (COP) chip directly integrated with an electrospray ionization (ESI) emitter tip for a microchip electrophoretic (MCE) separation and mass spectrometric (MS) detection was investigated. By applying the fabricated COP chip to the MCE-ESI-MS analysis, a successful separation and detection of caffeine and amino acids was attained.

  • Fabrication of integrated nano ESI tip for microchip electrophoresis−mass spectrometry

    Fumihiko Kitagawa, Takafumi Suzuki, Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    21st International Symposium on Microscale Bioseparations (MSB 2007), Vancouver, Canada; 14-18 January 2007     277  2007年01月

  • Fabrication of integrated nano ESI tip for microchip electrophoresis−mass spectrometry

    Fumihiko Kitagawa, Takafumi Suzuki, Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    21st International Symposium on Microscale Bioseparations (MSB 2007), Vancouver, Canada; 14-18 January 2007     277  2007年01月

  • HIGH PERFORMANCE ELECTROPHORETIC ANALYSIS ON CYCLOOLEFIN POLYMER MICROCHIPS

    Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS2006)     362 - 364  2006年11月

  • FABRICATION OF HIGHLY DIMENSION CONTROLLED PMMA MICROCHIP BY HOT EMBOSSING AND LOW TEMPERATURE DIRECT BONDING

    Hidetoshi Shinohara, Jun Mizuno, Fumihiko Kitagawa, Koji Otsuka, Shuichi Shoji

    The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS2006)     158 - 160  2006年11月

  • High performance electrophoretic analysis on cycloolefin polymer microchips

    Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    6th Asia-Pacific International Symposium on Microscale Separations and Analysis (APCE 2006), Kyoto, Japan     80 - 80  2006年11月

  • High performance electrophoretic analysis on cycloolefin polymer microchips

    Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    6th Asia-Pacific International Symposium on Microscale Separations and Analysis (APCE 2006), Kyoto, Japan     80 - 80  2006年11月

  • HIGH PERFORMANCE ELECTROPHORETIC ANALYSIS ON CYCLOOLEFIN POLYMER MICROCHIPS

    Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS2006)     362 - 364  2006年11月

  • FABRICATION OF HIGHLY DIMENSION CONTROLLED PMMA MICROCHIP BY HOT EMBOSSING AND LOW TEMPERATURE DIRECT BONDING

    Hidetoshi Shinohara, Jun Mizuno, Fumihiko Kitagawa, Koji Otsuka, Shuichi Shoji

    The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS2006)     158 - 160  2006年11月

  • High performance electrophoretic analysis on cycloolefin polymer microchips

    Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    6th Asia-Pacific International Symposium on Microscale Separations and Analysis (APCE 2006), Kyoto, Japan     80 - 80  2006年11月

  • Metallization on three dimensions microstructures using photoresist spray coating for microdirect methanol fuel cell

    Masanori Ishizuka, Hiroaki Houjou, Shinji Motokawa, Jun Mizuno, Toshiyuki Momma, Tetsuya Osaka, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 10A ) 7944 - 7948  2006年10月  [査読有り]

     概要を見る

    High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed,by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (mu DMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm(2) were obtained at room temperature with 2 M methanol.

    DOI

  • Equipments and Technologies for Packaging of Nano / Micro-structured Polymer Applications

    H.Kurotaki, H.Shinohara, H.Ishida, V.Dragoi, T.Glinsner, O.Lindner, J.Mizuno, S.Shoji

    COMS2006     33 - 34  2006年09月

  • Fabrication of High Light-Extraction Efficiency LED Using Nanostructures by UV Nanoimpr int Lithography and Electrodeposition

    Hiroshi Ono, Yoshinobu Ono, Kenji Kasahara, Jun Mizuno, Shuichi Shoji

    SSDM2006     256 - 257  2006年09月

  • Fabrication of High Light-Extraction Efficiency LED Using Nanostructures by UV Nanoimpr int Lithography and Electrodeposition

    Hiroshi Ono, Yoshinobu Ono, Kenji Kasahara, Jun Mizuno, Shuichi Shoji

    SSDM2006     256 - 257  2006年09月

  • Equipments and Technologies for Packaging of Nano / Micro-structured Polymer Applications

    H.Kurotaki, H.Shinohara, H.Ishida, V.Dragoi, T.Glinsner, O.Lindner, J.Mizuno, S.Shoji

    COMS2006     33 - 34  2006年09月

  • Fabrication of High Light-Extraction Efficiency LED Using Nanostructures by UV Nanoimpr int Lithography and Electrodeposition

    Hiroshi Ono, Yoshinobu Ono, Kenji Kasahara, Jun Mizuno, Shuichi Shoji

    SSDM2006     256 - 257  2006年09月

  • アクリル製マイクロチャネルアレイを用いた血液通過時間の再現性の検討

    西泰治, 萩原清道, 福田始弘, 木下藤寿, 伊藤克之, 菊池佑二, 庄子習一, 水野潤, 篠原秀敏

    日本ヘモレオロジー学会   9 ( 2 )  2006年09月

  • VUV IRRADIATION EFFECTS ON PERFORMANCE OF PENTACENE THIN FILM TRANSISTORS

    TOMOHIKO EDURA, JUN MIZUNO, KEN TSUTSUI, YASUO WADA, YOSHINOBU HOSOI, SYUICHI SHOJI, YUKIO FURUKAWA

    Asia-Pacific Conference of Transducers and Micro-Nano Technology   95-MDC-A0291  2006年06月

  • FABRICATION OF METALLIC NANOPATTERNS USING THE VACUUM TYPE UV-NIL EQUIPMENT

    MAKOTO FUKUHARA, MIKIKO SAITO, TAKAYUKI HOMMA, JUN MIZUNO, SHUICHI SHOJI, MAKOTO OHTAGUCHI, TAMANO HIRASAWA, GAKU SUZUKI, NORIHITO FUKUGAMI

    Asia-Pacific Conference of Transducers and Micro-Nano Technology   95-FT-A0144  2006年06月

  • LOW TEMPERATURE DIRECT BONDING OF PMMA FOR POLYMER MICROCHIPS

    H. SHINOHARA, M. ISHIZUKA, J. MIZUNO AND, S. SHOJI

    Asia-Pacific Conference of Transducers and Micro-Nano Technology   95-FT-A0062  2006年06月

  • VUV IRRADIATION EFFECTS ON PERFORMANCE OF PENTACENE THIN FILM TRANSISTORS

    TOMOHIKO EDURA, JUN MIZUNO, KEN TSUTSUI, YASUO WADA, YOSHINOBU HOSOI, SYUICHI SHOJI, YUKIO FURUKAWA

    Asia-Pacific Conference of Transducers and Micro-Nano Technology   95-MDC-A0291  2006年06月

  • FABRICATION OF METALLIC NANOPATTERNS USING THE VACUUM TYPE UV-NIL EQUIPMENT

    MAKOTO FUKUHARA, MIKIKO SAITO, TAKAYUKI HOMMA, JUN MIZUNO, SHUICHI SHOJI, MAKOTO OHTAGUCHI, TAMANO HIRASAWA, GAKU SUZUKI, NORIHITO FUKUGAMI

    Asia-Pacific Conference of Transducers and Micro-Nano Technology   95-FT-A0144  2006年06月

  • LOW TEMPERATURE DIRECT BONDING OF PMMA FOR POLYMER MICROCHIPS

    H. SHINOHARA, M. ISHIZUKA, J. MIZUNO AND, S. SHOJI

    Asia-Pacific Conference of Transducers and Micro-Nano Technology   95-FT-A0062  2006年06月

  • UVインプリントを用いた高アスペクト比Siナノ構造体の作製

    大野浩志, 福原誠, 石束真典, 水野 潤, 庄子習一, 太田口誠, 平澤玉乃, 坂井信支

    マイクロマシン・センサシステム研究会   MSS-06-21   97 - 100  2006年05月

  • Single grain and single grain boundary resistance of pentacene thin film characterized using a nanoscale electrode array

    T Edura, H Takahashi, M Nakata, H Onozato, J Mizuno, K Tsutsui, M Haemori, K Itaka, H Koinuma, Y Wada

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 4B ) 3708 - 3711  2006年04月  [査読有り]

     概要を見る

    In this paper, we report on a less than 100-nm-wide nanoscale electrode array, with which the field-effect mobilities of a single,grain and a single grain boundary in organic thin films are characterized. The method of fabricating the nanoscale electrode array and the evaluation results of the pentacene thin film are described. The nanoscale electrode array was fabricated by EB lithography and a liftoff process. The pentacene thin film was deposited by molecular-beam epitaxy (MBE). The resistances of a single grain and a single grain boundary were estimated to be around 10 and 100 M Omega, respectively, and the field-effect mobility was estimated to be around 1 cm(2)/(V S), which is almost comparable to the highest value ever reported. These results confirm that a single crystal is essential for high performance organic thin-film transistors.

