Updated on 2022/05/25

写真a

 
SHOJI, Shuichi
 
Affiliation
Faculty of Science and Engineering, School of Fundamental Science and Engineering
Job title
Professor
Profile
Shuichi Shoji was born in Miyagi, Japan in 1956. He received his BS, MS and PhD. degree in electronic engineering from Tohoku University, Sendai, Miyagi, Japan in 1979, 1981 and 1984 respectively. His interest was chemical micro sensors based on Si semiconductor device technology and he developed tens micron tip size Ion Sensitive Field Effect Transistor (ISFET) for detecting biological cell level ion concentrations. He had been an assistant professor in Faculty of Engineering of Tohoku University from 1984. He developed a small sized passive flow cell for continuous blood gas analysis using Si micro sensors. He also fabricated pressure micro sensors and micro voltage detector including simple signal amplified integrated circuits by Si IC technologies. In the middle of 1980’s, he developed micro flow devices, microvalves and micropumps, using Si micromachining technologies and applied the microvalves for a micro blood gas analysis system. He was a researcher of the University of Neuchatel, Switzerland from 1990 to 1991 and a visiting scientist at Massachusetts Institute of Technology in 1991. During his stay in Neuchatel, he was involved in the Swiss national research program on Micro Total Analysis Systems. He was an associate professor of Tohoku University from 1992. In 1994 he moved to Faculty of Science and Engineering of Waseda University as an associate professor. His main interests were micro flow devices for chemical and biochemical applications and fabrications of 3D microstructures. From 1997 he is a professor of Waseda University. He was conference general Co-chairs of IEEE Micro Electromechanical Systems: MEMS in 1997 and Micro Total Analysis Systems: MicroTAS in 2002. He is currently a professor of Department of Electronic & Photonic Systems, and Major in Nano-science and Nano-engineering, Waseda University. He was an international stirring committee member of International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers from 2009 to 2015, a Program Vice-Chair (Asia region) for Transducers’2011 and Transducers' 2015 which were held in Beijing and in Alasca and a Program Chair for Transducers'2017 in Kaohsiung. He was a president of Sensors & Micromachines Society , the Institute of Electrical Engineering of Japan from 2012 to 2014. His current interests are fabrications of 3D micro/nano structures of Si, Glass, polymers etc. and integration of these structures for functional systems. Main applications of these technologies are chemical/biochemical and medical applications. He developed micro flow devices and systems for singles cell level detection and analysis. He is one of the frontiers of MEMS and MicroTAS, specially a reading researcher of micro flow devices and systems.

Concurrent Post

  • Affiliated organization   Global Education Center

  • Faculty of Science and Engineering   Graduate School of Advanced Science and Engineering

  • Faculty of Science and Engineering   Graduate School of Fundamental Science and Engineering

Research Institute

  • 2020
    -
    2022

    理工学術院総合研究所   兼任研究員

  • 2017
    -
    2021

    ナノテクノロジー研究所   プロジェクト研究所所長

Degree

  • 東北大学   工学博士

Professional Memberships

  •  
     
     

    CHEMINAS

  •  
     
     

    応用物理学会

  •  
     
     

    日本ME学会

  •  
     
     

    日本機械学会

  •  
     
     

    IEEE

  •  
     
     

    電気学会

  •  
     
     

    電子情報通信学会

▼display all

 

Research Areas

  • Nano/micro-systems

Research Interests

  • Microsensor, MEMS, MicroTAS

Papers

  • Controlling Microdroplet Inner Rotation by Parallel Carrier Flow of Sesame and Silicone Oils

    Hibiki Yoshimura, Daiki Tanaka, Masahiro Furuya, Tetsushi Sekiguchi, Shuichi Shoji

    Micromachines 2022   13 ( 9 ) 1 - 7  2021.12  [Refereed]

  • Efficient Generation of Microdroplets Using Tail Breakup Induced with Multi-Branch Channels

    Daiki Tanaka, Satsuki Kajiya, Seito Shijo, Dong Hyun Yoon, Masahiro Furuya, Yoshito Nozaki, Hiroyuki Fujita, Tetsushi Sekiguchi, Shuichi Shoji

    Molecules 2021   26 ( 12 ) 3707 - 3707  2021.06  [Refereed]

    Authorship:Last author

     View Summary

    In recent years, research on the application of microdroplets in the fields of biotechnology and chemistry has made remarkable progress, but the technology for the stable generation of single-micrometer-scale microdroplets has not yet been established. In this paper, we developed an efficient and stable single-micrometer-scale droplet generation device based on the fragmentation of droplet tails, called “tail thread mode”, that appears under moderate flow conditions. This method can efficiently encapsulate microbeads that mimic cells and chemical products in passively generated single-micrometer-scale microdroplets. The device has a simple 2D structure; a T-junction is used for droplet generation; and in the downstream, multi-branch channels are designed for droplet deformation into the tail. Several 1–2 µm droplets were successfully produced by the tail’s fragmentation; this continuous splitting was induced by the branch channels. We examined a wide range of experimental conditions and found the optimal flow rate condition can be reduced to one-tenth compared to the conventional tip-streaming method. A mold was fabricated by simple soft lithography, and a polydimethylsiloxane (PDMS) device was fabricated using the mold. Based on the 15 patterns of experimental conditions and the results, the key factors for the generation of microdroplets in this device were examined. In the most efficient condition, 61.1% of the total droplets generated were smaller than 2 μm.

    DOI

  • Validation of droplet-generation performance of a newly developed microfluidic device with a three-dimensional structure

    Yoshito Nozaki, Dong Hyun Yoon, Masahiro Furuya, Hiroyuki Fujita, Tetsushi Sekiguchi, Shuichi Shoji

    Sensors and Actuators A: Physical   ( 331 ) 112917 - 112917  2021.06  [Refereed]

    Authorship:Last author

    DOI

  • Effects of Oxygen Partial Pressure on Wood-Based Activated Carbon Treated with Vacuum Ultraviolet Light

    Nana Takahashi, Hiroyuki Kuwae, Seren Maeda, Masahiro Kawamura, Ami Tezuka, Shuichi Shoji, Jun Mizuno

    Coatings   11 ( 4 ) 411 - 411  2021.04  [Refereed]

    Authorship:Corresponding author

     View Summary

    This study uses vacuum ultraviolet (VUV) light with a wavelength of 172 nm as a surface treatment to enhance the adsorption capacity of wood-based activated carbon (AC). The AC surface treatment is performed under three O2 partial pressure conditions—5.0 × 104 Pa, where ozone (O3) effects dominate; 6.3 × 10−6 Pa, where VUV effects dominate; and 1.9 × 103 Pa for a balanced condition. For the O3-dominant condition, only graphene edge defects are etched (no aromatic carbon bonds are etched), resulting in increased surface roughness. When the VUV effects dominate, aromatic carbon bonds are cleaved, which then reacted with O2 or water adsorbed inside the pores. This increased both the number and size of the mesopores. Under the balanced conditions, the water adsorption capacity was enhanced by 45.5%, which is higher than that obtained before VUV exposure or with VUV under other conditions. This is because the surface roughness increased, as well as the pore sizes and numbers under the balanced condition. These results indicate that we can control VUV-based AC surface treatments via O2 partial pressure.

    DOI

  • Development of Microdroplet Generation Method for Organic Solvents Used in Chemical Synthesis

    S. Hattori, C. Tang, D. Tanaka, D.H. Yoon, Y. Nozaki, H. Fujita, T. Akitsu, T. Sekiguchi, S. Shoji

    Molecules   25 ( 22 ) 5360 - 5371  2020.11  [Refereed]

     View Summary

    Recently, chemical operations with microfluidic devices, especially droplet-based operations, have attracted considerable attention because they can provide an isolated small-volume reaction field. However, analysis of these operations has been limited mostly to aqueous-phase reactions in water droplets due to device material restrictions. In this study, we have successfully demonstrated droplet formation of five common organic solvents frequently used in chemical synthesis by using a simple silicon/glass-based microfluidic device. When an immiscible liquid with surfactant was used as the continuous phase, the organic solvent formed droplets similar to water-in-oil droplets in the device. In contrast to conventional microfluidic devices composed of resins, which are susceptible to swelling in organic solvents, the developed microfluidic device did not undergo swelling owing to the high chemical resistance of the constituent materials. Therefore, the device has potential applications for various chemical reactions involving organic solvents. Furthermore, this droplet generation device enabled control of droplet size by adjusting the liquid flow rate. The droplet generation method proposed in this work will contribute to the study of organic reactions in microdroplets and will be useful for evaluating scaling effects in various chemical reactions.

    DOI

  • Microdroplet Synthesis of Azo Compounds with Simple Microfluidics-Based pH Control

    D. Tanaka, S. Sawai, S. Hattori, Y. Nozaki, D.H. Yoon, H. Fujita, T. Sekiguchi, T. Akitsu, S. Shoji

    RSC Advances   2020 ( 10 ) 38900 - 38905  2020.10  [Refereed]

     View Summary

    <p>Conventional solution-phase synthesis of azo compounds is complicated by the need for precise pH and temperature control, high concentrations of pH control reagents, and by-product removal. The microdroplet synthesis method has solved these problems.</p>

    DOI

  • 電子工学を基盤とした化学・生化学研究の流れと今後

    庄子 習一

    化学とマイクロ・ナノシステム学会誌   19 ( 2 ) 35 - 39  2020.10  [Invited]

  • Low Temperature Copper-Copper Quasi-Di rect Bonding Utilizing Ultra-Thin Metal Interlayer Formation by Atomic Layer Deposition

    Ami TEZUKA, Kosuke YAMADA, Yohei Alaric KAWAI, Hiroyuki KUWAE, Syuichi SHOJI, Wataru MOMOSE, Jun MIZUNO

      9 ( 5 ) 232 - 236  2020.09  [Refereed]

  • Liquid/Solution-based Microfluidic Quantum Dots Light-Emitting Diodes for High-Colour-Purity Light Emission

    M. Kawamura, K. Kuwae, T. Kamibayashi, J. Oshima, T. Kasahara, S. Shoji, J. Mizuno

    Scientific Reports     1 - 9  2020.09  [Refereed]

  • QFP/quartz Adhesive Bonding with Surface Treatment for Physical Security of Edge Artificial Intelligence Devices

    Hiro Nodaka, Ami Tezuka, Hiroyuki Kuwae, Kosuke Yamada, Morihisa Hoga, Haruo Shimamoto, Shuichi Shoji, Jun Mizuno

    Transactions of The Japan Institute of Electronics Packaging   13 ( 0 ) E20-008-1 - E20-008-4,  2020.01  [Refereed]

    Authorship:Corresponding author

    DOI

  • Low-Residual-Stress Amorphous Film for LiTaO3/Quartz or LiNbO3/Quartz Bonding toward 5G Surface Acoustic Wave Devices

    Ami Tezuka, Hiroyuki Kuwae, Kosuke Yamada, Shuichi Shoji, Shoji Kakio, Jun Mizuno

    Transactions of The Japan Institute of Electronics Packaging   13 ( 0 ) E19-009-1 - E19-009-7  2020.01  [Refereed]

    Authorship:Corresponding author

    DOI

  • Low-Temperature Quasi-Direct Copper-Copper Bonding with a Thin Platinum Intermediate Layer Prepared by Atomic Layer Deposition

    H. Kuwae, K. Yamada, T. Kamibayashi, W. Momose, S. Shoji, J. Mizuno

    Transactions of The Japan Institute of Electronics Packaging 2020   13   E19-014-1 - E19-014-9  2020.01  [Refereed]

  • Simple and Rapid Fabrication Process of Porous Silicon Surface Using Inductively Coupled Plasma Reactive Ion Etching

    T. Sugaya, D.H. Yoon, H. Yamazaki, K. Nakanishi, T. Sekiguchi, S. Shoji

    Journal of Microelectromechanical Systems     1 - 6  2019.11  [Refereed]

    DOI

  • Integration of Horizontal and Vertical Microfluidic Modules for Core-Shell Droplet Generation and Chemical Application

    D.H. Yoon, Y. Nozaki, D. Tanaka, T. Sekiguchi, S. Shoji

    Micromachines 2019   10 ( 9 ) 613  2019.09  [Refereed]

    DOI

  • Highly flexible transparent electrodes based on mesh-patterned rigid indium tin oxide

    Kosuke Sakamoto, Hiroyuki Kuwae, Naofumi Kobayashi, Atsuki Nobori, Shuichi Shoji, Jun Mizuno

    Scientific Reports   8 ( 1 )  2018.12  [Refereed]

     View Summary

    We developed highly bendable transparent indium tin oxide (ITO) electrodes with a mesh pattern for use in flexible electronic devices. The mesh patterns lowered tensile stress and hindered propagation of cracks. Simulations using the finite element method confirmed that the mesh patterns decreased tensile stress by over 10% because of the escaped strain to the flexible film when the electrodes were bent. The proposed patterned ITO electrodes were simply fabricated by photolithography and wet etching. The resistance increase ratio of a mesh-patterned ITO electrode after bending 1000 times was at least two orders of magnitude lower than that of a planar ITO electrode. In addition, crack propagation was stopped by the mesh pattern of the patterned ITO electrode. A mesh-patterned ITO electrode was used in a liquid-based organic light-emitting diode (OLED). The OLED displayed the same current density-voltage-luminance (J-V-L) curves before and after bending 100 times. These results indicate that the developed mesh-patterned ITO electrodes are attractive for use in flexible electronic devices.

    DOI

  • Color-Tunable Microfluidic Electrogenerated Chemiluminescence Cells Using Y-Shaped Micromixer

    T. Kasahara, R. Ishimatsu, H. Kuwae, S. Shoji, J. Mizuno

    Japanese Journal of Applied Physics   57 ( 12 ) 128001-1 - 128001-4  2018.10  [Refereed]

     View Summary

    We proposed color-tunable microfluidic electrogenerated chemiluminescence (ECL) cells. A Y-shaped electro-microfluidic device, which consists of two inlet and one mixing channels, was fabricated to investigate variable multi-color emissions induced by mixing two different ECL solutions. 5,6,11,12-Tetraphenylnaphthacene (rubrene) and tetraphenyldibenzoperiflanthene (DBP)-doped rubrene solutions were used as liquid emitters. Yellow (rubrene) and red (DBP) ECL emissions were observed in the inlet channels before mixing, whereas the mixed solution exhibited orange emissions. This is because the DBP concentration was changed facilely in the mixing channel, which leads to the tunable ECL emission. The proposed device will be promising candidates for unique light-emitting applications.

    DOI

  • Size-Dependent and Property-Independent Passive Microdroplet Sorting by Droplet Transfer on Dot Rails

    D.H. Yoon, D. Tanaka, T. Sekiguchi, S. Shoji

    Micromachines   9 ( 10 )  2018.10  [Refereed]

    DOI

  • Structural Formation of Oil-in-Water (O/W) and Water-in-Oil-in-Water (W/O/W) Droplets in PDMS Device Using Protrusion Channel without Hydrophilic Surface Treatment

    D.H. Yoon, D. Tanaka, T. Sekiguchi, S. Shoji

    Micromachines 2018   9 ( 9 )  2018.09  [Refereed]

  • Structural Formation of Oil-in-Water (O/W) and Water-in-Oil-in-Water (W/O/W) Droplets in PDMS Device Using Protrusion Channel without Hydrophilic Surface Treatment

    D.H. Yoon, D. Tanaka, T. Sekiguchi, S. Shoji

    Micromachines   9 ( 9 )  2018.09  [Refereed]

    DOI

  • A wide-energy-gap naphthalene-based liquid organic semiconductor host for liquid deep-blue organic light-emitting diodes

    Naofumi Kobayashi, Hiroyuki Kuwae, Juro Oshima, Ryoichi Ishimatsu, Shuya Tashiro, Toshihiko Imato, Chihaya Adachi, Shuichi Shoji, Jun Mizuno

    Journal of Luminescence   200   19 - 23  2018.08  [Refereed]

     View Summary

    We developed a novel naphthalene derivative to function as a wide-energy-gap liquid organic semiconductor (LOS) host material for the limited range of liquid deep-blue light-emitting materials that have been developed to date. The naphthalene derivative 1-naphthaleneacetic acid 2-ethylhexyl ester (NLQ), which shows a low viscosity of 20 mPa·s at 25 °C, was synthesized as a LOS by introducing an ethylhexyl group into naphthalene. We doped 9,10-diphenylanthracene (DPA) into NLQ as a guest deep-blue dye. The highest occupied molecular orbital (HOMO) energy level of NLQ was estimated to be − 6.40 eV from photoelectron spectroscopy measurements in air. The energy gap of NLQ was estimated to be 4.08 eV from its absorption spectrum, indicating that NLQ has the widest energy gap of any such host material to date. The lowest unoccupied molecular orbital energy level of NLQ was calculated to be − 2.31 eV. Deep-blue electroluminescence emission in a liquid state was obtained by doping DPA into NLQ. Light emission could be achieved by a combination of Förster resonance energy transfer and direct recombination of trapped holes and electrons because the energy gap of DPA is straddled by the wider energy gap of NLQ.

    DOI

  • Construction of Integrated Gene Logic-Chip

    T. Masubuchi, M. Endo, R. Iizuka, A. Iguchi, D.H. Yoon, T. Sekiguchi, H. Qi, R. Iinuma, Y. Miyazono, S. Shoji, T. Funatsu, H. Sugiyama, Y. Harada, T. Ueda, H. Tadakuma

    Nature Nanotechnology Letters   2018  2018.07  [Refereed]

    DOI

  • Compensation of Surface Roughness Using an Au Intermediate Layer in a Cu Direct Bonding Process

    Hirokazu Noma, Takumi Kamibayashi, Hiroyuki Kuwae, Naoya Suzuki, Toshihisa Nonaka, Shuichi Shoji, Jun Mizuno

    Journal of Electronic Materials   2018   1 - 7  2018.06  [Refereed]

     View Summary

    Copper-copper (Cu-Cu) direct bonding assisted by direct immersion gold (DIG) was demonstrated. Cu-Cu direct bonding is a critical technology for inductively coupled memory interconnections. To solve the problems of conventional methods of Cu-Cu direct bonding, a plating process using DIG to form an intermediate layer was selected. The concept of the developed bonding process is to use deformation of DIG to compensate for the surface roughness of the Cu substrates during application of pressure and annealing. Using this method, precise surface flattening of Cu substrates is not necessary. Bonding can be achieved even in an air atmosphere. A sample bonded at a temperature of 350°C failed within the chip in a shear test. It was found that bonding can be achieved when the gold (Au) thickness is greater than the half of the surface roughness of Cu at the bonding temperature. Transmission electron microscopy-energy-dispersive x-ray spectroscopy revealed that Au diffused into Cu during bonding. The diffusion constant of Au into Cu was investigated through a numerical calculation. The obtained results showed good agreement with the literature values.

    DOI

  • Mechanical Reinforcement of Low-Concentration Alginate Fibers by Microfluidic Embedding of Multiple Cores

    Dong Hyun Yoon, Daiki Tanaka, Tetsushi Sekiguchi, Shuichi Shoji

    Macromolecular Materials and Engineering   303 ( 3 )  2018.03  [Refereed]

     View Summary

    This paper presents mechanically reinforced low-concentration alginate fibers by embedding inner cores of high-concentration alginate. 3D structures by stacking multiple polydimethylsiloxane (PDMS) layers allow the microfluidic formation and control of the isolated cores in the continuous flow. The alginate hydrogel fibers are simply spun, and the compartments, central core, surrounding cores, and outer shell layer are successfully verified. The results demonstrate the great potential for the development of complex fibrous materials, particularly for biological applications, which require specific morphology and composition of the fibers.

    DOI

  • Low-temperature poly(oxymethylene) direct bonding via self-assembled monolayer

    Weixin Fu, Bo Ma, Hiroyuki Kuwae, Shuichi Shoji, Jun Mizuno

    Japanese Journal of Applied Physics   57 ( 2 ) 02BB01-1 - 02BB01-5  2018.02  [Refereed]

     View Summary

    A direct bonding of poly(oxymethylene) (POM) was feasible at 100 °C by using self-assembled monolayer (SAM) as a surface modification method. (3-aminopropyl)triethoxysilane (APTES) and (3-glycidyloxypropyl)trimethoxysilane (GOPTS) were used in our work. X-ray photoelectron spectroscopy showed that both APTES and GOPTS modified the POM surface successfully. Bonding strength evaluation revealed that surface modification was affected by pretreatment (VUV/O3) process time. In addition, the bonding condition with highest strength had an average strength of 372 kPa. This technology is expected to be used in packaging for micro-/nano-electromechanical systems, such as biomedical devices.

    DOI

  • Fabrication of Hole-Patterned Self-Standing Curved Film Using Large-Area Spherical Soft UV Imprint Lithography

    T. Kamibayashi, H. Kuwae, S. Shoji, J. Mizuno

    Transactions of The Japan Institute of Electronics Packaging   10   E17-002-1 - E17-002-6  2017.12  [Refereed]

    DOI

  • Low-temperature direct heterogeneous bonding of polyether ether ketone and platinum

    Weixin Fu, Akitsu Shigetou, Shuichi Shoji, Jun Mizuno

    MATERIALS SCIENCE & ENGINEERING C-MATERIALS FOR BIOLOGICAL APPLICATIONS   79   860 - 865  2017.10  [Refereed]

     View Summary

    Direct heterogeneous bonding between polyether ether ketone (PEEK) and Pt was realized at the temperatures lower than 150 C-omicron. In order to create sufficient bondability to diverse materials, the surface was modified by vacuum ultraviolet (VUV) irradiation, which formed hydrate bridges. For comparison, direct bonding between surfaces atomically cleaned via Ar fast atom bombardment (FAB) was conducted in a vacuum. The VUV irradiation was found to be effective for creating an ultrathin hydrate bridge layer from the residual water molecules in the chamber. Tight bonds were formed through dehydration of the hydrate bridges by heating at 150 C-omicron, which also contributed to enhancing interdiffusion across the interface. The VUV-modified surfaces showed bondability as good as that of the FAB-treated surfaces, and the VUV-modified samples had shear strengths at the same level as those of FAB-treated surfaces. This technology will be of practical use in the packaging of lightweight, flexible biomedical devices. (C) 2017 Elsevier B.V. All rights reserved.

    DOI

  • Analysis of vinylidene fluoride-trifluoroethylene copolymer film for nonpolarized energy harvester

    Yuki Kamata, Tetsushi Sekiguchi, Takashi Nakajima, Toshio Sasaki, Yoon Dong-Hyun, Daiki Tanaka, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   56 ( 7 ) 070301-1 - 070301-3  2017.07  [Refereed]

     View Summary

    In this paper, an investigation of a vinylidene fluoride-trifluoroethylene (VDF/TrFE) copolymer film for use in a nonpolarized energy harvester is presented. The Fourier transform infrared spectroscopy and X-ray diffraction analysis of a nonpolarized VDF/TrFE copolymer film indicate that polymer crystallinity depends on film thickness. Furthermore, the growth of the polar structure (beta phase) is observed upon the reduction in the thickness. However, power generation does not exhibit a linear behavior because the generation capacity increases with the thickness. These results indicate that the film thickness for a nonpolarized harvester must be optimized to obtain the maximum output. (C) 2017 The Japan Society of Applied Physics

    DOI

  • 二重凹角構造ピラーアレイを応用した超撥水性表面の低コスト量産プロセスの開発

      137 ( 6 ) 165 - 168  2017.06  [Refereed]

    DOI

  • Low Temperature Direct Bonding between PEEK (Polyetheretherketone) and Pt via Vapor-Assisted Vacuum Ultraviolet Surface Modification

    W. Fu, A. Shigetou, S. Shoji, J. Mizuno

    Journal of Materials Science and Engineering B   7 ( 2 ) 49 - 62  2017.06  [Refereed]

    DOI

  • 橋架け構造により高い擦り耐性を実現するガラスナノピラーの作製

    桑江博之, 須藤健成, 岡田愛姫子, 高山公介, 庄子習一, 水野潤

      137 ( 3 ) 72 - 77  2017.03  [Refereed]

    DOI

  • Sub-50-nm structure patterning by combining nanoimprint lithography and anisotropic wet etching without considering original mold resolution

    Hiroyuki Kuwae, Akiko Okada, Shuichi Shoji, Jun Mizuno

    Microelectronic Engineering   169   39 - 42  2017  [Refereed]

    DOI

  • Development of an ex vivo brain lactic acid monitoring system

    Shuya Negishi, Shoto Kamada, Riichi Kajiwara, Yuji Kaneko, Dong Hyun Yoon, Tetsushi Sekiguchi, Shuichi Shoji, Hiroyuki Kudo

    IEEJ Transactions on Sensors and Micromachines   137 ( 1 ) 38 - 43  2017  [Refereed]

     View Summary

    An ex vivo brain lactic acid (LA) monitoring system for investigating brain activity at the organ level was constructed and tested in continuous LA monitoring. Our system consists of a micro-fluidic dual-analyte (LA and glucose) biosensor and a special brain chamber that is suitable for organ level experiments. The biosensor utilizes the redox reactions of osmium-wired horseradish peroxidase (Os-HRP) to detect hydrogen peroxide produced by enzyme reactions. The sensor had sufficient sensitivity (LA: ∼ 0.01 mM, glucose: ∼ 0.01 mM) and selectivity for assessment of extracellular LA. The ex vivo monitoring of brain LA was performed using the proposed system. As a result, the change in extracellular LA was successfully monitored continuously, and the change in the LA level was considered the result of metabolic activity of the sample. Our system is expected to be useful not only for ex vivo brain monitoring, but also for monitoring other organs.

    DOI

  • A high-resolution passive droplet-phase sample sorter using multi-stage droplet transfer

    D. H. Yoon, Z. Xie, D. Tanaka, T. Sekiguchi, S. Shoji

    RSC ADVANCES   7 ( 58 ) 36750 - 36754  2017  [Refereed]

     View Summary

    A fully passive volume-dependent droplet sorter is presented in this research. Repeated and multiple on-rail transfer of microdroplets in a cascade channel resulted in high resolution sorting of droplet-phase samples. Microdroplets with volumes of 0.89-3.26 nl were successfully sorted in eight steps, and a maximum sorting resolution of about 0.21 nl was obtained over three transfer stages. Line rails and dot rails employed in the cascading channels allowed volume-dependent droplet transfer, and shape recovery of the transferred droplet for the repeatable transfer, respectively. This simple device and method can be applied to droplet-based chemical or biological research.

    DOI

  • Synthesis of an azo-Mn(II) complex with mild pH control using a microfluidic device

    Daiki Tanaka, Shunsuke Sawai, Dong Hyun Yoon, Tetsushi Sekiguchi, Takashiro Akitsu, Shuichi Shoji

    RSC ADVANCES   7 ( 63 ) 39576 - 39582  2017  [Refereed]

     View Summary

    This study describes the synthesis of an azo-Mn(II) complex requiring an accurate pH control. The reaction conditions for the delicate azo-Mn(II) complex could be precisely controlled using a microfluidic device. The microfluidic method showed the following advantages over the conventional method: the concentration of the pH-control reagent was reduced (1/15), the reaction time was remarkably decreased from 4 h to less than 1 s, and the reaction temperature was lowered from 40 to 23 degrees C. Moreover, the microfluidic device suppressed the oxidation of the compound and did not require cooling to remove the heat of reaction. In addition, the conventional method uses harsh pH control, whereas the microfluidic device permits mild pH control.

    DOI

  • Application of I-structure though-glass interconnect filled with submicron gold particles to a hermetic sealing device

    Kazuya Nomura, Akiko Okada, Shuichi Shoji, Toshinori Ogashiwa, Jun Mizuno

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   26 ( 10 )  2016.10  [Refereed]

     View Summary

    We propose hermetic sealing of a glass-to-glass structure with an I-structure through-glass interconnect via (TGV) filled with submicron Au particles. The top and bottom bumps and the TGV were formed by a simple filling process with a bump-patterned dry film resist. The sealing devices consisting of two glass substrates were bonded via Au interlayers. Vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O-3) pretreatment was used for low-temperature Au-Au bonding at 200 degrees C. The bonded samples showed He leakage rates of less than 1.3 x 10(-9) Pa m(3) s(-1). The cross-sectional scanning electron microscope images of the fabricated I-structure TGV showed perfect adhesion between the I-structure TGV and glass substrate. These results indicate that the proposed I-structure TGV is suitable for hermetic sealing devices.

    DOI

  • Fabrication of bottom-emitting organic light-emitting diode panels interconnected with encapsulation substrate by Au-Au flip-chip bonding and capillary-driven filling process

    S. Yamada, C. -H. Shim, T. Edura, A. Okada, C. Adachi, S. Shoji, J. Mizuno

    MICROELECTRONIC ENGINEERING   161   94 - 97  2016.08  [Refereed]

     View Summary

    We present fabrication and testing of bottom-emitting organic light-emitting diode (OLED) panels based on flip chip assembly and non-destructive scanning. In this method, the OLED and electric circuits are fabricated on separate substrates and interconnected by low temperature assembly to create a high-performance bottom emitting OLED including other functions such as thin-film transistor (TFT) circuits. The low temperature assembly process consists of two steps. First, an OLED substrate and encapsulation glass with circuits are bonded at 100 degrees C via Au-Au bond. Encapsulation glass is utilized for the functional substrate with circuits. Next, the bonded panel is sealed by capillary underfill within and by applying and curing seal materials to the panel edge. The fabricated OLED was non-destructively evaluated by scanning acoustic microscopy (SAM). The SAM image shows all phi 500 mu m Au bumps were bonded to Au pads, indicating that OLED and encapsulation substrates were assembled. Electroluminescence of the OLED was demonstrated by applying voltage. Stable current-luminance characteristics were obtained for the fabricated OLED with an operating voltage of 3.25 V. The results indicate that the proposed fabrication is available for bottom-emitting OLED controlled by TFT circuits. In future, the assembly process can be widely applied to other flexible organic electronic devices with roll assembly by altering OLED or circuits with other devices because this is a simple pressure method with low temperature, achieving encapsulation at same time. (C) 2016 Elsevier B.V. All rights reserved.

    DOI

  • Stacked Piezoelectric Energy Harvesting Device by Printing Process

    Y. Kamata, D.H. Yoon, T. Sasaki, Y. Nozaki, S. Yamaura, T. Sekiguchi, T. Nakajima, S. Shoji

    Micro & Nano Letters     1 - 4  2016.08  [Refereed]

    DOI

  • Microfluidic Stamping on Sheath Flow

    Dong Hyun Yoon, Daiki Tanaka, Tetsushi Sekiguchi, Shuichi Shoji

    SMALL   12 ( 24 ) 3224 - 3228  2016.06  [Refereed]

     View Summary

    A microfluidic stamping method to form functional shapes on a cross section in fiber-shaped flow is proposed. Microfluidic stamping and overstamping allow various cross sectional shapes on the 3D flow. The shapes can be controlled by a change in combination of structures and fluidic conditions which correspond to stamp type and stamping force.

    DOI

  • Liquid Chromatography Chip with Low-Dispersion and Low-Pressure-Drop Turn Structure Utilizing a Distribution-Controlled Pillar Array

    Muneld Isokawa, Katsuya Takatsuki, Yanting Song, Kailing Shih, Kanki Nakanishi, Zhimin Xie, Dong Hyun Yoon, Tetsushi Sekiguchi, Takashi Funatsu, Shuichi Shoji, Makoto Tsunoda

    ANALYTICAL CHEMISTRY   88 ( 12 ) 6485 - 6491  2016.06  [Refereed]

     View Summary

    To realize efficient, fast separations on pillar array columns with turns, a novel turn with low-dispersion and low-pressure-drop properties was developed. This "pillar-distribution controlled" (PDC) turn was designed as a constant-radius-turn filled with octagonal pillars that were arranged to control the linear velocity of the mobile phase in the radial direction. After the pillar positions were adjusted by computational fluid dynamics analysis, 27 mm long pillar array columns with two turns were fabricated on a 20 x 20 mm(2) silicon glass plate. The PDC turns suppressed the sample dispersion to a similar extent as the previously developed tapered turn, and the pressure drop of the newly designed turn was reduced to similar to 1/6 that of the tapered turn. Moreover, the C18-modified pillar array column with the PDC turns showed good bioanalytical applicability; five fluorescendy labeled amino acids were separated in only 24 s at a linear velocity of 7.5 mm/s. The developed turn structure offers the advantages of longer pillar array columns with more turns for the fast analysis of complex samples.

    DOI

  • Evaluation of hybrid bonding technology of single-micron pitch with planar structure for 3D interconnection

    Masaki Ohyama, Masatsugu Nimura, Jun Mizuno, Shuichi Shoji, Toshihisa Nonaka, Yoichi Shinba, Akitsu Shigetou

    MICROELECTRONICS RELIABILITY   59   134 - 139  2016.04  [Refereed]

     View Summary

    In this paper, we describe hybrid bonding technology of single-micron pitch with planar, structure for three-dimensional (3D) interconnection. Conventionally, underfill method utilizing capillary force was used after the bonding of microbump. However, the filling becomes insufficient in a gap less than 10 mu m between chips or bumps. One promising technology is the hybrid bonding technology that microbumps and an adhesive can, be simultaneously bonded. To realize a single-micron pitch hybrid bonding, we fabricated a planar structure that consists of 8 mu m-pitch Cu/Sn microbumps and a non-conductive film (NCF) by a chemical mechanical polishing (CMP) of resin. After planarization, the Cu/Sn bumps and the NCF were simultaneously bonded at 250 degrees C for 60 s. Cross-sectional scanning electron microscope (SEM) images and energy dispersive X-ray spectroscopy (EDX) images Show that the adhesive resin on the bump surface was successfully removed by the CMP. In addition, SEM images of the bonded sample show that the adhesive filled the 2.5-mu m gap between the chip and substrate. The Cu/Sn bumps were properly bonded in a corner on the chip. The proposed bonding method is expected to enable single-micron pitch interconnection for ultra-high density 3D LSI of next generation. (C) 2015 Elsevier Ltd. All rights reserved.

    DOI

  • Culture-independent method for identification of microbial enzyme-encoding genes by activity-based single-cell sequencing using a water-in-oil microdroplet platform

    Kazuki Nakamura, Ryo Iizuka, Shinro Nishi, Takao Yoshida, Yuji Hatada, Yoshihiro Takaki, Ayaka Iguchi, Dong Hyun Yoon, Tetsushi Sekiguchi, Shuichi Shoji, Takashi Funatsu

    SCIENTIFIC REPORTS   6  2016.02  [Refereed]

     View Summary

    Environmental microbes are a great source of industrially valuable enzymes with potent and unique catalytic activities. Unfortunately, the majority of microbes remain unculturable and thus are not accessible by culture-based methods. Recently, culture-independent metagenomic approaches have been successfully applied, opening access to untapped genetic resources. Here we present a methodological approach for the identification of genes that encode metabolically active enzymes in environmental microbes in a culture-independent manner. Our method is based on activity-based single-cell sequencing, which focuses on microbial cells showing specific enzymatic activities. First, at the single-cell level, environmental microbes were encapsulated in water-in-oil microdroplets with a fluorogenic substrate for the target enzyme to screen for microdroplets that contain microbially active cells. Second, the microbial cells were recovered and subjected to whole genome amplification. Finally, the amplified genomes were sequenced to identify the genes encoding target enzymes. Employing this method, we successfully identified 14 novel beta-glucosidase genes from uncultured bacterial cells in marine samples. Our method contributes to the screening and identification of genes encoding industrially valuable enzymes.

    DOI

  • Retention and Bandwidth Predictions by Fast Gradient Elution Chromatography Using a Pillar Array Column

    Yanting Song, Katsuya Takatsuki, Tetsushi Sekiguchi, Takashi Funatsu, Shuichi Shoji, Makoto Tsunoda

    CHROMATOGRAPHY   37 ( 3 ) 111 - 116  2016  [Refereed]

     View Summary

    Previously, we have developed a gradient elution system for pillar array columns, which achieved faster separation than isocratic elution. In this study, we validated gradient elution in microchip liquid chromatography (LC) and investigated the retention and bandwidth predictions of fluorescently labeled aliphatic amines in fast gradient elution chromatography using semi-empirical retention models. The retention times and peak widths under different gradient elution programs were predicted by three solvent strength models and compared with the experimental results. The relative errors of prediction for the retention times and peak widths were below 14 % and 12 %, respectively. The results showed that the solvent strength models could be utilized for predicting the retention times and peak widths under gradient elution in the microchip LC system and that the gradient elution program for pillar array columns worked efficiently. The prediction by the retention model promises to be a potential tool for essential compound identification in biological samples.

    DOI

  • Microfluidic synthesis of chiral salen Mn(II) and Co(II) complexes containing lysozyme

    Daiki Tanaka, Wataru Kawakubo, Erika Tsuda, Yuya Mitsumoto, Dong Hyun Yoon, Tetsushi Sekiguchi, Takashiro Akitsu, Shuichi Shoji

    RSC ADVANCES   6 ( 85 ) 81862 - 81868  2016  [Refereed]

     View Summary

    Efficient microfluidic synthesis of chiral salen Mn(II) and Co(II) complexes containing lysozyme was achieved. The reaction conditions for the delicate protein were controlled precisely with a separation barrier in the microfluidic device. The microfluidic method has the following advantages over the conventional method: a remarkable reduction in the reaction time from 4.5 h to less than 1 s for the synthesis of Mn(II) and Co(II) complexes, a reduction in the reaction temperature from 40 to 23 degrees C, and no need for an N-2 atmosphere because all the reagents are isolated from the air. A three-fold yield improvement was achieved for Mn(II) and Co(II) complexes containing lysozyme compared with conventional synthesis.

    DOI

  • Fabrication Methodology for a Hermetic Sealing Device Using Low Temperature Intrinsic-Silicon/Glass Bonding

    K. Nomura, A. Okada, S. Shoji, T. Ogashiwa, J. Mizuno

    Transactions of The Japan Institute of Electronics Packaging   8 ( 1 ) 74 - 80  2015.12  [Refereed]

    DOI

  • A Metal Bump Bonding Method Using Ag Nanoparticles as Intermediate Layer

    Weixin Fu, Masatsugu Nimura, Takashi Kasahara, Hayata Mimatsu, Akiko Okada, Shuichi Shoji, Shugo Ishizuka, Jun Mizuno

    JOURNAL OF ELECTRONIC MATERIALS   44 ( 11 ) 4646 - 4652  2015.11  [Refereed]

     View Summary

    The future development of low-temperature and low-pressure bonding technology is necessary for fine-pitch bump application. We propose a bump structure using Ag nanoparticles as an intermediate layer coated on a fine-pitch Cu pillar bump. The intermediate layer is prepared using an efficient and cost-saving squeegee-coating method followed by a 100A degrees C baking process. This bump structure can be easily flattened before the bonding process, and the low-temperature sinterability of the nanoparticles is retained. The bonding experiment was successfully performed at 250A degrees C and 39.8 MPa and the bonding strength was comparable to that achieved via other bonding technology utilizing metal particles or porous material as bump materials.

    DOI

  • Microfluidic White Organic Light-Emitting Diode Based on Integrated Patterns of Greenish-Blue and Yellow Solvent-Free Liquid Emitters

    Naofumi Kobayashi, Takashi Kasahara, Tomohiko Edura, Juro Oshima, Ryoichi Ishimatsu, Miho Tsuwaki, Toshihiko Imato, Shuichi Shoji, Jun Mizuno

    SCIENTIFIC REPORTS   5  2015.10  [Refereed]

     View Summary

    We demonstrated a novel microfluidic white organic light-emitting diode (microfluidic WOLED) based on integrated sub-100-mu m-wide microchannels. Single-mu m-thick SU-8-based microchannels, which were sandwiched between indium tin oxide (ITO) anode and cathode pairs, were fabricated by photolithography and heterogeneous bonding technologies. 1-Pyrenebutyric acid 2-ethylhexyl ester (PLQ) was used as a solvent-free greenish-blue liquid emitter, while 2,8-di-tert-butyl-5,11-bis(4-tert-butylphenyl)- 6,12-diphenyltetracene (TBRb)-doped PLQ was applied as a yellow liquid emitter. In order to form the liquid white light-emitting layer, the greenish-blue and yellow liquid emitters were alternately injected into the integrated microchannels. The fabricated electro-microfluidic device successfully exhibited white electroluminescence (EL) emission via simultaneous greenish-blue and yellow emissions under an applied voltage of 100 V. A white emission with Commission Internationale de l'Eclairage (CIE) color coordinates of (0.40, 0.42) was also obtained; the emission corresponds to warm-white light. The proposed device has potential applications in subpixels of liquid-based microdisplays and for lighting.

    DOI

  • Suppression of external quantum efficiency roll-off of nanopatterned organic-light emitting diodes at high current densities

    Hiroyuki Kuwae, Atsushi Nitta, Kou Yoshida, Takashi Kasahara, Toshinori Matsushima, Munetomo Inoue, Shuichi Shoji, Jun Mizuno, Chihaya Adachi

    JOURNAL OF APPLIED PHYSICS   118 ( 15 )  2015.10  [Refereed]

     View Summary

    We developed organic light-emitting diodes (OLEDs) with nanopatterned current flow regions using electron-beam lithography with the aim of suppressing singlet-polaron annihilation (SPA). Nanopatterns composed of lines and circles were used in the current flow regions of nano-line and nano-dot OLEDs, respectively. Excitons partially escape from the current flow regions where SPA takes place. As such, current densities where external quantum efficiencies were half of their initial values (J(0)) increased as line width and circle diameter were decreased to close to the exciton diffusion length. Circles were more efficient at enhancing exciton escape and increasing J(0) than lines. The J(0) increase in the nano-dot OLEDs containing nanopatterned circles with a diameter of 50 nm was approximately 41-fold that of a conventional OLED with a current flow region of 4 mm(2). The dependence of J(0) on the size and shape of the nanopatterns was well explained by an SPA model that considered exciton diffusion. Nanopatterning of OLEDs is a feasible method of obtaining large J(0). (C) 2015 AIP Publishing LLC.

    DOI

  • Isopentenyl pyrophosphate secreted from Zoledronate-stimulated myeloma cells, activates the chemotaxis of gamma delta T cells

    Eishi Ashihara, Tatsuya Munaka, Shinya Kimura, Saori Nakagawa, Yoko Nakagawa, Masaki Kanai, Hideyo Hirai, Hirohisa Abe, Takashi Miida, Susumu Yamato, Shuichi Shoji, Taira Maekawa

    BIOCHEMICAL AND BIOPHYSICAL RESEARCH COMMUNICATIONS   463 ( 4 ) 650 - 655  2015.08  [Refereed]

     View Summary

    gamma delta T cell receptor (TCR)-positive T cells, which control the innate immune system, display anti-tumor immunity as well as other non-immune-mediated anti-cancer effects. gamma delta T cells expanded ex vivo by nitrogen-containing bisphosphonate (N-BP) treatment can kill tumor cells. N-BP inhibits farnesyl pyrophosphate synthase in the mevalonate pathway, resulting in the accumulation of isopentenyl pyrophosphate (IPP), which is a stimulatory antigen for gamma delta T cells. We have previously observed that as they get closer, migrating gamma delta T cells increase in speed toward target multiple myeloma (MM) cells. In the present study, we investigated the gamma delta T cell chemotactic factors involving using a micro total analysis system-based microfluidic cellular analysis device. The addition of supernatant from RPMI8226 MM cells treated with the N-BP zoledronic acid (ZOL) or the addition of IPP to the device induced chemotaxis of gamma delta T cells and increased the speed of migration compared to controls. Analysis of the ZOL-treated RPMI8226 cell supernatant revealed that it contained IPP secreted in a ZOL-dose-dependent manner. These observations indicate that IPP activates the chemotaxis of gamma delta T cells toward target MM cells treated with ZOL. (C) 2015 Elsevier Inc. All rights reserved.

    DOI

  • マイクロ流体電気化学発光素子を励起光源として用いたポータブル蛍光検出デバイスの作製

    津脇美帆, 笠原崇史, 江面知彦, 大島寿郎, 國澤栄里, 石松亮一, 松波成行, 今任稔彦, 安達千波矢, 庄子習一, 水野潤

    電気学会論文誌E   135 ( 6 ) 230 - 235  2015.06

    DOI

  • Droplet-based microfluidics for high-throughput screening of a metagenomic library for isolation of microbial enzymes

    Masahito Hosokawa, Yuri Hoshino, Yohei Nishikawa, Tomotada Hirose, Dong Hyun Yoon, Tetsushi Mori, Tetsushi Sekiguchi, Shuichi Shoji, Haruko Takeyama

    BIOSENSORS & BIOELECTRONICS   67   379 - 385  2015.05  [Refereed]

     View Summary

    This paper proposes a high-throughput, function-based screening approach of a metagenomic library for isolating novel microbial enzymes by droplet-based microfluidics. We used gel microdroplets (GMDs) dispersed in oil as picoliter-volume reaction vessels for lipolytic enzyme by encapsulating cells in individual GMDs. Using this approach, we monitored the growth of individual cells encapsulated in GMDs and assessed the enzyme reaction activities at the level of an individual GMD. We then applied this method to screen lipolytic enzyme genes from the metagenomic library constructed from soil collected from a quercus serrate forest of Mount Tsukuba, Ibaraki, Japan. In the workflow presented in this study, metagenomic library clones were encapsulated in 100-pL GMDs with a fluorogenic reporter substrate. A total of 67,000 metagenomic library clones can be screened in only 24 h with reduced consumption of reagents (i.e., &lt; 10 mu L). As a result, we identified a novel lipolytic enzyme, EstT1, belonging to the EstD2 family of esterases and containing a putative signal peptide, which facilitates enzyme export and catalyzation of substrates in the periplasm. Our study demonstrates the potential of microfluidic GMDs as an efficient tool for metagenomic library screening of industrially relevant enzymes with the potential of significantly reducing the cost and time factors involved in successful practical application of microbial enzymes. (C) 2014 Elsevier B.V. All rights reserved.

    DOI

  • Formation of Polymeric Hollow Microcapsules and Microlenses Using Gas-in-Organic-in-Water Droplets

    Dong Hyun Yoon, Kenta Hasegawa, Yuji Kaneko, Takahiro Arakawa, Jeung Sang Go, Tetsushi Sekiguchi, Shuichi Shoji

    MICROMACHINES   6 ( 5 ) 622 - 633  2015.05  [Refereed]

     View Summary

    This paper presents methods for the formation of hollow microcapsules and microlenses using multiphase microdroplets. Microdroplets, which consist of a gas core and an organic phase shell, were generated at a single junction on a silicon device without surface treatment of the fluidic channels. Droplet, core and shell dimensions were controlled by varying the flow rates of each phase. When the organic solvent was released from the organic phase shell, the environmental conditions changed the shape of the solidified polymer shell to either a hollow capsule or a microlens. A uniform solvent release process produced polymeric capsules with nanoliter gas core volumes and a membrane thickness of approximately 3 mu m. Alternatively physical rearrangement of the core and shell allowed for the formation of polymeric microlenses. On-demand formation of the polymer lenses in wells and through-holes polydimethylsiloxane (PDMS) structures was achieved. Optical properties of the lenses were controlled by changing the dimension of these structures.

    DOI

  • Chemical Reaction in Microdroplets with Different Sizes Containing CdSe/ZnS Quantum Dot and Organic Dye

    Takeshi Fukuda, Tomokazu Kurabayashi, Hikari Udaka, Nayuta Funaki, Miho Suzuki, Donghyun Yoon, Asahi Nakahara, Tetsushi Sekiguchi, Shuichi Shoji

    IEICE TRANSACTIONS ON ELECTRONICS   E98C ( 2 ) 123 - 126  2015.02  [Refereed]

     View Summary

    We report a real time method to monitor the chemical reaction in microdroplets, which contain an organic dye, 5(6)-carboxynaphthofluorescein and a CdSe/ZnS quantum dot using fluorescence spectra. Especially, the relationship between the droplet size and the reaction rate of the two reagents was investigated by changing an injection speed.

    DOI

  • Multi-color microfluidic organic light-emitting diodes based on on-demand emitting layers of pyrene-based liquid organic semiconductors with fluorescent guest dopants

    Takashi Kasahara, Shigeyuki Matsunami, Tomohiko Edura, Ryoichi Ishimatsu, Juro Oshima, Miho Tsuwaki, Toshihiko Imato, Shuichi Shoji, Chihaya Adachi, Jun Mizuno

    Sensors and Actuators, B: Chemical   207 ( Part A ) 481 - 489  2015

     View Summary

    In this study, we propose on-demand multi-color microfluidic organic light-emitting diodes (microfluidic OLEDs) using fluorescent guest emitter-doped liquid organic semiconductors. We use 1-pyrenebutyric acid 2-ethylhexyl ester (PLQ) not only for a greenish-blue liquid emitter, but also for a liquid host. 5,12-Diphenyltetracene (DPT), 5,6,11,12-tetraphenyltetracene (rubrene), and tetraphenyldibenzoperiflanthene (DBP) are doped into PLQ to obtain green, yellow, and red liquid emitters, respectively. Single-micrometer-thick SU-8-based microchannels sandwiched between an indium tin oxide (ITO) anode and a 3-aminopropyltriethoxysilane (APTES)-modified ITO cathode are fabricated on a glass substrate using photolithography and heterogeneous bonding techniques, and emitting layers are formed on-demand by simply injecting liquid emitters into the target microchannels. The microfluidic OLEDs with liquid emitters successfully exhibited multi-color electroluminescence (EL) emissions. Furthermore, the maximum luminance reached 26.0 cd/m&lt
    sup&gt
    2&lt
    /sup&gt
    at 61 V for 2.5-μm-thick microfluidic OLED with PLQ, and the decreased EL luminance was recovered by replacing the degraded emitting layer with a fresh liquid emitter. We expect that on-demand multi-color EL emissions and refreshable luminance features of the proposed microfluidic OLEDs will be highly promising technologies for future long-life light-emitting device applications.

    DOI

  • Selective droplet sampling using a minimum number of horizontal pneumatic actuators in a high aspect ratio and highly flexible PDMS device

    Dong Hyun Yoon, Daisuke Wakui, Asahi Nakahara, Tetsushi Sekiguchi, Shuichi Shoji

    RSC ADVANCES   5 ( 3 ) 2070 - 2074  2015  [Refereed]

     View Summary

    This paper presents a droplet sampling device driven by horizontal pneumatic actuators. A high aspect ratio and highly flexible PDMS (polydimethylsiloxane) structure was proposed for carrying out larger number of sampling than the number of actuators. Large deformation of the actuators caused domino-deformation of parallel walls, and the deformations allowed for selective collection of target droplets. The dimensions of the PDMS structure and the ratio of resin to curing agent were optimized for efficient sampling under the low pressure applied to the actuators. Five sampling modes were achieved in the simple one-layer structure consisting of one inlet, four walls, one drain channel, and two pneumatic actuators, formed by single-step soft lithography process.

    DOI

  • Real-time monitoring of chemical reaction in microdroplet using fluorescence spectroscopy

    Takeshi Fukuda, Nayuta Funaki, Tomokazu Kurabayashi, Miho Suzuki, Dong Hyun Yoon, Asahi Nakahara, Tetsushi Sekiguchi, Shuichi Shoji

    SENSORS AND ACTUATORS B-CHEMICAL   203   536 - 542  2014.11  [Refereed]

     View Summary

    We report a novel real-time method to monitor the reaction of an organic dye, 5(6)-carboxynaphthofluorescein succinimidyl ester and a CdSe/ZnS quantum dot (QD) using fluorescence spectra of microdroplets formed in a microfluidic device. Dual fluorescence peaks (at lambda = 605 and 670 nm) were observed via a fluorescence energy transfer (FRET) process from the CdSe/ZnS QD to the organic dye; the rate of the chemical reaction of the two reagents was estimated by the ratio of the two fluorescence peaks, defined as the fluorescence intensity ratio. In addition, well-controlled microdroplets were continuously generated (with a diameter of similar to 150 mu m) in the microfluidic device and the reaction time was determined as the length from the mixing point to the sampling point using fluorescence spectroscopy. The fluorescence intensity ratio increased with increasing reaction time after mixing of the two reagents indicating that the chemical reaction was observed directly in the microdroplet. Therefore, the real-time monitoring of the chemical reaction was successfully achieved by measuring the fluorescence intensity ratio as a function of the reaction time. When compared with a conventional batch process, a fast reaction time of &lt;1 s and a high fluorescence intensity ratio was achieved in the microdroplets formed in the microfluidic device. (C) 2014 Elsevier B.V. All rights reserved.

    DOI

  • 木質系炭素材料を用いた電気二重層キャパシタ用機能性電極

    船橋翼, 庄子習一, 佐藤正倫, 北島昌夫, 梅津理恵, 水野潤

    電子情報通信学会論文誌   J97-C ( 11 ) 386 - 390  2014.11

  • 化学・バイオ・医療への応用を目的とした3次元微細加工

    庄子習一

    バイオマテリアル   32 ( 4 ) 256 - 263  2014.10

  • Fabrication and characterization of large-area flexible microfluidic organic light-emitting diode with liquid organic semiconductor

    Miho Tsuwaki, Takashi Kasahara, Tomohiko Edura, Shigeyuki Matsunami, Juro Oshima, Shuichi Shoji, Chihaya Adachi, Jun Mizuno

    SENSORS AND ACTUATORS A-PHYSICAL   216   231 - 236  2014.09  [Refereed]

     View Summary

    We propose simple and high-throughput fabrication of large-area flexible microfluidic organic light-emitting diodes (microfluidic OLEDs). Flexible electro-SU-8-microchannels with a liquid emission layer were fabricated by the following four steps: (a) screen printing for transparent electrodes, (b) novel belttransfer exposure for SU-8, (c) heterogeneous low-temperature bonding using self-assembled monolayers (SAMs), and (d) injecting a liquid emitter into the microchannels.1-Pyrenebutyric acid 2-ethylhexyl ester (PLQ), which is on of liquid organic semiconductors, was used as a liquid emitter. The liquid emitter successfully filled the flexible microchannels, and electroluminescence was obtained both in flat and curved states. The proposed microfluidic OLED is applicable for future flexible posters or displays, and can be adopted around curved surfaces. (C) 2014 Elsevier B.V. All rights reserved.

    DOI

  • Development of an electrohydrodynamic ion-drag micropump using three-dimensional carbon micromesh electrodes

    Dong Hyun Yoon, Hironobu Sato, Asahi Nakahara, Tetsushi Sekiguchi, Satoshi Konishi, Shuichi Shoji

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   24 ( 9 )  2014.09  [Refereed]

     View Summary

    An electrohydrodynamic (EHD) ion-drag micropump using three-dimensional carbon micromesh electrodes was developed. The carbon micromesh electrodes were created by the pyrolysis of SU-8 structures. The carbon electrodes and microchannel were formed on a quartz substrate, and the microchannel was sealed by an SU-8 slab structure. The pumping behaviors were evaluated using Fluorinert as a non-conductive sample solution. The maximum pressure and volume flow rate were approximately 23 Pa and 400 nL/min, respectively, under an applied voltage of 500 V.

    DOI

  • マイクロ流体有機ELデバイスの作製

    笠原崇史, 津脇美帆, 庄子習一, 水野潤

    化学工業   65 ( 9 ) 37 - 42  2014.09

  • Active microdroplet merging by hydrodynamic flow control using a pneumatic actuator-assisted pillar structure

    Dong Hyun Yoon, Afshan Jamshaid, Junichi Ito, Asahi Nakahara, Daiki Tanaka, Takashiro Akitsu, Tetsushi Sekiguchi, Shuichi Shoji

    LAB ON A CHIP   14 ( 16 ) 3050 - 3055  2014.08  [Refereed]

     View Summary

    This paper describes a microdroplet merging device that can actively control the merging of various droplets under a wide range of flow conditions, using a simple structure. The microdroplets were trapped and merged in a wide chamber divided by pillars, and their behavior was controlled by two horizontal pneumatic microactuators. Hydrodynamic flow control by the actuation was evaluated numerically, and the trapping and merging of droplets were achieved experimentally and controlled via pressure applied to the microactuators. Furthermore, two independently generated droplets were merged under four different modes, ranging from no merging to four-droplet merging, with different ratios and volumes. The pneumatic actuators allowed not only the control of the number of merged droplets, but also a wide range of applied droplet volumes. The device was fabricated simply using a single-layer PDMS (polydimethylsiloxane) structure, and the continuous merging performance operated using only hydrodynamic flow control without any surfactant. Finally, chemical synthesis of a metal complex was performed by the droplet merging method. Crystallization of the complex was visualized in real time, and the synthesis was verified by ultraviolet-visible spectroscopy.

    DOI

  • Multi-color microfluidic electrochemiluminescence cells

    Takashi Kasahara, Shigeyuki Matsunami, Tomohiko Edura, Ryoichi Ishimatsu, Juro Oshima, Miho Tsuwaki, Toshihiko Imato, Shuichi Shoji, Chihaya Adachi, Jun Mizuno

    SENSORS AND ACTUATORS A-PHYSICAL   214   225 - 229  2014.08  [Refereed]

     View Summary

    We demonstrated multi-color microfluidic electrochemiluminescence (ECL) cells. 5,6,11,12-Tetraphenylnaphthacene (rubrene), 9,10-diphenylanthracene (DPA), tetraphenyldibenzoperiflanthene (DBP)-doped rubrene, and 1,2,3,5-tetrakis(carbazol-9-yl)-4,6-dicyanobenzene (4CzIPN) dissolved in a mixed organic solvent of 1,2-dichlorobenzene and acetonitrile in the ratio of 2:1 (v/v) were used as yellow, blue, red, and green ECL solutions, respectively. Light emissions were confirmed using simple-structured ECL cells consisting of two indium tin oxide (ITO) coated glass substrates with an SU-8 spacer of thickness varying from 0.9 to 6 mu m. The SU-8-based microfluidic ECL cells were fabricated using photolithography and heterogeneous bonding techniques through the use of epoxy-and amine-terminated self-assembled monolayers. The emitting layers were formed on-demand by injecting the chosen ECL solutions into the microchannels sandwiched between ITO anode and cathode pairs. Multi-color ECL was successfully obtained at the light-emitting pixels. The microfluidic ECL cells with DBP-doped rubrene solution showed a maximum luminance of 11.6 cd/m(2) and the current efficiency of ca. 0.32 cd/A at 8V. We expect that the proposed microfluidic device will be a highly promising technology for liquid-based light-emitting applications. (C) 2014 Elsevier B.V. All rights reserved.

    DOI

  • Hybrid Au-Adhesive Bonding Using Planar Adhesive Structure for 3-D LSI

    Masatsugu Nimura, Jun Mizuno, Shuichi Shoji, Katsuyuki Sakuma, Hiroshi Ogino, Tomoyuki Enomoto, Akitsu Shigetou

    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY   4 ( 5 ) 762 - 768  2014.05  [Refereed]

     View Summary

    In this paper, we describe a hybrid bonding technology of Au microbump and adhesive using a planar adhesive structure for 3-D large-scale integration (LSI). Hybrid bonding means that both the microbump electrode and adhesive are simultaneously bonded. In 3-D LSI, the gaps between bonded chips are &lt;10 mu m because the pitch of the microbumps is decreased. Conventionally, adhesive resin is injected into the gaps by means of capillary force. However, the filling of the gaps is insufficient due to surface conditions. To address this challenge, we evaluated hybrid bonding with a planar adhesive structure fabricated by chemical-mechanical polishing. The bonding results showed that connection between the Au bumps and adhesive filling in the 6-mu m gap between bonded Si chips was achieved without readily visible void in the range of 6 mm x 6 mm. All 900 bumps were also electrically connected. The shear strength of the bonded sample was 13 MPa. Therefore, we determined that the proposed hybrid bonding technology is highly effective for 3-D LSI with fine-pitch microbumps.

    DOI

  • センサ・マイクロマシン技術のあゆみと現状

    庄子習一

    電気学会創立125周年記念特集号 巻頭言、電気学会誌3   134 ( 3 ) 127  2014.03

  • Fast and quantitative analysis of branched-chain amino acids in biological samples using a pillar array column

    Yanting Song, Katsuya Takatsuki, Muneki Isokawa, Tetsushi Sekiguchi, Jun Mizuno, Takashi Funatsu, Shuichi Shoji, Makoto Tsunoda

    ANALYTICAL AND BIOANALYTICAL CHEMISTRY   405 ( 25 ) 7993 - 7999  2013.10  [Refereed]

     View Summary

    In this study, a fast and quantitative determination method for branched-chain amino acids (BCAAs), namely leucine, isoleucine, and valine, was developed using a pillar array column. A pillar array column with low-dispersion turns was fabricated on a 20 x 20-mm(2) microchip using multistep ultraviolet photolithography and deep reactive ion etching. The BCAAs were fluorescently labeled with 4-fluoro-7-nitro-2,1,3-benzoxadiazole (NBD-F), followed by reversed-phase separation on the pillar array column. The NBD derivatives of the three BCAAs and an internal standard (6-aminocaproic acid) were separated in 100 s. The calibration curves for the NBD-BCAAs had good linearity in the range of 0.4-20 mu M, using an internal standard. The intra- and interday precisions were found to be in the ranges of 1.42-3.80 and 2.74-6.97 %, respectively. The accuracies for the NBD-BCAA were from 90.2 to 99.1 %. The method was used for the analysis of sports drink and human plasma samples. The concentrations of BCAAs determined by the developed method showed good agreements with those determined using a conventional high-performance liquid chromatography system. As BCAAs are important biomarkers of some diseases, these results showed that the developed method could be a potential diagnostic tool in clinical research.

    DOI

  • Film of lignocellulosic carbon material for self-supporting electrodes in electric double-layer capacitors

    Tsubasa Funabashi, Jun Mizuno, Masamichi Sato, Masao Kitajima, Makoto Matsuura, Shuichi Shoji

    APL MATERIALS   1 ( 3 ) 32104  2013.09  [Refereed]

     View Summary

    A novel thin, wood-based carbon material with heterogeneous pores, film of lignocellulosic carbon material (FLCM), was successfully fabricated by carbonizing softwood samples of Picea jezoensis (Jezo spruce). Simultaneous increase in the specific surface area of FLCM and its affinity for electrolyte solvents in an electric double-layer capacitor (EDLC) were achieved by the vacuum ultraviolet/ozone (VUV/O-3) treatment. This treatment increased the specific surface area of FLCM by 50% over that of original FLCM. The results obtained in this study confirmed that FLCM is an appropriate self-supporting EDLC electrode material without any warps and cracks. (C) 2013 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.

    DOI

  • Active and Precise Control of Microdroplet Division Using Horizontal Pneumatic Valves in Bifurcating Microchannel

    Dong Hyun Yoon, Junichi Ito, Tetsushi Sekiguchi, Shuichi Shoji

    MICROMACHINES   4 ( 2 ) 197 - 205  2013.06  [Refereed]

     View Summary

    This paper presents a microfluidic system for the active and precise control of microdroplet division in a micro device. Using two horizontal pneumatic valves formed at downstream of bifurcating microchannel, flow resistances of downstream channels were variably controlled. With the resistance control, volumetric ratio of downstream flows was changed and water-in-oil microdroplets were divided into two daughter droplets of different volume corresponding to the ratio. The microfluidic channels and pneumatic valves were fabricated by single-step soft lithography process of PDMS (polydimethylsiloxane) using SU-8 mold. A wide range control of the daughter droplets' volume ratio was achieved by the simple channel structure. Volumetric ratio between large and small daughter droplets are ranged from 1 to 70, and the smallest droplet volume of 14 pL was obtained. The proposed microfluidic device is applicable for precise and high throughput droplet based digital synthesis.

    DOI

  • Fabrication and performance evaluation of microfluidic organic light emitting diode

    Takashi Kasahara, Shigeyuki Matsunami, Tomohiko Edura, Juro Oshima, Chihaya Adachi, Shuichi Shoji, Jun Mizuno

    SENSORS AND ACTUATORS A-PHYSICAL   195   219 - 223  2013.06  [Refereed]

     View Summary

    In this study, we fabricated a microfluidic organic light emitting diode (OLED) and evaluated its performance. The microchip consisted of a 3 x 3 matrix array of OLED pixels in SU-8 microchannels sandwiched by indium tin oxide (ITO) anode and cathode pairs. Liquid organic semiconductors introduced into the microchannels were employed as the light emitters. Electroluminescence was successfully observed at the emitting area of the microchannels. A current density of 0.298 mA/cm(2) was measured at 70V. In our prototype microfluidic OLED, the patterning of the liquid emitters was confirmed in the microchannels on a single chip. This result shows that the proposed structure can be applicable for liquid-based display. (C) 2013 Elsevier B.V. All rights reserved.

    DOI

  • Low-Temperature Au-Au Bonding Using Nanoporous Au-Ag Sheets

    H. Mimatsu, J. Mizuno, T. Kasahara, M. Saito, H. Nishikawa, S. Shoji

    Japanese Journal of Applied Physics   52   050204  2013.04

  • Matrix Arrangement of Three-Dimensional Sheath Flow for Multiple Component Nanofibers

    D.H. Yoon, A. Nakahara, A. Jamshaid, H. Sato, T. Sekiguchi, S. Shoji

    Journal of Sensors   2013   Article ID 814753 - (6pages)  2013.03  [Refereed]

  • Integrated Channel Selector for Directing Fluid Flow Using Thermoreversible Gelation Controlled by a Digital Mirror Device

    Y. Shirasaki, M. Tatsuoka, M. Yamagishi, J. Mizuno, S. Shoji, T. Funatsu

    Journal of Sensors   2013   Article ID 436492 - (6pages)  2013.03  [Refereed]

  • Controllable Active Micro Droplets Merging Device Using Horizontal Pneumatic Micro Valves

    Afshan Jamshaid, Masaya Igaki, Dong Hyun Yoon, Tetsushi Sekiguchi, Shuichi Shoji

    MICROMACHINES   4 ( 1 ) 34 - 48  2013.03  [Refereed]

     View Summary

    We present an active droplet merging device, which can merge various sizes of micro droplets in different numbers by using pneumatically controlled horizontal PDMS microvalves. The merging part consists of a main and side channels separated by a pillar array. The pillar array structure is contained within a microfuidic channel. The function of the pillar array provides a bypass path to the continuous flow (oil) inside the merging chamber. Droplets are successfully generated within the channel and achieve merging by controlling the selective different numbers and diameters of droplets through varying the flow resistance of main and side channel. In the merging chamber, a droplet will enter and slow down its movement. It will wait and then merge with the sequential droplets. These experiments demonstrate that such a merging device can controllably select and adjust the distance between the different adjacent micro droplets without any generation of sister droplets in the side channel. The device has no desynchronization problems. Thus, it can be applied for efficiently mixing the droplets in various diameters and numbers without changing the structure of the merging chamber. Hence, this device can be a more effective choice when applying microfluidics to chemical and biological applications.

    DOI

  • Study on Hybrid Au-Underfill Resin Bonding Method with Lock-and-Key Structure for 3-D Integration

    M. Nimura, J. Mizuno, A. Shigetou, K. Sakuma, H. Ogino, T. Enomoto, S. Shoji

    IEEE Transactions on Components, Packaging and Manufacturing Technology   3   10.1109/TCPMT.2013.2240566  2013.02

  • Fabrication and Surface Modification of Flat Lignocellulosic Carbon Materials

    T. Funabashi, M. Sato, M. Kitajima, S. Shoji, J. Mizuno

    Japanese Journal of Applied Physics   52   010203  2013.01  [Refereed]

  • Fabrication of Low Dislocation Density GaN Template by Nano-channel FIELO Using Nanoimprint Lithography

    Akiko Okada, Shuichi Shoji, Hidetoshi Shinohara, Hiromi Nishihara, Hiroshi Goto, Haruo Sunakawa, Toshiharu Matsueda, Akira Usui, Atsushi A. Yamaguchi, Jun Mizuno

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   26 ( 1 ) 69 - 72  2013  [Refereed]

  • Vacuum ultraviolet irradiation treatment for reducing goldgold bonding temperature

    Akiko Okada, Shuichi Shoji, Masatsugu Nimura, Akitsu Shigetou, Katsuyuki Sakuma, Jun Mizuno

    Materials Transactions   54 ( 11 ) 2139 - 2143  2013

     View Summary

    Lowerature AuAu bonding was achieved under vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O3). The Au surfaces obtained after the VUV/O3 treatment were analyzed by X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) measurements. The results indicate that the amount of carbon-based contaminants was dramatically decreased and that there was no serious damage to Au surfaces caused by the VUV/O3 treatment. The AuAu bonding temperature was successfully reduced to 150°C after the VUV/ O3 treatment. The average shear strength was approximately 56 MPa, and cross-sectional scanning electron microscopy (SEM) images of the bonded samples confirmed the absence of voids and cracks. Therefore, VUV/O3 treatment is highly effective for achieving lowerature AuAu bonding. © 2013 The Japan Institute of Metals and Materials.

    DOI

  • Stand-alone microfluidic system using partly disposable PDMS microwell array for high throughput cell analysis

    Kasumi Miyamoto, Ryo Yamamoto, Kentaro Kawai, Shuichi Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   188   133 - 140  2012.12  [Refereed]

     View Summary

    This paper presents a stand-alone microfluidic system composed of a reusable valve control part and a disposable microwell-array-embedded fluidic chip for high throughput cell analysis. The valve control part and the fluidic chip are fabricated separately and combined together in experiments. Since valve control of the device and fluid injection are driven by solenoid actuators and electro-osmosis (EO) micropumps, respectively, access-tube-free system is achieved. Utilization of addressable valve control method makes possible to drive 25 on-chip hydraulic valves by 10 solenoid actuators. The prototype fluidic chip with 16 microwell array and 4 reagent injection ports on top of palm-top size substrate (30 x 40 mm) is fabricated and integrated to make a replacement of multi-kind reagents inside the system. With this system, other functional fluidic networks can be replaced easily. After testing on/off switching performances of on-chip valves, multi-reagent exchange trial is carried out, revealing precise reagent injection of ten-nanoliter order to each microwell. The proposed system also shows high performance of power consumption, realizing introduction of two reagents to 16 microwells with 11.9 Wh. (c) 2012 Elsevier B.V. All rights reserved.

    DOI

  • Continuous Generation of Femtolitre Droplets Using Multistage Dividing Microfluidic Channel

    K. Kawai, M. Fujii, J. Uchikoshi, K. Arima, S. Shoji, M. Morita

    Current Applied Physics   12   533 - 537  2012.12  [Refereed]

  • Surface Modification of Polyethylene Terephthalate (PET) by 172-nm Excimer Lamp

    T. Kasahara, S. Shoji, J. Mizuno

    Transactions of The Japan Institute of Electronics Packaging   5 ( 1 ) 47 - 54  2012.12

  • 三次元LSIに向けたはんだと接着剤のハイブリッド接合技術と表面処理技術

    仁村将次, 佐久間克幸, 庄子習一, 水野潤

    電子情報通信学会論文誌   J95-C ( 11 ) 296 - 303  2012.11

  • Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting

    K. Ishibashi, H. Goto, J. Mizuno, S. Shoji

    Journal of Nanotechnology   2012   Article ID 103439  2012.08

  • シリコンチップの新接合技術 (New Chip Joint Method for Silicon Die Bonding)

    水野潤, 佐久間克幸, 宇波奈保子, 仁村将次, 庄子習一

    スマートプロセス学会誌   1 ( 3 ) 120 - 125  2012.05

  • Construction of Membrane Sieves Using Stoichiometric and Stress-Reduced Si3N4/SiO2/Si3N4 Multilayer Films and Their Applications in Blood Plasma Separation

    Dae-Sik Lee, Yo Han Choi, Yong Duk Han, Hyun C. Yoon, Shuichi Shoji, Mun Youn Jung

    ETRI JOURNAL   34 ( 2 ) 226 - 234  2012.04  [Refereed]

     View Summary

    The novelty of this study resides in the fabrication of stoichiometric and stress-reduced Si3N4/SiO2/Si3N4 triple-layer membrane sieves. The membrane sieves were designed to be very flat and thin, mechanically stress-reduced, and stable in their electrical and chemical properties. All insulating materials are deposited stoichiometrically by a low-pressure chemical vapor deposition system. The membranes with a thickness of 0.4 mu m have pores with a diameter of about 1 Am. The device is fabricated on a 6 '' silicon wafer with the semiconductor processes. We utilized the membrane sieves for plasma separations from human whole blood. To enhance the separation ability of blood plasma, an agarose gel matrix was attached to the membrane sieves. We could separate about 1 mu L of blood plasma from 5 mu L of human whole blood. Our device can be used in the cell-based biosensors or analysis systems in analytical chemistry.

    DOI

  • XPS and NEXAFS Studies of VUV/O3-Treated Aromatic Polyurea and its Application to Microchip Electrophoresis

    H. Shinohara, A. Nakahara, F. Kitagawa, Y. Takahashi, K. Otsuka, S. Shoji, O. Ohara, J. Mizuno

    IET (The Institution of Engineering and Technology) Nanobiotechnology 2011   5 ( 4 ) 136 - 142  2012.01

  • Biochip applications of DLC films on a resin material

    Satoshi Murata, Shin Ito, Jun Mizuno, Kenji Hirakuri, Hitoshi Sakamoto, Sadaaki Masuko, Keisuke Sato, Naoki Fukata, Fukuo Shizuku, Shuichi Shoji

    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 6   9 ( 6 ) 1439 - 1442  2012  [Refereed]

     View Summary

    Recent studies of diamond-like carbon (DLC) coated medical devices have indicated possibility for developing biochip applications. We have deposited DLC film on cyclo-olefin polymer (COP) sheet by using radio frequency plasma chemical vapor deposition technique. To enhance the adhesion strength between the COP sheet and the DLC films, the COP surface was modified by oxygen (O-2) or nitrogen (N-2) plasma treatment before the film coating. The critical load of samples was measured by using a scratch test. The result showed the adhesion strength of films was improved by the plasma treatment. After the DLC film coating, we performed the plasma post-treatment of O-2, N-2 or hexafluoroethane (C2F6) gases to control the wettability of the material surface. The wettability, structure, roughness, and chemical composition of the samples have been investigated by a contact angle measurement, Raman spectroscopy (Raman), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). These measurements indicated that wettability on the surface condition of DLC films was easily controlled by plasma post-treatment of O-2, N-2 and C2F6. Furthermore, results of XPS showed that wettability of the surface condition is strongly dependent on chemical components with existemce of oxygen, nitrogen and flourine. We have estimated the wettability of hydorphilicity and hydrophobicity on DLC coating under plasma post-treatment for biochip applications.

    DOI

  • Development of a Roll Press UV Imprint Process for Replication of Microstructures on a Large and Thin Quartz Substrate

    Motonori Okubo, Yutaka Tsutsui, Kentaro Ishibashi, Lingyi Li, Shuichi Shoji, Jun Mizuno, Masumi Yanagisawa

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   25 ( 2 ) 229 - 234  2012  [Refereed]

     View Summary

    In this study, fabrication of microstructures was carried out using newly developed UV imprinting system named "Roller Press Scan (R)" for large-area replication. Micro lens arrays were replicated using two types of UV resins and molds, onto quartz substrates.
    Microstructures have been replicated in uniform and have been confirmed high-throughput productivity.

  • Large Area Nano Pattern Fabrication Using Improved Step and Repeat UV Nanoimprint

    Kentaro Ishibashi, Hiroshi Goto, Takashi Kasahara, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   25 ( 2 ) 235 - 238  2012  [Refereed]

     View Summary

    Continuous nano structures whose sizes 100 nm line and space were successfully fabricated using two step nanoimprint including oxygen (O-2) plasma irradiation on a silicon substrate in 8 X 56 mm(2) area. Silicon substrate surface condition is important property because fine and continuous pattern forming depend on photo curable resin uniform coating. O-2 plasma irradiation is realized to change into hydrophilic without damage for silicon substrate. The water contact angle was decreased to smaller than 40 after O-2 plasma irradiation. Therefore O-2 plasma irradiation has an advantage of treatment process for continuous nanostructure forming. Our activities on UV nanoimprint lithography are expected to be progress for large area continuous nano structures fabrication.

  • 集積化マイクロ・ナノ流体システムと環境技術への応用展望

    庄子習一

    超精密   17   44 - 47  2011.12

  • Microfluidic active sorting of DNA molecules labeled with single quantum dots using flow switching by a hydrogel sol-gel transition

    Mai Haneoka, Yoshitaka Shirasaki, Hirokazu Sugino, Tokihiko Aoki, Takahiro Arakawa, Kazuto Ozaki, Dong Hyun Yoon, Noriyuki Ishii, Ryo Iizuka, Shuichi Shoji, Takashi Funatsu

    Sensors and Actuators, B: Chemical   159 ( 1 ) 314 - 320  2011.11  [Refereed]

     View Summary

    The fluorescence-activated cell sorter instrument has contributed significantly to life sciences. However, this instrument has limitations including the inability to detect and hence sort nanometer-sized particles such as quantum dots (Qdots) and virus particles. Here, a microfluidic device for analyzing and sorting nanometer-sized particles has been developed. To achieve sensitive detection, the sample flow was hydrodynamically sheathed and effectively excited with a focused laser beam. Flow control was performed by a sol-gel transition of a thermoreversible gelation polymer. This flow control approach enabled us to restrict the lateral diffusion of nanometer-sized particles and to sort the particles in ∼10 μm channels. Single Qdots with diameters of ∼10 nm were detected at a linear flow velocity of about 4 mm/s, and the Qdots were successfully sorted with the sorting system. Using the developed sorter in an application, Qdot-labeled actin DNA was separated from unwanted glyceraldehyde-3-phosphate dehydrogenase DNA, and the purity of Qdot-labeled actin DNA increased following the sorting. This study represents the first example of active separation of biomolecules labeled with single 10 nm-sized particles of Qdots. © 2011 Elsevier B.V.

    DOI

  • Improvement of the Size-Selective Separation of Microbeads in a Curved Microchannel Using Particle Focusing

    B.H. Kwon, H.H. Kim, J. Cha, C.H. Ahn, T. Arakawa, S. Shoji, J.S. Go

    Japanese Journal of Applied Physics   50   97301  2011.09  [Refereed]

  • Fabrication of high-aspect-ratio amorphous perfluorinated polymer structure for total internal reflection fluorescence microscopy

    Asahi Nakahara, Yoshitaka Shirasaki, Kentaro Kawai, Osamu Ohara, Jun Mizuno, Shuichi Shoji

    MICROELECTRONIC ENGINEERING   88 ( 8 ) 1817 - 1820  2011.08  [Refereed]

     View Summary

    A method to fabricate microstructures that are ideal for optical applications was developed. This method enabled structures with a high aspect ratio to be fabricated from an amorphous perfluorinated polymer, CYTOP, which has an identical refractive index to that of water. Using the method, a microwell array device was developed for the purpose of high-throughput protein quantification. Evaluation of the optical properties of the array using total internal reflection fluorescence (TIRF) microscopy demonstrated that the device did not interfere with TIRF imaging at the bottom of each microwell. This method can expand the possible applications of biophotonic devices as well as TIRF imaging. (C) 2011 Elsevier B.V. All rights reserved.

    DOI

  • Studies on low-temperature direct bonding of VUV/O-3-, VUV- and O-2 plasma-pre-treated poly-methylmethacrylate

    Hidetoshi Shinohara, Takashi Kasahara, Shuichi Shoji, Jun Mizuno

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   21 ( 8 )  2011.08  [Refereed]

     View Summary

    Low-temperature direct bonding of poly-methylmethacrylate (PMMA) plates was achieved by pre-treatment with vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O-3), with vacuum ultraviolet irradiation in a nitrogen atmosphere (VUV), or with oxygen plasma. Based on surface analysis by attenuated total reflection Fourier-transform infrared spectrometry (ATR-FT-IR), x-ray photoelectron spectroscopy and near edge x-ray absorption fine structure spectroscopy, chemical changes of the PMMA surface after the pre-treatment were investigated. Changes in morphology and softening point were also investigated by nano-thermal analysis and atomic force microscopy. From the results, the bonding mechanisms proposed are described as follows: during the bonding process, the increased or generated polar groups cause an increase in the dipolar interactions (such as hydrogen bonding) between two pre-treated PMMA surfaces; in the case of VUV/O-3 or VUV pre-treatment, a low-T-g layer is generated on the surface and this layer acts as an adhesive for the direct bonding of layers by diffusion.

    DOI

  • Fabrication of High-Aspect-Ratio Amorphous Perfluorinated Polymer Structure for Total Internal Reflection Fluorescence Microscopy

    A. Nakahara, Y. Shirasaki, K. Kawai, O. Ohara, J. Mizuno, S. Shoji

    Microelectronic Engineering   88 ( 8 ) 1817 - 1820  2011.08

  • Low-temperature wafer bonding for MEMS packaging utilizing screen-printed sub-micron size Au particle patterns

    S. Ishizuka, N. Akiyama, T. Ogashiwa, T. Nishimori, H. Ishida, S. Shoji, J. Mizuno

    MICROELECTRONIC ENGINEERING   88 ( 8 ) 2275 - 2277  2011.08  [Refereed]

     View Summary

    In this study, a new wafer bonding method for MEMS (micro electro mechanical systems) packaging is presented. The seal lines of sub-micron size Au particles with a width of 50 mu m were formed on wafers by means of screen-printing. The bonding process was carried out at 300 degrees C under reduced pressure, 1 x 10(-3) mbar. The bonded wafers were diced into 5 mm x 5 mm individual chips. The bond strength of each chips was about 20 MPa measured by a tensile test and about 40 MPa by a shear test in the average. It was confirmed that two wafers were successfully bonded with screen-printed Au particle seal lines. The proposed method can be applied to practical MEMS packaging. (C) 2011 Elsevier B.V. All rights reserved.

    DOI

  • Integrated hydrophilic surface treatment system of vapor deposition polymerization and vacuum ultraviolet irradiation for chemical/biochemical microchips

    H. Shinohara, T. Hori, S. Umeda, Y. Takahashi, S. Shoji, O. Ohara, J. Mizuno

    MICROELECTRONIC ENGINEERING   88 ( 8 ) 2751 - 2754  2011.08  [Refereed]

     View Summary

    A novel system for hydrophilic surface treatment was developed. This system consists of a vapor deposition polymerization (VDP) unit for aromatic polyurea coating and a vacuum ultraviolet (VUV) irradiation unit for the hydrophilic treatment of the coated polyurea. Because the two vacuum chambers are connected by a load-lock system, a highly hydrophilic surface can be obtained without airborne molecular contamination (in situ process). The typical thickness of the polyurea film ranges from tens of nanometers to several micrometers. This system can be used for the high-throughput fabrication of chemical/biochemical microchips, which require a stable highly hydrophilic surface. The polyurea is made highly hydrophilic and a water contact angle of &lt;20 degrees is obtained. The surface free energy measurement and Fourier transform infrared (FT-IR) measurement results show that the degree of hydrophilic treatment is related to the VUV light intensity and the density of O-3 and exited oxygen atoms on the polyurea. (C) 2011 Elsevier B.V. All rights reserved.

    DOI

  • Studies on Low-Temperature Direct Bonding of VUV/O3-, VUV-and O2 Plasma-Pre-Treated Poly-Methylmethacrylate

    H. Shinohara, T. Kasahara, S. Shoji, J. Mizuno

    Journal of Micromechanics and Microengineering   21   85028  2011.07

  • Microfluidic Active Sorting of DNA Molecules Labeled with Single Quantum Dots Using Flow Switching by a Hydrogel Sol-Gel Transition

    M. Haneoka, Y. Shirasaki, H. Sugino, T. Aoki, T. Arakawa, K. Ozaki, D.H. Yoon, N. Ishii, R. Iizuka, S. Shoji, T. Funatsu

    Sensors and Actuators B   159   314 - 320  2011.06

  • Development of Lateral Displacement Sensor for Real-Time Detection of Structural Damage

    Iwao Matsuya, Ryota Tomishi, Maya Sato, Kiyoshi Kanekawa, Yoshihiro Nitta, Motoichi Takahashi, Satoru Miura, Yasutsugu Suzuki, Tomohiko Hatada, Ryuta Katamura, Takashi Tanii, Shuichi Shoji, Akira Nishitani, Iwao Ohdomari

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   6 ( 3 ) 266 - 272  2011.05  [Refereed]

     View Summary

    We have developed a novel sensor that enables us to measure the relative story displacement of a building structure in real time. This lateral displacement sensor (LDS) is composed of a light-emitting diode (LED) array, which is fixed on the ceiling, and a position-sensitive detector (PSD) unit, which is placed on the floor. We optimized the LDS to achieve high accuracy in lateral displacement measurement. The accuracy was evaluated to be 60 mu m by conducting shaking table tests. Two LDSs were implemented in an actual building equipped with an active variable stiffness (AVS) system, and the building was vibrated with seismic waveforms by an exciter placed on the rooftop. The seismic displacement of the second floor relative to the first floor was measured using the LDS. Furthermore, the inclination angle of the second floor could be measured using the LDS during the seismic vibration. Using the AVS system, we realized the residual displacement of the second floor without inducing damage to the building, and succeeded in real-time residual displacement measurement for the first time. These results indicate that the LDS is useful for the health diagnosis of a building structure. (C) 2011 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI

  • マイクロTASの始まりと国際会議の歴史

    庄子習一

    電気学会誌   131 ( 5 ) 281 - 282  2011.05

  • Development of Lateral Displacement Sensor for Real-Time Detection of Structural Damage

    Iwao Matsuya, Ryota Tomishi, Maya Sato, Kiyoshi Kanekawa, Yoshihiro Nitta, Motoichi Takahashi, Satoru Miura, Yasutsugu Suzuki, Tomohiko Hatada, Ryuta Katamura, Takashi Tanii, Shuichi Shoji, Akira Nishitani, Iwao Ohdomari

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   6 ( 3 ) 266 - 272  2011.05  [Refereed]

     View Summary

    We have developed a novel sensor that enables us to measure the relative story displacement of a building structure in real time. This lateral displacement sensor (LDS) is composed of a light-emitting diode (LED) array, which is fixed on the ceiling, and a position-sensitive detector (PSD) unit, which is placed on the floor. We optimized the LDS to achieve high accuracy in lateral displacement measurement. The accuracy was evaluated to be 60 mu m by conducting shaking table tests. Two LDSs were implemented in an actual building equipped with an active variable stiffness (AVS) system, and the building was vibrated with seismic waveforms by an exciter placed on the rooftop. The seismic displacement of the second floor relative to the first floor was measured using the LDS. Furthermore, the inclination angle of the second floor could be measured using the LDS during the seismic vibration. Using the AVS system, we realized the residual displacement of the second floor without inducing damage to the building, and succeeded in real-time residual displacement measurement for the first time. These results indicate that the LDS is useful for the health diagnosis of a building structure. (C) 2011 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI

  • High-throughput single-cell manipulation system for a large number of target cells

    Takahiro Arakawa, Masao Noguchi, Keiko Sumitomo, Yoshinori Yamaguchi, Shuichi Shoji

    BIOMICROFLUIDICS   5 ( 1 )  2011.03  [Refereed]

     View Summary

    A sequential and high-throughput single-cell manipulation system for a large volume of cells was developed and the successive manipulation for single cell involving single-cell isolation, individual labeling, and individual rupture was realized in a microhydrodynamic flow channel fabricated by using two-dimensional simple flow channels. This microfluidic system consisted of the successive single-cell handlings of single-cell isolation from a large number of cells in cell suspension, labeling each isolated single cell and the lysate extraction from each labeled single cell. This microfluidic system was composed of main channels, cell-trapping pockets, drain channels, and single-cell content collection channels which were fabricated by polydimethylsiloxane. We demonstrated two kinds of prototypes for sequential single-cell manipulations, one was equipped with 16 single-cell isolation pockets in microchannel and the other was constructed of 512 single-cell isolation pockets. In this study, we demonstrated high-throughput and high-volume single-cell isolation with 512 pocket type device. The total number of isolated single cells in each isolation pocket from the cell suspension at a time was 426 for the cell line of African green monkey kidney, COS-1, and 360 for the rat primary brown preadipocytes, BAT. All isolated cells were stained with fluorescence dye injected into the same microchannel successfully. In addition, the extraction and collection of the cell contents was demonstrated using isolated stained COS-1 cells. The cell contents extracted from each captured cell were individually collected within each collection channel by local hydrodynamic flow. The sequential trapping, labeling, and content extraction with 512 pocket type devices realized high-throughput single-cell manipulations for innovative single-cell handling, feasible staining, and accurate cell rupture. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3567101]

    DOI

  • High-Throughput Single-Cell Manipulation System for a Large Number of Target Cells

    T. Arakawa, M. Noguchi, K. Sumitomo, Y. Yamaguchi, S. Shoji

    Biomicrofluidics   5 ( 1 ) 14114  2011.03  [Refereed]

  • Anti-Sticking Curing of Fluorinated Polymers for Improvement of Mold Releasability

    Jun Mizuno, Lingyi Li, Yasuhide Kawaguchi, Kentaro Tsunozaki, Hidetoshi Shinohara, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   24 ( 1 ) 89 - 93  2011  [Refereed]

     View Summary

    This paper describes a post-UV curing process, called anti-sticking curing process (ACP), for fluorinated polymer (NIF) molds. After fabrication by UV imprinting, an NIF mold was irradiated by a strong UV light. The results of surface free-energy calculations, X-ray photoelectron spectroscopy (XPS), and Vickers hardness measurements showed that the surface state of NIF can be described as follows: active functional groups in the photosensitive radical initiator remained on the surface of the NIF mold after UV imprinting. After ACP, these active groups were consumed by further UV polymerization, and the fluorinated components moved to the surface. Thus, an improvement in the releasability of NIF molds is expected.

  • Local drug-stimulation on microfluidic system for analysis of apoptotic impact on local area

    Watanabe, Taku, Kawai, Kentaro, Fujii, Masaru, Shoji, Shuichi, Edagawa, Yoshikuni

    JOURNAL OF PHARMACOLOGICAL SCIENCES   115   273P - 273P  2011  [Refereed]

  • Studies on low-temperature direct bonding of VUV, VUV/O-3 and O-2 plasma pretreated cyclo-olefin polymer

    Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   165 ( 1 ) 124 - 131  2011.01  [Refereed]

     View Summary

    Low-temperature direct bonding of two cyclo-olefin polymer (COP) plates is realized by pretreatments of vacuum ultraviolet (VUV) light irradiation, VUV irradiation in the presence of oxygen gas (VUV/O-3), or oxygen plasma treatment. The bond strength was strong enough to observe bulk destruction on the fractured surfaces after the tensile test of the sample. To investigate the mechanism underlying the low-temperature direct bonding, attenuated total reflection Fourier-transform infrared spectrometer (ATR-FT-IR), X-ray photoelectron spectroscopy (XPS), contact angle measurements, and atomic force microscopy (AFM) surface analysis methods were carried out for the treated COP samples. These experimental results showed that polar functional groups (e.g., -OH, -COOH) are generated by each treatment. These groups are expected to generate dipolar interactions including hydrogen bonds on the surfaces of the pretreated COPs at room temperature. In case of VUV and VUV/O-3 treatments, degradation of COP was also occurred and the degradation layer acted as an adhesive for the direct bonding. Thermal annealing enhances creation of strong covalent bonds (-C-O-C-) changed from hydrogen bonds. (c) 2010 Elsevier B.V. All rights reserved.

    DOI

  • Improvement of Filtration Performance Using Self-Tuning of Flow Resistance

    Dong Hyun Yoon, Yeon Kyoung Bahk, Bong Hyun Kwon, Seong Sik Kim, Yong-Deok Kim, Takahiro Arakawa, Jeung Sang Go, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 1 )  2011.01  [Refereed]

     View Summary

    In this paper, we present the filtration of a liquid sample from polystyrene microparticles analogous to the separation of a biological liquid from mixed particles such as whole blood. The proposed self-tuning of flow resistance can prevent the excessive clogging of microparticles in the microfilter by allowing the automatic change of the flow direction when the microfilter is clogged. Numerically, at about 80% of the clogging of microparticles in the pillar channel, the sample flow is regulated suddenly to the bypass channel. Experimentally, the clogging behavior at the five successive pillar channels and the self-tuning of flow are compared by measuring the clogging area and volume with time. Also, the microfilter array connected in a series can provide an increase in the sample volume proportionally without excessive pressure build-up. This implies the potential to reduce cell fracture in the filtration of biological cells. (C) 2011 The Japan Society of Applied Physics

    DOI

  • Simple and Low-Cost Fabrication of Flexible Capacitive Tactile Sensors

    Takashi Kasahara, Masanori Mizushima, Hidetoshi Shinohara, Tsutomu Obata, Tomoaki Futakuchi, Shuichi Shoji, Jun Mizuno

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 1 )  2011.01  [Refereed]

     View Summary

    We fabricated novel flexible capacitive tactile sensors that can detect both the direction and distribution of an applied force. The sensor consists of a conductive silicone rubber as a movable electrode and fixed electrodes formed on a poly(ethylene terephthalate) (PET) film with silver paste. The dimensions of sensor head are 10.4 x 10.4 x 0.8mm(3). We developed the tactile sensor using screen-printing techniques and atmospheric-pressure plasma pretreatments. We experimentally evaluated the tactile responses to the applied force. The sensor detected the input force-distribution with a force ranging up to 10N. The flexible thin PET film substrate enables fitting to the tight space and curved surface, and this capacitive tactile sensor is applicable for low-cost controllers of cellular phones and personal computers. (C) 2011 The Japan Society of Applied Physics

    DOI

  • Simple and Low-Cost Fabrication of Flexible Capacitive Tactile Sensors

    T. Kasahara, M. Mizushima, H. Shinohara, T. Obata, T. Futakuchi, S. Shoji, J. Mizuno

    Japanese Journal of Applied Physics   50   16502  2011.01  [Refereed]

  • Improvement of Filtration Performance Using Self-Turning of Flow Resistance

    D.H. Yoon, Y.K. Bahk, B.H. Kwon, S.S. Kim, Y.-D. Kim, T. Arakawa, J.S. Go, S. Shoji

    Japanese Journal of Applied Physics   50   17201  2011.01  [Refereed]

  • Studies on Low-Temperature Direct Bonding of VUV, VUV/O3 nd O2 Plasma Pretreated Cyclo-Olefin Polymer

    H. Shinohara, J. Mizuno, S. Shoji

    Sensors and Actuators A   165 ( 1 ) 124 - 131  2011.01

  • Anti-Sticking Curing of Fluorinated Polymers for Improvement of Mold Releasability

    Jun Mizuno, Lingyi Li, Yasuhide Kawaguchi, Kentaro Tsunozaki, Hidetoshi Shinohara, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   24 ( 1 ) 89 - 93  2011  [Refereed]

     View Summary

    This paper describes a post-UV curing process, called anti-sticking curing process (ACP), for fluorinated polymer (NIF) molds. After fabrication by UV imprinting, an NIF mold was irradiated by a strong UV light. The results of surface free-energy calculations, X-ray photoelectron spectroscopy (XPS), and Vickers hardness measurements showed that the surface state of NIF can be described as follows: active functional groups in the photosensitive radical initiator remained on the surface of the NIF mold after UV imprinting. After ACP, these active groups were consumed by further UV polymerization, and the fluorinated components moved to the surface. Thus, an improvement in the releasability of NIF molds is expected.

  • Measuring Relative-Story Displacement and Local Inclination Angle Using Multiple Position-Sensitive Detectors

    Iwao Matsuya, Ryuta Katamura, Maya Sato, Miroku Iba, Hideaki Kondo, Kiyoshi Kanekawa, Motoichi Takahashi, Tomohiko Hatada, Yoshihiro Nitta, Takashi Tanii, Shuichi Shoji, Akira Nishitani, Iwao Ohdomari

    SENSORS   10 ( 11 ) 9687 - 9697  2010.11  [Refereed]

     View Summary

    We propose a novel sensor system for monitoring the structural health of a building. The system optically measures the relative-story displacement during earthquakes for detecting any deformations of building elements. The sensor unit is composed of three position sensitive detectors (PSDs) and lenses capable of measuring the relative-story displacement precisely, even if the PSD unit was inclined in response to the seismic vibration. For verification, laboratory tests were carried out using an X theta-stage and a shaking table. The static experiment verified that the sensor could measure the local inclination angle as well as the lateral displacement. The dynamic experiment revealed that the accuracy of the sensor was 150 mu m in the relative-displacement measurement and 100 mu rad in the inclination angle measurement. These results indicate that the proposed sensor system has sufficient accuracy for the measurement of relative-story displacement in response to the seismic vibration.

    DOI

  • Microfluidic cell sorter with flow switching triggered by a sol-gel transition of a thermo-reversible gelation polymer

    Kazuto Ozaki, Hirokazu Sugino, Yoshitaka Shirasaki, Tokihiko Aoki, Takahiro Arakawa, Takashi Funatsu, Shuichi Shoji

    SENSORS AND ACTUATORS B-CHEMICAL   150 ( 1 ) 449 - 455  2010.09  [Refereed]

     View Summary

    This paper presents a new strategy for sorting fluorescently labeled cells with a microfluidic device Cell separation was performed with flow switching using changes in fluidic resistance in a waste channel caused by sot-gel transition of a thermo-reversible gelation polymer (TGP) The TGP is liquid at room temperatuie and turns into a gel state upon heating The sol-gel transition of the TGP was Induced by heating with a 1480 nm laser light for about 3 ms. When a fluorescence signal emitted from a target particle was detected, the waste channel is heated with the laser to increase the flow resistance of the channel This permits the target particles to be sorted and transferred to the collection channel In contrast to a previously reported TGP-based sorter, the sample sorted using the microfluidic cell sorter of the present study does not have to be mixed with TGP solution. and the sorted sample is suitable for following experiment. The performance of the cell sorter was evaluated by separating fluorescent microspheres Two kinds of fluorescent microspheres were separated with a recovery ratio and purity of about 90% As an application of the cell sorter, Escherichia coli cells expressing the green fluorescent protein (GFP) were separated from those expressing the Discoma sp red fluorescent protein (DsRed) About 17,000 cells were sorted with a 75% recovery ratio and 90% purity at a throughput of about 5 cells/s. (C) 2010 Elsevier B.V. All rights reseived

    DOI

  • Microfluidic cell sorter with flow switching triggered by a sol-gel transition of a thermo-reversible gelation polymer

    Kazuto Ozaki, Hirokazu Sugino, Yoshitaka Shirasaki, Tokihiko Aoki, Takahiro Arakawa, Takashi Funatsu, Shuichi Shoji

    SENSORS AND ACTUATORS B-CHEMICAL   150 ( 1 ) 449 - 455  2010.09  [Refereed]

     View Summary

    This paper presents a new strategy for sorting fluorescently labeled cells with a microfluidic device Cell separation was performed with flow switching using changes in fluidic resistance in a waste channel caused by sot-gel transition of a thermo-reversible gelation polymer (TGP) The TGP is liquid at room temperatuie and turns into a gel state upon heating The sol-gel transition of the TGP was Induced by heating with a 1480 nm laser light for about 3 ms. When a fluorescence signal emitted from a target particle was detected, the waste channel is heated with the laser to increase the flow resistance of the channel This permits the target particles to be sorted and transferred to the collection channel In contrast to a previously reported TGP-based sorter, the sample sorted using the microfluidic cell sorter of the present study does not have to be mixed with TGP solution. and the sorted sample is suitable for following experiment. The performance of the cell sorter was evaluated by separating fluorescent microspheres Two kinds of fluorescent microspheres were separated with a recovery ratio and purity of about 90% As an application of the cell sorter, Escherichia coli cells expressing the green fluorescent protein (GFP) were separated from those expressing the Discoma sp red fluorescent protein (DsRed) About 17,000 cells were sorted with a 75% recovery ratio and 90% purity at a throughput of about 5 cells/s. (C) 2010 Elsevier B.V. All rights reseived

    DOI

  • ナノスプレー一体型ポリマー製マイクロチップにおける電気泳動分離—質量分析検出

    北川文彦, 篠原秀敏, 水野潤, 大塚浩二, 庄子習一

    電気学会論文誌E   130 ( 8 ) 351 - 355  2010.08

  • 大面積モールド作製プロセスおよびナノインプリント装置用アライメント技術

    石橋健太郎, 小久保光典, 後藤博史, 水野潤, 庄子習一

    電気学会論文誌E   130 ( 8 ) 363 - 368  2010.08

  • Au-Electrode-Embedded Cyclo-Olefin Polymer Microchip Using Low-Temperature Direct Bonding

    H. Shinohara, J. Mizuno, S. Shoji

    IEEJ Transactions on Sensors and Micromachines   130 ( 8 ) 347 - 350  2010.08

  • Effects of Vacuum Ultraviolet Surface Treatment on the Bonding Interconnections for Flip Chip and 3-D Integration

    Katsuyuki Sakuma, Jun Mizuno, Noriyasu Nagai, Naoko Unami, Shuichi Shoji

    IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING   33 ( 3 ) 212 - 220  2010.07  [Refereed]

     View Summary

    This paper focuses on the effects of a vacuum ultraviolet (VUV) surface treatment process on the interconnections for flip chip and 3-D integration. Organic contaminants that hinder reliable bonding are broken down and eliminated from the bumps and pad surfaces by irradiation with UV light at a wavelength of 172 nm at room temperature. There is no charge buildup, no temperature increase, and no ion bombardment damage during the process. Two different VUV cleaning conditions, with N(2) or O(2) gas in the vacuum chamber, were compared and evaluated. Samples of flip chip with Cu/Sn bumps and Au surface substrate were examined by measurement of contact angle, X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and atomic force microscopy (AFM) before and after VUV surface treatment. Cleaning times and ambient conditions have dramatic effects on the surface contact angles. The photoelectron spectra of C 1s were obtained by XPS analysis for information on the chemical species and the XPS results showed a reduction in surface carbon for both Au and Cu/Sn after the cleaning. The evidence indicates cleavage of the carbon-carbon bonds in the organic molecules occurs during the cleaning process. From the shear test results, it appears that VUV treatment improves the Cu/Sn-bump bonding strength, making it two times larger than for untreated samples. No delamination or obvious voids were detected on the bonding interface by Scanning acoustic microscopy (SAM) and cross-sectional SEM analysis. The experiments show that the VUV cleaning can effectively remove the organic contaminants on the surface of the bonding pads and improve the bonding strength.