    DOI

  • Single grain and single grain boundary resistance of pentacene thin film characterized using a nanoscale electrode array

    T Edura, H Takahashi, M Nakata, H Onozato, J Mizuno, K Tsutsui, M Haemori, K Itaka, H Koinuma, Y Wada

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 4B ) 3708 - 3711  2006年04月

     概要を見る

    In this paper, we report on a less than 100-nm-wide nanoscale electrode array, with which the field-effect mobilities of a single,grain and a single grain boundary in organic thin films are characterized. The method of fabricating the nanoscale electrode array and the evaluation results of the pentacene thin film are described. The nanoscale electrode array was fabricated by EB lithography and a liftoff process. The pentacene thin film was deposited by molecular-beam epitaxy (MBE). The resistances of a single grain and a single grain boundary were estimated to be around 10 and 100 M Omega, respectively, and the field-effect mobility was estimated to be around 1 cm(2)/(V S), which is almost comparable to the highest value ever reported. These results confirm that a single crystal is essential for high performance organic thin-film transistors.

    DOI

  • Single grain and single grain boundary resistance of pentacene thin film characterized using a nanoscale electrode array

    T Edura, H Takahashi, M Nakata, H Onozato, J Mizuno, K Tsutsui, M Haemori, K Itaka, H Koinuma, Y Wada

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 4B ) 3708 - 3711  2006年04月

     概要を見る

    In this paper, we report on a less than 100-nm-wide nanoscale electrode array, with which the field-effect mobilities of a single,grain and a single grain boundary in organic thin films are characterized. The method of fabricating the nanoscale electrode array and the evaluation results of the pentacene thin film are described. The nanoscale electrode array was fabricated by EB lithography and a liftoff process. The pentacene thin film was deposited by molecular-beam epitaxy (MBE). The resistances of a single grain and a single grain boundary were estimated to be around 10 and 100 M Omega, respectively, and the field-effect mobility was estimated to be around 1 cm(2)/(V S), which is almost comparable to the highest value ever reported. These results confirm that a single crystal is essential for high performance organic thin-film transistors.

    DOI

  • シクロオレフィン樹脂マイクロチップにおける高性能電気泳動分析(3)

    北川文彦, 津禰鹿毅, 秋本嘉宏, 鈴木崇章, 石束真典, 水野 潤, 庄子習一, 大塚浩二

    日本化学会第86春季年会    2006年03月

  • Electrical characterization of single grain and single grain boundary of pentacene thin film by nano-scale electrode array

    T Edura, H Takahashi, M Nakata, K Tsutsui, K Itaka, H Koinuma, J Mizuno, Y Wada

    CURRENT APPLIED PHYSICS   6 ( 1 ) 109 - 113  2006年01月  [査読有り]

     概要を見る

    Organic thin film transistors (O-TFTs) are attracting attentions recently for their possible application to flexible field effect transistor (FET) devices and even for candidate devices in post-silicon information systems. However, the organic thin films usually grow in a polycrystalline state, and the electrical properties are very difficult to set at an appropriate value because orientation and size of the polycrystalline grains are almost uncontrollable. Thus, it should be necessary to clarify the conduction characteristics within the single grain and between the grains through grain boundaries in order to precisely control the electrical properties of the organic thin films. This paper reports on a nano-scale electrode array, which provides a method to characterize single organic semiconductor grain, as well as to determine the single grain boundary effect on the electrical conduction. The fabrication method of the nano-scale electrode array and evaluation results are described. Single grain and single grain boundary in MBE grown pentacene thin film were detected and were measured for the first time using FET structures. The resistance of single grain was estimated to be around 10 M Ohms while that of single grain boundary to be about 100 M Ohms. This is the first experimental verification of the resistance of single grain pentacene thin film and single pentacene grain boundary. (c) 2005 Elsevier B.V. All rights reserved.

    DOI

  • High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips

    Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    In Micro Total Analysis Systems 2006, Kitamori, T.; Fujita, H.; Hasebe, S. Eds.; Society for Chemistry and Micro-Nano Systems: Tokyo, (2006)   Vol.1   362 - 364  2006年

  • High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips

    Fumihiko Kitagawa, Takafumi Suzuki, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    In Micro Total Analysis Systems 2006, Kitamori, T.; Fujita, H.; Hasebe, S. Eds.; Society for Chemistry and Micro-Nano Systems: Tokyo, (2006)   Vol.1   362 - 364  2006年

  • PU COATED PMMA BLOOD ANALYSIS CHIP

    H. Shinohara, J. Mizuno, G. Tazaki, T. Nishi, M. Nakajima, C. Takahashi, S. Shoji

    Fifth International Symposium on Microchemistry and Microsystems (ISMM2005), Kyoto TERRESA, Kyoto, Japan     114 - 115  2005年12月

  • High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips.3

    Fumihiko Kitagawa, Takashi Tsuneka, Yoshihiro Akimoto, Takafumi Suzuki, Masanori Ishizuka, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    Fifth International Symposium on Microchemistry and Microsystems (ISMM2005), Kyoto TERRESA, Kyoto, Japan     102 - 103  2005年12月

  • High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips.3

    Fumihiko Kitagawa, Takashi Tsuneka, Yoshihiro Akimoto, Takafumi Suzuki, Masanori Ishizuka, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    Fifth International Symposium on Microchemistry and Microsystems (ISMM2005), Kyoto TERRESA, Kyoto, Japan     102 - 103  2005年12月

  • PU COATED PMMA BLOOD ANALYSIS CHIP

    H. Shinohara, J. Mizuno, G. Tazaki, T. Nishi, M. Nakajima, C. Takahashi, S. Shoji, ”, PU COATED PMMA BLOOD ANALYSIS CHIP

    Fifth International Symposium on Microchemistry and Microsystems (ISMM2005), Kyoto TERRESA, Kyoto, Japan     114 - 115  2005年12月

  • Application of thermal lens microscopy and sweeping for highly sensitive detection in electrophretic analysis on cycloolefin polymer microchips

    F. Kitagawa, T. Tsuneka, Y. Akimoto, T. Suzuki, M. Ishizuka, J. Mizuno, S. Shoji, K. Otsuka

    International Chemical Congress of Pacific Basin Societies PACIFICHEM 2005, Honolulu, Hawaii, December 15-20,2005     895  2005年12月

  • Pentacene single-grain FET characteristics using nano-scale gap electrodes

    T. Edura, M. Nakata, H. Takahashi, K. Tsutsui, J. Mizuno, M. Tokuda, H. Onozato, M. Haemori, K. Itaka, H. Koinuma, Y. Wada

    International Chemical Congress of Pacific Basin Societies PACIFICHEM 2005, Honolulu, Hawaii, December 15-20,2005     1252  2005年12月

  • Au電極一体型COPマイクロチャネルの作製Ⅱ

    鈴木崇章, 篠原秀敏, 石束真典, 水野潤, 庄子習一

    講演予稿集, 第12回化学とマイクロ・ナノシステム研究会、京都テルサ、京都     pp10  2005年12月

  • High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips.3

    Fumihiko Kitagawa, Takashi Tsuneka, Yoshihiro Akimoto, Takafumi Suzuki, Masanori Ishizuka, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    Fifth International Symposium on Microchemistry and Microsystems (ISMM2005), Kyoto TERRESA, Kyoto, Japan     102 - 103  2005年12月

  • PU COATED PMMA BLOOD ANALYSIS CHIP

    H. Shinohara, J. Mizuno, G. Tazaki, T. Nishi, M. Nakajima, C. Takahashi, S. Shoji, ”, PU COATED PMMA BLOOD ANALYSIS CHIP

    Fifth International Symposium on Microchemistry and Microsystems (ISMM2005), Kyoto TERRESA, Kyoto, Japan     114 - 115  2005年12月

  • Pentacene single-grain FET characteristics using nano-scale gap electrodes

    T. Edura, M. Nakata, H. Takahashi, K. Tsutsui, J. Mizuno, M. Tokuda, H. Onozato, M. Haemori, K. Itaka, H. Koinuma, Y. Wada

    International Chemical Congress of Pacific Basin Societies PACIFICHEM 2005, Honolulu, Hawaii, December 15-20,2005     1252  2005年12月

  • Application of thermal lens microscopy and sweeping for highly sensitive detection in electrophretic analysis on cycloolefin polymer microchips