    DOI

  • Effects of Vacuum Ultraviolet Surface Treatment on the Bonding Interconnections for Flip Chip and 3-D Integration

    Katsuyuki Sakuma, Jun Mizuno, Noriyasu Nagai, Naoko Unami, Shuichi Shoji

    IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING   33 ( 3 ) 212 - 220  2010.07  [Refereed]

     View Summary

    This paper focuses on the effects of a vacuum ultraviolet (VUV) surface treatment process on the interconnections for flip chip and 3-D integration. Organic contaminants that hinder reliable bonding are broken down and eliminated from the bumps and pad surfaces by irradiation with UV light at a wavelength of 172 nm at room temperature. There is no charge buildup, no temperature increase, and no ion bombardment damage during the process. Two different VUV cleaning conditions, with N(2) or O(2) gas in the vacuum chamber, were compared and evaluated. Samples of flip chip with Cu/Sn bumps and Au surface substrate were examined by measurement of contact angle, X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and atomic force microscopy (AFM) before and after VUV surface treatment. Cleaning times and ambient conditions have dramatic effects on the surface contact angles. The photoelectron spectra of C 1s were obtained by XPS analysis for information on the chemical species and the XPS results showed a reduction in surface carbon for both Au and Cu/Sn after the cleaning. The evidence indicates cleavage of the carbon-carbon bonds in the organic molecules occurs during the cleaning process. From the shear test results, it appears that VUV treatment improves the Cu/Sn-bump bonding strength, making it two times larger than for untreated samples. No delamination or obvious voids were detected on the bonding interface by Scanning acoustic microscopy (SAM) and cross-sectional SEM analysis. The experiments show that the VUV cleaning can effectively remove the organic contaminants on the surface of the bonding pads and improve the bonding strength.

    DOI

  • 光を用いた高速微小領域流体制御 - バイオ・MicroTAS分野への光応用

    庄子習一

    月刊オプトロニクス   29 ( 7 ) 104 - 107  2010.07

  • Electrochemical etching process to tune the diameter of arrayed deep pores by controlling carrier collection at a semiconductor-electrolyte interface

    Hirotaka Sato, Takuya Yamaguchi, Tetsuhiko Isobe, Shuichi Shoji, Takayuki Homma

    ELECTROCHEMISTRY COMMUNICATIONS   12 ( 6 ) 765 - 768  2010.06  [Refereed]

     View Summary

    An approach to control the diameter of high-aspect-ratio pores formed into a silicon wafer by an electrochemical etching process is reported. Hole (h(+)) was involved in the etching reaction and the collection of the h(+) was the key factor. Artificial micro-cavities were fabricated on the silicon surface prior to the etching. The depth of the space charge region (SCR), Schottky barrier on the silicon-electrolyte interface, was adjusted regarding the depth of the micro-cavities by applied overpotential and specific resistance of the silicon wafer. The collection of h at the tip of the cavity site was widely controlled by the adjusted SCR. Consequently the electrochemically etched domain at the cavity site was actively tuned, and then high-aspect-ratio pore with the controlled diameter was formed. The diameter was tuned by the SCR depth which was controlled by the overpotential and the specific resistance. The diameter tuning mechanism worked under the mask-free condition. (C) 2010 Elsevier B.V. All rights reserved.

    DOI

  • Electrochemical Fabrication and Characterization of CoPt Bit Patterned Media: Towards a Wetchemical, Large-Scale Fabrication

    Takanari Ouchi, Yuki Arikawa, Taisuke Kuno, Jun Mizuno, Shuichi Shoji, Takayuki Homma

    IEEE TRANSACTIONS ON MAGNETICS   46 ( 6 ) 2224 - 2227  2010.06  [Refereed]

     View Summary

    This paper describes the fabrication process of CoPt nandot arrays on a glass disk substrate with a CoZrNb underlayer as a soft magnetic underlayer (SUL) by using an electrochemical process, and also the analysis on the magnetic properties of these fabricated CoPt nanodot arrays. We formed nano-patterned substrates by UV-nanoimprint lithography (UV-NIL) on the glass disk substrate. CoPt was electrodeposited into the nano-patterned substrates optimizing the electrodeposition condition and bath composition as well as a Cu intermediate layer. The construction of the nanodot arrays were CoPt nanodot arrays (20 nm)/Cu (5 nm)/CoZrNb (100 nm)/Cr (5 nm)/Glass disk. Magnetic signals were clearly observed on the dc magnetized state and multi domain were observed in each nanodot on the ac magnetized state by magnetic force microscopy (MFM). The perpendicular coercivity of the CoPt nanodot arrays was 430 kA/m. These results showed electrochemical process can be used for the manufacture of magnetic recording media.

    DOI

  • Effects of Excimer Irradiation Treatment on Thermocompression Au-Au Bonding

    N. Unami, K. Sakuma, J. Mizuno, S. Shoji

    Japanese Journal of Applied Physics   49 ( 6 ) 06GN12  2010.06

  • An Experimental Study on Relative Displacement Sensing Using Phototransistor Array for Building Structures

    Kiyoshi Kanekawa, Iwao Matsuya, Maya Sato, Ryota Tomishi, Motoichi Takahashi, Satoru Miura, Yasutsugu Suzuki, Tomohiko Hatada, Ryuta Katamura, Yoshihiro Nitta, Takashi Tanii, Shuichi Shoji, Akira Nishitani, Iwao Ohdomari

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   5 ( 2 ) 251 - 255  2010.03  [Refereed]

     View Summary

    We propose a novel sensor for directly measuring the relative displacement of a building structure. The sensor is composed of a laser light source and a phototransistor (PT) at-ray. The PT array is immobilized on the floor together with a photo scattering plate made of glass, whereas the laser light source is separately immobilized on the ceiling. The photo scattering plate is placed in front of the PT array and distributes the laser beam oil the multiple PTs. The relative displacement between the ceiling and the floor is estimated by the distribution of the PT output voltages, and the displacement is estimated with a resolution finer than the interval between the PTs. The accuracy of the relative displacement sensor (RDS) is experimentally assessed by conducting a shaking table test exhibiting several waves from harmonic sinusoidal waves to real seismic waves. We discuss the feasibility of real-time monitoring system utilizing this sensor. (C) 2010 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI

  • Use of Folded Micromachined Pillar Array Column with Low-Dispersion Turns for Pressure-Driven Liquid Chromatography

    Chiaki Aoyama, Akira Saeki, Masao Noguchi, Yoshitaka Shirasaki, Shuichi Shoji, Takashi Funatsu, Jun Mizuno, Makoto Tsunoda

    ANALYTICAL CHEMISTRY   82 ( 4 ) 1420 - 1426  2010.02  [Refereed]

     View Summary

    In this study, we show for the first time that the separation efficiency of a pillar array column under pressure-driven liquid chromatography (LC) conditions can be improved using a separation channel with low-dispersion turns. The pillar array column was fabricated by reactive ion etching of a silicon substrate. With the low-dispersion-turn geometry, a column with a length and width of 110 mm and 400 mu m, respectively, could be fabricated on a 20 x 20 mm microchip. Under nonretained conditions, the solute bands obtained for fluorescent compounds remained almost unchanged even after passing through the low-dispersion turns; however, significant skewing of the solute bands was observed in the case of constant-radius turns. Two coumarin dyes were well resolved under reversed-phase conditions, and a maximum theoretical plate number of 8000 was obtained. Successful separation of the fluorescent derivatives of six amino acids was achieved in 140 s. These results indicated that the separation efficiency of microchip chromatography could be significantly improved using a long separation channel with low-dispersion turns.

    DOI

  • Use of Folded Micromachined Pillar Array Column with Low-Dispersion Turns for Pressure-Driven Liquid Chromatography

    Chiaki Aoyama, Akira Saeki, Masao Noguchi, Yoshitaka Shirasaki, Shuichi Shoji, Takashi Funatsu, Jun Mizuno, Makoto Tsunoda

    ANALYTICAL CHEMISTRY   82 ( 4 ) 1420 - 1426  2010.02  [Refereed]

     View Summary

    In this study, we show for the first time that the separation efficiency of a pillar array column under pressure-driven liquid chromatography (LC) conditions can be improved using a separation channel with low-dispersion turns. The pillar array column was fabricated by reactive ion etching of a silicon substrate. With the low-dispersion-turn geometry, a column with a length and width of 110 mm and 400 mu m, respectively, could be fabricated on a 20 x 20 mm microchip. Under nonretained conditions, the solute bands obtained for fluorescent compounds remained almost unchanged even after passing through the low-dispersion turns; however, significant skewing of the solute bands was observed in the case of constant-radius turns. Two coumarin dyes were well resolved under reversed-phase conditions, and a maximum theoretical plate number of 8000 was obtained. Successful separation of the fluorescent derivatives of six amino acids was achieved in 140 s. These results indicated that the separation efficiency of microchip chromatography could be significantly improved using a long separation channel with low-dispersion turns.

    DOI

  • Integration in a multilayer microfluidic chip of 8 parallel cell sorters with flow control by sol-gel transition of thermoreversible gelation polymer

    Hirokazu Sugino, Takahiro Arakawa, Yuki Nara, Yoshitaka Shirasaki, Kazuto Ozaki, Shuichi Shoji, Takashi Funatsu

    LAB ON A CHIP   10 ( 19 ) 2559 - 2565  2010  [Refereed]

     View Summary

    Microfluidic systems have significant implications in the field of cell separation since they could provide platforms with inexpensive, disposable and sterile structures. Here, we present a novel strategy to integrate microfluidic sorters into a single chip for high throughput sorting. Our parallel sorter consists of a microfluidic chip with a three-dimensional channel network that utilizes flow switching by a heat-induced sol-gel transition of thermoreversible gelation polymer. The 8 parallel sheathed sample flows were realized by injecting sample and buffer solutions into only 2 inlets. The sheathed flows enabled disposal of unwanted sample waste without laser irradiation, and collection of wanted sample upon irradiation. As an application of the sorter, two kinds of fluorescent microspheres were separated with recovery ratio and purity of 70% or 90% at throughputs of about 100 or 20 particles per second, respectively. Next, Escherichia coli cells expressing green fluorescent protein were separated from those expressing DsRed with recovery ratio and purity of 90% at a throughput of about 20 cells per second.

    DOI

  • Effects of Excimer Irradiation Treatment on Thermocompression Au-Au Bonding

    Naoko Unami, Katsuyuki Sakuma, Jun Mizuno, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 6 ) 06GN12  2010  [Refereed]

     View Summary

    We studied the feasibility of using vacuum ultraviolet (VUV) treatment as a surface improvement technique with Au-Au flip-chip bonding. For fine-pitch electrical interconnections in three-dimensional (3D) stack applications, robust and reliable bonding is desirable; in this case, surface modification treatment is needed before the bonding process. A VUV surface treatment was used to remove organic contaminants. Samples of electroplated Au pads were examined by X-ray photoelectron spectroscopy (XPS) to evaluate the chemical composition of the Au surfaces. The XPS results revealed that the carbon-based contaminants on the surface were removed by the VUV treatment. The shear strength of the bonded sample was also improved. The average shear strength of a bump with VUV treatment is 1.6 times larger than that of a bump without VUV treatment. Cross-sectional scanning electron microscopy (SEM) images of the bonded samples confirmed the absence of voids and cracks. The results show that VUV treatment has clear effects on Au-Au flip-chip bonding. (C) 2010 The Japan Society of Applied Physics

    DOI

  • 8-Parallel Bioparticle Sorter with a Multilayer PDMS Chip

    Sugino, Hirokazu, Ozaki, Kazuto, Arakawa, Takahiro, Shirasaki, Yoshitaka, Nara, Yuki, Shoji, Shuichi, Funatsu, Takashi

    BIOPHYSICAL JOURNAL   98 ( 3 ) 194A - 194A  2010  [Refereed]

  • An experimental study on relative displacement sensing using phototransistor array for building structures

    Kiyoshi Kanekawa, Iwao Matsuya, Maya Sato, Ryota Tomishi, Motoichi Takahashi, Satoru Miura, Yasutsugu Suzuki, Tomohiko Hatada, Ryuta Katamura, Yoshihiro Nitta, Takashi Tanii, Shuichi Shoji, Akira Nishitani, Iwao Ohdomari

    IEEJ Transactions on Electrical and Electronic Engineering   5 ( 2 ) 251 - 255  2010

     View Summary

    We propose a novel sensor for directly measuring the relative displacement of a building structure. The sensor is composed of a laser light source and a phototransistor (PT) array. The PT array is immobilized on the floor together with a photo scattering plate made of glass, whereas the laser light source is separately immobilized on the ceiling. The photo scattering plate is placed in front of the PT array and distributes the laser beam on the multiple PTs. The relative displacement between the ceiling and the floor is estimated by the distribution of the PT output voltages, and the displacement is estimated with a resolution finer than the interval between the PTs. The accuracy of the relative displacement sensor (RDS) is experimentally assessed by conducting a shaking table test exhibiting several waves from harmonic sinusoidal waves to real seismic waves. We discuss the feasibility of real-time monitoring system utilizing this sensor. © 2010 Institute of Electrical Engineers of Japan. Published by John Wiley &amp
    Sons, Inc.

    DOI

  • Integration in a multilayer microfluidic chip of 8 parallel cell sorters with flow control by sol-gel transition of thermoreversible gelation polymer

    Hirokazu Sugino, Takahiro Arakawa, Yuki Nara, Yoshitaka Shirasaki, Kazuto Ozaki, Shuichi Shoji, Takashi Funatsu

    LAB ON A CHIP   10 ( 19 ) 2559 - 2565  2010  [Refereed]

     View Summary

    Microfluidic systems have significant implications in the field of cell separation since they could provide platforms with inexpensive, disposable and sterile structures. Here, we present a novel strategy to integrate microfluidic sorters into a single chip for high throughput sorting. Our parallel sorter consists of a microfluidic chip with a three-dimensional channel network that utilizes flow switching by a heat-induced sol-gel transition of thermoreversible gelation polymer. The 8 parallel sheathed sample flows were realized by injecting sample and buffer solutions into only 2 inlets. The sheathed flows enabled disposal of unwanted sample waste without laser irradiation, and collection of wanted sample upon irradiation. As an application of the sorter, two kinds of fluorescent microspheres were separated with recovery ratio and purity of 70% or 90% at throughputs of about 100 or 20 particles per second, respectively. Next, Escherichia coli cells expressing green fluorescent protein were separated from those expressing DsRed with recovery ratio and purity of 90% at a throughput of about 20 cells per second.

    DOI

  • Copper Multilayer Interconnection Using Ultraviolet Nanoimprint Lithography with a Double-Deck Mold and Electroplating

    N. Nagai, H. Ono, K. Sakuma, M. Saito, J. Mizuno, S. Shoji

    Japanese Journal of Applied Physics (JJAP)   48 ( 11 ) 115001  2009.11  [Refereed]

  • Fabrication of post-hydrophilic treatment-free plastic biochip using polyurea film

    Hidetoshi Shinohara, Yoshikazu Takahashi, Jun Mizuno, Shuichi Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   154 ( 2 ) 187 - 191  2009.09  [Refereed]

     View Summary

    A novel low-temperature bonding method was developed by using polyurea film as intermediate layers. A microchip with a microchannel having a highly hydrophilic surface was realized by pretreatment with vacuum ultraviolet light irradiation under an oxygen atmosphere (VUV/O(3)). The bonding temperature is low enough to use thermo-plastic channel plates such as PMMA (poly(methyl methacrylate)) with negligible deformation of the channel structure. The results of contact angle measurements indicate the highly hydrophilic surface of the microchannel was retained after the bonding process. There was no leakage or obstacles to smooth fluidic flow at the bonded interface. For actual micro-biochip fabrication with this method, the post-hydrophilic treatment after bonding process is unnecessary. (C) 2008 Elsevier B.V. All rights reserved.

    DOI

  • Seamless Pattern Fabrication of Large-Area Nanostructures Using Ultraviolet Nanoimprint Lithography

    S. Kataza, K. Ishibashi, M. Kokubo, H. Goto, J. Mizuno, S. Shoji

    Japanese Journal of Applied Physics   48 ( 6 ) 06FH21  2009.07

  • Simplified 20-mu m Pitch Vertical Interconnection Process for 3D Chip Stacking

    Katsuyuki Sakuma, Noriyasu Nagai, Mikiko Saito, Jun Mizuno, Shuichi Shoji

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   4 ( 3 ) 339 - 344  2009.05  [Refereed]

     View Summary

    This paper describes a simplified vertical interconnection process for three-dimensional (3D) chip stacking. The unique feature of this new process is that the conductive filling material in the through-silicon-vias (TSVs), the microbumps, and the interconnection materials are all fabricated in one processing stage. All of the steps can be performed with the same piece of equipment. Prototype chips with 20-mu m-pitch vertical interconnections have been demonstrated successfully. By using this technique, 75-mu m deep high-aspect-ratio vias can be completely filled without voids using Ni electroplating and uniform 20-mu m-pitch microbumps that are 4-mu m tall have been fabricated using Sn-Cu electroplating. (C) 2009 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI

  • 細胞解析チップ〜生体内のがん細胞の挙動研究を目指して

    務中達也, 叶井正樹, 木村晋也, 芦原英司, 阿部浩久, 庄子習一, 前川平

    島津評論   66 ( 3・4 ) 141 - 149  2009.03

  • Size-selective separation of micro beads by utilizing secondary flow in a curved rectangular microchannel

    Dong Hyun Yoon, Jin Bong Ha, Yoen Kyung Bahk, Takahiro Arakawa, Shuichi Shoji, Jeung Sang Go

    LAB ON A CHIP   9 ( 1 ) 87 - 90  2009  [Refereed]

     View Summary

    This paper presents a microscale benefit of a secondary flow obtained in a curved rectangular microchannel, which is generally unfavorable and negligible in conventional fluid flow. We have demonstrated the separation and sorting of micro beads by their size using secondary flow. The physical mechanism occurring in the size-selective separation was explained based on the numerical analysis of the characteristic velocity distribution on the cross-sectional plane normal to the main flow stream. The dynamic trajectories of micro beads of different sizes and materials are visualized and compared for the experimental demonstration. We also discuss the effects of both the shape uniformity of the micro beads and the inlet condition on the size-selective separation.

    DOI

  • Fabrication of Uniform Gratings on Composite Semiconductors Using UV Nanoimprint Lithography

    Shugo Ishizuka, Masashi Nakao, Shinro Mashiko, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   22 ( 2 ) 213 - 217  2009  [Refereed]

     View Summary

    A fabrication method of uniform gratings on composite semiconductors using ultraviolet nanoimprint lithography (UV-NIL) is described. Since the grating pattern was batch transferred to the resin on substrates in this process, a high throughput fabrication process is expected. Both the dry etching process and the wet etching process can be performed for composite semiconductors patterning. The uniformity of the pattern height on a 3 inch GaAs substrate is better than the standard deviation of 2.6.

  • On-chip microfluidic sorting with fluorescence spectrum detection and multiway separation

    Hirokazu Sugino, Kazuto Ozaki, Yoshitaka Shirasaki, Takahiro Arakawa, Shuichi Shoji, Takashi Funatsu

    LAB ON A CHIP   9 ( 9 ) 1254 - 1260  2009  [Refereed]

     View Summary

    The microfluidic platform is an important tool for diagnosis and biomedical studies because it enables us to handle precious cells and infectious materials safely. We have developed an on-chip microfluidic sorter with fluorescence spectrum detection and multiway separation. The fluorescence spectrum of specimens (495-685 nm) in the microchannels was obtained every 2 ms using a 1 x 16 arrayed photomultiplier tube. The specimen was identified by its spectrum and collected into the corresponding channel based on our previously reported thermoreversible gelation polymer technique (Y. Shirasaki, J. Tanaka, H. Makazu, K. Tashiro, S. Shoji, S. Tsukita and T. Funatsu, Anal. Chem., 2006, 78, 695-701). Four kinds of fluorescence microspheres and three kinds of Escherichia coli cells, expressing different fluorescent proteins, were successfully separated with accuracy and purity better than 90% at a throughput of about one particle per second.

    DOI

  • Desktop Type Equipment of Thermal-assisted UV Roller Imprinting

    Tomotaka Shibazaki, Hidetoshi Shinohara, Tamano Hirasawa, Nobuji Sakai, Jun Taniguchi, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   22 ( 6 ) 727 - 730  2009  [Refereed]

     View Summary

    Desktop type equipment of thermal-assisted UV roller imprinting was developed. A remarkable advantage of the desktop type equipment is expected to be easy evaluation of replication results using different molds with small amounts of resin. Replication tests were carried out under various scanning speed of the stage, UV intensity, and roll temperature. Pattern replication was improved by heating roll under the same scanning speed of stage. Heating of the roll was effective to realize better pattern replication under the same scanning speed of the stage.

  • 「機械工学年鑑」24章2節:マイクロ・ナノ工学 — マイクロTAS

    庄子習一

    日本機械学会誌 2008年8月号   111 ( 1077 ) 83  2008.08

  • Polymer microchip integrated with nano-electrospray tip for electrophoresis-mass spectrometry

    Hidetoshi Shinohara, Takafumi Suzuki, Fumihiko Kitagawa, Jun Mizuno, Koji Otsuka, Shuichi Shoji

    SENSORS AND ACTUATORS B-CHEMICAL   132 ( 2 ) 368 - 373  2008.06  [Refereed]

     View Summary

    A novel cyclo-olefin polymer (COP) microchip was developed integrated with an electrospray ionization (ESI) emitter tip for microchip electrophoretic separation and mass spectrometric detection. The microchip was fabricated by hot embossing and low-temperature direct bonding. The ESI emitter tip structure was formed directly at the microchip electrophoresis (MCE) outlet. Since these microchips enable negligible dead volume at the electrospray port, efficient spray of the sample necessary for acceptable resolution mass spectrometry (MS) was realized. Stable spray was also achieved at the low flow rate (similar to 0.1 mu L/min) without additional pump. By applying the fabricated COP chip to the MCE-ESI-MS analysis, successful separation and detection of caffeine and arginine was achieved. (c) 2007 Elsevier B.V. All rights reserved.

    DOI

  • Fabrication of catalyst-functionalized three-dimensional micromesh structures

    Satoshi Keino, Hironobu Sato, Takayuki Homma, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   47 ( 6 ) 5204 - 5207  2008.06  [Refereed]

     View Summary

    We present fabrication methods of functional three-dimensional (3-D) micromesh structures coated with titanium dioxide (TiO(2)) microparticles and biocatalysts. The 3-D micromesh structures are useful for fabricating highly efficient microreactors because of their large surface area. In this study, TiO(2)-embedded SU-8 micromesh structures were formed by coating a TiO(2)/SU-8 mixture onto the surface of SU-8 micromesh structures. Biocatalyst-immobilized micromesh structures were also formed by coating a biocatalyst/photopolymer mixture onto SU-8 micromesh structures.

    DOI

  • Micro-bubble formation with organic membrane in a multiphase microfluidic system

    Takahiro Arakawa, Takahiro Yamamoto, Shuichi Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   143 ( 1 ) 58 - 63  2008.05  [Refereed]

     View Summary

    This paper describes the continuous and uniform organic encapsulated micro-bubble generation system in a water flow microchannel including a lumped gas and organic injection junction. The micro-bubble was formed by the blow of organic phase into a water phase in microchannel and the gas was encapsulated in the thin organic membrane. Multiphase microchemical systems provide the large interfacial area, fast mixing and fast reaction efficiency to achieve increased performance in microfluidic system. The diameter and thickness of organic microbubble were well controlled by the flow rates of water phase and organic phase. The diameter of the gas bubble encapsulated organic membrane was ranged from 110 mu m to 220 mu m, while the thickness of organic membrane from 4 mu m to 16 mu m. The generation rate of organic micro-bubble was 40 numbers per second with the uniform volume controllable, ranging from 214 pL, to 855 pL. The organic membrane is applicative for the chemical reaction media, and the organic bubble is expected to apply as capsules of reactive gas handling in microfluidic system. (C) 2007 Elsevier B.V. All rights reserved.

    DOI

  • M41 Micropump: liquid

    S. Shoji, H. Sato, R. Zengerle

    Comprehensive Microsystems, Elsevier Science Ltd.    2008.03

  • 化学・バイオ応用を目的としたマイクロ流体制御素子

    庄子習一

    バルブ技報 通巻第60号   23 ( 1 ) 73 - 76  2008.03

  • Fabrication of high-intensity light-emitting diodes using nanostructures by ultraviolet nanoimprint lithography and electrodeposition

    Hiroshi Ono, Yoshinobu Ono, Kenji Kasahara, Jun Mizuno, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS   47 ( 2 ) 933 - 935  2008.02  [Refereed]

     View Summary

    Antireflection nanostructures for GaN light-emitting diodes (LEDs) were fabricated by reactive ion etching (RIE) using Ni as an etching mask. The Ni mask was formed by electrodeposition in combination with ultraviolet nanoimprint lithography (UV-NIL). The antireflection nanostructures of 600 nm in depth, 300 nm in diameter, and 500 nm in pitch were fabricated on a GaN substrate. The radiant intensity of the LEDs was increased 1.5 times compared to that of a conventional LED. Since this method enables the fabrication of wafer-level GaN nanostructures with a low cost process, it is applicable to the fabrication of photonic crystals.

    DOI

  • Microfluidic Centrifuge of Nano-Particles Using Rotating Flow in a Microchamber

    J.H. Lee, J.B. Ha, Y.K. Bahk, S.H. Yoon, T. Arakawa, J.S. Ko, B.S. Shin, S. Shoji, J.S. Go

    Sensors and Actuators B   132   525 - 530  2008  [Refereed]

  • Fabrication of magnetic nanodots array using UV nanoimprint lithography and electrodeposition for high density patterned media

    Hidetoshi Shinohara, Makoto Fukuhara, Tamano Hirasawa, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   21 ( 4 ) 591 - 596  2008  [Refereed]

     View Summary

    A Magnetic nanodots array fabrication method using ultraviolet nanoimprint lithography (UV-NIL) and electrodeposition was developed. Since the photocurable resin patterned by UV-NIL was directly used for electrodeposition mask, simple and high throughput fabrication process was realized. The CoPt nanodots (diameter: 120 nm) array was formed after the electrodeposition. After chemical mechanical polishing (CMP), the arithmetic mean roughness (R(a)) of the track area was smaller than 1 nm..

  • 混相流マイクロ流体システムを用いた微小マイクロ液滴の生成と応用

    荒川貴博, 庄子習一

    表面科学   29 ( 6 ) 356 - 363  2008

  • MEMS・ナノテクノロジーのバイオ・医療分野への応用

    庄子習一

    精密工学会誌   74 ( 1 ) 28 - 32  2008.01

  • Parallel and Passive Distribution to Arrayed Microwells Using Self-Regulating Pinched Flow

    Kentaro Kawai, Masaki Kanai, Tatsuya Munaka, Hirohisa Abe, Akira Murakami, Shuichi Shoji

    SENSORS AND MATERIALS   20 ( 6 ) 281 - 288  2008  [Refereed]

     View Summary

    A parallel and passive (without any actuators or electrodes) cell distribution method for a cellular diagnostic microwell array was developed. This method can be used to simultaneously distribute cells evenly to arrayed microwells only by introducing Cell suspensions into the inlet. To regulate the dispersion of the number of distributed cells into each microwell, we conceived a novel concept, the self-regulating pinched flow. The self-regulating pinched flow is realized in a functional microchannel, which consists of center micropillar colonnades and side channels. Computational fluid dynamics (CFD) simulations were carried out to optimize the design of the pinching area. We developed a prototype device that can be used to Successfully distribute the beads uniformly in eight parallel microwells. The coefficient of variation (CV) of the distributed beads in the microwells was 29.3%.

  • 3D Sheath Flow Using Hydrodynamic Position Control of the Sample Flow

    H. Sato, Y. Sasamoto, D. Yagyu, T. Sekiguchi, S. Shoji

    Journal of Micromechanics and Microengineering   17   2211 - 2216  2007.10

  • Rapid Multi-Reagents Exchange TIRFM Microfluidic System for Single Biomolecular Imaging

    T. Arakawa, T. Sameshima, Y. Sato, T. Ueno, Y. Shirasaki, T. Funatsu, S. Shoji

    Sensors and Actuators B   128   218 - 225  2007.06

  • Fabrication of a Microchannel Device by Hot Embossing and Direct Bonding of Poly(methyl methacrylate)

    H. Shinohara, J. Mizuno, S. Shoji

    Japanese Journal of Applied Physics   46 ( 6A ) 3661 - 3664  2007.06

  • Low-temperature direct bonding of poly(methyl methacrylate) for polymer microchips

    Hidetoshi Shinohara, Jun Mizuno, Shuichi Shoji

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   2 ( 3 ) 301 - 306  2007.05  [Refereed]

     View Summary

    A low-temperature, direct bonding method for poly(methyl methacrylate) (PMMA) plates has been developed by employing surface treatment by atmospheric pressure oxygen plasma, vacuum oxygen plasma, ultraviolet (UV)/ozone or vacuum ultraviolet (VUV)/ozone. Reasonable bonding strength, as evaluated by a tensile test, was achieved below the glass transition temperature (T,). The highest bonding strength among the achieved results is 1.43 MPa (about three times the value for conventional direct bonding) at an annealing temperature of 50 degrees C and an applied pressure of 2.5 MPa for 10 min. Low-temperature bonding prevents deformation of the PMMA microstructure. A prototype PMMA microchip that has fine channels of 5 pm depth was fabricated by hot-embossing using a Si mold. After atmospheric pressure oxygen plasma activation, direct bonding was carried out at an annealing temperature of 75 degrees C and an applied pressure of 3 MPa for 3 min. The method gives Good bonding characteristics without deformation and leakage. This low-temperature bonding technology can be applied to polymer micro/nano structures. (c) 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI

  • Fabrication of metallic nanopatterns using the vacuum type UV-NIL equipment

    Makoto Fukuhara, Jun Mizuno, Mikiko Saito, Takayuki Homma, Shuichi Shoji

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   2 ( 3 ) 307 - 312  2007.05  [Refereed]

     View Summary

    Nanoscale dot patterns of cobalt alloy were formed on a silicon substrate using the ultra-violet nanoimprint lithography (UV-NIL) technology in combination with an electrodeposition process. We developed an improved UV-NIL equipment that can evacuate the chamber during imprinting. Using this equipment, we successfully imprinted 240-nm dot patterns with 500 nm pitch on a photocurable resin with high dimensional accuracy. Thickness control of the resin and imprinting under vacuum are important issues to obtain fine nanopatterns. Using these resin patterns as a mask layer, 300-nm cobalt alloy patterns are successfully formed by the electrodeposition process. (c) 2007 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    DOI

  • On-Chip Cell Sorting System Using Thermoreversible Gelation Polymer

    Y. Shirasaki, H. Sugino, M. Tatsuoka, J. Mizuno, S. Shoji, T. Funatsu

    IEEE Journal of Selected Topics in Quantum Electronics   13 ( 2 ) 223 - 227  2007.04

  • Interdigitated Array 3D Micromesh Electrodes for Electrochemical Sensors

    H. Sato, K. Yoshimine, T. Otsuka, S. Shoji

    Journal of Micromechanics and Microengineering   17   909 - 914  2007.04

  • Three-dimensional sheath flow sorting microsystem using thermosensitive hydrogel

    Takahiro Arakawa, Yoshitaka Shirasaki, Tokihiko Aoki, Takashi Funatsu, Shuichi Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   135 ( 1 ) 99 - 105  2007.03  [Refereed]

     View Summary

    This paper details a three-dimensional sheath flow sorting microsystem for separation and collection of biomolecules. High-speed particle and biomolecule 3D sheath flow sorting system was realized using reversible thermosensitive hydrogel. The sol-gel transfer of the thermosensitive hydrogel generated by focused IR laser irradiation performs flow switching, the response time of the sol-gel transformation using Mebiol Gel (TM) was less than 1 ms. For actual bio-applications, accurate and high-speed micro sorter is realized by optimizing the channel structure and by utilizing 3D sheath flow. High-speed sorting less than 3.0 ms from detection to separation of targets and no error sorting for 45 min (100,000 counts) in 3D sheath flow sorting system was realized. 3D sheath flow can be focused to 1.2 mu m of transverse distribution and 6.0 mu m of longitudinal distribution in regard to microbeads of sample flow. The same flow velocity and flow line of the focused sample flow are kept at constant laser irradiation time and power to sort the target. Since sorting was performed in simple and disposable PDMS-glass microchannels without any electric stimulation and mechanical valve structures, the proposed system is suitable for many biochemical applications. (C) 2006 Elsevier B.V. All rights reserved.

    DOI

  • MPS法を用いたマイクロ混相流3次元解析

    原田隆宏, 鈴木幸人, 越塚誠一, 荒川貴博, 庄子習一

    日本機械学会論文集 2007年2月号B編   73 ( 726 ) 437 - 444  2007.02

  • Real-time monitoring of antibody secretion from B-cells on a microchip stimulated with a minute amount of mitogen

    Munaka, Tatsuya, Abe, Hirohisa, Kanai, Masaki, Sakamoto, Takashi, Nakanishi, Hiroaki, Shoji, Shuichi, Kimura, Shinya, Maekawa, Taira, Murakami, Akira

    Analyst   132 ( 6 ) 512 - 514  2007  [Refereed]

  • UV nanoimprint lithography and its application for nanodevices

    Makoto Fukuhara, Hiroshi Ono, Tamano Hirasawa, Makoto Otaguchi, Nobuji Sakai, Jun Mizuno, Shuichi Shoji

    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY   20 ( 4 ) 549 - 554  2007  [Refereed]

     View Summary

    Nanostructure fabrication process using ultraviolet nanoimprint lithography (UV-NIL) and electrodeposition were proposed. This method shows remarkable advantages in high throughput production and fabrication cost. For this process, the newly resin which endures wet process was developed. Co dot arrays of 220nm were fabricated by electrodeposition after UV-NIL. GaN structure of 300nm was also realized using Ni as an etching mask fabricated by proposed process.

  • High-speed particles and biomolecules sorting microsystem using thermosensitive hydrogel

    Takahiro Arakawa, Yoshitaka Shirasaki, Toshimitsu Izumi, Tokihiko Aoki, Hirokazu Sugino, Takashi Funatsu, Shuichi Shoji

    MEASUREMENT SCIENCE AND TECHNOLOGY   17 ( 12 ) 3141 - 3146  2006.12  [Refereed]

     View Summary

    Two types of high-speed particle and biomolecule sheath flow sorters were realized using thermosensitive hydrogel. One is all hydrogel sheath flow and the other is two-phase sheath flow that consists of a water flow including samples and two hydrogel carrier flows; these have been utilized instead of the air and water droplet two-phase flow used in the conventional commercialized cell sorting system. Flow switching is performed by the sol-gel transfer of the thermosensitive hydrogel generated by focused infrared (IR) laser irradiation. High-speed sorting less than 5.0 ms and no error sorting (120 000 counts) in the all hydrogel sheath flow system while 20 ms in the two-phase sheath flow was realized. Since sorting was performed in simple PDMS-glass microchannels without any electric stimulation and mechanical valve structures, the proposed system is suitable for many biochemical applications.

    DOI

  • An all SU-8 microfluidic chip with built-in 3D fine microstructures

    Hironobu Sato, Hirokazu Matsumura, Satoshi Keino, Shuichi Shoji

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   16 ( 11 ) 2318 - 2322  2006.11  [Refereed]

     View Summary

    This paper describes the fabrication method of an all SU-8 microfluidic device with built-in 3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the SU-8 sealed microchannel. To eliminate gap formation and filling of the microchannel, the built-in micromeshes in the microchannel were formed by photolithography after bonding the SU-8 top-cover layer and the SU-8 bottom substrate. The lift-off method, using lift-off resist as a sacrificial layer, was utilized to release the all SU-8 microfluidic chips. Monolithic SU-8 structures realize uniform physical and chemical surface properties required in microfluidic devices for practical use. As an application, fragmentation of a water droplet in an organic carrier formed by a two-phase flow was demonstrated.

    DOI

  • An extended gate FET-based biosensor integrated with a Si microfluidic channel for detection of protein complexes

    Dong-Sun Kim, Jee-Eun Park, Jang-Kyoo Shin, Pan Kyeom Kim, Geunbae Lim, Shuichi Shoji

    SENSORS AND ACTUATORS B-CHEMICAL   117 ( 2 ) 488 - 494  2006.10  [Refereed]

     View Summary

    In this work, we present an extended gate field effect transistor (EGFET)-based biosensor integrated with a silicon micro-fluidic channel for the electronic detection of streptavidin-biotin protein complexes. The connection between the EGFET and microfluidic system could be achieved with the proposed device, as it offers isolation between the device and solution, compatibility with the integrated circuit (IQ technology and, is applicable to the micro total analysis system (mu-TAS). The device was fabricated on the basis of semiconductor IC fabrication and micro-electro mechanical system (MEMS) technology. Au was used as the extended gate metal to form a self-assembled monolayer (SAM) with thiol. The bindings of the SAM, streptavidin and biotin were detected by measuring the electrical characteristics of the FET device. We also verified the interactions among the SAM, streptavidin, and biotin by using surface plasmon resonance (SPR) measurements. Furthermore, atomic force microscopy (AFM) images of the bio-layers formed on the Au electrode were taken in a solution in order to determine the presence of protein biomolecules with the proposed configuration. (c) 2006 Elsevier B.V. All rights reserved.

    DOI

  • Metallization on three dimensions microstructures using photoresist spray coating for microdirect methanol fuel cell

    Masanori Ishizuka, Hiroaki Houjou, Shinji Motokawa, Jun Mizuno, Toshiyuki Momma, Tetsuya Osaka, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 10A ) 7944 - 7948  2006.10  [Refereed]

     View Summary

    High-efficientcy micro-electrochemical devices are realized by increasing electrode surface areas while maintaining keeping chip size. The use of three dimensional (3-D) electrodes instead of planar electrodes is effective for this purpose. To realize a metal pattern on 3-D structures, spray coating was utilized and the optimum condition for achieving a good photoresist step coverage was determined. A good step coverage of the photoresist was obtained on the obtuse corner formed by the anisotropic wet etching of (100) silicon and even on the vertical corner formed,by deep reactive ion etching (RIE). We applied this method to fabricate a high-performance micro direct methanol fuel cell (mu DMFC). An open circuit voltage of 548 mV and a maximum power density of 0.72 mW/cm(2) were obtained at room temperature with 2 M methanol.

    DOI

  • Simulation of droplet generation in micro flow using MPS method

    Takahiro Harada, Yukihito Suzuki, Seiichi Koshizuka, Takahiro Arakawa, Shuichi Shoji

    JSME INTERNATIONAL JOURNAL SERIES B-FLUIDS AND THERMAL ENGINEERING   49 ( 3 ) 731 - 736  2006.08  [Refereed]

     View Summary

    Micro droplet generation is one of the basic functions in a micro total analysis system (micro TAS). Micro TAS has a lot of advantages and thus has wide range of applications in these days. In this study, a numerical calculation code for micro multi-phase flow is developed using Moving Particle Semi-implicit (MPS) method. Since surface tension is extremely strong and dominant in micro multi-phase flow, a time step is divided to sub-time steps for the surface tension term. This sub-time step algorithm enables us to calculate micro multi-phase flow efficiently with keeping numerical stability. Micro droplet generation in a micro channel is analyzed by the present code in two dimensions. The calculated droplet size, pitch and production rate show good agreement with those of the experiment.

  • マイクロ流体デバイス

    庄子習一, 荒川貴博, 叶井正樹, 佐藤寛暢

    真空(日本真空協会)   49 ( 7 ) 395 - 399  2006.07

  • Improved passive cell distributing method for micro cellular diagnostic well array

    Kentaro Kawai, Masaki Kanai, Hiroaki Nakanishi, Shuichi Shoji

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 6B ) 5607 - 5613  2006.06  [Refereed]

     View Summary

    We developed a novel biological cell injection method for a large number of diagnostic wells fabricated in parallel. This method facilitates simultaneous cell injection into a microwell array with a simple channel configuration, which can distribute cells evenly to each microwell only by introducing cell suspensions from the inlet. In order to enhance the uniformity of the numbers of injected cells in each microwell, we developed the new concept of flow interchange, which can suppress deviation of the cell flow profile in the cell loading channels. The uniformity of the injected fluorescent beads in each microwell was evaluated using prototype devices of eight microwell arrays. It was confirmed that the flow interchange structure is effective to realize uniform injection. The coefficient of variation of bead numbers in eight microwells was 20.7%.

  • Microfluidics assisted synthesis of well-defined spherical polymeric microcapsules and their utilization as potential encapsulants

    Sinoj Abraham, Eun Ho Jeong, Takahiro Arakawa, Shuichi Shoji, Kyung Chun Kim, Il Kim, Jeung Sang Go

    LAB ON A CHIP   6 ( 6 ) 752 - 756  2006.06  [Refereed]

     View Summary

    In this article, the development of a novel technique to fabricate spherical polymeric microcapsules by utilizing microfluidic technology is presented. Atom transfer radical polymerization (ATRP) was employed to synthesize well-defined amphiphilic block copolymers. An organic polymer solution was constrained to adopt the spherical droplets in a continuous water phase at a T-junction microchannel, and the generation of the droplets was studied quantitatively. The flow conditions of two immiscible solutions were adjusted for the successful generation of the polymer droplets. The morphology of the microcapsules was examined. The efficiency of these polymer microcapsules as containers for the storage and controlled release of loaded molecules was evaluated by encapsulating the microcapsules with Congo-red dye and investigating the release performance using temperature controlled UV-VIS spectroscopy.

    DOI

  • MEMS技術の化学・バイオへの応用

    庄子習一

    ニューダイヤモンドフォーラム会誌NEW DIAMONDO 第81号   22 ( 2 ) 48 - 50  2006.04

  • Improved inclined multi-lithography using water as exposure medium and its 3D mixing microchannel application

    H Sato, D Yagyu, S Ito, S Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   128 ( 1 ) 183 - 190  2006.03  [Refereed]

     View Summary

    This paper presents the inclined UV lithography in water medium and 3D mixing microchannel application. The theoretical limit of the inclination angle of the structure is determined by the difference of the refractive index between air and SU-8. In order to reduce the mismatch of the refractive index between air and photoresist, DI water was used as exposure medium instead of air. As a result, the maximum angle of the inclined structure was improved from 38.7 degrees (in air) to 56.2 degrees (in water). Fine and high aspect ratio SU-8 structures were obtained using UV exposure in water medium. As a microfluidic application, a microchannel having 3D slanted grooves was designed and fabricated. 45 degrees slanted grooves were formed successfully on the sidewalls of the microchannel by using inclined UV exposure in water medium. Mixing efficiency of this microchannel was evaluated by CFD simulation and cross-sectional fluorescence image detection using confocal microscope. (c) 2005 Elsevier B.V. All rights reserved.

    DOI

  • On-chip cell sorting system using laser-induced heating of a thermoreversible gelation polymer to control flow

    Y Shirasaki, J Tanaka, H Makazu, K Tashiro, S Shoji, S Tsukita, T Funatsu

    ANALYTICAL CHEMISTRY   78 ( 3 ) 695 - 701  2006.02  [Refereed]

     View Summary

    We have developed a microfabricated fluorescence-activated cell sorter system using a thermoreversible gelation polymer (TGP) as a switching valve. The glass sorter chip has Y-shaped microchannels with one inlet and two outlets. A biological specimen containing fluorescently labeled cells is mixed with a solution containing a thermoreversible sol-gel polymer. The mixed solution is then introduced into the sorter chip through the inlet. The sol-gel transformation was locally induced by site-directed infrared laser irradiation to plug one of the outlets. The fluorescently labeled target cells were detected with sensitive fluorescence microscopy. In the absence of a fluorescence signal, the collection channel is plugged through laser irradiation of the TGP and the specimens are directed to the waste channel. Upon detection of a fluorescence signal from the target cells, the laser beam is then used to plug the waste channel, allowing the fluorescent cells to be channeled into the collection reservoir. The response time of the sol-gel transformation was 3 ms, and a flow switching time of 120 ms was achieved. Using this system, we have demonstrated the sorting of fluorescent microspheres and Escherichia coli cells expressing fluorescent proteins. These cells were found to be viable after extraction from the sorting system, indicating no damage to the cells.

    DOI

  • Monitoring Cellular Events in Living Mast Cells Stimulated with an Extremely Small Amount of Fluid on a Microchip

    T. Munaka, H Abe, M. Kanai, T. Sakamoto, H. Nakanishi, T. Yamaoka, S. Shoji, A. Murakami

    Japanese Journal of Applied Physics   45 ( 24 ) L634 - L637  2006  [Refereed]

  • アクリル製マイクロチャネルアレイを用いた血液通過時間の再現性の検討

    西泰治, 萩原清道, 福田始弘, 木下藤寿, 伊藤克之, 菊池佑二, 庄子習一, 水野潤, 篠原秀敏

    日本ヘモレオロジー学会誌   9 ( 2 )  2006

  • Realization of A Chip-Level Batch Process Chemical Plant with Quantitative Performance Evaluation

    E. H. Jeong, T. Arakawa, K. C. Kim, J. S. Boo, J. S. Ko, B. Shin, S. Shoji, J. S. Go

    Key Engineering Materials   326-328   269 - 272  2006  [Refereed]

  • Real-time monitoring of antibody secretion from hybridomas on a microchip by time-resolved luminescence anisotropy analysis

    Munaka, Tatsuya, Abe, Hirohisa, Kanai, Masaki, Sakamoto, Takashi, Nakanishi, Hiroaki, Yamaoka, Tetsuji, Shoji, Shuichi, Murakami, Akira

    Analytical biochemistry   353 ( 1 ) 1 - 6  2006  [Refereed]

  • Picoliter volume glass tube array fabricated by Si electrochemical etching process

    H Sato, T Homma, K Mori, T Osaka, S Shoji

    ELECTROCHIMICA ACTA   51 ( 5 ) 844 - 848  2005.11  [Refereed]

     View Summary

    Fabrication process for picoliter volume SiO2 glass tube array partially embedded in Si wafer was developed. As a template for the glass tubes, macropore array was formed at the surface of n-Si(1 0 0) wafer by photo-assisted electrochemical etching process. The area-selective formation of the array was achieved by applying Au/Cr micropatterns formed at the back-side surface of the substrate as the shade mask, which controls the illumination condition to optimize the etching reaction conditions. Subsequently, surface of the macropores was wet-thermally oxidized to form glass layer, and the bulk Si region was removed by alkaline etching, remaining the "glass tubes". As a result of complete removal of the bulk Si, released glass tubes were obtained. By partial removal of the bulk Si part, the glass tubes were exposed, fixed in the remaining Si substrate in the form of well-ordered array. It was confirmed that the depth, the exposed region and the wall thickness of each glass tube were controllable by adjusting the parameters such as the duration of the Si electrochemical etching, the alkaline etching and the wet-thermal oxidation, respectively. In order to demonstrate microreaction in the glass tube, aqueous rhodamine B solution was injected into the tubes and excitation light was irradiated to them. As a result, the fluorescence of rhodamine B was clearly detected, confirming the applicability of the glass tubes for various kinds of devices and systems such as microreactors. (C) 2005 Elsevier Ltd. All rights reserved.

    DOI

  • マクロ流体素子を目的とした金属電極埋め込みPDMS三次元構造体組み立て技術

    石束真典, 阿部昌昭, 北條洋明, 水野潤, 庄子習一

    電気学会論文誌E   125 ( 9 ) 393 - 397  2005.09

  • 化学・バイオ応用マイクロ・ナノ流体デバイス・システム

    庄子習一

    ケミカル エンジ二ヤリング (化学工業社)   50 ( 7 ) 1 - 5  2005.07

  • High efficiency electrochemical immuno sensors using 3D comb electrodes

    N Honda, M Inaba, T Katagiri, S Shoji, H Sato, T Homma, T Osaka, M Saito, J Mizuno, Y Wada

    BIOSENSORS & BIOELECTRONICS   20 ( 11 ) 2306 - 2309  2005.05  [Refereed]

     View Summary

    To realize highly sensitive electrochemical immunoassays, a micro-fabricated three-dimensional (313) electrode was fabricated and applied to enzyme immuno assay based on production of a redox species. The dimensions of the electrodes are 10 mu m in width and 30 mu m in height, with 20 mu m spacing in between, and the 30 pairs of anode and cathode electrodes made up a single sensor. This structure lead to enhancement of the electrochemical reaction, nearly 100% of trap ratio of redox species. It can be applied to highly sensitive enzyme immuno sensing based on p-aminophenylphosphate (PAPP). Applicability of this technique to the immuno assay for one of the clinical diagnostic marker proteins (alpha-fetoprotein; AFP) from 6 to 500 ng/mL was demonstrated. (c) 2004 Elsevier B.V. All rights reserved.

    DOI

  • PDMS microchannels with slanted grooves embedded in three walls to realize efficient spiral flow

    H Sato, S Ito, K Tajima, N Orimoto, S Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   119 ( 2 ) 365 - 371  2005.04  [Refereed]

     View Summary

    This paper presents functional three-dimensional microchannels whose top and side walls have slanted microgrooves. These microchannels can generate short pitch spiral flow for efficient chaotic mixing. We proposed a novel fabrication method for 3-D SU-8 molds using two-step inclined backside exposures and additional two-step top side exposures. The width and depth of the SU-8 microchannel are 100 mu m. Slanted grooves of 50 mu m in width and 30 mu m in depth were patterned on the top and the side walls of the microchannel. Their orientation angle was 63.5 degrees with the microchannel axis. It was demonstrated that the microchannel with slanted grooves on three walls achieved short pitch spiral flow compared to the microchannel with slanted grooves on one wall. Since liquid in the channel flows along the grooves on the walls, optimum design of the pitch and placement of the slanted grooves enables efficient spiral flows in the channel. (c) 2004 Elsevier B.V. All rights reserved.

    DOI

  • 化学・生化学分析への応用を目的としたマイクロ流体素子

    佐藤寛暢, 庄子習一

    混相流   19 ( 2 ) 86 - 93  2005

  • A disposable, dead volume-free and leak-free in-plane PDMS microvalve

    JS Go, S Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   114 ( 2-3 ) 438 - 444  2004.09  [Refereed]

     View Summary

    The align-less three-dimensional in-plane PDMS microvalve is presented. The device is entirely made from PDMS. The hemisphere with smooth surface ensures dead volume- and leak-free, which is formed by bulging of UV-curable glue. Also, the spin-coated PDMS membrane is bonded to the molded PDMS substrate for 3D structure fabrication indicating that align-less assembly is possible. In particular, the curing ratio, defined as the ratio of soft cure time and the full cure time of PDMS at the soft cure temperature, is for the first time introduced for PDMS-to-PDMS bonding. The best bonding judged from bonding feature and bonding strength is shown at the temperature of 50degreesC and 29 min implying the curing ratio of 0.06. Finally, a membrane-inserted in-plane PDMS microvalve is fabricated and its performance is visually evaluated. (C) 2004 Elsevier B.V. All. rights reserved.

    DOI

  • Prototype of the high sensitive X-ray microcalorimeter for X-ray imaging

    H Kudo, T Nakamura, T Arakawa, S Ohtsuka, T Izumi, S Shoji, H Sato, H Kobayashi, K Mori, T Homma, T Osaka, K Mitsuda, NY Yamasaki, R Fujimoto, N Iyomoto, T Oshima, K Futamoto, Y Takei, T Ichitsubo, T Fujimori, Y Ishisaki, U Morita, T Koga, K Sato, T Ohashi, Y Kuroda, M Onishi, K Otake, F Beppu

    SENSORS AND ACTUATORS A-PHYSICAL   114 ( 2-3 ) 171 - 175  2004.09  [Refereed]

     View Summary

    An X-ray microcalorimeter is a high performance X-ray spectrometer that can achieve both high energy resolution of conventional wavelength dispersive spectrometers (WDS) and high quantum efficiency of energy dispersive spectrometers (EDS). The energy resolution can be theoretically improved to about 1 eV, which value is 120 times better than that of conventional Si(Li) spectrometers and nearly 100% of quantum efficiency can be achieved using microabsorbers. In order to realize high energy-resolution X-ray imaging using an array of X-ray microcalorimeters, two types of 2 x 2 X-ray microcalorimeter arrays were fabricated and tested. Using an X-ray microabsorber so-called "mushroom-shaped" X-ray microabsorber, the filling factor was enhanced to about 70%. We tested Sn and Bi as an X-ray microabsorber. Consequently, the Sn absorber degrades the energy resolution because of the long time constant. This problem was cleared using the Bi microabsorber. The achievable energy resolution was also investigated. As a result, the energy resolution of 6.3 eV was obtained with the test device. (C) 2004 Elsevier B.V. All rights reserved.

    DOI

  • Micro chamber for cellar analysis integrated with negligible dead volume sample injector

    M Kanai, H Abe, T Munaka, Y Fujiyama, D Uchida, A Yamayoshi, H Nakanishi, A Murakami, S Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   114 ( 2-3 ) 129 - 134  2004.09  [Refereed]

     View Summary

    A micro chamber integrated with an extremely low dead volume sample injector for real-time monitoring of living cell was developed. By means of the combination of isotropic etching and deep trench etching using CCP-RIE and ICP-RIE, the sample injector with negligible dead volume of less than 0.05 nl is realized. Using fabricated devices, the reproducible sample injection of the order of 1 nl was obtained. Biological cell culture of rat mast cell was also performed in the fabricated micro chamber. (C) 2003 Elsevier B.V. All rights reserved.

    DOI

  • MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (mu-DMFC)

    S Motokawa, M Mohamedi, T Momma, S Shoji, T Osaka

    ELECTROCHEMISTRY COMMUNICATIONS   6 ( 6 ) 562 - 565  2004.06  [Refereed]

     View Summary

    A design for a novel micro direct methanol fuel cell (mu-DMFC) of 0.018 cm(2) active area is described. The mu-DMFC was prepared using a series of fabrication steps from micro-machined silicon wafer including photolithography, deep reactive ion etching, and electron beam deposition. The novelty of this structure is that we have fabricated the anodic and cathodic micro-channels arranged in plane, dissimilar to the conventional bipolar structure. The first objective of the experimental trials was to verify the feasibility of this novel structure on basis of MEMS technology. Preliminary testing results show that this new concept L-DMFC generates electricity. (C) 2004 Elsevier B.V. All rights reserved.

    DOI

  • Development of Bi electrodeposition process for fabricating microabsorber array for high sensitive X-ray imaging sensor

    H Sato, H Kobayashi, H Kudo, T Izumi, T Homma, T Osaka, S Shoji, Y Ishisaki, R Fujimoto, K Mitsuda

    ELECTROCHEMISTRY   72 ( 6 ) 424 - 426  2004.06  [Refereed]

     View Summary

    Microscale Bi electrodeposition process was developed to fabricate the array of mushroom-shaped absorbers for the high sensitive X-ray imaging sensor, so called X-ray microcalorimeter array. The bath composition and operating conditions for Bi electrodeposition was optimized, and sufficient bath stability and surface smoothness of the deposits were achieved by applying the additives such as diethylenetriamine pentaacetic acid and sodium n-dodecyl sulfate with appropriate concentration. By applying the two-step exposure steps for the "stem" part and the "roof" part, the mold to deposit the mushroom-shaped microstructure was formed from single-layered photoresist coating. The absorber array was successfully fabricated by the sequential processes of Bi electrodeposition into the mold, precise polishing, and mold removal.

  • In-channel 3-D micromesh structures using maskless multi-angle exposures and their microfilter application

    H Sato, T Kakinuma, JS Go, S Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   111 ( 1 ) 87 - 92  2004.03  [Refereed]

     View Summary

    This paper presents a fabrication method of in-channel three-dimensional micromesh structures using conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Number of exposures and irradiation angles decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated using the same Cr pattern on the glass substrate. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of micro total analysis systems (muTAS), the microfilter was fabricated and its filtering property was demonstrated. (C) 2003 Elsevier B.V. All rights reserved.

    DOI

  • The multiple sample injector using improved sheath flow to prevent sample dilution

    M Kanai, S Ikeda, J Tanaka, JS Go, H Nakanishi, S Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   111 ( 1 ) 32 - 36  2004.03  [Refereed]

     View Summary

    This paper presents a sheath flow multiple sample injector that realizes concentration-conservative sample injection. Stepwise flow is used to reduce the dilution of the sample reagent. Based on the CFD simulation results, it is estimated that sample reagent is diluted to 94% in a conventional sample injector. With stepwise flow, however, the level of dilution is reduced and the average concentration is estimated to be near 100%. For the experiment evaluation, a sample injector is fabricated and the sample injection using stepwise flow is visualized using a fluorescent measuring system. The accuracy of the injected sample volume and the feasibility of multiple sample injection are evaluated based on the experiment results. (C) 2003 Elsevier B.V. All rights reserved.

    DOI

  • Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber

    T Arakawa, H Kudo, H Sato, H Kobayashi, T Izumi, S Ohtsuka, K Mori, S Shoji, T Osaka, T Homma, K Mitsuda, N Yamasaki, R Fujimoto, N Iyomoto, Y Ishisaki, U Morita, T Koga, K Shinozaki, K Sato, N Takai, T Ohashi, Y Kuroda, M Onishi, M Goto, F Beppu

    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT   520 ( 1-3 ) 456 - 459  2004.03  [Refereed]

     View Summary

    We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described. (C) 2003 Elsevier B.V. All rights reserved.

    DOI

  • ポリマーを用いたMEMS技術とその応用

    庄子習一

    電気学会論文誌E   124 ( 10 ) 349 - 353  2004

  • microTAS2004 Malmo Sweden

    庄子習一

    次世代センサ   14 ( 2 ) 18 - 19  2004

  • 早稲田大学COE ナノ分子工学研究拠点

    庄子習一

    次世代センサ   14 ( 1 ) 5 - 7  2004

  • フッ素樹脂被服PDMSマイクロ構造体形成に関する研究

    内田大輔, 叶井正樹, 西本尚弘, 庄子習一

    電気学会論文誌E   124 ( 10 ) 364 - 368  2004

  • Fabrication of polymer and metal three-dimensional micromesh structures

    H.Sato, Y.Houshi, T.Otsuka, S.Shoji

    J. J. Applied Physics   43 ( 12 ) 8341 - 8344  2004  [Refereed]

  • Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography

    H.Sato, Y.Houshi, S.Shoji

    Microsystem Technologies   9   440 - 443  2004  [Refereed]

  • High sensitive X-ray microcalorimeter using Bi-Au microabsorber for imaging applications

    H.Kudo, T.Arakawa, S.Ohtsuka, T.Izumi, S.Shoji, H. Sato, H. Kobayashi, K. Mori, T. Osaka

    J.J. Applied Physics   43 ( 3 ) 1190 - 1195  2004  [Refereed]

  • Sn electrodeposition process for fabricating microabsorber arrays for an X-ray microcalorimeter

    T Homma, H Sato, H Kobayashi, T Arakawa, H Kudo, T Osaka, S Shoji, Y Ishisaki, T Oshima, N Iyomoto, R Fujimoto, K Mitsuda

    JOURNAL OF ELECTROANALYTICAL CHEMISTRY   559   143 - 148  2003.11  [Refereed]

     View Summary

    Sn electrodeposition was employed for fabricating an array of microabsorbers with a 'mushroom-shaped' microstructure for a precision X-ray microdetector, the so called X-ray microcalorimeter. A deposition process for flat and smooth Sn films, which was suitable for the use of the absorber material, was developed by optimizing the conditions of additives such as o-cresol-4-sulfonic acid and polyethyleneglycol (PEG) to the Sn bath. The Sn films exhibited suitable properties, i.e. a higher superconducting transition temperature than the operating temperature of the X-ray microcalorimeter. The mushroom-shaped absorber array was successfully fabricated by Sn electrodeposition in combination with a photolithographic technique. (C) 2002 Elsevier Science B.V. All rights reserved.

    DOI

  • マイクロ流体素子・要素とマイクロシステムへの応用動向

    庄子習一

    計測と制御   42 ( 12 ) 1005 - 1009  2003

  • 化学/バイオマイクロ・ナノシステム—エレクトロニクスの微細加工技術の化学/バイオへの応用—

    庄子習一

    表面科学   24 ( 11 ) 684 - 688  2003

  • MEMS技術のバイオへの応用

    庄子習一

    OHM, Ohmsha   90 ( 10 ) 53 - 56  2003

  • Digital sorting of flow-through droplet phase microfluid

    J.S.Go, S.Shoji

    Jpn. J. Appl. Phys.   42   L449 - 450  2003  [Refereed]

  • Micromechanical Characterization of Self-Oscillating Microcantilever Using Piezoresistive Microsensors

    Jeung Sang Go, Shuichi Shoji

    IEEJ Transactions on Sensors and Micromachines   123 ( 11 ) 510 - 512  2003

     View Summary

    The flow-induced vibration of the microcantilever is investigated. In particular, to avoid flow disturbance resulting from size of measuring probe, we use the monolithic boron-doped piezoresistive microsensors. By characterizing the dynamic behavior of the microcantilever, the new micromechanics is experimentally determined, completely different from the conventional mechanics in the flow-induced vibration. © 2003, The Institute of Electrical Engineers of Japan. All rights reserved.

    DOI

  • Particles and molecules handling in micro channels

    S. Shoji, K. Tashiro, T. Sekiguchi, H. Sato, N. Honda, T Funatu

    Lab-on-a-Chip: Miniaturized Systems for (Bio) Chemical Analysis and Synthesis     205 - 214  2003

     View Summary

    High performance flow monitoring systems are needed to monitor the particles and biomolecules flow in micro channels. For the design of microfluidic devices and systems, the finite element analysis tools play an important role. These systems are useful to evaluate the correspondence between the computational fluid dynamics (CFD) simulation and the actual flow in micro channels. The micro flow cell realizing 3D sheath flow was designed and the prototype was fabricated and evaluated. Since the flow distribution of the sample is critically changed with the pressure and the flow rate of the carrier, the 3D CFD analysis is indispensable to design the micro flow cell. The principle of 3D sheath flow is applicable to realize particles and biomolecules observation and handling systems. Novel micro flow switches using thermal gelation of methylcellulose (MC) have been developed. Since the local plug is formed illuminating the laser beam, the flow can be stopped at any point in the microchannels. The switching time of about 1 sec both open-to-close and close-to-open was achieved. By using the MC as a carrier flow, DNA, protein and biological cell sorting micro flow systems can be realized in the simple 2D microchannel structures. © 2003 Elsevier B.V. All rights reserved.

    DOI

  • ナノテクノロジー:化学/生化学システムのダウンサイジング化の研究動向

    庄子習一

    機能材料   22 ( 1 ) 52 - 57  2002

  • マイクロ化学センシングシステム

    庄子習一

    マテリアルインテグレーション   15 ( 2 ) 1  2002

  • MEMS技術を用いたマイクロ化学・生化学システム—最近の動向と将来展望—

    庄子習一

    ニューダイヤモンド   18 ( 3 ) 2 - 5  2002

  • マイクロ化学/生化学システム用マイクロ流体デバイスの研究動向

    庄子習一

    日本フルードパワーシステム学会誌   33 ( 3 ) 44 - 47  2002

  • Fabrication of an X-ray microcalorimeter with an electrodeposited X-ray microabsorber

    H Kudo, H Sato, T Nakamura, T Arakawa, E Goto, S Shoji, T Homma, T Osaka, K Mitsuda, R Fujimoto, N Iyomoto, MD Audley, T Miyazaki, T Oshima, M Yamazaki, K Futamoto, Y Takei, Y Ishisaki, T Kagei, T Hiroike, T Ohashi, NY Yamasaki, A Kushino, Y Kuroda, M Onishi, M Goto

    LOW TEMPERATURE DETECTORS   605   235 - 238  2002  [Refereed]

     View Summary

    For the next generation of astronomical X-ray imaging detectors, arrays with large numbers of microstructures (similar to1000 pixels) will be required. To meet this requirement, a tin absorber for an X-ray microcalorimeter, which has a so-called "mushroom" shape, is fabricated by electrodeposition and polishing. This method enables the fabrication of a large number of arrayed microcalorimeters. Details of the fabrication process, the characteristics of the absorber and the fabricated microcalorimeters are reported.

  • 生化学:マイクロ化学分析システム—マイクロマシン技術—

    庄子習一

    Lab. Clin. Paract.   19 ( 1 ) 11 - 13  2001

  • 新しい化学産業を創成するマイクロ流体システム

    庄子習一

    機械振興   395   26 - 31  2001

  • 特集ナノメカテクノロジーと化学:マイクロチャネル流体制御

    庄子習一

    化学工業   52 ( 11 ) 42 - 46  2001

  • マイクロチャネル-流体の性質とその応用デバイス/システム

    庄子習一

    医用電子と生体工学:BME   15 ( 10 ) 51 - 56  2001

  • Development of Biological Micro Reactor Array System

    E.Shinohara, A.Kondo, K.Akahori, K.Tashiro, S.Shoji

    IEICE Trans. Electron.   E84-C ( 12 ) 1807 - 1912  2001  [Refereed]

  • Condition optimization, reliability evaluation of SiO2-SiO2HF bonding and its application for UV detection micro flow cell

    H Nakanishi, T Nishimoto, M Kanai, T Saitoh, R Nakamura, T Yoshida, S Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   83 ( 1-3 ) 136 - 141  2000.05  [Refereed]

     View Summary

    In order to apply SiO2-SiO2 bonding with hydrofluoric acid (KF bonding) for micro-electro-mechanical systems (MEMS) fabrication, the optimal bonding conditions were examined under different temperature, HF concentration and bonding time. The necessary HF concentration and the necessary time for bonding are reduced by elevating the bonding temperature. The time for bonding was reduced from 24 h at room temperature to 30 min at 80 degrees C, 60 min at 60 degrees C under the conditions of 0.5 wt.% HF concentration and 1.3 MPa applied pressure. The bonding time is comparable to that of anodic bonding. Reliability of the HF bonding was confirmed by the results of temperature cyclic tests and thermal shock tests. A long term stability of the bonded sample was also evaluated by helium (He) leak detection. The measured He leak rate was less than 2.0 X 10(-9) atm cm(3)/s which is much smaller than that calculated value through component materials of the sample. A novel quartz UV detection micro Row cell for chemical analysis having Si shade structure was fabricated by the HF bonding. The absorbance unit for UV absorption detection of the cell was improved remarkably. (C) 2000 Elsevier Science S.A. All rights reserved.

  • Studies on SiO2-SiO2 bonding with hydrofluoric acid. Room temperature and low stress bonding technique for MEMS

    H Nakanishi, T Nishimoto, R Nakamura, A Yotsumoto, T Yoshida, S Shoji

    SENSORS AND ACTUATORS A-PHYSICAL   79 ( 3 ) 237 - 244  2000.02  [Refereed]

     View Summary

    Studies on SiO2-SiO2 bonding with hydrofluoric acid (HF) are described. This method has a remarkable feature that bonding can beobtained at room temperature. Advantages of this method are low thermal damage, low residual stress and simplicity of the bonding process, which are expected for the packaging and assembly of micro-electro-mechanical systems (MEMS). The bond characteristics were measured under different bonding conditions of HF concentration, applied pressure, another chemicals for bonding and so on, The bond strength depends on the applied pressure during bonding. To achieve reliable bonding, HF concentration of higher than 0.5 wt.% and a large applied pressure of 1.3 MPa are required. The bonding is also observed using KOH solution in stead of HF. Transmission electron microscopy (TEM), secondary ion mass spectrometry (SIMS), radioactive isotope (RI) analysis and electron probe micro analysis (EPMA) were applied to evaluate the bonded interface. The results of these analysis indicated that an interlayer of a silicon oxide complex including hydrogen and fluorine atoms is formed between bonded SiO2 to SiO2. The thickness of the interlayer depends strongly on the applied pressure during bonding. Large bond strength is obtained when the interlayer is thin. The bonding mechanism is expected when the SiO2 at both surfaces is dissolved in HF solution, and that the interlayer, which is a binding layer, is formed between substrates by resolidification of dissolved silicon dioxide. Formation of the interlayer plays very important roles for the characteristics of HF-bonding. (C) 2000 Elsevier Science S.A. All rights reserved.

  • マイクロ化学分析システム(uTAS)と電気化学(1)

    庄子習一

    電気化学および工業物理化学   68 ( 3 ) 188 - 191  2000

  • Cell-free protein synthesis in a microfabricated reactor

    T Nojima, T Fujii, K Hosokawa, A Yotsumoto, S Shoji, Endo, I

    BIOPROCESS ENGINEERING   22 ( 1 ) 13 - 17  2000.01  [Refereed]

     View Summary

    Microbiochemical reactors having two inlet ports and one outlet port were fabricated on a silicon wafer by means of anisotropic etching in order to develop a parallel and automatic experimental system for cell-free translation. Using cell-free extract prepared from Escherichia coli, we tested the reactor for the translation of polyuridylic acid and MS2 phage RNA, and found that polypeptide and protein syntheses could be proceeded according to the genetic codes on the mRNAs. It indicates that the microfabricated reactor is useful for enzymatic reactions including complicated ones like cell-free translation. We also discuss the possibility of microsystems as advanced experimental tools for not only cell-free translation but also other various biochemical and biological research fields.

  • マイクロチップをどうやってつくる-半導体リソグラフィーでつくる

    庄子習一

    化学   154 ( 10 ) 36 - 38  1999

  • uTAS その現状と将来

    庄子習一

    精密工学会誌   165 ( 5 ) 655 - 658  1999

  • Micromachining:Handbook of Sensors and Actuators: Intelligent Sensors

    Elsevier Science B.V.   3  1996

  • LIGAプロセス

    日本ME学会雑誌BME/日本ME学会   10;5  1995.05

  • 微小電子機械システム要素材料とマイクロマシーニング

    まてりあ/金属学会   34;1  1995

▼display all

Books and Other Publications

  • 機能材料2014年3月号

    蜂巣琢磨, 水野潤, 庄子習一, 逢坂哲彌

    ㈱シーエムシー出版  2014.03

  • 月刊ディスプレイ

    仁村将次, 庄子習一, 水野潤, 重藤暁津, 佐久間克幸, 荻野浩司, 榎本智之

    ㈱テクノタイムズ社  2013.03

  • ナノインプリントの開発とデバイス応用」(第12章4 実装技術 及び、第14章2 マイクロTAS)

    水野潤, 篠原秀敏, 笠原崇史, 庄子習一

    シーエムシー出版  2011.10

  • Microfluidics, Topics in Current Chemistry 304

    S. Shoji, K. Kawai

    Springer-Verlag Berlin Heidelberg  2011.04

  • BIO INDUSTRY

    庄子習一, 川合健太郎

    シーエムシー出版  2010.03

  • Solid State Circuits Technologies

    H. Shinohara, J. Mizuno, S. Shoji

    INTECH  2010.01

  • MEMS/NEMS工学全集(Fundamentals and Applications of MEMS/NEMS Engineering)

    庄子習一

    テクノシステム  2009.04

  • 2009 ナノインプリント技術大全(Nanoimprint Technology Outlook)

    篠原秀敏, 水野潤, 庄子習一

    電子ジャーナル  2009.04

  • 2009 ナノインプリント技術大全(Nanoimprint Technology Outlook)

    石塚修吾, 庄子習一, 水野潤

    電子ジャーナル  2009.04

  • マイクロ・ナノ化学チップと医療・環境・バイオ分析

    庄子習一

    技術教育出版社  2009.01

  • Comprehensive Microsystems

    S. Shoji, H. Sato, R. Zengerle

    Elsevier Science Ltd.  2008.03

  • 福田・新井編「バイオテクノロジーシリーズ 細胞分離・操作技術の最前線」

    庄子習一, 荒川貴博, 川合健太郎

    シーエムシー出版  2008

  • バイオテクノロジーシリーズ「ナノテク・バイオMEMS時代の分離・計測技術」

    庄子習一

    シーエムシー出版  2006.02

  • 高分子学会編 ポリマーフロンティア21シリーズ「ナノバイオー微細加工と計測技術の新展開」

    庄子習一

    2005.10

  • ナノインプリントの開発と応用—マイクロ流体デバイス—

    水野 潤, 庄子習一

    シーエムシー出版  2005

  • 進化するマイクロマシン: 2.6 μTAS

    庄子習一

    日刊工業新聞  2004

  • 日本化学会編 第5版実験化学講座:機能性材料

    庄子習一

    丸善  2004

  • マイクロ化学チップの技術と応用

    北森武彦, 庄子習一, 馬場嘉信, 藤田博之編

    丸善  2004

  • ナノテクノロジーハンドブック,IVバイオ・化学に使う

    庄子習一

    2003

  • Lab-on-a-chip, Miniaturies Systems for (Bio)Chemical Analysis and Synthesis

    S.Shoji, K.Tashiro, T.Sekiguchi, H.Sato, N.Honda, T.Funatu

    Elsevier Science Ltd.  2003

  • Electrochemical Microsystem Technologies

    S.Shoji

    Tayler &amp; Francis, London  2002

  • IEICE Trans.

    E.Shinohara, A.Kondo, K.Akahori, K.Tashiro, S.Shoji

    Electron.  2001

  • Biosensors &amp; Their Applications

    S.Shoji

    Kluwer Academic/Plenum Pub.  2000

  • Biosensors & Their Applications

    S.Shoji

    Kluwer Academic/Plenum Pub.  2000

  • マイクロオプトメカトロニクスハンドブック

    朝倉書店  1997

  • Micromachining:Handbook of Sensors and Actuators: Intelligent Sensors

    Elsevier Science B.V.  1996

▼display all

Misc

  • A study on low temperature SAM modified POM direct bonding affected by VUV/O-3 irradiation

    Weixin Fu, Bo Ma, Hiroyuki Kuwae, Shuichi Shoji, Jun Mizuno

    2017 5TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D)     69 - 69  2017  [Refereed]

     View Summary

    A direct bonding of polyoxymethelene (POM) was feasible at 100 degrees C by using self-assembled monolayers (SAM) as surface modification method. (3-Aminopropyl) triethoxysilane (APTES) and (3-Glycidyloxypropyl) trimethoxysilane (GOPTS) were applied in our work. Surface modification carried out with different VUV/O-3 irradiation conditions showed different bonding strength. In addition, the bonding condition with highest strength had an average strength of 0.37 MPa. This technology was expected to be used in packaging for micro/nano electromechanical systems (MEMS/NMES), such as bio-/medical devices.

    DOI

  • Highly bendable transparent electrode using mesh patterned indium tin oxide for flexible electronic devices.

    Kosuke Sakamoto, Hiroyuki Kuwae, Naofumi Kobayashi, Atsuki Nobori, Shuichi Shoji, Jun Mizuno

    12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017     323 - 326  2017  [Refereed]

    DOI

  • ST-quartz/LiTaO3 Direct Bonding Using SiO2 Amorphous Layers with VUV/O-3 Pre-treatment for a Novel 5G Surface Acoustic Wave Device

    Haruka Suzaki, Hiroyuki Kuwae, Akiko Okada, Bo Ma, Shuichi Shoji, Jun Mizuno

    2016 International Conference on Electronics Packaging (ICEP)     443 - 446  2016  [Refereed]

     View Summary

    This paper describes a novel ST-cut quartz (ST-quartz) /LiTaO3 (LT) direct bonding for surface acoustic wave (SAW) devices of next 5G mobile communication. The ST-quartz and LT were bonded to fabricate temperature compensated piezoelectric substrates using amorphous SiO2 (alpha-SiO2) intermediate layers. The alpha-SiO2 thin layer was prepared on each substrate by ion beam sputtering (IBS) to realize highly active bonding interfaces and treated by vacuum ultraviolet irradiation in the presence of oxygen gas (VUV/O-3). Then they were bonded under pressure of 5 MPa at 200 degrees C for 15 min in 100 kPa vacuum atmosphere. The tensile strength of 2.9 MPa was achieved in alpha-SiO2 substrate which is six times stronger than other samples; without intermediate layers or VUV/O-3 pre-treatment. In addition, VUV/O-3 bonding was compared with Mega-sonic bonding. VUV/O-3 treated sample with AIB method slightly increase the bonding strength and achieved the same level of Mega-sonic bonding sample with AIB. Hence, it is indicated that AIB method could prepare the considerably activated surface even using low vacuum condition and affect effectively to hetero-monocrystalline bonding. This result suggested the proposed ST-quartz/LT direct bonding is a promising technique for future 5G SAW devices.

    DOI

  • LOW TEMPERATURE DIRECT BONDING OF SINGLE CRYSTAL QUARTZ SUBSTRATES FOR HIGH PERFORMANCE OPTICAL LOW PASS FILTER USING AMORPHOUS SIO2 INTERMEDIATE LAYERS

    Bo Ma, Hiroyuki Kuwae, Akiko Okada, Weixin Fu, Shuichi Shoji, Jun Mizuno

    2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)     25 - 28  2016  [Refereed]

     View Summary

    We proposed a HF-assisted single crystal quartz direct bonding method at low temperature using amorphous SiO2 layer for high performance optical low pass filter (OLPF) to improve heat resistance compared with conventional OLPFs using UV-curing adhesive. Amorphous SiO2 was deposited by ion beam sputtering on backside of both infrared reflection and anti-reflection coated substrates. By the etching rate evaluation, amorphous SiO2 deposition is considered to provide high active surface useful for bonding. The HF bonded sample with amorphous SiO2 layer achieved 0.8 MPa in tensile test and 3.3 MPa in shear test, and also nearly 100 % light transmittance was performed, which is as the same level as conventional UV-curing adhesive one. Therefore, the proposed single crystal quartz direct bonding with amorphous SiO2 layers is considered to be a promising technique to realize high performance OLPFs.

    DOI

  • Study of High Quality GaN Template by Nano-channel FIELO Using UV Nanoimprint

    Mizuno Jun, Okada Akiko, Shoji Shuichi, Yamaguchi Atsushi A., Goto Hiroki, Sunakawa Haruo, Matsueda Toshiharu, Shinohara Hidetoshi, Nishihar Hiromi, Goto Hiroshi, Usui Akira

    IEICE technical report. Electron devices   113 ( 9 ) 27 - 29  2013.04

     View Summary

    Nano-channel FIELO (facet-initiated lateral overgrowth) using UV nanoimprint has been proposed. The etch pit density measurements reveal that the dislocation density of the GaN template was estimated to 5×10^7/cm^2.

    CiNii

▼display all

Industrial Property Rights

  • フレキシブル透明電極及び有機エレクトロルミネッセンス素子

    庄子 習一, 桑江 博之, 坂本 暁祐, 水野 潤

    Patent

  • ピラーアレイミキサー及びこれを使用した試料処理装置

    庄子 習一, 関口 哲志, 中西 完貴

    Patent

  • 接合方法

    6251935

    庄子 習一, 水野 潤

    Patent

  • 金属材の拡散接合方法および金属材の拡散接合装置

    庄子 習一, 水野 潤, 岡田 愛姫子, 仁村 将次

    Patent

  • 積層構造体の製造方法

    6157206

    庄子 習一, 水野 潤, 仁村 将次

    Patent

  • III族窒化物半導体層の製造方法

    庄子 習一, 水野 潤, 岡田 愛姫子

    Patent

  • III族窒化物半導体層の製造方法

    庄子 習一, 水野 潤, 岡田 愛姫子

    Patent

  • 基板および基板の製造方法

    庄子 習一, 水野 潤, 岡田 愛姫子

    Patent

  • テンプレート基板

    庄子 習一, 水野 潤, 岡田 愛姫子

    Patent

  • 微細パターンを表面に有する物品の製造方法

    5733747

    庄子 習一, 石橋 健太郎, 水野 潤

    Patent

  • テープ状部材の洗浄装置及び洗浄方法

    水野 潤, 庄子 習一

    Patent

  • 表面改質処理装置

    庄子 習一, 篠原 秀敏, 水野 潤

    Patent

  • 変位計測装置

    5610427

    谷井 孝至, 仁田 佳宏, 金川 清, 松谷 巌, 大泊 巌, 西谷 章, 庄子 習一

    Patent

  • 変位計測装置

    5544619

    松谷 巌, 大泊 巌, 西谷 章, 庄子 習一, 谷井 孝至, 仁田 佳宏, 金川 清

    Patent

  • 高密度磁気記録媒体及びその製造方法

    逢坂 哲彌, 庄子 習一, 水野 潤, 杉山 敦史, 蜂巣 琢磨

    Patent

  • 細胞培養容器及びその容器を用いた細胞培養方法

    5703302

    庄子 習一, 川合 健太郎

    Patent

  • 傾斜角度測定器

    庄子 習一, 谷井 孝至, 大泊 巌, 西谷 章, 仁田 佳宏, 金川 清, 松谷 巌, 冨士 良太

    Patent

  • 変位計測装置、及び変位計測方法

    谷井 孝至, 金川 清, 松谷 巌, 大泊 巌, 西谷 章, 庄子 習一, 仁田 佳宏

    Patent

  • マイクロ反応装置を用いた細胞運動評価方法

    5166360

    庄子 習一

    Patent

  • 三次元シースフロー形成構造及び微粒子集束方法

    5700189

    庄子 習一, 水野 潤, 後藤 峰生, 加藤 友也, 篠原 秀敏, 船津 高志, 荒川 貴博

    Patent

  • 変位計測システムを用いた建築物の施工管理方法

    5137875

    谷井 孝至, 松谷 巌, 大泊 巌, 西谷 章, 庄子 習一, 仁田 佳宏, 金川 清

    Patent

  • 接合方法

    4473336

    庄子 習一, 水野 潤, 佐久間 克幸

    Patent

  • パターン化磁気記録媒体の製造方法

    庄子 習一, 水野 潤, 篠原 秀敏

    Patent

  • モールド、その製造方法および転写微細パターンを有する基材の製造方法

    庄子 習一, 水野 潤, 片座 慎吾

    Patent

  • 半導体発光素子およびその製造方法

    庄子 習一, 水野 潤, 大野 浩志

    Patent

  • マイクロ反応装置

    4866208

    庄子 習一, 川合 健太郎

    Patent

  • マイクロカプセル、マイクロカプセル製造装置及びマイクロカプセル製造方法

    庄子 習一, 荒川 貴博, 山本 嵩洋

    Patent

  • モールド支持構造

    4830171

    庄子 習一, 大野 浩志, 福原 誠, 水野 潤

    Patent

  • 転写装置

    4830170

    庄子 習一, 大野 浩志, 福原 誠, 水野 潤

    Patent

  • 微粒子分別マイクロシステムおよび微粒子分別方法

    庄子 習一, 荒川 貴博, 白崎 善隆, 船津 高志

    Patent

  • マイクロ反応装置

    4598646

    庄子 習一, 川合 健太郎

    Patent

  • マイクロ反応装置

    4672511

    庄子 習一

    Patent

  • マイクロリアクタの製造方法

    4356109

    本間 敬之, 庄子 習一, 逢坂 哲彌, 佐藤 裕崇

    Patent

  • マイクロミキサーおよびその製造方法

    4326971

    庄子 習一, 佐藤 寛暢

    Patent

  • 燃料電池及びその製造方法

    4679825

    逢坂 哲彌, 庄子 習一, 門間 聰之, 本川 慎二

    Patent

  • フローセル

    4365182

    庄子 習一

    Patent

  • 樹脂製基板の接合方法及びこの接合方法を用いたソーティング装置

    筒井 謙, 江面 知彦, 和田 恭雄, 庄子 習一, 船津 高志, 水野 潤

    Patent

  • マトリックス型可変マイクロ流路及びそのシステム

    船津 高志, 庄子 習一, 白崎 善隆

    Patent

  • マイクロシステム

    船津 高志, 庄子 習一, 和田 恭雄, 筒井 謙, 水野 潤, 白崎 善隆

    Patent

▼display all

Awards

  • 化学とマイクロ・ナノシステム学会賞

    2020.05   化学とマイクロ・ナノシステム学会  

    Winner: 庄子習一

  • 2019 Micromachines Best Paper Award

    2020.02   Micromachines   Size-Dependent and Property-Independent Passive Microdroplet Sorting by Droplet Transfer on Dot Rails

    Winner: D.H. Yoon, D. Tanaka, T. Sekiguchi, S. Shoji

  • Mate 2020 優秀発表賞

    2020.01   第26回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2020)   ソフトリソグラフィー技術を用いてマイクロパターン化した魚うろこコラーゲン足場材付き培養口腔粘膜の作成

    Winner: 三輪慶人, 鈴木絢子, 桑江博之, 山口勇, 兒玉泰洋, 泉健次, 庄子習一, 水野潤

  • 優秀ポスター賞

    2020.01   第26回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2020)   液体有機ELを用いたオンデマンド蛍光検出システムの開発

    Winner: 大塚茜里, 桑江博之, 大島寿郎, 庄子習一, 水野潤

  • IMPACT 2019 Packaging - Best Student Award

    2019.10   14th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT-IAAC 2019)   LiTaO3/Quarts Bonding with Low-Residual-Stress Al2O3 Amorphous Intermediate Layer for 5G Surface Acoustic Wave Devices

    Winner: A. Tezuka, H. Kuwae, K. Yamada, S. Shoji, S. Kakio, J. Mizuno

  • Best Student Poster Award

    2019.07   The 10th Japan-China-Korea Joint Conference on MEMS/NEMS 2019   Introduction of the Study on Moisture Adsorption Characteristics of Woody Carbon Material

    Winner: N. Takahashi, H. Kuwae, S. Shoji, J. Mizuno

  • IEP Poster Award of ICEP 2019」

    2019.04   2019 International Conference on Electronics Packaging (ICEP 2019)   Study of Low-Residual Stress Amorphous Film Deposition Method for LiTaO3/Quarts or LiNbO3/Quarts Bonding toward 5G Surface Acoustic Wave Devices

    Winner: A. Tezuka, H. Kuwae, K. Yamada, S. Shoji, S. Kakio, J. Mizuno

  • IEEE EPS Japan Chapter Young Award

    2019.04   2019 International Conference on Electronics Packaging (ICEP 2019)   Cu-Cu Quasi-Direct Bonding with Atomically Thin-Au and Pt Intermediate Layer Using Atomic Layer Deposition

    Winner: H. Kuwae, K. Yamada, W. Momose, S. Shoji, J. Mizuno

  • CIAiS International Symposium 2019 Best Poster Award

    2019.03   Water-Electrokinetic Energy Harvester Using Flexible Woody Carbon Film

    Winner: S. Maeda, H. Kuwae, S. Shoji, J. Mizuno

  • Mate 2019優秀発表賞 (学生賞)

    2019.01   フレキシブル木質系炭素材料を用いた水蒸気発電デバイス

    Winner: 高橋奈々, 前田世蓮, 桑江博之, 庄子習一, 水野潤

  • Mate 2019 優秀発表賞 (学生賞)

    2019.01   メッシュパターンを有するフレキシブル酸化インジウムスズ電極の開発

    Winner: 坂本暁祐, 桑江博之, 庄子習一, 水野潤

  • Mate2018 優秀発表賞 (学生賞)

    2018.01   非晶質層を用いたLiTa03/QZ接合SAW基板の作製

    Winner: 須崎遥, 桑江博之, 岸田和人, 垣尾省司, 庄子習一, 水野潤

  • 2017 Taiwan-Japan Workshop on Electronic Interconnection I Best Oral Presentation Award

    2017.10   Effects of Surface Modification on Woody Carbon Materials by Vacuum Ultraviolet Treatment

    Winner: H. Kuwae, K. Mizokami, S. Maeda, S. Shoji, J. Mizuno

  • 第34回 センサ・マイクロマシンと応用システム シンポジウム 奨励賞

    2017.10   電気学会 センサ・マイクロマシン部門   フレキシブルエレクトロニクスデバイスへ向けたメッシュパターンを有するフレキシブル酸化インジウムスズ電極

    Winner: 坂本暁祐, 桑江博之, 小林直史, 登厚惇輝, 庄子習一, 水野潤

  • IEEE-NEMS 2017 Best Student Paper Award

    2017.04   Highly Bendable Transparent Electrode Using Mesh Patterned Indium Tin Oxide for Flexible Electronic Devices

    Winner: K. Sakamoto, H. Kuwae, N. Kobayashi, A. Nobori, S. Shoji, J. Mizuno

  • IEEE CPMT Japan Chapter Young Award of ICEP 2017

    2017.04   Fabrication of Self-Standing Curved Film with Pillar Arrays by Large Area Spherical Soft-UV Imprint Lithography

    Winner: T. Kamibayashi, H. Kuwae, A. Nobori, S. Shoji, J. Mizuno

  • IEEJ Fellow

    2017.03   Institutw of Electrical Engineers of Japan   Fellow

  • Mate2017 優秀発表賞

    2017.02   ナノポーラス金接合に向けた真空紫外光による表面前処理

    Winner: 金田達志, 岡田愛姫子, 付偉欣, 庄子習一, 齊藤美紀子, 西川宏, 水野潤

  • IMPACT-IAAC 2016 Student Packaging Paper Award

    2016.10   Simultaneous Fabrication of a Through-Glass Interconnect Via and Bumps Using Dry Filling Process of Submicron Gold Particles

    Winner: K. Nomura, A. Okada, S. Shoji, T. Ogashiwa, J. Mizuno

  • The 10th IMPACT Conference Student Paper Award

    2015.10   Low Temperature Direct Bonding of Polyether Ether Ketone (PEEK) and Pt

    Winner: W. Fu, A. Shigetou, S. Shoji, J. Mizuno

  • 電気学会 第24回業績賞

    2015.05  

    Winner: 庄子習一

  • 第31回センサ・マイクロマシンと応用システム シンポジウム 奨励賞

    2014.10  

  • IEEE CPMT Japan Chapter Young Award, 2014 International Conference on Electronics Packaging (ICEP 2014)

    2014.04   IEEE  

  • Young Award, IEEE CPMT Symposium Japan 2013

    2013.11   International Conference on Electronics Packaging 2013  

  • 優秀ポスター発表賞、CSJ化学フェスタ2013

    2013.10  

  • Bio4Apps2013 Best Award, International Conference on BioSensors, BioElectronics, BioMedical Devices, BioMEMS/NEMS and Applications 2013 &amp; 5th Sensing Biology Symposium (Bio4Apps 2013)

    2013.10  

  • ICEP 2013 IEEE CPMT Japan Chapter Young Award, International Conference on Electronics Packaging 2013 (ICEP 2013)

    2013.04  

  • Student Best Poster Award, International Joint Symposium on Single-Cell Analysis, 2012

    2012.11  

  • Outstanding Paper Award, The 7th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT 2012)

    2012.10  

  • Best Paper Award, International Workshop on Nitride Semiconductors 2012 (IWN 2012)

    2012.10  

  • Best Student Award, The 9th Asia-Pacific Marine Biotechnology Conference

    2012.07  

  • Best Presentation Award, 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012)

    2012.05  

  • CHEMINAS Poster Award 1st Prize, The International Symposium on Microchemistry and Microsystems (ISMM 2011)

    2011.06  

  • Best Poster Award, 4th Asian Nanoimprint Lirhography Symposium (ASNIL)

    2011.06  

  • 第18回化学とマイクロ・ナノシステム研究会 優秀ポスター賞

    2008.12  

  • Electrochemistry Communications 2007 Best Cited paper Award: "MEMS-based design and fabrication of a new concept micro direct methanol fuel cell (micro-DMFC)"

    2007.07  

  • 電気学会 電気技術振興賞 論文賞

    2007  

  • 16th International Microprocesses and Nanotechnology Conference Award, Most Impressive Poster

    2003.10  

  • 科学計測振興会賞 「パッケージドマイクロセンサ」

    1993  

  • 電子情報通信学会論文賞 「生体用マイクロISFETの試作」

    1985  

▼display all

Research Projects

  • Construction of multiple micro interfaces using 3D microfluidic devices and application to functional chemical reactions

    Project Year :

    2020.04
    -
    2023.03
     

  • Micro-nano droplet handling for the measurement of biological samples

    Project Year :

    2016.04
    -
    2019.03
     

     View Summary

    In this research project, we defined required specs and established fundamental technologies for “handling of micro samples” in micro scale channels. We developed following technologies through this research, 1) stable and reproducible micro droplets generation ranged from several microns to sub-micron in diameter, 2) sample collection into a micro droplet and/or control of chemical reaction in the micro droplets, 3) selective handling of the specific micro droplet. In addition to these achievements, we developed bendable ITO electrodes for flexible electronic devices as well as basic technologies to realize “Integrated Gene Logic-Chip”

  • Advanced Micro Fluidic Engineering and Its Applications for High Sensitive Quantitative Measurements of Biomolecules

    Project Year :

    2011.05
    -
    2016.03
     

     View Summary

    In this study, the noble microfluidic device technology was developed in order to enable the optical high sensitive quantitative measurement of the micro luminescent sample as follows. 1) The micro droplet manufacturing technology of the various size. 2) The control technology of the micro flow. 3) The passive sorting technology of the micro droplet. Next, the measurement of the micro luminescent samples by systematizing microfluidic device was realized. 1) Insert a living cell to a droplet one by one, and analyze the gene of the environmental microbe. 2) Observation cellular growth and evaluate enzymatic reaction activity. Optical quantitative measurement was realized by this study

  • Establishment of Electrochemical Device Engineering

    Project Year :

    2008
    -
    2012
     

     View Summary

    Based on the researches for development of functional materials with the control of solid-liquid interface and for development of devices with the practical use of nano- and meso-structures and phenomena at the interface, the establishment of Electrochemical Device Engineering was promoted. To establish Electrochemical Device Engineering on the basis of Electrochemical Nanotechnology, the practical devices utilizing the outcome of research and the dimensions for appearance of function and design of solid-liquid interface were set as the warp and weft of this academic discipline.

  • Development of Biological Sample Separation/Extraction and Preparation Microsystems for High Performance Biosensing

    Project Year :

    2004
    -
    2006
     

     View Summary

    In recent one of the most active area of Micro Total Analysis Systems (μTAS) or Lab-on-a-Chip (LOC), DNA, Protein analysis methods and devices have been improved. However, traditional sample preparations before analysis are required in many cases. In order to realize high speed and high throughput analysis in μTAS, sample separations/extractions are requested to be obtained in microfluidic devices/systems. We applied MEMS technologies and nano technologies and fabricated micro fluidic devices and systems of nl or pl in volume.
    Biomolecules sorting systems using so-gel transformation of the thermo-sensitive hydrogel as the carrier fluid were developed. High speed one inlet and two outlets sorter is realized by optimizing the channel structures and the flow behaviors. Very fast sorting within 5 msec was also realized. One inlet and 9 outlets sorting system is realized in a matrix microchannel using IR light illumination projected by the PC controlled DMD. A micro chamber integrated with an extremely low dead volume reagent injector for real-time monitoring of living cell was developed. In order to realize specific introduction of the reagent, we also developed the 3D sheath flow scanner. For high throughput analysis, a prototype of 8 diagnostic micro chambers having passive distributing facilitates simultaneous cell injection. On the other hand, microfluidic systems using sheath flow behavior in the microchannel for biological cell sorting were also developed. The flow system can sort two different cells to 16 outlet microchambers. To realize high efficient reaction of DNA and protein, two phase micro droplets of organic/water and three phase micro droplets of organic/water/air genelation fluidic devices were proposed.

  • Development of Novel electrochemical Nanofabrication Processes through Controlling Non-linear Diffusion

    Project Year :

    2003
    -
    2005
     

     View Summary

    The objective of this research was to develop novel nanofabrication processes of metal nanostructures trough electrochemical approaches. Especially, control and utilization of the nonlinear diffusion of the species, which is unique to the electrochemical processes, were emphasized. In the first year of the research, preferential electrochemical deposition of metal species at the nano-defect sites on Si wafer surface was confirmed, and by utilizing this, fabrication process of metal nanostructure was developed. Also, quantitative analysis was made for the reaction of reductant species at the surface of metal cluster using ab-initio molecular orbital calculation. In addition, attempt on the application of illumination-assisted anodization process was made to develop Si nanofabrication process, and by controlling the illumination condition using aperture-like structure, which controls nonlinear diffusion of holes to the reaction sites, uniform formation of macro pore array was achieved. In the second year, the fabrication process of metal nanostructure onto Si wafer surface was improved to achieve further precision control for various metal species. The modification of the Si macro pore array was attempted to fabricate pico-liter volume glass tube array which is applicable as microreactors. The single-batch process to fabricate the pore array and its filling to form metal-needle array was also developed. In addition, theoretical analysis on the chemical properties of strained Si surface, which is key material for fabricating high-performance ULSI, was also attempted and the correlation between the surface reactivity and "degree of strain" was quantitatively evaluated. In the final year, fabrication process for through-hole to the tip of the glass tube was developed to form "nano-nozzle" array. This process was achieved by controlling the nonlinear diffusion of etchant species. By using this process, fabrication of filter devices and other systems was attempted. In addition, quantitative evaluation procedure of the reactivity of reductant for electroless deposition process was established using quantum chemical calculation approaches. As described, novel electrochemical processes for precision nanofabrication have been developed and detailed mechanism of the reaction processes has elucidated.

  • 界面電荷移動反応制御による新規ウェット系インテグレーションプロセスの開発

    科学研究費助成事業(早稲田大学)  科学研究費助成事業(特定領域研究)

    Project Year :

    2002
    -
    2003
     

     View Summary

    次世代超高機能デバイス・システム形成のためのナノファブリケーション技術として、電解・無電解法などのウェットプロセスは今後一層重票となるが、本手法は固液界面反応の関る複雑な系であるため不明点が多く、本分野において広く用いられるには至っていない。そこで本研究では、本プロセス特有の因子である固液界面電荷移動反応を理論的・実験的アプローチから素過程レベルで解析すると共に、これに基づいたナノレベルの精度の新規ファブリケーションプロセスの開発を目的とした。
    まず、無電解析出法による金属ナノ構造体形成について、非経験的分子軌道法を用いた素過レベルからの解析を試みた。01年度において無電解Cu析出系に関する検討を行い、02年度には次々世代の極微細配線材料と目されているAg系の検討にも着手し、その反応経路に関する基礎的知見を得た。これらの成果を基に、本年度はCu、Pd、Ag表面における種々の還元剤系について系統的な検討を進め、金属表面の触媒活性を考える上で、表面に吸着した種の電子放出過程が最も重要であることを示唆する定量的結果を得た。
    さらに、電気化学マイクロリアクター用の三次元微小櫛歯電極配列をNi電解析出とAu無電解析出の組み合わせにより形成するプロセスを開発すると共に、超高感度X線画像センサー用のマイクロカロリメータ吸収体アレイの一括形成を、Sn電解法を用いたプロセスにより実現した。
    以上のように、本研究では、新規インテグレーションシステム形成のためのウェット系プロセスについて、理論、実験双方の見地から検討を進め、種々のデバイスおよびその形成のためのプロセスを確立することが出来た。本研究により得られた成果は、各々実デバイス形成への展開をはかりつつあるところであり、その推進と共に、反応過程の理論解析と連携させながら、ウェット系プロセス全体の体系化も進めていく予定である。

  • Analysis and control of the fluids, interfaces of liquid-liquid and liquid-solid in microchannels

    Project Year :

    2001
    -
    2003
     

     View Summary

    Nano/micro flow systems open up the new possibilities for chemical and biochemical analysis and synthesis. For the design of nano/micro flow systems LSI designing concepts is applicable considering the symmetries between the electric devices and the flow devices. Nano/micro flow devices and elements which have micro meter scale sizes and nano liter volumes developed so far are described. Microvalves of negligible leakage and dead volumes were developed for chemical/biochemical applications. Micro mixers and sample injectors were obtained by using microfluidic behaviors in micro scale channels. In channel micro filters and electrochemical biosensors were fabricated using high aspect ratio UV photolithographic technologies. 3D metal electrodes implanted PDMS microflow cell was fabricated using 3D assembly method. Biological cell observation micro cell integrated on chip microvalve for regent injection was fabricated on Si substrate using deep RIE. Biomolecules sorting microsystems were. also realized using sol-gel transfer of hydrogels.