    F. Kitagawa, T. Tsuneka, Y. Akimoto, T. Suzuki, M. Ishizuka, J. Mizuno, S. Shoji, K. Otsuka

    International Chemical Congress of Pacific Basin Societies PACIFICHEM 2005, Honolulu, Hawaii, December 15-20,2005     895  2005年12月

  • 樹脂製マイクロチャネルアレイを用いた通過時間の再現性検討

    西泰治, 鳥原正治, 福田始弘, 桐田泰三, 田崎剛, 菊池佑二, 庄子習一, 水野潤, 篠原秀敏

    第12回日本ヘモレオロジー学会 講演予稿集 京都府立医科大学、京都     pp51  2005年11月

  • Fabrication of metallic nano patterns using a new photocurable resin durable for electrodeposition process

    Makoto Ohtaguchi, Tamano Hirasawa, Takeshi Osaki, Nobuji Sakai, Tomohiko Edura, Jun Mizuno, Mikiko Saito, Shuichi Shoji, Takayuki homma

    The 4th International Nanoimprint and Nanoprint Technology Conference 2005   20P-5-36  2005年10月

  • PMMA MICRO-CHANNEL ARRAY FOR BLOOD ANALYSIS FABRICATED BY HOT EMBOSSING

    J. Mizuno, H. Shinohara, M. Ishizuka, T. Suzuki, G. Tazaki, Y. Kirita, T. Nishi, S. Shoji

    Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS2005)     1340 - 1342  2005年10月

  • APPLICATION OF THERMAL LENS MICROSCOPY AND SWEEPING FOR HIGHLY SENSITIVE DETECTION IN ELECTROPHORETIC ANALYSIS ON CYCLOOLEFIN POLYMER MICROCHIPS

    Fumihiko Kitagawa, Takashi Tsuneka, Yoshihiro Akimoto, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS2005)     331 - 333  2005年10月

  • COST EFFECTIVE PLASTIC MICRO DIRECT METHANOL FUEL CELL (µDMFC)

    Masanori Ishizuka, Takafumi Suzuki, Hidetoshi Shinohara, Hiroaki Houjou, Shinji Motokawa, Jun Mizuno, Toshiyuki Momma, Tetsuya Osaka, Shuichi Shoji

    Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS2005)     1212 - 1214  2005年10月

  • PMMA MICRO-CHANNEL ARRAY FOR BLOOD ANALYSIS FABRICATED BY HOT EMBOSSING

    J. Mizuno, H. Shinohara, M. Ishizuka, T. Suzuki, G. Tazaki, Y. Kirita, T. Nishi, S. Shoji

    Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS2005), Boston, USA     1340 - 1342  2005年10月

  • Fabrication of metallic nano patterns using a new photocurable resin durable for electrodeposition process

    Makoto Ohtaguchi, Tamano Hirasawa, Takeshi Osaki, Nobuji Sakai, Tomohiko Edura, Jun Mizuno, Mikiko Saito, Shuichi Shoji, Takayuki homma

    The 4th International Nanoimprint and Nanoprint Technology Conference 2005, Nara, Japan   20P-5-36   100 - 101  2005年10月

  • Single Grain Boundary Resistance of Pentacene Thin Film Characterized by Nano-scale Electrode Array

    Tomohiko Edura, Masashi Nakata, Hiromasa Takahashi, Harumasa Onozato, Jun Mizuno, Ken Tsutsui, Masamitsu Haemori, Kenji Itaka, Hideomi Koinuma, Yasuo Wada

    Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials, Kobe, September 12-15, 2005(SSDM2005)     988 - 989  2005年09月

  • Fabrication of flat micro-gap electrodes for molecular electronics

    T Edura, J Mizuno, K Tsutsui, M Saito, M Tokuda, H Onozato, T Koizumi, Y Wada, M Haemori, H Koinuma

    ELECTRICAL ENGINEERING IN JAPAN   152 ( 2 ) 39 - 46  2005年07月  [査読有り]

     概要を見る

    Recently, organic molecular electronic devices such as molecular thin-film transistors have received considerable attention as possible candidates for next-generation electronic and optical devices. This paper reports oil fabrication technologies of flat metallic electrodes oil insulating substrates with a micrometer separation for high-performance molecular device evaluation. The key technologies of fabricating planar-type electrodes are the liftoff method by the combination of bilayer photoresist with overhang profile, electron beam evaporation of thin metal (Ti and Au) Films, and SiO2-CMP (Chemical Mechanical Polishing) method of CVD (Chemical Vapor Deposition)-deposited TEOS (tetraethoxysilane)-SiO2 layer. The raggedness of the electrode/insulator interface and the electrode surface of the micro-gap electrodes were less than 3 nm. The isolation characteristics of fabricated electrodes were on the order of 10(13) ohms at room temperature, which is sufficient for evaluating electronic properties of organic thin-film devices. Finally, pentacene FET (Field Effect Transistor) characteristics are discussed fabricated on the micro-gap flat electrodes. The mobility of this FET was 0.015 cm(2)/Vs, which was almost oil the order of the previous results. These results suggest that high-performance organic thin-film transistors call be realized oil these advanced electrode structures. (c) 2005 Wiley Periodicals, Inc.

    DOI

  • Fabrication of flat micro-gap electrodes for molecular electronics

    T Edura, J Mizuno, K Tsutsui, M Saito, M Tokuda, H Onozato, T Koizumi, Y Wada, M Haemori, H Koinuma

    ELECTRICAL ENGINEERING IN JAPAN   152 ( 2 ) 39 - 46  2005年07月

     概要を見る

    Recently, organic molecular electronic devices such as molecular thin-film transistors have received considerable attention as possible candidates for next-generation electronic and optical devices. This paper reports oil fabrication technologies of flat metallic electrodes oil insulating substrates with a micrometer separation for high-performance molecular device evaluation. The key technologies of fabricating planar-type electrodes are the liftoff method by the combination of bilayer photoresist with overhang profile, electron beam evaporation of thin metal (Ti and Au) Films, and SiO2-CMP (Chemical Mechanical Polishing) method of CVD (Chemical Vapor Deposition)-deposited TEOS (tetraethoxysilane)-SiO2 layer. The raggedness of the electrode/insulator interface and the electrode surface of the micro-gap electrodes were less than 3 nm. The isolation characteristics of fabricated electrodes were on the order of 10(13) ohms at room temperature, which is sufficient for evaluating electronic properties of organic thin-film devices. Finally, pentacene FET (Field Effect Transistor) characteristics are discussed fabricated on the micro-gap flat electrodes. The mobility of this FET was 0.015 cm(2)/Vs, which was almost oil the order of the previous results. These results suggest that high-performance organic thin-film transistors call be realized oil these advanced electrode structures. (c) 2005 Wiley Periodicals, Inc.

    DOI

  • High efficiency electrochemical immuno sensors using 3D comb electrodes

    N Honda, M Inaba, T Katagiri, S Shoji, H Sato, T Homma, T Osaka, M Saito, J Mizuno, Y Wada

    BIOSENSORS & BIOELECTRONICS   20 ( 11 ) 2306 - 2309  2005年05月  [査読有り]

     概要を見る

    To realize highly sensitive electrochemical immunoassays, a micro-fabricated three-dimensional (313) electrode was fabricated and applied to enzyme immuno assay based on production of a redox species. The dimensions of the electrodes are 10 mu m in width and 30 mu m in height, with 20 mu m spacing in between, and the 30 pairs of anode and cathode electrodes made up a single sensor. This structure lead to enhancement of the electrochemical reaction, nearly 100% of trap ratio of redox species. It can be applied to highly sensitive enzyme immuno sensing based on p-aminophenylphosphate (PAPP). Applicability of this technique to the immuno assay for one of the clinical diagnostic marker proteins (alpha-fetoprotein; AFP) from 6 to 500 ng/mL was demonstrated. (c) 2004 Elsevier B.V. All rights reserved.