  • Studies on sorting and fixing of. Bioiooiecules for high performance micro chemical/biochemical analysis systems

    Project Year :

    2000
    -
    2002
     

     View Summary

    Biomolecles handling microsystems
    Micro biomolecules handling flow cell using 3-D sheath flow was fabricated. It uses the simple micro structure designed by MEMS CAD system. On the other hand, cross-linked methyl cellulose (MC) changes its state from liquid to gel by elevating the temperature up to 55 ℃. In order to realize micro flow control, we applied this phenomenon to realize micro flow switch for cell sorting. To achieve high speed sorting, we fabricated a PC controlled flow system consists of an automatic fluorescence sample detector, focused IR laser sorce, and two galvanometer mirrors for switching and scanning of the laser. The detection and switching time of 120 msec is achieved.
    Micro flow cell for multi-analyse bioaffinity assay
    A micro flow cell for the multi-analyse bioaffinity assay system was designed. It has two Teflon micro check values. Some different antibodies for clinical diagnostic were immobilized on center surface of the channel as bioaffinity probes, which realizes sequential multi-analyse assay. An efficient reaction with small sample volume is expected.
    Micro mixer/reactor using multilayer laminar flow
    An efficient micromixer using nonhomogeneous multilaer in laminar flow regime was fabricated. To increase the mixing efficiency, the CFD simulation was used to optimize the width of the multilayers. It is estimated that the reagents mixing is proceeded much faster compared to previous multiplayer micro mixers.
    Metal electrodes implanted PDMS micro cell
    Metal electrodes or heaters implanted PDMS structures were proposed and fabricated. Prototype micro flow cell having two pairs of the parallel electrodes in order to control the electric field or the temperature is fabricated and evaluated.

  • 高機能性新半導体デバイス開発

    文部科学省 

    Project Year :

    1998
    -
    2002
     

  • Environmentally Robust Biosensor Using Field Effect Transistors of Heteroepitaxial Diamond

    Project Year :

    1997
    -
    1999
     

     View Summary

    In this research, ion sensitive field effect transistors (ISFETs) have been fabricated on the hydrogen terminated (H-terminated) diamond surface resistant to electrochemical environment and operated as transducers of biosensors.
    1. The electrolyte solution gate FETs have been formed on H-terminated surfaces. The gate structure is just thet H-terminated diamond exposed to directly. This type of FET structure where semiconductor surface is exposed to electrolyte solution is firstly developed in the world. Compared with conventional ISFET, the higher current controllability is achieved.
    2. The FETs exhibit ideal current-voltage characteristics in not only homoepitaxial and heteroepitaxial diamonds, but also polycrystalline diamonds which is easier to synthesize. In the current-voltage characteristics, perfect pinch-off and the saturation of drain current have been measured. The leakage current at the off state is extremely small and the current ratio between on-off is more than 4 orders of magnitude. The FETs operate stably in the above mentioned characteristics between pH 1-14.
    3. The threshold voltages of the FETs are independent from pH values. From this result, an appropriate ion sensitive base can be immobilize on the pH insensitive surface leading to high selective molecular recognition.
    4. On the other hand, the threshold voltages strongly depend on the density of Cl ions in the solution and vary by 30-60 mV according to the density change by one order The Cl ion detection has been observed from 1 Mol/L to 10^<-6> Mol/L exhibiting the possibility of Cl ion sensitive FET.
    The diamond solution gate FET has been developed for the first time. Their operation in hard environment has been also confirmed and the highly sensitive detection of Cl ions has been achieved.

  • Study on Devices And System For Endscope of The Next Generation

    Project Year :

    1996
    -
    1998
     

     View Summary

    In this study, we have developed key technologies on endoscope of the next generation. The obtained results are as follows.
    1. Micro multi-sensor for endoscope. The size of this sensor is so small as to install within a tiny monitoring device which can be swallowed. That is, a silicone wafer of 3mm x 4mm and 0.2mm thick size was fabricated to multi-sensor (pressure, pH and temperature).
    2. Endoscope of the next generation. The method of image sensing is either CCD or ultrasound. However, these system require high electric power for the circuits. Therefore, intestinal parameters other than image are monitored and transmitted in this study. This type of capsule will be useful for health care.
    3. Energy transmission through body tissue. Electric current flows easily in the human body, because the conductance of the tissue is approximately same as seawater. The frequency characteristics of them are similar and we have verified that about 50 KHz current is optimum. The sinusoidal waveforms of that frequency was used as a carrier and modulated by pulses. This transmission has a merit of saving energy for signal transmission from within the body compared with the method of electromagnetic transmission system. The power of the output from IC is only 8 uW. This suggests us the possibility of capsule type monitoring device that requires very low power consumption. Anther study was to transmit circuit energy by means of ultrasound of about 100 KHz. We could have send 550 uW through saline water which is enough to operate low consumption (70 uW) IC. Therefore, it is possible to develop battery less monitor or more small capsule type measuring devices.

  • Studies on micro flow sensor for ultra high speed flow and ultra low speed flow

    Project Year :

    1995
    -
    1996
     

     View Summary

    The results of our studies are listed below.
    1. Fabrication of wing type micro flow sensors for ultra high speed flow measurements
    Rectangular wing supported by 4 fine beams located in a microchannel was designed. The micro structures were fabricated using selective etching method of the highly boron doped p+ layr and Si-to-glass anodic bonding method. The sensor consists of 4 wafers of glass-Si-Si-glass and the micro channel was formed in the 2 Si wafers. The displacement of the wing caused by the lift force under gas flow is measured by the laser interferometric displacement sensor. Many types of wing having different sizes of the chord, length etc.was fabricated and tested. The aspect ratio, ratio between the length and the chord, is important for characterization of the sensor. The relationship between the displacement and flow speed was measured using compressed air as the gas flow. The wing having high aspect ratio shows high sensitivity. The residual stress, however, reduce the sensitivity of the sensor. We are going to improve the structure and fabrication process.
    2. Design of thermal micro flow sensor for ultra low speed flow measurement
    Micro flow sensor consists of two micro resistor heater/thermal sensor having very small thermal copacitance was designed. It is now on fabrication using the same methods of wing type micro flow sensor.
    3. Characterization of fluidics in microchannel
    Various kinds of micro channels were fabricated and their flow characteristics were measured. The results were very useful for the designing of micro flow devices and micro total analysis systems.
    4. Low temperature anodic bonding method
    To reduce the residual stress coused by the anodic bonding, anodic bonding using lithium-aluminosilicate glass-ceramic was studied. The bonding tenperature can be reduced to 60C (conventionally 400C) with the glass ceramic. The bonding method is also very useful for packaging of the microsensors and the assemblying of the micro total analysis systems.

  • Microactuator by Photofabrication

    Project Year :

    1991
    -
    1994
     

     View Summary

    Frexibly moving mechanical systems which have many components as living things are being studied. Microactuators for such purposes have been developed by micromachining. Following results were obtained.
    1. Distributed electrostatic microactuators. (References 1-5)
    A distributed electrostatic micro actuator (DEMA) was proposed. The DEMA has man yserially connected driving units which consist of two wave-like electrodes facing each other. Large electrostatic force and large displacement can be obtained by narrowing the gap and by serially connecting many driving units. The structure was fabricated by photolithography and cupper electroplating.
    2. Three-dimensional microfabrication in batch process. (References 6-12)
    For practically applicable DEMA three-dimensional microfabrication methods have to be developed. Cryogenic deep reactive ion ethching was developed to etch a silicon wafer and a polyimide film through their thicknesses. Projection laser CVD using low temperature condensation method was also developed.
    3. Integrated sensor and actuator systems. (References 13-45)
    Packaged micro systems in which not only sensors and circuits but also actuators are integrated can have valuable features. Electrostatic force-balancing accelerometers, resonant infrared sensors, optical scanners and fluid control systems were developed.
    4. Flexibly moving systems which has many microactuators. (References 46-51)
    Active catheter which moves like a snake was fabricated using silicon micromachining and shape memory coil actuators. The outer diameter of the catheter tube is 2.8mm. Related processes as nonplaner patterning on the catheter tube and micro assmbly using CW UV laser assisted polymer deposition were deposition.
    5. Control of flexible machines which have many microactuators. (References 52-60)
    Motion controls of flexible, parallel or cooperative robots were studied.

  • Joint Study on Integrated Clinical Analysis System

    Project Year :

    1991
    -
    1992
     

     View Summary

    New normally open, normally closed microvalves and a 3-way microvalve have been fabricated by micromachining, These microvalves have a simple structure and small dead volume of the order of tens of nl. Each microvalve is driven by a stack type piezo-actuator and the controllable flow range is from 1 ul/min to tens of ul/min. The channel volume of these valves is from 16 up to 32 nl. A novel sample injector which is an important device in flow injection analysis systems has been developed by applying the 3-way micro valve structure.
    To fabricate a high pressure micropump, a diaphragm type using passive check valve is studied. A novel check valve is developed. It has a simple structure consists of a silicone rubber float and a through-hole. The reverse flow resistance of this valve was about 10 atm min/ul and the forward to reverse flow ratio was about 1000 at applied pressure of 0.5 atm. These values are 10 to 100 times better than those of the conventional check valves. It is confined that this valve can be applied for a high pressure micropump of available pressure up to at least 1 atm.
    A new micro liquid flow sensor has been developed. It is a differential pressure type flow sensor which detects the pressure drop at a orifice with a piezoresistive type pressure sensor. The sensor consists of a center diaphragm in which a cross-shaped orifice is formed, a thick surrounding mesa fixed to the flame by a thick beam and surrounding diaphragm connected to the flame. A buried piezo-resistor is formed at the end of the support beam. It was formed by high energy ion implantation. Since the strain caused by differential pressure is concentrated at this point, high pressure sensitivity is obtained. The sensitivity of this sensor is about 8 x 1-0^<-5>. Buried piezoresistive sensor can eliminate the surface instability with out any passivation.

  • 集積化容量形圧力センサの高性能化

    科学研究費助成事業(東北大学)  科学研究費助成事業(試験研究(B))

    Project Year :

    1990
    -
    1991
     

     View Summary

    平成2年度は積集化容量形圧力センサの高性能化に関する研究を行い以下のような成果を得ることができた。
    1.製作工程、実装などを考慮して,センサ構造や容量検出回路などの設計を行い、大きさ2.2mm×1.8mmの絶対圧形集積化容量形圧力センサを製作した。
    2.製作したセンサの特性測定・評価を行なった。圧力による出力変化は、6.5%も得られたが、これは集積化容量形によってのみ可能である。特にセンサキャパシタ電極材料の改良で大きな出力変化を実現できたが,これはアルミニウム電極を白金/チタン電極に替えたことで,接合時の熱処理で突起を生じないようにしたことによる。
    3.この周波数出力形容量形圧力センサの外部回路方式を検討した。高い分解能と広い周波数帯域を同時に満足するには,多周期の時間幅を測定する方式が有効であることを確認した。
    4.相対圧形圧力センサの構造、製作プロセスの設計を行った。また専用の相対圧用容量検出回路を設計し、シミュレ-ションで動作を確認した。
    5.このセンサは電源線の電流変化周波数を検出することで,電源線と接地線の2線式で動作させることができる。これをさらに発展させ、複数のセンサを共通の2本の線に並列に接続し,特定のセンサを選択して動作させることができるインタフェ-ス用ICを製作した。

  • Implantable Pressure Measurement System

    Project Year :

    1988
    -
    1989
     

     View Summary

    An implantable pressure measurement system was studied. The results of the research are as follows; 1. A new electrical feedthrough structure for an implantable pressure sensors has been developed. This structure is indispensable for the absolute pressure sensor. It enables air-tight seal at the output read part and makes the packaging easy. The Pyrex glass-to-silicon anodic bonding, free from residual stress, and electrochemical discharge drilling which is useful to engrave narrow through-hole were developed. 2. A piezoresistive pressure sensor, using the new feedthrough structure was fabricated. The size of the sensor is 1.8mmxl.8mm and 580um in thickness. The diaphragm size is 0.8mmxO.8mm, and the depth of reference cavity is 3um.The sensitivity was 13uV/mmHg/Vs when the diaphragm thickness was 9um. 3. A capacitive relative pressure sensor for a catheter was fabricated. The size was 0.7x3.5xO.4mm. The normalized pressure sensitivity was 3.45xlO-4/mmHg and the temperature coefficient was 0.17mmHg/ C. 4. An integrated silicon capacitive pressure sensor has been fabricated. The size is 2.2mmxl.7mm and 500um in thickness. The CMOS capacitance to frequency converter circuit is integrated on the same silicon chip. output of the circuit is taken through glass holes which are at the opposite side of the silicon diaphragm. Output frequency is detected by monitoring the supply current in the power line, so that only two lead wires are necessary for the sensor. The thermal zero shift is less than 0.1%F.S./ C. The sensitivity is -31.3Hz/mmHg (0.048%F.S./mmHg). The power dissipation is 86.5uW. The sensor is suitable for implantable telemetry system because of its good stability, low power deception, and simple output signal detection.
    Design and fabrication principle of implantable pressure sensing system was established.

  • Development of Low Drift Monolithic Capacitive Pressure sensor for biomedical Applications

    Project Year :

    1985
    -
    1986
     

     View Summary

    To develope low drift implantable pressure sensors for biomedical research and clinical use, the fabrication of an absolute capasitive type pessure sensors is studied. The absolute capasitive type pressure sensors are suitable for implantation because of its high pressure sensitivity, low drift and low power consumption. It needs, however, a conplicated process to make two capasitance plates on both side of sealed reference cavity. An capacitance readout circuit is also needed very close to it because of its high output impedance.
    The electrostatic bonding of the silicon to the glass plate has been applied to fabricated the capasitive type pressure sensoes. This causes a temperature drift of the sensor due to the strain between the silicon and the glass. A new bonding technique, a direct silicon-to-silicon bonding, which uses polymerization of silanol bonds between wafer pairs is applied for this purpose. A vacuum sealed cavity is easily formed by this method and the CMOS IC can be also formed on the same tip after forming the cavity. The capasitive sensor which has a 500 x 500 <micro> <m^2> and 20 <micro> m thick diaphragm and a 1 <micro> m capasitive gap shows a puressure sensitivity of about 0.1 fF/mmHg.
    The capacitance readout circuit which applied a switched capacitor type integrater is designed and fabricated as a CMOS IC. A few fF capasitive deviation can be detected by this circuit. The linearity is guaranteed up to about 2 pF and the power consumption is lower than 0.5mW.
    The integration of the sensor and the capacitance readout CMOS IC on the same chip is accomplished. The prssure sensitivity of integrated sensor is about 8 <micro> V/V/mmHg (0.09 fF/mmHg) in the range of 0 to 300 mmHg. The drift of the sensor is, however, a little larger than that expected. This will be improved by redesign the process sequence and the circuit.

  • Studies on Integration and Packaging Technologies for Health Information Monitoring Microsystems

     View Summary

    Integration and packaging technologies of sensors and circuits to realize wire-less bio-monitoring microsystems for human health care and sick prevention have been studied these two years.Fabrication of the ECG monitoring microsystem consists of three ECG detecting electrodes, an amplifierand transmitter, which can be set at the chest is one of the final goals of the project. Two types custom IC of transmitter of PWM and FM, and amplifier were designed and fabricated using the multi-chip IC service project of the Institute of Electric Engineering of Japan. The demodulation circuit using PLL for the relay transmitter set at the wrist was also designed and fabricated with the discrete circuits. It is going to be fabricated with custom IC.The FM type system showed better ECG signal quality but the PWM type system stands up the noise. The muiti-microsensor chip of pressure, temperature and pH sensing was fabricated for realizing micro capsule for the monitoring of the digestive tract. The micro chip was designed considering the packaging. The detection and PWM transmission circuit of pH sensor was also designed and fabricated with custom IC.In order to realize the micropackaging of the systems, low temperature SiO2-SiO2 bonding technology using diluted HF solution have been developed. The bonding was achieved at the room temperature but 24 hours is necessary before the bonding completed. Elevating the bonding temperature to 60゚C or 80゚C is effective to reduce the bonding time. It is investigated that the hermetic seal packaging can be realized by the HF bonding

  • Studies on Metal/Ferroelectric/Insulator/Semiconductor (MFIS) -FET Memories Obeying The Scaling Rule

     View Summary

    Metal/Ferroelectric/Insulator/Semiconductor (MFIS)-FET memories have been studied. MFIS-FET memory in which the surface potential of Si is controlled by the remanent polarization of ferroelectric materials, has the significant advantages of obeying the scaling rule, high switching speed, nonvolatility, radiation tolerance and high density. The results of our work are as follows.(1) Fabrication of the Metal/Ferroelectric/Insulator/Semiconductor (MFIS) structuresTo obtain a good interface which acts as the gate oxide for Metal/Ferroelectric/Semiconductor (MFS)-FETs and to obtain ferroelectric films with preferred for use as intermediate layers between the ferroelectric material and the Si sybstrate for MFIS-FETs. By using ceria-zirconia mixture (Ce・ZrOィイD22ィエD2) films on Si substrate, CeOィイD22ィエD2 can be grown epitaxially. Ce-Ce・ZrOィイD22ィエD2 films are good intermediate layers between a ferroelectric material and Si (100) for MFIS-FET. We also developed a deposition method of PLZT on CeOィイD22ィエD2 buffer layer using the sol-gel method. By optimizing the annealing steps, PLZT can be also grown hetero epitaxially. On the other hand, MSIF structure having the SrBiィイD22ィエD2TaィイD22ィエD2OィイD29ィエD2 (SBT) as a poly crystalline ferroelectric material are also fabricated using SiON as a intermediate layer, which shows good C-V characteristics.(2) Fabrication of the MFIS-FET with self-alignment techniqueTo obtain microfabrication of MFIS-FETs with good high frequency characteristics, self-alignment technique was developed. A Pt, SBT and SiON were used as the gate metal, the ferroelectric material and the buffer layer. These three layers are patterned by the plasma dry etching with a single photoresist mask. The W/L of the MSIF-FET was 700/150 μm. To reduce the gate dimensions, reactive ion etching (RIE) is requested for the etching.(3) Studies on microfabrication methods of MFIS-FETsIn order to fabricate 1μm or smaller than 1 μm gate MFIS-FETs with simple self-alignment process, a high aspect ratio mask layer is needed. UV photoresist of EPON SU-8 was utilized for this purpose. Fine resolution of 1.5 μm with aspect ratio of 8 was obtained. We also studied three layer resist method using EB direct writing and RIE method. High resolution of about 0.5μm with aspect ratio of about 6.5 was realized

  • Development of X-ray and infrared detectors using micromachining technologies

     View Summary

    We studied new approaches to develop imaging microcalorimeters. We fabricated test models to confirm the new ideas experimentally. Major results are summarized below.(1) Micrormachine processing to fabricate microcalorimeter pixel structuresWe developed processes suited for imaging device. Finally we succeeded to fabricate calorimeter pixels with dry processes alone.(2) Fabrication of X-ray absorber on the calorimer pixel with micromachine processingWe developed new processes utilizing plating to fabricate X-ray absorbers of "mushroom structure" which covers the calorimeter pixels with high covering efficiencies.(3) Ti-Au bilayer TES thermometersIn our calorimeters, the temperature is sensed by the superconducting transition edge sensors (TES). We developed TES with Ti-Au bilayer membrane.(4) Microcalorimeter imaging readout systemNumber of signal lines allowed between the cryogenic to room temperatures is very limited. We developed a new method to multiplex calorimeter signals on frequency space. We developed a SQUID with multiple number of input coils and experimentally proved our new approach with a two-pixel calorimeter.(5) Evaluation of the X-ray microcalorimetersWe evaluated the energy resolution of our X-ray microcalorimeter operating at 200 mK.The energy resolution was 99 eV.This is not good enough. We studied the extra noise factors which limit our resolutions

  • Construction of Micro Bioanalytical Chemistry Lab,Systems and Single Cellular Biochemistry Integrated on a Glass Chip

     View Summary

    We have developed fundamental unit operations essential to integration of biochemical analysis, collaborating with the research project from Kanagawa Academy of Science and Technology (KAST).The integrated chemical systems have desirable characteristics, such as reduction in reagent consumption, waste and analysis time. Taking these advantages, we have demonstrated many applications, including solvent extraction, flow-injection analysis, laser reaction control, enzymatic reaction and immunoassay. We also developed ultra sensitive detection device, thermal lens microscope and apply this to single-cell imaging.The microspace in the microchannel is characterized by the large specific interfacial area and short diffusion distance, and these characteristics may contribute to highly efficient extraction and mixing with much shorter time than general method. The integration of wet analysis of heavy metal ions such as cobalt and iron leads to a considerable reduction in analyzing time. The time for extraction in the integrated system was about tenfold shorter than a conventional system using a separately funnel and mechanical shaker. Moreover, troublesome operations could be omitted.We have also integrated the immunoassay system using solid surface. This integration reduced the time necessary for the overall CEA analysis from 2d to 35min. Moreover, when serum samples were assayed with this system, there was a high correlation with the conventional ELISA. These results showed the applicability of integrated analytical systems.Thermal lens microscope could detect nonfluorescent biological substances with extremely high sensitivity without and labeling materials and had a high spatial resolution of 〜1_m. This system was applied to monitoring of cytochrome c distribution in a neuroblastoma-glioma hybrid cell cultured in the microflask fabricated in a glass microchip. Cytochrome c release from mitochondria to cytosol during the apoptosis process was successfully monitored with this system.The results of this research will bring very welcome developments to biochemical studies

  • Medical Three Dimensional Structures Formed by Digital Micromirror Rapid Prototyping

     View Summary

    The results of the research is as follows.(1) The divided projection method has been introduced in order to enlarge the rapid prototyping object without degradation of the resolution. The procedure is that after the cross section picture on the screen of the computer is divided into any number, the projected picture is compounded on the surface of the photosensitive resin by moving the prototyping XY stage. This method can make any size of model without degradation of the resolution.(2) As an application of medical three dimensional structure, an electrical moving pump for artificial heart has been fabricated by the rapid prototyping system. From the result, it has been shown that the propeller and the casing of the pump having the complex three dimensional structure can be constructed in a short time, and the system is a very essential tool for developing the study of artificial heart.(3) A μ-total analysis (μ-TAS) chip has been fabricated by the developed rapid prototyping for proving the possibility of production in a miniature size. The micro channel of 80 μm wide and 400 μm high for electrophoresis is formed using the projected picture with the pixel resolution of 15 μm square.(4) As a photosensitive resin, a visual light sensitive resin was tested. From this result, it has been shown that a metal halide lamp is acceptable as the light source instead of a super high pressure mercury lamp and the projector with DMD can be used as the non scanning rapid prototyping system as it is

  • Development of Unrestrained Measurements for The Aid of Diagnosis and Operations

     View Summary

    In this research, we have obtained the following results.(1) Micro flow system ICs which are used for measurements of bio-chemical contents. Micro 3-D flow cell was designed and prototype was fabricated.(2) Development of ultrasonic energy transmission system for implanted device. This system could operate implanted temperature monitor (0.19mW).(3) ECG telemetry system in which transmitter has diagnostic function. In the normal cases only heart rates are transmitted. On the other hands, all abnormal ECG waveforms are fully transmitted

  • マイクロシステムによる1分子・オルガネラソーターと1分子機能アッセイ系の開発

     View Summary

    マイクロシステムの微小流路の分岐点で流体の流れの方向を制御するため、チップ内部に流路の開閉を行うマイクロバルブが使われている。この方式では、バルプの開閉に機械的な部品が使われるので工作が困難になるほか、耐久性に問題がある。また、開閉に数秒を要するという欠点がある。これを克服するために、温度感受性ゲルを用いたオルガネラソーターを製作した。具体的には、温度によってゲルとゾルの相転移を可逆的に引き起こすメチルセルロースを1%溶液に加え、これをマイクロシステムの微小流路(シリコン基盤に作製したY字型流路で入り口の幅150μm、深さ50μm;出口の幅75μm、深さ50μm)に流し込む。マイクロシステムを蛍光顕微鏡システムに組み込み、流体の流れを観察しながら分岐点の下流を赤外レーザ(波長1480nm)で局所的に50℃以上に加熱することにより溶液をゲル化し、流れを塞き止めた。この方式が実際にバルプとして作用することを確認した。このシステムに高感度の蛍光検出装置を取り付け、分離システムを自動化した。すなわち、蛍光標識した目的のオルガネラを検出すると、スキャナーミラーでレーザビームを振り、回収用流知に流すようにした。この自動化により、約100ミリ秒でスイッチングできるシステムを構築できた

  • Production of novel proteins using the micro system that permits sorting and functional evaluation at single molecular level

     View Summary

    We have developed a micro fabricated fluorescence-activated bio-molecular sorter using thermosensitive hydrogel as a microvalve. The sorter was composed of a microfluidic chip with Y-shaped channels with one inlet and two outlets. Biological specimen containing fluorescently labeled cells and thermosensitive polymer was introduced into a Y-shaped microchannel. Thermosensitive polymer changed the state from sol to gel when it was heated. The sol-gel transition was locally induced by site directed infrared laser irradiation in order to plug the one of the microchannel and collect the cells. As an application of this sorter, GFP-expressing E. coll. CD8-expressing lymphocytes labeled with fluorescence antibody, and DNA molecules labeled with TOTO-1 were separated. The sorting time of 120 ms and recovery ratio of 90 % was achieved by this sorter

  • Development of Reaction and Function Control Systems by Microchip Integration

     View Summary

    Major purpose of the project is to create the new research field, microspace chemistry, by creating chemically functional microspace such as asymmetric catalyst, molecular harvesting, molecular recognition, and stimulate-responsive properties. Within a given period of this project, we exploited chemically functional microspace on a chip, highly functional matrices, and high performance analysis devices. Detailed information is as follows ;(1) Development of micro liquid/liquid interface and synthesis of a chemicofunctional mebbrane.(2) Development of the efficient catalyst for microscale synthesis and the nano-structured catalyst.(3) Realization of various combinatorial synthesis chips.(4) New reaction system using Gas-Liquid-Solid phase reactions in a microchannel (Ref. Science).(5) Development of surface modification method in a microchannel and demonstration of fluid control of gas/liquid or liquid/liquid.(6) Demonstration of asymmetric synthesis based on supercooling water.(7) Development of high performance p-ELISA devices for medical diagnosis.We published these results in high impact factor journals, and gave a lecture in various international conferences. Furthermore, these results can contribute to a variety of application in industrial circles

  • マイクロケモメカトロニクスの創成に関する総括研究

     View Summary

    平成13年度から平成15年度にわたって特定領域B「マイクロケモメカトロニクスの創成」を行った。研究成果をとりまとめ、報告書を刊行する他、公開シンポジウムを開催して成果の普及に努めることを目的とした。この特定領域研究では、ミクロの流路や反応容器の中で様々のバイオ・化学プロセスを実現し、これら単位プロセスを集積したマイクロ化学システムをチップ上に作ることを目標に、超微細加工技術を持つ電気・機械系の研究者と、液相微小空間の化学に精通した化学・バイオ系の研究者が共同して研究を行った。1.報告書の作成特定領域の共同研究者に呼びかけ、これまで3年間に得られた成果をまとめた報告と、学術雑誌等に発表した論文を集めた報告書を作成し、関連の研究者に配布した。2.単行本の刊行マイクロ化学システムを実現するためには、化学・バイオ分野に止まらず、半導体微細加工や超精密機械加工技術や微小空間における液体の反応化学など他の多くの理工学分野の知識と技術が必要である。このため、これらの技術を易しく、かつ体系的にまとめた単行本を「マイクロ化学チップの技術と応用」と題して刊行した(文献リスト参照)。この本は、半年の間に重版となるほど、広く読まれている。3.公開シンポジウムへの参加2005年3月にパリのCNRS(フランス科学研究センター)本部で開催された「マイクロ・ナノシステムに関するシンポジウム」に本研究に関する北森、馬場、藤田が参加し、本研究の成果を含めて発表を行った

  • Development of Micro Fluidic Systems for Real Time Function Analysis of Single Biomolecules

     View Summary

    Micro fluidic Systems for real time function analysis of single biomolecules were proposed and demonstrated. By applying MEMS and μTAS technologies, functional particular cell trapping and culture micro flow systems, a damage free cell rapture device, high through-put bio molecules sorting systems and high performance biomolecules analysis chips have been developed. Multi sample treatment and handling system technologies are also proposed and demonstrated

▼display all

Presentations

  • Post Deposition Treatment of Thin Film HfO2 Dielectric for Increased Performance in MIM Capacitors

    Alaric-Yohei Kawai Petillot, Shuichi Shoji, Jun Mizuno

    2022 International Conference on Electronics Packaging (ICEP 2022) 

    Presentation date: 2022.05

    Event date:
    2022.05
     
     
  • Development of a Novel Biomaterial for Spinal Implant Purpose

    Kazuma Kishimoto, Jun Mizuno

    2022 International Conference on Electronics Packaging (ICEP 2022) 

    Presentation date: 2022.05

    Event date:
    2022.05
     
     
  • マイクロドロップレットを応用してアミノ酸銅錯体の合成

    羽島颯平, 田中大器, 藤田博之, 秋津貴城, 関口哲志, 庄子習一

    日本化学会 第102春季年会(2022) 

    Presentation date: 2022.03

    Event date:
    2022.03
     
     
  • マイクロ流体デバイスを用いた高効率なアミノ酸含有銅錯体の合成

    小林雅史、庄子習一、関口哲志、田中大器、秋津貴城

    日本化学会 第102春季年会(2022) 

    Presentation date: 2022.03

    Event date:
    2022.03
     
     
  • マイクロドロップレットトラップデバイスを用いたリゾチームの結晶化

    宮崎彩, 庄子習一, 関口哲志, 田中大器

    日本化学会 第102春季年会(2022) 

    Presentation date: 2022.03

    Event date:
    2022.03
     
     
  • Stable Generation of Single-Micron Droplets and Highly Efficient Encapsulation of Cells by Multi-Branch Channels

    Seito Shijo, Daiki Tanaka, Masahiro Furuya, Tetsushi Sekiguchi, Shuichi Shoji

    The 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022) 

    Presentation date: 2022.01

    Event date:
    2022.01
     
     
  • Fabrication of Tissue-Engineered Oral Mucosa with Micropatterned Fish Scale-Collagen Scaffold Using 3D Printing Technology and Soft Lithography

    Kazuma Kishimoto, Orakarn Suebsamarn, Yoshihiro Kodama, Takafumi Komatsu, Ayako Suzuki, Shuichi Shoji, Kenji Izumi, Jun Mizuno

    2021 MRS (Materials Research Society) Fall Meeting 

    Presentation date: 2021.11

    Event date:
    2021.11
    -
    2021.12
  • Study of Atomic Layer Deposition of hafnium oxide as an insulation layer on Cu for potential flip chip integration

    A.Y. Kawai, S. Kataza, S. Shoji, J. Mizuno

    The IEEE CPMT Symposium Japan 2021 (ICSJ 2021) 

    Presentation date: 2021.11

    Event date:
    2021.11
     
     
  • Microdroplet Inner Rotation Control by Parallel Carrier Flow of Different Oils, Sesame and Silicone

    H. Yoshimura, D. Tanaka, T. Sekiguchi, S. Shoji

    The 25th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2021) 

    Presentation date: 2021.10

    Event date:
    2021.10
     
     
  • High Throughput Micrometer Scale Droplets Devices

    S. Shoji  [Invited]

    The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021) 

    Presentation date: 2021.06

    Event date:
    2021.06
     
     
  • Fabrication of Micropatterned Fish Scale Collagen Scaffold Using Soft Lithography for Oral Mucosa Tissue Engineering

    K. Kishimoto, K. Miwa, A. Suzuki, I. Yamaguchi, Y. Kodama, O. Suebsamarn, S. Shoji, K. Izumi, J. Mizuno

    2021 International Conference on Electronics Packaging (ICEP 2021) 

    Presentation date: 2020.05

    Event date:
    2021.05
     
     
  • Deformability-Based Microfluidic Microdroplet Sorting as a Screening Method for Single Agarolytic Bacterial Cells

    M. Muta, K. Saito, R. Iizuka, W. Kawakubo, D.H. Yoon, M. Ito, Y. Hatada, T. Sekiguchi, S. Shoji, T. Funatsu

    The 24th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2020)  (online) 

    Presentation date: 2020.10

  • QFP/Quartz Adhesive Bonding with Surface Treatment for Physical Security of Edge Artificial Intelligence Devices

    H. Nodaka, A. Tezuka, H. Kuwae, K. Yamada, M. Hoga, H. Shimamoto, S. Shoji, J. Mizuno

    2020 International Conference on Electronics Packaging (ICEP 2020)  (online) 

    Presentation date: 2020.04

  • 化学合成への応用に向けた有機溶媒のマイクロドロップレット形成手法の構築

    湯成河, 服部翔平, 野崎義人, 尹棟鉉, 田中大器, 藤田博之, 秋津貴城, 関口哲志, 庄子習一

    日本化学会 第100春季年会  (千葉) 

    Presentation date: 2020.03

  • Electrical Property Change of Woody Carbon Material by Moisture Absorption

    N. Takahashi, H. Kuwae, S. Shoji, J. Mizuno

    CIAiS (Research and Education Consortium for Innovation of Advanced Integrated Science) International Symposium  (Tokyo, Japan) 

    Presentation date: 2020.02

  • マイクロ・ナノ流体工学の光学・バイオ・化学への応用

    庄子習一, 桑江博之, 尹棟鉉, 田中大器, 関口哲志, 水野潤, 野崎義人, 笠原崇史, 秋津貴城  [Invited]

    電子情報通信学会 システムナノ技術に関する特別研究専門委員会(SNT)第3回研究会  (東京、日本) 

    Presentation date: 2020.01

  • ソフトリソグラフィー技術を用いてマイクロパターン化した魚うろこコラーゲン足場材付き培養口腔粘膜の作成

    三輪慶人, 鈴木絢子, 桑江博之, 山口勇, 兒玉泰洋, 泉健次, 庄子習一, 水野潤

    第26回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2020)  (横浜、日本) 

    Presentation date: 2020.01

  • 原子層堆積法により形成した薄膜金属中間層を用いた低温Cu-Cu疑似直接接合法の開発

    山田紘右, 桑江博之, 百瀬渉, 庄子習一, 水野潤

    第26回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2020)  (横浜、日本) 

    Presentation date: 2020.01

  • 液体有機ELを用いたオンデマンド蛍光検出システムの開発

    大塚茜里, 桑江博之, 大島寿郎, 庄子習一, 水野潤

    第26回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2020)  (横浜、日本) 

    Presentation date: 2020.01

  • RGB All Liquid-Based Microfluidic Quantum Dots Light-Emitting Diodes Using Deep-Blue Liquid Organic Semiconductor Backlight

    M. Kawamura, H. Kuwae, T. Kamibayashi, J. Oshima, T. Kasahara, S. Shoji, J. Mizuno

    The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020)  (Vancouver, Canada) 

    Presentation date: 2020.01

  • Study on Correlation between Surface Morphology and Work Function of Aluminum Film in Nanoscale

    K. Sasagawa, H. Kuwae, H. Goto, M. Sakata, T. Yasuda, J. Lu, H. Itoh, A. Honda, S. Shoji, J. Mizuno

    2019 MRS (Materials Research Society) Fall Meeting  (Boston, USA) 

    Presentation date: 2019.12

  • Fabrication of Artificial Oral Mucosa with Micropatterned Fish Scale-Collagen Scaffold by Soft Lithography

    K. Miwa, A. Suzuki, H. Kuwae, I. Yamaguchi, Y. Kodama, K. Izumi, S. Shoji, J. Mizuno

    2019 MRS (Materials Research Society) Fall Meeting.  (Boston, USA) 

    Presentation date: 2019.12

  • Sequential Formation of Daughter Droplets by Breakup of Microdroplets into Bypass Channel

    S. Hattori, D.H. Yoon, Y. Nozaki, T, Isano, H. Yamagata, H. Fujita, T. Sekiguchi, S. Shoji

    The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2019)  (Basel) 

    Presentation date: 2019.10

  • Simultaneous Microdroplets Generation by Tall Breakup Induced with Multi-Branch Channel

    S. Kajiya, D.H. Yoon, Y. Nozaki, T. Isano, H. Yamagata, H. Fujita, T. Sekiguchi, S. Shoji

    The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2019)  (Basel) 

    Presentation date: 2019.10

  • Establishment of Labo-In-A-Microdroplet for Azo Compound Synthesis

    D. Tanaka, S. Sawai, T. Sugaya, Y. Nozaki, D.H. Yoon, T. Isano, H. Yamagata, H. Fujita, T. Sekiguchi, T. Akitsu, S. Shoji

    The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2019)  (Basel) 

    Presentation date: 2019.10

  • LiTaO3/Quarts Bonding with Low-Residual-Stress Al2O3 Amorphous Intermediate Layer for 5G Surface Acoustic Wave Devices

    A. Tezuka, H. Kuwae, K. Yamada, S. Shoji, S. Kakio, J. Mizuno

    14th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT-IAAC 2019)  (TAipei) 

    Presentation date: 2019.10

  • Low-Residual Stress ALD-AI2O3 Intermediate Layer for LiTaO3/Quarts Combined Surface Acoustic Wave Substrate

    A. Tezuka, H. Kuwae, K. Yamada, S. Shoji, S. Kakio, J. Mizuno

    2019 Taiwan-Japan Workshop on Electronic Interconnection III  (Taichung) 

    Presentation date: 2019.10

  • Construction of a Well-Operable Crystallization Method for Chemical Analysis Applying Microdroplet Device

    S. Hattori, D. Tanka, D.H. Yoon, T. Sekiguchi, Y. Nozaki, T. Akitsu, S. Shoji

    The 4th Conference on Micro Fluidic Handling Systems (MFHS 2019)  (Enschede, The Netherlands) 

    Presentation date: 2019.10

  • High Efficient Synthesis of Functional Compounds by Microfluidic Device

    D. Tanaka, D.H. Yoon, Y. Nozaki, T. Sekiguchi, T. Akitsu, S. Shoji

    The 4th International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-4)  (Sendai, Japan) 

    Presentation date: 2019.10

  • Introduction of the Study on Moisture Adsorption Characteristics of Woody Carbon Material

    N. Takahashi, H. Kuwae, S. Shoji, J. Mizuno

    The 10th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2019)  (Asahikawa, Hokkaido, Japan) 

    Presentation date: 2019.07

  • High-Color-Purity Microfluidic Quantum Dots Light-Emitting Diodes Using the Electroluminescence of the Liquid Organic Semiconductor Backlight

    M. Kawamura, H. Kuwae, T. Kamibayashi, J. Oshima, T. Kasahara, S. Shoji, J. Mizuno

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019)  (Berlin, Germany) 

    Presentation date: 2019.06

  • High-Efficiency Dibromination of Organic Compound in Microfluidic Channel of Si Pillar Array Directly Coated with Iron Catalyst

    T. Sugaya, D. Tanaka, D.H. Yoon, Y. Nozaki, T. Sekiguchi, T. Akitsu, S. Shoji

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019)  (Berlin, Germany) 

    Presentation date: 2019.06

  • Study on Role of Inserted Pt Intermediate Layer Deposited by Atomic Layer Deposition for Cu-Cu Quasi-Direct Bonding

    K. Yamada, H. Kuwae, T. Kamibayashi, S. Shoji, W. Momose, J. Mizuno

    2019 6th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2019)  (Kanazawa, Japan) 

    Presentation date: 2019.05

  • Cu-Cu Quasi-Direct Bonding with Atomically Thin-Au and Pt Intermediate Layer Using Atomic Layer Deposition

    H. Kuwae, K. Yamada, W. Momose, S. Shoji, J. Mizuno

    2019 International Conference on Electronics Packaging (ICEP 2019)  (Niigata, Japan) 

    Presentation date: 2019.04

  • Study of Low-Residual Stress Amorphous Film Deposition Method for LiTaO3/Quarts or LiNbO3/Quarts Bonding toward 5G Surface Acoustic Wave Devices

    A. Tezuka, H. Kuwae, K. Yamada, S. Shoji, S. Kakio, J. Mizuno

    2019 International Conference on Electronics Packaging (ICEP 2019)  (Niigata, Japan) 

    Presentation date: 2019.04

  • マイクロ液滴を用いた効率的なアゾ化合物の合成

    澤井俊介, 田中大器, 尹棟鉉, 関口哲志, 秋津貴城, 庄子習一

    日本化学会 第99春季年会(2019)  (神戸) 

    Presentation date: 2019.03

  • Low Cost and High-Efficient Piezoelectric MEMS Energy Harvester with Interdigitated Electrodes and Liquid-based VDF-TrFE

    K. Sasagawa, D.H. Yoon, T. Sekiguchi, T. Sasaki, T. Nakajima, S. Shoji

    CIAiS (Research and Education Consortium for Innovation of Advanced Integrated Science) International Symposium 2019  (Tokyo, Japan) 

    Presentation date: 2019.03

  • Water-Electrokinetic Energy Harvester Using Flexible Woody Carbon Film

    S. Maeda, H. Kuwae, S. Shoji, J. Mizuno

    CIAiS (Research and Education Consortium for Innovation of Advanced Integrated Science) International Symposium 2019  (Tokyo, Japan) 

    Presentation date: 2019.03

  • Oil-In-Water Droplet Formation in Hydrophobic PDMS Device Using Three-Dimensional Protruded Taper Channel

    D.H. Yonn, T. Sekiguchi, S. Shoji

    CIAiS (Research and Education Consortium for Innovation of Advanced Integrated Science) International Symposium 2019  (Tokyo, Japan) 

    Presentation date: 2019.03

  • Water-Electrokinetic Power Generation Device Using Flexible Woody Carbon Film

    S. Maeda, H. Kuwae, K. Sakamoto, S. Shoji, J. Mizuno

    The 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)  (Seoul) 

    Presentation date: 2019.01

  • フレキシブル木質系炭素材料を用いた水蒸気発電デバイス

    前田世蓮, 桑江博之, 高橋奈々, 庄子習一, 水野潤

    第25回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2019)  (横浜) 

    Presentation date: 2019.01

  • メッシュパターンを有するフレキシブル酸化インジウムスズ電極の開発

    坂本暁祐, 桑江博之, 庄子習一, 水野潤

    第25回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2019)  (横浜) 

    Presentation date: 2019.01

  • ビルドアップ樹脂を用いた熱インプリントプロセスによる高アスペクト比極微細ビア電極の作製

    上林拓海, 桑江博之, 岸岡高広, 臼井友輝, 大橋拓矢, 田村護, 庄子習一, 水野潤

    第25回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2019)  (横浜) 

    Presentation date: 2019.01

  • Measurement of the Cell Migration and Cytokine Secretion Activity with Real-Time Imaging System

    Y. Tanaka, N. Suzuki, K. Moro, J. Mizuno, S. Shoji, S. Uemura, Y. Shirasaki

    29th 2018 International Symposium on Micro-NanoMechatronics and Human Science (MHS 2018)  (Nagoya, Japan) 

    Presentation date: 2018.12

  • Electrowetting Device With Liquid Organic Semiconductor Emulsion

    H. Kuwae, A. Fujiwara, K. Sakamoto, J. Oshima, S. Shoji, J. Mizuno

    31st International Microprocesses and Nanotechnology Conference (MNC 2018)  (Sapporo, Japan) 

    Presentation date: 2018.11

  • Oil-In-Water Droplet Formation in Hydrophobic PDMS Device Using Three-Dimensional Protruded Taper Channel

    C. Tang, D.H. Yoon, T-Sekiguchi, S, Shoji

    The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2018)  (Kaohsiung, Taiwan) 

    Presentation date: 2018.11

  • マイクロ流体デバイスと電界紡糸法によるマルチコンポーネントファイバーの作製

    菅谷拓央, 深野愼介, 尹棟鉉, 関口哲志, 庄子習一

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  (札幌) 

    Presentation date: 2018.11

  • 粘度の違いを利用したマイクロドロップレットソーティングデバイスの開発

    田中大器, 菅谷拓央, 川久保渉, 尹棟鉉, 関口哲志, 庄子習一

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  (札幌) 

    Presentation date: 2018.10

  • Low Temperature Copper-Copper Quasi-Direct Bonding with Ultrathin Platinum Intermediate Layer Using Atomic Layer Deposition

    K. Yamada, H. Kuwae, T. Kamibayashi, W. Momose, S. Shoji, J. Mizuno

    International Microsystems, Packaging, Assembly and Circuit Technology Conference (IMPACT 2018),  (Taipei, Taiwan) 

    Presentation date: 2018.10

  • High-Aspect-Ratio Sub-2-µm Vias Using Thermal Imprint with Build-Up Resin

    T. Kamibayashi, H. Kuwae, T. Kishioka, Y. Usui, T. Ohashi, M. Tamura, S. Shoji, J. Mizuno

    International Microsystems, Packaging, Assembly and Circuit Technology Conference (IMPACT 2018)  (Taipei, Taiwan) 

    Presentation date: 2018.10

  • Position Controllable Liquid Organic Emitter Device Using Electrowetting on Dielectrics

    K. Atsumi, A. Fujiwara, H. Kuwae, S. Shoji, J. Mizuno

    The 3rd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-3)  (Tokyo, Japan) 

    Presentation date: 2018.09

  • ALDによる超薄膜Pt中間層を用いたCu-Cu低温疑似直接接合

    桑江博之, 山田紘右, 上林拓海, 百瀬渉, 庄子習一, 水野潤

    第79回応用物理学会秋季学術講演会  (名古屋) 

    Presentation date: 2018.09

  • Fabrication of Long Luminant Tissues in Three-Dimensional Gel Scaffolds with Oriented Cellulose Nanofibers

    T. Tanaka, K. Imato, K. Yoneda, D.H. Yoon, T. Sekiguchi, S. Shoji, N. Takeda

    5th Tissue Engineering and Regenerative Medicine International Society World Congress 2018  (Kyoto, Japan) 

    Presentation date: 2018.09

  • Fabrication of Long Myotube Bundles in Three-Dimensional Gel Scaffolds with Oriented Cellulose Nanofibers

    K. Imato, K. Yoneda, T. Tanaka, D.H. Yoon, T. Sekiguchi, S. Shoji, N. Takeda

    5th Tissue Engineering and Regenerative Medicine International Society World Congress  (Kyoto, Japan) 

    Presentation date: 2018.09

  • Fabrication of Self-Standing Curved Film with Pillar-Shaped Hole Patterns Using Large-Area Spherical Soft UV Imprint Lithography

    T. Kamibayashi, H. Kuwae, S. Shoji, J. Mizuno

    2018 Japan-Taiwan Workshop on Electronic Interconnection II  (Kuwana, Mie, Japan) 

    Presentation date: 2018.04

  • 圧電薄膜フィルムを用いた安価な振動発電素子

    笹川健太, 佐々木敏夫, 関口哲志, 中島啓, 庄子習一

    4大学ナノ・マイクロファブリケーションコンソーシアム・シンポジウム  (川崎) 

    Presentation date: 2018.03

  • LCチップ集積に向けたポストカラムミキサーの開発

    菅谷拓央, 中西完貴, 磯川宗生, 尹棟鉉, 関口哲志, 庄子習一, 船津高志, 角田誠

    4大学ナノ・マイクロファブリケーションコンソーシアム・シンポジウム  (川崎) 

    Presentation date: 2018.03

  • セルロースナノファイバーゲルを培養場とした多層ファイバー中での筋管形成誘導

    今任景一, 米田憲司, 田中智, 尹棟鉉, 関口哲志, 庄子習一, 武田直也

    第17回日本再生医療学会総会  (横浜) 

    Presentation date: 2018.03

  • Simple Formation of Complex Cross-Sectional Flow Using Multi-Stacked Three-Dimensional PDMS Structures

    D.H. Yoon, T. Sekiguchi, S. Shoji

    CIAiS (Research and Education Consortium for Innovation of Advanced Integrated Science) International Symposium 2018  (Tokyo, Japan) 

    Presentation date: 2018.03

  • Crystallization of Zinc(II) Complex Containing Lysozyme by Super Water Repellent Umbrella Pillar Array

    D. Tanaka, W. Kawakubo, D.H. Yoon, T. Sekiguchi, T. Akitsu, S. Shoji

    CIAiS (Research and Education Consortium for Innovation of Advanced Integrated Science) International Symposium 2018  (Tokyo, Japan) 

    Presentation date: 2018.03

  • Fabrication of Diamond-Based Transmission Electron Microscopy Grid for High-Resolution Bio-Sample Observation

    B. Xu, H. Kuwae, S. Shoji, J. Mizuno

    第24回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2018)  (横浜) 

    Presentation date: 2018.01

  • 液体有機半導体を用いたフレキシブルマイクロ流体有機ELリボン

    登惇輝, 桑江博之, 小林直史, 笠原崇史, 大島寿郎, 庄子習一, 水野潤

    第24回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2018) 

    Presentation date: 2018.01

  • 非晶質層を用いたLiTa03/QZ接合SAW基板の作製

    須崎遥, 桑江博之, 岸田和人, 垣尾省司, 庄子習一, 水野潤

    第24回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2018)  (横浜) 

    Presentation date: 2018.01

  • Preparation and Charterization of High Performance Activated Carbon Fibers by Vaccum Ultaraviolet Surface Treatment

    H. Kuwae, K. Mizokami, S. Maeda, S. Shoji, J. Mizuno

    2017 MRS (Materials Research Society) Fall Meeting  (Boston, USA) 

    Presentation date: 2017.11

  • Promoting Proliferation and Elongation of Bone Marrow-Derived Stem Cells via Nano-Grain Deposited Periodic Nanostructures

    M. Shiozawa, Y. Akiba, K. Uoshima, K. Eguchi, H. Kuwae, W. Fu, S. Shoji, J. Mizuno

    2017 MRS (Materials Research Society) Fall Meeting  (Boston, USA) 

    Presentation date: 2017.11

  • Luminance Degradation and Recovery of Liquid Organic Semiconductors

    K. Sakamoto, H. Kuwae, N. Kobayashi, A. Nobori, J. Oshima, C. Adachi, S. Shoji, J. Mizuno

    2017 MRS (Materials Research Society) Fall Meeting  (Boston, USA) 

    Presentation date: 2017.11

  • 高機能木質系炭素材料に向けた真空紫外光表面処理における酸素分圧の影響

    前田世蓮, 桑江博之, 庄子習一, 水野潤

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  (広島) 

    Presentation date: 2017.11

  • マイクロ流体デバイスによる高効率かつ安全なブロモ基付加操作

    川久保渉, 田中大器, 尹棟鉉, 関口哲志, 高橋啓太, 秋津貴城, 庄子習一

    34回「センサ・マイクロマシンと応用システム」シンポジウム  (広島) 

    Presentation date: 2017.11

  • 超撥水性二重凹型ピラーアレイデバイスによるZn(II)錯体含有リゾチームの結晶化

    田中大器, 川久保渉, 尹棟鉉, 関口哲志, 秋津貴城, 庄子習一

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  (広島) 

    Presentation date: 2017.10

  • フレキシブルエレクトロニクスデバイスへ向けたメッシュパターンを有するフレキシブル酸化インジウムスズ電極

    坂本暁祐, 桑江博之, 小林直史, 登厚惇輝, 庄子習一, 水野潤

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  (広島) 

    Presentation date: 2017.10

  • Effects of Surface Modification on Woody Carbon Materials by Vacuum Ultraviolet Treatment

    H. Kuwae, K. Mizokami, S. Maeda, S. Shoji, J. Mizuno

    2017 Taiwan-Japan Workshop on Electronic Interconnection I  (Taipei, Taiwan) 

    Presentation date: 2017.10

  • A Micromachined Liquid Chromatography Chip with a Pillar Array Mixer for Post-Column Derivatization in the Analysis of Neurotransmitters

    M. Isokawa, K. Nakanishi, T. Kanamori, H. Zhuang, H. Yamazaki, T. Sugaya, D.H. Yoon, T. Sekiguchi, T. Funatsu, S. Shoji, M. Tsunoda

    The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2017)  (Savannah, Georgia, USA) 

    Presentation date: 2017.10

  • Crystallization of Zinc(II) Complex Containing Lysozyme by Super Water Repellent Doubly Reentrant Structure Umbrella Pillar Array

    D. Tanaka, W. Kawakubo, D.H. Yoon, T. Sekiguchi, T. Akitsu, S. Shoji

    The 3rd Conference on Microfluidic Handling Systems (MFHS 2017)  (Enschede, The Netherlands) 

    Presentation date: 2017.10

  • Extremely Efficient and Non-Hazardous Bromo Group Addition Reaction Using Simple Microfluidic Devices

    W. Kawakubo, D. Tanaka, D.H. Yoon, T. Sekiguchi, K. Takahashi, T. Akitsu, S. Shoji

    The 3rd Conference on Microfluidic Handling Systems (MFHS 2017)  (Enschede, The Netherlands) 

    Presentation date: 2017.10

  • Free-Formable Microfluidic Organic Light Emitting Diode Ribbons Using Liquid Organic Semiconductors

    A. Nobori, H. Kuwae, N. Kobayashi, T. Kasahara, J. Oshima, S. Shoji, J. Mizuno

    2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-2)  (Nagoya, Japan) 

    Presentation date: 2017.09

  • Effects of Surface Modification on Lignocellulosic Porous Carbon Materials by Vacuum Ultraviolet Treatment

    S. Maeda, H. Kuwae, S. Shoji, J. Mizuno

    2nd International Symposium on Creation of Life Innovation Materials for Interdisciplinary and International Researcher Development (iLIM-2)  (Nagoya, Japan) 

    Presentation date: 2017.09

  • Fabrication of Mechanical Durable Glass Nanopillar with Bridged Structure

    H. Kuwae, T. Sudo, K. Takayama, S. Shoji, J. Mizuno

    2017 International Conference on Solid State Devices and Materials (SSDM 2017)  (Sendai, Japan) 

    Presentation date: 2017.09

  • A Study on Low Temperature SAM Modified POM Direct Bonding Affected by VUV/O3 Irradiation

    W. Fu, B. Ma, H. Kuwae, S. Shoji, J. Mizuno

    2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)  (Tokyo, Japan) 

    Presentation date: 2017.05

  • Cu-Cu Direct Bonding by Introducing Au Intermediate Layer

    H. Noma, T. Kamibayashi, H. Kuwae, N. Suzuki, T. Nonaka, S. Shoji, J. Mizuno

    2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)  (Tokyo, Japan) 

    Presentation date: 2017.05

  • Fabrication of Self-Standing Curved Film with Pillar Arrays by Large Area Spherical Soft-UV Imprint Lithography

    T. Kamibayashi, H. Kuwae, A. Nobori, S. Shoji, J. Mizuno

    2017 International Conference on Electronics Packaging (ICEP 2017)  (Tendo, Yamagata, Japan) 

    Presentation date: 2017.04

  • Low Temperature Direct Bonding of Polyoxymethylene (POM) Through Self Assembled Monolayers (SAM)

    W. Fu, H. Kuwae, B. Ma, S. Shoji, J. Mizuno

    2017 International Conference on Electronics Packaging (ICEP 2017)  (Tendo, Yamagata, Japan) 

    Presentation date: 2017.04

  • Highly Bendable Transparent Electrode Using Mesh Patterned Indium Tin Oxide for Flexible Electronic Devices

    K. Sakamoto, H. Kuwae, N. Kobayashi, A. Nobori, S. Shoji, J. Mizuno

    The 12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017)  (Los Angeles, USA) 

    Presentation date: 2017.04

  • MEMSテクノロジーによる次世代実装技術

    塩澤茉由子, 桑江博之, 庄子習一, 水野潤

    4大学ナノ・マイクロファブリケーションコンソーシアム・シンポジウム  (川崎) 

    Presentation date: 2017.03

  • Fabrication of the Microfluidic Device for Chemical Reaction

    S. Sawai, D. Tanaka, D.H. Yoon, T. Sekiguchi, T. Akitsu, S. Shoji

    4大学ナノ・マイクロファブリケーションコンソーシアム・シンポジウム  (川崎) 

    Presentation date: 2017.03

  • サブミクロン金粒子の一括埋め込みにより形成したI型ガラス貫通電極を有する気密封止デバイスの作製

    野村和哉, 岡田愛姫子, 庄子習一, 小柏俊典, 水野潤

    第23回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2017)  (横浜) 

    Presentation date: 2017.02

  • ナノポーラス金接合に向けた真空紫外光による表面前処理

    金田達志, 岡田愛姫子, 付偉欣, 庄子習一, 齊藤美紀子, 西川宏, 水野潤

    第23回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2017)  (横浜) 

    Presentation date: 2017.02

  • 低分子有機半導体接合を用いた新規有機EL作製技術

    金田達志, 桑江博之, 庄子習一, 安達千波矢, 水野潤

    第23回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2017)  (横浜) 

    Presentation date: 2017.02

  • Deep-Blue Light Emission with a Wide-Bandgap Naphthalene-Derivative Liquid Organic Semiconductor Host

    N. Kobayashi, H. Kuwae, J. Oshima, R. Ishimatsu, S. Tashiro, T. Imato, C. Adachi, S. Shoji, J. Mizuno

    SPIE Photonics West 2017  (San Francisco, USA) 

    Presentation date: 2017.02

  • OLEDs with Ultra-High Thermal Conductivity Substrate

    K. Atsumi, H. Kuwae, Y. Shihara, A. Nobori, C. Adachi, S. Shoji, J. Mizuno

    he 8th Asian Conference on Organic Electronics (A-COE 2016)  (Kyoto, Japam) 

    Presentation date: 2016.12

  • Study of LiTaO3/ST-Quartz Bonding with Amorphous Interlayer Assisted by VUV/O3 Treatment for SAW Device

    H. Suzaki, H. Kuwae, A. Okada, S. Shoji, S. Shoji

    International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT 2016)  (Taipei, Taiwan) 

    Presentation date: 2016.10

  • Simultaneous Fabrication of a Through-Glass Interconnect Via and Bumps Using Dry Filling Process of Submicron Gold Particles

    K. Nomura, A. Okada, S. Shoji, T. Ogashiwa, J. Mizuno

    International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT 2016)  (Taipei, Taiwan) 

    Presentation date: 2016.10

  • 二重四角構造ピラーアレイを応用した超撥水性表面の低コスト量産プロセスの開発

    中西完貴, 簔城森幸, 尹棟鉉, 関口哲志, 庄子習一

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  (長崎) 

    Presentation date: 2016.10

  • 機能性ファイバー材料合成を目的としたチェック状断面構造層流デバイスの開発

    小林和博, 尹棟鉉, 関口哲志, 庄子習一

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  (長崎) 

    Presentation date: 2016.10

  • Study for Simple Fabrication Process of Printable Piezoelectric Energy Harvest Device

    鎌田裕樹, 尹棟鉉, 佐々木敏夫, 野崎義人, 山浦真一, 関口哲志, 中嶋宇史, 庄子習一

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  (長崎) 

    Presentation date: 2016.10

  • Fifty-Second Analysis of Oxidative Stress Markers in Human Plasma Using Amide-Modified Liquid Chromatography Chip

    M. Isokawa, K. Nakanishi, D.H. Yoon, T. Sekiguchi, T. Funatsu, S. Shoji, M. Tsunoda

    The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2016)  (Dublin, Ireland) 

    Presentation date: 2016.10

  • In Vitro Selection of Novel Peptide Agonists for Human Somatostatin Receptor Subtype-2 Using a Water-In-Oil Microdroplet Platform

    T. Sakurai, R. Iizuka, Y. Nakamura, J. Ishii, A. Kondo, A. Iguchi, D.H. Yoon, T. Sekiguchi, S. Shoji, T. Funatsu

    The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2016)  (Dublin, Ireland) 

    Presentation date: 2016.10

  • Complex Check-Like Cross-Sectional Flow Formation for Fiber-Shaped Materials

    K. Kobayashi, D.H. Yoon, T. Sekiguchi, S. Shoji

    The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2016)  (Dublin, Ireland) 

    Presentation date: 2016.10

  • MEMS関連の国際研究開発はどこに向かっているのか

    庄子習一  [Invited]

    MEMSセンシング&ネットワークシステム展「MEMS協議会フォーラム」  (横浜) 

    Presentation date: 2016.09

  • 早大 MEMS技術の紹介と小型発電デバイスへの応用例

    庄子習一, 関口哲志, 水野潤  [Invited]

    東北大学金属材料研究所・ナノ・ライフ創新研究機構 連携協定締結記念シンポジウム  (仙台) 

    Presentation date: 2016.09

  • インクジェット工法を用いた環境発電素子の作製

    鎌田裕樹, 佐々木敏行, 関口哲志, 庄子習一

    東北大学金属材料研究所・ナノ・ライフ創新研究機構 連携協定締結記念シンポジウム  (仙台) 

    Presentation date: 2016.09

  • Fabrication Process of Fluidic Devices for Producing Fine Droplets

    Y. Nozaki, T. Kanai, A. Matsuo, D. Tanaka, I. Yuito, T. Takeuchi, T. Sekiguchi, S. Shoji

    The 16th International Conference on Nanotechnology, (IEE NANO 2016)  (Sendai, Japan) 

    Presentation date: 2016.08

  • 三次元マイクロ流体デバイスを用いたマルチコア螺旋構造ファイバの作製

    尹棟鉉, 有吉理沙, 佐藤成晃, 関口哲志, 庄子習一

    電気学会センサ・マイクロマシン部門総合研究会  (金沢) 

    Presentation date: 2016.06

  • 脳標本のリアルタイム評価のためのバイオモニタリングシステムの開発

    根岸周也, 鎌田将仁, 梶原利一, 金子祐史, 尹棟鉉, 関口哲志, 庄子習一, 工藤寛之

    電気学会センサ・マイクロマシン部門総合研究会  (金沢) 

    Presentation date: 2016.06

  • Fabrication of Conductive Diamond Membrane for Functional TEM Grids Using Two-Step Dry Etching

    B. Xu, H. Kuwae, T. Edura, H. Adaniya, M. Yamashita, T. Shintake, S. Shoji, J. Mizuno

    Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT 2016)  (Kanazawa, Japan) 

    Presentation date: 2016.06

  • Low Temperature Bonding Between Polyether Ether Ketone (PEEK) and Pt Through Vapor Assisted VUV Surface Modification

    W. Fu, S. Shoji, J. Mizuno, A. Shigetou

    2016 IEEE 66th Electronic Components and Technology Conference (ECTC 2016)  (Las Vegas, USA) 

    Presentation date: 2016.06

  • ST-Quartz/LiTaO3 Direct Bonding Using SiO2 Amorphous Layers with VUV/O3 Pre-Treatment for a Novel 5G Surface Acoustic Wave Device

    H. Suzaki, H. Kuwae, A. Okada, B. Ma, S. Shoji, J. Mizuno

    2016 International Conference on Electronics Packaging (ICEP 2016)  (Sapporo, Japan) 

    Presentation date: 2016.04

  • VUV/O3 Assisted Single-Crystal Quartz Bonding with Amorphous SiO2 Intermedicate Layer for Manufacturing Optical Low Pass Filter

    B. Ma, H. Kuwae, A. Okada, W. Fu, S. Shoji, J. Mizuno

    2016 International Conference on Electronics Packaging (ICEP 2016)  (Sapporo, Japan) 

    Presentation date: 2016.04

  • Low Temperature Direct Bonding of PEEK and Pt Through VUV/FAB Surface Treatments

    W. Fu, A. Shigetou, S. Shoji, J. Mizuno

    2016 International Conference on Electronics Packaging (ICEP 2016)  (Sapporo, Japan) 

    Presentation date: 2016.04

  • Development of a Simple Fabrication Process for a Printable Piezoelectric Energy Harvest Device

    Y. Kamata, D.H. Yoon, T. Sasaki, Y. Nozaki, S. Yamaura, T. Sekiguchi, T. Nakajima, S. Shoji

    The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)  (Matsushima, Japan) 

    Presentation date: 2016.04

  • Flexible Organic Light Emitting Diode Ribbons Using Three Liquid Organic Semiconductors

    A. Nobori, N. Kobayashi, H. Kuwae, T. Kasahara, J. Oshima, C. Adachi, S. Shoji, J. Mizuno

    The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016)  (Matsushima, Japan) 

    Presentation date: 2016.04

  • 橋掛け構造により高い擦り耐性を実現するガラスナノピラー構造の作製

    須藤健成, 岡田愛姫子, 桑江博之, 高山公介, 庄子習一, 水野潤

    第22回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2016)  (横浜) 

    Presentation date: 2016.02

  • 高密度3次元実装に向けたフィラー含有樹脂とバンプのハイブリッド接合技術

    大山真輝, 仁村将次, 庄子習一, 田村護, 榎本智之, 重藤暁津, 水野潤

    第22回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(Mate 2016)  (横浜) 

    Presentation date: 2016.02

  • All-Round Micro Sheath Flow Formation to Realize Complex Cross Sections by Simply Stacked PDMS Structures

    D.H. Yoon, L. Ariyoshi, D. Tanaka, T. Sekiguchi, S. Shoji

    The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)  (Shanghai, China) 

    Presentation date: 2016.01

  • Low Temperature Direct Bonding of Single Crystal Quartz Substrates for High Performance Optical Low Pass Filter Using Amorphous SiO2 Intermediate Layers

    B. Ma, H. Kuwae, A. Okada, W. Fu, S. Shoji, J. Mizuno

    The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016)  (Shanghai, China) 

    Presentation date: 2016.01

  • Nano-Structured Organic Light Emitting Diode for Suppression of Roll-Off Characteristics Toward Electrically-Pumped Organic Semiconductor Laser Diodes

    H. Kuwae, A. Nitta, T. Kasahara, K. Yoshida, S. Shoji, C. Adachi, J. Mizuno

    2015 International Chemical Congress of Pacific Basin Societies (Pacifichem 2015)  (Honolulu, Hawaii) 

    Presentation date: 2015.12

  • マイクロフルイディックエンジニアリングの進展と課題

    庄子習一, 尹棟鉉, 関口哲志  [Invited]

    新化学技術推進協会(JACI) 電子情報技術部会 マイクロナノシステムと材料・加工分科会 講演会  (東京) 

    Presentation date: 2015.11

  • チップストリーミングを用いた単一細胞解析に向けた分離可能な液滴の生成

    鎌田祐樹, 尹棟鉉, 関口哲志, 庄子習一

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  (新潟) 

    Presentation date: 2015.10

  • 外部磁場で制御可能な回転式マイクロアクチュエータの作製とマイクロ液滴搬送への応用

    中西完貴, 尹棟鉉, 関口哲志, 庄子習一

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  (新潟) 

    Presentation date: 2015.10

  • 金属薄膜を用いた異種材料同時エッチングによる極微細ガラス構造の作製手法

    須藤健成, 桑江博之, 岡田愛姫子, 笠原崇史, 高山公介, 海田由里子, 庄子習一, 水野潤

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  (新潟) 

    Presentation date: 2015.10

  • ストライプ構造マイクロ流体白色有機ELの作製

    小林直史, 笠原崇史, 江面知彦, 大島寿郎, 石松亮一, 今任稔彦, 庄子習一, 水野潤

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  (新潟) 

    Presentation date: 2015.10

  • 電流励起有機半導体レーザー光源に向けた高電流密度・高発光効率同時実現のためのNano-OLEDsの作製

    桑江博之, 新田篤志, 笠原崇史, 吉田功, 庄子習一, 安達千波矢, 水野潤

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  (新潟) 

    Presentation date: 2015.10

  • On-Chip Integration of Solid-Phase-Extraction and Silicon Pillar Arrays for High Efficient Liquid Chromatography

    K Nakanishi, K. Shih, T. Kanamori, D.H. Yoon, T. Funatsu, M. Tsunoda, T. Sekiguchi, S. Shoji

    The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2015)  (Gyeongiu, Korea) 

    Presentation date: 2015.10

  • Culture-Independent Method for Screening and Identifying Microbial Enzyme-Encoding Genes Using Microdroplet-Based Single Cell Genomics

    K. Nakamura, R. Iizuka, T. Yoshida, Y. Hatada, Y. Takaki, S. Nishi, A. Iguchi, D.H. Yoon, T. Sekiguchi, S. Shoji, T. Funatsu

    The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2015)  (Gyeongiu, Korea) 

    Presentation date: 2015.10

  • Multi-Stage Size Dependent Passive Droplet Sorting Using Droplet Transfer on Cascade Line-Rails and Shape Recovery on Dot-Rails

    Z. Xie, D.H. Yoon, T. Sekiguchi, S. Shoji

    The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2015)  (Gyeongiu, Korea) 

    Presentation date: 2015.10

  • Single Cell Encapsulated Microdroplet Formation Using TIP-Streaming and Deterministic Lateral Displacement

    Y. Kamata, D.H. Yoon, T. Sekiguchi, S. Shoji

    The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2015)  (Gyeongiu, Korea) 

    Presentation date: 2015.10

  • Low Temperature Direct Bonding of Polyether Ether Ketone (PEEK) and Pt

    W. Fu, A. Shigetou, S. Shoji, J. Mizuno

    International Microsystems, Packaging, Assembly and Circuit Technology Conference (IMPACT 2015)  (Taipei, Taiwan) 

    Presentation date: 2015.10

  • Fabrication of a Hermetic Sealing Device Having I-Structure TGV Filled with Submicron Gold Particles

    K. Nomura, A. Okada, S. Shoji, T. Ogashiwa, J. Mizuno

    International Microsystems, Packaging, Assembly and Circuit Technology Conference (IMPACT 2015)  (Taipei, Taiwan) 

    Presentation date: 2015.10

  • マイクロ流体技術を用いた液体有機発光デバイスの開発とその応用

    水野潤, 笠原崇史, 津脇美帆, 松波成行, 江面知彦, 石松亮一, 大島寿郎, 今任稔彦, 庄子習一, 安達千波矢

    一般社団法人エレクトロニクス実装学会 秋季大会 第25回マイクロエレクトロニクスシンポジウム  (大阪) 

    Presentation date: 2015.09

  • High Quality GaN Template Using Nanometer-Size SiO2 mask structure fabricated by UV-NIL

    A. Okada, H. Shinohara, Hiroshi Goto, T. Matsueda, H. Sunakawa, Hiroki Goto, T. Nakagawa, A. Usui, A. Yamaguchi, S. Shoji, J. Mizuno

    The 6th NIMS/MANA-Waseda University International Symposium  (Waseda University, Tokyo, Japan) 

    Presentation date: 2015.07

  • Effects of Surface Modification on Lignocellulosic Porous Carbon Pellets by Vacuum Ultraviolet Treatment

    H. Kuwae, T. Kasahara, T. Funabashi, M. Kitajima, K. Mizokami, S. Shoji, J. Mizuno

    The 7th International Conference on Green and Sustainable Chemistry (GSC-7) and 4th JACI/GSC Symposium  (Tokyo, Japan) 

    Presentation date: 2015.07

  • High Efficient Synthesis of Manganese(II), Cobalt(II) Complexes Containing Lysozyme Using Reaction Area Separated Micro Fluidic Device

    D. Tanaka, Y. Murakoshi, E. Tsuda, Y. Mitsumoto, D.H. Yoon, T. Sekiguchi, T. Akitsu, S. Shoji

    The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)  (Anchorage, Alaska, USA) 

    Presentation date: 2015.06

  • Microfluidic White Organic Light-Emitting Diode Based on Striped Fine Microchannels for Greenish Blue and Yellow Liquid Emitters

    N. Kobayashi, T. Kasahara, T. Edura, J. Oshima, R. Ishimatsu, M. Tsuwaki, T. Imato, S. Shoji, J. Mizuno

    The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)  (Anchorage, Alaska, USA) 

    Presentation date: 2015.06

  • Vacuum Ultraviolet (VUV) and Vapor – Combined Surface Modification for Hybrid Bonding of SiC, GaN, and Si Substrates at Low Temperature and Atmospheric Pressure

    A. Shigetou, J. Mizuno, S. Shoji

    IEEE Electronic Components and Technology Confirence (ECTC 2015)  (San Diego, CA, USA) 

    Presentation date: 2015.05

  • Hybrid Bonding of Cu/Sn Microbump and Adhesive with Silica Filter for 3D Interconnection of Single Micron Pitch

    M. Ohyama, M. Nimura, J. Mizuno, S. Shoji, M. Tamura, T. Enomoto, A. Shigetou

    IEEE Electronic Components and Technology Confirence (ECTC 2015)  (San Diego, CA, USA) 

    Presentation date: 2015.05

  • In Situ Monitoring Chemical Reaction in Microdroplet

    T. Fukuda, T. Kurabayashi, H. Udaka, D.H. Yoon, M. Suzuki, A. Nakahara, T. Sekiguchi, S. Shoji

    EMN (Energy Materials Nanotechnology) Meeting on Droplets  (Phuket, Thailand) 

    Presentation date: 2015.05

  • Improvement of Surface Properties on Microfluidic Devices by Diamond-Like Carbone Coatings

    Y. Murayama, K. Shiba, Y. Ohgoe, J. Mizuno, S. Shoji, K. Ozeki, K. Sato, A. Alanazi, K. Hirakuri

    2015 International Conference on Electronics Packaging &amp; iMAPS All Asia Conference (ICEP-IAAC2015)  (Kyoto, Japan) 

    Presentation date: 2015.04

  • Vacuum Ultraviolet (VUV) and Vapor-Combined Surface Modification for Hybrid Bonding at Low Temperature and Atmospheric Pressure

    A. Shigetou, J. Mizuno, S. Shoji

    2015 International Conference on Electronics Packaging &amp; iMAPS All Asia Conference (ICEP-IAAC2015)  (Kyoto, Japan) 

    Presentation date: 2015.04

  • Fabrication of a Hermetic Sealing Device Using Low Temperature Intrinsic-Silicon/Glass Bonding

    K. Nomura, J. Mizuno, A. Okada, S. Shoji, T. Ogashiwa

    2015 International Conference on Electronics Packaging &amp; iMAPS All Asia Conference (ICEP-IAAC2015)  (Kyoto, Japan) 

    Presentation date: 2015.04

  • Improved Low Temperature Gold-Gold Bonding Using Nanoporous Powder Bump Using Vacuum Ultraviolet Irradiation Pre-Treatment

    T. Kaneda, J. Mizuno, A. Okada, K. Matsunaga, S. Shoji, M. Saito, H. Nishikawa

    2015 International Conference on Electronics Packaging &amp; iMAPS All Asia Conference (ICEP-IAAC2015)  (Kyoto, Japan) 

    Presentation date: 2015.04

  • マイクロ?体デバイスを用いたキラルサレン型Mn(II), Co(II)錯体含有リゾチームの高効?合成

    日本化学会第95春季年会 

    Presentation date: 2015.03

  • 3次元実装に向けたナノポーラス粉末バンプと真空紫外光を利用した低温金—金接合技術

    第29回エレクトロニクス実装学会春季講演大会 

    Presentation date: 2015.03

  • 低温での真性シリコンーガラス接合を用いた気密封止デバイスの作製

    第29回エレクトロニクス実装学会春季講演大会 

    Presentation date: 2015.03

  • SiCならびにGaNの低温大気圧接合

    第29回エレクトロニクス実装学会春季講演大会 

    Presentation date: 2015.03

  • 微小液滴中の量子ドット一色素結合体の高速合成及び反応速度の定量化

    第62回応用物理学会春季学術講演会 

    Presentation date: 2015.03

  • MEMS3次元加工技術による化学・生化学応用機能デバイス

    第5回6大学6研究所連研プロジェクト公開討論会 

    Presentation date: 2015.03

  • 低温Au-Au接合技術を用いた有機ELパネル作製プロセスの開発

    第21回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(MATE 2015) 

    Presentation date: 2015.02

  • Highly Controllable Three-Dimensional Sheath Flow Device for Fabrication of Artificial Capillary Vessels

    The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015) 

    Presentation date: 2015.01

  • One Core-Five Sheaths Coaxial Flow Formation Using Multilayer Stacked Flow Focusing Structure

    The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015) 

    Presentation date: 2015.01

  • マイクロフルイディック エンジニアリング

    東北大学ベンチャービジネス・ラボラトリー発足20年記念シンポジウム 

    Presentation date: 2014.12

  • Wide Range Dynamic Volume Ratio and Size Control of Microdroplets Using Active Droplet Division Device

    Waseda University &amp; Singapore Polytechnic Joint Symposium 2014 on “Advanced Materials 

    Presentation date: 2014.12

  • Active Sequential Merging of Two Reagents Isolated in Micro Droplets in Multiple Ratios

    Waseda University &amp; Singapore Polytechnic Joint Symposium 2014 on “Advanced Materials 

    Presentation date: 2014.12

  • Droplets Handling in Micrometer Scale Channels for Bio/Chemical Applications

    Waseda University &amp; Singapore Polytechnic Joint Symposium 2014 on “Advanced Materials 

    Presentation date: 2014.12

  • 3D Chip Interconnection by Hybrid Bonding Technology with Lock-and-Key Structure for Integrated Sensor Systems

    Presentation date: 2014.12

  • Low Temperature Gold-Gold Bonding Using Excimer Irradition Treatment or Integrated Sensor Systems

    Presentation date: 2014.12

  • Quantitative Analysis of Chemical Reaction in Microdroplets with Different Sizes Containing CdSe/ZnS Quantum Dot and Organic Dye

    The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-5) Conjunction with 6th IBB Frontier Symposium 

    Presentation date: 2014.12

  • Basic Research of Vibration Energy Harvesting Micro Device Using Vinylidene Fluoride/Trifuluoroethylene Copolymer Thin Film

    The 14th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2014) 

    Presentation date: 2014.11

  • Energy Harvesting MEMS Device Using Vinylidene Fluoride/Trifluoroethylene Copolymer

    The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-5) Conjunction with 6th IBB Frontier Symposium 

    Presentation date: 2014.11

  • Microfluidic Handling of Small Samples Using Miniaturized Devices and Systems

    The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-5) Conjunction with 6th IBB Frontier Symposium 

    Presentation date: 2014.11

  • Optimization of Micro Power Generation Device by the Computer Simulation Analysis

    The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-5) Conjunction with 6th IBB Frontier Symposium 

    Presentation date: 2014.11

  • Low Temperature Bump Bonding Realized by Single-Micrometer Ag-Nanoparticle Bumps

    The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-5) Conjunction with 6th IBB Frontier Symposium 

    Presentation date: 2014.11

  • Low Temperature Gold-Gold Bonding Using Nanoporous Powders for Bump Interconnects

    The 5th International Symposium on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-5) Conjunction with 6th IBB Frontier Symposium 

    Presentation date: 2014.11

  • Microdroplet Based Fluidic Devices and Systems for Bio/Chemical Analysis

    10th International Symposium on Electrochemical Micro &amp; Nanosystem Technologies (EMNT 2014) 

    Presentation date: 2014.11

  • Droplet-Based Microfluidics for High-Throughput Screening of a Metagenomic Library

    10th International Symposium on Electrochemical Micro &amp; Nanosystem Technologies (EMNT 2014) 

    Presentation date: 2014.11

  • Digital/Analog Micro Fluidic Devices and Systems for Bio/Chenical Applications - Symmetry between Integrated Circuits and Micro Fluidic Systems -

    IEEE CPMT Symposium Japan 2014 

    Presentation date: 2014.11

  • Fast and Simultaneous Analysis of Phenylalanine and Tyrosine in Plasma Using Pillar Array Columns with a Gradient Elution System

    The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014) 

    Presentation date: 2014.10

  • High-Throughput Single-Cell Secretion Measurement on an Optical Waveguide Chip

    The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014) 

    Presentation date: 2014.10

  • Peptide-Based Ligand Screening System for G. Protein-Coupled Receptors Using Water-In-Oil Microdroplets

    The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014) 

    Presentation date: 2014.10

  • Sensitive Fluorescence-Activated Sorting of Microdroplets Containing Subcellular Structures by Thermoreversible Gelation Polymer

    The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014) 

    Presentation date: 2014.10

  • UV-NIL Applied Fabrication of High Quality 2-Inch Gan Template Using Nanometer-Size SiO2 Lattice Mask Structure

    13th International Conference on Nanoimprint and Nanoprint Technology (NNT 2014) 

    Presentation date: 2014.10

  • 液体有機発光材料有機ECL溶液を励起光源として用いたポータブル蛍光検出デバイスの試作

    第31回「センサ・マイクロマシンと応用システム」シンポジウム 

    Presentation date: 2014.10

  • 電極付マイクロ流体デバイスの作製と電界発光評価

    第31回「センサ・マイクロマシンと応用システム」シンポジウム 

    Presentation date: 2014.10

  • FeCo系超磁歪材料を用いた小型発電デバイスの検討

    第31回「センサ・マイクロマシンと応用システム」シンポジウム 

    Presentation date: 2014.10

  • UVナノインプリントと異方性ウェットエッチングの組み合わせによるナノスケール極微細構造の作製

    第31回「センサ・マイクロマシンと応用システム」シンポジウム 

    Presentation date: 2014.10

  • Volume Controllable Sequential Generation of Three Different Reagents Incubated in Micro Droplets for Digital Flow Synthesis

    2nd International Conference on Microfluidic Handling Systems (MFHS 2014) 

    Presentation date: 2014.10

  • Porous Pillar Array Formation Using Isotropic Xenon Difluoride Etching for Liquid Chromatography Microchip

    2nd International Conference on Microfluidic Handling Systems (MFHS 2014) 

    Presentation date: 2014.10

  • マイクロ流体有機発光素子の作製と評価

    第24回マイクロエレクトロニクスシンポジウム(MES 2014) 

    Presentation date: 2014.09

  • High Throughput Micro/Nano Systems for Chemical and Biochemical Applications

    The 18th Nano Engineering and Microsystem Technology Conference (NMC 2014) 

    Presentation date: 2014.08

  • In Channel Microdroplet Handling Devices for Precise Bio/Chemical Analysis and Synthesis

    The 6th International Symposium on Microchemistry and Microsystems (ISMM 2014) 

    Presentation date: 2014.07

  • High Yield Micro Fluidic Synthesis of Metal Complex Containing Proteins

    The 6th International Symposium on Microchemistry and Microsystems (ISMM 2014) 

    Presentation date: 2014.07

  • ハード&ソフトMEMSの加工技術とその応用

    文部科学省 先進環境材料・デバイス創製スクール(GRENE)主催「MEMS・ナノテクの基礎と応用講座」 

    Presentation date: 2014.07

  • Low Temperature and Low Pressure Bump Bonding Realized by Single-Micrometer Ag-Nanoparticle Bumps

    2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2014) 

    Presentation date: 2014.07

  • Fine-Pitch Interconnection by Hybrid Cu/Sn-Adhesive Bonding for 3D Integration

    2014 4th IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2014) 

    Presentation date: 2014.07

  • Fabrication of Superhydrophilic Silica Nanostructure Using Simple Photolithography and Dry Etching for Self-Cleaning Glass

    The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014) 

    Presentation date: 2014.06

  • Vapor-Assisted Bonding Method as a Tool for Materials Hybridization in Future 3D Integration

    International Union of Materials Research Societies-International Conference on Electronic Materials 2014 (IUMRS-ICEM 2014) 

    Presentation date: 2014.06

  • Low-Temperature Bonding Using Selective Formation of Nanoporous Powders for Bump Interconnects

    International Union of Materials Research Societies-International Conference on Electronic Materials 2014 (IUMRS-ICEM 2014) 

    Presentation date: 2014.06

  • Real-Time Monitoring of Chemical Reaction in Microdroplet with Quantum Dot and Dye Using Fluorescence Spectroscopy

    The 8th International Symposium on Organic Molecular Electronics (ISOME 2014) 

    Presentation date: 2014.05

  • MEMS技術動向:世界のMEMS関連学会の発表からビジネス注目分野を推測

    TIA N-MEMSシンポジウム / MEMS協議会フォーラム(ナノ・マイクロ ビジネス展) 

    Presentation date: 2014.04

  • Fine-Pitch Hybrid Bonding with Cu/Sn Microbumps and Adhesive for High Density 3D Integration

    2014 International Conference on Electronics Packaging (ICEP 2014) 

    Presentation date: 2014.04

  • Room-Temperature Direct Bonding of Graphene Films by Means of Vacuum Ultraviolet (VUV)/Vapor-Assisted Method

    2014 International Conference on Electronics Packaging (ICEP 2014) 

    Presentation date: 2014.04

  • Hemocompatibility of DLC Coating for Blood Analysis Devices

    2014 International Conference on Electronics Packaging (ICEP 2014) 

    Presentation date: 2014.04

  • Flexible and Capacitive Tactile Sensor Sheet

    2014 International Conference on Electronics Packaging (ICEP 2014) 

    Presentation date: 2014.04

  • マイクロ流体デバイスを用いた金属錯体含有蛋白質の合成

    日本化学会第94春季年会(2014) 

    Presentation date: 2014.03

  • HIVの初期感染過程の解析のためのドロップレットデジタルPCR法の確立

    日本化学会第94春季年会(2014) 

    Presentation date: 2014.03

  • Graphene-Graphene Monolayer Direct Bonding Using Vacuum Ultraviolet (VUV) Vapor-Assisted Method in Ambient Air

    The 5th NIMS/MANA-Waseda University International Symposium 

    Presentation date: 2014.03

  • Novel Bump Bonding Method Using Ag Nanoparticle Coated Cu Bump Through Squeegee-Coating

    The 5th NIMS/MANA-Waseda University International Symposium 

    Presentation date: 2014.03

  • マイクロフルイディックエンジニアリングの進展とその応用

    先端計測2014 

    Presentation date: 2014.03

  • マイクロフルイディクエンジニアリングの進展とその化学・バイオ計測への応用展開

    早稲田大学ナノテクノロジーフォーラム主催シンポジウム「ナノテクノロジーとその応用技術 —環境・生命医科学分野への最新応用事例とイノベーション展開—」 

    Presentation date: 2014.03

  • Low-Temperature Gold-Gold Bonding Using Selective Formation of Nanoporous Powders for Bump Interconnects

    The 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014), 

    Presentation date: 2014.01

  • Multiple Size-Oriented Passive Droplet Sorting Device and Basic Approach for Digital Chemical Synthesis

    The 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014), 

    Presentation date: 2014.01

  • Microfluidic Electrochemiluminescence (ECL) Integrated Flow Cell for Portable Fluorescence Detection

    The 27th International Conference on Micro Electro Mechanical Systems (MEMS 2014), 

    Presentation date: 2014.01

  • 三次元可変シースフローを実現したマイクロ流体デバイスで作製した生体適合性ゲルファイバー内での細胞培養と組織工学応用

    インテリジェント材料・システムシンポジウム 

    Presentation date: 2014.01

  • マイクロドロップレットを利用した難培養微生物からの遺伝子獲得

    インテリジェント材料・システムシンポジウム 

    Presentation date: 2014.01

  • MEMS/ナノテクノロジーの融合と化学・バイオへの応用

    早稲田大学・関西大学 第4回理工学研究交流セミナー 

    Presentation date: 2013.12

  • Graphene-Graphene Room Temperature Direct Bonding by Using Vacuum Ultraviolet (VUV) Vapor-Assisted at Atmospheric Pressure

    WaferBond’13 

    Presentation date: 2013.12

  • 三次元可変シースフローマイクロ流体デバイスを用いた細胞包埋培養ゲルファイバーの作製と組織工学への応用

    第35回日本バイオマテリアル学会大会 

    Presentation date: 2013.11

  • マイクロ/ナノフルィディクスの分析機器への応用

    早大ナノテクノロジーフォーラム主催講演会 

    Presentation date: 2013.11

  • Novel Bonding Method Using Cu Bumps Coated with Flexible Ag

    IEEE CPMT Symposium Japan 2013 

    Presentation date: 2013.11

  • Fine Nanoscale Structure Fabrication Using Combination of UV-Nanoimprint Lithography and Anisotropic Wet Etching Toward Single Nanoscale Interconnects

    26th International Microprocess and Nanotechnology Conference (MNC 2013) 

    Presentation date: 2013.11

  • High Quality GaN Template of a 2-Inch Wafer Using Nanometer-Size SiO2 Lattice Mask Structure Fabricated by UV Nanoimprint Lithography

    26th International Microprocess and Nanotechnology Conference (MNC 2013) 

    Presentation date: 2013.11

  • マイクロ流路を用いた微小液滴生成デバイスにおける出力負荷の影響

    電気学会センサ・マイクロマシン部門大会 第30回「センサ・マイクロマシンと応用システム」シンポジウム 

    Presentation date: 2013.11

  • Controllable Three-Dimensional Sheath Flow Microfluidic Device Focusing and Embedding Cells in Center of Double Layered Hydrogel Fiber for Tissue Engineering Applications

    International Conference on BioSensors, BioElectronics, BioMedical Devices, BioMEMS/NEMS and Applications 2013 &amp; 5th Sensing Biology Symposium (Bio4Apps 2013) 

    Presentation date: 2013.10

  • Active Sequential Merging of Two Reagents Isolated in Micro Droplets in Multiple Ratios

    The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2013) 

    Presentation date: 2013.10

  • Real-Time Secretion Analysis Revealed Correlation of IL-β Release and Loss of Cell Membrane Integrity

    The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2013) 

    Presentation date: 2013.10

  • Quantitative Determination of Branched-Chain Amino Acids in Human Plasma Using Pressure-Driven Liquid Chromatography with Pillar Array Columns

    The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2013) 

    Presentation date: 2013.10

  • Wide Range Dynamic Volume Ratio and Size Control of Microdroplets Using Active Droplet Division Device

    The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2013) 

    Presentation date: 2013.10

  • Room Temperature Uniform and High Throughput Agarose Gel Micro Droplet Generation for Single Cell Analysis

    The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2013) 

    Presentation date: 2013.10

  • One-Minute Separation of Biological Compounds Using Pillar Array Column with Low Dispersion and Low Pressure-Drop Turns

    The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2013) 

    Presentation date: 2013.10

  • 三次元可変シースフローによる生体高分子ゲルファイバーの作製と包埋培養細胞の組織工学への応用

    CSJ化学フェスタ2013 

    Presentation date: 2013.10

  • MEMS/NEMSデバイスの最新動向

    Electronic Journal 第1919回 Technical Seminar 

    Presentation date: 2013.10

  • マイクロ・ナノ流体デバイスと化学・生化学への応用

    東京理科大学大学院化学特別講義 

    Presentation date: 2013.10

  • 使える材料、使える技術—トップダウン加工とボトムアップ加工の特徴・概要

    文部科学省 先進環境材料・デバイス創製スクール(GRENE)主催「微細加工の基礎コース講座」 

    Presentation date: 2013.09

  • Controllable Three-Dimensional Sheath Flow Microfluidic Device Focusing Cells in Central Axis of the Hydrogel Fiber for Tissue Engineering Applications

    Tsukuba International Conference on Materials Science -Summer School (TICMS-BIO) 

    Presentation date: 2013.08

  • Active Droplet Handling Microfluidic Devices for Chemical and Biochemical Applications

    International Workshop on Soft and Flexible Micro/Nano System Technology (SF-MINAS 2013) 

    Presentation date: 2013.07

  • MEMS技術動向:MEMS関連学会より最新技術動向を見る

    TIA N-MEMSシンポジウム / MEMS協議会フォーラム(ナノ・マイクロ ビジネス展) 

    Presentation date: 2013.07

  • マイクロ/ナノフルィディクスの分析機器への応用

    早大ナノテクノロジーフォーラム主催講演会 

    Presentation date: 2013.06

  • Fabrication of Low Dislocation Density GaN Template by Nano-Channel FIELO Using Nanoimprint Lithography

    The 30th International Conference of Photopolymer Science and Technology (ICPST-30) 

    Presentation date: 2013.06

  • Live Imaging of Cell Apoptosis Using FRET-Based Bioprobes in MEMS Fabricated Microculture Dish

    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 2013) 

    Presentation date: 2013.06

  • Variable Multi-Color Microfluidic Organic Light Emitting Device Based on Mixing of Electrochemiluminescence Solutions

    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 2013) 

    Presentation date: 2013.06

  • Number Controllable Active Microdroplet Merging with Wide Range of Volume for Digital Chemical Synthesis

    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’ 2013) 

    Presentation date: 2013.06

  • Au-Au Bonding Technology Using Planar Adhesive Structure for 3D Integration

    IEEE Electronic Components and Technology Conference (ECTC 2013) 

    Presentation date: 2013.05

  • VUV/O3 Treatment for Reduction of Au-Au Bonding Temperature

    International Conference on Electronics Packaging 2013 (ICEP 2013) 

    Presentation date: 2013.04

  • SU-8 Microfluidic Chip Integrated with Indium Tin Oxide (ITO) Electrodes for Organic Light Emitting Device Applications

    International Conference on Electronics Packaging 2013 (ICEP 2013) 

    Presentation date: 2013.04

  • Active Size Controlled Droplet Generation Device Using Horizontal Pneumatic Microvalves

    The 7th International Conference on Microtechnologies in Medicine and Biology (MMB 2013) 

    Presentation date: 2013.04

  • Functional SU-8-PET Composite Microchip Including Au Microdot Array Fabricated by Low Temperature Polymer Bonding

    The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2013) 

    Presentation date: 2013.04

  • PDMS-CYTOP Hybrid Structure Microwell Array Chip for Total Internal Reflection Fluorescent Microscopy

    The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE NEMS 2013) 

    Presentation date: 2013.04

  • 細胞の形態と生育領域を制御する培養系の開発と細胞内イベントの可視化

    日本薬学会第133年会 

    Presentation date: 2013.03

  • マイクロ流体システムを用いた局所的損傷刺激によるアポトーシス解析

    第86回日本薬理学会年会 

    Presentation date: 2013.03

  • Fabrication of Microfluidic Organic Light Emitting Device

    4th NIMS (MANA)-Waseda International Symposium 

    Presentation date: 2013.03

  • Controllable Active Micro Droplets Merging Device Using Horizontal Pneumatic Valves

    4th NIMS (MANA)-Waseda International Symposium 

    Presentation date: 2013.03

  • Real Time Secretion Analysis of Single Cell Using Amorhous Fluoropolymer Microwell Array

    4th NIMS (MANA)-Waseda International Symposium 

    Presentation date: 2013.03

  • サブミクロン金粒子を用いたMEMSパッケージング用低温接合技術の開発

    第19回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム 

    Presentation date: 2013.01

  • 三次元LSIのためのAuバンプと接着剤のハイブリッド接合技術

    第19回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム 

    Presentation date: 2013.01

  • Simple and High-Throughput Fabrication of Large-Area and Multilayer Flexible Polymer Film Structures for Microfluidic Organic Light Emitting Diode

    The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013) 

    Presentation date: 2013.01

  • MEMS LC Microchip with Low Dispersion and Low Pressure Drop Turn Structure Using Distribution Controlled Micro Pillar Array

    The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013) 

    Presentation date: 2013.01

  • Multi-Color Microfluidic Organic Light Emitting Device Using Electroluminescence and Electrochemiluminescence

    The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013) 

    Presentation date: 2013.01

  • Simple Through Silicon Interconnect via Fabrication Using Dry Filling of Sub-Micron Au Particles for 3D MEMS

    The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013) 

    Presentation date: 2013.01

  • Using Nano-Porous Au-Ag Sheets as a Joint Layer for Low-Temperature Au-Au Bonding

    IEEE CPMT (Components, Packaging, and Manufacturing Technology) Symposium Japan 2012 

    Presentation date: 2012.12

  • Low Temperature Bonding Using Sub-Micron Au Particles for Wafer-Level MEMS Packaging

    IEEE CPMT (Components, Packaging, and Manufacturing Technology) Symposium Japan 2012 

    Presentation date: 2012.12

  • Fabrication and Basic Investigation of Flat Lignocellulosic Carbon Material for Self-Supporting Electrodes in Electric Double-Layer Capacitors

    2012 MRS (Materials Research Society) Fall Meeting 

    Presentation date: 2012.11

  • 集積化マイクロセンサ、センサシステム −3次元加工技術の観点から−

    第1回ICE Cube Center(東京工業大学異種機能集積研究センター)研究会 

    Presentation date: 2012.11

  • ナノテクことはじめ − 微細加工の基礎 −

    (財)神奈川科学技術アカデミー主催「ナノ・マイクロ入門講座」 

    Presentation date: 2012.11

  • Simple Assembly Method of Polymeric Micro Lens in Micro Fluidic Channel Using Buoyancy of Droplets

    The 3rd Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-3) 

    Presentation date: 2012.11

  • Low Dispersion and Low Pressure Drop Turn Structure Using Distribution Controlled Micro Pillar Array

    The 3rd Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-3) 

    Presentation date: 2012.11

  • Study of Surface Treatment Process Using VUV/O3 Treatment for Au-Au Flip Chip Bonding

    The 3rd Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-3) 

    Presentation date: 2012.11

  • Study of Hybrid Solder-Adhesive Bonding Using Resin Planarization Technique for 3DIC

    The 3rd Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (AMDI-3) 

    Presentation date: 2012.11

  • High Throughput Size-Oriented Passive Droplet Sorting Device Using Surface Free Energy with Sinple Parallel Guide Grooves

    25th International Microprocesses and Nanotechnology Conference (MNC 2012) 

    Presentation date: 2012.11

  • Large Area Flatness Measurement and Optimization for Step and Repeat UV Nanoimprinting

    25th International Microprocesses and Nanotechnology Conference (MNC 2012) 

    Presentation date: 2012.11

  • Yeast-Based Ligand Assay System for Detecting G Protein-Coupled Receptor Activation in Water-In-Oil Droplets

    The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2012) 

    Presentation date: 2012.10

  • Measurement of Inflammatory Cytokine Secretion from Human Monocytes after Inflammasome Activation

    The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2012) 

    Presentation date: 2012.10

  • Uniform and High Throughput Agarose Gel Micro Droplet Generation Device for Single Cell Analysis

    The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2012) 

    Presentation date: 2012.10

  • Fast Analysis of Biological Compounds by Gradient Liquid Chromatography Using Pillar Array Column

    The 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2012) 

    Presentation date: 2012.10

  • Fabrication of High Quality GaN Template by Nano-Channel FIELO Using UV Nanoimprint Lithography for High Efficiency LED

    The 11th International Conference on Nanoimprint &amp; Nanoprint Technology (NNT 2012) 

    Presentation date: 2012.10

  • Anti-Reflection Structures Fabricated by Angled Two Step UV Nanoimprint Lithography Using Line and Space

    The 11th International Conference on Nanoimprint &amp; Nanoprint Technology (NNT 2012) 

    Presentation date: 2012.10

  • XeF2 Si鋳型作製に関する研究

    電気学会センサ・マイクロマシン部門大会 第29回「センサ・マイクロマシンと応用システム」シンポジウム 

    Presentation date: 2012.10

  • GaN Lateral Overgrowth by HVPE through Nanometer-Size Channels Fabricated with Nanoimprint Lithography

    International Workshop on Nitride Semiconductors 2012 (IWN 2012) 

    Presentation date: 2012.10

  • Controllable Active Micro Droplets Merging Device Using Horizontal Pneumatic Valves

    1st International Conference on Microfluidic Handling Systems (MFHS 2012) 

    Presentation date: 2012.10

  • Active and Precise Control of Microdroplet Division Using Horizontal Pneumatic Valves in Bifurcating Microchannel

    1st International Conference on Microfluidic Handling Systems (MFHS 2012) 

    Presentation date: 2012.10

  • Structure Controlled Polymeric Microlens Fabrication Using Multiphase Droplet Assembly

    1st International Conference on Microfluidic Handling Systems (MFHS 2012) 

    Presentation date: 2012.10

  • Simplified Microfluidic-Based System to Generate Double Emulsion Micro Droplets for Biomedical Applications

    1st International Conference on Microfluidic Handling Systems (MFHS 2012) 

    Presentation date: 2012.10

  • ポリマー3次元マイクロ/ナノ構造体とその化学・生化学への応用

    日韓マイクロ・ナノテクノロジーセミナー@立命館 

    Presentation date: 2012.09

  • Fabrication of Microfluidic Organic Light Emitting Diodes

    9th International Conference on Electroluminescence &amp; Organic Optoelectronics (ICEL 2012) 

    Presentation date: 2012.09

  • 電気二重層キャパシタ用自己支持性電極のための木質系炭素材料の作製と基礎的評価

    (社)日本材料学会2012年度JCOM若手シンポジウム 

    Presentation date: 2012.09

  • MEMS技術動向:MEMS関連学会より最新技術動向を見る

    第23回マイクロマシン/MEMS展 

    Presentation date: 2012.07

  • A Study on Simple Assembly Method of Polymeric Microlens Using Buoyancy of Droplets

    The 4th International Symposium on Microchemistry and Microsystems (ISMM 2012) 