    DOI

  • Preparation of nano-structured CoCu films by Electrodeposition

    M.Saito, H.Fujiwara, J.Mizuno, T.Homma

    Meeting Abstract MA2005-01,207th MEETING OF THE ELECTROCHEMICAL SOCIETY     1278  2005年05月

  • 金電極一体型シクロオレフィンポリマーマイクロチャネルの作製

    鈴木崇章, 篠原秀敏, 石束真典, 水野潤, 庄子習一

    第11回化学とマイクロ・ナノシステム研究会   講演予稿集   23  2005年05月

  • 低温直接接合によるPMMA流体デバイスの製作

    篠原秀敏, 鈴木崇章, 石束真典, 水野潤, 庄子習一

    第11回化学とマイクロ・ナノシステム研究会   講演予稿集   20  2005年05月

  • 樹脂製マイクロチャネルアレイを用いた血液流動試験

    西泰治, 桐田泰三, 福田始弘, 菊池佑二, 篠原秀敏, 水野潤, 庄子習一

    第80回日本医科器械学会大会   講演予稿集   228  2005年05月

  • Living in a Nano World

    Jun Mizuno

    Emerging Technology 2005 Nano-Micro Technology Conference    2005年05月

  • Research activities (μTAS and Hot embossing)

    Jun Mizuno

    Packaging and Nano-Technology-Seminar2005 in KOREA    2005年03月

  • APPLICATION OF THERMAL LENS MICROSCOPY AND ON-LINE SAMPLE PRECONCENTRATION FOR HIGH SENSITIVE DETECTION IN MICROCHIP ELECTROPHORESIS

    Fumihiko Kitagawa, kenji Sueyoshi, Takashi Tsuneka, Yoshihiro Akimoto, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    MALTI-LAYER MICROFLUIDIC DEVICES FOR AMINO ACID ANALYSIS; THE MARS ORGANIC ANALYZER,18th International Symposium on Microscale Bioseparations(MSB2005)     12 - 17  2005年02月

  • Application of thermal lens microscopy and on-line sample preconcentration for high sensitive detection in microchip electrophoresis

    F Kitagawa, K Sueyoshi, J Mizuno, Y Wada, S Shoji, K Otsuka

    Micro Total Analysis Systems 2004, Vol 1   vol1 ( 296 ) 67 - 69  2005年

     概要を見る

    The application of a thermal lens microscope (TLM) to highly sensitive detection scheme for the separation of nonfluorescent samples in microchip electrophoresis (MCE) was investigated. To improve the detection sensitivity, we studied on-line sample preconcentration by sweeping in combination with the TLM detection in NICE (MCE-TLM). Furthermore, sweeping-micellar electrokinetic chromatography (MEKC) in MCE-TLM was applied to the concentration and separation of labeled amino acids. MCE-TLM analyses on the cycloolefin polymer microchips fabricated by direct bonding method were also demonstrated.

  • 2D free space flow control system using termoreversible gelation of polymer by IR-laser

    M Tatsuoka, T Shimomae, Y Shirasaki, J Tanaka, S Watabe, J Mizuno, T Edura, K Tsutsui, Y Wada, S Shoji, T Funatsu

    Micro Total Analysis Systems 2004, Vol 1   vol1 ( 296 ) 252 - 254  2005年

     概要を見る

    We developed two-dimensional (2D) flow control system in a microchamber using thermoreversible gelation of polymer. Arbitrary patterns were projected on a microchamber with two dimensional arrays of metal films using an infrared (IR)-laser reflected by a micro mirror device (DMD). The irradiated areas were heated to form gel walls that interrupted the flow. The pattern could be reversibly changed by controlling the DMD coupled to a computer. This flow system is very flexible and applicable to various kinds of biomolecules handlings.

  • Multi particles and biomolecules sorting system using thermoreversible gelation controlled by DMD

    S Watabe, M Tatsuoka, T Shimomae, Y Shirasaki, J Mizuno, T Funatsu, S Shoji

    Transducers '05, Digest of Technical Papers, Vols 1 and 2     445 - 448  2005年

     概要を見る

    A one-inlet and nine outlet multi sorting system using thermoreversible gelation of polymer (Mebiol Gel (TM)) was developed for efficient particles and biomolecules handling. (Fig. 1) The system uses the 3 x 3 arrayed microchannels which have 9 cross points.(Fig.2) One outlet out of nine is selected and the flow pass is determined by IR irradiation to the certain junctions and channels where gel areas are formed. The IR irradiation points are selected using a PC controlled digital mirror device (DMD).
    Since nine flow passes are formed by the IR beams reflected by the DMD, nine outlets sorting are performed in simple microchannels without any mechanical valve systems. Switching time of less than 60 msec is obtained in this system.

    DOI

  • Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (mu DMFC)

    H Houjou, S Motokawa, M Ishizuka, J Mizuno, T Momma, T Osaka, S Shoji

    Transducers '05, Digest of Technical Papers, Vols 1 and 2     1437 - 1440  2005年

     概要を見る

    High efficient micro electrochemical devices are realized by the increase of the electrode surface areas keeping the chip size. Use of the 3-D electrodes instead of the planar electrodes is quite effective for this purpose. To realize a metal pattern on 3-D structures, spray coating method was utilized and the optimum condition to achieve good step coverage was observed. Good step coverage of photoresist was obtained on the obtuse corner formed by anisotropic wet etching of (100) silicon and even vertical corner formed by deep RIE. We applied this method to fabricate a high performance micro direct methanol fuel cell (mu DMFC). The open circuit voltage of 548mV and the maximum power density of 0.72mW/cm(2)were obtained at room temperature with 2M methanol.

    DOI

  • Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding

    J Mizuno, H Ishida, S Farrens, Dragoi, V, H Shinohara, T Suzuki, M Ishizuka, T Glinsner, FP Lindner, S Shoji

    Transducers '05, Digest of Technical Papers, Vols 1 and 2     1346 - 1349  2005年

     概要を見る

    Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm. x 40mm x 2.0mm) has been developed employing surface plasma treatment with various gases such as N-2, O-2, and 10%-H-2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle measurement on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

    DOI

  • Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding

    J Mizuno, S Farrens, H Ishida, Dragoi, V, H Shinohara, T Suzuki, M Ishizuka, T Glinsner, S Shoji

    2005 International Conference on MEMS, NANO and Smart Systems, Proceedings     346 - 349  2005年

     概要を見る

    Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm x 40mm x 2.0mm) has been developed employing surface plasma treatment with various gases such as N-2, O-2, and 10%-H-2/Ar. Surface energy of the bonded 'interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

    DOI

  • 温感ハイドロゲルを用いた生体分子ソータの開発

    白崎善隆, 泉俊光, 水野潤, 庄子習一, 和田泰雄, 月田承一郎, 船津高志

    第42回日本生物物理学会   2P298 ( S ) 184  2004年12月

  • 生体物質のマイクロチップ内二次元ハンドリングシステムの開発

    辰岡正康, 下前智宏, 渡部翔太, 白崎善隆, 泉俊光, 水野潤, 庄子習一, 和田泰雄, 船津高志

    第42回日本生物物理学会   3P318 ( S ) 269  2004年12月

  • Chemical Free Low Temperature Polymer to Polymer Direct Bonding

    Jun Mizuno, Hiroyuki Ishida, Shari Farrens, Masanori Ishizuka, Shuichi Shoji

    4th International Symposium on Microchemistry and Microsystems2004     118 - 119  2004年11月

  • Application of Thermal Lens Microscopy and On-line Sample Preconcentration for High Sensitive Detection in Microchip Electrophoresis

    Fumihiko Kitagawa, Kenji Sueyoshi, Jun Mizuno, Shuichi Shoji, Koji Otsuka

    4th International Symposium on Microchemistry and Microsystems2004     124 - 125  2004年11月

  • オンライン試料濃縮および熱レンズ顕微鏡測定によるマイクロチップ電気泳動分析の高感度化(4)

    北川文彦, 末吉健志, 水野潤, 和田恭雄, 庄子習一, 大塚浩二

    第10回化学とマイクロ・ナノシステム研究会     225 - 225  2004年11月

  • FABRICATION OF FINE PLASTIC MICROCHANNEL BY USING HOT EMBOSSING

    M.Ishizuka, J.Mizuno, T.Harada, S.Shoji

    Electrochemical Society Proceedings Microfabricated System and MEMS VII   PV2004-09   303 - 307  2004年09月

  • Fabrication of novel type microfluidic devices by hot embossing technology

    T.Glinsner, J.Mizuno, T.Harada, M.Ishizuka, T.Edura, K.Tsutsui, Y.Wada, P.Lindner, C.Schaefer, S.Shoji

    Commercialization of Micro and Nano Systems Conference 2004     389 - 392  2004年09月

  • 分子エレクトロニクス用マイクロギャップ平坦電極の作製

    江面知彦, 水野潤, 筒井謙, 齋藤美紀子, 徳田正秀, 小野里陽正, 小泉寿子, 和田恭雄

    電気学会論文誌C   124巻 ( 6 )  2004年06月

    DOI

  • 超平坦化電極アレイを用いたペンタセンFETのコンビナトリアル作製

    南風盛将光, 筒井謙, 江面知彦, 水野潤, 徳田正秀, 小野里陽正, 小泉寿子, 和田恭雄

    第51回応用物理学関連連合講演会   28p-ZF-8   1343 - 1343  2004年03月

  • Specific flow control systems using IR laser induced sol-gel tranfer of hydrogel

    JI Tanaka, Y Shirasaki, M Tatsuoka, T Funatsu, S Watabe, S Shoji, T Edura, J Mizuno, K Tsutsui, Y Wada

    NSTI NANOTECH 2004, VOL 1, TECHNICAL PROCEEDINGS   Technical Proceedings vol.1   296 - 299  2004年

     概要を見る

    IR laser induced sol-gel transfer of hydrogel is applied for the microfluidic controls. High performance biomolecules sorting systems using T-shaped microchannel including Ti absorbers to enhance the heat generation were realized. Mebiol Gel(TM) whose critical temperature 32 C was used as the carrier and high speed sorting of about 30 msec was achieved by optimizing the channel structure. We also apply sol-gel transfer to realize 2-D specific flow control in the microcavity by projecting near-IR light using a Digital Mirror Device (DMD).