    Presentation date: 2012.06

  • Low Dispersion and Low Pressure Drop Turn Structure Using Distribution Controlled Micro Pillar Array for Efficient LC Microchip

    The 4th International Symposium on Microchemistry and Microsystems (ISMM 2012) 

    Presentation date: 2012.06

  • Hybrid Au-Underfill Resin Bonding with Lock-and-Key Structure

    62nd Electronic Components and Technology Conference (ECTC 2012) 

    Presentation date: 2012.05

  • Low Temperature Au-Au Flip Chip Bonding with VUV/O3 Treatment for 3D Integration

    3rd International IEEE Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012) 

    Presentation date: 2012.05

  • Hybrid Solder-Adhesive Bonding Using Simple Resin Planarization Technique for 3D LSI

    3rd International IEEE Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012) 

    Presentation date: 2012.05

  • Surface Modification of Poly(ethylene terephthalate)(PET) by VUV and VUV/O3 Treatments for Flexible Capacitive Tactile Sensors

    Joint Conference of “International Conference on Electronics Packaging and IMAPS All Asia Conference (ICEP-IAAC 2012) 

    Presentation date: 2012.04

  • Development of Roll Press UV Imprint Process for Replication of Micro Lens Arrays on the Large and Thin Quartz Substrate

    The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012) 

    Presentation date: 2012.03

  • Precisely Controlled Micro Droplet Merging Device Using Horizontal Pneumatic Valves

    The 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012) 

    Presentation date: 2012.03

  • Microfluidic Organic Light Emitting Diode (OLED) Using Liquid Organic Semiconductors

    The 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012) 

    Presentation date: 2012.02

  • Low Temperature Au-Au Bonding wih VuV/O3 Treatment

    IEEE International 3D System Integration Conference (3DIC) 

    Presentation date: 2012.02

  • SnCu-Auフリップチップの接合における界面への真空紫外光およびギ酸を用いたフラックスレス接合技術の基礎検討

    第18回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム(Mate 2012) 

    Presentation date: 2012.02

  • 高スループット生体分子計測を目的とした光応用ナノ・マイクロ流体システム

    レーザー学会学術講演会第32回年次大会 

    Presentation date: 2012.01

  • Continuous Size-Selective Separation Using Three Dimensional Flow Realized by Multilayer PDMS Structure

    The 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012) 

    Presentation date: 2012.01

  • Size-Oriented Passive Droplet Sorting by Using Surface Free Energy with Micro Guide Groove

    The 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012) 

    Presentation date: 2012.01

  • Large Area Nanoimprinting with UV Nanoimprint under Atmospheric Pressure for Silicon and Polymer Substrate

    The 3rd NIMS(MANA)-Waseda International Symposium 

    Presentation date: 2011.11

  • Evaluations of Low Temperature Bonding Using Au Sub-Micron Particles for Wafer Level MEMS Packaging

    2011 International Symposium on Advanced Packaging Materials (APM 2011) 

    Presentation date: 2011.10

  • Evaluations of Low Temperature Bonding Using Au Sub-Micron Particles for Wafer Level MEMS Packaging

    2011 International Symposium on Advanced Packaging Materials (APM 2011) 

    Presentation date: 2011.10

  • Investigations of Fluxless Flip-Chip Bonding Using Vacuum Ultraviolet and Formic Acid Vapor Surface Treatment

    2011 International Symposium on Advanced Packaging Materials (APM 2011) 

    Presentation date: 2011.10

  • Investigations of Fluxless Flip-Chip Bonding Using Vacuum Ultraviolet and Formic Acid Vapor Surface Treatment

    2011 International Symposium on Advanced Packaging Materials (APM 2011) 

    Presentation date: 2011.10

  • Stacked Three-Dimensional Micro/Nano Structures and Their Applications for Chemistry and Biochemistry

    The 10th International Conference on Nanoimprint and Nanoprint Technology (NNT 2011) 

    Presentation date: 2011.10

  • Optimized Step and Repeat UV Nanoimprint Process for large Scale Nano Pattern Fabrication

    The 10th International Conference on Nanoimprint and Nanoprint Technology (NNT 2011) 

    Presentation date: 2011.10

  • Microfluidic Analysis of Neurodegenerative Impact Evoked by Local Stimulation-Triggered Apoptotic Information

    The 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2011) 

    Presentation date: 2011.10

  • Microfluidic Active Sorting of DNA Molecules Labeled with Single Quantum Dots Using Flow Switching by a Hydrogel Sol-Gel Transition

    The 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2011) 

    Presentation date: 2011.10

  • Controllable Three-Dimensional Sheath Flow with a Wide Range Reynolds Number and Its Application for Efficient Cell Sorting

    The 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2011) 

    Presentation date: 2011.10

  • Microchannel Array for Long-Term Monitoring of Multicellular Filamentous Cyanobacterium with Controlled Perfusion Culture

    The 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2011) 

    Presentation date: 2011.10

  • Single Cell Analysis of the Proinflammatory Responses of Mast Cell by a Real Time Secretion Assay

    The 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2011) 

    Presentation date: 2011.10

  • Integration of a Gradient Elution System for Pressure-Driven Liquid Chromatography with MEMS Fabricated Efficient Pillar Array Columns

    The 15th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2011) 

    Presentation date: 2011.10

  • 3次元集積化のための要素技術の研究

    社団法人溶接学会、第98回マイクロ接合研究委員会 

    Presentation date: 2011.09

  • ウェーハレベルパターン転写法を用いたサブミクロンAu 粒子低温ウェーハ接合

    第51 回マイクロ接合研究委員会ソルダリング分科会 

    Presentation date: 2011.07

  • MEMS技術動向:MEMS関連学会より最新技術動向を見る

    MEMS協議会フォーラムTIA-NMEMSシンポジウム 

    Presentation date: 2011.07

  • Biochip Applications of DLC Films Deposited on a Resin Material

    International Conference on the Formation of Semiconductor Interfaces (ICFSI-13) 

    Presentation date: 2011.07

  • 液体MEMS

    日立製作所技術研修所主催講座「第9回MEMS設計の基礎」 

    Presentation date: 2011.07

  • 細胞機能解析用マイクロ流体デバイス/システム

    東京大学マイクロ・ナノ多機能デバイス研究ネットワーク 第3回シンポジウム 

    Presentation date: 2011.07

  • Large Area Nanoimprinting with UV Nanoimprint under Atmoshperic Pressure for Silicon and Polymer Substrate

    4th Asian Nanoimprint Lithography Symposium (ASNIL) 

    Presentation date: 2011.06

  • SnCu-Au Flip-Chip Bonding Using Vacuum Ultraviolet and Formic Acid Vapor Surface Treatment

    Joint Conference of 5th International Conference on Science and Technology for Advanced Ceramics (STAC5) and 2nd International Conference on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (ADMI2) 

    Presentation date: 2011.06

  • Three-Dimensional Sample Flow Focusing for Wide-Range Flow Speed Applications

    Joint Conference of 5th International Conference on Science and Technology for Advanced Ceramics (STAC5) and 2nd International Conference on Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials (ADMI2) 

    Presentation date: 2011.06

  • マイクロ流体デバイス・システム研究の始まりと展開

    第23回化学とマイクロ・ナノシステム研究会(23rd CHEMINAS) 

    Presentation date: 2011.06

  • Stand-Alone Microfluidic System Using Partly Disposable PDMS Microwell Array for High Throughput Cell Analysis

    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers 2011 

    Presentation date: 2011.06

  • Single Cell Real Time Secretion Assay Using Amorphous Fluoropolymer Microwell Array

    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers 2011 

    Presentation date: 2011.06

  • Solder/Adhesive Bonding Using Simple Planarization Technique for 3D Integration

    Presentation date: 2011.06

  • Multilayer PDMS (Polydimethylsiloxane) Device Fabrication Using Concave-Convex 3D Alignment Pair Structures

    The International Symposium on Microchemistry and Microsystems: ISMM 2011 

    Presentation date: 2011.06

  • Three-Dimensional Sample Flow Focusing and Positioning for Wide Range Flow Speed Applications

    The International Symposium on Microchemistry and Microsystems: ISMM 2011 

    Presentation date: 2011.06

  • Fluxless Bonding for Fine-Pitch and Low-Volume Solder 3-D Interconnection

    The Electronic Components and Technology Conference: ECTC 2011 

    Presentation date: 2011.06

  • Optimization of Cyclo-Olefin Polymer-Polydimethylsiloxane Direct Bonding Conditions for Biochemical Microchips

    International Conference on Electronics Packaging: ICEP2011 

    Presentation date: 2011.04

  • Surface Modification of Polyimide by 172nm Excimer Lamp Irradiation

    International Conference on Electronics Packaging: ICEP2011 

    Presentation date: 2011.04

  • 化学・バイオ応用ナノ/マイクロ流体デバイス・システム

    MEMS Engineering Forum 2011 

    Presentation date: 2011.03

  • 表面活性化技術を用いたマイクロ流路チップの作製

    表面技術会 第123回講演大会 

    Presentation date: 2011.03

  • アポトーシス誘発刺激に対する単一細胞の応答解析に向けたマイクロ流体システムによる局所薬液投与

    第84回日本薬理学会年会 

    Presentation date: 2011.03

  • 三次元集積化技術のための簡易低コストハイブリッド接合

    第58回応用物理学関係連合講演会 

    Presentation date: 2011.03

  • Relative-Story Displacement Sensor for Measuring Five-Degree-of-Freedom Movement of Building Layers

    Sensors and Smart Structures Technologies for Civil, Mechanical and Aerospace Systems 

    Presentation date: 2011.03

  • Evaluation of UV Roller Imprinting Using Replicated Fluorinated Film Molds

    The 6th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems: IEEE-NEMS 2011 

    Presentation date: 2011.02

  • NEXAFS and XPS Studies of VUV/O3 Treated Aromatic Polyurea for High-Speed Electrophoresis Microchips

    The 6th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems: IEEE-NEMS 2011 

    Presentation date: 2011.02

  • 集積化マイクロ・ナノ流体システムと環境技術への応用展望

    精密工学会 超精密加工専門委員会 第61回研究会 

    Presentation date: 2011.01

  • Volume Controlled High Throughput Picoliter Droplet Generation System Using Cascade Multi-Stage Separation Channel

    The 24th International Conference on Micro Electro Mechanical Systems: MEMS 2011 

    Presentation date: 2011.01

  • Micro/Nanofluidic Devices for Chemical/Biochemical Micro Total Analysis Systems

    The 2nd NIMS(MANA)-Waseda International Symposium 

    Presentation date: 2010.12

  • High Speed Generation of Uniform Femtoliter Volume Droplets Using Cascade Multi-Stage Separation Microfluidic Device

    23rd International Microproccesses and Nanotechnology Conference: MNC2010 

    Presentation date: 2010.11

  • Surface Treatment Using Vacuum Ultraviolet and Formic Acid Vapor for SnCu-Au Flip-Chip Bonding

    23rd International Microproccesses and Nanotechnology Conference: MNC2010 

    Presentation date: 2010.11

  • Partly Disposable Lab-on-a-Chip System Using Electromagnetically-Drive Hydraulic Valves

    23rd International Microproccesses and Nanotechnology Conference: MNC2010 

    Presentation date: 2010.11

  • DNA分析を目的としたナノドットパターンを有するCOPマイクロチップの試作

    第22回化学とマイクロ・ナノシステム研究会(22nd CHEMINAS) 

    Presentation date: 2010.11

  • MEMS/ナノテクノロジーによるマイクロ/ナノ流体システム構築とバイオ・医療への応用

    第60回日本アレルギー学会秋季学術大会 

    Presentation date: 2010.11

  • Ultimate Hydrogel Thermal-Transition Based Flow Control System for User-Friendly Particle and Cell Sorting

    The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2010 

    Presentation date: 2010.10

  • On-Chip Gas Concentration Gradient Formation Using PoreflonTM and NeoflonTM for In Vitro Observation of Cancer Cell

    The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2010 

    Presentation date: 2010.10

  • Selective Droplet Sampling Flow System Using Minimum Number of Horizontal Pneumatic Valves Formed by Single Step PDMS Molding

    The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2010 

    Presentation date: 2010.10

  • Size Controllable Polymeric Microlens Fabrication by Using a Multiphase Droplet Including Air Core

    The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2010 

    Presentation date: 2010.10

  • Fabrication of Vertical and High-Aspect-Ratio Glass Microfluidic Device by Borosilicate Glass Molding to Silicon Structure

    The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2010 

    Presentation date: 2010.10

  • A Microfluidic Mammalian Cell Sorter with Thermal Gelation Polymer Solution

    The 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2010 

    Presentation date: 2010.10

  • Polymer MEMSとその化学・バイオ・医療への応用

    第34回センサ&amp;アクチュエータ技術シンポジウム 

    Presentation date: 2010.09

  • Fabrication of High-Aspect Ratio Amorphous Perfluorinated Polymer Structure for Total Internal Reflection Fluorescence Microscopy

    The 36th International Conference on Micro &amp; Nano Engineering: MNE 2010 

    Presentation date: 2010.09

  • Low-Temperature Wafer Bonding for MEMS Packaging Utilizing Screen Printed Sub-Micron Size Au Particle Patterns

    The 36th International Conference on Micro &amp; Nano Engineering: MNE 2010 

    Presentation date: 2010.09

  • Integrated Hydrophilic Surface Treatment System of Vapor Deposition Polymerization and Vacuum Ultraviolet Irradiation for Biochemical Microchips

    The 36th International Conference on Micro & Nano Engineering: MNE 2010 

    Presentation date: 2010.09

  • MEMS/NT Based Biological Cell Function Analysis Micro Fluidic Devices/Systems

    2010 Taiwan-Japan Bilateral Symposium - Nanotech and Health Care 

    Presentation date: 2010.09

  • 低レイノルズ数領域の流体の性質を利用した化学・バイオ応用マイクロデバイス

    第15回マイクロフロービジュアリゼーション研究会 

    Presentation date: 2010.09

  • Fabrication of High-Aspect-Ratio Amorphous Perfluorinated Polymer Structure for Total Internal Reflection Fluorescence Microscopy

    The 36th International Conference on Micro &amp; Nano Engineering: MNE 2010 

    Presentation date: 2010.09

  • Low-Temperature Wafer Bonding for MEMS Packaging Utilizing Screen Printed Sub-Micron Size Au Particle Patterns

    The 36th International Conference on Micro &amp; Nano Engineering: MNE 2010 

    Presentation date: 2010.09

  • Integrated Hydrophilic Surface Treatment System of Vapor Deposition Polymerization and Vacuum Ultraviolet Irradiation for Biochemical Microchips

    The 36th International Conference on Micro &amp; Nano Engineering: MNE 2010 

    Presentation date: 2010.09

  • 液体MEMS

    日立製作所技術研修所主催講座「第8回MEMS設計の基礎」 

    Presentation date: 2010.07

  • 新規流体制御法による生体分子分離システムの開発

    第21回化学とマイクロ・ナノシステム研究会(21st CHEMINAS) 

    Presentation date: 2010.06

  • 温度感受性ポリマーを使った蛍光性ナノ粒子の検出分離システムの開発

    第21回化学とマイクロ・ナノシステム研究会(21st CHEMINAS) 

    Presentation date: 2010.06

  • 空間パターン形成解析のための糸状性シアノバクテリア用一細胞刺激デバイスの検討

    第21回化学とマイクロ・ナノシステム研究会(21st CHEMINAS) 

    Presentation date: 2010.06

  • Simple and Low Cost Fabrication of High-Sensitive Capacitance Sensors

    International Conference on Electronics Packaging: ICEP2010 

    Presentation date: 2010.05

  • Studies on Direct Bonding of PDMS with Plastic Materials Using Pretreatment of Atmospheric-Pressure Oxygen Plasma

    International Conference on Electronics Packaging: ICEP2010 

    Presentation date: 2010.05

  • Precise Structure Controlled Plastic Hot Embossing Method for Low-Temperature Direct Bonding

    The 36th International Conference on Micro &amp; Nano Engineering: MNE 2010 

    Presentation date: 2010.05

  • Fluxless Bonding Using Vacuum Ultraviolet and Formic Acid for 3D Interconnects

    2010 MRS Spring Meeting 

    Presentation date: 2010.04

  • Fine 3-Dimensional Micro/Nanofabrications and Their Future Applications

    International Symposium on Nano-Micro Multi-Functional Devices 

    Presentation date: 2010.03

  • ポストキュアを用いたレプリカモールドの理型性の向上

    第57回応用物理学関係連合講演会 

    Presentation date: 2010.03

  • Vacuum Ultraviolet Treatment for Cu/Sn Micro-bumps

    2nd International IEEE Workshop on Low Temperature Bonding for 3D Integration 

    Presentation date: 2010.01

  • Multi Channel Droplet Sorting Device with Horizontal Pneumatic Actuation Using Single Layer PDMS Flexible Parallel Walls

    The 23rd IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2010 

    Presentation date: 2010.01

  • MEMS Fabricated Liquid Chromatography Microchip for Practical Uses

    The 23rd IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2010 

    Presentation date: 2010.01

  • Multi Uniform Picoliter Volume Droplets Generation and Sorting Device for Digital Picoliter Dispenser

    The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences:μTAS 2009 

    Presentation date: 2009.11

  • Generation of Polystyrene Microcapsules as Nanoliter Volume Gas Encapsulants by Using Gas-Organic-Water Multiphase Junction

    The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences:μTAS 2009 

    Presentation date: 2009.11

  • Precise Volume Controlled Multi Reagents Injective Microwell Array for Efficient Cell Function Analysis

    The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences:μTAS 2009 

    Presentation date: 2009.11

  • Microvalve Integrated All Neoflon Accurate Sample Injecter Fabricated by Low Temperature Embossing and Bonding

    The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences:μTAS 2009 

    Presentation date: 2009.11

  • High Performance Multiple E. Coli Cell Sorting System Using Thermosensitive Hydrogel and Fluorescence Spectrum Detection

    The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences:μTAS 2009 

    Presentation date: 2009.11

  • Filtration of a Fluid from Mixed Microparticles by Using Self-Tuning of Flow Resistance Microfilter

    Ninth International Symposium on Microchemistry and Microsystems: ISMM 2009 

    Presentation date: 2009.11

  • NEXAFS Studies on VUV and Oxygen Plasma Pretreated PMMA Surfaces for Investigation of Low-Temperature Bonding Mechanisms

    2009 International Microprocesses and Nanotechnology Conference: MNC 2009 

    Presentation date: 2009.11

  • Vacuum Ultraviolet (VUV) Treatment for Au-Au Flip-Chip Bonding

    2009 International Microprocesses and Nanotechnology Conference: MNC 2009 

    Presentation date: 2009.11

  • Simple and Low Cost Fabrication of Capacitance Sensors

    2009 International Microprocesses and Nanotechnology Conference: MNC 2009 

    Presentation date: 2009.11

  • マイクロ・ナノ加工技術

    基盤技術支援セミナー「ナノ・マイクロファブリケーションとその未来」 

    Presentation date: 2009.11

  • MEMS Based Cell Function Analysis Micro Fluidic Devices and Systems

    The 3rd IEEE International Conference on Nano / Molecular Medicine and Engineering: IEEE-NANOMED 2009 

    Presentation date: 2009.10

  • Fabrication of a Grafting Composite Semiconductor Using UV Nanoimprint Lithography

    26th International Conference of Photopolymer Science and Technology: ICPST-26 

    Presentation date: 2009.07

  • MEMS・ナノテクノロジーのバイオ・医療への応用

    平成21年度第1回ちばバイオテクノロジーセミナー 

    Presentation date: 2009.07

  • MEMS技術による3次元ポリマーマイクロ構造

    日独マイクロナノ・ビジネスフォーラム 

    Presentation date: 2009.07

  • 国際会議に見るMEMS技術の動向と将来展望

    マイクロナノ2009 MEMS協議会(MIF)フォーラム 

    Presentation date: 2009.07

  • Large Scale Micro Fluidic Systems for Sequential Trapping, Labeling and Content Extraction of Single Cells

    The 15th International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers 2009 

    Presentation date: 2009.06

  • 100 Picoliter Droplet Handling Using 256 (28) Microvalve Array with 18 Multiplexed Control Lines

    The 15th International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers 2009 

    Presentation date: 2009.06

  • Studies on Low-Temperature Bonding Mechanism of VUV and Plasma Pretreated Cyclo-Olefin Polymer

    The 15th International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers 2009 

    Presentation date: 2009.06

  • 3D Chip-Stacking Technology

    The 2009 Lithography Workshop 

    Presentation date: 2009.06

  • Vacuum Ultraviolet (VUV) Surface Treatment Process for Flip Chip and 3D Interconnection

    The 59th Electronic Components and Technology Conference: ECTC 2009 

    Presentation date: 2009.05

  • 温度感受性ハイドロゲルと蛍光検出を用いた細胞・生体分子の一括分離システム

    第19回化学とマイクロ・ナノシステム研究会(19th CHEMINAS) 

    Presentation date: 2009.05

  • PDMS−熱可塑性樹脂直接接合技術の研究

    第19回化学とマイクロ・ナノシステム研究会(19th CHEMINAS) 

    Presentation date: 2009.05

  • デスクトップ型熱アシストUVロールインプリント装置の開発

    第20回プラスチック成形加工学会 年次大会 

    Presentation date: 2009.05

  • MEMS Based Cell Function Analysis Micro Fluidic Systems

    The 11th Korean MEMS Conference: KMEMS 2009 

    Presentation date: 2009.04

  • Low Temperature Wafer Bonding Using Metal Diffusion Technique

    International Conference on Electronics Packaging: ICEP 2009 

    Presentation date: 2009.04

  • Studies on Low-Temperature Direct Bonding Methods of PMMA and COP Using Surface Pretreatment

    International Conference on Electronics Packaging: ICEP 2009 

    Presentation date: 2009.04

  • Effect of the Excimer Irradiation Process on the Interconnection of Flip Chip Bonding

    International Conference on Electronics Packaging: ICEP 2009 

    Presentation date: 2009.04

  • MEMS応用マイクロ・ナノ流体システム

    4大学(慶大・早大・東工大・東大)ナノ・マイクロファブリケーションコンソーシアム 拠点形成シンポジウム 

    Presentation date: 2009.03

  • PolymerMEMSと化学・バイオへの応用

    MEMS Engineer Forum 2009 

    Presentation date: 2009.03

  • 細胞機能解析を目的としたMEMSデバイス

    第17回マイクロナノ先端技術交流会 

    Presentation date: 2009.02

  • EHD Micro Pump Using Pyrolyzed Polymer 3-D Carbon Mesh Electrodes

    22nd IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2009 

    Presentation date: 2009.01

  • Precise Titration Microfluidic System Using Sub-Picoliter Droplet Injection

    22nd IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2009 

    Presentation date: 2009.01

  • マイクロ流体デバイス

    マイクロ・ナノ化学チップと医療・環境・バイオ分析、技術教育出版社 

    Presentation date: 2009.01

  • The Long Pillar Array Column with the Low-Dispersion Curve for Liquid Chromatography

    International Symposium on Microchemistry and Microsystems: ISMM 2008 

    Presentation date: 2008.12

  • 3D Hydrodynamic Focusing Device Using Symmetrical Herringbone Grooves

    International Symposium on Microchemistry and Microsystems: ISMM 2008 

    Presentation date: 2008.12

  • All Fluoroplastic (NEOFLONTMEFEP) Microfluidic Devices Fabricated by Low Temperature Molding and Bonding

    International Symposium on Microchemistry and Microsystems: ISMM 2008 

    Presentation date: 2008.12

  • Electrophoretic Analyses of Biogenic Compounds Using Surface Modified Polymer Microchips

    International Symposium on Microchemistry and Microsystems: ISMM 2008 

    Presentation date: 2008.12

  • 表面修飾ポリマーマイクロチップを用いる生体試料の電気泳動分析2

    第19回クロマトグラフィー科学会議 

    Presentation date: 2008.12

  • 細胞・生体分子の高精度一括分離システム

    第18回化学とマイクロ・ナノシステム研究会(18th CHEMINAS) 

    Presentation date: 2008.12

  • マイクロ流体デバイスを利用した脂肪細胞のミトコンドリアカウンティング

    第18回化学とマイクロ・ナノシステム研究会(18th CHEMINAS) 

    Presentation date: 2008.12

  • マルチプレクサ型回路によるバルブアレイ制御システムの開発

    第18回化学とマイクロ・ナノシステム研究会(18th CHEMINAS) 

    Presentation date: 2008.12

  • Cell Function Analysis Tools Fabricated by MEMS and Nanotechnology

    International Symposium on Surface Science and Nanotechnology: ISSS-5 

    Presentation date: 2008.11

  • MEMS/NTを応用した細胞機能解析マイクロシステム

    第17回日本コンピュータ外科学会大会 

    Presentation date: 2008.11

  • 表面修飾ポリマーマイクロチップを用いる生体試料の電気泳動分析

    第28回キャピラリー電気泳動シンポジウム (SCE2008) 

    Presentation date: 2008.11

  • Recent Progresses of Micro/Nano Flow Systems for Bioapplications

    The 4th Joint Symposium Shanghai Jiao Tong University and Waseda University 

    Presentation date: 2008.10

  • Cell Rupture Microfluidic Device Using Nano Needle Allay for Damage-Free Extraction of Organelles

    The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS2008 

    Presentation date: 2008.10

  • Dynamic Imaging of Single Biomolecular Interaction Using Flow Control and TIRFM

    The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS2008 

    Presentation date: 2008.10

  • High Performance Multiple Biomolecules Sorting System

    The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS2008 

    Presentation date: 2008.10

  • Preparation and Characterization of Microcapsules Containing Fluorescent Nanoparticles Sensitive to Organic Solvent

    The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS2008 

    Presentation date: 2008.10

  • Multiplexed Pneumatic Valve Control System for Large Scale Integrated Microfluidic Circuit (LSIMC)

    The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS2008 

    Presentation date: 2008.10

  • High Performance Parallel Bioparticle Sorter with 3-Dimensional PDMS Chip

    The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS2008 

    Presentation date: 2008.10

  • High Performance Microfluidic Device for Sequential Trapping, Labeling and Content Extraction of Single Cells

    The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS2008 

    Presentation date: 2008.10

  • Microfluidic Alignment System for Single Cell Manipulation and Culture

    The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS2008 

    Presentation date: 2008.10

  • Electrochemical Fabrication of CoPt Nanodot Arrays on Glass Disks by UV Nanoimprint Lithography

    14th ECS Meeting 

    Presentation date: 2008.10

  • Comparison of a Microfluidic Gas-Intake Devices with Pillar-Type and Microfluidic Membrane-Type Structures

    214th ECS Meeting, ECS Transactions 

    Presentation date: 2008.10

  • High-Throughput Nano-Metal Patterning Process Using UV Nanoimprint Lithography and Electrodeposition

    The 7th International Conference on Nanoimprint and Nanoprint Technology: NNT ’08 

    Presentation date: 2008.10

  • MEMS/NT Based Cell Function Analysis Microdevice/Systems

    Micro- and Nano Technologies in Medicine - a Swedish-Japanese Collaborative Workshop 

    Presentation date: 2008.10

  • PDMS Microfluidic System for Single Cell Capture and Long-Term Cell Cultivation

    21st International Microprocesses and Nanotechnology Conference: MNC2008 

    Presentation date: 2008.10

  • All Fluoroplastic Nanoliter Sample Injector

    21st International Microprocesses and Nanotechnology Conference: MNC2008 

    Presentation date: 2008.10

  • Seamless Pattern Fabrication for Large Area Nano Structures Using UV-NIL

    21st International Microprocesses and Nanotechnology Conference: MNC2008 

    Presentation date: 2008.10

  • Batch Transfer Large-Area Gratings for DFB Lasers Fabricated on GaAs Substrates Using Ultraviolet Nano-Imprint Lithography

    21st International Microprocesses and Nanotechnology Conference: MNC2008 

    Presentation date: 2008.10

  • バイオ応用マイクロ/ナノ流体システム

    第2回かずさDNA研究所—ASMeW 合同シンポジウム 

    Presentation date: 2008.10

  • UVロールナノインプリント技術と転写特性

    第16回プラスチック成形加工学会 秋季大会(成形加工シンポジア‘08) 

    Presentation date: 2008.10

  • UV硬化性フッ素樹脂を用いたUV—インプリントによるナノパターン作製技術

    第16回プラスチック成形加工学会 秋季大会(成形加工シンポジア‘08) 

    Presentation date: 2008.10

  • Compoud Nanoimprint Processes and Their Applications for Functional Nanodevices

    The 2008 International Conference on Solid State and Materials: SSDM2008 

    Presentation date: 2008.09

  • 三次元実装用20umピッチ垂直方向配線技術

    第69回応用物理学会学術講演会 

    Presentation date: 2008.09

  • MEMS/NTを応用した細胞機能解析マイクロシステム

    センシング技術応用研究会総会・30周年記念講演会 

    Presentation date: 2008.09

  • 液体MEMS

    日立製作所技術研修所主催講座「MEMS設計の基礎」 

    Presentation date: 2008.07

  • Study of Low-Temperature Wafer Bonding with Au-Au Bonding Technique

    Proc. MicroNano 08 

    Presentation date: 2008.06

  • A New Fine-Pitch Vertical Interconnection Process for Through Silicon VIAS and Microbumps

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies: APCOT 2008 

    Presentation date: 2008.06

  • Highly Stable and Reproducible Cyclo-Olefin Polymer Nano-Electrospray Tip for Electrophoresis-Mass Spectrometry

    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies: APCOT 2008 

    Presentation date: 2008.06

  • Fabrication of a Magnetic Nanodots Array Using UV Nanoimprint Lithography and Electrodeposition for High Density Patterned Media

    The 25th International Conference of Photopolymer Science and Technology, Materials &amp; Processes for Advanced Microlithography and Nanotechnology: ICPST-25 

    Presentation date: 2008.06

  • マイクロ/ナノデバイス・システムのバイオ・医療への応用

    第2回次世代医療システム産業化フォーラム2008 

    Presentation date: 2008.05

  • マイクロ流路内での細胞培養

    第17回化学とマイクロ・ナノシステム研究会(17th CHEMINAS) 

    Presentation date: 2008.05

  • マイクロバルブ流体システムを用いた生体分子一分子イメージング技術の開発

    第17回化学とマイクロ・ナノシステム研究会(17th CHEMINAS) 

    Presentation date: 2008.05

  • 空間パターン形成解析のための糸状性シアノバクテリア用トラップアレイの検討

    第17回化学とマイクロ・ナノシステム研究会(17th CHEMINAS) 

    Presentation date: 2008.05

  • Microfluidic Manipulation System for Single Cell Isolation and Culture

    22nd International Symposium on Microscale Bioseparations and Methods for Systems Biology: MSB 2008 

    Presentation date: 2008.03

  • Electrophoretic Separation and Mass Spectrometric Detection on Polymer Microchip Directly Integrated with ESI Spray

    22nd International Symposium on Microscale Bioseparations and Methods for Systems Biology: MSB 2008 

    Presentation date: 2008.03

  • ESIスプレー集積化ポリマー製マイクロチップによる電気泳動分離−質量分析検出

    日本化学会第88春季年会 

    Presentation date: 2008.03

  • UV-NILを用いたフッ素樹脂製レプリカモールドの作製

    2008年春季 第55回応用物理学関係連合講演会 

    Presentation date: 2008.03

  • ダブルUVインプリントプロセスによるパターン作製技術を用いた大面積モールドの開発

    2008年春季 第55回応用物理学関係連合講演会 

    Presentation date: 2008.03

  • UVナノインプリント技術を用いたCu立体配線の作製

    2008年春季 第55回応用物理学関係連合講演会 

    Presentation date: 2008.03

  • Soft Cell Rupture Device Using Nano Needle Allay for Damage-free Extraction of Organelles

    2008 International Conference on Nanoscience and Nanotechnology: ICONN 2008 

    Presentation date: 2008.02

  • Post-Hydrophilic Treatment Free Plastic Biochip Fabrication Method Using Polyurea Film

    21st IEEE International Conference on Micro Electro Mechanical Systems: IEEE MEMS 2008 

    Presentation date: 2008.01

  • Microchip Electrophoresis-mass Spectrometry on Polymer Microfluidic Device Directly Integrated with a Nano ESI Tip

    7th Asia-Pacific International Symposium on Microscale Separations and Analysis: APCE 2007 

    Presentation date: 2007.12

  • マイクロ/ナノ流体システムを用いた細胞機能計測

    (独)日本学術振興会 産業計測第36委員会研究会 

    Presentation date: 2007.12

  • MEMS/ナノテクノロジーのバイオ分離・計測への応用

    早稲田大学創立125周年記念シンポジウム「バイオ・ナノ融合領域の新展開」 

    Presentation date: 2007.12

  • Fabrication of the Functional 3-D Micromesh Structures Coated with TiO2 Particles and Biocatalyst

    20th International Microprocesses and Nanotechnology Conference: MNC 2007 

    Presentation date: 2007.11

  • ナノESI一体型ポリマー製マイクロチップによる電気泳動分離−質量分析検出

    第27回キャピラリー電気泳動シンポジウム 

    Presentation date: 2007.11

  • 細胞機能解析を目的としたマイクロ流体デバイス/システム

    電気学会 第五回「量子ビームによるナノバイオ科学と基盤技術調査専門委員会」 

    Presentation date: 2007.11

  • 細胞機能解析を目的としたマイクロ/ナノ流体システム

    応用物理学会 有機分子・バイオエレクトロニクス分科会講習会 

    Presentation date: 2007.11

  • 細胞機能解析のためのマイクロ/ナノ流体システム

    (社)新化学発展協会 電子情報技術部会 秋季講演会 

    Presentation date: 2007.11

  • Efficient Addressable Fluid Control System Using Pneumatic Valve Array

    The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2007 

    Presentation date: 2007.10

  • High Speed Organelles Sorting Microsystem Driven by a Single Pressure Source

    The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2007 

    Presentation date: 2007.10

  • Size-Selective Separation of Glass Beads Using the Secondary Flow in a Curved Microchannel

    The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2007 

    Presentation date: 2007.10

  • Size Control of Nano-Pores on Microcapsule for Controlled Release

    The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2007 

    Presentation date: 2007.10

  • Parallel Bioparticle Sorting with TGP Solution in 3-Dimentional Microflow System

    The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2007 

    Presentation date: 2007.10

  • Application of Cycloolefin Polymer Chip Directly Integrated with an Electronanospray Tip to Electrophoretic Separation and Mass Spectrometric Detection

    The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2007 

    Presentation date: 2007.10

  • Multiple Core-Sheath Liquid Transfer Using Matrix Arrangement of 3D Sheath Flows

    The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences: μTAS 2007 

    Presentation date: 2007.10

  • Electrophoretic Separation and Mass Spectrometric Detection on Polymer Chip Directly Integrated with an Electronanospray Tip

    1st International Colloquium on Microfluidics: SICOM I 

    Presentation date: 2007.10

  • Electrophoretic Separation and Mass Spectrometric Detection on Polymer Chip Directly Integrated with a Nano ESI Tip

    International Symposium on Microchemistry and Microsystems: ISMM 2007 

    Presentation date: 2007.10

  • アドレス制御型バルブコントロールシステムの開発

    第16回化学とマイクロ・ナノシステム研究会(16th CHEMINAS) 

    Presentation date: 2007.10

  • 三次元実装用接合技術の開発

    第68回応用物理学会学術講演会 

    Presentation date: 2007.09

  • マイクロチップ電気泳動分離−質量分析検出用ポリマー製デバイスの開発

    日本分析化学会第56年会 

    Presentation date: 2007.09

  • ピラーアレイを用いたオンチップLCの開発

    日本分析化学会第56年会 

    Presentation date: 2007.09

  • Cells and Biomolecules Handling Micro/Nanofluidic Systems

    IEEE International Conference on Information Acquisition: IEEE ICIA 2007 

    Presentation date: 2007.07

  • 三次元ハイドロフォーカシングシースフローデバイスの作製

    電気学会センサ・マイクロマシン部門総合研究会 

    Presentation date: 2007.07

  • 超微小デバイス技術の化学、バイオ(宇宙)への応用

    財団法人京都高度技術研究所主催「ナノマシン技術のバイオ計測へのアプローチ」発表交流会(第25回KYO-NANO会) 

    Presentation date: 2007.07

  • MEMSナノテクノロジー実用化技術

    社)電子情報技術産業協会(JEITA)センシング技術専門委員会 

    Presentation date: 2007.07

  • Fabrication of Multilayer Interconnection Using Ultraviolet Nanoimprint Lithography

    Fourth International Conference on Networked Sensing Systems: INSS 07 

    Presentation date: 2007.06

  • Spatially Focused Reagent Injection System for Cell Analysis Using 3-D Sheath Flow Scanner

    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems: TRANSDUCERS ’07 

    Presentation date: 2007.06

  • High Generation Rate of Uniform Oil-In-Water Droplets Formed by Multi-Stage Divergence Microflow Device

    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems: TRANSDUCERS ’07 

    Presentation date: 2007.06

  • High-Through-Put Parallel Biomolecules Sorting Microsystem with Three Dimensional PDMS Stack

    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems: TRANSDUCERS ’07 

    Presentation date: 2007.06

  • Surface Hydrophilic Polyurea Film for PMMA Blood Analysis Chip Realized by Vacuum Ultraviolet Light Irradiation

    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems: TRANSDUCERS ’07 

    Presentation date: 2007.06

  • Microfluidic Centrifuge of Nano Particles Using Rotating Flow in a Microchamber

    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems: TRANSDUCERS ’07 

    Presentation date: 2007.06

  • Continuous Production of Spherical Microcapsules with Nano-Pores and Use as a Potential Encapsulant

    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems: TRANSDUCERS ’07 

    Presentation date: 2007.06

  • Polymer Microchip for Electrophoresis-Mass Spectrometry Fabricated by Hot Embossing and Low Temperature Direct Bonding

    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems: TRANSDUCERS ’07 

    Presentation date: 2007.06

  • UV Nanoimprint Lithography and the Application to Device

    The 23rd Conference of Photopolymer Science and Technology 

    Presentation date: 2007.06

  • バイオセンシングのためのマイクロ・ナノ流体システム

    電気学会 第5回集積化センシングシステム調査専門委員会 

    Presentation date: 2007.06

  • Micro/Nano Flow Systems for Biological Cell Analysis

    The 3rd Joint Symposium between Waseda &amp; Shanghai Jiao Tong Universities 

    Presentation date: 2007.05

  • 電気泳動分離−質量分析検出用シクロオレフィンポリマーマイクロチップの作製

    第14回クロマトグラフィーシンポジウム 

    Presentation date: 2007.05

  • 電気泳動分離−質量分析検出用シクロオレフィンポリマーマイクロチップの作製 (2)

    第55回質量分析総合討論会 

    Presentation date: 2007.05

  • 電気泳動分離−質量分析検出用ポリマー製マイクロチップの作製

    日本材料学会第56期学術講演会 

    Presentation date: 2007.05

  • High Performance Liquid Chromatography (HPLC)用カラムのチップ化に関する研究

    第15回化学とマイクロ・ナノシステム研究会(15th CHEMINAS) 

    Presentation date: 2007.05

  • 高速応答微流量コントロールデバイス

    第15回化学とマイクロ・ナノシステム研究会(15th CHEMINAS) 

    Presentation date: 2007.05

  • 接着性フッ素樹脂(ネオフロンTMEFEP)を用いたマイクロ流体デバイスの作製

    第15回化学とマイクロ・ナノシステム研究会(15th CHEMINAS) 

    Presentation date: 2007.05

  • シクロオレフィンポリマーマイクロチップによる電気流動分離一質量分析検出

    第15回化学とマイクロ・ナノシステム研究会(15th CHEMINAS) 

    Presentation date: 2007.05

  • 真空紫外線を用いたポリ尿素膜親水化処理とその血液チップへの応用

    第15回化学とマイクロ・ナノシステム研究会(15th CHEMINAS) 

    Presentation date: 2007.05

  • High Speed Multi Reagents Exchange Flow System with Leakage Free Microvalves and Protein Real Time Monitoring by TIRFM

    Nano Tech Insight 2007 

    Presentation date: 2007.03

  • マイクロ〜ナノデバイスの社会的ニーズ

    電気化学会第74回大会 

    Presentation date: 2007.03

  • Fabrication of Integrated Nano ESI Tip for Microchip Electrophoresis?Mass Spectrometry

    21st International Symposium on Microscale Bioseparations: MSB 2007 

    Presentation date: 2007.01

  • Pyrolyzed Polymer Mesh Electrode Integrated into Fluidic Channel for Gate Type Sensor

    20th IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2007 

    Presentation date: 2007.01

  • High Aspect Ratio Nano-Scale CFx Structures Fabricated by Deep-RIE

    20th IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2007 

    Presentation date: 2007.01

  • Continuous and Regulated Organic Micro Bubble Generation Using Lumped Gas and Organic Injected Junction

    20th IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2007 

    Presentation date: 2007.01

  • 化学・バイオ応用を目的としたマイクロナノ流体デバイス

    The 4th 21COE International Symposium on Practical Nano-Chemistry, Waseda University 

    Presentation date: 2006.12

  • ナノ加工およびBioMEMS

    日本学術振興会 未踏・ナノデバイステクノロジー第151委員会研究会、ナノバイオフュージョン分科会合同研究会 

    Presentation date: 2006.12

  • 細胞、生体物質の機能解析を目的としたナノ/マイクロ流体システム

    ナノテクノロジー総合支援プロジェクトセンター主催 第4回分野横断スクール「ナノバイオスクール:医療に向けたナノバイオ 

    Presentation date: 2006.12

  • Meshless Simulation for Micro Droplet Generation

    Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences: microTAS 2006 

    Presentation date: 2006.11

  • Fabrication of Highly Dimension Controlled PMMA Microchip by Hot Embossing and Low Temperature Direct Bonding

    Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences: microTAS 2006 

    Presentation date: 2006.11

  • High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips

    Sixth Asia-Pacific International Symposium on Microscale Separations and Analysis: APCE 2006 

    Presentation date: 2006.11

  • Passive Distribuuting Method for Cellular Diagnostic Microwell Array Using Self-Regulating Pinched Flow

    Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences: microTAS 2006 

    Presentation date: 2006.11

  • Accurate and High Speed Particles and Biomolecules Sorting Microsystem Using 3-Dimensional Sheath Flow

    Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences: microTAS 2006 

    Presentation date: 2006.11

  • Multi-Reagents High Speed Exchange Flow System for Single Biomolecular Dynamics Real Time Monitoring

    Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences: microTAS 2006 

    Presentation date: 2006.11

  • The Spatially Focused Reagent Injection System Using 3-D Sheath Flow Scanner Integrated With SiO2 Mesh Strainer

    Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences: microTAS 2006 

    Presentation date: 2006.11

  • Synthesis of Spherical Microcapsules with Nano-Pores and Use as a Potential Encapsulant

    Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences: microTAS 2006 

    Presentation date: 2006.11

  • Continuous Liquid and Particle Handlings in Micro Channel

    Sixth Asia-Pacific International Symposium on Microscale Separations and Analysis: APCE 2006 

    Presentation date: 2006.11

  • Individual Single Cell Manipulation with Micro Chamber Array

    Sixth Asia-Pacific International Symposium on Microscale Separations and Analysis: APCE 2006 

    Presentation date: 2006.11

  • High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips

    Sixth Asia-Pacific International Symposium on Microscale Separations and Analysis: APCE 2006 

    Presentation date: 2006.11

  • MicroTAS 国際会議の歴史と今後の課題

    第14回化学とマイクロ・ナノシステム研究会(14th CHEMINAS) 

    Presentation date: 2006.11

  • 細胞・分子の高速ソーティングシステム

    第5回集積光デバイス技術研究会 

    Presentation date: 2006.11

  • 早稲田大学におけるMEMSおよびナノバイオ研究

    2006年度マイクロシステム技術研究会定例外セミナー「立命館大学・早稲田大学MEMS・ナノバイオ交流研究会」 

    Presentation date: 2006.11

  • マイクロ流体デバイス

    財団法人神奈川科学技術アカデミー主催 教育講座「マイクロ化学チップー基礎の基礎」 

    Presentation date: 2006.11

  • Fabrication of the 3-D comb-shaped micromesh electrodes for high sensitive electrochemical sensors

    The 23rd Sensor Symposium 

    Presentation date: 2006.10

  • Micro/Nano Fluidic Devices and Systems for Bioapplications

    Intenational Workshop on Micro/Nano Science and Engineering for the 21st Century 

    Presentation date: 2006.10

  • Metallization on Three Dimensions Microstructures Using Photoresist Spray Coating for Microdirect Methanol Fuel Cell

    Japanese Journal of Applied Physics 

    Presentation date: 2006.10

  • Flow Type Electrochemical Immuno Sensing Systems Using 3-D Comb Electrodes

    The 5th IEEE Conference on Sensors: IEEE Sensors 2006、A4L-F5 

    Presentation date: 2006.10

  • Fabrication of High Light-Extraction Efficiency LED Using Nanostructures by UV Nanoimprint Lithography and Electrodeposition

    the 2006 International Conference on Solid State Devices and Materials: SSDM 2006 

    Presentation date: 2006.09

  • Equipments and Technologies for Packaging of Nano / Micro-Structured Polymer Applications

    The 11th International Conference on the Commercialization of Micro and Nano Systems: COMS2006 

    Presentation date: 2006.08

  • 3-D Sheath Flow Using Local Directional Streams Induced by Slanted Microgrooves

    International Conference on Nanoscience and Technology: ICN+T 2006 

    Presentation date: 2006.07

  • High Performance Multi Particles Sorting System Using Thermoreversible Hydrogel Gelation Controlled by DMD

    International Conference on Nanoscience and Technology: ICN+T 2006 

    Presentation date: 2006.07

  • Low Temperature Direct Bonding of PMMA for Polymer Microchips

    Asia-Pacific Conference of Transducers and Micro-Nano Technology: APCOT 2006 

    Presentation date: 2006.06

  • Fabrication of Metallic Nanopatterns Using the Vacuum Type UV-NIL Equipment

    Asia-Pacific Conference of Transducers and Micro-Nano Technology: APCOT 2006 

    Presentation date: 2006.06

  • VUV Irradiation Effects on Performance of Pentacene Thin Film Transistors

    Asia-Pacific Conference of Transducers and Micro-Nano Technology: APCOT 2006 

    Presentation date: 2006.06

  • MEMS・マイクロ/ナノフルィディクスのバイオ・医療への応用

    高分子学会 第24回高分子表面研究会講座 

    Presentation date: 2006.06

  • UVナノインプリントを用いた高アスペクト比Siナノ構造体の作製

    平成18年度電気学会センサ・マイクロマシン準部門総合研究会 

    Presentation date: 2006.05

  • 化学・生化学応用のための熱分解炭素化SU-8三次元構造体の試作

    第13回化学とマイクロ・ナノシステム研究会(13th CHEMINAS) 

    Presentation date: 2006.05

  • MEMS Technologies and Micro/Nano Flow Systems for Bio/Chemical Applications

    DICP (Dalian Institute of Chemical Physics) Symposium (IX) on Miniaturization of Analytical Instruments &amp; micro-System 

    Presentation date: 2006.04

  • Polymer MEMS and Micro/Nano Flow Systems for Bio/Chemical Applications

    The 2nd International Symposium on Micro and Nano Technology; ISMNT-2 

    Presentation date: 2006.03

  • シクロオレフィン樹脂マイクロチップにおける高性能電気泳動分析 (3)

    日本化学会第86春季年会 

    Presentation date: 2006.03

  • ポリマーの微細加工技術と化学・生化学マイクロナノ流体デバイス

    社団法人 新化学発展協会 電子情報技術部会 MEMS - WG 講演会 

    Presentation date: 2006.02

  • Micro/Nano Flow Systems for Biological Cell Analysis

    Waseda-Korea Universities’ Joint Symposium on “Nanoscience and Nanotechnology” organized by 21COE Program at Waseda Univ. and CRM at Korea University 

    Presentation date: 2006.01

  • High Speed Particles and Biomolecules Sorting Microsystem Using Thermosensitive Hydrogel and Water Two-Phase Flow

    19th IEEE International Conference on Micro Electro Mechanical Systems: MEMS 2006 

    Presentation date: 2006.01

  • 細胞・分子の高速ソーティングシステム

    財団法人光産業技術振興協会 平成17年度第4回光集積技術フィージビリティ調査委員会 

    Presentation date: 2006.01

  • High Performance Electrophoretic Analysis on Cycloolefin Polymer Microchips.3

    Fifth International Symposium on Microchemistry and Microsystems: ISMM 2005 

    Presentation date: 2005.12

  • PU Coated PMMA Blood Analysis Chip

    Fifth International Symposium on Microchemistry and Microsystems: ISMM 2005 

    Presentation date: 2005.12

  • Application of thermal lens microscopy and sweeping for highly sensitive detection in electrophretic analysis on cycloolefin polymer microchips

    2005 International Chemical Congress of Pacific Basin Societies PACIFICHEM 2005, program no.895 

    Presentation date: 2005.12

  • Au電極一体型COPマイクロチャネルの制作II

    第12回化学とマイクロ・ナノシステム研究会(12-CHEMINAS) 

    Presentation date: 2005.12

  • 細胞機能解析マイクロセルに用いるSiO2メッシュ構造体の作製

    第12回化学とマイクロ・ナノシステム研究会(12-CHEMINAS) 

    Presentation date: 2005.12

  • ポリマーMEMSとその化学・バイオへの応用

    財団法人あきた企業活性化センター「秋田県医工連携クラスター・第3回オープンセミナー」 

    Presentation date: 2005.12

  • Micro/Nano Flow Devices Systems for Bioapplications

    2005 Symposium on Nanoscale Materials, Processes and Devices, 2005 Joint Symposium of Stanford Univ. &amp; Waseda Univ. 

    Presentation date: 2005.11

  • Fabrication of All Plastic 3-D Microfluidic Devices

    2005 Symposium on Nanoscale Materials, Processes and Devices, 2005 Joint Symposium of Stanford Univ. &amp; Waseda Univ. 

    Presentation date: 2005.11

  • Micro Valve System for the Single Bio-Morecule Detection

    2005 Symposium on Nanoscale Materials, Processes and Devices, 2005 Joint Symposium of Stanford Univ. &amp; Waseda Univ. 

    Presentation date: 2005.11

  • Micro/Nano Flow Devices/Systems for Biological Cell Analysis

    Bio-Nano-Robo Seminar Series organized by LIMMS / CNRS- IIS (UMI 2820) 