  • Fabrications of micro-channel device by hot emboss and direct bonding of PMMA

    J Mizuno, T Harada, T Glinsner, M Ishizuka, T Edura, K Tsutsui, H Ishida, S Shoji, Y Wada

    2004 INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS, PROCEEDINGS     26 - 29  2004年

     概要を見る

    We have fabricated and evaluated the mechanical, optical and fluidic characteristics a 50um wide and a 30um deep micro-channel device produced by hot emboss and direct bonding of PMMA plate with dimensions of 20mm x 20mm x 1mm. The fabricated micro-channel device was evaluated the bond strength, which was confirmed to be high enough for practical use as well as for quite severe cleaning conditions as ultrasonic cleaning in pure water. The optical loss around bonded interface was also evaluated and no increase in the light absorption was observed. The above results confirmed that the hot emboss and direct bonding technologies for micro-channel manufacturing using the PMMA plates realizes high performance micro channel devices.

  • PMMA板の直接接合によるマイクロ流路デバイスの作製

    水野潤, 筒井謙, 江面知彦, 小泉寿子, 和田恭雄, 船津高志, 庄子習一

    第8回化学とマイクロ・ナノシステム研究会   P2   84 - 84  2003年11月

  • 分子エレクトロニクス用ナノギャップ平坦電極の作製

    江面知彦, 水野潤

    電気学会電子・情報・システム部門大会   GS1-2   678 - 679  2003年09月

  • ナノレベルの平滑めっき膜の検討

    齋藤美紀子, 水野潤

    電気学会電子・情報・システム部門大会   GS1-2   680 - 682  2003年09月

  • “MICRO-SORTING DEVICE WITH T-SHAPED CHANNEL BY USING GELLED MEBIOL”

    J.Mizuno, Y.Shirasaki, S.Shoji

    Commercialization of Micro and Nano Systems Conference 2003     105 - 108  2003年09月

  • “3-D COMB ELECTRODES FOR AMPEROMETRIC IMMUNO SENSORS”

    Nobuo Honda, Shuichi Shoji, Jun Mizuno

    TRANSDUCERS’2003     1132 - 1135  2003年06月

    DOI

  • “DESIGN AND FABRICATION OF MULTI-METAL ELECTRODES IMPLANTED PDMS STRUCTURES FOR MICRO FLOW DEVICES USING 3-D ASSEMBLY”

    M.Ishizuka, S.Shoji, J.Mizuno

    TRANSDUCERS’2003     999 - 1002  2003年06月

    DOI

  • 透明基板の接合方法及びそれを用いたソーティングシステム

      特願2003-280503  2003年

  • マイクロスイッチ

      特開2002-084567  2002年

  • 接点

      特開2002-157258  2002年

  • マイクロシステム

      特願2002-319577  2002年

  • 微小開口膜、及び生体分子間相互作用解析装置とその解析方法

      特願2002-326217  2002年

  • 温度ヒューズ

      特開2001-52582  2001年

  • 温度ヒューズ

      特開2001-210207  2001年

  • パッケージの製造方法

      特開2001-310773  2001年

  • 配線基板の製造方法

      特開2001-310775  2001年

  • アクチュエータ及びスイッチ

      特開2001-250915  2001年

  • 配線基板の製造方法

      特開2001-287830  2001年

  • プロービング製造方法

      特開2001-316047  2001年

  • 配線基板の製造方法

      PCTJP0210378  2001年

  • 配線基板の製造方法

      特開2001-310774  2001年

  • 配線基板の製造方法

      特開2001-287829  2001年

  • 静電容量型マイクロフローセンサの製造方法

      特開2000-35437  2000年

  • 可変噴孔型燃料噴射ノズル

      特開2000-186651  2000年

  • 可変噴孔型燃料噴射ノズル

      特開2000-145587  2000年

  • 可変噴孔型燃料噴射ノズル

      特開2000-130296  2000年

  • 移動体基礎情報検出方法及び移動体基礎情報用マルチセンサ

      特開2000-81448  2000年

  • 加速度センサ

      特開2000-19198  2000年

  • “The study of Silicon Bulk Micromachined Angular Acceleration Sensor”

    Japan Society of Automotive Engineers Review   Vol. 21, No.1  2000年

    DOI

  • “A Silicon Bulk Micromachined Crash Detection Sensor with Simultaneous Angular and Linear Sensitivity”

    Digest of Technical Papers, Transducers’99   Vol.2,pp   1302 - 1305  1999年06月

  • “容量型角加速度センサの研究”

    Digest of Technical Papers, 社団法人 自動車技術会     5 - 8  1998年11月

  • “静電容量型マイクロフローセンサの研究”

    Digest of Technical Papers, 社団法人 自動車技術会     221 - 224  1998年06月

  • “マイクロ円筒研削加工 —マイクロ研削技術の研究第1報—”

    Journal of Mechanical Engineering Laboratory     41 - 50  1998年05月

  • “The Prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow-velocity measurement”

    Oliver Berberig, Kay Nottmeyer, Jun Mizuno, Yoshitaka Kanai, Takashi Kobayashi

    Sensor & Actuators,   66 ( 1-3 ) 93 - 98  1998年04月  [査読有り]

  • “静電容量型マイクロフローセンサの研究”

    Digest of Technical Papers, 社団法人 自動車技術会     285 - 288  1997年05月

  • “Silicon Bulk Micromachined Accelerometer with Simultaneous Linear and Angular Sensitivity”

    Digest of Technical Papers, Vol.2, Transducers’97     1197 - 1200  1997年

  • “ディーゼル機関における燃料噴射量センサの研究”

    Digest of Technical Papers, 社団法人 自動車技術会     65 - 68  1996年11月

  • Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

    J Mizuno, K Nottmeyer, C Cabuz, K Minami, T Kobayashi, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   54 ( 1-3 ) 646 - 650  1996年06月  [査読有り]

     概要を見る

    Monitoring motion parameters is increasingly important in automotive applications and robotics. a silicon micromachined structure 1 cm x 2 cm in size has been designed and fabricated, which can detect linear acceleration g and angular rate omega simultaneously and independently. This is accomplished by capacitive detection of (a) the displacement due to acceleration and (b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio or the respective sensitivities to acceleration g and angular rate w can be adjusted through the dimensions and the shape of the torsion bars.

    DOI

  • “Fabrication and Characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate”

    Sensor & Actuators   54 ( 1-3 ) 646 - 650  1996年06月

    DOI

  • “A MICROSENSOR FOR SIMULTANEOUS SENSING OF LINEAR AND AVGULAR MOTION”

    Digest of Technical Papers, 29 th, International Symposium on Automotive Technology & Automation     177 - 183  1996年03月

  • “並進加速度と角加速度を検出できるシリコン容量型センサ”

    Digest of Technical Papers,社団法人 自動車技術会     77 - 80  1995年11月

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Misc

  • Fabrication of microchannel-TEM grid for in situ liquid observation of interfacial chemical reaction

    K. Miwa, H. Kuwae, K. Sakamoto, S. Shoji, J. Mizuno

    2018 International Conference on Electronics Packaging and iMAPS All Asia Conference, ICEP-IAAC 2018     284 - 287  2018年06月  [査読有り]

     概要を見る

    We developed a novel microchannel-TEM grid that enables observation of interfacial biochemical reactions. A Y-shaped microchannel, which was sandwiched between two alumina membranes, realizes observation of interfacial reactions by lamellar flow. Reliable sealing of the microchannel was achieved by highly stable Al2O3/SU-8 bonding of 2.90 MPa at 180 °C. TEM images indicate the TEM grid has sufficient electron transparency and it was successfully fabricated without microchannel distortion. These results suggest that proposed TEM grid will become a powerful tool for revealing mechanisms of chemical reactions.