    Presentation date: 2005.11

  • ポリマーMEMSと化学・バイオへの応用

    第10回ナノテク部会研究会 

    Presentation date: 2005.11

  • シクロオレフィン樹脂マイクロチップにおける高性能電気泳動分析

    第16回クロマトグラフィー科学会議 

    Presentation date: 2005.11

  • シクロオレフィン樹脂マイクロチップにおける高性能電気泳動分析 (2)

    第25回キャピラリー電気泳動シンポジウム;SCE 2005 

    Presentation date: 2005.11

  • 樹脂製マイクロチャネルアレイを用いた通過時間の再現性検討

    第12回日本ヘモレオロジー学会 

    Presentation date: 2005.11

  • Application of Thermal Lens Microscopy and Sweeping for Highly Sensitive Detection in Electrophoretic Analysis on Cycloolefin Polymer Microchips

    9th International Conference on Miniaturized Systems for Chemistry and Life Sciences: uTAS 2005 

    Presentation date: 2005.10

  • A Reagent Injection System for Stimulation to Specific Cell Colonies Using 3-D Sheath Flow Scanner

    9th International Conference on Miniaturized Systems for Chemistry and Life Sciences: uTAS 2005 

    Presentation date: 2005.10

  • Numerical Analysis of Micro Droplet Generation Using a Particle Method

    9th International Conference on Miniaturized Systems for Chemistry and Life Sciences: uTAS 2005 

    Presentation date: 2005.10

  • Cost Effective Plastic Micro Direct Methanol Fuel Cell (uDMFC)

    9th International Conference on Miniaturized Systems for Chemistry and Life Sciences: uTAS 2005 

    Presentation date: 2005.10

  • PMMA Micro-Channel Array for Blood Analysis Fabricated by Hot Embossing

    9th International Conference on Miniaturized Systems for Chemistry and Life Sciences: uTAS 2005 

    Presentation date: 2005.10

  • Functional Microcapsule for Drug Delivery

    9th International Conference on Miniaturized Systems for Chemistry and Life Sciences: uTAS 2005 

    Presentation date: 2005.10

  • Fabrication of Comb-Shaped 3-D Micromesh Ni Electrodes

    The 208th Meeting of The Electrochemical Society: ECS 2005 

    Presentation date: 2005.10

  • Quantitative Droplet Generation in Microfluidic Device

    The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems 

    Presentation date: 2005.10

  • Fabrication of Metallic Nano Patterns Using a New Photocurable Resin Durable for Electrodeposition Process

    The 4th International Nanoimprint and Nanoprint Technology Conference 2005 

    Presentation date: 2005.10

  • CFD Simulation of the Spiral Flow in 3-D Slanted Grooved Microchannels

    The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems 

    Presentation date: 2005.10

  • Improved Passive Cell Distributing Method to Micro Cellular Diagnostic Well Array

    2005 International Microprocesses and Nanotechnology Conference: MNC 2005 

    Presentation date: 2005.10

  • All Plastic Microfluidic Device with Built-In 3-D Fine Microstructures

    2005 International Microprocesses and Nanotechnology Conference: MNC 2005 

    Presentation date: 2005.10

  • Polymer Micro/Nano Structure and Their Bio/Chemical Applications

    Nanoengineering Symposium 2005 

    Presentation date: 2005.10

  • 微小空間における熱レンズ分光法およびナノ分子構造体を利用したマイクロチップ電気泳動の高感度化 (3)

    第49回日本学術会議材料研究連合講演会 

    Presentation date: 2005.09

  • マイクロ・ナノフルィディクス

    日本学術振興会 未踏・ナノデバイステクノロジー第151委員会 スクール企画 

    Presentation date: 2005.09

  • ポリマーMEMSとマイクロTASへの応用

    日本機械学会 2005年度年次大会 

    Presentation date: 2005.09

  • マイクロ・ナノ流体システムと化学・バイオへの応用

    精密工学会 「第27回マイクロ/ナノシステム研究専門委員会」 

    Presentation date: 2005.09

  • Micro/Nano Flow Systems for Biological Cell Analysis

    19th International Symposium on Microscale Bioseparations: MSB Kobe 

    Presentation date: 2005.08

  • Application of thermal lens microscopy and sweeping for highly sensitive detection in electrophoretic analysis on cycloolefin polymer microchips

    19th International Symposium on Microscale Bioseparations; MSB Kobe 

    Presentation date: 2005.08

  • High Efficiency Flow Electrochemical Immuno Sensors Using 3-D Comb Electrodes Made of Magnetic Alloy

    5th IEEE Conference on Nanotechnology: IEEE-NANO 2005 

    Presentation date: 2005.07

  • 熱レンズ顕微鏡検出およびオンライン試料濃縮の適用によるマイクロチップ電気泳動分析の高感度化

    Separation Sciences 2005 

    Presentation date: 2005.07

  • Low Cost High Aspect Ratio Microstructures for Chemical &amp; Bio Applications

    High Aspect Ratio Micro-Structure Technology 2005 Workshop: HARMST 05 

    Presentation date: 2005.06

  • Low Cost High Aspect Ratio Microstructures for Chemical & Bio Applications

    High Aspect Ratio Micro-Structure Technology 2005 Workshop: HARMST 05 

    Presentation date: 2005.06

  • An Extended Gate Field Effect Transistor Based Protein Sensor Integrated with a Si Micro-fluidic Channel

    The 13th International Conference on Solid-State Sensors, Actuators &amp; Microsystems:TRANSDUCERS ’05 

    Presentation date: 2005.06

  • Pinhole-free Pyrex Glass Etching Using HF-H2SO4 Mixed Acid and Its Applications for a PDMS Microflow System

    The 13th International Conference on Solid-State Sensors, Actuators &amp; Microsystems:TRANSDUCERS ’05 

    Presentation date: 2005.06

  • Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (uDMFC)

    The 13th International Conference on Solid-State Sensors, Actuators &amp; Microsystems:TRANSDUCERS ’05 

    Presentation date: 2005.06

  • Cyclo Olefin Polymer Direct Bonding Using Low Temperature Plasma Activation Bonding

    The 13th International Conference on Solid-State Sensors, Actuators &amp; Microsystems:TRANSDUCERS ’05 

    Presentation date: 2005.06

  • Multi Particles and Biomolecules Sorting System using Thermoreversible Gelation Controlled by DMD

    The 13th International Conference on Solid-State Sensors, Actuators &amp; Microsystems:TRANSDUCERS ’05 

    Presentation date: 2005.06

  • 微小空間における熱レンズ分光法およびナノ分子構造体を利用したマイクロチップ電気泳動の高感度化 (2)

    日本材料学会第54期学術講演会 

    Presentation date: 2005.05

  • MPS法によるマイクロチャネル内液滴生成の数値解析

    第11回化学とマイクロ・ナノシステム研究会 

    Presentation date: 2005.05

  • オンライン資料濃縮および熱レンズ顕微鏡によるマイクロチップ

    第11回化学とマイクロ・ナノシステム研究会 

    Presentation date: 2005.05

  • 金電極—体型シクロオレフィンポリマーマイクロチャネルの作製

    第11回化学とマイクロ・ナノシステム研究会 

    Presentation date: 2005.05

  • 低温直接接合によるPMMAマイクロ流体デバイスの制作

    第11回化学とマイクロ・ナノシステム研究会 

    Presentation date: 2005.05

  • 樹脂製マイクロチャネルアレイを用いた血液流動試験

    第80回日本医科器械学会大会 

    Presentation date: 2005.05

  • MEMS/ナノテクの化学・バイオへの応用

    センサ・アクチュエータ・マイクロマシンウィーク2005 総合シンポジウム 

    Presentation date: 2005.04

  • マイクロ/ナノ流体システムとその化学・バイオへの応用

    高分子学会 ポリマーフロンティア21 

    Presentation date: 2005.04

  • オンライン試料濃縮および熱レンズ顕微鏡測定によるマイクロチップ電気泳動分析の高感度化 (5)

    日本化学会第85春季年会 

    Presentation date: 2005.03

  • Application of Thermal Lens Microscopy and On-Line Sample Preconcentration for High Sensitive Detection in Microchip Electrophoresis

    Multi-Layer Microfluidic Devices for Amino Acid Analysis: The Mars Organic Analyzer, 18th International Symposium on Microscale Bioseparations: MSB 2005 

    Presentation date: 2005.02

  • Micro/nano flow systems for biological cell analysis

    3rd Sweden Japan Workshop on Nanobiotechnology 

    Presentation date: 2005.02

  • Chemical and bio-applications of MEMS &amp; Nanotechnology

    1st Int. Forum on Nano Science and Technology 

    Presentation date: 2004.12

  • Chemical and bio-applications of MEMS & Nanotechnology

    1st Int. Forum on Nano Science and Technology 

    Presentation date: 2004.12

  • マイクロ・ナノ流体素子・システムとその化学・バイオへの応用

    電気化学会・情報機能材料研究会,表面技術協会・表協エレクトロニクス部会合同研究会 

    Presentation date: 2004.12

  • Chemical free low temperature polymer to polymer direct bonding

    4th Int. Symp. On Microchemistry and Microsystems (ISMM2004) 

    Presentation date: 2004.11

  • ハイスループット細胞分析のためのマイクロウェルアレイの開発

    第10回 化学とマイクロ・ナノシステム研究会 

    Presentation date: 2004.11

  • 電気化学デバイスのためのスプレーコーティングを用いた立体電極パターニング

    第10回 化学とマイクロ・ナノシステム研究会 

    Presentation date: 2004.11

  • Micro/Nano Fluidic Devices and Elements for Bio/Chemical Applications

    4th Int. Workshop on microfactories 

    Presentation date: 2004.10

  • Fabrication of the 3-D Fine Micromesh and electroplated Ni micromesh structures

    2004 Int. Microprocess &amp; Nanotechnology Conference: MNC2004 

    Presentation date: 2004.10

  • Flow type electrochemical immunosensors using 3D comb electrodes

    2004 Int. Microprocess &amp; Nanotechnology Conference: MNC2004 

    Presentation date: 2004.10

  • MEMS技術の化学・バイオへの応用

    学振151委員会公開シンポジウム: 産業応用を広げるMEMS,ナノテクノを拓くNEMS 

    Presentation date: 2004.10

  • Fabrication of fine microchannel by using hot embossing

    Electrochem. Soc. Proc. Microfabricated Systems and MEMS VII 

    Presentation date: 2004.09

  • Fabrication of 3-D micromesh Ni structures using electroplating

    Electrochem. Soc. Proc. Microfabricated Systems and MEMS VII 

    Presentation date: 2004.09

  • 3-dimensional nano volume PDMS microreactor equipped with pneumatically-actuated in-channel membrane valves

    8th Int. Conf. On Micro Total Analysis Systems: uTAS2004 

    Presentation date: 2004.09

  • Selective surface modification of the perfluoro polymer passivated PDMS microstructures

    8th Int. Conf. On Micro Total Analysis Systems: uTAS2004 

    Presentation date: 2004.09

  • 2D free space flow control system using termoreversible gelation polymer by IR-laser

    8th Int. Conf. On Micro Total Analysis Systems: uTAS2004 

    Presentation date: 2004.09

  • Monolithic microchemical process plant of immiscible microfluids

    8th Int. Conf. On Micro Total Analysis Systems: uTAS2004 

    Presentation date: 2004.09

  • A multi cellular diagnostic device for high-throughput analysis

    8th Int. Conf. On Micro Total Analysis Systems: uTAS2004 

    Presentation date: 2004.09

  • Application of thermal lens microscopy and online sample preconcentration for high sensitive detection in microchip electrophoresis

    8th Int. Conf. On Micro Total Analysis Systems: uTAS2004 

    Presentation date: 2004.09

  • Development of individual cell sorting system for intercellular reaction analysis

    8th Int. Conf. On Micro Total Analysis Systems: uTAS2004 

    Presentation date: 2004.09

  • 化学/バイオ応用を目的としたマイクロ/ナノ流体デバイスおよびシステム

    マイクロリアクター技術研究会,第7回講演会 

    Presentation date: 2004.08

  • マイクロ/ナノ流体デバイスおよびシステムの設計の現状

    マイクロ流体におけるマルチフィジックスシンポジウム 

    Presentation date: 2004.08

  • Micro/nano devices for micro total analysis systems

    1st Int. Workshop on Networked Sensing Systems: INSS2004 

    Presentation date: 2004.06

  • Micro/Nano electro mechanical system technologies for bio/chemical and IT applications

    Int. Meeting for Future of Electron Devices Kansai: IMFEDK 

    Presentation date: 2004.06

  • Nano/micro flow device and systems for chemical/bio applications

    1st Int. Workshop on Nanoscale Semiconductor Devices 

    Presentation date: 2004.05

  • 化学/生化学分析への応用を目的としたマイクロ/ナノ流体素子およびシステム

    第11回クロマトグラフィーシンポジウム 

    Presentation date: 2004.05

  • 細胞機能解析マイクロセルに用いるサンプルインジェクター構造の設計と試作

    第9回 化学とマイクロ・ナノシステム研究会 

    Presentation date: 2004.05

  • Micro/nano flow devices and systems for bio-applications

    3rd Sino-Japanese Joint Seminar on Separation Science 

    Presentation date: 2004.04

  • ナノ構造配列を基盤とする分子ナノ工学の構築とマイクロシステムへの展開

    センサ・アクチュエータ・マイクロマシンウィーク2004 総合シンポジウム 

    Presentation date: 2004.04

  • 化学/生化学マイクロナノ流体デバイスの最近の発展

    精密工学会春季大会学術講演会 

    Presentation date: 2004.03

  • マイクロスケールの流体制御

    日本電熱学会関東支部・日本ヒートパイプ協会シンポジウム 

    Presentation date: 2004.01

  • 化学・生化学マイクロ・ナノ流体デバイス・システム

    Semicon Japan2003, SEMI Technology Symposium: STS2003 

    Presentation date: 2003.12

  • Micro/nano flow devices for chemical/biochemical applications

    Korea-Japan Joint Symp. On Manoengineering 2003, KSPE 

    Presentation date: 2003.11

  • Micro flow devices and systems for chemical/biochemical applications using MEMS technologies

    1st Korea-Japan Symp. On Microsystems for Life Science and Chemistry: 1st KJSMLC, KAIST 

    Presentation date: 2003.10

  • Micro/Nano flow devices and systems for biochemical applications

    3rd Nano-Biotechnology Int. Symp. 2003 

    Presentation date: 2003.10

  • 化学・生化学を目的としたナノ/マイクロ流体デバイス・システム—ナノテクノロジーと化学・バイオの接点—

    日本学術振興会 ナノプローブテクノロジー第167委員会 第31回研究会 

    Presentation date: 2003.07

  • 化学・生化学を目的としたナノ/マイクロ流体デバイス・システム—LSI設計との類似性を意識して—

    日本学術振興会 シリコン超集積化システム第165委員会 第29回研究会 

    Presentation date: 2003.07

  • 未来の臨床化学分析—マイクロファブリケーション技術の応用ー

    第2回 生物試料分析科学会関東支部学術集会 

    Presentation date: 2003.06

  • 化学・バイオナノ・マイクロシステム

    次世代センサ協議会,第37回研究会 

    Presentation date: 2003.05

  • Micro flow device/elements and a micro bio-molecules handling systems

    1st Japan-European Workshop on Chemical Micro Mechatronics Systems and Biochips 

    Presentation date: 2003.02

  • Micro Flow Devices/Systems and Biomolecules Handling in Micro Flow Channels

    1st Int. Meeting on Microsensors &amp; Microsystems 

    Presentation date: 2003.01

  • Development of the Multiple Sample Injector Using Stepwise Flow to Prevent Sample Dilution

    16th Int. Micro Electro Mechanical Systems Conference: MEMS2003 

    Presentation date: 2003.01

  • A Novel Fabrication of In-Channel 3-D Micromesh Structure Using Maskless Multi-Angle Exposure and Its Microfilter Application

    16th Int. Micro Electro Mechanical Systems Conference: MEMS2003 

    Presentation date: 2003.01

  • トップダウンナノテクノロジーと化学・バイオの接点

    日本学術振興会,未踏・ナノデバイステクノロジー第151委員会,第63回研究会 

    Presentation date: 2002.12

  • 化学・生化学へのMEMS技術の応用

    電気化学会電子材料委員会,半導体・集積回路第63回シンポジウム 

    Presentation date: 2002.12

  • Microfluidic Devices and Elements for Chemical/Biochemical Applications

    CREST Workshop on Micro- and Nanotechnology for Genomic/Proteomic Analysis 

    Presentation date: 2002.11

  • ナノ・マイクロ化学:マイクロ化学デバイスを実現するキーテクノロジー

    日本化学会関東支部講習会 

    Presentation date: 2002.11

  • Micro Total Analysis Systems: uTAS: Update on Microminiaturization

    The 18th Int. Congress of Clinical Chemistry and Laboratory Medicine 

    Presentation date: 2002.10

  • マイクロ流体素子および要素の開発

    日本学術振興会 創造機能化学第116委員会,公開シンポジウム 

    Presentation date: 2002.10

  • Recent Trends of Micro Flow Devices and Systems for Chemical/biochemical Applications

    15th Conf. On Combinatorial Chemistry: JCCF 

    Presentation date: 2002.09

  • ナノ・マイクロシステム技術の臨床診断への応用展望

    第34回日本臨床検査自動化学会大会 

    Presentation date: 2002.09

  • μTASの最近の動向 —Microfluidics Device/System を中心として—

    計測自動制御学会計測部門大会,第19回センシングフォーラム 

    Presentation date: 2002.09

  • マイクロ流体システムと生体分子ハンドリング

    第63回応用物理学会シンポジウム—バイオ・医用マイクロデバイの新展開— 

    Presentation date: 2002.09

  • Bioanalysis and biomolecles handling in micro flow channels

    1st Int. Symp. on Next Generation Biotechnology 

    Presentation date: 2002.07

  • MEMS技術とマイクロチャネル流体制御

    オーガナイズドセッション,マイクロ設計日本設計工学会春季大会 

    Presentation date: 2002.05

  • MEMS技術によるマイクロ流体システム−化学/生化学への応用展望

    日本塑性加工学会,塑性加工シンポジウム 

    Presentation date: 2002.03

  • マイクロセンサ技術の現状と将来展望

    日本計量機器工業連合会第6回新技術導入・活用研究会 

    Presentation date: 2002.02

  • マイクロマシン技術−化学/生化学への展開

    エレクトロニクス・マイクロマシニング技術フォーラム 

    Presentation date: 2002.02

  • マイクロ・ナノテクノロジーと検査技術

    総合検診第30回記念大会,日本総合検診医学会 

    Presentation date: 2002.01

  • マイクロ流体デバイスと生体計測システムへの応用展望

    日本エム・イー学会・日本バイオマテリアル学会合同シンポジウム 

    Presentation date: 2001.12

  • マイクロフルィディクスとマイクロ流体デバイス/システム

    近畿化学協会合成部会ロボット合成研究会 

    Presentation date: 2001.12

  • ナノボリューム空間を利用した化学/生化学マイクロシステムの研究動向

    電子情報通信学会・第5回システムLSIワークショップ 

    Presentation date: 2001.11

  • 化学・生化学マイクロシステムの研究開発の動向

    日本機械学会・宇宙工学部門:宇宙サロン 

    Presentation date: 2001.11

  • 生体物質ハンドリングのためのマイクロフローシステム

    日本化学会第80回秋季年会:ナノメカノテクノロジーとナノ・マイクロ化学の接点 

    Presentation date: 2001.09

  • Siマイクロマシン技術を用いたトータルアナリシスシステムとDNAチップ

    応用物理学会・第29回薄膜・表面セミナー:半導体ナノテクノロジーの展開 

    Presentation date: 2001.07

  • μTASその現状と将来

    日本学術振興会超集積化デバイス・システム第165委員会、第18回研究会 

    Presentation date: 2001.01

  • Design and fabrication of micromachined chemical/biochemical systems

    1st Japan-Switzerland Bilateral Workshop on Science &amp; Technologyin Micro/Nano Scale, Riken Symp. 

    Presentation date: 2000.11

  • Improvements of an X-ray microcalorimeter for detecting cosmic rays

    Proc. SPIE Micromachining and Microfabrication 

    Presentation date: 2000.11

  • μTASのためのマイクロファブリケーション技術とマイクロ流体素子

    東洋大学 第5回バイオ・ナノエレクトロニクス研究センター・シンポジウム 

    Presentation date: 2000.11

  • 8x12 array micro reactors realizing efficient biochemical reactions

    2nd Int. Workshop on Microfactories 

    Presentation date: 2000.10

  • マイクロマシン:バイオメディカルシステム

    マイクロエレクトロニクス研究開発機構、第21回ワークショップ 

    Presentation date: 2000.08

  • 生化学システムを目的としたマイクロフローデバイス

    日本機会学会 2000年度年次総会ワークショップ: バイオMEMS 

    Presentation date: 2000.08

  • サーフェイスマイクロマシニング マルチチップサービス(SUM-MICS)の動向

    SEMIマイクロマシンセミナー、 セミコン関西 

    Presentation date: 2000.06

  • Design and simulation of particles and biomolecules handling micro flow cells with three-dimensional sheath flow

    Micro Total Analysis Systems 2000, Kluwer Academic Pub. 

    Presentation date: 2000.05

  • Multi micro reactors consist of individually temperature controlled silicon well arrays realizing efficient biochemical reactions

    Micro Total Analysis Systems 2000, Kluwer Academic Pub. 

    Presentation date: 2000.05

  • FlumeCADを用いた生化学フローデバイスの設計

    電気学会全国大会シンポジウム 

    Presentation date: 2000.03

  • マイクロマシンの実用化・標準化とそのインフラストラクチャ:実例紹介(2)早稲田大学における取り組み

    電気学会全国大会シンポジウム 

    Presentation date: 2000.03

  • マイクロ化学分析システムのためのマイクロフルィディクス

    日本化学会第78春季大会,特別企画「ダウンサイジングケミストリー」 

    Presentation date: 2000.03

  • マイクロチップ電気泳動の基板技術:マイクロマシーニングとマイクロ流体制御デバイス

    第19回キャピラリー電気泳動シンポジウム 

    Presentation date: 1999.12

  • マイクロ-TASの実際と展望:マイクロ流体素子およびシステム

    神奈川科学技術アカデミー教育講座 

    Presentation date: 1999.12

  • Integrated Mixing/Reaction Micro Flow Cell for Chemical and Biochemical Applications

    Proc ASME Int. Mechanical Engineering Congress &amp; Exposition, MEMS 

    Presentation date: 1999.11

  • Partly Disposable Switching and Injection Microvalves for Medical Applications

    Proc ASME Int. Mechanical Engineering Congress &amp; Exposition, MEMS 

    Presentation date: 1999.11

  • Micromachine Technologies for Micro Total Analysis Systems (uTAS)

    Int. Symp. On Capillary Chromatography, Gifu 

    Presentation date: 1999.11

  • Fabrication for Fine Metal Microstructures Packaged in the Bonded Glass Substrates

    Proc. SPIE Design, Characterization and Packaging for MEMS and Microelectronics 

    Presentation date: 1999.10

  • Micro Flow Devices and Micro Systems for Chemical and Biomedical Applications

    The 1999 Joint Int. Meeting, Electrochem. Soc., Hawaii, 

    Presentation date: 1999.10

  • Development of a High Enagy Resolution X-ray Microcalorimeter Using Ti-Au TES

    Proc. SPIE Design, Characterization and Packaging for MEMS and Microelectronics 

    Presentation date: 1999.10

  • Microfabrication Technologies and Micro Flow Devices for Chemical and Bio-chemical Micro Flow System

    1999 Int. Microprocess and Nanotechnology Conf., Yokohama 

    Presentation date: 1999.07

  • マイクロフローシステムとその微細加工技術

    Science &amp; Technologyスクエアー(財)日本産業技術振興協会 

    Presentation date: 1999.06

  • マイクロ化学分析システム(mTAS)の最新動向

    電気化学会(化学センサ) 

    Presentation date: 1999.03

  • Micromachine technologies and micro flow devices for chemical and bio-chemical micro flow systems

    Proc. Int. Workshop on microfactories 

    Presentation date: 1998.12

  • Low Temperature HF Bonding and Micropackaging for Microsystems

    Microstructures &amp; Microfabricated Systems IV/ Proc.Electrochem. Soc., 

    Presentation date: 1998.11

  • Fabrication of an Integrated Mixing /Reaction Micro Flow Cell formTAS

    Proc. Micro Total Analysis Systems'98 

    Presentation date: 1998.10

  • Fabrication of Injection and Switching Valve for Whole Blood Control

    Proc. Micro Total Analysis Systems'98, 

    Presentation date: 1998.10

  • Microfabrication and Micro Flow Devices for Micro Total Analysis Systems

    Proc. Int. Trace Analysis Symposium, Tokyo 

    Presentation date: 1998.08

  • Studies on SiO2-SiO2 Bonding with Hydrofluoric Acid

    Proc. IEEE Micro Electro Mechanical Systems Workshop, Heiderberg 

    Presentation date: 1998.02

  • Studies on SiO2-SiO2 Bonding with Hydrofluoric Acid

    Proc. 11th Micro Electro Mechanical System/IEEE 

    Presentation date: 1998.01

  • A Microfabricated Reactor for Cell-Free Protein Synthesis

    Proc. 19th Int. Conf. of IEEE-EMB Society 

    Presentation date: 1997.11

  • 微小流路を用いたマイクロバイオシステム

    電子情報通信学会ソサイエティ大会 

    Presentation date: 1997.09

  • Microbiochemical Systems for Enzymatic reactions

    AIM'97/IEEE 

    Presentation date: 1997.06

  • A Very Low-Power Consumption Wireless ECG Monitoring System Using Body as a Signal Transmission Medium

    Tech. Dig. Int. Conf. on Solid-State Sensors and Actuators/IEEE 

    Presentation date: 1997.06

  • Room Temperature Glass-Glass Bonding with Hydrofluolic Acid for Micro Packaging

    Tech Dig. 15th Sensor Symposium/電気学会 

    Presentation date: 1997.06

  • Studies on Bio-Sensing Microsystems for Health Care

    XIV Int. Symp. on Biotelemetry 

    Presentation date: 1997.05

  • Mechanical Micro Flow Control Devices for Medical and Biomedical Micro Total Analysis Systems (uTAS)

    Proc. 3rd Int. Symp. on Microstructures and Microfabricated Systems/The Electrochem. Soc. 

    Presentation date: 1997.05

  • マイクロ化学分析システム(uTAS)の最近の動向

    第8回計測連合シンポジウム/日本学術会議 

    Presentation date: 1997.05

  • Anodic Bonding Below 180 C for Packaging and Assembling of MEMS Using Lithium Alminosilicate-β-Quartz Glass-ceramic

    Proc. IEEE Micro Electro Mechanical Systems Workshop 

    Presentation date: 1997.01

  • Three-way Microvalve for Blood Flow Control in Medical Micro Total Analysis Systems (uTAS)

    Proc. IEEE Micro Electro Mechanical Systems Workshop 

    Presentation date: 1997.01

  • Micromachined Micro Flow Devices for a Medical uTAS

    Proc. 2nd International Symposium on Miniaturized Total Analysis Systems uTAS96 

    Presentation date: 1996.11

  • Micromachined Components for Micro Total Chemical Analysis Systems

    1995 Int. Chemical Congress of Pacific Basin Societies/Chemical Society of Japan 

    Presentation date: 1995.12

  • LIGAプロセス

    日本ME学会雑誌BME/日本ME学会 

    Presentation date: 1995.05

  • Temperature Compenstated Piezoresistor Fabricated by High Energy Ion Implantation

    IEICE Trans. Electron./電子情報通信学会 

  • 微小電子機械システム要素材料とマイクロマシーニング

    まてりあ/金属学会 

  • Studies on Bio-sensing Microsystems for Health Care

    Biotelemetry XIV/ Tectum Verlag, Marburg 

  • Micromachining for Biosensors and Biosensing Systems

    Biosensors &amp; Their Applications, Kluwer Academic/Plenum Pub. 

  • Micro Flow Switches Using Thermal Gelation of Methyl Cellulose for Biomolecules Handling

    Dig. 11th Int. Conf. on Solid-State Sensors &amp; Actuators; Transducers’01 

  • Free Flow Electrophoresis Module for Rapid Sample Preparation

    Proc. Micro Total Analysis Systems 2001: uTAS2001 

  • Fabrication of Micro Flow Cell for Multi-Analyte Sandwich Immunoassay, Using Teflon Micro Check Valves

    Proc. Micro Total Analysis Systems 2001: uTAS2001 

  • A Particle and Biomolecules Sorting Micro Flow System Using Thermal Gelation of Methyl Cellulose Solution

    Proc. Micro Total Analysis Systems 2001: uTAS2001 

  • Prototype of Micro Flow Cell for Multi-Analyte Sandwich Immunoassay

    Proc. Microprocess &amp; Nanotechnology Conference: MNC2001 

  • Micro Flow Devices and Biomoleculer Handling in Micro Flow Channels

    Proc. 1st Int. Symp. On Ultramicrochemical Process: ISUP 2002 

  • Fabrication and Evaluation of Amperometric Sensors for Micro Flow Cell using 3-D Comb Electrodes

    Dig. Int. Microprocesses and Nanotechnology Conf.; MNC2002 

  • Biomolecules Sorting System using Thermal Gelation of a Methyl Cellulose Solution

    Dig. Int. Microprocesses and Nanotechnology Conf.; MNC2002 

  • A Novel Biomolecule Sorter Using Thermosensitive Hydrogel in Micro Flow Systems

    Proc. Micro Total Analysis Systems 2002; uTAS2002 

  • Design and Fabrication of Metal Electrode Implanted PDMS Structure for Micro Flow Device

    Proc. Micro Total Analysis Systems 2002; uTAS2002 

  • Optimal Design of the Micromixer using Nonhomogeneous Laminar Flow

    Proc. Micro Total Analysis Systems 2002; uTAS2002 

  • Ultimate Device Scaling versus New System Integration; Biochip and MEMS

    2002 Int. Conf. On Solid State Devices &amp; Materials: SSDM2002 

  • Micro Flow Cell for Sequential Sandwitch Immunoassay Using Passive Microvalves

    The 7th World Congress on Biosensors, Biosensors 2002 

  • Fabrication of an X-ray Microcalorimeter with an Electrodeposited X-ray Microabsorber

    Low Temperature Detectors, American Institute of Physics 

  • Micro flow systems for chemical and biochemical applications

    Electrochemical Microsystem Technologies, Tayler &amp; Francis, London 

  • Superconducting feedthrough using Sn electrodeposition for integration of low temperature detector

    Proc. 20th Sensor Symposium, IEEJ 

  • A permanent magnet embedded on-chip PDMS devices for biomolecular separating systems

    Proc. 20th Sensor Symposium, IEEJ 

  • Multiple flow switch using stepwise sheath flow

    16th Int. Microprocesses &amp; Nanotechnology Conf.: MNC2003 

  • A via hole based superconducting wiring method for enhanced X-ray image sensors

    16th Int. Microprocesses &amp; Nanotechnology Conf.: MNC2003 

  • In-plane digital sorting of flow-through droplet phase microfluidics

    7th Int. Conf. On Micro Total Analysis Systems: uTAS2003 

  • PDMS microfluidic devices with PTFE passivated channels

    7th Int. Conf. On Micro Total Analysis Systems: uTAS2003 

  • In situ cell monitoring on a microchip using time-resolved fluorescence anisotropy analysis

    7th Int. Conf. On Micro Total Analysis Systems: uTAS2003 

  • Micro-sorting device with T-Shaped channel by using gelled mebiol

    8th Int. Conf. On Commercialization of Micro and Nano Systems; COMS2003 

  • Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber

    Low Temperature Detectors 10 

  • 3-D micromesh structures consisting of high aspect ratio tilted micropillars and their applications for micro flow devices

    High Appect Ratio micro-Structures Technology; HARMST’03 

  • A novel in-plane digitalization of multiphase microfluids

    12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems: Transducers’03 

  • 3-D comb electrodes for amperometric immuno sensors

    12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems: Transducers’03 

  • Prototype of the multi-pixel X-ray microcalorimeter

    12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems: Transducers’03 

  • Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly

    12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems: Transducers’03 

  • A disposable, dead volume-free and leak-free monolithic PDMS microvalve

    12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems: Transducers’03 

  • Integrated micro chamber for living cell analysis with negligible dead volume sample injector

    12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems: Transducers’03 

  • Development of the multi-pixel x-ray microcalorimeters

    Proc. Int. Conf. Nanotech 2003 

  • Fabrications of micro-channel devices by hot emboss and direct bonding of PMMA

    Int. Conf. On MEMS, Nano, and Smart Systems 

  • Feasibility studies on stepwise sheath flow using micro PIV

    Asia-Pacific Conf. Of Transducers and Micro-Nano Technology 2004 

  • High efficiency electrochemical immuno sensors using 3-D comb electrodes

    8th World Congress on Biosensors 

  • SU-8 micromesh array structure 2 um pore size for bio/chemical microstructure

    205th Meeting of Electrochemical Soc. 

  • Fabrication of 3D Comb Electrodes Using Magnetic Alloy for High Efficiency Immuno Sensors

    205th Meeting of Electrochemical Soc. 

  • Specific flow control systems using IR laser induced sol-gel transfer of hydrogel

    NSTI Nanotechnology Conference and Trade Show: Nanotech 2004 

  • High aspect ratio nanovolume glass cell array fabricated by area-selective silicon electrochemical etching process

    17th Int. Conf. On Micro Electro Mechanical Systems: MEMS 2004 

  • Functional 3-D PDMS microchannel having slanted grooves embedded walls realizing spiral flow

    17th Int. Conf. On Micro Electro Mechanical Systems: MEMS 2004 

▼display all

Specific Research

  • 細胞内微小サンプル計測を目的としたマイクロ・ナノドロップレットハンドリング

    2019  

     View Summary

    Based on microfluidic engineering developed in our laboratory, multiplex interfaces between specific multiple source reagents can be formed in micro channels. These flows enable functional chemical synthesis which is difficult in conventional methods. Actual synthesis of azo complex using micro droplet was realized in short time under the temperature and pH control free conditions. For bromine addition reaction, a multiplex pillar array micro flow device was applied. Using iron modification of the pillar surfaces, double addition reaction of Br was confirmed. Miniaturization of micro droplet have been continued to achieve analysis of micro scale targets in biological cells.

  • 希少サンプルの特異的ハンドリング技術の創成と単一細胞内生体分子計測への応用

    2016  

     View Summary

    本研究では、「マイクロスケール~サブミクロンスケールの壊れやすい微小サンプル(固体/液体)の選択的ハンドリングと処理をマイクロ流体デバイス技術により行う事」を目的とした。まず、マイクロ流体デバイスを応用した超小型液体クロマトグラフィーチップを新規に開発し、血漿内タンパク質のこれまでにない高感度な検出を実現した。次に、これを応用して一細胞内たんぱく質の検出と分離にも成功した。また、三次元シースフローの応用デバイスとして縦方向に自由な断面形状が形成可能なチップの開発に成功し、これを応用した機能性微小ファイバーの作製を実現し、本ファイバーを利用した組織再生研究に道を開いた。

  • 冗長性/拡張性を持つ革新的マイクロ流体システムの構築-ライフサイエンスへの展開-

    2014   関口 哲志

     View Summary

    本研究では、マイクロ流体デバイスの要素技術をシステム化することを念頭に「冗長性/拡張性を持つ革新的マイクロ流体システムの構築」について研究を行った。まず、多種類のドロップレットを順序良く並べ、必要な場所で融合させるマイクロ流体システムの開発に成功した。次に、ナノ粒子(QD)とたんぱく質をそれぞれ内包した異なる2種類のドロップレットを融合させ、その内部のナノ粒子がたんぱく質と反応する経時変化をリアルタイムに観察可能なシステムの開発に成功した。さらに、三次元シースフローを応用して人工血管の元となる血管内皮細胞を使った環状構造を作製し、その後培養を行うことにより実際に毛細血管の作製に成功した。

  • 三次元ナノマイクロデバイス、ナノマイクロセンサ作製の為の新規プロセス技術の創製

    2013   関口 哲志

     View Summary

    本研究では、「三次元ナノマイクロデバイス、ナノマイクロセンサ作製の為の新規プロセス技術の創製」を行い、構築された技術が実際のバイオメディカル分野や化学分野で応用可能かどうかの検証を行った。そのための基盤技術として、マイクロ流体デバイスを用いたマイクロドロップレットの操作技術の確立に主眼をおいた。マイクロドロップレットは、その内部に細胞やバクテリア、ナノ粒子や種々の化学物質等を抱合したままマイクロ流体デバイス内を搬送させることが可能であり、また、任意の位置で融合/破砕/取り出しが可能なため、近年盛んに研究がおこなわれている。当該技術の確立のために必要な要素技術は、マイクロドロップレットの作製技術、融合技術、流しわけ技術であり、これらの技術の確立を中心に検討を行った。従来もこれらの個々の技術を実現可能なデバイスは報告されているが、デバイス作製のためのプロセス技術やデバイス構造が煩雑であり、また、応用の範囲がきわめて限定されているものが大多数である。本研究では、コストを含めていかに簡単にデバイスを製作可能かおよびデバイス構造自体がいかにシンプルかという点に主眼をおいて研究を行った。まず、自由なサイズのマイクロドロップレットをシンプルなマイクロ流体デバイス構造で作製することを試み、エアバルブのコントロールのみでドロップレットのサイズが100倍以上可変可能なデバイスの実現に成功した。(参考文献リスト1)次に、シンプルなマイクロ流体デバイス構造で複数のドロップレットを融合することを試み、8個までの任意の大きさのドロップレットを一度に融合可能なデバイスの実現に成功した。(参考文献リスト2)さらに、これらのドロップレットを大きさ別に流し分ける技術の確立について、パッシブソーティングという新しい技術を確立し、柔らかいマイクロドロップレットを外力で破壊することなく、自動でソーティングが可能なデバイスの実現に成功した。(参考文献リスト3)最後に、上述の技術を用いて実際にゲルドロップレットを作製し、その内部に細胞を一つずづ導入し、ゲルドロップレットに細胞が入ったままで培養することを試み、これに成功した。(参考文献リスト4)以上のように、本研究ではマイクロ流体デバイス内でのマイクロドロップレットの操作技術に関して、従来は実現されていなかったシンプルなデバイス構造での作製技術、融合技術、流しわけ技術の確立に成功し、そのバイオ応用の可能性まで示した。

  • 疑似細胞構築のためのマイクロ/ナノ流体システム

    2011   関口 哲志

     View Summary

    マイクロ流体デバイス内において細胞やオルガネラ、DNA等のバイオサンプルを取り扱う場合、対象サンプルが微小化、希少化するとともに、サンプルのロスレスなハンドリング技術が重要となり、また、微小サンプルから検出される各種シグナルも弱くなるため、センシングの高感度化も必要となる。本研究では、希少サンプルのハンドリングおよび検出を行うための要素技術について基礎検討を行った。ハンドリング技術として三次元シースフローのバリアブルなコントロールについて検討を行い、簡単な構造のデバイスを用いてシースフローの位置と断面積の制御技術を確立した。本技術の確立により、従来微妙な流量制御が必要であった三次元シースフローの汎用化への道が開けた。本技術を使用し、今まで検出・分離の困難であったGFP発現酵母の高精度な分離を実現した。ドロップレットのパッシブなハンドリング方法についても検討し、マイクロ流路に簡単な溝を掘るだけで、大きさの違うドロップレットが表面エネルギーの差により自動的に流しわけされることを示した。これにより、外力を受けることなくドロップレットのソーティングが可能な事が示され、ドロップレットのダメージレスソーティングに道を開いた。さらに、2層PDMSデバイスを圧縮空気でコントロールすることにより、ドロップレットのデジタル融合が可能なことを示した。これにより自由な大きさのドロップレットの作製が容易に可能になり、その応用の可能性を広げた。センシング技術に関しては、まずマイクロドロップレット生成デバイスを応用してマイクロレンズを作製し、これをアレイ上に配置することにより、インラインでの集光の可能性を示した。また、XeF2を使ってエッチングしたSiを鋳型として使い、マイクロガラス流路中にたくさんのガラスレンズを簡単に作製する手法を新たに確立し、従来ではプロセスの複雑さから実用性が疑問視されていた、ガラスレンズアレイによる高感度センシングシステムの可能性を示した。

  • マイクロ・ナノ流体システム実用化の為のインターフェース技術の開発

    2010   関口哲志

     View Summary

    マイクロ流体デバイス内において細胞やオルガネラ、DNA等のバイオサンプルを取り扱う場合、対象サンプルが微小化、希少化するとともに、サンプルのロスレスなハンドリング技術が重要となり、また、微小サンプルから検出される各種シグナルも弱くなるため、センシングの高感度化も必要となる。本研究では、希少サンプルのサンプリング、ハンドリング、検出を行うための要素技術について基礎検討を行った。希少バイオサンプルをマイクロ流体デバイス中でハンドリングする場合、流体デバイス内の壁にサンプルが付着してしまうのを防ぐため、マイクロドロップレットで包み込んで搬送する等の工夫が必要である。そのため、マイクロ流体中で種々のサイズ(25umから300um)の微小ドロップレットを安定かつ大量に作製するとともに、これをPDMSバルブを用いて破壊することなく5流路に流しわけるシステムの開発を行い、種々のサイズのドロップレットの作製と流しわけに成功した。また、マイクロ流体デバイス中でハイドロゲルのSOL-GEL反応を用いて、大腸菌の高速な流しわけにも成功した。これらの要素技術を応用して一つのドロップレットにひとつずつ酵母を入れマイクロ流路中を搬送・流しわけすることを試み、現在までにある程度の歩留まり(70%程度)で搬送と流しわけに成功している。センシングに関しては、まずマイクロドロップレット生成デバイスを応用してマイクロレンズを作製することに成功し、発光現象に対するインラインでの集光の可能性を示した。また、マイクロガラス流路中にたくさんのピラーを簡単に作製する手法を新たに確立し、従来ではプロセスの複雑さから実用性が疑問視されていた、ガラスピラーを光ファイバーとする高感度センシングシステムの可能性を示した。

  • ナノエレクトロニクスを基盤とした細胞内微小器官・再構築ナノ空間システムの創成

    2006  

     View Summary

    細胞機能解析のため細胞培養と試薬導入による細胞の変化をリアルタイムで計測するマイクロセルを開発している。大量の情報を短時間で収集するため8マイクロウエルを並列化し、それぞれにほぼ同数の細胞を分配導入するマイクロ流体デバイスを試作した。有限要素法を用いた流体解析の手法を有効に活用することにより、流路構造を最適化しほぼ目的の分配が可能なデバイスを作成できた。細胞内タンパク質の機能を維持したまま取り出すことを目的に、PDMSマイクロバルブを用いた細胞破砕デバイスを新たに開発した。これを用いて、特異的に染色したミトコンドリア持つ細胞をマイクロ流路中で捕捉し、個々のミトコンドリアを観察しつつ細胞破砕を行った。本方法では破砕後もミトコンドリアが脂質二重膜構造を維持しており、ミトコンドリアに対しダメージの少ない破砕方法であることが確認された。これにより、個々の細胞を観察しながら、タンパク質の機能を維持しつつ細胞外に取り出すことが初めて可能となった。有限要素法を用いた流体解析の手法を有効に活用することにより1入力-2出力の生体分子ソーティングシステム流路構造の最適化を行った。また、サンプル流の両側をキャリア流ではさむ形のシースフローを取り入れることにより、ゾル・ゲル相転移に伴う微小領域の僅かな粘度変化を利用してソーティング可能なデバイスを新規に開発した。これにより、ゾル-ゲル相転移速度のみに律速則される高速ソーティングが可能となった。入力部分に3次元的なシースフローを取り入れることによりサンプル流を底面に絞ることで、ターゲット粒子の分布を流路底面付近に集束させ、生体分子を一個ずつ確実に検出するように工夫した。これらの流路構造の最適化により、検出から分離まで5ミリ秒以内で行える高速ソーティングを実現し、ソーティングエラーも大幅に減少させた。

  • Microfluidicsを応用した微小流体制御デバイスの開発

    1998  

     View Summary

    マイクロマシーニング技術により作られる微小流路内で慣性力に比べ、粘性力の影響が大きくなるため流れは層流となる。このような流れはMicrofluidicsと呼ばれ化学分析システムなど、流体システムのマイクロ化に重要な意味を持つ。本研究では対象となる液体と流路の材料との界面状態を考慮し、“Microfluidics”の特質を十分生かした微小流体制御デバイスの研究を行った。まず、シリコン、ガラスなどの無機材料、ポリマー材料など表面性質や形状の異なる微小流路を作成し、全血の流れを観察した。その結果、表面化学基の極端に少ないパリレン膜を表面とし、流路の曲がりに曲率を持たせることが血栓や血液の凝固を防ぐ上で効果があることが確かめられた。また、血液の分析を目的としたマイクロ液体システム実現のため、空気圧で駆動するニューマチック型アクチュエータ部分を分離できる構造を持つ実用的なものである。次に、化学分析システムとして必要な要素である混合器、反応器集積化したマイクロフローセルを“Microfluidics”の特性を利用し設計、試作、評価した。特に2種類の液体を混合する機構では効率化を計るために多数のマイクロノズルから試薬が噴出する構造を採用し、その製作にシリコンの陽極化成によるマクロポーラスシリコン形成技術を応用した。また、SAWデバイスによる超音波振動を混合に利用することについても検討した。反応部分はp-n接合温度センサと金属薄膜マイクロヒータを一体化したシリコンマイクロセルを形成し、精密な温度制御を実現した。これらの要素をガラス基板上に配置し、互いの熱絶縁を実現するとともに流路をできる限り一定の断面積となるようにしたマイクロフローセルを製作し、効率の良い混合・反応が行なえることを確かめた。

  • アクチュエータ集積型宇宙線マイクロセンサの開発

    1997  

     View Summary

    本研究では人工衛星に搭載される小型軽量の宇宙線検出システムの開発を目標として、X線検出用ボロメータの基礎研究を行なった。従来のボロメータでは熱容量と熱絶縁の問題からセンサの感度に限界があり、個々の入射宇宙線を計測できるセンサの実現は不可能であった。そこで、電気的素子のセンサと機械的素子のアクチュエータの融合により放熱機構を持ったマイクロセンシング機構を開発することを目指した。以下に、本研究で得られた成果を箇条書きで示す。 1.シリコン異方性エッチング技術を検討し、プロセスを工夫することにより、温度センサを持つX線受光部を5μm厚の薄い梁構造で支える熱絶縁された微小構造体の製作技術を確立した。この方法では梁構造の残留応力による歪をほとんど生じないため、熱絶縁構造を必要とする他のマイクロセンサ製作にも有効である。2.X線センサは絶対零度付近で使用するため、この温度範囲で感度の高い温度センサが不可欠である。このためシリコンにp型不純物を拡散したタイプのSi熱電対を製作し、濃度-感度依存性を測定した。その結果、温度Tの約4乗に比例する出力を発生する高感度な温度センサとなる温度センサが実現できた。3.個々の入射宇宙線を検出するためには高感度の温度センサを実現するだけではなく、センサ部を定期的に冷却する放熱機構が必要となる。そこで、極低温でも有効に動作するマイクロアクチュエータについて検討したが、低温度での熱伝導など実用上の問題があり、放熱機構の再検討を行なっている。4.当該マイクロセンサは将来人工衛星に搭載することを目的としており、今後とも宇宙科学研究所のグループと共同で開発を続けて行く予定である。1998.3.26 電気学会・工藤、庄子、他・電気学会全国大会・宇宙放射線計測用高感度X線マイクロボロメータの開発・3-673・pp221-222

  • 健康管理を目的としたマルチメディア時代の生体情報計測・通信システムの基礎研究

    1996  

     View Summary

     本研究では、マルチメディア時代の情報通信網を利用した健康管理を目的とする生体情報計測・通信システムの実現を目指しその基礎研究を行った。まず、心電計測用マイクロシステムについては直接体を流れる微弱電気信号を伝送に用い手首などに装着できる小型中継器を介して送信する新しいテレメトリシステムの試作した。また、それをもとにシステムの改良を行い、雑音を低減でき良好な心電位波形計測が行えるようになった。また、通信の多重化についても検討し、多数のセンサを用いたマルチセンシングの可能性を確かめた。カプセル型マイクロシステムについてはシリコンを基板とした電界効果型トランジスタイオンセンサ、ピエゾ抵抗型圧力センサ、ダイオード型温度センサを一体化したマルチセンサを用いたシステムの設計・試作し、特性を評価した.従来のカプセル型システムに比べ大幅に小型化が可能であるという知見を得た。

  • 超高速流測定用マイクロフローセンサー

    1995  

     View Summary

    本研究では超高速流の計測を目的とて流れにより生じる揚力を利用した新しい翼型マイクロフローセンサーを提案し,その基礎研究を行った。以下に本年度の成果を述べる。1. 超高速流計測翼型マイクロフローセンサーの設計,試作 流体力学,航空力学をもとに高速流体において効率良く揚力を受ける翼の設計を行い,数種類の翼形状を決めた。微小構造体では粘性の影響が大きいため,構造よりも翼表面の形状が揚力発生に寄与することが予想された。そこで,翼表面に種々の形状の凹凸を形成し,翼表面と裏面における流速の差を大きくし揚力を得る翼を考案し,翼の表面積を変化させ実際の微小翼パターンを設計した。また,マイクロマシーニング技術の一つである高濃度ボロン拡散層を用いた洗濯エッチング技術を応用した製作プロセスにて微小構造体の試作を行った。このときボロン拡散などにおける残留応力の影響で構造体が破壊したり,反りが生じたりという問題があり,この応力を緩和するため高温アニールをするなど製作プロセスの改良をすすめている。2. 有限要素法流体シミュレーションによる揚力解析 微小翼の周りの気体の流れについて有限要素法を用いた流体シミュレータを用いて解析を行い,翼弦長により揚力が大きく変化することを確認した。また,高速流になると翼と流路壁との距離により流体が影響を受けることがわかり,センサを設置する流路の形状の設計の参考とした。3. 微小流路内の流れの測定 マイクロマシーニングで微小な流路を形成し,印可圧力と流量から粘性の影響を測定した。この実験の成果の一部をPACIFICHEM '95のMicro Total Analysis System Symposiumにおいて紹介した。 今後,これまで得られた成果をもとに翼型マイクロフローセンサを改良,試作して特性を測定しその結果について学会および論文誌に発表する予定である。

▼display all

 

Syllabus

▼display all