    DOI

  • 液体有機半導体を用いたフレキシブルマイクロ流体有機ELリボン

    登惇輝, 桑江博之, 小林直史, 笠原崇史, 大島寿朗, 庄子習一, 水野潤

    Symposium on Microjoining and Assembly Technology in Electronics   24th   37‐40  2018年01月  [査読有り]

    J-GLOBAL

  • 高機能木質系炭素材料に向けた真空紫外光表面処理における酸素分圧の影響

    前田 世蓮, 桑江 博之, 庄子 習一, 水野 潤

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   34   ROMBUNNO.01am2‐PS‐111  2017年10月  [査読有り]

    CiNii J-GLOBAL

  • Highly bendable transparent electrode using mesh patterned indium tin oxide for flexible electronic devices

    Kosuke Sakamoto, Hiroyuki Kuwae, Naofumi Kobayashi, Atsuki Nobori, Shuichi Shoji, Jun Mizuno

    2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017     323 - 326  2017年08月  [査読有り]

     概要を見る

    We developed a highly bendable transparent indium tin oxide (ITO) electrode with mesh pattern for flexible electronic devices. Mesh pattern reduces an effect of tensile stress and propagation of cracks when the electrode is bent. The proposed ITO electrode was fabricated on a polyethylene terephthalate by means of photolithography and wet etching. The bendability was investigated through cyclic bending test. Resistance increase rate of the mesh patterned ITO electrode after 1000 times bending was approximately 9.18 × 102 times as low as that on a plane ITO electrode. In addition, the distinct cracks were not observed on the mesh patterned ITO electrode after cyclic bending. Mesh patterned ITO electrode was applied to a liquid-based organic light-emitting diode (OLED). Even the use of the mesh patterned ITO after 100 times bending, electroluminescence emission was confirmed without obvious damages. These results indicate that the mesh patterned ITO electrode gives an impact in flexible electronic devices.

    DOI

  • 屈折率分布の制御による有機薄膜太陽電池のための光反射防止技術 (電子デバイス)

    久保田 繁, 原田 佳宜, 須藤 健成, 鹿又 健作, 有馬 ボシールアハンマド, 水野 潤, 廣瀬 文彦

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   117 ( 6 ) 5 - 7  2017年04月

    CiNii

  • グラフェン埋め込みスロット導波路の作製及び特性評価の検討

    大野翔太郎, 櫻井匠, 桑江博之, 水野潤, 松島裕一, 石川浩, 宇高勝之

    応用物理学会春季学術講演会講演予稿集(CD-ROM)   64th   ROMBUNNO.14p‐P4‐57  2017年03月

    J-GLOBAL

  • Cu-Cu direct bonding by introducing Au intermediate layer

    Hirokazu Noma, Takumi Kamibayashi, Hiroyuki Kuwae, Naoya Suzuki, Toshihisa Nonaka, Shuichi Shoji, Jun Mizuno

    2017 5TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D)     70 - 70  2017年  [査読有り]

     概要を見る

    Cu-Cu direct bonding under help of direct immersion gold (DIG) for multi-die fan-out wafer level package was demonstrated. Cu-Cu direct bonding is a critical technology for high-frequency applications. To solve challenges of conventional methods, the DIG was used. As a result, a cohesion failure was obtained in shear test.

    DOI

  • A study on low temperature SAM modified POM direct bonding affected by VUV/O-3 irradiation

    Weixin Fu, Bo Ma, Hiroyuki Kuwae, Shuichi Shoji, Jun Mizuno

    2017 5TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D)     69 - 69  2017年  [査読有り]

     概要を見る

    A direct bonding of polyoxymethelene (POM) was feasible at 100 degrees C by using self-assembled monolayers (SAM) as surface modification method. (3-Aminopropyl) triethoxysilane (APTES) and (3-Glycidyloxypropyl) trimethoxysilane (GOPTS) were applied in our work. Surface modification carried out with different VUV/O-3 irradiation conditions showed different bonding strength. In addition, the bonding condition with highest strength had an average strength of 0.37 MPa. This technology was expected to be used in packaging for micro/nano electromechanical systems (MEMS/NMES), such as bio-/medical devices.

    DOI

  • Low Temperature Direct Bonding of Polyoxymethylene (POM) through Self Assembly Monolayer (SAM)

    Weixin Fu, Hiroyuki Kuwae, Bo Ma, Shuichi Shoji, Jun Mizuno

    2017 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP)     167 - 170  2017年  [査読有り]

     概要を見る

    Direct bonding of polyoxymethylene (POM) at 100 degrees C was feasible using self-assembly monolayers (SAM). The POM substrates were first activated by vacuum ultraviolet irradiation in presence of oxygen gas (VUV/O-3) and then modified with SAM: (3-Aminopropyl) triethoxysilane (APTES) and (3-Glycidyloxypropyl) trimethoxysilane (GOPTS), respectively. Fourier transform infrared spectroscopy showed that both APTES and GOPTS modifications were successful. The bonding reached an average bonding strength of 0.37 MPa, and bulk fracture was observed after the debonding test. Surface observation results showed VUV activation process time played an important role in bonding. This technology is expected to be applied in future bio-inert electron devices.

  • スピンコート法によるゲスト分子の面内配向制御

    小簑剛, 桑江博之, 岡田愛姫子, FU Weixin, 水野潤, RIBIERRE Jean‐Charles, RIBIERRE Jean‐Charles, 興雄司, 興雄司, 安達千波矢, 安達千波矢, 安達千波矢

    分子科学討論会講演プログラム&要旨(Web)   11th   ROMBUNNO.4C01 (WEB ONLY)  2017年

    J-GLOBAL

  • 低分子有機半導体接合を用いた新規有機EL作製技術

    金田達志, 桑江博之, 庄子習一, 安達千波矢, 水野潤

    Symposium on Microjoining and Assembly Technology in Electronics   23rd   433‐436  2017年01月  [査読有り]

    J-GLOBAL

  • ナノテクスチャと高屈折率ガラスを応用した有機薄膜太陽電池の光学設計に関する研究 (レーザ・量子エレクトロニクス)

    久保田 繁, 原田 佳宜, 須藤 健成, 鹿又 健作, 有馬 ボシール アハンマド, 水野 潤, 廣瀬 文彦

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   116 ( 358 ) 93 - 95  2016年12月

    CiNii

  • 生体親和性エレクトロニクス実装のための低温大気圧接合技術

    重藤 暁津, 付 偉欣, 水野 潤, 庄子 習一

    マイクロエレクトロニクスシンポジウム論文集   26   251 - 254  2016年09月

    CiNii

  • モスアイと多層干渉膜を用いた複合反射防止構造による有機太陽電池の性能向上 (電子デバイス)

    原田 佳宜, 久保田 繁, 須藤 健成, 鹿又 健作, 有馬 ボシールアハンマド, 水野 潤, 廣瀬 文彦

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   116 ( 14 ) 35 - 38  2016年04月

    CiNii

  • マイクロ流体技術のマルチカラー有機発光デバイスへの応用

    笠原崇史, 小林直史, 江面知彦, 石松亮一, 大島寿郎, 津脇美帆, 桑江博之, 今任稔彦, 庄子習一, 安達千波矢, 水野潤

    応用物理学会春季学術講演会講演予稿集(CD-ROM)   63rd   ROMBUNNO.22A-W351-6  2016年03月

    J-GLOBAL

  • 橋架け構造により高い擦り耐性を実現するガラスナノピラー構造の作製

    須藤健成, 岡田愛姫子, 桑江博之, 高山公介, 庄子習一, 水野潤

    Symp Microjoining Assem Technol Electron   22nd   277 - 280  2016年02月  [査読有り]

    J-GLOBAL

  • 有機薄膜太陽電池の光学設計に関する研究

    久保田繁, 原田 佳宜, 須藤 健成, 鹿又健作, 有馬ボシールアハンマド, 水野潤, 廣瀬文彦

    電子情報通信学会技術研究報告   116 ( 356 ) 93 - 95  2016年

    速報,短報,研究ノート等(学術雑誌)  

  • 金属薄膜を用いた異種材料同時エッチングによる極微細ガラス構造の作製手法

    須藤 健成, 桑江 博之, 岡田 愛姫子, 笠原 崇史, 庄子 習一, 水野 潤, 高山 公介, 海田 由里子

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   32   1 - 4  2015年10月  [査読有り]

    CiNii J-GLOBAL

  • 電流励起有機半導体レーザー光源に向けた高電流密度・高発光効率同時実現のためのNano-OLEDsの作製

    桑江 博之, 新田 篤志, 笠原 崇史, 吉田 功, 庄子 習一, 安達 千波矢, 水野 潤

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   32   1 - 4  2015年10月  [査読有り]

    CiNii J-GLOBAL

  • ナノ微細構造OLEDを用いたSinglet‐Polaron Annihilationの抑制

    新田篤志, 桑江博之, 吉田巧, 井上棟智, 松島敏則, 水野潤, 安達千波矢

    応用物理学会春季学術講演会講演予稿集(CD-ROM)   62nd   ROMBUNNO.11P-D3-2  2015年02月

    J-GLOBAL

  • 有機太陽電池用反射防止膜の最適設計の高速化

    辻岡壮季, 久保田繁, 有馬 ボシールアハンマド, 水野潤, 廣瀬文彦

    電子情報通信学会技術研究報告   115 ( 5 ) 25 - 29  2015年

    速報,短報,研究ノート等(学術雑誌)  

  • 有機薄膜太陽電池の発電性能の安定化

    原田佳宜, 永瀬拓人, 鹿又健作, 有馬ボシールアハンマド, 水野潤, 久保田 繁, 廣瀬文彦

    電子情報通信学会技術研究報告   115 ( 5 ) 11 - 14  2015年

    速報,短報,研究ノート等(学術雑誌)  

  • Light trapping of organic solar cells by nanotextured surfaces

    Shigeru Kubota, Kensaku Kanomata, Bashir Ahmmad, Jun Mizuno, Fumihiko Hirose

    2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IAAC)     428 - 431  2015年

     概要を見る

    This work proposes hybrid antireflection (AR) structure that integrates moth eye texturing and multi-layer interference coating for application to organic solar cells (OSCs). We conduct nearly global optimization of the geometric parameters (i.e., the period and height of moth eye array and the thicknesses of interference layers) for the hybrid AR system. In the optimization algorithm, the simple grid search method is combined with the Hooke and Jeeves pattern search method to accelerate the search process. By using optical simulations based on the finite-difference time-domain method, we show that the proposed AR system can enhance the short-circuit current density of P3HT: PCBM-based OSCs by around 10%. The design concept of hybrid AR structure is useful for broadband light trapping of OSCs.

    DOI

  • ナノインプリントリソグラフィを用いたナノチャネルFIELO法により作製されたGaNテンプレートの2次元歪みマッピング (レーザ・量子エレクトロニクス)

    南部 優賢, 山口 敦史, 後藤 裕輝, 砂川 晴夫, 松枝 敏晴, 岡田 愛姫子, 篠原 秀敏, 後藤 博史, 水野 潤, 碓井 彰

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   114 ( 338 ) 33 - 38  2014年11月

     概要を見る

    白色LEDにおいて大電流領域で効率が低下する現象(Droop現象)を抑制する1つの手法として,下地のGaN膜(基板)の高品質化が提案されている.このような高品質GaN膜を低コストに実現する方法として,ナノチャネルファセット形成ELO (nano-FIELO)法が開発されている.本研究では,このnano-FIELO GaN膜の品質評価の1つとして,極低温顕微反射分光法を用いて,歪みの2次元マッピング測定を行った.この方法では,反射スペクトルから得られる励起子エネルギーが歪みに対して敏感にシフトすることを利用して,0.01%程度の微小歪みまでミクロンスケールの空間分解能で測定することが可能である.この歪みマッピングにより,nano-FIELO GaN膜ではミクロンスケールの歪み空間分布が生じ得ることがわかった.そして,この歪み分布はファセットの合体に起因しており,選択成長マスクのパターン形状によって抑制可能であることがわかった.

    CiNii

  • マイクロ流体有機発光素子の作製と評価

    笠原 崇史, 津脇 美帆, 松波 成行, 江面 知彦, 大島 寿郎, 庄子 習一, 安達 千波矢, 水野 潤

    マイクロエレクトロニクスシンポジウム論文集   24   247 - 250  2014年09月

    CiNii

  • FDTD法による有機太陽電池用ハイブリッド反射防止構造の光学解析 (電子部品・材料)

    久保田 繁, 鹿又 健作, 有馬 ボシールアハンマド, 水野 潤, 廣瀬 文彦

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   114 ( 202 ) 55 - 57  2014年09月

     概要を見る

    本研究では,有機薄膜太陽電池のための,モスアイ構造と多層干渉膜を組み合わせたハイブリッド反射防止構造の検討を行う.有限差分時間領域法(FDTD法)による光学シミュレーションを用いた,ハイブリッド反射防止構造の最適化アルゴリズムを構築し,幾何学形状の最適化を行った.提案するアルゴリズムは2段階で構成されており,第1段階でモスアイ形状を最適化した後,第2段階で,第1段階の解を利用して,ハイブリッド構造全体の最適化を効率的に行う.最適化されたハイブリッド反射防止構造をP3HT:PCBM型有機太陽電池に導入することで,短絡電流密度が約10%増加するという結果が得られた.

    CiNii

  • CNT含有シリコンスロット導波路の作製と非線形光学特性 (レーザ・量子エレクトロニクス)

    山田 佐代子, 福田 晃士, 桑江 博之, 水野 潤, 高島 正, 大野 翔太郎, 松島 裕一, 石川 浩, 宇高 勝之

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   114 ( 98 ) 7 - 10  2014年06月

     概要を見る

    単層カーボンナノチューブ(carbon nanotube, CNT)は通信波長帯において非線形光学効果を有するため、次世代光通信へ応用する材料として注目されている.我々は、この材料を光デバイスへの応用に適した状態にするために分散・微細化処理を行い、高い光閉じ込め効果が得られるシリコンを用いたスロット導波路のスロット部に埋め込むことで、CNT含有シリコンスロット導波路を作製した.そして、その光学特性生を評価した結果、基本的な可飽和吸収効果を確認することができた.

    CiNii

  • C-13-10 低温金属接合技術を使った貼り合せ型有機ELディスプレイ(C-13.有機エレクトロニクス,一般セッション)

    沈 昌勲, 山田 晋也, 金 丞謙, 笠原 崇史, 江面 知彦, 水野 潤, 服部 励治, 安達 千波矢

    電子情報通信学会総合大会講演論文集   2014 ( 2 ) 127 - 127  2014年03月

    CiNii

  • CI-2-8 マイクロフルイディックエンジニアリングとバイオセンサーへの展開(CI-2.マイクロ・ナノフォトニクス集積および実装技術とその展開,ソサイエティ企画)

    笠原 崇史, 江面 知彦, 松波 成行, 大島 寿郎, 庄子 習一, 安達 千波矢, 水野 潤

    電子情報通信学会総合大会講演論文集   2014 ( 1 ) "SS - 22"-"SS-23"  2014年03月

    CiNii

  • ピコピペットを用いたSi細線スロット導波路へのCNT埋め込みの検討

    福田晃士, 山田佐代子, 高島正, 桑江博之, 水野潤, 松島裕一, 宇高勝之

    応用物理学会春季学術講演会講演予稿集(CD-ROM)   61st   ROMBUNNO.17A-E2-56  2014年03月

    J-GLOBAL

  • 誘導ナノ構造科学 化学的界面制御による金属ナノ粒子の単層配列形成とその高機能デバイス応用-ウエハースケールでのテラナノドット/平方インチ級配列膜形成を目指して-

    蜂巣琢磨, 水野潤, 庄子習一, 逢坂哲彌, 蜂巣琢磨, 水野潤, 庄子習一, 逢坂哲彌, 逢坂哲彌

    機能材料   34 ( 3 )  2014年

    J-GLOBAL

  • ナノインプリント技術の最新動向と展望

    水野 潤, 岡田 愛姫子, 笠原 崇史

    砥粒加工学会誌 = Journal of the Japan Society of Grinding Engineers   57 ( 5 ) 279 - 282  2013年05月

    CiNii

  • Study of High Quality GaN Template by Nano-channel FIELO Using UV Nanoimprint (電子デバイス)

    水野 潤, 岡田 愛姫子, 庄子 習一, 山口 敦史, 後藤 裕輝, 砂川 晴夫, 松枝 敏晴, 篠原 秀敏, 西原 浩巳, 後藤 博史, 碓井 彰

    電子情報通信学会技術研究報告 : 信学技報   113 ( 9 ) 27 - 29  2013年04月

     概要を見る

    UVナノインプリント技術によって形成するナノチャンネルFIELO法を提案し、サファイア基板上のGaN結晶において、膜厚20um以下で5×10^7/cm^2以下の転位密度を実現できることを確認した。

    CiNii

  • ナノインプリント法による微細転写成形 (特集 プラスチック微細転写成形)

    水野 潤, 岡田 愛姫子, 笠原 崇史

    成形加工 = Journal of the Japan Society of Polymer Processing : プラスチック整形加工学会誌   25 ( 4 ) 161 - 164  2013年04月

    CiNii

  • 鉄白金ナノ粒子の単層規則配列形成に向けた塗布成膜条件の最適化

    蜂巣琢磨, 四反田卓, 相川健一郎, 藤平誉樹, 杉山敦史, 水野潤, 水野潤, 庄子習一, 庄子習一, 逢坂哲彌, 逢坂哲彌, 山根明, 坂脇彰, 茂智雄

    電子情報通信学会技術研究報告   113 ( 297(MR2013 19-25) )  2013年

    J-GLOBAL

  • 基板上におけるFePtナノ粒子の規則配列形成及び配列方向制御

    四反田卓, 相川健一郎, 蜂巣琢磨, 杉山敦史, 水野潤, 庄子習一, 逢坂哲彌, 逢坂哲彌

    電気化学秋季大会講演要旨集   2013  2013年

    J-GLOBAL

  • Functional SU-8-PET Composite Microchip Including Au Microdot Array Fabricated by Low Temperature Polymer Bonding

    R. Yamamoto, K. Sueyoshi, K. Otsuka, T. Kasahara, A. Nakahara, D. H. Yoon, J. Mizuno, T. Sekiguchi, S. Shoji

    2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013)     418 - 421  2013年  [査読有り]

     概要を見る

    Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1 mu mx1 mu mx0.5 mu m dots with 2 mu m pitch in area of 50 mu mx5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a PET film by low temperature silane coupling bonding (140 degrees C, 1.5MPa, 5min). The proposed microchip is fabricated successfully without leakage and is applicable as a microchip electrophoresis.

    DOI

  • 三次元LSIに向けたはんだと接着剤のハイブリッド接合技術と表面処理技術

    仁村 将次, 佐久間 克幸, 庄子 習一, 水野 潤

    電子情報通信学会論文誌. C, エレクトロニクス = The transactions of the Institute of Electronics, Information and Communication Engineers. C   95 ( 11 ) 296 - 303  2012年11月

     概要を見る

    三次元LSIでは,従来の二次元のLSIに比べてチップのはんだバンプはサイズが小さくかつピッチが狭くなるため,バンプ接合後のチップ間隔は狭くなる.そのため,バンプ接合後に樹脂を充てんする従来の工法では,ボイドフリーで樹脂を充てんすることが困難になる.そこで,本研究では,約4μmのチップ間のすき間をボイドフリーで封止する工法として,はんだバンプの周囲にあらかじめ封止用の接着樹脂を塗布し,バンプ接合と樹脂封止を同時に実現する新しい接合方法の有効性を明らかとした.また,そのプロセスでははんだバンプをフラックスレスで接合するため,数種類の表面処理技術についても検討した結果,水素プラズマ処理がバンプ表面の有機物除去及び酸化膜の還元の双方に有効な手段であり,良好な接合結果が得られることを明らかとした.

    CiNii

  • チオール末端有機分子修飾基板上でのFePtナノ粒子の高密度配列形成

    佐藤亘, 蜂巣琢磨, 蜂巣琢磨, 杉山敦史, 水野潤, 庄子習一, 庄子習一, 逢坂哲彌, 逢坂哲彌, 逢坂哲彌

    表面技術協会講演大会講演要旨集   124th  2011年

    J-GLOBAL

  • ビットパターンメディアへの適用に向けたFePtナノ粒子の規則配列化

    佐藤亘, 蜂巣琢磨, 杉山敦史, 水野潤, 庄子習一, 逢坂哲彌

    電子情報通信学会技術研究報告   111 ( 307(MR2011 19-24) )  2011年

    J-GLOBAL

  • NEXAFS and XPS studies of VUV/O3 treated aromatic polyurea for high-speed electrophoresis microchips

    H. Shinohara, A. Nakahara, S. Shoji, J. Mizuno, Y. Takahashi, F. Kitagawa, K. Otsuka, O. Ohara

    NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems     1267 - 1271  2011年  [査読有り]

     概要を見る

    This research studies on VUV/O3-treated aromatic polyurea film from near-edge X-ray absorption fine structure (NEXAFS) and X-ray photoelectron spectroscopy (XPS) spectra. These spectra indicate that the benzene ring was cleaved after the treatment, and carboxyl and hydroxyl groups were formed at the cleaved sites. The VUV/O3-treated polyurea was applied to polymethylmethacrylate (PMMA) microchip for microchip electrophoresis (MCE) of bovine serum albumin (BSA). Fast electroosmotic mobility of 4.6×10 4 cm2V-1s-1 was realized as well as reduction of the BSA adhesion. This functional surface is useful for high speed MCE analysis. © 2011 IEEE.

    DOI

  • 幾何学的構造による化学的合成FePtナノ粒子の均一配列制御

    蜂巣琢磨, 佐藤亘, 石塚修吾, 杉山敦史, 水野潤, 逢坂哲彌

    日本磁気学会学術講演概要集   34th  2010年

    J-GLOBAL

  • シリカ薄膜内への化学的合成FePtナノ粒子の均一充填処理

    四元孝洋, 石塚修吾, 蜂巣琢磨, 杉山敦史, 水野潤, 庄子習一, 庄子習一, 逢坂哲彌, 逢坂哲彌

    表面技術協会講演大会講演要旨集   119th  2009年

    J-GLOBAL

  • Fabrication of On-Chip Fuel Cells on Polymer Substrates

    Satoshi Tominaka, Hiroshi Nishizeko, Hidetoshi Shinohara, Jun Mizuno, Tetsuya Osaka

    PROTON EXCHANGE MEMBRANE FUEL CELLS 9   25 ( 1 ) 1961 - 1969  2009年

     概要を見る

    Here we report fabrication of tiny on-chip fuel cells on polymer films. Since on-chip cells which we have so far fabricated on silicon substrates through a series of microfabrication procedures are of a simple microchannel-based design, their fabrication on a polymer substrate by molding is attractive in terms of the rapid fabrication and of the inexpensive fabrication procedures and materials. To do so, a nickel mold was first prepared by electroplating from the conventional silicon-based cell, i.e., a master, and then the cell was replicated on cycloolefin polymer films by hot embossing. The microchannel thus replicated on the polymer film was confirmed to be almost identical to the silicon master by observation with a confocal microscope. Finally, Au current collectors sufficiently adhesive to the polymer were successfully deposited after the surface modification by an oxygen plasma treatment.

    DOI

  • Polymer microchip for electrophoresis-mass spectrometry fabricated by hot embossing and low temperature direct bonding

    T. Suzuki, F. Kitagawa, H. Shinohara, J. Mizuno, K. Otsuka, S. Shoji

    TRANSDUCERS and EUROSENSORS \\'07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems     1617 - 1620  2007年  [査読有り]

    DOI

▼全件表示

受賞

  • 精密工学会賞

    1997年10月  

共同研究・競争的資金等の研究課題

  • 焼結におけるサブミクロン/ナノ領域の3次元気孔構造発展

    科学研究費助成事業(東京工業大学)  科学研究費助成事業(挑戦的萌芽研究)

  • 3次元ナノポーラス構造を利用した低温焼結型微細接合技術の確立

    科学研究費助成事業(大阪大学)  科学研究費助成事業(基盤研究(B))

  • ナノインプリントとナノメッキを融合した微小デバイス一体型積層基板に関する研究

    科学研究費助成事業(早稲田大学)  科学研究費助成事業(基盤研究(C))

  • 生体一分子リアルタイム機能解析のためのマイクロ流体システムの構築

    科学研究費助成事業(早稲田大学)  科学研究費助成事業(基盤研究(A))

  • 電気化学デバイス工学の確立と深化

    科学研究費助成事業(早稲田大学)  科学研究費助成事業(特別推進研究)

  • 医療・バイオへの応用を目指したポリ尿素膜親水化処理に関する研究

    科学研究費助成事業(早稲田大学)  科学研究費助成事業(基盤研究(C))

  • マイクロフルイディックエンジニアリングの深化と生体分子高感度定量計測への展開

    科学研究費助成事業(早稲田大学)  科学研究費助成事業(基盤研究(S))

  • マイクロハイパフォーマンス液体クロマトグラフィーの研究

  • マイクロ電気泳動チップの研究

  • 血液評価チップの試作研究

  • 3次元微細加工技術の研究

  • ナノインプリント技術の基礎研究

  • ナノインプリントを使ったパターンドメディアの研究

▼全件表示

 

現在担当している科目

  • MEMS

    基幹理工学部

    2021年   春学期

  • MEMS

    大学院基幹理工学研究科

    2021年   春学期

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    大学院先進理工学研究科

    2021年   春学期

 

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    下記に関する記事の掲載rナノインプリント 早稲田大学が取組み強化